CA1217088A - Displacement device, particularly for the photolithographic treatment of a substrate - Google Patents
Displacement device, particularly for the photolithographic treatment of a substrateInfo
- Publication number
- CA1217088A CA1217088A CA000440621A CA440621A CA1217088A CA 1217088 A CA1217088 A CA 1217088A CA 000440621 A CA000440621 A CA 000440621A CA 440621 A CA440621 A CA 440621A CA 1217088 A CA1217088 A CA 1217088A
- Authority
- CA
- Canada
- Prior art keywords
- carriage part
- driving
- upper carriage
- holder
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Abstract
PHN l0.503 -9- 4.6.1983 ABSTRACT :
Displacement device, particularly for the photo-litho-graphic treatment of a substrate.
A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder. The carriage is consti-tuted by a lower and an upper carriage part, which carri-age parts each have a flat surface, these surfaces facing each other. Three linear driving members act upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing. The housing of the first driving member is con-nected to the upper carriage part, while the driving ele-ments of the second and the third driving members are coupled to the lower carriage part and the driving elements of the first driving member are connected to the housing of the second and the third driving member, respectively, the driving members being arranged in the shape of an H.
Displacement device, particularly for the photo-litho-graphic treatment of a substrate.
A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder. The carriage is consti-tuted by a lower and an upper carriage part, which carri-age parts each have a flat surface, these surfaces facing each other. Three linear driving members act upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing. The housing of the first driving member is con-nected to the upper carriage part, while the driving ele-ments of the second and the third driving members are coupled to the lower carriage part and the driving elements of the first driving member are connected to the housing of the second and the third driving member, respectively, the driving members being arranged in the shape of an H.
Description
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PIIN IO. 503 L~. 6. 1983 ., , Displacement device, particularly for the photoli-tho-graphic treatmen-t of a substra-te~
The invention relates to a displacernent device, particularly for use in an appara-tus for the pho-tolitho-graphic treatment of a substrate, which device is pro-vided with a holder which is placed on a carriage mecha-nlsm which is acted upon by driving members ~or imparting-translational movements and a rotary movement to the holder.
In many cases, the necessity arises to adjust articles with respect to each other. The invent:ion re-la-tes to a displacement device which is suitable -to pro-vide a very accura-te adjustment. An importan-t field of use is the manufacture of semiconductor devices. For example, in the manufacture of masks by means of a so-called step and repeat camera, an extremely accurate ad-justment is of great importance. Also when a pa-ttern is repea-tedly imaged on a sensitive layer on a substrate, as with op-tical and electron beam genera-tors, this high degree of accuracy is required. Of course, an accurately operating displacement device may also be used in o-tlher fields.
An example of a displaeemen-t device for use in the manufac-ture of semiconduetor deviees is disclosed in D~ 19 53 712. In this ease, a eo-ordinate earriage sys-tem is used in whieh an X-earriage is axially movable on a Y-earriage, whilst a workpiece support is axially movable on the X-carria~e. Means are further provided for causing the workpiece to perform a small -translation and rotation wi-th respect to the workpiece suppor-t so that a fine ad-jus-tment is obtainecl.
~ In this known arrangement of X-Y carriages on each other, a very accurate guiding be-tween -the -two car-riage parts and between the upper carriage ancl -the work-piece suppcrt has to be prov:ided; a small amount of v~
7(~
PHN 10.503 -2- ~1.6.1983 clearance :in the guiding may lead to inadmissible deviat-ions in the adjus-tmen-t. A displacement of the workpiece support with respect to the upper carriage results in tha-t the forces produced in -the guiding between the X-and Y
carriages and caused by the accelera-tion of the mass of the upper carriage and of the workpiece support vary, which may adversely affect the possibility of adjustment.
The coarse adjustmen-t and -the f`ine adjus-tment in the known device are effected by means of two differen-t systems, which results in a complica-ted cons-truction and provides a limitation in the speed of adjustment. The fine adjust-ment is obtained by means of adjustment elements which only have a strongly limited stroke, which renders -the positioning more difficul-t and nevertheless eauses strin-gen-t requirements to be imposed on the coarse adjustment.
The inven-tion has for its object to provide a displacement device with which a high degree of adjus-tmen-t accuracy can be obtained with a very short adjustment -time, whilst no separa-te coarse and rine adjustmen-t members are required and the cons-truction is simple, and, when no use is made of a co-ordinate earriage system with separa-te X- and Y-carriages, it can be achieved that the forces produced between the carriage parts are not unfavourably influenced upon displacemen-t of a workpiece support, while a s-table operation is obtained by a ~avourable distribut-ion of the forces produced during the displacement.
According to the invention, this objec-t is at--tained in -tha-t the carriage is consti-tuted by a lower and an upper carriage part, which carriage par-ts each have a f`lat surface, these surfaces facing each other, and -three linear driving members ac-ting upon -the carriage, which dr-iving rnembers each have a housing and a driving element which projects on both sides from -the housirng and which is axially movab:Le wi-th respect to -the housing, in that -the housing of -the f`i-rst driving rnember is connected to the u-pper carriage part, ~hile the driving elements of -the second and the third driving members are coupled wi-th -the lower carriage -par-t, and in that -the clriving elements of`
~2~7~
,, PHN 1O.5O3 -3- 4.6.1983 the first driving member are connec-ted -to -the housing of the second and the -third driving rnembers, respec-tively, the driving members being arranged in the shape of an II.
The carriage is no longer const:i-tu-ted by a co-ordinate carriage system, in which accurate guidings haveto be present between -the parts, but by two parts which are arbi-trarily movable with respect to each o-ther in a flat plane. An accurate posi-tion determination can be ob-tained by means of a measuring system~ The arrangernen-t of the driving members permits of obtaining a rapid and accu-rate adjustment. Inter alia due to the fact that the driving members are located in one plane and in the shape of' an H, a favourable distribution of` the forces acting upon the carriage is obtained.
The invention will be described with re~erence to an embodiment shown diagrammatically in the drawing.
Fig. 1 is a schematic representation of the plan view of a device according to the invention.
Fig. 2 is a side elevation, partly in sectional vie~, o~ the device.
Fig. 3 is a schematic representation of the laser-in-terferometer assembly for adjusting the position.
Figures 1 and 2 show diagrammatically an embo diment of the displacement device. The device comprises a carriage, the lower carriage part 1 of` which consis-ts of a granite plate and the upper carriage part 2 of` which consists of` an air sole. The surf`aces of` the -two carriage parts f`acing each other are f`lat. An air bearing provided by means of -the air sole, ensures tha-t the rela-tive move-ment of` the carriage parts is eff`ec-ted substantially with-out friction. Although an air bearing is to be pref`erred, it is not necessary for the sa-tisfac-tory operation of the device; lubrication with oil between the -two carriage par-ts, ~or e~ample, is also possible.
The device comprises -tlhree driving members 3,4,5 which are arranged in the shape o~ an H. The clriving mem-bers sho-wn in the drawing are hydraulic linear mo-tors, which are preferably hydrostatically Journalled. The PHN 10.503 ~ .6.1983 control means for the hydraulic mo-tors are no-t shown for tlle sake of clari-ty~ The housing 6 of tile hydraulic mo-tor 3 ensuring -the movemen-t in the ,Y-direction of the upper carriage part 2 with respect to the carriage par-t 1 is secured on -the carriage part 2 with -the aid of means not shown, for eYample, with the aid of bolt-nut joints. The movement in the Y-direc-tion is ens-ured by the driving members ~l and 5 which can also cause a ro-tary movernen-t of the carriage part 2. At bo-th ends of the housing 7 and c"
respectively, an axially movable driving e:Lement 9 and 10, respectively, proJec-ts outwards. The driving elements are shafts which are connected to a plunger present in the housing of the driving member. The ends of the shaf-ts 9 and 10 are fixedly secured -to the carriage par-t 1 ~ith -the lS aid of connection blocks 11. The driving elements l2,13 of the driving member 3 for the X-direction are pivotally secured to the housing 7 and 8, respectively, of the clriv-ing members ~,5 for the Y-direction. For this purpose, for example, two plates-1~ loca-ted one above the o-ther are se-cured to the housings 7 and 8, which pla-tes are adapted to receive a hinge shaft 15, which hinge shafts are also passed through the ends of the driving elements 12 and l3.
In order that upon angular rotation of the carriage par-t 2 the distance between -the two hinge shafts 15 can be bridged, the driving elemen-t 13 is cons-tructed as a slide shaft, as is diagrammatically shown at 16.
Preferably, a plate 17 Or a material having a low thermal coeffcient of expansion is secured on -the housing 6 of the driving member 3. Three supports 18 are provided on this plate. A reference member 19 is supported by these suppor-ts. The reference member, which preferably also consists of a material having a low coefficient of expansion, has -two or-thogonal outer surfaces 20 and 21, wh:ich have the form of mirrors. The posi-tion of -the carri-age par-t 2 with respect to the carriage part 1 can be de-terminecl wi-th great accuracy, i.e. within ~,1 /urn, by means of -these mirror surfaces in co-opera-tion with a laser-inter-ferorrie-ter assembly. ~ recess 22 is p-rovided :in -tile refe-.
L7~
PHN 10.503 -5- l;.6.1983 rence member 19. ~ holder 23 for a workpiece, for example for a subs-tra-te, in which semiconduc-tor elements are to be formed, is arranged on -the plate 17. The upper surface of the holder 23 is -the carrying surface for the subs-tra-te.
This upper surface is chosen so with respect to -the mirror surfaces 20 and 21 that it substantially coincides with the plane in which the light beams of the laser-interferome-ter assembly are located. By arranging the subs-trate jus-t at this level, optical errors in the position cLetection are avoided that may occur due to lack of planeness and conse-quently -tilting of the car-riage part 2 with respect -to the carriage part 1.
The substrate is held by the holder. This hold-ing effect is preferably obtained by means of subatmosphe-lS ric pressure in a manner known per se and no-t shown here.
Fig. 2 on the contrary shows diagrammatically the con-struction of the air sole. The upper carriage part is pro-vided with an inlet 24 for air under pressure, from which restrictions 25 lead to the flat surface facing the first carriage part 1. The air under pressure flowing ou-t of the restrictions provides an aerostatic bearing between the carriage parts 1 and 2. Further, the carriage part 2 is provided with a space 26 in which a suba-tmospheric pressure can be produced in order to provide in -this manner a desired preliminary stress for the aerostatic bearing.
If liquid is supplied to -the hydraulic mo-tor 3, the housing 6 and hence the carriage 2 in Fig. 1 will move in X-direction, to -the right or to the lef-t. A movement in -the Y-direction of the carriage is obtained by supply-ing liquid simultaneously to the motors 4 and 5 so -tha-t the housings 7 and 8 move in the same direc-tion. ~ rota-tion of the carriage 2 is ob-tained by movemen-t of the mo-tors Ll and 5 in opposite directions.
The rnotors 3, 4 and 5 are loca-ted at tthe same level above the carr:iage parts I ancL 2. This is favourable for the forces which cause the adjllstrnent of tlle carriage 1,2. The ~l arrangement of the rno-tors 3, 4 and 5 ensures that -the carriage can be adjllsted in a simple and -rapid ~LZ~7'~8~
PHN 10.503 -6- ll.6.l983 manner bo-th as to translation and as -to ro-ta-tion.
In the Figures, hydraulic li-near mo-tors are sho~n.
However, electric linear motors may also be l-Lsed. Since in linear elec-tric motors there may be a cer-tain amount O r clearance between housing and driving elemen~ts, it is then not necessary to couple the X-motor pivo-tally to -the two Y-motors, but this joint may al-ternatively be rigid.
Fig. 3 shows very diagrammatically -the means wi-tlL
the aid of which -the position of the carriage is measured with great accuracy and the motors for adjusting -the de-sired position of the carriage are con-trolled with this measurement result. Only the elements strictly necessary for the measurement are shown.
A laser 3O emits light which is guided -through inverter mirrors 31,32 to semi-transparent mirrors 33 and 34. The mirror 33, for example, transmits 2/3 of -the light and directs 1/3 of -the light through an interferometer 36 to the mirror surface 21 of -the reference member l9. The light reflected from the mirror surface 21 is in-tercep-ted by the interferometer and the light beam processed in the interferome-ter is passed -to a receiver 37 which emits an electric signal to elec-tronic processing means no-t shown.
In these processing means, the position of ~the X-direction of the carriage measured by the interferome~ter 36 is com-pared with a desired posi~tion. A difference signal, if any,is u-tilized to control the linear mo-tor 3 un-til the desired X-position is reached.
In a similar manner, -the Y-posi-tion is de-ter-mined, two light beams being used and interferometers 38 and 39 providing a position indica~tion. Receivers 4O and 41 again emi-t an electric signal -to the said processing means. 1~ith the two values of Y7 bo-th the occupied Y-posi-tion and the angle at which -the reference member 19 is ar-ranged can be determined. A difference signal, i~ any, with the desired signal is u-t:ilized to control the motors L~ and 5.
PIIN IO. 503 L~. 6. 1983 ., , Displacement device, particularly for the photoli-tho-graphic treatmen-t of a substra-te~
The invention relates to a displacernent device, particularly for use in an appara-tus for the pho-tolitho-graphic treatment of a substrate, which device is pro-vided with a holder which is placed on a carriage mecha-nlsm which is acted upon by driving members ~or imparting-translational movements and a rotary movement to the holder.
In many cases, the necessity arises to adjust articles with respect to each other. The invent:ion re-la-tes to a displacement device which is suitable -to pro-vide a very accura-te adjustment. An importan-t field of use is the manufacture of semiconductor devices. For example, in the manufacture of masks by means of a so-called step and repeat camera, an extremely accurate ad-justment is of great importance. Also when a pa-ttern is repea-tedly imaged on a sensitive layer on a substrate, as with op-tical and electron beam genera-tors, this high degree of accuracy is required. Of course, an accurately operating displacement device may also be used in o-tlher fields.
An example of a displaeemen-t device for use in the manufac-ture of semiconduetor deviees is disclosed in D~ 19 53 712. In this ease, a eo-ordinate earriage sys-tem is used in whieh an X-earriage is axially movable on a Y-earriage, whilst a workpiece support is axially movable on the X-carria~e. Means are further provided for causing the workpiece to perform a small -translation and rotation wi-th respect to the workpiece suppor-t so that a fine ad-jus-tment is obtainecl.
~ In this known arrangement of X-Y carriages on each other, a very accurate guiding be-tween -the -two car-riage parts and between the upper carriage ancl -the work-piece suppcrt has to be prov:ided; a small amount of v~
7(~
PHN 10.503 -2- ~1.6.1983 clearance :in the guiding may lead to inadmissible deviat-ions in the adjus-tmen-t. A displacement of the workpiece support with respect to the upper carriage results in tha-t the forces produced in -the guiding between the X-and Y
carriages and caused by the accelera-tion of the mass of the upper carriage and of the workpiece support vary, which may adversely affect the possibility of adjustment.
The coarse adjustmen-t and -the f`ine adjus-tment in the known device are effected by means of two differen-t systems, which results in a complica-ted cons-truction and provides a limitation in the speed of adjustment. The fine adjust-ment is obtained by means of adjustment elements which only have a strongly limited stroke, which renders -the positioning more difficul-t and nevertheless eauses strin-gen-t requirements to be imposed on the coarse adjustment.
The inven-tion has for its object to provide a displacement device with which a high degree of adjus-tmen-t accuracy can be obtained with a very short adjustment -time, whilst no separa-te coarse and rine adjustmen-t members are required and the cons-truction is simple, and, when no use is made of a co-ordinate earriage system with separa-te X- and Y-carriages, it can be achieved that the forces produced between the carriage parts are not unfavourably influenced upon displacemen-t of a workpiece support, while a s-table operation is obtained by a ~avourable distribut-ion of the forces produced during the displacement.
According to the invention, this objec-t is at--tained in -tha-t the carriage is consti-tuted by a lower and an upper carriage part, which carriage par-ts each have a f`lat surface, these surfaces facing each other, and -three linear driving members ac-ting upon -the carriage, which dr-iving rnembers each have a housing and a driving element which projects on both sides from -the housirng and which is axially movab:Le wi-th respect to -the housing, in that -the housing of -the f`i-rst driving rnember is connected to the u-pper carriage part, ~hile the driving elements of -the second and the third driving members are coupled wi-th -the lower carriage -par-t, and in that -the clriving elements of`
~2~7~
,, PHN 1O.5O3 -3- 4.6.1983 the first driving member are connec-ted -to -the housing of the second and the -third driving rnembers, respec-tively, the driving members being arranged in the shape of an II.
The carriage is no longer const:i-tu-ted by a co-ordinate carriage system, in which accurate guidings haveto be present between -the parts, but by two parts which are arbi-trarily movable with respect to each o-ther in a flat plane. An accurate posi-tion determination can be ob-tained by means of a measuring system~ The arrangernen-t of the driving members permits of obtaining a rapid and accu-rate adjustment. Inter alia due to the fact that the driving members are located in one plane and in the shape of' an H, a favourable distribution of` the forces acting upon the carriage is obtained.
The invention will be described with re~erence to an embodiment shown diagrammatically in the drawing.
Fig. 1 is a schematic representation of the plan view of a device according to the invention.
Fig. 2 is a side elevation, partly in sectional vie~, o~ the device.
Fig. 3 is a schematic representation of the laser-in-terferometer assembly for adjusting the position.
Figures 1 and 2 show diagrammatically an embo diment of the displacement device. The device comprises a carriage, the lower carriage part 1 of` which consis-ts of a granite plate and the upper carriage part 2 of` which consists of` an air sole. The surf`aces of` the -two carriage parts f`acing each other are f`lat. An air bearing provided by means of -the air sole, ensures tha-t the rela-tive move-ment of` the carriage parts is eff`ec-ted substantially with-out friction. Although an air bearing is to be pref`erred, it is not necessary for the sa-tisfac-tory operation of the device; lubrication with oil between the -two carriage par-ts, ~or e~ample, is also possible.
The device comprises -tlhree driving members 3,4,5 which are arranged in the shape o~ an H. The clriving mem-bers sho-wn in the drawing are hydraulic linear mo-tors, which are preferably hydrostatically Journalled. The PHN 10.503 ~ .6.1983 control means for the hydraulic mo-tors are no-t shown for tlle sake of clari-ty~ The housing 6 of tile hydraulic mo-tor 3 ensuring -the movemen-t in the ,Y-direction of the upper carriage part 2 with respect to the carriage par-t 1 is secured on -the carriage part 2 with -the aid of means not shown, for eYample, with the aid of bolt-nut joints. The movement in the Y-direc-tion is ens-ured by the driving members ~l and 5 which can also cause a ro-tary movernen-t of the carriage part 2. At bo-th ends of the housing 7 and c"
respectively, an axially movable driving e:Lement 9 and 10, respectively, proJec-ts outwards. The driving elements are shafts which are connected to a plunger present in the housing of the driving member. The ends of the shaf-ts 9 and 10 are fixedly secured -to the carriage par-t 1 ~ith -the lS aid of connection blocks 11. The driving elements l2,13 of the driving member 3 for the X-direction are pivotally secured to the housing 7 and 8, respectively, of the clriv-ing members ~,5 for the Y-direction. For this purpose, for example, two plates-1~ loca-ted one above the o-ther are se-cured to the housings 7 and 8, which pla-tes are adapted to receive a hinge shaft 15, which hinge shafts are also passed through the ends of the driving elements 12 and l3.
In order that upon angular rotation of the carriage par-t 2 the distance between -the two hinge shafts 15 can be bridged, the driving elemen-t 13 is cons-tructed as a slide shaft, as is diagrammatically shown at 16.
Preferably, a plate 17 Or a material having a low thermal coeffcient of expansion is secured on -the housing 6 of the driving member 3. Three supports 18 are provided on this plate. A reference member 19 is supported by these suppor-ts. The reference member, which preferably also consists of a material having a low coefficient of expansion, has -two or-thogonal outer surfaces 20 and 21, wh:ich have the form of mirrors. The posi-tion of -the carri-age par-t 2 with respect to the carriage part 1 can be de-terminecl wi-th great accuracy, i.e. within ~,1 /urn, by means of -these mirror surfaces in co-opera-tion with a laser-inter-ferorrie-ter assembly. ~ recess 22 is p-rovided :in -tile refe-.
L7~
PHN 10.503 -5- l;.6.1983 rence member 19. ~ holder 23 for a workpiece, for example for a subs-tra-te, in which semiconduc-tor elements are to be formed, is arranged on -the plate 17. The upper surface of the holder 23 is -the carrying surface for the subs-tra-te.
This upper surface is chosen so with respect to -the mirror surfaces 20 and 21 that it substantially coincides with the plane in which the light beams of the laser-interferome-ter assembly are located. By arranging the subs-trate jus-t at this level, optical errors in the position cLetection are avoided that may occur due to lack of planeness and conse-quently -tilting of the car-riage part 2 with respect -to the carriage part 1.
The substrate is held by the holder. This hold-ing effect is preferably obtained by means of subatmosphe-lS ric pressure in a manner known per se and no-t shown here.
Fig. 2 on the contrary shows diagrammatically the con-struction of the air sole. The upper carriage part is pro-vided with an inlet 24 for air under pressure, from which restrictions 25 lead to the flat surface facing the first carriage part 1. The air under pressure flowing ou-t of the restrictions provides an aerostatic bearing between the carriage parts 1 and 2. Further, the carriage part 2 is provided with a space 26 in which a suba-tmospheric pressure can be produced in order to provide in -this manner a desired preliminary stress for the aerostatic bearing.
If liquid is supplied to -the hydraulic mo-tor 3, the housing 6 and hence the carriage 2 in Fig. 1 will move in X-direction, to -the right or to the lef-t. A movement in -the Y-direction of the carriage is obtained by supply-ing liquid simultaneously to the motors 4 and 5 so -tha-t the housings 7 and 8 move in the same direc-tion. ~ rota-tion of the carriage 2 is ob-tained by movemen-t of the mo-tors Ll and 5 in opposite directions.
The rnotors 3, 4 and 5 are loca-ted at tthe same level above the carr:iage parts I ancL 2. This is favourable for the forces which cause the adjllstrnent of tlle carriage 1,2. The ~l arrangement of the rno-tors 3, 4 and 5 ensures that -the carriage can be adjllsted in a simple and -rapid ~LZ~7'~8~
PHN 10.503 -6- ll.6.l983 manner bo-th as to translation and as -to ro-ta-tion.
In the Figures, hydraulic li-near mo-tors are sho~n.
However, electric linear motors may also be l-Lsed. Since in linear elec-tric motors there may be a cer-tain amount O r clearance between housing and driving elemen~ts, it is then not necessary to couple the X-motor pivo-tally to -the two Y-motors, but this joint may al-ternatively be rigid.
Fig. 3 shows very diagrammatically -the means wi-tlL
the aid of which -the position of the carriage is measured with great accuracy and the motors for adjusting -the de-sired position of the carriage are con-trolled with this measurement result. Only the elements strictly necessary for the measurement are shown.
A laser 3O emits light which is guided -through inverter mirrors 31,32 to semi-transparent mirrors 33 and 34. The mirror 33, for example, transmits 2/3 of -the light and directs 1/3 of -the light through an interferometer 36 to the mirror surface 21 of -the reference member l9. The light reflected from the mirror surface 21 is in-tercep-ted by the interferometer and the light beam processed in the interferome-ter is passed -to a receiver 37 which emits an electric signal to elec-tronic processing means no-t shown.
In these processing means, the position of ~the X-direction of the carriage measured by the interferome~ter 36 is com-pared with a desired posi~tion. A difference signal, if any,is u-tilized to control the linear mo-tor 3 un-til the desired X-position is reached.
In a similar manner, -the Y-posi-tion is de-ter-mined, two light beams being used and interferometers 38 and 39 providing a position indica~tion. Receivers 4O and 41 again emi-t an electric signal -to the said processing means. 1~ith the two values of Y7 bo-th the occupied Y-posi-tion and the angle at which -the reference member 19 is ar-ranged can be determined. A difference signal, i~ any, with the desired signal is u-t:ilized to control the motors L~ and 5.
Claims (12)
1. A displacement device for use in an apparatus for photolithographic treatment of a substrate, said device comprising a lower carriage part and an upper carriage part, each of said lower and upper carriage parts having a flat surface in facing relationship a first linear driving member having a housing and a driving element projecting from each end of said housing, said driving elements being axially movable with said housing, said first linear driving member being connected by said housing to said upper carriage part, and a second linear driving member and a third linear driving member, each of said second and third linear driving members having a housing and a driving element projecting from each end of said housings, said driving elements being axially movable with said housings, said second and said third linear driving members being connected to said lower carriage part, and said second and third linear driving members being coupled to said driving elements of said first linear driving member in the shape of an H.
2. A device according to Claim 1, wherein each of said linear driving members include a hydraulic linear motor, wherein said driving elements of said first driving member are pivotally secured to said housings of said second and said third driving members, and wherein one of said driving elements of said first driving member comprises a slide shaft.
3. A device according to Claim 1, wherein said linear driving members include linear electrical motors.
4. A device according to Claim 3, wherein said upper carriage part includes a plurality of restrictions merging into said flat surface facing said lower carriage part, said restrictions joining a source of excess pressure in said lower carriage part to form an aerostatic bearing between PHN. 10.503 8 said lower and said upper carriage parts, said upper carriage part including a chamber adjoining said lower carriage part, said chamber being connected to subatmospheric pressure to obtain a preliminary stress of said aerostatic bearing.
5. A device according to Claim 4, wherein two ortho-gonal mirror surfaces are present on said upper carriage part at two upright sides of a reference member, and wherein control means are provided for controlling the position of said reference member by said driving members, said control means including a laser-interferometer assembly using said mirror surfaces.
6. A device according to Claim 5, wherein a holder is located in said reference member, said holder including a carrying surface for an article, said carrying surface sub-stantially coinciding with the plane in which said light beams are located in reflection from said mirror surfaces in order to determine the position of said holder.
7. A device according to Claim 2, wherein said upper carriage part includes a plurality of restrictions merging into said flat surface facing said lower carriage part, said restrictions joining a source of excess pressure in said lower carriage part to form an aerostatic bearing between said lower and said upper carriage parts, said upper carriage part including a chamber adjoining said lower carriage part, said chamber being connected to subatmospheric pressure to obtain a preliminary stress of said aerostatic bearing.
8. A device according to Claim 7, wherein two ortho-gonal mirror surfaces are present on said upper carriage part at two upright sides of a reference member, and wherein con-trol means are provided for controlling the position of said reference member by said driving members, said control means including a laser-interferometer assembly using said mirror surfaces.
9. A device according to Claim 8, wherein a holder is located in said reference member, said holder including a carrying surface for an article, said carrying surface sub-stantially coinciding with the plane in which said light beams are located in reflection from said mirror surfaces in PHN. 10.503 9 order to determine the position of said holder.
10. A device according to Claim 1, wherein said upper carriage part includes a plurality of restrictions merging into said flat surface facing said lower carriage part, said restrictions joining a source of excess pressure in said lower carriage part to form an aerostatic bearing between said lower and said upper carriage parts, said upper carriage part including a chamber adjoining said lower carriage part, said chamber being connected to subatmospheric pressure to obtain a preliminary stress of said aerostatic bearing.
11. A device according to Claim 1, wherein two ortho-gonal mirror surfaces are present on said upper carriage part at two upright sides of a reference member, and wherein con-trol means are provided for controlling the position of said reference member by said driving members, said control means including a laser-interferometer assembly using said mirror surfaces.
12. A device according to Claim 11, wherein a holder is located in said reference member, said holder including a carrying surface for an article, said carrying surface sub-stantially coinciding with the plane in which said light beams are located in reflection from said mirror surfaces in order to determine the position of said holder.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8204450 | 1982-11-17 | ||
| NL8204450A NL8204450A (en) | 1982-11-17 | 1982-11-17 | MOVING DEVICE, IN PARTICULAR FOR THE RADIATION LITHOGRAPHIC TREATMENT OF A SUBSTRATE. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1217088A true CA1217088A (en) | 1987-01-27 |
Family
ID=19840602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000440621A Expired CA1217088A (en) | 1982-11-17 | 1983-11-08 | Displacement device, particularly for the photolithographic treatment of a substrate |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4655594A (en) |
| EP (1) | EP0109718B1 (en) |
| JP (1) | JPS59101835A (en) |
| CA (1) | CA1217088A (en) |
| DE (1) | DE3367287D1 (en) |
| NL (1) | NL8204450A (en) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4742286A (en) * | 1985-10-29 | 1988-05-03 | Micro-Stage, Inc. | Gas bearing X-Y-θ stage assembly |
| JPS62152645A (en) * | 1985-12-25 | 1987-07-07 | Hitachi Seiki Co Ltd | Machine tool coordinate correction device |
| NL8601095A (en) * | 1986-04-29 | 1987-11-16 | Philips Nv | POSITIONING DEVICE. |
| US4758091A (en) * | 1986-11-20 | 1988-07-19 | Ateo Corporation | Pattern generator part holder |
| JP2573502B2 (en) * | 1987-09-22 | 1997-01-22 | 日本電信電話株式会社 | Two-axis moving device |
| US5191465A (en) * | 1990-03-28 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus for alignment of reticle and wafer in exposure apparatus |
| US5287166A (en) * | 1990-07-20 | 1994-02-15 | Konica Corporation | Displacement meter with stared displacement values |
| NL9100215A (en) * | 1991-02-07 | 1992-09-01 | Asm Lithography Bv | Apparatus for the repetitive imaging of a mask pattern on a substrate. |
| US5438419A (en) * | 1991-12-23 | 1995-08-01 | Electronics And Telecommunications Research Institute | Precision wafer driving device by utilizing solid type actuator |
| US5363196A (en) * | 1992-01-10 | 1994-11-08 | Ultratech Stepper, Inc. | Apparatus for measuring a departure from flatness or straightness of a nominally-plane mirror for a precision X-Y movable-stage |
| DE4304912C2 (en) * | 1993-02-18 | 2003-03-06 | Klaus Siebert | Method and device for continuous automatic chip production under vacuum |
| JPH07142336A (en) * | 1993-06-30 | 1995-06-02 | Canon Inc | Aligner |
| JPH07260472A (en) * | 1994-03-22 | 1995-10-13 | Nikon Corp | Orthogonality measuring method for stage device |
| JPH10144596A (en) * | 1996-11-05 | 1998-05-29 | Canon Inc | Aligner and manufacture of device |
| US6189875B1 (en) * | 1997-11-12 | 2001-02-20 | U.S. Philips Corporation | Positioning device with H-drive having spring coupling between beams |
| JP3483452B2 (en) | 1998-02-04 | 2004-01-06 | キヤノン株式会社 | Stage apparatus, exposure apparatus, and device manufacturing method |
| JP3869938B2 (en) | 1998-06-05 | 2007-01-17 | キヤノン株式会社 | Stage apparatus, exposure apparatus, and device manufacturing method |
| DE19948797C2 (en) * | 1999-10-11 | 2001-11-08 | Leica Microsystems | Substrate holder and use of the substrate holder in a high-precision measuring device |
| DE60032568T2 (en) * | 1999-12-01 | 2007-10-04 | Asml Netherlands B.V. | Positioning apparatus and lithographic apparatus provided therewith |
| EP1107067B1 (en) * | 1999-12-01 | 2006-12-27 | ASML Netherlands B.V. | Positioning apparatus and lithographic apparatus comprising the same |
| EP1111470B1 (en) * | 1999-12-21 | 2007-03-07 | ASML Netherlands B.V. | Lithographic apparatus with a balanced positioning system |
| US6486941B1 (en) | 2000-04-24 | 2002-11-26 | Nikon Corporation | Guideless stage |
| JP4966475B2 (en) * | 2000-05-12 | 2012-07-04 | ポール・コーポレーション | filter |
| US6963821B2 (en) * | 2003-02-11 | 2005-11-08 | Nikon Corporation | Stage counter mass system |
| CN102290364B (en) | 2004-06-09 | 2016-01-13 | 尼康股份有限公司 | Base plate keeping device, the exposure device possessing it, manufacturing method |
| KR100573771B1 (en) * | 2004-06-25 | 2006-04-25 | 삼성전자주식회사 | Gantry apparatus |
| SG188899A1 (en) | 2004-09-17 | 2013-04-30 | Nikon Corp | Substrate holding device, exposure apparatus, and device manufacturing method |
| US7298495B2 (en) * | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
| US8109395B2 (en) * | 2006-01-24 | 2012-02-07 | Asm Technology Singapore Pte Ltd | Gantry positioning system |
| US8973768B1 (en) * | 2009-10-09 | 2015-03-10 | Par Systems, Inc. | Gantry robot system |
| JP6761279B2 (en) * | 2016-05-16 | 2020-09-23 | キヤノン株式会社 | Positioning equipment, lithography equipment and article manufacturing method |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1522287A1 (en) * | 1966-07-01 | 1969-08-07 | Telefunken Patent | Device for fine adjustment of photo masks |
| US3550276A (en) * | 1968-04-25 | 1970-12-29 | Baldwin Kongsberg Co | Multiple-pen automatic drafting machine |
| FR1587573A (en) * | 1968-10-25 | 1970-03-20 | ||
| US3622244A (en) * | 1970-01-29 | 1971-11-23 | Optomechanisms Inc | Dual axes interferometer |
| JPS4859279A (en) * | 1971-11-26 | 1973-08-20 | ||
| US3884580A (en) * | 1973-09-07 | 1975-05-20 | Gerber Scientific Instr Co | Apparatus for measuring and positioning by interferometry |
| US3934949A (en) * | 1973-12-27 | 1976-01-27 | Bell Telephone Laboratories, Incorporated | Method for reducing rotation components in table translation |
| US3941480A (en) * | 1974-02-08 | 1976-03-02 | The Gerber Scientific Instrument Company | Work locating system and method with temperature and other compensation capabilities |
| US3969004A (en) * | 1974-08-02 | 1976-07-13 | The Computervision Corporation | Air bearing piston assembly for semiconductor mask-to-wafer aligner |
| US4226526A (en) * | 1976-10-04 | 1980-10-07 | Harry Arthur Hele Spence-Bate | Transport and positioning mechanism |
| JPS5485678A (en) * | 1977-12-20 | 1979-07-07 | Canon Inc | High accuracy alignment method for air bearing guide system xy stage |
| US4311390A (en) * | 1979-02-27 | 1982-01-19 | Optimetrix Corporation | Interferometrically controlled stage with precisely orthogonal axes of motion |
| US4345836A (en) * | 1979-10-22 | 1982-08-24 | Optimetrix Corporation | Two-stage wafer prealignment system for an optical alignment and exposure machine |
| US4464030A (en) * | 1982-03-26 | 1984-08-07 | Rca Corporation | Dynamic accuracy X-Y positioning table for use in a high precision light-spot writing system |
-
1982
- 1982-11-17 NL NL8204450A patent/NL8204450A/en not_active Application Discontinuation
-
1983
- 1983-11-08 CA CA000440621A patent/CA1217088A/en not_active Expired
- 1983-11-14 JP JP58212641A patent/JPS59101835A/en active Granted
- 1983-11-15 EP EP83201632A patent/EP0109718B1/en not_active Expired
- 1983-11-15 DE DE8383201632T patent/DE3367287D1/en not_active Expired
-
1986
- 1986-03-11 US US06/838,894 patent/US4655594A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0109718B1 (en) | 1986-10-29 |
| JPS59101835A (en) | 1984-06-12 |
| EP0109718A1 (en) | 1984-05-30 |
| DE3367287D1 (en) | 1986-12-04 |
| JPH0314223B2 (en) | 1991-02-26 |
| NL8204450A (en) | 1984-06-18 |
| US4655594A (en) | 1987-04-07 |
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| Date | Code | Title | Description |
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| MKEX | Expiry |