CA2088176A1 - Switchable resonant filter for optical radiation - Google Patents

Switchable resonant filter for optical radiation

Info

Publication number
CA2088176A1
CA2088176A1 CA002088176A CA2088176A CA2088176A1 CA 2088176 A1 CA2088176 A1 CA 2088176A1 CA 002088176 A CA002088176 A CA 002088176A CA 2088176 A CA2088176 A CA 2088176A CA 2088176 A1 CA2088176 A1 CA 2088176A1
Authority
CA
Canada
Prior art keywords
membrane
electrode
optical radiation
resonant filter
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002088176A
Other languages
French (fr)
Other versions
CA2088176C (en
Inventor
Gregory A. Magel
Jon C. Zimmerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Gregory A. Magel
Jon C. Zimmerman
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gregory A. Magel, Jon C. Zimmerman, Texas Instruments Incorporated filed Critical Gregory A. Magel
Publication of CA2088176A1 publication Critical patent/CA2088176A1/en
Application granted granted Critical
Publication of CA2088176C publication Critical patent/CA2088176C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/002—Optical devices or arrangements for the control of light using movable or deformable optical elements the movement or the deformation controlling the frequency of light, e.g. by Doppler effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces

Abstract

A structure and its method for manufacture for a switchable optical filter.
The structure comprises a substrate (10) transparent to the radiation of interest, which contains or supports an electrode (12). A spacer layer (16) suspends the membrane over the electrode (12) such that no spacer lies between the electrode (12) and the membrane (22), yet some spacer (16) remains elsewhere to support the membrane (22). The membrane has slots (24) in it which are of a specified length in order to resonate at a particular wavelength of radiation. When the electrode (12) is activated, the membrane (22) deflects and its varying proximity to the substrate changes the wavelength of transmission.
CA002088176A 1992-02-05 1993-01-27 Switchable resonant filter for optical radiation Expired - Fee Related CA2088176C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US831,719 1992-02-05
US07/831,719 US5231532A (en) 1992-02-05 1992-02-05 Switchable resonant filter for optical radiation

Publications (2)

Publication Number Publication Date
CA2088176A1 true CA2088176A1 (en) 1993-08-06
CA2088176C CA2088176C (en) 2002-08-13

Family

ID=25259707

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002088176A Expired - Fee Related CA2088176C (en) 1992-02-05 1993-01-27 Switchable resonant filter for optical radiation

Country Status (7)

Country Link
US (1) US5231532A (en)
EP (1) EP0554847B1 (en)
JP (1) JPH06221921A (en)
KR (1) KR100294035B1 (en)
CA (1) CA2088176C (en)
DE (1) DE69305375T2 (en)
TW (1) TW235339B (en)

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EP0554847A1 (en) 1993-08-11
EP0554847B1 (en) 1996-10-16
DE69305375D1 (en) 1996-11-21
KR100294035B1 (en) 2001-09-17
US5231532A (en) 1993-07-27
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DE69305375T2 (en) 1997-02-27
CA2088176C (en) 2002-08-13

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