CA1170315A - Vacuum-arc plasma apparatus for producing coatings - Google Patents
Vacuum-arc plasma apparatus for producing coatingsInfo
- Publication number
- CA1170315A CA1170315A CA000378498A CA378498A CA1170315A CA 1170315 A CA1170315 A CA 1170315A CA 000378498 A CA000378498 A CA 000378498A CA 378498 A CA378498 A CA 378498A CA 1170315 A CA1170315 A CA 1170315A
- Authority
- CA
- Canada
- Prior art keywords
- cathode
- solenoid
- consumable
- tubular anode
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
- H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
ABSTRACT
The invention comprises a tubular anode, a consu-mable cathode with a working end portion and an igni-ting electrode for forming a cathode spot of an arc dis-charge on the consumable cathode, both elements being disposed coaxially within the tubular anode, a solenoid encircling the tubular anode and disposed coaxially therewith. The solenoid is so disposed relative to the tubular anode, the consumable cathode and the igniting electrode that it projects beyond the igniting electrode at the side opposite to the working end portion of the consumable cathode by a distance exceeding half a length of the portion of the solenoid, disposed around the con-sumable cathode. The number of turns per length unit of the portion of the solenoid, disposed around the consu-mable cathode, is greater than the number of turns per length unit in the remaining portion of the solenoid.
The invention is utilized for producing coatings.
The drawing given in the specification.
The invention comprises a tubular anode, a consu-mable cathode with a working end portion and an igni-ting electrode for forming a cathode spot of an arc dis-charge on the consumable cathode, both elements being disposed coaxially within the tubular anode, a solenoid encircling the tubular anode and disposed coaxially therewith. The solenoid is so disposed relative to the tubular anode, the consumable cathode and the igniting electrode that it projects beyond the igniting electrode at the side opposite to the working end portion of the consumable cathode by a distance exceeding half a length of the portion of the solenoid, disposed around the con-sumable cathode. The number of turns per length unit of the portion of the solenoid, disposed around the consu-mable cathode, is greater than the number of turns per length unit in the remaining portion of the solenoid.
The invention is utilized for producing coatings.
The drawing given in the specification.
Description
li7()315 ~ VACU~-AR~ A~ APPl~RATU~
The invention relates to vacuum-arc plasma appara-tu3 and can be utilized for application of metallic coa-ting~, cleaning and pickling surfaces, spraying a getter material.
In the vacuum evaporization of metals such coating~
as anticorrosive, wear-re~istant, refractory, antifric-tion, superconductive, optical etc. are produced.
Vacuum application of coatings can be carried out by means of an electron-beam apparatus wherein metal vapour is formed in evaporization of metals from cruci-bles by an electron beam. The use of crucibles does not permit producing coatings from refractory metals. Moreo-ver, the coatings thus obtained are contaminated by a crucible material.
The vacuum-arc plasma apparatus makes it possible to produce pure coatings from any metals, refractory ones among them.
In ~uch an apparatus a consumable cathode i~ eva-porized by means of an arc discharge, a plasma flow of the metal being evaporized is formed, said metal being in a highly ionized state at a high value of energy and concentration of particles, and in the following conden-sation thereof forming a coating.
Vacuum-arc plasma apparatuses create a diverging 117()315 plasma flow of a material being evaporized, the coeffi-cient of utilization of the pla~ma flow in the applica-tion of coatings i~ low. The pla~ma flow of the materi-al being evaporized i8 to be focused to produce coatings.
Known in the art i~ a vacuurn-arc apparatu~ (USSR
Author'~ Certificate No. 416,789), compriqing a consu-mable cathode, an anode dispo~ed coaxially therewith, and an igniting electrode.
An arc di~charge between the con~umable cathode and anode i8 excited by means of the igniting electrode.
The consumable cathode generate~ a wide divergent flow of metallic plasma, the efficiency of utilization of the material being evaporized for producing coating~
is low. For thi~ rea~on the utilization of the above apparatus for vacuum metallization is inexpedient.
Also known in the art is an impuls generator of metallic plasma (A.S.Gilmour, D,L.Lochwood, Pulsed me-tallic-plasma generators, Proc. IEEE, 60, 8, 977, 1972~, compriqing a consumable cathode, a solenoid dis-posed coaxially therewith, an anode di~posed within the ~olenoid and an igniting electrode. The igniting elec-trode enclrcles the con~umable cathode and is separated therefrom by an insulator. The ignition of an arc dis-charge i~ accompli~hed by a ¢urrent pulse cau~ing eva-porization of a co~ductive film from the ~urface of said inqulator. The film i~ re~tored during the burning ll~ ~;~iS
of the arc discharge, The flow o~ metallic plasma, gene-rated by the consumable cathode, is focused by an a~ial-ly-~nmetrical magnetic field o~ the solenoid, thereby acquiring a narrower directional diagram.
The above apparatus increases the efficiency of utilization of the evaporized material of a con~u~ble cathode. However, an increase in the flow of the evapo-rized material of a _onsumable cathode at the outlet of the apparatus i9 limited by a partial reflection of ions from a magnetic barrier created at the end~ of the sole-noid. Moreover, the above generator is not ~uitable for operation in a ~tationary operation mode because of de-sign feature~ of the igniting electrode.
Known in the art is a vacuum-arc pla~ma apparatus allowing the efficiency of utilization of the evaporized material of a con~umable cathode to be increa~ed in a stationary operation mode (I.I.Aksenov, V.G.Padalka, V,T,Toloka, V.M,Khoroshikh, Fokusirovka potoka metalli-cheskoi plazmy, generiruemogo statsionarnym erozionnym elektrodugovym uskoritelem, Sb."I~tochniki i uskoriteli plazmy, Vyp. 3, Kharkov, 1978, ~.45-50).
The apparatus comprises a con~umQble cathode pro-vided with a working end portion, a solenoid being co-a~ial therewith, a tubular anode dispo~ed within the ~o-lenoid, and an igniting electrode.
In thi~ apparatus, the igniting electrode e~cites li7~315 an arc discharge. The flow of metallic pla~ma, genera-ted by the con~umable cathode, i~ focused by an a2ially--~ymmetric field of the ~olenoid. Such an arrangement permit~ obtaining a narrower directional diagram of the metal being evaporized and increa~ing the efficiency of utilization thereof.
However, in the above device a portion of the ion component of the plasma fiow i~ reflected from an elec-tromagnetic barrier occuring in the operation of the de-vice due to the deviation of magnetic lines of force at the end o~ the ~olenoid, ~aid portion missing the ~ub-~trate. Another disadvantage of the above device i8 an un~table ignition and burning of the arc diocharge, which can be explained by the following rea30ns. In the case of location of the igniting electrode at the wor-king end portion of the con~umable cathode there occur failure~ in the operation becau~e of the damage of the lgniting electrode cau~ed by a ~tationary arc di~charge~
The igniting electrode being disposed at a side ~urface of the consumable cathode, the stability of the ignition proce~s i~ disturbed ~ince a cathode ~pot being e~cited on the side surface is thrown by the magnetic field of the solenoid to the side opposite to the working end portion of the consumable cathode. Such "throwing a~ide"
terminate~ with extinction of the arc di~charge. ~ponta-neous "running~-out" of the cathode spot from the wor-l.t~7( )315 king end portion of the consumable cathode to the ~ide~urface thereof terminate i~ a ~imilar ~a~.
~ he object of the invention is the provision of a vacuum-arc plasma apparatus ~herein a solenoid i~ ~o constructed and di~posed that the eificiency o~ utili-zation of the evaporized material of a consumable ca-thod i~ increaRed an~ stable operation of the appars-tus is upgraded.
The above object o~ the i~s~tion i~ attained b~
mean8 Or an apparatu~ including a tubular anode, a con-~umable cathode pro~ided with a working end portion and disposed withi~ the tubular anode in a coaxial relati-onship there~ith; an i8nitine electrode ~or iormi~g a cathode spot on the con~umable cathode and dispoRed ~ithIn the tubular anode; a ~olenoid encircliDB the tu-~ular anode and di~po~ed coRxially there~ith and pro-~ecting beyond the i~niting electrode at the side oppo-~ite to the wor~ing end portion of the co~sumable ca-thode to a length exceeding half a length o~ the por-tion of the ~olenoid ~hich is di~o~ed around the con-~umable cathode, and ha~rine a number of turn~ per len~th unit of the portion of the solenoid ~hich i8 di~po~ed around the con~umable cathode, e~:ceeding tho number Or turns per length unit of the remaining portion of the ~olenoid~
l ~'~'( );~lS
Such an arrangement make~ it po~sible to obtain a magnetic field who~e maximum i8 ~hifted from the igni-ting electrode to the side oppo3ite to the working end portion. Therefore, in the proce~s of operation of the apparatu~, the plasma flow generated by the consumable cathode is injected into a longitudinal axially-~ymmet-rical magnetic field with a "plug" beyond the working end portion of the con~umable cathode. The pla~ma flow, not meeting a retarding potential barrier on its path, pa~ses to the apparatus outlet without any ob~tacles.
Moreover, equipotential surface~ which are positive re-lative to the consumable cathode and converge beyond the igniting electrode at the side oppo~ite to the working end portion of the consumable cathode, provide a suffi-ciently effective reflection of the ion component of plasma to the apparatus outlet, and a radial constitu-ent of the electrical field e~isting in~ide the tubular anode prevents ions from drifting to the wall~.
The above arrangement of the ~olenoid further pro-vides for optimum condition~ requered for ~table igniti-on and maintenance of the arc discharge. In fact, during ignition the cathode spot i~ initiated on the side sur-face of the con~umable cathode within the region where an acute angle between magnetic line~ of force and the surface of the con~umable cathode is directed to the working end portion thereof. In accordance with the ac-~ ()3 15 u~e angle rule, the cathode spot drifts, in thi~ c~se,over the side ~urrace of t~e con~umable ca~hode toward~
the workin~ end portion thereof.
As a re~ult, practically all the ions ~enerated by the consumable cathode are transported without any lo~-se~ to the outlet of the apparatu~, thereby determining the highest e~icienc~ o~ utilization of the e~aporized material Ln the stable operation of the above apparatus.
In accordance ~ith the in~ention, the solenoid i~
expedient to be 80 constructed that the number o~ turns per length unit of the ~olenoid aroun~ the ¢on~umable cathode be at least t~o times more than thab oi the re-mainIng portion o~ the solenoid.
Inve~ti~tions ha7e demonstrated th~t the above con~idered mechaniam Or stabilization o~ the cathode ~pot i~ er~ective only in the case where the number of turns per length unit oi the ~olenoid ~round the con8umable cat-hode exceed~ the number of turns per length unit in the remaini~g portion of the ~olenoid at lea~t t~o times.
The inventivn i8 ~uIther described in greater deta-il ~ith rererence to the accompanying dra~inB in ~hich the vacuum-arc pla~ma apparatus of the in~ention i~ ~ho~m i~a a ~chemati~al ~ectional vie~-~ ~acuum-are pla~a apparatu~ ¢ompri~e~ a con~umable cathode ~ having a side ~urface 2 and a workine end po~
tion 3, a 3elenoid 4 di~po~ed cosxiall~ with the consu-mable cathode l, a tubular anode 5 disposed within the solenoid 4, an igniting electrode 6 mounted on a ceramic jumper 7, both being adjacent the side surface 2 of the consumable cathode 1, The tubular anode 5 is fixed inside a cylindri-cal body 8 whereon the solenoid 4 is mounted.
A portion 9 of the solenoid 4 encircles the con-sumable cathode l and has a length of lOO mm. More than a half of the portion 9 of the solenoid 4 (56 mm in the present case) extends beyond the igniting electrode 6 at the side opposite to the working end 3 of the consumable cathode l. The consumable cathode l and the ignitiny electrode 6 are provided with respective vacuum current inputs lO and ll passing through an end cover 12 which is mounted on the cylindrical body 8.
The cylindrical body 8 is connected with a vacuum chamber 13 wherein a substrate 14 is mounted. A
cavity 15 is provided for cooling the tubular anode 5.
A cavity for cooling the consumable cathode 1 is not shown in the drawing, An igniting-pulse generator is designated by the reference numeral 16, and a power supply for an arc discharge, by 17.
A DC power supply for the solenoid 4 is not 2S shown in the drawing, The vacuum-arc plasma apparatus operates as fol-i ~' 1.~7(j315 lows.
~ he power ~upply 17 fsr an arc discharge is ~wit-ched on. ~ext, the power ~upply for the ~olenoid 4 (not ~hown) i~ switched on and a magnetic field iq obtained, whose line~ of force are di~posed as ~hown in the dra-wing by dotted line~.
Ma~imum magnetic field intensity of the solenoid 4 i~ located in that portion thereof which i~ di~posed cloqe to the igniting electrode 6 at the ~ide opposite to the working end portion 3. ~he igniting-pulse genera-tor 16 for the igniting electrode 6 is switched on, and a ~urface ~park discharge i~ obtained over the ceramic jumper 7 of the igniting electrode 6, which discharge form~ a cathode ~pot of the arc discharge between the side ~urface 2 of the con~umable cathode 1 and the tu-bular anode 5.
Then the cathode spot drifts toward~ the working end portion 3 of the consumable cathode 1 due to the fact that, in the area where the cathode Rpot appears, the magnetic lines of force intersect the side surface
The invention relates to vacuum-arc plasma appara-tu3 and can be utilized for application of metallic coa-ting~, cleaning and pickling surfaces, spraying a getter material.
In the vacuum evaporization of metals such coating~
as anticorrosive, wear-re~istant, refractory, antifric-tion, superconductive, optical etc. are produced.
Vacuum application of coatings can be carried out by means of an electron-beam apparatus wherein metal vapour is formed in evaporization of metals from cruci-bles by an electron beam. The use of crucibles does not permit producing coatings from refractory metals. Moreo-ver, the coatings thus obtained are contaminated by a crucible material.
The vacuum-arc plasma apparatus makes it possible to produce pure coatings from any metals, refractory ones among them.
In ~uch an apparatus a consumable cathode i~ eva-porized by means of an arc discharge, a plasma flow of the metal being evaporized is formed, said metal being in a highly ionized state at a high value of energy and concentration of particles, and in the following conden-sation thereof forming a coating.
Vacuum-arc plasma apparatuses create a diverging 117()315 plasma flow of a material being evaporized, the coeffi-cient of utilization of the pla~ma flow in the applica-tion of coatings i~ low. The pla~ma flow of the materi-al being evaporized i8 to be focused to produce coatings.
Known in the art i~ a vacuurn-arc apparatu~ (USSR
Author'~ Certificate No. 416,789), compriqing a consu-mable cathode, an anode dispo~ed coaxially therewith, and an igniting electrode.
An arc di~charge between the con~umable cathode and anode i8 excited by means of the igniting electrode.
The consumable cathode generate~ a wide divergent flow of metallic plasma, the efficiency of utilization of the material being evaporized for producing coating~
is low. For thi~ rea~on the utilization of the above apparatus for vacuum metallization is inexpedient.
Also known in the art is an impuls generator of metallic plasma (A.S.Gilmour, D,L.Lochwood, Pulsed me-tallic-plasma generators, Proc. IEEE, 60, 8, 977, 1972~, compriqing a consumable cathode, a solenoid dis-posed coaxially therewith, an anode di~posed within the ~olenoid and an igniting electrode. The igniting elec-trode enclrcles the con~umable cathode and is separated therefrom by an insulator. The ignition of an arc dis-charge i~ accompli~hed by a ¢urrent pulse cau~ing eva-porization of a co~ductive film from the ~urface of said inqulator. The film i~ re~tored during the burning ll~ ~;~iS
of the arc discharge, The flow o~ metallic plasma, gene-rated by the consumable cathode, is focused by an a~ial-ly-~nmetrical magnetic field o~ the solenoid, thereby acquiring a narrower directional diagram.
The above apparatus increases the efficiency of utilization of the evaporized material of a con~u~ble cathode. However, an increase in the flow of the evapo-rized material of a _onsumable cathode at the outlet of the apparatus i9 limited by a partial reflection of ions from a magnetic barrier created at the end~ of the sole-noid. Moreover, the above generator is not ~uitable for operation in a ~tationary operation mode because of de-sign feature~ of the igniting electrode.
Known in the art is a vacuum-arc pla~ma apparatus allowing the efficiency of utilization of the evaporized material of a con~umable cathode to be increa~ed in a stationary operation mode (I.I.Aksenov, V.G.Padalka, V,T,Toloka, V.M,Khoroshikh, Fokusirovka potoka metalli-cheskoi plazmy, generiruemogo statsionarnym erozionnym elektrodugovym uskoritelem, Sb."I~tochniki i uskoriteli plazmy, Vyp. 3, Kharkov, 1978, ~.45-50).
The apparatus comprises a con~umQble cathode pro-vided with a working end portion, a solenoid being co-a~ial therewith, a tubular anode dispo~ed within the ~o-lenoid, and an igniting electrode.
In thi~ apparatus, the igniting electrode e~cites li7~315 an arc discharge. The flow of metallic pla~ma, genera-ted by the con~umable cathode, i~ focused by an a2ially--~ymmetric field of the ~olenoid. Such an arrangement permit~ obtaining a narrower directional diagram of the metal being evaporized and increa~ing the efficiency of utilization thereof.
However, in the above device a portion of the ion component of the plasma fiow i~ reflected from an elec-tromagnetic barrier occuring in the operation of the de-vice due to the deviation of magnetic lines of force at the end o~ the ~olenoid, ~aid portion missing the ~ub-~trate. Another disadvantage of the above device i8 an un~table ignition and burning of the arc diocharge, which can be explained by the following rea30ns. In the case of location of the igniting electrode at the wor-king end portion of the con~umable cathode there occur failure~ in the operation becau~e of the damage of the lgniting electrode cau~ed by a ~tationary arc di~charge~
The igniting electrode being disposed at a side ~urface of the consumable cathode, the stability of the ignition proce~s i~ disturbed ~ince a cathode ~pot being e~cited on the side surface is thrown by the magnetic field of the solenoid to the side opposite to the working end portion of the consumable cathode. Such "throwing a~ide"
terminate~ with extinction of the arc di~charge. ~ponta-neous "running~-out" of the cathode spot from the wor-l.t~7( )315 king end portion of the consumable cathode to the ~ide~urface thereof terminate i~ a ~imilar ~a~.
~ he object of the invention is the provision of a vacuum-arc plasma apparatus ~herein a solenoid i~ ~o constructed and di~posed that the eificiency o~ utili-zation of the evaporized material of a consumable ca-thod i~ increaRed an~ stable operation of the appars-tus is upgraded.
The above object o~ the i~s~tion i~ attained b~
mean8 Or an apparatu~ including a tubular anode, a con-~umable cathode pro~ided with a working end portion and disposed withi~ the tubular anode in a coaxial relati-onship there~ith; an i8nitine electrode ~or iormi~g a cathode spot on the con~umable cathode and dispoRed ~ithIn the tubular anode; a ~olenoid encircliDB the tu-~ular anode and di~po~ed coRxially there~ith and pro-~ecting beyond the i~niting electrode at the side oppo-~ite to the wor~ing end portion of the co~sumable ca-thode to a length exceeding half a length o~ the por-tion of the ~olenoid ~hich is di~o~ed around the con-~umable cathode, and ha~rine a number of turn~ per len~th unit of the portion of the solenoid ~hich i8 di~po~ed around the con~umable cathode, e~:ceeding tho number Or turns per length unit of the remaining portion of the ~olenoid~
l ~'~'( );~lS
Such an arrangement make~ it po~sible to obtain a magnetic field who~e maximum i8 ~hifted from the igni-ting electrode to the side oppo3ite to the working end portion. Therefore, in the proce~s of operation of the apparatu~, the plasma flow generated by the consumable cathode is injected into a longitudinal axially-~ymmet-rical magnetic field with a "plug" beyond the working end portion of the con~umable cathode. The pla~ma flow, not meeting a retarding potential barrier on its path, pa~ses to the apparatus outlet without any ob~tacles.
Moreover, equipotential surface~ which are positive re-lative to the consumable cathode and converge beyond the igniting electrode at the side oppo~ite to the working end portion of the consumable cathode, provide a suffi-ciently effective reflection of the ion component of plasma to the apparatus outlet, and a radial constitu-ent of the electrical field e~isting in~ide the tubular anode prevents ions from drifting to the wall~.
The above arrangement of the ~olenoid further pro-vides for optimum condition~ requered for ~table igniti-on and maintenance of the arc discharge. In fact, during ignition the cathode spot i~ initiated on the side sur-face of the con~umable cathode within the region where an acute angle between magnetic line~ of force and the surface of the con~umable cathode is directed to the working end portion thereof. In accordance with the ac-~ ()3 15 u~e angle rule, the cathode spot drifts, in thi~ c~se,over the side ~urrace of t~e con~umable ca~hode toward~
the workin~ end portion thereof.
As a re~ult, practically all the ions ~enerated by the consumable cathode are transported without any lo~-se~ to the outlet of the apparatu~, thereby determining the highest e~icienc~ o~ utilization of the e~aporized material Ln the stable operation of the above apparatus.
In accordance ~ith the in~ention, the solenoid i~
expedient to be 80 constructed that the number o~ turns per length unit of the ~olenoid aroun~ the ¢on~umable cathode be at least t~o times more than thab oi the re-mainIng portion o~ the solenoid.
Inve~ti~tions ha7e demonstrated th~t the above con~idered mechaniam Or stabilization o~ the cathode ~pot i~ er~ective only in the case where the number of turns per length unit oi the ~olenoid ~round the con8umable cat-hode exceed~ the number of turns per length unit in the remaini~g portion of the ~olenoid at lea~t t~o times.
The inventivn i8 ~uIther described in greater deta-il ~ith rererence to the accompanying dra~inB in ~hich the vacuum-arc pla~ma apparatus of the in~ention i~ ~ho~m i~a a ~chemati~al ~ectional vie~-~ ~acuum-are pla~a apparatu~ ¢ompri~e~ a con~umable cathode ~ having a side ~urface 2 and a workine end po~
tion 3, a 3elenoid 4 di~po~ed cosxiall~ with the consu-mable cathode l, a tubular anode 5 disposed within the solenoid 4, an igniting electrode 6 mounted on a ceramic jumper 7, both being adjacent the side surface 2 of the consumable cathode 1, The tubular anode 5 is fixed inside a cylindri-cal body 8 whereon the solenoid 4 is mounted.
A portion 9 of the solenoid 4 encircles the con-sumable cathode l and has a length of lOO mm. More than a half of the portion 9 of the solenoid 4 (56 mm in the present case) extends beyond the igniting electrode 6 at the side opposite to the working end 3 of the consumable cathode l. The consumable cathode l and the ignitiny electrode 6 are provided with respective vacuum current inputs lO and ll passing through an end cover 12 which is mounted on the cylindrical body 8.
The cylindrical body 8 is connected with a vacuum chamber 13 wherein a substrate 14 is mounted. A
cavity 15 is provided for cooling the tubular anode 5.
A cavity for cooling the consumable cathode 1 is not shown in the drawing, An igniting-pulse generator is designated by the reference numeral 16, and a power supply for an arc discharge, by 17.
A DC power supply for the solenoid 4 is not 2S shown in the drawing, The vacuum-arc plasma apparatus operates as fol-i ~' 1.~7(j315 lows.
~ he power ~upply 17 fsr an arc discharge is ~wit-ched on. ~ext, the power ~upply for the ~olenoid 4 (not ~hown) i~ switched on and a magnetic field iq obtained, whose line~ of force are di~posed as ~hown in the dra-wing by dotted line~.
Ma~imum magnetic field intensity of the solenoid 4 i~ located in that portion thereof which i~ di~posed cloqe to the igniting electrode 6 at the ~ide opposite to the working end portion 3. ~he igniting-pulse genera-tor 16 for the igniting electrode 6 is switched on, and a ~urface ~park discharge i~ obtained over the ceramic jumper 7 of the igniting electrode 6, which discharge form~ a cathode ~pot of the arc discharge between the side ~urface 2 of the con~umable cathode 1 and the tu-bular anode 5.
Then the cathode spot drifts toward~ the working end portion 3 of the consumable cathode 1 due to the fact that, in the area where the cathode Rpot appears, the magnetic lines of force intersect the side surface
2 of the consumable cathode 1 at an acute angle directed toward3 the working end portion 3 of the consumable ca-thode 1, and moves to the working end portion 3 while accompli~hing chaotic ~hifts.
Under the action of an electrical field whoqe form of equipotential~ i~ determined by the topography of a magnetic field, the generated plasma flow of the evapo-rized material of the consumable cathode 1 is directed completely towards the substrate 14.
The plasma flow of the evaporized material of the consumable cathode 1 i5 transported along the tubular anode 5 practically without any lo~es since the radial electric field prevent~ the drift of the ion component of plasma onto the walls of the tubular anode 5.
Under the action of an electrical field whoqe form of equipotential~ i~ determined by the topography of a magnetic field, the generated plasma flow of the evapo-rized material of the consumable cathode 1 is directed completely towards the substrate 14.
The plasma flow of the evaporized material of the consumable cathode 1 i5 transported along the tubular anode 5 practically without any lo~es since the radial electric field prevent~ the drift of the ion component of plasma onto the walls of the tubular anode 5.
Claims (2)
1. A vacuum-arc plasma apparatus, comprising:
- a tubular anode, - a consumable cathode with a working end portion and disposed within the tubular anode coaxially therewith;
- an igniting electrode for forming a cathode spot on the consumable cathode, disposed within the tubular anode;
- a solenoid, which:
- encircles the tubular anode and is disposed coaxially therewith, and - projects beyond the igniting electrode at the side opposite to the working end portion of the consumable cathode by a length exceeding half a length of the portion of the solenoid, disposed around the consumable cathode, and - has a number of turns per length unit of the portion of the solenoid, disposed around the consumable cathode, which exceeds the number of turns per length unit in the remaining portion of the solenoid.
- a tubular anode, - a consumable cathode with a working end portion and disposed within the tubular anode coaxially therewith;
- an igniting electrode for forming a cathode spot on the consumable cathode, disposed within the tubular anode;
- a solenoid, which:
- encircles the tubular anode and is disposed coaxially therewith, and - projects beyond the igniting electrode at the side opposite to the working end portion of the consumable cathode by a length exceeding half a length of the portion of the solenoid, disposed around the consumable cathode, and - has a number of turns per length unit of the portion of the solenoid, disposed around the consumable cathode, which exceeds the number of turns per length unit in the remaining portion of the solenoid.
2. An apparatus as set forth in claim 1, wherein the number of turns per length unit of the portion of the solenoid, disposed around the consumable cathode is at least two times greater than the number of turns per length unit of the remaining portion of the solenoid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU2933851 | 1980-06-25 | ||
| SU802933851A SU1040631A1 (en) | 1980-06-25 | 1980-06-25 | Vacuum arc apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1170315A true CA1170315A (en) | 1984-07-03 |
Family
ID=20899404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000378498A Expired CA1170315A (en) | 1980-06-25 | 1981-05-28 | Vacuum-arc plasma apparatus for producing coatings |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4551221A (en) |
| JP (1) | JPS6036468B2 (en) |
| BR (1) | BR8103781A (en) |
| CA (1) | CA1170315A (en) |
| CH (1) | CH655632B (en) |
| DE (1) | DE3152131C2 (en) |
| FR (1) | FR2485863B1 (en) |
| GB (1) | GB2092419B (en) |
| IT (1) | IT1171327B (en) |
| SE (1) | SE427003B (en) |
| SU (1) | SU1040631A1 (en) |
| WO (1) | WO1982000075A1 (en) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE34806E (en) * | 1980-11-25 | 1994-12-13 | Celestech, Inc. | Magnetoplasmadynamic processor, applications thereof and methods |
| CH657242A5 (en) * | 1982-03-22 | 1986-08-15 | Axenov Ivan I | ARC PLASMA SOURCE AND ARC SYSTEM WITH SUCH AN ARC PLASMA SOURCE FOR PLASMA TREATMENT OF THE SURFACE OF WORKPIECES. |
| AT376460B (en) * | 1982-09-17 | 1984-11-26 | Kljuchko Gennady V | PLASMA ARC DEVICE FOR APPLYING COVERS |
| US5096558A (en) * | 1984-04-12 | 1992-03-17 | Plasco Dr. Ehrich Plasma - Coating Gmbh | Method and apparatus for evaporating material in vacuum |
| CH664768A5 (en) * | 1985-06-20 | 1988-03-31 | Balzers Hochvakuum | METHOD FOR COATING SUBSTRATES IN A VACUUM CHAMBER. |
| US4620913A (en) * | 1985-11-15 | 1986-11-04 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition method and apparatus |
| US4873605A (en) * | 1986-03-03 | 1989-10-10 | Innovex, Inc. | Magnetic treatment of ferromagnetic materials |
| US4816291A (en) * | 1987-08-19 | 1989-03-28 | The Regents Of The University Of California | Process for making diamond, doped diamond, diamond-cubic boron nitride composite films |
| US5601652A (en) * | 1989-08-03 | 1997-02-11 | United Technologies Corporation | Apparatus for applying ceramic coatings |
| DE4006456C1 (en) * | 1990-03-01 | 1991-05-29 | Balzers Ag, Balzers, Li | Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface |
| JPH0817171B2 (en) * | 1990-12-31 | 1996-02-21 | 株式会社半導体エネルギー研究所 | Plasma generator and etching method using the same |
| US5126030A (en) * | 1990-12-10 | 1992-06-30 | Kabushiki Kaisha Kobe Seiko Sho | Apparatus and method of cathodic arc deposition |
| CA2065581C (en) | 1991-04-22 | 2002-03-12 | Andal Corp. | Plasma enhancement apparatus and method for physical vapor deposition |
| US5306408A (en) * | 1992-06-29 | 1994-04-26 | Ism Technologies, Inc. | Method and apparatus for direct ARC plasma deposition of ceramic coatings |
| US5282944A (en) * | 1992-07-30 | 1994-02-01 | The United States Of America As Represented By The United States Department Of Energy | Ion source based on the cathodic arc |
| US5480527A (en) * | 1994-04-25 | 1996-01-02 | Vapor Technologies, Inc. | Rectangular vacuum-arc plasma source |
| US5670415A (en) * | 1994-05-24 | 1997-09-23 | Depositech, Inc. | Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment |
| US5518597A (en) * | 1995-03-28 | 1996-05-21 | Minnesota Mining And Manufacturing Company | Cathodic arc coating apparatus and method |
| US6144544A (en) * | 1996-10-01 | 2000-11-07 | Milov; Vladimir N. | Apparatus and method for material treatment using a magnetic field |
| US6103074A (en) * | 1998-02-14 | 2000-08-15 | Phygen, Inc. | Cathode arc vapor deposition method and apparatus |
| US6495002B1 (en) | 2000-04-07 | 2002-12-17 | Hy-Tech Research Corporation | Method and apparatus for depositing ceramic films by vacuum arc deposition |
| US7381311B2 (en) * | 2003-10-21 | 2008-06-03 | The United States Of America As Represented By The Secretary Of The Air Force | Filtered cathodic-arc plasma source |
| US8157976B2 (en) * | 2007-04-26 | 2012-04-17 | Veeco Instruments, Inc. | Apparatus for cathodic vacuum-arc coating deposition |
| PL2585622T3 (en) | 2010-06-22 | 2018-07-31 | Oerlikon Surface Solutions Ag, Pfäffikon | Arc deposition source having a defined electric field |
| CN101956161A (en) * | 2010-08-27 | 2011-01-26 | 苏州五方光电科技有限公司 | Ion plating device |
| US9153422B2 (en) | 2011-08-02 | 2015-10-06 | Envaerospace, Inc. | Arc PVD plasma source and method of deposition of nanoimplanted coatings |
| EP2607517A1 (en) | 2011-12-22 | 2013-06-26 | Oerlikon Trading AG, Trübbach | Low temperature arc ion plating coating |
| KR101440316B1 (en) * | 2014-04-30 | 2014-09-18 | 주식회사 유니벡 | arc spot generation device for thin film coating in a vacuum chamber |
| CN111837221B (en) * | 2019-02-14 | 2024-03-05 | 株式会社日立高新技术 | Semiconductor manufacturing apparatus |
| CN110277298A (en) * | 2019-07-26 | 2019-09-24 | 江苏鲁汶仪器有限公司 | A kind of radio frequency rotary joint and the ion etching system for being provided with radio frequency rotary joint |
| UA127223C2 (en) * | 2020-09-25 | 2023-06-14 | Національний Науковий Центр "Харківський Фізико-Технічний Інститут" | THE METHOD OF CREATING A VACUUM ARC CATHODE PLASMA |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2972695A (en) * | 1957-05-24 | 1961-02-21 | Vickers Electrical Co Ltd | Stabilisation of low pressure d.c. arc discharges |
| SU307666A1 (en) * | 1968-09-09 | 1979-01-08 | Sablev L P | Electric arc metal evaporator |
| US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
| US3836451A (en) * | 1968-12-26 | 1974-09-17 | A Snaper | Arc deposition apparatus |
| SU349325A1 (en) * | 1970-10-19 | 1978-03-30 | Л. П. Саблев, Ю. И. Долотов, Л. И. Гетьман, В. Н. Горбунов, Е. Г. Гольдинер, К. Т. Киршфельд , В. В. Усов | Electric arc metal evaporator |
| US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
| US3783231A (en) * | 1972-03-22 | 1974-01-01 | V Gorbunov | Apparatus for vacuum-evaporation of metals under the action of an electric arc |
| SU563826A1 (en) * | 1975-06-04 | 1978-03-05 | Предприятие П/Я В-8851 | Device for depositing thin films |
| JPS54110988A (en) * | 1978-01-31 | 1979-08-30 | Nii Chiefunorogii Afutomobirin | Coating vacuum evaporation apparatus |
-
1980
- 1980-06-25 SU SU802933851A patent/SU1040631A1/en active
-
1981
- 1981-03-02 GB GB8203756A patent/GB2092419B/en not_active Expired
- 1981-03-02 DE DE3152131A patent/DE3152131C2/en not_active Expired
- 1981-03-02 US US06/640,554 patent/US4551221A/en not_active Expired - Fee Related
- 1981-03-02 JP JP56503490A patent/JPS6036468B2/en not_active Expired
- 1981-03-02 CH CH91282A patent/CH655632B/de unknown
- 1981-03-02 WO PCT/SU1981/000022 patent/WO1982000075A1/en active Application Filing
- 1981-05-28 CA CA000378498A patent/CA1170315A/en not_active Expired
- 1981-06-15 BR BR8103781A patent/BR8103781A/en unknown
- 1981-06-24 IT IT48744/81A patent/IT1171327B/en active
- 1981-06-24 FR FR8112420A patent/FR2485863B1/en not_active Expired
-
1982
- 1982-02-16 SE SE8200941A patent/SE427003B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CH655632B (en) | 1986-04-30 |
| DE3152131C2 (en) | 1986-09-04 |
| SU1040631A1 (en) | 1983-09-07 |
| FR2485863B1 (en) | 1986-12-12 |
| WO1982000075A1 (en) | 1982-01-07 |
| FR2485863A1 (en) | 1981-12-31 |
| JPS57500931A (en) | 1982-05-27 |
| GB2092419B (en) | 1983-12-14 |
| SE427003B (en) | 1983-02-21 |
| JPS6036468B2 (en) | 1985-08-20 |
| IT8148744A0 (en) | 1981-06-24 |
| SE8200941L (en) | 1982-02-16 |
| GB2092419A (en) | 1982-08-11 |
| DE3152131A1 (en) | 1982-08-26 |
| BR8103781A (en) | 1982-03-09 |
| US4551221A (en) | 1985-11-05 |
| IT1171327B (en) | 1987-06-10 |
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| MKEX | Expiry |