CA1253371A

CA1253371A - Glass integrated optical component

Info

Publication number: CA1253371A
Application number: CA000496945A
Authority: CA
Inventors: Luc Dohan; Carlos Nissim
Original assignee: Corning Glass Works
Current assignee: Corning Glass Works
Priority date: 1984-12-18
Filing date: 1985-12-05
Publication date: 1989-05-02
Also published as: KR940001044B1; ES8704642A1; JPS61145511A; EP0187467B1; KR860005233A; ATE64017T1; AU586998B2; FR2574950B1; FR2574950A1; ES550110A0; EP0187467A1; AU5081385A; DE3583017D1; US4765702A

Abstract

Abstract of the Disclosure An integrated optical component including a monolithic glass body having a surface in which at least one cavity is molded. An optical circuit path, which is formed in the surface by ion exchange, is aligned with the cavity.

Description

~L25337~

'' GLASS I NTEGRATED OPTI CAL COMPONENT
ackgroun~_Qf the Invention ~he invention concerns integrated glass optical components. The development of optical waveguide communication technologies has led to the design of new optical or opto-electronic components the function of which is to process optical signals leaving or entering optical fibers. Passive optical components oan be distinguished from the active ones that include opto-electrical conversion relying on opto-electronic, opto-magnetic or opto-thermal effects.
Passive components include (a) connectors, which connect two fibers wlth minimum loss, (b) couplers which connect at least three fibers and split the power bet ween the di fferent fi bers, and (c) couplers/multiplexers which split power between various fibers and select certain wavelengths.
Active components include the coupler/monitor, which taps a small fraction of the power propagating in an optical fiber, the coupler/amplifier, the opto-electrical converter and switches or modulators. The first three types contain at least one "active element"
such as a photodiode to ensure the opto-electrical conversion.

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; Components are also characterized according to whether single-mode or multimode propagation occuxs in the optical path.
A large number of technologies have been proposed to make these components. Classical optical technologies have been employed, sometime down-scaled, to manufacture these active or passive components. Good performances have been achieved; however, these technologies are costly because the various elements have to be aligned with tolerances better than a micron, an alignment which is quite difficult to aohieve.
For passive components, it is possible to use fiber fusion or fiber lapping technologies that allow coupling between ~ibers. These technologies, which are delioate to put into practice, do not apply broadly. It is difficult for instance to produce couplers with a large number of ports. Control of the coupling ratio is also difficult. Also, the integration of active components is practically impossible.
Another technology which has been proposed is planar integrated optics. This technology involves the generation of optical waveguides ln a dielectric material by creating hlgher index zones for conducting light.
The equivalent of an optical "printed circuit" can be made that way. Materials such as glass, Sl, AsGa, or LiNbO3 have been proposed. Single-mode or multimode guides can be formed at the substrate surface. Such ` ~5337~

guides can be obtained by diffusion or implantation of ions which increase the index of the substrate (eg: K+, Ag+, Tl~ in glasses, Ti in LiNbO3) or by forming on the - substrate layers having a larger index (Si, AsGa).
Glasses are interesting because they are cheap and because it is easy to diffuse therein strong polarisability ions, thereby creating surface or buried waveguides. The diffusion process can take place using a molten salt bath technique well known in chemical tampering (see for instance: J. Goell and al. Bell System Tech. J. Vol. 48, p.3445/3448 (1969) and H. Osterberg and al., J. of Opt. Soc.,of America, vol;. 54, p. 1078/1084 (1964). The molten salt bath diffusion techni~ue offers the advantage of control of the refractive index of the guide by adjusting the strong polarisability ion concentration in the bath. Guide losses can be decreased by burying it below the glas~ surface. This can be accomplished by carrying out a second ion exchange step in a molten salt bath containing the ions initially present in the glass (or ions having lower polarisability) in the presence of an electrical field.
The surface guide will migrate inside the substrate.
U.S. Patent No. 3,880,630 desoribes such a technology.
This buried guide technology allows the fabrication of interesting components, couplers in particular, having good performance in the laboratory (see for example Nippon Sheet Glass technical report 1/1983 pages 3-6).

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One of the most difficult problems to be solved for integrated optics is~the mechanical positioning, with a tolerance of one micron or less, of fibers, sources or detectors on the integrated component. In the lab one can glue with epoxy resin the fiber on the component. It . ia a time consuming and delicate operation which is : difficult to scale up industrially.
Optical fibers have been aligned with respect to an integrated optics circuit path by forming a groove in the substrate ad~acent the end of the path. Such devices have had various disadvantages.
~-grooves can be accurately formed in silicon by crystallographic etahing, a technique taught in U.S.
Patent No. 3,774,987. However, an optical waveguide path, to be effective, must be on a substrate or layer having a refractive index lower than that of the waveguide. Since silicon and similar materials that can be subjected to crystallographic etching having a high refraGtive index, they must be provided with a layer of low index material on which the waveguide path can be formed. In such a device the substrate material is expensive, and the process of adding a low lndex materlal to the sur~ace further lncrea6es the cost.
U.S. Patent No. 4,240,849 teaches that V-grooves can be formed in a plastic substrate by molding or formed in a glass substrate by the so-called ultrasonic cutting method. Layers of plastic are then built up on the ~5337;a substrat~ to form an optical path that is aligned with optical fibers that have been cemented into the grooves.
`~ Such plastic materials result in lossy optical : waveguides. Even if a glass optical path were deposited on the surface of a sub trate, deposition techniques that must be employed result in relatively lossy waveguides, and such techniques are often limited to the formation of single-mode waveguides because of the minimal thickness of material that can be deposited. While grooves can be . 10 accurately positioned in a plastic substrate by molding, various propertiss of pla tic render it undesirable for use as an optical waveguide material. The formation of grooves by ultrasonic cutting is too costly to be a commercially viable process, and grooves formed by that technique cannot be positioned with an accuracy of one micron.

Summary of the.~nyQ~iQ~
It is therefore an ob;ect of the present invention to provide an integrated optical component which overcomes the aforementioned disadvantages of the prior art. Another ob~ect is to provide a glass integrated optical component wherein grooves or aavities therein are located with extremely high preclslon. Yet another obj ect is to form~ a device of the aforementioned character from a glass having a composition such that its softening point is sufficiently low that cavities can be precision molded therein and yet optical paths can be formed therein by ion exchange, whereby monolithic construction is possible.
More specifically, the invention concerns an integrated optical component comprising a monolithic glass body, including at least one optical circuit, characterized by the fact that the glass body exhibits, at least on one of its faces, aligned with the optical circuit, a profiled cavity that has been molded into that surface. Further, the optical circuit is formed in the surface by ion exchange, whereby an optical device situated in the cavity is optically aligned with the circuit path. The optical circuit thus formed comprises the same constituents as the glass body and further includes ions which increase the refractive index thereof to a value greater than that of the glass body.
In a preferred embodiment, the profiled cavity is a V-groove. However, depending upon the type of application, the integrated optical component can include other shapes of cavities to accurately position optical parts such as a filter, a detector, for instance a photodiode crystal, or a light source such as a laser crystal.
The optical circuit can be located at the surface, but it is preferably buried in the glass substrate.
Obviously it can have many configurations depending upon the function of the component.

~LZ5337:i The cavities in the glass body can be made by the high precision molding process described in European Patent Application EP-A.0078658, which teaching is cited here for reference. U.S. Patents Nos. 4,447,550 and 4,433,062, and British Patent Application GB A 2,06~,994 disclose optical glass composit~ons which are particularly suited for such high precision molding.
After pressing or molding, the molded body iæ submitted to the optical circuit generation steps, for lnstance by the proces~ described in previously cited U.S. Patent No.
3,880,630.
Only a high precision molding process, such as the one described in EP-A-0078658, can lead to a satisfactory result. Cavities, such as V-grooves, have to be positionea with tolerances better than one micron.
On the other hand, the cavity endfaces, for instance the triangular endface of the V-groove, have to be plane and perpendicular to the cavity axis with a preoision better than 30" of arc. ~he surface quality of this face has to be such that no light 1088 would occur by diffusion or scattering. A ~urface rugosity better than 0.05 micron has been achieved on these faces.
Th0 glass from which the component is made preferably satisfies certain criteria in order to be fully acceptable.
- The refractive index of the glass should preferably be close to the ~;2S3;~7i index of the cladding of the optical fiber used in order to optimize coupling. As the cladding of most high quality fibers is made of silica, the refractive index of the glass should be close to the index of silica, i.e. about 1.46.
- In the preferred case of the buried optical circuit, the glass should contain alkaline ions such as Na~, K+, Li+, etc. in order to be subjected to the double ion exchange process to produce the buried waveguides.
- The glass should contain a minimum quantity (lesæ than a few 10 ppm) of metallic ions, such as Fe3+ or Cu2+, or hydroxyl ions OH that reduce light transmission.
- - The glass should exhibit a good durability, particularly in the presence of the molten salt~ bath used in the process to generate the optical cirouit.
- The gl ass s houl d p oss ess transformation temperatures as low as possible in order to be molded at the ~L2~337~

l owe s t pos s i bl e t emp e ratures . Thes e low temperatures allow an acceptable life to the costly high precision molds as well as being critical in achieving the required high reproducibi;Lity. Generally speaking, these glasses must exhibit a softening point below about 500 C and pre f erabl y bel ow 4 5 0 C. Exampl es o f such glasses are the fluorine containing glasses such as the f 1 uorophosphates or the fluoroborosilicates. The latter are preferable because of their better durabilities.
The glass monolithic components of the invention present substantial advantages over polymer or polymeric/glass composite components. In particular, these components are not subject to delamination or to dimensional changes linked to aging, temperature or humidity variations, that creates adaitional losses.

Brlef ~2e6cription of thel;!Lrawinqs Fig. 1 shows schematically the molding of an integrated optical connector according to the invention.
Fig. 2 shows the connector with the fibers in pos i ti on.

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Fig. 3 to 8 are schematic top view of various integrated optical element according to the invention.

Description of th~ PrQferred ~o~Li~pt Fig. 1 shows the precision molding of a parallelipipedic glass body, for the fabrication of a connector, that includes a V-groove on each of its opposed faces. To clarify the drawing, the size of the V-groove 5 and the angle of the V have been highly exaggerated.
The molding apparatus shown in Fig. 1 of EP. A.78658 can be employed. ~ower mold 1 and top mold 2 of Fig.
hereof, which corresponds to molds 1 and 2 of Fig. 1 of EP. A. 78658, present respectively a plane and a plane with small, aligned wedges 3. ~he molding process forms a glass body 4 having V-~rooves 5 at the ends of one surface thereof.
The molded glass,body is then submitted to a process that generates a buried optical circuit, the extremities of which are perpendicular to the endfaces of V-grooves 5. To use the optical element as a connector, one must position the fibers to be connected in the V-groove 5 and to immobilize it by appropriate means, for instance by gluing.
By choosing the right dimensions for the V-grooves, and by generating the optical circuit at the right locations, it is easy to position the fibers in ~5337~

coincidence with the optical circuit extremities. The fibers will position themselves on the V-groove. Fig. 2 shows such a connector in operation. In this figure, fibers 7 are loaated at the ends of buried optical circuit 6.
A useful glass for the fabrication of the glass body 4 is for instance a glass having the following composltion in weight %: SiO2: 48%, A12O3: 14.2%, B2O3:
17.4%, Na2O: 2.4%, K2O: 12.6% and F: 5.4%. This glass exhibits a refractive index of 1.465 at the wavelength of the d sodium ray. Starting from this glass, discs, 40mm in diameter and 3mm in thickness, are prepared and submitted to the high precision molding process described in EP. A.78658 u~ing the following temperature and pressure cycles:
- Heating from ambient to 470 C at a rate of lO C/min. without applied pressure.
- Holding time at 470 C for 17 min.
without applied pressure.
- Holding at 470 C for 5 min. with a pressure of 110 bars applied on the top mold 2.
- Cooling down to 330-C at a rate of

2.5 C/min. while slowly releasing the pressure until no p.essure is exerted.

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- Cooling down to 280'C at a rate of S C/min.
- Cooling to ambient temperature at a rate of 20 C/min.
The fabrication of the buried optical circuit is made according to the following example. Using vacuum evaporation, a 3000 A thick Ti coating is deposited on the top of the glass body 4 that possesses the V-grooves 5. Using classical micro-photolithographic techniques, a channel, 20 micron wide, is generated in the Ti coating.
This channel is exactly aligned with the V-groove axis.
The Ti-coated face of the glass body is contacted for 3 hrs. with a molten salt bath, at 375 C, having an equimolar composition AgNO3 and AgC1, in order to substitute by ion exchange, Ag~ ions for alkaline ions, present in the glass, on the channel surface. This will modify, locally and superficially, the glass refractive index. The glass body is then removed from the molten salt bath and the masX is removed carefully by chemical etching for instance with ammonium bi-fluoride. The rear face of the glass body is coated with a gold electrical conductive coating and the active slde is contacted with a molten salt bath contalnlng 83% mole of KN03 and 17% mole of NaNO3 at 365 C for 4 hrs. 15 min.
At the same time, an electrical field of 33 V/mm is applied between a platinum electrode in the bath and the rear face gold coating of the body. The bath is ~25337~

positively polarized versus the gold coating. This process ob~ect i8 to "bury" the optical circuit and to obtain quasi circular multimode guides 50 microns in diameter located 25 microns under the glass surface.
Such a guide has a numerical aperture (N.A) of 0.1 and exhibits losses around 0.06 d~/cm.
It is quite obvious that the dime~sion of the guide, its N.A. and its "burying" depth etc. are functions of parameters that can be controlled to achieve the desired result. The most critical parameters are:
- The nature and the composition of the first ion èxchange bath. Instead of Ag+, one can use Tl+ (leading to higher index) or K+ (leading to lower index). Approximately, the index gradient of the guide is proportional to the active ion (Ag+, Tl+, Kl+ or other) concentration in the first bath.
- The width of the initial channels made in the mask.
- The presence or the absence of an electrical field during the first exchange. When a field is used, higher index guides are obtained.
- The parameters (temperature, time, composition, electrical field) that ~2~337;~

define the second lon exchange step.
It must be noted that graded index lenses can also be generated by this technique.
The mold used for the high precision molding can be made of tungsten carbide. The top mold presents wedges 3 of triangular section to generate the V-grooves in the glass body. To connect 125 microns diameter optical fibers, each wedge in our example is 257 microns wide and 129 microns tall. Each wedge is 8mm long. Such a mold can be made by machining on an ultra-precision CNC
grinder. Using the device described in Fig. 1 of EP.
A.78658, one can achieve an exact negative replica of the wedges in the glass body with tolerances (standard deviation) on the position of better than one micron.
Obviously, the dimensions of V-grooves or cavities can be modified for fibers having various diameters.
The mold can be also modified to generate in the glass body other shapes or cavities to position other constituents such as filters, detectors, etc.
Figures 3 to 8 illustrate how various components can be made according to the invention.
Figure 3 shows a coupler-divider including a glass body 4, a buried Y optical circuit 16 and V-grooves 5 at each end of the optiaal circuit. The angle ~ of the Y
branches is about 1' (this angle has been exaggerated to clarify the drawing~.
Figure 4 shows a single-mode proximity coupler. In 125337;~

case of single-mode propagation, coupling of energy can occur via evanescent waves, provided the guides are close enough. ~he coupler includes a glass body 4, two guides 26 with a diameter of 8 microns (N.A. = 0.1), buried at 62 microns, being separated by 24 microns in their 6mm long central parts in order to couple 50% of the energy at 1.3 micron wavelength. V-grooves 5 are included at each guide end to position the fibers.
Figure 5 illustrates a single-mode coupler/-multiplexer. This coupler includes a glass body 4, two linear guide~ 36 and between the guides 36 a single-mode circular guide 46 forming a resonator loop. The coupling is highly wavelength selective. V-grooves 5 are included at each end to allow fiber positioning.
Figure 6 shows a multimode coupler-multicomplexer, It includes a glass body 4, a first buried graded index lens 40 obtained by the double exchange technique, an interference filter 41 deposited on a thin plate positioned in a groove obtained during body 4 molding and a second graded index lens 42. Lenses 40 and 42 are 2.lmm long, 500 microns in diameter and show a parabolic index gradient of 0.025. V-grooves 5 are also included for fiber positioning.
Figure 7 shows an integrated optical element for aligning a single-mode optical fiber with a collimating lens. This is useful for "collimated beam" or "expanded beam" single-mode connectors or for coupling light from a ~L25337:~

semi-conductor laser to a single-mode fiber. This element includes a glass body 4 in which a buried graded index lens 50 has ,been generated by the double ion exchange technique. A V-groove 5 allows the exact positioning of the fiber on the optical axis of lens 50.
Figure 8 shows a multimode monitor. It includes a main guide 60 with a V-groove 5 at each end. A branch 61 allows the tapping of about 10~ of the power passing in guide 60. ~he branch 61 becomes enlarged and leads to a cavity, made during the molding of the glass body 4, in which a photo detector 62 is placed.
It is obvious that the described mode of implementation includes examples that could be modified, in particular by technical equlvalent substitution, without departing form the framework of the invention.

Claims

In the Claims

1. An integrated optical component comprising a monolithic glass body, at least one cavity molded into a surface of said glass body, and an optical circuit path formed in said surface by ion exchange, said path comprising the same constituents as said glass body and further including ions that increase the refractive index thereof to a value greater than that of said glass body, said path terminating at and being aligned with said cavity, whereby an optical device situated in said cavity is optically aligned with said circuit path.

2. A component in accordance with claim 1 wherein said glass body comprises fluorine.

3. A component in accordance with claim 1 wherein said glass is a fluoroborosilicate glass.

4. A component in accordance with claim 1 wherein said cavity is a V-groove.

5. A component in accordance with claim 4 wherein said V-groove has an optical quality endface adjacent said circuit path, said endface being substantially perpendicular to the axis of said path at said endface.

6. A component in accordance with claim 1 wherein said body is formed of a glass having a softening point temperature less than 500°C.

7. A method of making an integrated optical component comprising molding a glass monolithic body having at least one cavity in a surface thereof, and generating in said surface in alignment with said cavity by the ion exchange technique an optical circuit path, one end of which is in alignment with said cavity, whereby an optical device that is positioned in said cavity will be optically aligned with respect to said circuit path.