CA2116855A1 - An electrically-conductive, light-attenuating antireflection coating - Google Patents

An electrically-conductive, light-attenuating antireflection coating

Info

Publication number
CA2116855A1
CA2116855A1 CA002116855A CA2116855A CA2116855A1 CA 2116855 A1 CA2116855 A1 CA 2116855A1 CA 002116855 A CA002116855 A CA 002116855A CA 2116855 A CA2116855 A CA 2116855A CA 2116855 A1 CA2116855 A1 CA 2116855A1
Authority
CA
Canada
Prior art keywords
conductive
electrically
light
antireflection coating
attenuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002116855A
Other languages
French (fr)
Other versions
CA2116855C (en
Inventor
Erik J. Bjornard
Debra Steffenhagen
R. Russel Austin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viratec Thin Films Inc
Original Assignee
Erik J. Bjornard
Debra Steffenhagen
R. Russel Austin
Viratec Thin Films, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Erik J. Bjornard, Debra Steffenhagen, R. Russel Austin, Viratec Thin Films, Inc. filed Critical Erik J. Bjornard
Publication of CA2116855A1 publication Critical patent/CA2116855A1/en
Application granted granted Critical
Publication of CA2116855C publication Critical patent/CA2116855C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick

Abstract

2116855 9304993 PCTABS00020 A coating (15) for an article (28) comprising layers of nitrides (22, 24) of certain transition metals to provide an electrically-conductive, light-attenuating, antireflection surface.
CA002116855A 1991-09-03 1992-08-28 An electrically-conductive, light-attenuating antireflection coating Expired - Lifetime CA2116855C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US753,714 1991-09-03
US07/753,714 US5407733A (en) 1990-08-10 1991-09-03 Electrically-conductive, light-attenuating antireflection coating
PCT/US1992/007150 WO1993004993A1 (en) 1991-09-03 1992-08-28 An electrically-conductive, light-attenuating antireflection coating

Publications (2)

Publication Number Publication Date
CA2116855A1 true CA2116855A1 (en) 1993-03-18
CA2116855C CA2116855C (en) 2004-07-20

Family

ID=25031824

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002116855A Expired - Lifetime CA2116855C (en) 1991-09-03 1992-08-28 An electrically-conductive, light-attenuating antireflection coating

Country Status (8)

Country Link
US (1) US5407733A (en)
EP (1) EP0602153B1 (en)
JP (1) JP3444880B2 (en)
AT (1) ATE160333T1 (en)
CA (1) CA2116855C (en)
DE (1) DE69223251T2 (en)
DK (1) DK0602153T3 (en)
WO (1) WO1993004993A1 (en)

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US5691044A (en) * 1994-12-13 1997-11-25 Asahi Glass Company, Ltd. Light absorptive antireflector
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US5728456A (en) * 1996-02-01 1998-03-17 Optical Coating Laboratory, Inc. Methods and apparatus for providing an absorbing, broad band, low brightness, antireflection coating
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US6144479A (en) * 1998-12-16 2000-11-07 3M Innovative Properties Company Low reflectivity contrast enhancement filter
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US6368470B1 (en) * 1999-12-29 2002-04-09 Southwall Technologies, Inc. Hydrogenating a layer of an antireflection coating
JP2003521772A (en) * 2000-02-02 2003-07-15 スリーエム イノベイティブ プロパティズ カンパニー 3-layer anti-reflective coating for touch screen
EP1148037A1 (en) * 2000-04-19 2001-10-24 Blösch Holding AG Process for the production of an anti-reflective coating on watchcover glasses
US6337771B1 (en) * 2000-05-03 2002-01-08 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection high conductivity multi-layer coating on CRT surface made by vacuum sputtering and wet coating
US6587097B1 (en) 2000-11-28 2003-07-01 3M Innovative Properties Co. Display system
US6441964B1 (en) * 2001-01-10 2002-08-27 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection high conductivity multi-layer coating for flat CRT products
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US6994910B2 (en) * 2003-01-09 2006-02-07 Guardian Industries Corp. Heat treatable coated article with niobium nitride IR reflecting layer
US6852419B2 (en) 2003-02-21 2005-02-08 Guardian Industries Corp. Heat treatable coated article with niobium chromium nitride IR reflecting layer and method of making same
US6967060B2 (en) 2003-05-09 2005-11-22 Guardian Industries Corp. Coated article with niobium zirconium inclusive layer(s) and method of making same
US6890659B2 (en) * 2003-04-25 2005-05-10 Guardian Industries Corp. Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same
US6908679B2 (en) * 2003-04-25 2005-06-21 Guardian Industries Corp. Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same
US20050008784A1 (en) * 2003-06-27 2005-01-13 3M Innovative Properties Company Removal and replacement of antisoiling coatings
US20050136180A1 (en) * 2003-12-19 2005-06-23 3M Innovative Properties Company Method of coating a substrate with a fluoropolymer
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US7662464B2 (en) * 2007-04-04 2010-02-16 Innovation & Infinity Global Corp. Anti-reflection coating with low resistivity function and transparent conductive coating as outermost layer
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US8986921B2 (en) 2013-01-15 2015-03-24 International Business Machines Corporation Lithographic material stack including a metal-compound hard mask
US8853095B1 (en) 2013-05-30 2014-10-07 International Business Machines Corporation Hybrid hard mask for damascene and dual damascene
JP5983596B2 (en) * 2013-12-26 2016-08-31 ウシオ電機株式会社 Ultraviolet polarized light irradiation method and manufacturing method of substrate with photo-alignment layer
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US10591724B2 (en) * 2016-10-21 2020-03-17 Gentex Corporation Antireflection coatings
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Also Published As

Publication number Publication date
DE69223251T2 (en) 1998-05-28
JPH06510382A (en) 1994-11-17
EP0602153A1 (en) 1994-06-22
JP3444880B2 (en) 2003-09-08
US5407733A (en) 1995-04-18
WO1993004993A1 (en) 1993-03-18
EP0602153A4 (en) 1994-12-14
DK0602153T3 (en) 1998-07-27
ATE160333T1 (en) 1997-12-15
EP0602153B1 (en) 1997-11-19
DE69223251D1 (en) 1998-01-02
CA2116855C (en) 2004-07-20

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