CA2124355A1 - Nonvolative random access memory device - Google Patents

Nonvolative random access memory device

Info

Publication number
CA2124355A1
CA2124355A1 CA002124355A CA2124355A CA2124355A1 CA 2124355 A1 CA2124355 A1 CA 2124355A1 CA 002124355 A CA002124355 A CA 002124355A CA 2124355 A CA2124355 A CA 2124355A CA 2124355 A1 CA2124355 A1 CA 2124355A1
Authority
CA
Canada
Prior art keywords
nvram
region
storage device
charge storage
random access
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002124355A
Other languages
French (fr)
Other versions
CA2124355C (en
Inventor
James A. Cooper, Jr.
John W. Palmour
Calvin H. Carter, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Purdue Research Foundation
Wolfspeed Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2124355A1 publication Critical patent/CA2124355A1/en
Application granted granted Critical
Publication of CA2124355C publication Critical patent/CA2124355C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
    • H01L29/1608—Silicon carbide
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/10—DRAM devices comprising bipolar components

Abstract

A random access memory (RAM) cell in silicon carbide having storage times when all bias is removed long enough to be considered nonvolatile, The nonvolatile random access memory (NVRAM) cell comprises a bit line, a charge storage device in silicon carbide, and a transistor in silicon carbide connecting the charge storage device to the bit line. The bipolar NVRAM cell has a bipolar transistor with a base region, an emitter region, and a floating collector region, wherein the charge storage device in the bipolar NVRAM is a p-n junction adjacent the floating collector region of the cell. The metal-oxide-semiconductor (MOS) NVRAM has a MOS field effect transistor (MOSFET) with a channel region, a source region, and a drain region, wherein the charge storage device in the MOS NVRAM is a MOS capacitor adjacent the drain region of the MOSFET,
CA002124355A 1991-11-26 1992-11-24 Nonvolative random access memory device Expired - Lifetime CA2124355C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US798,219 1991-11-26
US07/798,219 US5465249A (en) 1991-11-26 1991-11-26 Nonvolatile random access memory device having transistor and capacitor made in silicon carbide substrate
PCT/US1992/010210 WO1993011540A1 (en) 1991-11-26 1992-11-24 Nonvolatile random access memory device

Publications (2)

Publication Number Publication Date
CA2124355A1 true CA2124355A1 (en) 1993-06-10
CA2124355C CA2124355C (en) 2005-01-25

Family

ID=25172832

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002124355A Expired - Lifetime CA2124355C (en) 1991-11-26 1992-11-24 Nonvolative random access memory device

Country Status (10)

Country Link
US (1) US5465249A (en)
EP (1) EP0614567B1 (en)
JP (1) JP3473953B2 (en)
KR (1) KR100304248B1 (en)
AT (1) ATE148581T1 (en)
AU (1) AU3226693A (en)
CA (1) CA2124355C (en)
DE (1) DE69217249T2 (en)
TW (1) TW226487B (en)
WO (1) WO1993011540A1 (en)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539217A (en) * 1993-08-09 1996-07-23 Cree Research, Inc. Silicon carbide thyristor
US5510630A (en) * 1993-10-18 1996-04-23 Westinghouse Electric Corporation Non-volatile random access memory cell constructed of silicon carbide
US6077619A (en) * 1994-10-31 2000-06-20 Sullivan; Thomas M. Polycrystalline silicon carbide ceramic wafer and substrate
KR0144909B1 (en) * 1995-03-21 1998-07-01 김광호 Cell array layout method of nonvolatile memory device
GB2305776B (en) * 1995-09-28 1999-11-17 Gresham Sensor Technology Limi Charge amplifier
US5852306A (en) * 1997-01-29 1998-12-22 Micron Technology, Inc. Flash memory with nanocrystalline silicon film floating gate
US5801401A (en) * 1997-01-29 1998-09-01 Micron Technology, Inc. Flash memory with microcrystalline silicon carbide film floating gate
AU747260B2 (en) 1997-07-25 2002-05-09 Nichia Chemical Industries, Ltd. Nitride semiconductor device
US6965123B1 (en) 1997-07-29 2005-11-15 Micron Technology, Inc. Transistor with variable electron affinity gate and methods of fabrication and use
US6746893B1 (en) 1997-07-29 2004-06-08 Micron Technology, Inc. Transistor with variable electron affinity gate and methods of fabrication and use
US6794255B1 (en) 1997-07-29 2004-09-21 Micron Technology, Inc. Carburized silicon gate insulators for integrated circuits
US6936849B1 (en) 1997-07-29 2005-08-30 Micron Technology, Inc. Silicon carbide gate transistor
US7196929B1 (en) 1997-07-29 2007-03-27 Micron Technology Inc Method for operating a memory device having an amorphous silicon carbide gate insulator
US5926740A (en) * 1997-10-27 1999-07-20 Micron Technology, Inc. Graded anti-reflective coating for IC lithography
US5886368A (en) * 1997-07-29 1999-03-23 Micron Technology, Inc. Transistor with silicon oxycarbide gate and methods of fabrication and use
US6031263A (en) 1997-07-29 2000-02-29 Micron Technology, Inc. DEAPROM and transistor with gallium nitride or gallium aluminum nitride gate
US7154153B1 (en) 1997-07-29 2006-12-26 Micron Technology, Inc. Memory device
US6143655A (en) 1998-02-25 2000-11-07 Micron Technology, Inc. Methods and structures for silver interconnections in integrated circuits
US6121126A (en) 1998-02-25 2000-09-19 Micron Technologies, Inc. Methods and structures for metal interconnections in integrated circuits
US6373095B1 (en) 1998-02-25 2002-04-16 International Business Machines Corporation NVRAM cell having increased coupling ratio between a control gate and floating gate without an increase in cell area
US6492694B2 (en) 1998-02-27 2002-12-10 Micron Technology, Inc. Highly conductive composite polysilicon gate for CMOS integrated circuits
DE19925233A1 (en) * 1998-06-08 1999-12-09 Siemens Ag Semiconductor structure, e.g. a Schottky diode, p-n diode or MOSFET, has low contact resistance, temperature stable ohmic contacts
DE19839969C2 (en) * 1998-09-02 2003-02-27 Infineon Technologies Ag Silicon carbide junction field effect transistor
JP3770014B2 (en) 1999-02-09 2006-04-26 日亜化学工業株式会社 Nitride semiconductor device
EP1168539B1 (en) 1999-03-04 2009-12-16 Nichia Corporation Nitride semiconductor laser device
DE60323344D1 (en) * 2002-03-08 2008-10-16 Cornell Res Foundation Inc MICROELECTROMECHANICAL SILICON CARBIDE COMPONENTS WITH ELECTRONIC CIRCUITS
JP3960837B2 (en) * 2002-03-22 2007-08-15 三菱電機株式会社 Semiconductor device and manufacturing method thereof
TWI320571B (en) 2002-09-12 2010-02-11 Qs Semiconductor Australia Pty Ltd Dynamic nonvolatile random access memory ne transistor cell and random access memory array
AU2002951339A0 (en) * 2002-09-12 2002-09-26 Qs Semiconductor Australia Pty Ltd Non volatile memory cell
AU2006203335B2 (en) * 2002-09-12 2008-01-10 Qs Semiconductor Australia Pty Ltd Non Volatile Memory Cell
AU2003258376B2 (en) * 2002-09-12 2006-09-14 Qs Semiconductor Australia Pty Ltd Memory cell
WO2004079355A1 (en) * 2003-03-07 2004-09-16 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V: Ion-sensitive field effect transistor and method for producing an ion-sensitive field effect transistor
US20050269621A1 (en) * 2004-06-03 2005-12-08 Micron Technology, Inc. Flash memory devices on silicon carbide
US7271052B1 (en) 2004-09-02 2007-09-18 Micron Technology, Inc. Long retention time single transistor vertical memory gain cell
US7259415B1 (en) 2004-09-02 2007-08-21 Micron Technology, Inc. Long retention time single transistor vertical memory gain cell
US7538389B2 (en) 2005-06-08 2009-05-26 Micron Technology, Inc. Capacitorless DRAM on bulk silicon
US7404028B2 (en) * 2005-06-30 2008-07-22 Gm Global Technology Operations, Inc. ECU identification retention across reprogramming events
FR2893763A1 (en) * 2005-11-21 2007-05-25 St Microelectronics Sa NON-VOLATILE MEMORY ELEMENT
US8547756B2 (en) 2010-10-04 2013-10-01 Zeno Semiconductor, Inc. Semiconductor memory device having an electrically floating body transistor
TWI362769B (en) 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor
US8189364B2 (en) 2008-12-17 2012-05-29 Qs Semiconductor Australia Pty Ltd. Charge retention structures and techniques for implementing charge controlled resistors in memory cells and arrays of memory
US11908899B2 (en) 2009-02-20 2024-02-20 Zeno Semiconductor, Inc. MOSFET and memory cell having improved drain current through back bias application
US20100238743A1 (en) * 2009-03-23 2010-09-23 James Pan FAST EMBEDDED BiCMOS-THYRISTOR LATCH-UP NONVOLATILE MEMORY
US20110042685A1 (en) * 2009-08-18 2011-02-24 Qs Semiconductor Australia Pty Ltd Substrates and methods of fabricating epitaxial silicon carbide structures with sequential emphasis
US8288795B2 (en) 2010-03-02 2012-10-16 Micron Technology, Inc. Thyristor based memory cells, devices and systems including the same and methods for forming the same
US10340276B2 (en) * 2010-03-02 2019-07-02 Zeno Semiconductor, Inc. Method of maintaining the state of semiconductor memory having electrically floating body transistor
US9608119B2 (en) 2010-03-02 2017-03-28 Micron Technology, Inc. Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures
US8513722B2 (en) 2010-03-02 2013-08-20 Micron Technology, Inc. Floating body cell structures, devices including same, and methods for forming same
US8507966B2 (en) 2010-03-02 2013-08-13 Micron Technology, Inc. Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same
US9646869B2 (en) 2010-03-02 2017-05-09 Micron Technology, Inc. Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices
US8228730B2 (en) * 2010-08-31 2012-07-24 Micron Technology, Inc. Memory cell structures and methods
US8598621B2 (en) 2011-02-11 2013-12-03 Micron Technology, Inc. Memory cells, memory arrays, methods of forming memory cells, and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor
US8952418B2 (en) 2011-03-01 2015-02-10 Micron Technology, Inc. Gated bipolar junction transistors
US8519431B2 (en) 2011-03-08 2013-08-27 Micron Technology, Inc. Thyristors
WO2012153473A1 (en) * 2011-05-06 2012-11-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8772848B2 (en) 2011-07-26 2014-07-08 Micron Technology, Inc. Circuit structures, memory circuitry, and methods
US9025358B2 (en) * 2011-10-13 2015-05-05 Zeno Semiconductor Inc Semiconductor memory having both volatile and non-volatile functionality comprising resistive change material and method of operating
JP6046514B2 (en) * 2012-03-01 2016-12-14 株式会社半導体エネルギー研究所 Semiconductor device
US9548119B2 (en) 2014-01-15 2017-01-17 Zeno Semiconductor, Inc Memory device comprising an electrically floating body transistor
US9496053B2 (en) 2014-08-15 2016-11-15 Zeno Semiconductor, Inc. Memory device comprising electrically floating body transistor
US9673054B2 (en) 2014-08-18 2017-06-06 Micron Technology, Inc. Array of gated devices and methods of forming an array of gated devices
US9209187B1 (en) 2014-08-18 2015-12-08 Micron Technology, Inc. Methods of forming an array of gated devices
US9224738B1 (en) 2014-08-18 2015-12-29 Micron Technology, Inc. Methods of forming an array of gated devices
US10553683B2 (en) 2015-04-29 2020-02-04 Zeno Semiconductor, Inc. MOSFET and memory cell having improved drain current through back bias application
CN107592943B (en) 2015-04-29 2022-07-15 芝诺半导体有限公司 MOSFET and memory cell for improving drain current
US10079301B2 (en) 2016-11-01 2018-09-18 Zeno Semiconductor, Inc. Memory device comprising an electrically floating body transistor and methods of using
US11404419B2 (en) 2018-04-18 2022-08-02 Zeno Semiconductor, Inc. Memory device comprising an electrically floating body transistor
US11600663B2 (en) 2019-01-11 2023-03-07 Zeno Semiconductor, Inc. Memory cell and memory array select transistor

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876992A (en) * 1972-11-01 1975-04-08 Ibm Bipolar transistor memory with capacitive storage
US4183040A (en) * 1976-02-09 1980-01-08 International Business Machines Corporation MOS RAM with implant forming peripheral depletion MOSFET channels and capacitor bottom electrodes
US4164751A (en) * 1976-11-10 1979-08-14 Texas Instruments Incorporated High capacity dynamic ram cell
US4103312A (en) * 1977-06-09 1978-07-25 International Business Machines Corporation Semiconductor memory devices
US4163243A (en) * 1977-09-30 1979-07-31 Hewlett-Packard Company One-transistor memory cell with enhanced capacitance
JPS5462787A (en) * 1977-10-28 1979-05-21 Agency Of Ind Science & Technol Semiconductor device and integrated circuit of the same
US4446535A (en) * 1981-12-31 1984-05-01 International Business Machines Corporation Non-inverting non-volatile dynamic RAM cell
US4635083A (en) * 1984-05-11 1987-01-06 Purdue Research Foundation Memory device
US4751201A (en) * 1987-03-04 1988-06-14 Bell Communications Research, Inc. Passivation of gallium arsenide devices with sodium sulfide
WO1988008617A1 (en) * 1987-04-20 1988-11-03 Research Corporation Technologies, Inc. Buried well dram
US4875083A (en) * 1987-10-26 1989-10-17 North Carolina State University Metal-insulator-semiconductor capacitor formed on silicon carbide
US4945394A (en) * 1987-10-26 1990-07-31 North Carolina State University Bipolar junction transistor on silicon carbide
CA1313571C (en) * 1987-10-26 1993-02-09 John W. Palmour Metal oxide semiconductor field-effect transistor formed in silicon carbide
US4866005A (en) * 1987-10-26 1989-09-12 North Carolina State University Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide
US4912063A (en) * 1987-10-26 1990-03-27 North Carolina State University Growth of beta-sic thin films and semiconductor devices fabricated thereon
US4912064A (en) * 1987-10-26 1990-03-27 North Carolina State University Homoepitaxial growth of alpha-SiC thin films and semiconductor devices fabricated thereon
US4947218A (en) * 1987-11-03 1990-08-07 North Carolina State University P-N junction diodes in silicon carbide
US4981551A (en) * 1987-11-03 1991-01-01 North Carolina State University Dry etching of silicon carbide

Also Published As

Publication number Publication date
KR100304248B1 (en) 2001-11-22
TW226487B (en) 1994-07-11
DE69217249D1 (en) 1997-03-13
ATE148581T1 (en) 1997-02-15
EP0614567A1 (en) 1994-09-14
JP3473953B2 (en) 2003-12-08
AU3226693A (en) 1993-06-28
CA2124355C (en) 2005-01-25
JPH07507657A (en) 1995-08-24
WO1993011540A1 (en) 1993-06-10
EP0614567B1 (en) 1997-01-29
US5465249A (en) 1995-11-07
DE69217249T2 (en) 1997-09-25

Similar Documents

Publication Publication Date Title
CA2124355A1 (en) Nonvolative random access memory device
JPS55124259A (en) Semiconductor device
TW344141B (en) An insulated gate field effect transistor having a crystalline channel region
KR870006662A (en) Dynamic Random Access Memory with Home Capacity
GB1460599A (en) Memory cell
EP0877425A3 (en) Field effect device with polycrystalline silicon channel
GB1485138A (en) Field-effect transistors
ES359165A1 (en) Semiconductor memory device
EP0149401A3 (en) Semiconductor memory device
TW353751B (en) Nonvolatile semiconductor memory device
EP0349022A3 (en) Semiconductor device
ES8800512A1 (en) Trench transistor.
JPS5718356A (en) Semiconductor memory storage
EP0465151A3 (en) Semiconductor device with shottky junction
JPS57192064A (en) Semiconductor integrated circuit
JPS5548894A (en) Memory circuit
EP0329152A3 (en) Semiconductor device with gate array
JPS55117795A (en) Read-only memory
JPS55111171A (en) Field-effect semiconductor device
EP0080254A3 (en) Transistor-transistor logic circuit
TW330343B (en) A semiconductor memory device and its manufacturing method
KR900000633B1 (en) Semiconductor memory device
GB2005071A (en) A junction field effect transistor logic semiconductor device
EP0421446A3 (en) Semiconductor device wherein n-channel mosfet, p-channel mosfet and nonvolatile memory cell are formed in one chip
EP0097338A3 (en) Reference voltage generating device

Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry
MKEX Expiry

Effective date: 20121124