CA2096455A1 - Fabry-perot with coated mirrors - Google Patents
Fabry-perot with coated mirrorsInfo
- Publication number
- CA2096455A1 CA2096455A1 CA002096455A CA2096455A CA2096455A1 CA 2096455 A1 CA2096455 A1 CA 2096455A1 CA 002096455 A CA002096455 A CA 002096455A CA 2096455 A CA2096455 A CA 2096455A CA 2096455 A1 CA2096455 A1 CA 2096455A1
- Authority
- CA
- Canada
- Prior art keywords
- fabry
- perot
- dielectric coating
- mirrors
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000576 coating method Methods 0.000 claims abstract description 37
- 239000011248 coating agent Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 23
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000005083 Zinc sulfide Substances 0.000 claims abstract description 5
- 229910052984 zinc sulfide Inorganic materials 0.000 claims abstract description 5
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims abstract description 5
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims abstract description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000004408 titanium dioxide Substances 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- QCCDYNYSHILRDG-UHFFFAOYSA-K cerium(3+);trifluoride Chemical compound [F-].[F-].[F-].[Ce+3] QCCDYNYSHILRDG-UHFFFAOYSA-K 0.000 claims description 3
- 229910001610 cryolite Inorganic materials 0.000 claims description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 3
- 229920000620 organic polymer Polymers 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 abstract description 14
- 229910052751 metal Inorganic materials 0.000 abstract description 13
- 239000002184 metal Substances 0.000 abstract description 13
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 abstract description 11
- 230000002411 adverse Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 150000002736 metal compounds Chemical class 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000002835 absorbance Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- JHQVCQDWGSXTFE-UHFFFAOYSA-N 2-(2-prop-2-enoxycarbonyloxyethoxy)ethyl prop-2-enyl carbonate Chemical compound C=CCOC(=O)OCCOCCOC(=O)OCC=C JHQVCQDWGSXTFE-UHFFFAOYSA-N 0.000 description 1
- 241000168036 Populus alba Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- -1 sodium aluminum fluoride compound Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
Abstract
ABSTRACT OF THE DISCLOSURE
In a Fabry-Perot etalon or interferometer the metal mirrors are each provided with a dielectric coating on the side facing away from the enclosed gap. The dielectric coating leads to the advantage of peak transmittance being improved without the finesse being adversely affected. The dielectric coating is transparent for the wavelength (.lambda.) used and, preferably, has a thickness of about 0.25.lambda./n, n being the refractive index of the dielectric coating material. The coating, preferably, is of a material having a high index of refraction, examples thereof including zirconium dioxide, titanium dioxide, zinc sulfide, or zinc selenide.
In a Fabry-Perot etalon or interferometer the metal mirrors are each provided with a dielectric coating on the side facing away from the enclosed gap. The dielectric coating leads to the advantage of peak transmittance being improved without the finesse being adversely affected. The dielectric coating is transparent for the wavelength (.lambda.) used and, preferably, has a thickness of about 0.25.lambda./n, n being the refractive index of the dielectric coating material. The coating, preferably, is of a material having a high index of refraction, examples thereof including zirconium dioxide, titanium dioxide, zinc sulfide, or zinc selenide.
Description
FABRY-PEROT WITH COATED MIRRORS
The invention pertains to Fabry-Perot etalons and interferometers, hereinafter referred to as "Fabry-Perots"
for s]hort.
Fabry-Perots are well-known and important optical 6 devices. They may be used as a true interferometer, (e.g., for spectroscopy), as a laser cavity or, more particulaxly, as an insert in the laser cavity of a single mode laser.
Currently, Fabry-Perots are also being suggested as reflection or transmission modulators for ~ptical interconnects.
12 A Fabry-Perot commonly comprises two reflective surfaces (the "mirrors") separated by a determined optical path length (the "gap"). In a Fabry-Perot interferometer the gap enclosed by the mirrors usually comprises air and can be mechanically varied, e.g. by moving one of the mirrors. In a Fabry-Perot etalon the mirrors are usually held fixed, for 18 example by means of a spacer, for which, for example, quartz, or glass is commonly used. Common gap widths for an interferometer vary from several millimeters to several centimeters. Considerably greater gap widths are customary when a Fabry-Perot is employed as a laser resonant cavity.
For~some applications, including modulators, gap widths may 24 be of the order of one to several micrometers.
In general, two types of mirrors are used in Fabry-Perots, namely, so-called quarter-wave stacks (QWS~ of a material that would not exhibit substantial reflectance as a single layer, or mirrors comprising a single layer of a material that is in itself reflecting, usually comprising metal or metal compounds. The mirrors frequently are plane parallel, but curved-mirror systems are also known, notably as laser cavities and as spectrum analyzers.
The invention pertains to Fabry-Perot etalons and interferometers, hereinafter referred to as "Fabry-Perots"
for s]hort.
Fabry-Perots are well-known and important optical 6 devices. They may be used as a true interferometer, (e.g., for spectroscopy), as a laser cavity or, more particulaxly, as an insert in the laser cavity of a single mode laser.
Currently, Fabry-Perots are also being suggested as reflection or transmission modulators for ~ptical interconnects.
12 A Fabry-Perot commonly comprises two reflective surfaces (the "mirrors") separated by a determined optical path length (the "gap"). In a Fabry-Perot interferometer the gap enclosed by the mirrors usually comprises air and can be mechanically varied, e.g. by moving one of the mirrors. In a Fabry-Perot etalon the mirrors are usually held fixed, for 18 example by means of a spacer, for which, for example, quartz, or glass is commonly used. Common gap widths for an interferometer vary from several millimeters to several centimeters. Considerably greater gap widths are customary when a Fabry-Perot is employed as a laser resonant cavity.
For~some applications, including modulators, gap widths may 24 be of the order of one to several micrometers.
In general, two types of mirrors are used in Fabry-Perots, namely, so-called quarter-wave stacks (QWS~ of a material that would not exhibit substantial reflectance as a single layer, or mirrors comprising a single layer of a material that is in itself reflecting, usually comprising metal or metal compounds. The mirrors frequently are plane parallel, but curved-mirror systems are also known, notably as laser cavities and as spectrum analyzers.
2 ~ '3 The invention pertains to Fabry~Perots of the type comprising two mirrors of a reflecting material, such as metal. As is apparent from the above, the inner surfaces of the mirrors are separated from each other to form the gap, the gap width optionally being fixed.
6 British Patent No. 2,082,380 discloses a Fabry-Perot etalon of this type used in a semiconductor injection laser.
The Fabry-Perot is provided with a quarter-wavelength anti-reflection layer on the inner surface of one of the mirrors in order to broaden the spectral emission, to increase the range of single mode operation, and to reduce spread on the 12 far-field pattern. The inner surface of the other mirror is optionally coated with a half-wavelength layer.
In Annales de Phvsiq~ 6 (1951), pages 5 and following, Fabry-Perots are disclosed, the metal mirrors of which are provided with a dielectric layer on the side facing the gap.
In the disclosure it is concluded that a single dielectric 18 layer is unsuitable to significantly improve the reflectance of a Fabry-Perot.
European Patent Publication No. 371,695 pertains to a spatial light modulator on the basis of a QWS Fabry-Perot in which the gap comprises a liquid crystal layer and which Fabry-Perot includes metal electrodes. The mirrors in this 24 device are dielectric multilayer films, namely, quarter wave stacks.
QWS Fabry-Perots have also been disclosed in such representative references as Thin Solid Films Vol.137, No.2, pages 161-168 tl968) and Optik, Vol.50, No.4, pages 329-340 (1978)-The state of~ithe art further includes the common knowledge which exists in regard to Fabry-Perots. The original interferometer of this type developed by C. Fabry and A. Perot, for instance, comprises two transparent (glass or quartz) plates with planar surfaces. The inner surfaces ~ ~ 9 ~ 4 .~ ~
_ 3 _ AEM 2310 are coated with partially transparent films of high ref:Lectivity and are parallel, enclosing an air gap. The transparent plates serve as a substrate for the reflecting coa1cing. These and other known Fabry-Perot mirrors commonly comprise a metal, such as gold, silver or aluminum, or a 6 metal compound, as a reflecting surface.
Naturally, the mirrors of a Fabry-Perot exhibit substantial reflectance, e.g. higher than 90%, but to a certain extent they also show transmittance. Further, mirrors comprised of a material that is in itself reflecting, notably metal mirrors, display absorption of incident light.
12 The mirror reflectivity being high, the reflectance and transmittance show a series of peaks as a function of the wavelength of the incident light. If the mirror separation is much larger than the wavelength (which is usually the case) the peaks are approximately periodical in the wave-length. The ratio of the distance separating subsequent 18 peaks (the frez spectral range, or FSR) to the full-width at half maximum of the peaks is frequently used to specify the quality of a Fabry-Perot. Said ratio is a dimensionless quantity called the "finesse". For many applications a high finesse is desirable.
In order to achieve a high finesse, a high reflectance 24 is generally required. In the case of Fabry-Perots of the type having mirrors comprising metal or metal compounds, increased reflectance usually is attended with increased absorbance. Consequently, in Fabry-Perots of the present type the demand of high finesse competes with that of high peak transmittance~ It is therefore desired to improve Fabry-Perots with respect to peak transmittance, without the finesse being adversely affectea.
It is an object of the present invention to provide a Fabry-Perot of the aforementioned type containing mirrors of material that is in itself reflecting, such as metal or metal 2 3 ~
compounds, which exhibits improved transmittance while retaining a high finesse. It is a further object of the invention to provide a Fabry-Perot of the type in which the mirrors are of a material that in itself is reflecting, such as ~etal, which allows improved finesse while retaining good 6 transmittance. Still another object of the invention is to provide a metal mirrors-containing Fabry-Perot that simultaneously displays improved transmittance and a higher finesse.
The invention consists in that in a Fabry-Perot of the type described above the mirrors are each provided with a 12 dielectric coating on the side facing away from the gap.
The dielectric coating may be seen as an analogue of an anti-reflection coating such as is commonly applied to the elements of optical instruments, but has a quite different function. In this respect, it should be clearly recognized that the use of such an anti-reflection coating on the outer 18 surface of the mirrors leads to the desired advantages, whilst the working area of the Fabry-Perot (to which the advantages apply) is within the gap, namely, on the inside of the mirrors.
The dielectric coating should be substantially transparent for the wavelength used. The Fabry-Perots 24 according to the invention hereinafter described are suitable for use with light of any wavelength, A. In practice, this light may indeed be of a single wave-length but may also be polychxomatic. In the latter case, ~ indicates the average wavelength.
The dielectric coating will generally function well if it has a thickness of from about 0.1~/n to about 0.5~n, with n indicating the index of refraction of the dielectric material. Preferably, the dielectric coating has a thickness of about 0.25~/n. These thicknesses are to be understood as 2 ~ 9 ~ ~ 3j - 5 - ~EM ~310 comprising said range ~ one or more half wavelengths, as the effect attained is periodical, the period being 0.5~.
It should be noted that such Fabry-Perots according to the invention are clearly distinguished from Fabry-Perots having quarter-wave stacks as mirrors. As indicated above, 6 the present invention pertains to Fabry-Perots having mirrors comprising a reflecting material, namely, a material that is in itself reflecting, such as a metal or a metal compound.
The aforementioned problem that high peak-transmittance and high finesse are competing demands is due to the absorbance observed with mirrors comprising such a reflecting material, 12 and at any rate plays a less significant role in Fabry-Perots having quarter-wave stacks as mirrors. Such Fabry-Perots are outside the scope of the present invention and, besides, are more difficult to produce, as the manufacture process involves the deposition of a number of quarter-wave layers of two different refractive indices.
18 In the embodiment in which a Fabry-Perot according to the original construction of C. Fabry and A. Perot is used, namely, one having mirrors comprising a transparent substrate plate coated on the inside, namely, the side facing the gap, with reflecting material, the dielectric coating of the invention is applied between the reflecting material and the 2~ su~strate.
Suitable dielectric coatings include any inorganic, organic or polymeric materials which satisfy the main reguirement of being, for the wavelength used, a non-absorbing iayer with an index of refraction higher than the gap medium (air or glass, usually). Examples of inorganic materials are the well-known materials co~monly employed in anti-r!eflection coatings, such as cryolite ~a sodium aluminum fluoride compound), magnesium fluoride, cerium fluoride, or a mixture thereof. Examples of polymeric materials are, e.g., 2~9~
those used for optical lenses, such as diethylene glycol bis(allyl carbonate).
It has been found that the higher the refractive index of t]he dielectric coating, the better the Fabry-Perot according to the instant invention functions. Hence, 6 preferred dielectric coatings are those having a refractive index higher than 2Ø These materials are in fact known from the field of Fabry-Perots. They commonly constitute the high refractive index layers in the aforementioned quarter wave stacks. Preferred dielectric coatings, in this respect, comprise zirconium dioxide, titanium dioxide, zinc sulfide, 12 zinc selenide, or a mixture thereof.
It should be noted that, generally, it will be convenient to apply the same dielectric coating to the surfaces of both mirrors. However, each mirror may also be coated with a different dielectric coating.
The mere coating of the mirrors with dielectric layers, 18 under the conditions set forth above, suffices to enhance the peak-transmittance. For various applications a further enhancement is not necessary, or sometimes even undesirable.
~owever, if an optimum enhancement in peak-transmittance with retained finesse is desired, it is required that the thicXness of the mirrors be adapted to the presence of the ~4 dielectric coating in such manner that the reflectance inside the gap remains unchanged. It cannot be predicted in general terms whether, in a specific case, the desired adaption can be achieved by increasing or by decreasing the thickness.
However, the person of ordinary skill in the art may calculate this, using the theory of Abeles described in M.
Born and E. Wolf, "Principles of optics", Pergamon Press, Oxford, 4th edition, 1970, pages 51 and following and 611 and followi~g.
The further constituents of the Fabry-Perots according to the instant invention are customary. The gap may enclose 2a36~5 air, glass, quartz, or any other suitable material, such as a transparent organic polymer. If the Fabry-Perot is to be used as a transmission modulator for optical interconnects, the gap may comprise a non-linear optical (NLO) material, preferably an NLO polymer. NL0 materials are well-known in 6 the art and need no further elucidation here. Examples of suitable NL0 polymers are those described in European Patent Publication Nos. 350,112, 350,113! 358,476, 445,864, 378,185, and 359,648.
The mirrors may be of any suitable reflecting material, and are in themselves well-known. Common examples of such 12 materials include metals, more particularly gold, silver, or aluminum.
The invention will be further described hereinafter with reference to the following Examples which should be construed to be explanatory rather than limitative.
2 ~ CJ
COMPARATIVE EX~MPLE 1 The Fabry-Perot for comparison purposes was an etalon for use with a wavelength of about 514.5 nm comprising two plane parallel mirrors of silver enclosing a 1 mm gap which mirrors comprised glass having a refractive index of 1.55.
6 The thickness of the mirrors was 50 nm. No dielectric coating was present.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 3.7% at a finesse of 20.
The exemplified Fabry-Perot was an etalon as described 12 in Comparative Example 1, above, with the mirrors being coated on the outer surfaces (namely, the surfaces pointing away from the gap) with a dielectric coating of zinc sulfide.
The thickness of the dielectric coating was 55.9 nm, its refractive index was 2.3, namely, the Fabry Perot etalon, in accordance with the invention, comprised a dielectric coating 18 of 0.25~/n.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 9.7%, at a finesse of 21.
The Fabry-Perot exemplified here is an etalon as in Example 2, with the thickness of the mirrors being adjusted 24 to 47.8 nm, in order to have the same internal reflectance as the uncoated Fabry-Perot etalon of comparison.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 12.5% at a finesse of 20.
6 British Patent No. 2,082,380 discloses a Fabry-Perot etalon of this type used in a semiconductor injection laser.
The Fabry-Perot is provided with a quarter-wavelength anti-reflection layer on the inner surface of one of the mirrors in order to broaden the spectral emission, to increase the range of single mode operation, and to reduce spread on the 12 far-field pattern. The inner surface of the other mirror is optionally coated with a half-wavelength layer.
In Annales de Phvsiq~ 6 (1951), pages 5 and following, Fabry-Perots are disclosed, the metal mirrors of which are provided with a dielectric layer on the side facing the gap.
In the disclosure it is concluded that a single dielectric 18 layer is unsuitable to significantly improve the reflectance of a Fabry-Perot.
European Patent Publication No. 371,695 pertains to a spatial light modulator on the basis of a QWS Fabry-Perot in which the gap comprises a liquid crystal layer and which Fabry-Perot includes metal electrodes. The mirrors in this 24 device are dielectric multilayer films, namely, quarter wave stacks.
QWS Fabry-Perots have also been disclosed in such representative references as Thin Solid Films Vol.137, No.2, pages 161-168 tl968) and Optik, Vol.50, No.4, pages 329-340 (1978)-The state of~ithe art further includes the common knowledge which exists in regard to Fabry-Perots. The original interferometer of this type developed by C. Fabry and A. Perot, for instance, comprises two transparent (glass or quartz) plates with planar surfaces. The inner surfaces ~ ~ 9 ~ 4 .~ ~
_ 3 _ AEM 2310 are coated with partially transparent films of high ref:Lectivity and are parallel, enclosing an air gap. The transparent plates serve as a substrate for the reflecting coa1cing. These and other known Fabry-Perot mirrors commonly comprise a metal, such as gold, silver or aluminum, or a 6 metal compound, as a reflecting surface.
Naturally, the mirrors of a Fabry-Perot exhibit substantial reflectance, e.g. higher than 90%, but to a certain extent they also show transmittance. Further, mirrors comprised of a material that is in itself reflecting, notably metal mirrors, display absorption of incident light.
12 The mirror reflectivity being high, the reflectance and transmittance show a series of peaks as a function of the wavelength of the incident light. If the mirror separation is much larger than the wavelength (which is usually the case) the peaks are approximately periodical in the wave-length. The ratio of the distance separating subsequent 18 peaks (the frez spectral range, or FSR) to the full-width at half maximum of the peaks is frequently used to specify the quality of a Fabry-Perot. Said ratio is a dimensionless quantity called the "finesse". For many applications a high finesse is desirable.
In order to achieve a high finesse, a high reflectance 24 is generally required. In the case of Fabry-Perots of the type having mirrors comprising metal or metal compounds, increased reflectance usually is attended with increased absorbance. Consequently, in Fabry-Perots of the present type the demand of high finesse competes with that of high peak transmittance~ It is therefore desired to improve Fabry-Perots with respect to peak transmittance, without the finesse being adversely affectea.
It is an object of the present invention to provide a Fabry-Perot of the aforementioned type containing mirrors of material that is in itself reflecting, such as metal or metal 2 3 ~
compounds, which exhibits improved transmittance while retaining a high finesse. It is a further object of the invention to provide a Fabry-Perot of the type in which the mirrors are of a material that in itself is reflecting, such as ~etal, which allows improved finesse while retaining good 6 transmittance. Still another object of the invention is to provide a metal mirrors-containing Fabry-Perot that simultaneously displays improved transmittance and a higher finesse.
The invention consists in that in a Fabry-Perot of the type described above the mirrors are each provided with a 12 dielectric coating on the side facing away from the gap.
The dielectric coating may be seen as an analogue of an anti-reflection coating such as is commonly applied to the elements of optical instruments, but has a quite different function. In this respect, it should be clearly recognized that the use of such an anti-reflection coating on the outer 18 surface of the mirrors leads to the desired advantages, whilst the working area of the Fabry-Perot (to which the advantages apply) is within the gap, namely, on the inside of the mirrors.
The dielectric coating should be substantially transparent for the wavelength used. The Fabry-Perots 24 according to the invention hereinafter described are suitable for use with light of any wavelength, A. In practice, this light may indeed be of a single wave-length but may also be polychxomatic. In the latter case, ~ indicates the average wavelength.
The dielectric coating will generally function well if it has a thickness of from about 0.1~/n to about 0.5~n, with n indicating the index of refraction of the dielectric material. Preferably, the dielectric coating has a thickness of about 0.25~/n. These thicknesses are to be understood as 2 ~ 9 ~ ~ 3j - 5 - ~EM ~310 comprising said range ~ one or more half wavelengths, as the effect attained is periodical, the period being 0.5~.
It should be noted that such Fabry-Perots according to the invention are clearly distinguished from Fabry-Perots having quarter-wave stacks as mirrors. As indicated above, 6 the present invention pertains to Fabry-Perots having mirrors comprising a reflecting material, namely, a material that is in itself reflecting, such as a metal or a metal compound.
The aforementioned problem that high peak-transmittance and high finesse are competing demands is due to the absorbance observed with mirrors comprising such a reflecting material, 12 and at any rate plays a less significant role in Fabry-Perots having quarter-wave stacks as mirrors. Such Fabry-Perots are outside the scope of the present invention and, besides, are more difficult to produce, as the manufacture process involves the deposition of a number of quarter-wave layers of two different refractive indices.
18 In the embodiment in which a Fabry-Perot according to the original construction of C. Fabry and A. Perot is used, namely, one having mirrors comprising a transparent substrate plate coated on the inside, namely, the side facing the gap, with reflecting material, the dielectric coating of the invention is applied between the reflecting material and the 2~ su~strate.
Suitable dielectric coatings include any inorganic, organic or polymeric materials which satisfy the main reguirement of being, for the wavelength used, a non-absorbing iayer with an index of refraction higher than the gap medium (air or glass, usually). Examples of inorganic materials are the well-known materials co~monly employed in anti-r!eflection coatings, such as cryolite ~a sodium aluminum fluoride compound), magnesium fluoride, cerium fluoride, or a mixture thereof. Examples of polymeric materials are, e.g., 2~9~
those used for optical lenses, such as diethylene glycol bis(allyl carbonate).
It has been found that the higher the refractive index of t]he dielectric coating, the better the Fabry-Perot according to the instant invention functions. Hence, 6 preferred dielectric coatings are those having a refractive index higher than 2Ø These materials are in fact known from the field of Fabry-Perots. They commonly constitute the high refractive index layers in the aforementioned quarter wave stacks. Preferred dielectric coatings, in this respect, comprise zirconium dioxide, titanium dioxide, zinc sulfide, 12 zinc selenide, or a mixture thereof.
It should be noted that, generally, it will be convenient to apply the same dielectric coating to the surfaces of both mirrors. However, each mirror may also be coated with a different dielectric coating.
The mere coating of the mirrors with dielectric layers, 18 under the conditions set forth above, suffices to enhance the peak-transmittance. For various applications a further enhancement is not necessary, or sometimes even undesirable.
~owever, if an optimum enhancement in peak-transmittance with retained finesse is desired, it is required that the thicXness of the mirrors be adapted to the presence of the ~4 dielectric coating in such manner that the reflectance inside the gap remains unchanged. It cannot be predicted in general terms whether, in a specific case, the desired adaption can be achieved by increasing or by decreasing the thickness.
However, the person of ordinary skill in the art may calculate this, using the theory of Abeles described in M.
Born and E. Wolf, "Principles of optics", Pergamon Press, Oxford, 4th edition, 1970, pages 51 and following and 611 and followi~g.
The further constituents of the Fabry-Perots according to the instant invention are customary. The gap may enclose 2a36~5 air, glass, quartz, or any other suitable material, such as a transparent organic polymer. If the Fabry-Perot is to be used as a transmission modulator for optical interconnects, the gap may comprise a non-linear optical (NLO) material, preferably an NLO polymer. NL0 materials are well-known in 6 the art and need no further elucidation here. Examples of suitable NL0 polymers are those described in European Patent Publication Nos. 350,112, 350,113! 358,476, 445,864, 378,185, and 359,648.
The mirrors may be of any suitable reflecting material, and are in themselves well-known. Common examples of such 12 materials include metals, more particularly gold, silver, or aluminum.
The invention will be further described hereinafter with reference to the following Examples which should be construed to be explanatory rather than limitative.
2 ~ CJ
COMPARATIVE EX~MPLE 1 The Fabry-Perot for comparison purposes was an etalon for use with a wavelength of about 514.5 nm comprising two plane parallel mirrors of silver enclosing a 1 mm gap which mirrors comprised glass having a refractive index of 1.55.
6 The thickness of the mirrors was 50 nm. No dielectric coating was present.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 3.7% at a finesse of 20.
The exemplified Fabry-Perot was an etalon as described 12 in Comparative Example 1, above, with the mirrors being coated on the outer surfaces (namely, the surfaces pointing away from the gap) with a dielectric coating of zinc sulfide.
The thickness of the dielectric coating was 55.9 nm, its refractive index was 2.3, namely, the Fabry Perot etalon, in accordance with the invention, comprised a dielectric coating 18 of 0.25~/n.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 9.7%, at a finesse of 21.
The Fabry-Perot exemplified here is an etalon as in Example 2, with the thickness of the mirrors being adjusted 24 to 47.8 nm, in order to have the same internal reflectance as the uncoated Fabry-Perot etalon of comparison.
For a wavelength near 514.5 nm the Fabry-Perot etalon displayed a peak transmittance of 12.5% at a finesse of 20.
Claims (13)
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A Fabry-Perot comprising two mirrors of a reflecting material with the mirrors being separated from each other by a gap wherein the mirrors are each provided with a dielectric coating on the side facing away from the gap.
2. A Fabry-Perot according to Claim 1, suitable for use with light of average wavelength .lambda., wherein the dielectric coating has a refractive index n, and a thickness of from about 0.1.lambda./n to about 0.5.lambda./n.
3. A Fabry-Perot according to Claim 2 wherein the dielectric coating has a thickness of about 0.25.lambda./n.
4. A Fabry-Perot according to Claim 1 wherein the thickness of the mirrors is adjusted so as to retain the same level of internal reflectance as an uncoated Fabry-Perot.
5. A Fabry-Perot according to Claim 1 wherein the dielectric coating comprises an organic polymer.
6. A Fabry-Perot according to Claim 1 wherein the dielectric coating comprises cryolite, magnesium fluoride, cerium fluoride, or a mixture thereof.
7. A Fabry-Perot according to Claim 1 wherein the dielectric coating has a refractive index higher than 2Ø
8. A Fabry-Perot according to Claim 7, wherein the dielectric coating comprises zirconium dioxide, titanium dioxide, zinc sulfide, zinc selenide, or a mixture thereof.
9. A Fabry-Perot according to Claim 1 wherein the gap comprises a non-linear optical polymer.
10. A Fabry-Perot according to Claim 2 wherein the dielectric coating comprises an organic polymer.
11. A Fabry-Perot according to Claim 2 wherein the dielectric coating comprises cryolite, magnesium fluoride, cerium fluoride, or a mixture thereof.
12. A Fabry-Perot according to Claim 2 wherein the dielectric coating has a refractive index higher than 2Ø
13. A Fabry-Perot according to Claim 13 wherein the dielectric coating comprises zirconium dioxide, titanium dioxide, zinc sulfide, zinc selenide, or a mixture thereof.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP92201408 | 1992-05-19 | ||
| EP92201408.9 | 1992-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2096455A1 true CA2096455A1 (en) | 1993-11-20 |
Family
ID=8210614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002096455A Abandoned CA2096455A1 (en) | 1992-05-19 | 1993-05-18 | Fabry-perot with coated mirrors |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5381232A (en) |
| JP (1) | JPH0690045A (en) |
| KR (1) | KR930023745A (en) |
| CN (1) | CN1079820A (en) |
| CA (1) | CA2096455A1 (en) |
| TW (1) | TW245772B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4400058A (en) * | 1980-06-16 | 1983-08-23 | Honeywell Inc. | Tunable Fabry-Perot filter |
| GB2082380A (en) * | 1980-08-18 | 1982-03-03 | Standard Telephones Cables Ltd | Injection laser |
| GB8621439D0 (en) * | 1986-09-05 | 1986-10-15 | Secr Defence | Electro-optic device |
| US5001209A (en) * | 1988-07-04 | 1991-03-19 | Akzo N.V. | Non-linear optical active diols and polyurethanes prepared therefrom |
| DE68928746T2 (en) * | 1988-09-08 | 1999-03-11 | Akzo Nobel Nv | Integrated optical components |
| FR2636634B1 (en) * | 1988-09-16 | 1992-11-27 | Rhone Poulenc Chimie | POLYURETHANES, NON-LINEAR OPTICAL ACTIVE INGREDIENTS AND MATERIALS CONTAINING THE SAME, OPTICAL DEVICE CONTAINING THE SAME, AND METHODS OF MAKING SUCH COMPOUNDS AND MATERIALS |
| JPH02146526A (en) * | 1988-11-29 | 1990-06-05 | Seiko Instr Inc | Liquid crystal element |
| US4957655A (en) * | 1989-01-12 | 1990-09-18 | Hoechst Celanese Corp. | Copolymeric nonlinear optical media |
| EP0445864B1 (en) * | 1990-03-06 | 1994-08-24 | Akzo Nobel N.V. | Thermally curable NLO system and integrated optical components prepared therefrom |
-
1993
- 1993-05-13 TW TW082103748A patent/TW245772B/zh active
- 1993-05-18 US US08/063,591 patent/US5381232A/en not_active Expired - Fee Related
- 1993-05-18 CA CA002096455A patent/CA2096455A1/en not_active Abandoned
- 1993-05-19 CN CN93106209A patent/CN1079820A/en active Pending
- 1993-05-19 JP JP5139173A patent/JPH0690045A/en active Pending
- 1993-05-19 KR KR1019930008763A patent/KR930023745A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| KR930023745A (en) | 1993-12-21 |
| TW245772B (en) | 1995-04-21 |
| US5381232A (en) | 1995-01-10 |
| JPH0690045A (en) | 1994-03-29 |
| CN1079820A (en) | 1993-12-22 |
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