CA2057919A1 - Semiconductor chip gyroscopic transducer - Google Patents

Semiconductor chip gyroscopic transducer

Info

Publication number
CA2057919A1
CA2057919A1 CA2057919A CA2057919A CA2057919A1 CA 2057919 A1 CA2057919 A1 CA 2057919A1 CA 2057919 A CA2057919 A CA 2057919A CA 2057919 A CA2057919 A CA 2057919A CA 2057919 A1 CA2057919 A1 CA 2057919A1
Authority
CA
Canada
Prior art keywords
flexure
supported
frame
semiconductor
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2057919A
Other languages
French (fr)
Other versions
CA2057919C (en
Inventor
Paul Greiff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Paul Greiff
The Charles Stark Draper Laboratory, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paul Greiff, The Charles Stark Draper Laboratory, Inc. filed Critical Paul Greiff
Publication of CA2057919A1 publication Critical patent/CA2057919A1/en
Application granted granted Critical
Publication of CA2057919C publication Critical patent/CA2057919C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Abstract

A semiconductor chip gyroscopic transducer (10) is disclosed in which a semiconductor element (47) is supported in an outer element by a flexible linkage system which is in turn supported in a frame of semiconductor material (16) by another flexible linkage system which permits the element to vibrate about two axes relative to the frame. Balanced torque forces are provided by a system of buried (50, 52, 54, 56) and bridge (58, 60, 62, 64) electrodes. The stress and tension resulting from doping of these elements are released by a flexure beam (20, 22, 36, 38). The inertial mass of the inner element is balanced by formation in a central pit and on-chip electronics avoids the capacitive loading effects of long ru ns from high impedance sources. Flexure footings are integrated with the structure adding stability to flexures connecting the supported gyroscopic resonator element to the supporting structure, offsetting a rippling effect inherent in the oxide structure. Flexure grooves provide selective stiffness in the flexure. The bridge electrodes (58, 60, 62, 64) are additionally electrically isolated fo r electrical compatibility with gyroscope electronics.
CA002057919A 1990-03-14 1991-03-14 Semiconductor chip gyroscopic transducer Expired - Lifetime CA2057919C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US493,327 1990-03-14
US07/493,327 US5016072A (en) 1988-01-13 1990-03-14 Semiconductor chip gyroscopic transducer
PCT/US1991/001702 WO1991014285A1 (en) 1990-03-14 1991-03-14 Semiconductor chip gyroscopic transducer

Publications (2)

Publication Number Publication Date
CA2057919A1 true CA2057919A1 (en) 1991-09-15
CA2057919C CA2057919C (en) 2001-01-23

Family

ID=23959783

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002057919A Expired - Lifetime CA2057919C (en) 1990-03-14 1991-03-14 Semiconductor chip gyroscopic transducer

Country Status (7)

Country Link
US (1) US5016072A (en)
EP (1) EP0472717B1 (en)
JP (1) JPH05502945A (en)
AT (1) ATE154166T1 (en)
CA (1) CA2057919C (en)
DE (1) DE69126381T2 (en)
WO (1) WO1991014285A1 (en)

Families Citing this family (131)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
DE4000903C1 (en) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
ES2056580T3 (en) * 1990-05-18 1994-10-01 British Aerospace INERTIAL SENSORS.
US6729545B2 (en) * 1990-05-29 2004-05-04 Symbol Technologies, Inc. Integrated scanner on a common substrate having an omnidirectional mirror
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
JPH0644008B2 (en) * 1990-08-17 1994-06-08 アナログ・ディバイセス・インコーポレーテッド Monolithic accelerometer
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5270630A (en) * 1992-05-15 1993-12-14 Xerox Corporation Method and apparatus for antirotation encoder interfaces
US5353656A (en) * 1992-08-18 1994-10-11 Satcon Technology Corporation Electrostatically controlled micromechanical gyroscope
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
US5734105A (en) * 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
JP2654602B2 (en) * 1992-12-25 1997-09-17 日本電気株式会社 Semiconductor dynamic quantity sensor
DE69420481T2 (en) * 1993-01-29 2000-05-18 Murata Manufacturing Co ANGLE SPEED SENSOR
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US6426013B1 (en) 1993-10-18 2002-07-30 Xros, Inc. Method for fabricating micromachined members coupled for relative rotation
US6467345B1 (en) 1993-10-18 2002-10-22 Xros, Inc. Method of operating micromachined members coupled for relative rotation
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6059188A (en) 1993-10-25 2000-05-09 Symbol Technologies Packaged mirror including mirror travel stops
JP3385688B2 (en) * 1993-12-13 2003-03-10 株式会社デンソー Semiconductor yaw rate sensor and method of manufacturing the same
DE69413792T2 (en) * 1994-01-25 1999-03-04 Draper Lab Charles S Micromechanical tuning fork revolution meter with comb-shaped drive elements
JP3077077B2 (en) * 1994-01-28 2000-08-14 ザ・チャールズ・スターク・ドレイパー・ラボラトリー・インコーポレイテッド Inertial rate sensor
JP3555214B2 (en) * 1994-03-15 2004-08-18 株式会社デンソー Semiconductor acceleration sensor
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5581035A (en) 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
JP3412293B2 (en) * 1994-11-17 2003-06-03 株式会社デンソー Semiconductor yaw rate sensor and method of manufacturing the same
JPH08247768A (en) * 1995-03-08 1996-09-27 Nippondenso Co Ltd Angular velocity sensor
KR100374803B1 (en) * 1995-05-25 2003-05-12 삼성전자주식회사 Tuning fork type gyroscope
DE19526903B4 (en) * 1995-07-22 2005-03-10 Bosch Gmbh Robert Yaw rate sensor
US5861549A (en) * 1996-12-10 1999-01-19 Xros, Inc. Integrated Silicon profilometer and AFM head
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
WO1997026527A1 (en) * 1996-01-22 1997-07-24 Xros, Inc. Vane-type micromachined silicon micro-flow meter
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
JPH1047971A (en) * 1996-08-05 1998-02-20 Nippon Soken Inc Angular velocity sensor
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
KR100233848B1 (en) * 1996-12-21 1999-12-01 정선종 Manufacturing method of micro-gyroscope
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
EP0895090B1 (en) 1997-07-31 2003-12-10 STMicroelectronics S.r.l. Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
US6718605B2 (en) * 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
CA2340192A1 (en) 1998-09-02 2000-03-09 Armand P. Neukermans Micromachined members coupled for relative rotation by torsional flexure hinges
JP2000330067A (en) * 1999-05-20 2000-11-30 Olympus Optical Co Ltd Torsional oscillation body
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
JP3425717B2 (en) * 1999-09-20 2003-07-14 株式会社村田製作所 Vibrating gyro
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
JP2001133266A (en) * 1999-11-01 2001-05-18 Mitsubishi Electric Corp Angular velocity sensor
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US20020071169A1 (en) 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6449098B1 (en) 2000-05-16 2002-09-10 Calient Networks, Inc. High uniformity lens arrays having lens correction and methods for fabricating the same
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6668108B1 (en) 2000-06-02 2003-12-23 Calient Networks, Inc. Optical cross-connect switch with integrated optical signal tap
US6483961B1 (en) 2000-06-02 2002-11-19 Calient Networks, Inc. Dual refraction index collimator for an optical switch
US6615681B1 (en) * 2000-07-28 2003-09-09 The Charles Stark Draper Laboratory, Inc. Hybrid wafer gyroscope
US6643425B1 (en) 2000-08-17 2003-11-04 Calient Networks, Inc. Optical switch having switch mirror arrays controlled by scanning beams
DE10040537B4 (en) * 2000-08-18 2004-05-13 Eads Deutschland Gmbh Micromechanical rotation rate sensor and method for its production
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
JP3646250B2 (en) * 2000-11-15 2005-05-11 日本航空電子工業株式会社 Light switch
US6595056B2 (en) 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
US6715352B2 (en) 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
US6544863B1 (en) 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers
US6597825B1 (en) 2001-10-30 2003-07-22 Calient Networks, Inc. Optical tap for an optical switch
US6955086B2 (en) 2001-11-19 2005-10-18 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
WO2003044539A1 (en) * 2001-11-19 2003-05-30 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
CN1628238B (en) * 2002-02-06 2012-05-23 模拟设备公司 Micromachined gyroscope
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror
JP4155775B2 (en) * 2002-03-07 2008-09-24 アルプス電気株式会社 Capacitive sensor
JP2003329444A (en) * 2002-03-07 2003-11-19 Alps Electric Co Ltd Capacitance type sensor
WO2003083492A1 (en) * 2002-03-26 2003-10-09 The Charles Stark Draper Laboratory, Inc. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
US6641273B1 (en) * 2002-06-28 2003-11-04 Glimmerglass Networks, Inc. MEMS structure with mechanical overdeflection limiter
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
US6912902B2 (en) * 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US7397097B2 (en) * 2003-11-25 2008-07-08 Stmicroelectronics, Inc. Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
US20050172717A1 (en) * 2004-02-06 2005-08-11 General Electric Company Micromechanical device with thinned cantilever structure and related methods
WO2005103621A1 (en) * 2004-04-14 2005-11-03 Analog Devices, Inc. Coupling apparatus for inertial sensors
US7448412B2 (en) * 2004-07-23 2008-11-11 Afa Controls Llc Microvalve assemblies and related structures and related methods
EP1624284B1 (en) * 2004-07-29 2017-07-19 STMicroelectronics Srl Mems-type high-sensitivity inertial sensor and manufacturing process thereof
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US7353706B2 (en) * 2004-12-28 2008-04-08 Stmicroelectronics, Inc. Weighted released-beam sensor
US7179674B2 (en) * 2004-12-28 2007-02-20 Stmicroelectronics, Inc. Bi-directional released-beam sensor
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
JP2007033330A (en) * 2005-07-28 2007-02-08 Fujitsu Media Device Kk Angular velocity sensor
JP4600344B2 (en) * 2006-04-28 2010-12-15 パナソニック電工株式会社 Capacitive sensor
CN102654409A (en) * 2006-04-28 2012-09-05 松下电器产业株式会社 Capacitive sensor
DE102006043388B3 (en) * 2006-09-08 2008-04-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for compensating production-related deviations in the production of micromechanical elements and their use
FR2909736B1 (en) * 2006-12-07 2012-08-17 Commissariat Energie Atomique LINEAR ANNULAR CONNECTION WITHOUT MAINTENANCE AND DEVICE COMPRISING AT LEAST ONE SUCH LINK
DE102007021920B8 (en) * 2007-05-10 2011-12-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for designing a micromechanical device with adapted sensitivity, method for producing a micromechanical device and a micromechanical system
DE102007054505B4 (en) 2007-11-15 2016-12-22 Robert Bosch Gmbh Yaw rate sensor
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8860455B2 (en) 2010-12-24 2014-10-14 Intel Corporation Methods and systems to measure a signal on an integrated circuit die
US9335544B2 (en) * 2013-03-15 2016-05-10 Rit Wireless Ltd. Electrostatically steerable actuator
KR101540154B1 (en) * 2013-10-04 2015-07-28 삼성전기주식회사 Angular Velocity Sensor and Manufacturing Method of the same
DE102016215975A1 (en) * 2016-08-25 2018-03-01 Robert Bosch Gmbh Method for operating a micromechanical component
US11686581B2 (en) 2020-06-08 2023-06-27 Analog Devices, Inc. Stress-relief MEMS gyroscope
US11692825B2 (en) 2020-06-08 2023-07-04 Analog Devices, Inc. Drive and sense stress relief apparatus
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH359552A (en) * 1957-07-20 1962-01-15 Boelkow Entwicklungen Kg Measuring and control device for very low speeds
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
CH642461A5 (en) * 1981-07-02 1984-04-13 Centre Electron Horloger ACCELEROMETER.
US4522072A (en) * 1983-04-22 1985-06-11 Insouth Microsystems, Inc. Electromechanical transducer strain sensor arrangement and construction
US4628283A (en) * 1983-11-07 1986-12-09 The Narda Microwave Corporation Hermetically sealed oscillator with dielectric resonator tuned through dielectric window by adjusting screw
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
US4680606A (en) * 1984-06-04 1987-07-14 Tactile Perceptions, Inc. Semiconductor transducer
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
US4705659A (en) * 1985-04-01 1987-11-10 Motorola, Inc. Carbon film oxidation for free-standing film formation
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4670092A (en) * 1986-04-18 1987-06-02 Rockwell International Corporation Method of fabricating a cantilever beam for a monolithic accelerometer
ES2020769A6 (en) * 1990-02-23 1991-09-16 Bendix Espana Hydraulic system for a servo steering of a motor vehicle.

Also Published As

Publication number Publication date
ATE154166T1 (en) 1997-06-15
JPH05502945A (en) 1993-05-20
WO1991014285A1 (en) 1991-09-19
EP0472717A4 (en) 1992-08-19
EP0472717B1 (en) 1997-06-04
DE69126381T2 (en) 1997-09-18
US5016072A (en) 1991-05-14
CA2057919C (en) 2001-01-23
DE69126381D1 (en) 1997-07-10
EP0472717A1 (en) 1992-03-04

Similar Documents

Publication Publication Date Title
CA2057919A1 (en) Semiconductor chip gyroscopic transducer
US7267006B2 (en) Accelerometer
US4744248A (en) Vibrating accelerometer-multisensor
US4182187A (en) Force balancing assembly for transducers
US4744249A (en) Vibrating accelerometer-multisensor
US7677099B2 (en) Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor
US5412986A (en) Accelerometer with improved strain gauge sensing means
US5955668A (en) Multi-element micro gyro
US6944931B2 (en) Method of producing an integral resonator sensor and case
US5329816A (en) Electrode pattern intended for tuning fork-controlled gyro
US7210347B2 (en) Micromachined inertial sensor for measuring rotational movements
DE69627603D1 (en) Accelerometer and manufacturing method therefor, and shock detector using such a sensor
JPH05164775A (en) Acceleration sensor
JPH07306047A (en) Multi-axial detection type vibration gyro
JPH07502592A (en) Micromechanical tuning fork angular velocity sensor
CA2116572C (en) Rotation sensor
EP0917652B1 (en) Tunneling sensor with linear force rebalance
Barbour et al. Micro-electromechanical instrument and systems development at Draper Laboratory
US4267731A (en) Force balanced vibratory rate sensor
US4715227A (en) Multisensor assembly with angular rate piezoelectric crystal beam
WO2000029855A1 (en) Multi-element micro-gyro
CN100422697C (en) Acceleration transducer
US6405594B1 (en) Silicon base plate with low parasitic electrical interference for sensors
KR100277425B1 (en) Electrode Structure of Thin Film Moving Wave Rotation Sensor and Its Sensor
US4444442A (en) Bearing apparatus

Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry