CA2186073C - Liquid ejection method and liquid ejection head therefor - Google Patents

Abstract

A Liquid ejecting method for ejecting liquid using a bubble, includes using a liquid ejecting head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to the bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof; displacing the movable member from the first position to the second position by pressure based on generation of the bubble in the bubble generating region, wherein the bubble expands more to the downstream side than to the upstream side with respect to a direction toward the ejection outlet by the displacement of the movable member, thus directing the bubble toward the ejection outlet to eject the liquid through the ejection outlet: and imparting an operation to the liquid ejecting head to normalize a state of the liquid in a liquid flow path for the liquid at least before liquid ejection start or at the time of non-ejection of the liquid.

Description

-1- 2t86Q73 LIQUID EJECTION METHOD AND
LIQUID EJECTION HEAD THEREFOR

FIELD OF THE INVENTION AND RELATED ART
The present invention relates to a liquid ejecting head for ejecting desired liquid by generation of bubble by application of thermal energy thereto, a head cartridge using the liquid ejecting head, a liquid ejecting apparatus and a liquid ejecting method.
More particularly, the present invention relates to a liquid ejecting method, a liquid ejecting head, a head cartridge using the liquid ejecting head, and a liquid ejecting apparatus, using a movable member which displaces by generation of a bubble.
The present invention is applicable to equipment such as a printer, a copying machine, a facsimile machine having a communication system, a word processor having a printer portion or the like, and an industrial recording device combined with various processing device or processing devices, in which the recording is effected on a recording material such as paper, thread, fiber, textile, leather, metal, plastic resin material, glass, wood, ceramic and so on.
In this specification, "recording" means not only forming an image of letter, figure or the like -2- 2~86073 having specific meanings, but also includes forming an image of a pattern not having a specific meaning.
An ink jet recording method of so-called bubble jet type is known in which an instantaneous state change resulting in an instantaneous volume change (bubble generation) is caused by application of energy such as heat to the ink, so as to eject the ink through the ejection outlet by the force resulted from the state change by which the ink is ejected to and deposited on the recording material to form an image formation. As disclosed in US patent No. 4,723,129, a recording device using the bubble jet recording method comprises an ejection outlet for ejecting the ink, an ink flow path in fluid communication with the ejection outlet, and an electrothermal transducer as energy generating means disposed in the ink flow path.
With such a recording method is advantageous in that, a high quality image, can be recorded at high speed and with low noise, and a plurality of such ejection outlets can be posited at high density, and therefore, small size recording apparatus capable of providing a high resolution can be provided, and color images can be easily formed. Therefore, the bubble jet recording method is now widely used in printers, copying machines, facsimile machines or another office equipment, and for industrial systems such as textile printing device or the like.

2 1 8~n73 With the increase of the wide needs for the bubble jet technique, various demands are imposed thereon, recently.
For example, an improvement in energy use efficiency is demanded. To meet the demand, the optimization of the heat generating element such as adjustment of the thickness of the protecting film is investigated. This method is effective in that a propagation efficiency of the generated heat to the liquid is improved.
In order to provide high image quality images, driving conditions have been proposed by which the ink ejection speed is increased, and/or the bubble generation is stabilized to accomplish better ink ejection. As another example, from the standpoint of increasing the recording speed, flow passage configuration improvements have been proposed by which the speed of liquid filling (refilling) into the liquid flow path is lncreased.
Japanese Laid Open Patent Application No.
SHO-63-199972 and so on discloses a flow passage structure shown in Figure 34, (a), (b).
On the other hand, in the bubble jet recording method, the heating is repeated with the heat generating element contacted with the ink, and therefore, a burnt material is deposited on the surface of the heat generating element due to burnt ~4~ 2 1 86~73 deposit of the ink. However, the amount of the deposition may be large depending on the materials of the ink. If this occurs, the ink ejection becomes unstable. Additionally, even when the liquid to be ejected is the one easily deteriorated by heat or even when the liquid is the one with which the bubble generation is not sufficient, the liquid is desired to be ejected in good order without property change.
Japanese Laid Open Patent Application No.
SHO-61-69467, Japanese Laid Open Patent Application No. SHO-55-81172 and US Patent No. 4,480,259 disclose that different liquids are used for the liquid generating the bubble by the heat (bubble generating liquid) and for the liquid to be ejected (ejection liquid). In these publications, the ink as the ejection liquid and the bubble generation liquid are completely separated by a flexible film of silicone rubber or the like so as to prevent direct contact of the ejection liquid to the heat generating element while propagating the pressure resulting from the bubble generation of the bubble generation liquid to the ejection liquid by the deformation of the flexible film. The prevention of the deposition of the material on the surface of the heat generating element and the increase of the selection latitude of the ejection liquid are accomplished, by such a structure.
However, with this structure in which the ejection liquid and the bubble generation liquid are completely separated, the pressure by the bubble generation is propagated to the ejection liquid through the expansion-contraction deformation of the flexible film, and therefore, the pressure is absorbed by the flexible film to a quite high degree. In addition, the deformation of the flexible film is not so large, and therefore, the energy use efficiency and the ejection force are deteriorated although the some effect is provided by the provision between the ejection liquid and the bubble generation liquid.

SUMMARY OF THE INVENTION
Accordingly, it is a principal object of the present invention to provide a liquid ejecting head and device wherein the state of the liquid to be ejected is changed at least upon the start of the recording operation, while maintaining the high ejection power and the high ejection efficiency, by which ejection performance and the property for the recording material are improved or normalized to stabilize and improve the image quality.
It is another object of the present invention to provide a liquid ejecting head and a device, wherein ejection liquid and/or the bubble generation liquid is discharged at the latest upon the record start, and the density of the ejection liquid is stabilized to improve or stabilize the image quality.
It is a further object of the present invention to provide a liquid ejecting head, a driving method therefor, and a device, wherein selection latitude of the liquid to be ejected is enhanced, while maintaining the stability of the ejection property and the high recorded image quality.
According to an aspect of the present invention, there is provided a Liquid ejecting method for ejecting liquid using a bubble, comprising the steps of: using a liquid ejecting head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
displacing the movable member from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the ~7~ 2l 86a 73 liquid through the ejection outlet; and imparting an operation to said liquid ejecting head to normalize a state of the liquid in a liquid flow path for the liquid at least before liquid ejection start or at the time of non-ejection of the liquid.
According to another aspect of the present invention, there is provided a liquid ejection apparatus, using a liquid ejection head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, Z5 thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; the improvement comprising:

driving means for imparting an operation to said liquid ejecting head to normalize a state of the liquid in a liquid flow path for the liquid at least before liquid ejection start or at the time of non-ejection of the liquid.
According to a further aspect of the present invention, there is provided a liquid ejecting head for ejecting liquid using a bubble, comprising:
an ejection outlet for ejecting the liquid:
a bubble generating region for generating the bubble in the liquid:
a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and means for changing a state of said liquid by 9 21~6073 changing a temperature of said liquid.
According to a further aspcet of the present invention, there is provided a liquid ejecting head for ejecting liquid using a bubble, comprising:
an ejection outlet for ejecting the liquid:
a bubble generating region for generating the bubble in the liquid:
a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and liquid moving means for changing a state of said liquid by moving said liquid without ejecting said liquid.
According to a further aspect of the present invention, there is provided a liquid ejection 2 1 ~6073 - 1 o -apparatus for ejecting liquid, comprising:
a liquid ejecting head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and energy increasing means for making larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter.
According to a further aspect of the present invention, there is provided a liquid ejecting method for ejecting liquid using a bubble, comprising:
using a liquid ejecting head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to said bubble generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and making larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter.
According to a further aspect of the present invention, there is provided a liquid ejecting apparatus for effecting recording by ejecting liquid, comprising:
a liquid ejecting head having an ejection outlet for ejecting the liquid, a bubble generating region where a bubble is generated in the liquid, a movable member which is disposed faced to said bubble -12- 2 1 ~6073 generating region, and which is displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and discharging means for discharging said liquid from the liquid flow path for the liquid to be ejected during a predetermined period in a non-ejection period at least before ejection start, using means partly constituting said liquid ejecting head.
means for changing a state of said liquid by 0 changing a temperature of said liquid .
liquid moving means for changing a state of said liquid by moving said liquid without ejecting said liquid; and energy increasing means for making larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter.

-13- 2 ~ 86~73 In this specification, "upstream" and "downstream" are defined with respect to a general liquid flow from a liquid supply source to the ejection outlet through the bubble generation region (movable member).
As regards the bubble per se, the "downstream" is defined as toward the ejection outlet side of the bubble which directly function to eject the liquid droplet. More particularly, it generally means a downstream from the center of the bubble with respect to the direction of the general liquid flow, or a downstream from the center of the area of the heat generating element with respect to the same.
In this specification, " substantially sealed" generally means a sealed state in such a degree that when the bubble grows, the bubble does not escape through a gap (slit) around the movable member before motion of the movable member.
In this specification, "separation wall" may mean a wall (which may include the movable member) interposed to separate the region in direct fluid communication with the ejection outlet from the bubble generation region, and more specifically means a wall separating the flow path including the bubble generation region from the liquid flow path in direct fluid communication with the ejection outlet, thus preventing mixture of the liquids in the liquid flow paths.
In this specification, "upon 'non-ejection ', 'non-printing' or 'non-recording' ", means "when the liquid is not ejected for a period longer than a minimum ejection period (a reciprocal of the maximum ejection frequency) of repeated liquid ejections by bubble generations for the recording operation, in a nozzle. For example, it occurs in the not recording range in one line recording in a serial printer, in the sheet advancing period between lines, in the sheet feeding period between pages, in a temporary rest period waiting for recording instructions from a host computer, or in the off-state of the voltage source.
Thus, it may mean a short or long period.
In this specification, "upon 'ejection start', 'print start', or 'record start'", covers a short period from start or resumption of the ejection, printing or recording after the non-ejection of a certain period.
While the invention has been described with reference to the structures disclosed herein, it is not confined to the details set forth and this application is intended to cover such modifications or changes as may come within the purposes of the improvements or the scope of the following claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Figure 1 illustrates a liquid flow passage structure of a conventional liquid ejecting head, wherein (a) is a schematic perspective view thereof, and (b) is a sectional view thereof.
Figure 2 is a schematic sectional view showing an example of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 3 is a partial partly broken perspective view of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 4 is a schematic view showing pressure propagation from a bubble in a conventional liquid ejecting head.
Figure 5 is a schematic view showing pressure propagation of a bubble in a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 6 shows flow of liquid in liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 7 is a partial partly broken perspective view showing a second example of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 8 is a partial partly broken -16- 2~ 86~3 perspective view showing a third example of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 9 is a partial partly broken perspective view of an example of a 2 flow path type liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure lO is a portion partly broken perspective view showing an example of a 2 flow path type liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure ll illustrates an operation of a movable member.
Figure 12 illustrates a structures of a movable member and a first liquid flow path.
Figure 13 illustrates structures of a movable member and liquid flow path.
Figure 14 illustrates another configuration of the movable member.

Figure 15 is a longitudinal sectional view of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 16 is a schematic view showing a configuration of a driving pulse for effecting bubble generation.
Figure 17 is a sectional view illustrating a supply passage of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 18 is an exploded perspective view of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 19 is an exploded perspective view of a liquid ejection head cartridge.
Figure 20 is a schematic illustration of a liquid ejecting apparatus.
Figure 21 is a block diagram of a liquid ejecting apparatus.
Figure 22 is a diagram of a liquid ejection recording system.
Figure 23 is a schematic view illustrating structures of another example (side shooter type) of a liquid ejecting head using the liquid ejection principle applied to the present invention.
Figure 24 is a flow chart showing process steps of the whole recording device according to a first embodiment of the present invention.
Figure 25 is a flow chart of a recovery sequence of the process steps of Figure 24, at the time of soft power ON.
Figure 26 is a flow chart of a recovery sequence of the process steps of Figure 24, at the time of head exchange.
Figure 27 is a flow chart of a stand-by 21 a~û73 sequence of the process steps of Figure 24.
Figure 28 illustrates a part of the recovery sequence process of the process steps of Figure 24, during the recording operation.
Figure 29 is a flow chart of a soft power OFF
recovery sequence of the process steps shown in Figure 24.
Figure 30 is a perspective view showing a liquid ejecting apparatus according to a second embodiment of the present invention.
Figure 31 is a top plan view illustrating a structure for dynamic viscosity detection.
Figure 32 is a flow chart of preliminary sequence.
Figure 33 is a perspective view showing an example of another structure of a liquid ejecting apparatus according to a second embodiment of the present invention.
Figure 34 is a flow chart of preliminary sequence.
Figure 35 is a schematic view showing a liquid ejecting head according to a further embodiment of the present invention.
Figure 36 illustrates arrangements of heating means on an element substrate of a liquid ejecting head according to an embodiment of the present invention, wherein (a) is top plan view, and (b) is a sectional view taken along a line z-z' line.
Figure 37 illustrates arrangements of heating means on an element substrate of a liquid ejecting head according to an embodiment of the present invention, wherein (a) is top plan view, and ~b) is a sectional view taken along a line z-z' line.
Figure 38 illustrates arrangements of heating means on an element substrate of a liquid ejecting head according to an embodiment of the present invention, wherein ~a) is top plan view, and (b) is a sectional view taken along a line z-z' line.
Figure 39 is a sectional view a liquid flow path of a head using a driving method according to a seventh embodiment of the present invention Figure 40 shows pulses for driving, according to an embodiment of the present invention.
Figure 41 is a graph showing displacement of a meniscus with time at the ejection outlet position.
Figure 42 is a schematic view showing a fundamental structure for driving the head.
Figure 43 illustrates control of driving pulses.
Figure 44 illustrates driving pulses of an eighth embodiment according to the present invention.
Figure 45 illustrates a control of driving pulses according to an eighth embodiment of the present invention.

2 1 8~073 Figure 46 illustrates driving pulses of a ninth embodiment according to the present invention.
Figure 47 is a graph showing displacement of a meniscus with time at the ejection outlet position.
Figure 48 illustrates a control of driving pulses according to a ninth embodiment of the present invention.
Figure 49 is a sectional view of a liquid ejecting head suitable for a driving method for a liquid ejecting head according to a first 0 embodiment of the present invention.
Figure 50 shows pulses for driving a heat generating element.
Figure 51 illustrates the first O embodiment, and more particularly is a sectional view of a liquid flow path of a head using a driving method of the present invention.
Figure 52 illustrates control of driving pulses.
Figure 53 is a schematic view of a driving structure of a liquid ejecting apparatus according to an embodiment of the present invention.
Figure 54 shows an equivalent circuit of an element substrate of a liquid ejecting head.
Figure 55 is a waveform graph showing driving pulses.
Figure 56 shows a relation between a driving voltage and a pulse width of the driving pulse.
Figure 57 is a flow chart showing steps of an initial ejection stabilization process according to 11th embodiment of the present invention.
Figure 58 is a waveform graph showing driving pulses.
Figure 59 shows a relation between a driving time of a driving pulse and an ejection speed.
Figure 60 is a flow chart showing steps of an initial ejection stabilization process according to 12th embodiment of the present invention.
Figure 61 is a waveform graph showing driving pulses.
Figure 62 is a flow chart showing steps of an initial ejection stabilization process according to 13th embodiment of the present invention.
Figure 63 is a waveform graph showing driving pulses.
Figure 64 is a sectional view showing a structure of a liquid ejecting head according to a first 4 embodiment of the present invention.
Figure 65 is a flow chart showing steps of an initial ejection stabilization process according to 14th embodiment of the present invention.
Figure 66 is a flow chart showing process steps for preliminary ejecting operation upon print start.

-22- 2 ~ 86073 Figure 67 schematically shows a content of a table usable with the process shown in Figure 66.
Figure 68 is a timing chart of each operation shown in Figure 66.

DESCRIPTION OF THE PR~K~ EMBODIMENTS
(Ejection Fundamentals and Head Structure) The description will be made as to fundamentals on the ejection of the liquid and the structure of the head. First, the description will be made as to an improvement in an ejection force and/or an ejection efficiency by controlling a direction of propagation of pressure resulting from generation of a bubble for ejecting the liquid and controlling a direction of growth of the bubble.
Figure 2 is a schematic sectional view of a liquid ejecting head taken along a liquid flow path according to this embodiment, and Figure 3 is a partly broken perspective view of the liquid ejecting head.
The liquid ejecting head of this embodiment comprises a heat generating element 2 (a heat generating resistor of 40 ~m x 105 ~m in this embodiment) as the ejection energy generating element for supplying thermal energy to the liquid to eject the liquid, an element substrate 1 on which said heat generating element 2 is provided, and a liquid flow path 10 formed above the element substrate -23- 2~86373 correspondingly to the heat generating element 2. The liquid flow path 10 is in fluid communication with a common liquid chamber 13 for supplying the liquid to a plurality of such liquid flow paths 10 which is in fluid communication with a plurality of the ejection outlets 18.
Above the element substrate in the liquid flow path 10, a movable member or plate 31 in the form of a cantilever of an elastic material such as metal is provided faced to the heat generating element 2.
One end of the movable member is fixed to a foundation (supporting member) 34 or the like provided by patterning of photosensitivity resin material on the wall of the liquid flow path 10 or the element substrate. By this structure, the movable member is supported, and a fulcrum (fulcrum portion) is constituted.
The movable member 31 is so positioned that it has a fulc,rum (fulcrum portion which is a fixed end) 33 in an upstream side with respect to a general flow of the liquid from the common liquid chamber 13 toward the ejection outlet 18 through the movable member 31 caused by the ejecting operation and that it has a free end (free end portion) 32 in a downstream side of the fulcrum 33. The movable member 31 is faced to the heat generating element 2 with a gap of 15 ~m approx. as if it covers the heat generating element 2. A bubble generation region is constituted between the heat generating element and movable member, The type, configuration or position of the heat generating element or the movable member is not limited to the ones described above, but may be changed as long as the growth of the bubble and the propagation of the pressure can be controlled. For the purpose of easy understanding of the flow of the liquid which will be described hereinafter, the liquid flow path 10 is divided by the movable member 31 into a first liquid flow path 14 which is directly in communication with the ejection outlet 18 and a second liquid flow path 16 having the bubble generation region 11 and the liquid supply port 12.
By causing heat generation of the heat generating element 2, the heat is applied to the liquid in the bubble generation region 11 between the movable member 31 and the heat generating element 2, by which a bubble is generated by the film boiling ZO phenomenon as disclosed in US Patent No. 4,723,129.
The bubble and the pressure caused by the generation of the bubble act mainly on the movable member, so that the movable member 31 moves or displaces to widely open toward the ejection outlet side about the fulcrum 33, as shown in Figure 2, (b) and (c) or in Figure 3. By the displacement of the movable member 31 or the state after the displacement, the propagation of the pressure caused by the generation of the bubble and the growth of the bubble per se are directed toward the ejection outlet.
Here, one of the fundamental ejection principles according to the present invention will be described. One of important principles of this invention is that the movable member disposed faced to the bubble is displaced from the normal first position to the displaced second position on the basis of the pressure of the bubble generation or the bubble per se, and the displacing or displaced movable member 31 is effective to direct the pressure produced by the generation of the bubble and/or the growth of the bubble per se toward the ejection outlet 18 (downstream side).
More detailed description will be made with comparison between the conventional liquid flow passage structure not using the movable member (Figure 4) and the present invention (Figure 5). Here, the direction of propagation of the pressure toward the ejection outlet is indicated by VA, and the direction of propagation of the pressure toward the upstream is indicated by VB.
In a conventional head as shown in Figure 4, there is not any structural element effective to regulate the direction of the propagation of the pressure produced by the bubble 40 generation.

Therefore, the direction of the pressure propagation of the is normal to the surface of the bubble as indicated by Vl-V8, and therefore, is widely directed in the passage. Among these directions, those of the pressure propagation from the half portion of the bubble closer to the ejection outlet (Vl-V4) have the pressure components in the VA direction which is most effective for the liquid ejection. this portion is important since it directly contributable to the liquid ejection efficiency, the liquid ejection pressure and the ejection speed. Furthermore, the component Vl is closest to the direction of VA which is the ejection direction, and therefore, is most effective, and the V4 has a relatively small component in the direction VA.
On the other hand, in the case of the present invention, shown in Figure 5, the movable member 31 is effective to direct, to the downstream (ejection outlet side), the pressure propagation directions Vl-V4 of the bubble which otherwise are toward various directions. Thus, the pressure propagations of bubble 40 are concentrated, so that the pressure of the bubble 40 is directly and efficiently contributable to the ejection.
The growth direction per se of the bubble is directed downstream similarly to to the pressure propagation directions Vl-V4, and grow more in the -27- 2 ~ 86073 downstream side than in the upstream side. Thus, the growth direction per se of the bubble is controlled by the movable member, and the pressure propagation direction from the bubble is controlled thereby, so that the ejection efficiency, ejection force and ejection speed or the like are fundamentally improved.
Referring back to Figure 2, the ejecting operation of the liquid ejecting head in this embodiment will be described in detail.
Figure 2, (a) shows a state before the energy such as electric energy is applied to the heat generating element 2, and therefore, no heat has yet been generated. It should be noted that the movable member 31 is so positioned as to be faced at least to the downstream portion of the bubble generated by the heat generation of the heat generating element. In other words, in order that the downstream portion of the bubble acts on the movable member, the liquid flow passage structure is such that the movable member 31 extends at least to the position downstream (downstream of a line passing through the center 3 of the area of the heat generating element and perpendicular to the length of the flow path) of the center 3 of the area of the heat generating element.
Figure 2, (b) shows a state wherein the heat generation of heat generating element 2 occurs by the application of the electric energy to the heat generating element 2, and a part of of the liquid filled in the bubble generation region 11 is heated by the thus generated heat so that a bubble is generated through the film boiling.
At this time, the movable member 31 is displaced from the first position to the second position by the pressure produced by the generation of the bubble 40 so as to guide the propagation of the pressure toward the ejection outlet. It should be noted that, as described hereinbefore, the free end 32 of the movable member 31 is disposed in the downstream side (ejection outlet side), and the fulcrum 33 is disposed in the upstream side (common liquid chamber side), so that at least a part of the movable member is faced to the downstream portion of the bubble, that is, the downstream portion of the heat generating element.
Figure 2, (c) shows a state in which the bubble 40 has further grown. By the pressure resulting from the bubble 40 generation, the movable member 31 is displaced further. The generated bubble grows more downstream than upstream, and it expands greatly beyond a first position (broken line position) of the movable member. Thus, it is understood that in accordance with the growth of the bubble 40, the movable member 31 gradually displaces, by which the pressure propagation direction of the bubble 40, the -2g- 2186073 direction in which the volume movement is easy, namely, the growth direction of the bubble, are directed uniformly toward the ejection outlet, so that the ejection efficiency is increased. When the movable member guides the bubble and the bubble generation pressure toward the ejection outlet, it hardly obstructs propagation and growth, and can efficiently control the propagation direction of the pressure and the growth direction of the bubble in accordance with the degree of the pressure.
Figure 2, (d) shows a state wherein the bubble 40 contracts and disappears by the decrease of the pressure in the bubble, peculiar to the film boiling phenomenon.
The movable member 31 having been displaced to the second position returns to the initial position (first position) of Figure 2, (a) by the restoring force provided by the spring property of the movable member per se and the negative pressure due to the contraction of the bubble. Upon the collapse of bubble, the liquid flows back from the common liquid chamber side as indicated by VD1 and VD2 and from the ejection outlet side as indicated by Vc so as to compensate for the volume reduction of the bubble in the bubble generation region 11 and to compensate for the volume of the ejected liquid.
In the foregoing, the description has been _30- 2186~73 made as to the operation of the movable member with the generation of the bubble and the ejecting operation of the liquid. Now, the description will be made as to the refilling of the liquid in the liquid ejecting head of the present invention.
Referring to Figure 2, liquid supply mechanism will be described.
When the bubble 40 enters the bubble collapsing process after the maximum volume thereof (Figure 2, (c)), a volume of the liquid enough to compensate for the collapsing bubbling volume flows into the bubble generation region from the ejection outlet 18 side of the first liquid flow path 14 and from the bubble generation region of the second liquid flow path 16. In the case of conventional liquid ~low passage structure not having the movable member 31, the amount of the liquid from the ejection outlet side to the bubble collapse position and the amount of the liquid from the common liquid chamber thereinto, are influenced by the flow resistances of the portion closer to the ejection outlet than the bubble generation region and the portion closer to the common~
liquid chamber (flow path resistance and the inertia of the liquid).
Therefore, when the flow resistance at the supply port side is smaller than the other side, a large amount of the liquid flows into the bubble -31- 2 ~ 8 ~7 3 collapse position from the ejection outlet side with the result that the meniscus retraction is large.
With the reduction of the flow resistance in the ejection outlet for the purpose of increasing the ejection efficiency, the meniscus M retraction increases upon the collapse of bubble with the result of longer refilling time period, thus making high speed printing difficult.
According to this embodiment, because of the provision of the movable member 31, the meniscus retraction stops at the time when the movable member returns to the initial position upon the collapse of bubble, and thereafter, the supply of the liquid to fill a volume W2 is accomplished by the flow VD2 through the second flow path 16 (W1 is a volume of an upper side of the bubble volume W beyond the first position of the movable member 31, and W2 is a volume of a bubble generation region 11 side thereof). In the prior art, a half of the volume of the bubble volume W is the volume of the meniscus retraction, but according to this embodiment, only about one half (Wl) is the volume of the meniscus retraction.
Additionally, the liquid supply for the volume W2 is forced to be effected mainly from the upstream (VD2) of the second liquid flow path along the surface of the heat generating element side of the movable member 31 using the pressure upon the collapse -32- 2~86073 of bubble, and therefore, more speedy refilling action is accomplished.
When the refilling using the pressure upon the collapse of bubble is carried out in a conventional head, the vibration of the meniscus is expanded with the result of the deterioration of the image quality. However, according to this embodiment, the flows of the liquid in the first liquid flow path 14 at the ejection outlet side and the ejection outlet side of the bubble generation region 11 are suppressed, so that the vibration of the meniscus is reduced.
Thus, according to this embodiment, the high speed refilling is accomplished by the forced refilling to the bubble gen~ration region through the liquid supply passage 12 of the second flow path 16 and by the suppression of the meniscus retraction and vibration. Therefore, the stabilization of ejection and high speed repeated ejections are accomplished, 2~ and when the embodiment is used in the field of recording, the improvement in the image quality and in the recording speed can be accomplished.
The embodiment provides the following effective function. It is a suppression of the propagation of the pressure to the upstream side (back wave) produced by the generation of the bubble. The pressure due to the common liquid chamber 13 side _33- 2 1 86073 (upstream) of the bubble generated on the heat generating element 2 mostly has resulted in force which pushes the liquid back to the upstream side (back wave). The back wave deteriorates the refilling of the liquid into the liquid flow path by the pressure at the upstream side, the resulting motion of the liquid and the resulting inertia force. In this embodiment, these actions to the upstream side are suppressed by the movable member 31, so that the refilling performance is further improved.
The description will be made as to a further characterizing feature and the advantageous effect.
The second liquid flow path 16 of this embodiment has a liquid supply passage 12 having an internal wall substantially flush with the heat generating element 2 (the surface of the heat generating element is not greatly stepped down) at the upstream side of the heat generating element 2. With this structure, the supply of the liquid to the surface of the heat generating element 2 and the bubble generation region 11 occurs along the surface of the movable member 31 at the position closer to the bubble generation region 11 as indicated by VD2.
Accordingly, stagnation of the liquid on the surface of the heat generating element 2 is suppressed, so that precipitation of the gas dissolved in the liquid is suppressed, and the residual bubbles not -34- 2 1~6073 disappeared are removed without difficulty, and in addition, the heat accumulation in the liquid is not too much. Therefore, the stabilized bubble generation can be repeated at a high speed. In this embodiment, the liquid supply passage 12 has a substantially flat internal wall, but this is not limiting, and the liquid supply passage is satisfactory if it has an internal wall with such a configuration smoothly extended from the surface of the heat generating element that the stagnation of the liquid occurs on the heat generating element, and eddy flow is not significantly caused in the supply of the liquid.
The supply of the liquid into the bubble generation region may occur through a gap at a side portion of the movable member (~lit 35) as indicated by VDl. In order to direct the pressure upon the bubble generation further effectively to the ejection outlet, a large movable member covering the entirety of the bubble generation region (covering the surface of the heat generating element) may be used, as shown in Figure 2. Then, the flow resistance for the liquid between the bubble generation region 11 and the region of the first liquid flow path 14 close to the ejection outlet is increased by the restoration of the movable member to the first position, so that the flow of the liquid to the bubble generation region 11 along V
can be suppressed. However, according to the head ~35~ 2 1 86~73 structure of this embodiment, there is a flow effective to supply the liquid to the bubble generation region, the supply performance of the liquid is greatly increased, and therefore, even if the movable member 31 covers the bubble generation region 11 to improve the ejection efficiency, the supply performance of the liquid is not deteriorated.
The positional relation between the free end 32 and the fulcrum 33 of the movable member 31 is such that the free end is at a downstream position of the fulcrum as indicated by 6 in the Figure, for example.
With this structure, the function and effect of guiding the pressure propagation direction and the direction of the growth of the bubble to the ejection outlet side or the like can be efficiently assured upon the bubble generation. Additionally, the positional relation is effective to accomplish not only the function or effect relating to the ejection but also the reduction of the flow resistance through the liquid flow path 10 upon the supply of the liquid thus permitting the high speed refilling. When the meniscus M retracted b the ejection as shown in Figure 6, returns to the ejection outlet 18 by capillary force or when the liquid supply is effected to compensate for the collapse of bubble, the positions of the free end and the fulcrum 33 are such that the flows Sl, Sz and S3 through the liquid flow path 10 including the first liquid flow path 14 and the second liquid flow path 16, are not impeded.
More particularly, in this embodiment, as described hereinbefore, the free end 32 of the movable member 3 is faced to a downstream position of the center 3 of the area which divides the heat generating element 2 into an upstream region and a downstream region (the line passing through the center (central portion) of the area of the heat generating element and perpendicular to a direction of the length of the liquid flow path). The movable member 31 receives the pressure and the bubble which are greatly contributable to the ejection of the liquid at the downstream side of the area center position 3 of the heat generating element, and it guides the force to the ejection outlet side, thus fundamentally improving the ejection efficiency or the ejection force.
Further advantageous effects are provided using the upstream side of the bubble, as described hereinbefore.
Furthermore, it is considered that in the structure of this embodiment, the instantaneous mechanical movement of the free end of the movable member 31, contributes to the ejection of the liquid.
Figure 7 shows a second embodiment. In Figure 7, A shows a displaced movable member although bubble is not shown, and B shows the movable member in the initial position (first position) wherein the bubble generation region 11 is substantially sealed relative to the ejection outlet 18. Although not shown, there is a flow passage wall between A and B to separate the flow paths.
A foundation 34 is provided at each side, and between them, a liquid supply passage 12 is constituted. With this structure, the liquid can be supplied along a surface of the movable member faced to the heat generating element side and from the liquid supply passage having a surface substantially flush with the surface of the heat generating element or smoothly continuous therewith.
When the movable member 31 is at the initial position (first position), the movable member 31 is close to or closely contacted to a downstream wall 36 disposed downstream of the heat generating element 2 and heat generating element side walls 37 disposed at the sides of the heat generating element, so that the ejection outlet 18 side of the bubble generation region 11 is substantially sealed. Thus, the pressure produced by the bubble at the time of the bubble generation and particularly the pressure downstream of the bubble, can be concentrated on the free end side side of the movable member, without releasing the pressure.
In the process of the collapse of bubble, the -38- 2 ~ 8607 3 movable member 31 returns to the first position, and the ejection outlet side of the bubble generation region 31 is substantially sealed, and therefore, the meniscus retraction is suppressed, and the liquid supply to the heat generating element is carried out with the advantages described hereinbefore. As regards the refilling, the same advantageous effects can be provided as in the foregoing embodiment.
In this embodiment, the foundation 34 for supporting and fixing the movable member 31 is provided at an upstream position away from the heat generating element 2, as shown in Figure 3 and Figure 7, and the foundation 34 has a width smaller than the liquid flow path 10 to supply the liquid to the liquid supply passage 12. The configuration of the foundation 34 is not limited to this structure, but may be anyone if smooth refilling is accomplished.
In this embodiment, the clearance between the movable member 31 and the clearance is 15 ~m approx., but the distance may be changed as long as the pressure produced by the bubble generation is sufficiently propagated to the movable member.
Figure 8 shows one of the fundamental aspects of the present invention. Figure 8 shows a positional - 25 relation among a bubble generation region, bubble and the movable member in one liquid flow path to further describe the liquid ejecting method and the refilling _39_ 21a 6 ~73 method according to an aspect of the present invention.
In the above described embodiment, the pressure by the generated bubble is concentrated on the free end of the movable member to accomplish the quick movement of the movable member and the concentration of the movement of the bubble to the ejection outlet side. In this embodiment, the bubble is relatively free, while a downstream portion of the bubble which is at the ejection outlet side directly contributable to the droplet ejection, is regulated by the free end side of the movable member.
More particularly, the projection (hatched portion) functioning as a barrier provided on the heat generating element substrate 1 of Figure 3 is not provided in this embodiment. The free end region and opposite lateral end regions of the movable member do not substantially seal the bubble generation region relative to the ejection outlet region, but it opens the bubble generation region to the ejection outlet region, in this embodiment.
In this example, the growth of the bubble is permitted at the downstream leading end portion of the downstream portions having direct function for the liquid droplet ejection, and therefore, the pressure component is effectively used for the ejection.
Additionally, the upward pressure in this downstream 2~ 8~73 portion (component forces VB2, VB3 and VB4) acts such that the free end side portion of the movable member is added to the growth of the bubble at the leading end portion. Therefore, the ejection efficiency is improved similarly to the foregoing embodiments. As compared with the embodiment, this embodiment is better in the responsivity to the driving of the heat generating element.
The structure of this embodiment is simple, and therefore, the manufacturing is easy.
The fulcrum portion of the movable member 31 of this embodiment is fixed on one foundation 34 having a width smaller than that of the surface of the movable member. Therefore, the liquid supply to the bubble generation region ll upon the collapse of bubble occurs along both of the lateral sides of the foundation (indicated by an arrow). The foundation may be in another form if the liquid supply performance is assured.
In the case of this embodiment, the existence of the movable member is effective to control the flow into the bubble generation region from the upper part upon the collapse of bubble, the refilling for the supply of the liquid is better than the conventional bubble generating structure having only the heat generating element. The retraction of the meniscus is also decreased thereby.

. -41- 2t 86073 ~ n a pref~rable modlfied embodi~ent of the third embodiment, both of the lateral sldes (~r only one l~teral side1 a~e ~ubstantially ~ealed f~r the ~ubble generation re~ion 11. With such a structure, 5 the pre~ure to~ard thc lateral ~ide of the movable member i~ also directed to the ejection outlet ~ide end portlon, so that the ejection efficiency is further improved.
The ~escription will be made a~ to another 10 examPle~
The ejection principle for the liquid in thi~
em~odiment is the ~me as in the foregoing em~n~i -nt.
The llquid flow path ~s ~ multl-passage st~ucture, and the li~uid ~bu~ble generation liquid) for ~ub~le - 15 generat~on by the heat, and the liquid (ejection ~i~uid) mainly ejected, Are separated.
Figure g ~ 5 A section~l schemAtic ~iew ln a direction along the flow path o~ th~ l~qu1d ejec~iny h~ad of this embo~i e t. Figur~ 10 is a perspective 20 view thereo~.
In the liquid ejeGting head of this embodiment, a ~eco~d liguid flow path 16 for the ~u~ble gener~tion is pro~ided on the e~ement ~u~strate 1 wh~ch is pr~vided with a heat generatiny ~lement 2 for suPPlYing thP ~1 ener~y for gene~ating the bubble in the liquid, and a first liquid flo~ path 14 for the ejection liquid in direct communication with t~e e~cti~n outle~ 18 is ~orme~ thereabove, The upst~e~m side of t~e first llquid flow path is in ~luid 11 lnicat$on with a first eommon liquid rh~mh~r 15 for ~upplying the ejecti~n l~qui~
into a plurality of ~irst liquid flow path~, and ~he up~tream 6ide of th~ second liquid flow path is ln fluid c~ ication with the s~con~ . n liqui~
ch~er for supplying the bubble generation li~id to a plurality o~ ~econd liquid flow path~
In the ca~e that the bub~le generation liquid and ejection liquid ~re th~ same liq~ids, the n~mber of the ~- -~n liqul~ cham~ers may ~e one.
Be~een the first an~ ~econd liquid ~low paths, there i~ a separ~tlon wall 30 of an elastic material such as meta~ h~t the ~irst flow pat~ and the ~econd f low pa~h are se~rated In the case tha~
mixing of the bubble gen~raticln liqui~l and the ejection liquid ~hould be r~1mll~, the fir~t liquid ~low path 14 ~nd ~h~ s~ond ll~uid flow path 16 ~re 20 prefera}~ly isolated by the partition wall. However~
when the mixing to a certain ~t~nt is permissible, the complete i801ation iS not inevitab~
A portion of the partition wall in the upward proje~tiorl ~pace OI the heat generati~g ~lemRnt ~5 ( e jection pressure generation re~ion including A and ~
(~ubble generation region ll) in Figur~ lO), i~ in the f~m of a c ntilever mov~ble member 31, form~d by slit~ 35, having a fulcrum 33 at the common li~uid chambe~ (15, 17) side and free end a~ the e~ection outlet si~e (downstre~m with re~pect to the general flow of the liq~id~. The movable member 31 i~ fac~d to the surface, an~ theréf~re, lt operates to open toward the ejection ou~let ~ide of the fir~ ~iquid flow pa~h upon the bubble ~ener~tion of th~ bu~ble g~n~ration llquld ~direction of the arrow ln the Flgure). In an example o~ ~igure lJ., too, ~ partltion wall 30 i~ di~po~ed, with a space ~or c~nstituting a second liquid flow path, abo~e an elemen~ substrate 1 pro~ided with a hea~ generating r~sistor portlon as the heat gen~rating element ~ ~nd wiring electrodes 5 fo~ applying an electric signal to the h~at g~nerating lS res~stor portion.
A~ for the positional relat~on am~ng the f~lcrum 33 and the free end 32 of t~e moYable m~ber 31 and the he~t generating element, are the same as in the previ~u~ example.
II1 the previous example, the de~criptlon has been made a6 to the relation ~e~e~l the fitructures of ~he liquid su~ply pas~age 12 and the heat generating eleme.nt 2 The relation ~w~en ~he ~econd liquid ~I.ow path 16 an~l the heat S~enerating elemen~ 2 i~; the sa~e in thi6 embodiment.
Referring to Figure 11, the operation of the liqui~ eJectlng head of thi~ Pmhodime~t will be 2l 86~73 described.
The used e~ection liquid in the first liquid f low path 14 ~nd the used bubble generation liquid in the second liqul~ flow path 16 were t~e same w~ter base lnks.
By the heat gener~ted hy the heat generating elPment ~, the ~ubble generatiOn llquid in the ~ub~le generation regi~n in the second liq~d flow p~th generate6 a bubble 40, ~y film boiling phP~I ~n~n described hereinbefore.
In thls embodiment, the b~bble generati~n pre6~ure i~ not relea6ed in the three ~irectlons except for the ~pstream side ln the bubb~e ~eneration regio~, 60 that the pressure produced by the hubble ~eneration is propagated co~ntratedly on the movable mem~er 6 ~ide in the ejection pres~ure generation portion, by which the mov~ble member 6 is displ~cea from the position indicated in ~igure 11, (a) toward ~he fir~t liquid flow path side as indicated in Figure 11, ~b) wi~h the growth of the bubble. By the operation af the movable ~ember, the first liquid flow path 14 ~nd the ~econd llquid fl~w path 16 are in wide f~uid e~mm~nlc~tlon wlth each oLher, ànd the pressure pro~uced by the genera~tion o~ ~e bubble i~ ~ainly propagated ~oward the ejection o~tlet in the first l~guid flow path (direction A). ~y the propagation o~
the pressure and the --h~ntc~l displ~ L of the _45_ 2186~3 mova~le m~mher~ the li.qui~ i~ eiect~d th~ough the ejection outlet.
Then, wlth the contraction of the ~u~ble, ~he movable member 31 returns ~o the po~ition indicated in Figure 11, (a), and correspondlng~y, an amount af the liquid corresponding to the eject$on liquid is ~pplied from the upstream in ~he first li~ul~ flow path 14. In thi~ nt, the direction o~ the liquid supply i~ codirectional with the clo~ing of the 10 ~ovable mem~er as in the foregoing embo~ ment~, the refillin~ of the liquid ifi not impeded by the movab~e memger.
The m~jor ~unction~ and effects as regard~
the propaga~ion of the b~bb~ ~eneration pre~ure with the dixplacement of the mo~ble wall, the direction of the bu~ble growtll, the prevention of the back wave and sa an, ~n thi~ e~nil-nt~ are the same a~ with th~
~irst emho~iment, but the two-flow-path s~ruct~re i~
advantag~ous in the fo~lowing point8 Th~ eject$on llquid an~ ~he nu~ble generation liquid may be s~parate~, an~ ~he ej~tion liq~ld l ejected by the pr~ssu~e pr~ e~ in the bubbl~
generation liquid, Accordin~l~, a high ~iscoslty liquid such as polyethYl~n~ glycol or ~h~ like ~Ith 2~ which bu~ble generation and theref~re eJectlon force is no~ sufflcient by heat application, and ~hich ha~
not ~een eJected in good o~der, can ~e eiected. F~

-46- 2 t 86~73 e~a~ple, this liquid i6 ~upplied into the first liquid fl~w path, and liquid with which the bubble generation is ln good order is ~ppl~ed into the second p~th as the ~ble generation liquid. An example of the bubblR generatl~n llquid a mi~ture liquld (1 - Z cP
appro~.~ ~f ~he anol and water (4;6). By doing ~o, the ejectiun liquid ~an he properly ej0cted.
Addltlonally, by selecting as th~ bu~le generation li~uid ~ liquid wlth whic~ the deposi~ion such as kogation doe~ not r~main on the ~urface of the heat generating element ev~n upnn the heat applica~ion, the bub~le generation is stabilize~ to ~ure the ~roper ejeetions. ~he d~ove-d~scrib~d effect~ in ~e foregoing embod$m~nt6 are also provided - 15 in this embo~lim~nt, the high Ti8CoUS liquid or the like can be ejected with a high ejection efficiency and a high ejection pres6ure.
Furthermore, liquid which is not durable as~ainst ~e~t iE; e~ectable. In this case, 6uch a liquld ls supplied in the fir~t liquid flow path as the ejectian llquld, and a liquid ~hich is not easily altere~ ln the property by th~ hea~ an~ with which the ~ub~le gener~tlon ls in good ~rder. is supplied in the ~ oQn~ liquid flow path. By dolng ~;o, the liqui~l can 25 be ejecte~ without thermal damage and with high ejection efficiency and wlth high ejection pressure.
In the foregolng, the description ha~ been 21 ~6073 made as to the major p~rts of the li~uid ejecting he~
and the li~uid ejecting method according to t~e embodiments of the pre~sent inlrention. The d~;crip~ion will now be made as to further detailed embodiment6 usable with the ~oregoing embodiment~ The following exa~plQs ~re u~a~le with both of the single-flow-path type ~nd two-~low-pa~h type without specific statement.
~Liyuid flow path ceiling configuratlon~
Flgure 12 is a sectional ~le~ taken ~long the lengt~ of t~e flow path of the liquid ejecting head according to the embodiment. ~r~oves for c~stit~ting the first li~uid ~low path~ 14 ~or liquld ilow p~hs 10 in Figur~ ~ ) are formed in grooYe4 member 5U on a 1~ partition wall 30. In thi~ embodiment, the height of the flow path ceiling adjacent t~e ~ree end 32 position of t~e mo~ble mem~er is greater to pe~it laryer operation angle ~ o~ the mo~able me~er. The operation range of the moTable member is deteL i n~d in ZO congider~tion o~ the structure of the liquid flow ~atll, the durability o~ the movable member and the ~u4ble generation power or the like, It is desirable that lt moves in the angle range ~ide enough to lnclude the anyle c~f the position o~ the ejection ~5 outlet.
A~ shown ~n thi~ Figure, the di~placed l~el o~ the ~ree end of the ~ova~le m~m~er i6 made higher than the diameter of ~he e~ection outlet, ~y which ~ufficient ejection pres~ure is transmitted. A~
shown in this Figure, a height of th~ li~uid flow path ce$1ing at tlle fulcrum 33 posit~on of the movable member is lower than that of th~3 liquid ~low path cei 1 ing at the f ree end 32 po~it ion c~f th~ mova~le mem~E~r, E;~ that the release o~ ~he pre~ure wave to the upstream side due to the displ~r~ ?nt of the movable member can be further effectively preven~ed~
10 CPosi~ional relation ~etween second liquid flow p~th an~ mova~le m~mher>
Fig~re 13 is an lllustration of a positional relation ~etween the a~o~e-~e~cribed mova~le me~ber 31 an~ second liquid flow path 16, and ~a) is a view of 15 the mo~ble ~ember 31 ~oslti~n of the par~ition wall 30 as seen from the above, and ~b) is a vi~w of the second liquid flo~ pa~h 16 seen ~r~m ~he above withaut partitio~ ~all 30. Figure 14, ~c~ is ~ schematic Yiew of the positional relation between the mo~able ~0 mem~er 6 and the second liquid flow path 1~ wherein ~he element~ are o~erlaid. ~n these Figures, the bottom is a front side haYing the ¢~ection outlet~.

The ~e~on~l liquid flow path 16 o~ thi~i embodiment has a throat portion lg upstream o:E the ~eat generating e~ement 2 with re~pect to a ~eneral flow of the liquid from the second common liquid chamber ~ide to the ejectlon outlet through the ~eat _4~_ 2 1 86073 generatlng ele~ent position, the movable member p~Eition along ~he flrst flo~ path, ~o as to provide a chamber (bub~le generation chamber) eff~ctive to suppress easy release, ~oward the upstream ~ide, of t~e pre~sure ~roduced upon ~he bubble generation in the ~cond llquid flow p~th 16.
In the case.of the c~nventlonal head whereln t~Q flow path ~here the bubble ~eneratlon occur~ and the flow path from whlch the li~uid i5 ejected, are the same, a throat p~rtlon may ~e pro~ide~ to prevent the releas~ of the p~e~ure generat~d by the heat gene~ating elem~n~ toward the li~ui~ cham~er. In s~ch a case, the ~ross~sectional a~ea o~ the thro~t portion 6hould not be too ~mall in con~ideration o~ the 15 ~ufficient refilling of the liquid.
Ho~ever, in the ca~e ~f thls em~odiment, much ar most of the ~jected liquid is from t~e first li~uid flow path, and the bubble gener~tion liquid in the second liquld ~ow path having the heat ~enerating 2~ element i~ not con~umed much, so that the filling amount of the bubble generation liquid to the bubble generatlon ~egion 11 may ~e ~all. Thereforer the cl~a~ance at ~he throat portiun 19 can be made very r.mall, for example, as ~mall as se~eral ~m - ten and se~eral ~m, 60 that ~he release of the pre66ure - p~odueed ln the ~econd llquid flow path can be fu~ther suppressed and to further concentrate it to the 21860~3 -5~-~ovable membe~ ~ide. The pre~ure can be used ~s ~he ejection press~re through the movable member 31, and therefore, the high eiection ene~gy u$e efficiency and eiection pressure can be ~ccomp~i6hed. The configuration of the second liquid flow path 16 is not limit~d to the on~ descri~ed above, but may be any i~
the pressure pro~uce~ ~y the bubble generation i6 effectively transmitted to the moYa~le memDer side.
As shown in ~igure 13, (c~, the lateral ~ides of the ~ovable mem~er ~1 cover respective p~rts of the walls constituting the second liquid flow path ~o that the falling o~ the mo~able m~mber 31 into th~ second liquid ~low path i~ pr~vented. By d~ing xo, the above-de~cribed separation b~tween the ejection liquid and the b~b~le generation liquld i8 fu~the~ PnhAnrod Furthermore, the relea~ o~ the ~ubble through the ~lit can be suppre~ed 80 tha~ e~e~tion pres~ure and ei~ction efficiency ure ~urther in~rea~ed. Mo~eov~r, the a~v~ described e~ect of the re~illing from the up~tream ~ide ~y the pressure upon the collapse of bubble, can be further enhance~.
In Fi~re 11. (b) and Figure 12, a part ~
~he b~h~le ~enerated in the bubble generation region o~ the ~econ~ llquid flow path 4 with the di~placement of the mo~able member 6 to the fir~t liguid ~low path 14 side, extend6 into the fi~st liquid flow path 14 side by ~electing the height of the ~ron~ flow path -51- 21 ~6~73 to permit 8UC~ extenslon of the bu~le, the ejection force is further improved a6 compared with the case without suc~ ~xten~ion af the bubble. To prcYi~e such ex~en~ing of the bubble into the first liquid flow 5 p~th 14, the height of the ~e~ond liquid flow path 16 i~ preferably lower than the height of the ~ m bubble, more p~rt~cularly, the hei~ht is prefera~ly several ~m - 30 ~m, for example. I~ this example, the helght is 15 ~.
lU cMovable mem~er and partltion wall~
Figure 14 show~ anhther example of the mo~able m~.~her 31, whereln re~erence ~umeral 35 designates a ~lit formed in ~he par~ition wall, and the sli~ i~ effective to provlde the movable mem~er 31. In Flgure 15, ta~, the movable member has a ~ectangular configuration, and ln ~b~, it is na~rower in the fulcrum si~e to permit increased mo~llity of the mov~ble member, and in (c), it haæ a wider fulcrum ~ide to ~h~ the durability of the moYabl~ m~m~er.
The ~onfiguration narro~ed and arcuated at ~he ~ulcr~m side i~ desirable a6 sho~n in Figure 14, (a), ~inc~
~oth of easine6s of motio~ an~ durability ~re satisfied. Howe~er, the configurat~on of the mo~able memb~r ~ ~ not limited to the one d~scribed abo~e, ~ut i~ may be any if it doe6 not enter the se~o~A liquia flo~ path side, and motion i~ easy with high durabilit~.

--52- 21 86a73 In the ~oregoing embo~i r-nts, the plat~ or film ~o~able me~ber ~l ~nd the s~par~tion wall 5 havin~ this ~ovable membe~ ~as made of a nickel havlng a thickne~ of 5 ~m, but ~his is not limited to this 5 example, but it may ~e any if i~ ha~ anti-~ol~ent property against the ~ubble generatlon liqui~ and the ejection li~uid, and if the elasticit~ i8 enouyh to ps~mit the operation of the mova~le member, and if the requir~d fine slit c~n be formed P~eferable examplex of the mate~ial~ for the moY~le member in~lude durable materials such as metal ~uch as 51 lver, nick~l, gold, iron, titanium, alumin~m, pla~inum, tantalum, ~tainle~s steel, pho6phor bron~e or the liket alloy thQreofr or resin 15 material ha~ing nyt-ril group ~uch ~ acrylonitrile, ~utadiene, stylene or the like, resin material ha~ing amide group such ah polyamide or the like, re~in material ha~ing carboxyl ~uch a~ polycarbo~ate or the like, resin material having al~eh~de group ~uch a~
2~ polyacetal or the like, resin material having sulfon grou~ such as polysulfone, resin material such as liquid cry~l polymer or the like, or ~hemical d t~ereo~; or material~ having durability agalnst the ink, ~uch ~s metal ~ch as gold, tu~gsten, 25 ~antalum, nickel, 6tainlesY steel, titanium, alloy thereof, materlals coated ~ith 8uch metal, resin material having amlde group 6uch as polyamide, resin 2186~73 m~terial havlng aldehyde gro~p 6uch a~ pol.ya~etal, resin material ha~ing ketone g~oup such a~
polyetheretherke~one, resin material having imide ~roup ~uch as polyi~ide, ~esin material h~ing 5 hydrox~l group such a~ phenolic re6in, resin materlal havi~g etnyl gr~up such a~ polyethylene, resin materlal having al~yl group such as polYp~opylene, re6in material havin~ epoxy group such a~ epoxy resin material, resin materia~ having amina group such as ~. me~ ine reOEin ma~3ri~1, resin materiAl haY~ng methylol group such a~ xylene resin m~terial, chemical compound thereof, ceramic m~terlal such as ~ilicon dioxide or che~ical compound thereof.
P~efe~able example~ of partition or division 15 wall in~lude resin material ha~ing high heat-resistive, high anti-solvent property and hlgh molding prope~ty, more particularl~ recent engineering pla~tlc resin mat~rials suc~ ~5 polyethylene, polypropylen~, polyamide. polyethylene terephthalate, ~elamine re~in 20 m~terial, phenolic resin, epoxy resin material, polybutadiene, polyurethane, pol~et~eretherketone, polye~her sulf~ne, polyallylate, polyimide, poly--sulfone, liqutd crystal pol~mer (LCP), or chemical compound thereof, or metal Yuch a~ ~ilicon dioxide, 25 silicon nitride, nickel, gold, ~tainless ~teel, alloy thereo~, c~emi~al compound thereof, or material~
coated wi~h tltanium o~ yold.

~54~ 2t ~6073 The thlckness ~f ~he ~eparatlon wall i~
determined depen~ ng on the ~SQd mater~al and configuration from ~h~ stAn~r~lnt of su~ficient strength a~ the ~all and ~ufficient operatlvlty as the 5 movable membe~, and generally, 0.5 ~m - 10 ~m appro~.
i~ desirable.
The width o~ the slit 35 for proYiding the movable member ~l is 2 ~m in th~ ~ ment~. When the ~u~ble gene~ation liquid and ejection liquld are different materials, an~ mixture of the liquid~ i8 to be av~ide~, the gap is determined so as to form a menisc~s ~etween the Iiquid~, thu~ a~oiding mixture therebet~een For example, when ~he bubble generation liquid has a vlxcosity about 2 cP, and the eiection liqui~ has a visc~ity not le~6 than 100 cP, 5 ~m approx. slit is enough to av~id the liquld mixture, but not mor~ than 3 ~m is desira~le.
c~lement ~ub~t~ate>
The dH cription wlll be made a~ to a ~0 st~ucture of the element ~u~str~te pr~vided with the heat gensrating element for heating the ll~uid.
Figure 15 is a longit~ n~l ~ctio~ of the liquid eje~ting head accordlng to an embodiment c~ the present in~entlon, wherein (a) ha~ ~ protection layer, and (b) doe~ not have a protection iayer .
On the ele~ent eubstrate l, a 9LOO~r~ ~ember 50 i8 mounted, the member 50 having secon~ liquid flow -55- ~ 1 86~7~

paths 16, separation ~alls 3~, flræt li~auid flow paths 14 and groovç~s for conE;ti~ting the flrst licIuid f~ow path .
The element ~iu~strate 1 ha~, as xhown $n 5 Figure 11, p;~tterrled wiring electrode ~.2 - 1.0 ~m thlc~k) of aluminuln o~ the like and patterned electric re~ z~nce layer 105 ~0.01 - 0.2 llm thick) of ha~nium boride (HfB2~, tantalum nitride (TaN), tantalu~
alu~inum (TaAl ~ or the like con~tituting the heat 1~ generating element on a silicon oxide film or 6ilicon nitride fllm 10~ ~or ins~l~tion and heat accumulation, which in turn is on the substrate ~07 af silico~ or the like A voltage is appl~e~ to the resi~tance layer 1~5 through the two wiring electro~e~ 104 to flow a current through the resist~ce l~er to effect heat generat~on. Between the wi~ing elec~rode, a pr~tection layer o~ silicon oxide, silieon nitrlde ar the like of O.1 - 2.0 ~m thick is pro~ided ~n the r~si~tance layer, and in addition, an antl-cavitation laYer of tantalum or the like (0.1 - 0.6 ~m thl~k) ls for~ed t~ereon to protect the re~i~tanCe layer 105 from various li~uid such as ink.
The pre~sure and shock wave generated upon the bub~le gener~tion and collapse is so strong that Z5 the durability of the oxide film which i8 relatively irag$~e i~3 deteriorated. Therefore, metal material such as tan~alum ~a) or the like 1s u~ed a~ th~ an~i-cavitation layer.
The protection layer may ~e omitted ~epen~in~
on t~e combination of liquidr liquid flow path structure an~ re~istanc~ material. One o~ such 5 example~ is shown in Figure 4, (b). The ~ate~al of the resis~ance layer not requiring the protection layer, inclu~es, for e~ample, iridium-tantalu~-alumlnum allo~ or the like. Thu~, the structure of the heat generat~ng element in the foregoing 1~ embodiments may include onl~ the resi~tance layer (heat generation portion) or m~y include a protection la~er for protecti~g the resistance la~er In ~he em~odlment, the heat gene~ating ~lement has a heat generatlon portion having the ~esistance layer which generates heat in respon~e to the elec~ric s~gnal. This is not llmitin~, and it will suffice if a bubbl~ enough to eject the eJectlon liquid is cre~ted in th~ ~bble generation liquid For e~:a~ple, he~t generation portion may be in the 20 form of a photothermal tranE~ducer ~qhich generate~ heat upon receiving light su~h as laser, or the on~ which g~nerates heat upon receiving high f ~equ~ncy wave .
On the element substrate 1, function elements such as a transi~;tor, a diode, Zl l~tch, El 8hift 25 regi~ter and so on $or ~eleeti~e driv~ng the electrot.hPr~l tran~iducer elelnent may also be integrally built in, in addition to the resistance --57- 21 ~6~73 layer 105 constituting the heat generation portlon an~
the electrothermal tran~ducer consti~uted by the wiring electrode 104 for supplying the electrlc signal to the re~i~tance layer.
In order to eject the liquid by driving the heat generation portlon of the electro~hermal ~ransd~cer ~n the ~ove-de~cribed element su~strate 1, the resistance layer 105 i~ supplied ~hrough the wiring elec~r~de 104 wi~h rectangular pulses a~ ~hown 1~ in Figure 21 to cause ins~ntaneous heat generation in the resistance layer 105 between the wiring electrode.
In the case of the heads of the foregoing em~odlments, the applie~ e~ergy has a voltage of Z4 V, a pul~e width of 7 ~sec, a current o~ 150 mA and a frequency 15 of 6kHz to drive the heat generating element, by ~hich th~ liquid $nk is ejec~ed through the e~ection ou~let through the process descri~ed hereinbefore However, the driving signal conditions are no~ limited ~o this, but may be any if the bubble generation liquid i~
p~operly capable of bubble generation.
<Head ~tructure of 2 flow path ~tructure~
The description will be made as to a ~tructure of the ~iquid ejectlng head with which di~feren~ liquids are separately ~c~ ted in f irst 25 and second common liquid chamber, and the number o~
part~ can ~e reduces 80 that the manufacturing cost can be r~

-5~- 2~8 6073 Fig~re 17 is a schcmatic view o~ such a li~uid eje~ing ~d. The Qame reference num~rals a~
in the pre~ious emboA~ - L are ass$gne~ ~o the element6 ha~ing the corre~ponding funct$onc, ~nd 5 detailed descriptions thereo~ are omitted for simpl lcity .
In this embodiment, a grooved m---nh~r 50 ha~
an orifice plate Sl having an ejection outlet 18, a plur~lity cf groove~ for co~s~ituting a plu~ality o$~
l~ first llquid flow path~ 14 and a reces6 for constitu~ing ~he first common liquid chamber 15 ~or supplying the liq~id (e~ection liquid) to the plurality of liquid flow p~ths 14. A ~eparation wall 30 is mounted ~o the bot~m of the grooved member 50 by w~ich plurallty of firs~ uid flow paths 14 are formed. Such a yLO~v~d member 50 has ~ flrst liquid ~upply pas~age ~0 extending from an upp~r po~ on to the first __ .. liquid ~h~ 15. The g~oo~ed member 50 also ha~ a ~cond liquid supp~y pas~ge 21 2~ extending from an upper position to the seco~d ~- -n liyuid r.hamber 17 through th~ ~paration wall ~0.
A~ indicated by an arrow ~ in Figu~e 17, the fir~t liq~id (eje~tion liquid) is supplied throug~ the fir~t liquid 6upply pas~ge 20 and ~rst ~ uid ch~mber 15 to the first liquid flo~ path 14, and the 6econd liquid (b~bble generation liquid~ upp~ied to the second liquid flow path 16 through the c^Onn~

-~59~ 2186073 liquid ~pply passage 21 and the se~nd common liquid chamb~r 17 as indicated by arrow ~ ln Figure 17.
In thi~ example the ~econd liquid supply passag~ 21 i8 e~t~nded ln parallel with the fir~t liq~ia supply pan~age ~0, but ~hi~ is not limited to the exemplification, but it may be any if the liquid is ~upplied to the second common liquid ch~mher 17 throush the separati~n wall 30 out~ide the first common liquid chamber 15.
The (diameter~) o~ the second liq~id ~upply p~ssage 21 i~ determi~ed in con~ide~ation of the supply amo~nt of ~he se~ond liguid. Th~ configuration of the sec~nd liqui~ supply passage 21 i8 not limited to circu~ar or round ~ut m~y be r~tangular or the like.
The sec~nd c~mm~n 11qul~ ch~mh~r 17 ~ay be formed by dividing the grooved ~y a ~eparation wall 30. A8 for the method o~ for~ing thiæ~ a~ ~h~wn ln Fig~re 18 which is an exploded perspe~tive view, a ZO common l~quid chA~hQr f~ame and a sec~nd liquid passage wal1 are ~ormed of a dry film, and a combi~ation of a yLOO~d member 50 having the sep~ration wall ~ixed thereto and th~ ~lemen~
~b6trate 1 are bonded, thus ~orming the sQC~onA common 25 liquid chamber 17 and the ~3econd liquid flow path 16 In this example, the element æu~trate 1 is constituted ~y pro~iding the supporting ~em~er 70 of -~~4- 2 186~13 ~etal such as aluminum with a plurality of electrothermal transducer element~ as heat gener~ing ele~ent~ ~or generating heat for bubble generation ~r~m the bubble generation ~iquid through film bolllng.
A~oYe the element s~bs~rate 1, the~e ~e disp~ed ~he plural~ty of groove~ consti~uting th~
liquid fl~w path 16 ~ormed bY the ~cnn~ liquid pacs~ge w~lls, the recess for constituting the second common llquid chamber ~common ~u~ble generation liquid chamber) 17 whlch is i~ ~lu~ ~ommunication ~lth the plurality of bubble gener~tion l~qui~ flow pat~s for supplying th~ bubble generation liquid to ~he bu~le generation ~iquid pa~ages, and the ~eparati~n or dividing ~alls 30 ha~lng the movable w~ll~ 31.
Designated ~y r~ference n~meral 50 ia a g~Go~ed member. The groov~d m mher i8 provided with yLo~es for con~tituting the e]ection liguid flow paths (fir~t liquid ~lo~ path~) 14 by mo~nting the ~eparation wall~ 30 thereto, a rece~ for constitu~lng the first common liquid chamber ~common ~jection liquid çh~m~r) lS for supplying the e~ectlon liquid to the e~ection liq~id flow path~, ~he ~irst 6upply passage (ejection liquid supply p~s6age) :~0 for 25 Is~pplying the ejection li~uid to the ~lr~t common liquld ~ha h~r, and ~he ~econ~ supply pa~age (~ubb~e generati~n liguid ~upply pas6age) 21 ~or supplying the -21 ~6073 bubble generation liquid to the 6eoond supply pass~ge (bu~ble generation liquid supply passage~ 21A The ~econd supply pa~age 21 is connected with a fluid e~- -ication pat~ in ~luid com-.lnication wlth th~
second common liquid chamber 17, penetrating through the separation wall 30 disposed outside of the fir~t ~ommon liquid chamhe~ 15. By the pro~i~ion of the fluid c~mmunicatlon path, tne bu~ble generation liquid can be ~pplied to the ~eco~d ~ liquid chamber 15 withou~ miæture with the e~ecticn liquid ~ he po~itional relatlon among the element sub~t~ate 1, separation wal 1 30, grooved top plate 50 i6 ~llch that the movable members ~1 are arranged corre~ponding to the he~t generating e~ements on the element sub~trate 1, and that the e~ection liquid flow paths 14 ~re arranged corresponding to ~he movable me~ber~ 31. In this example, one second supply p~s~age i~ ~rovided for the gL~o~cd member, but it may be plural in accordanoe with the ~pply ~ unL The crosQ-~ectional area of the flow path of the ejection llquid ~upply pa~age 20 and the ~ubble generat~on l~quid suppl~ passa~e 21 may be determined in prop~rtion to the ~upply a~ount. B~ t~e optimi~ation o~ the cross-seetional area of the f low path, the 25 par~s consti~uting the ~.~ov~ mPmher 50 or the like can be down6ized As ~escribed in the foregoing, accordiny to thi~ embodiment, the second supply passage ior supplying the ~econd liquid to the second liquid flow path ~nd the irst ~pply passage for 6upplying the firs~ liquid ~o the fir~t liquid flow p~th, can be 5 provided b~ ~ single groo~ed top plate, ~o that the number of part~ can be r~ , and therefore, the reduct~on ~f the manufacturing xteps an~ therefore the reduction of the manufacturing cost, are accompll~hed.
~urthermore, the supply of the second 1 iquid 10 to the second common liquid chamb~r in fluid c~ l1cation with the ~ro~d liquid flow path, is effected through the second liquid flo-~7 path ~hich penetrates ~he ~eparatioT~ wall for sepa~ating the first liquid and the second liquid, and there~ore, one 15 bonding ~tep is enough for the ~onding of the separation wall, the grooved -. h~r and the heat generat~ng elemerlt Eiubstrate~ so that the manufacturing i8 easy, and the accuracy of the bonding i s improved .
Since the second liquid i~ ~upplied to the second liqui~ common llquld ~h~ r. penetrating the separatlon wall, the suppl~ of ~he ~econ~ liquid to the second 1$qu1d flow path i8 a~s~re~, and therefore, th~ ~upply amOunt i~ suffic~ent ~o that the ~tabilized ejectlon is accomplishe~
cEiectio~ liquid and nuh~le generation liquid>
As describe :1 in the foregolng embs~i. . t, -6~-2 ~ 86073 according to the pre~ent in~ention, ~y the structure having the movable member described abo~e, the liquid c~ be ejected ~t hi~her e~ection force or eiection efficiency than the conventional ll~uid ejecting head.
5 When the same liqui~ ~ u~ed for the bubble generation li~uid an~ the ejection li~id, ~t is possible that the li~ui4 i5 not de~eri~rated, ~n~ ~hat deposition on the ~eat generating element due ~o heating can be red~ Therefore, a reversi~le state change is accomplishe~ by repeating the ga~sification and r~n~en.sation. So, ~ariou~ liquids ~re usable, lf the liquid i~ the one not deteriorating the liqui~ flow passage, movab~e member o~ separation wall or the llke.
Among such liquids, the o~ haYing the in~redient a~ used in ~onventional b~bble jet device, can ~e used a~ a recording liquid.
When the two flo~-path structure o~ the pre~ent inve~tion i8 u~ed with di~erent ejection liquid an~ ~u~ble generation liquid, the bubble generation liqul~ having the above-de~cribed proPerty is used, m~re partlcularly, the exA ple~ include~:
me~hanol, ethanol, n-propyl ~lcohol, is~propyl alcohol, n- n-heYAn~, n-heptane, n-octane, toluene, xylene, meth~lene ~ichlorlde, trich7oroethylene, Freo~
TF, Freon ~, ethyl ether, dioxane, cycloheY.~ne, methyl acetate, ethyl ace~te, acetone, methyl ethyl ketone, water, or the like, and a mixt~re thereof.
A~ for the e~ection li~uid, various ~iquid~
are usable without paying attention to the degree ~f bubble gen~ration property o~ ~hermal pr~perty. The li~uid~ ~hich ha~e ~t been co~ventionally usable, because of low bubble generation praperty and/or ea~iness of property chan~e due to heat, are usable.
Howeve~, it is de~ired that the eje~tion liquid ~y itself or by reaction with the bubble generat~on li~uid, does not impe~e the ejection, the bub~le generatlon or the ~peration of the movable mem~er or the llke.
As for the recording e~ection liquid, high Yiscous ink or the like is u~able As for a~other ejectlon ll~u~, pharm~ceuticals and perfume or the like having a na~ure easily deteriorated ~y heat is usable. The ink of the fallowlng lngre~ient was used as the recordiny liguid u6able for both of the ejeotion liquid and the ~ubble generation llguld, ~nd 2~ the recording operation wa~ carried o~t. Slnce the ejection ~p~ed of the lnk is increa~ed, the shot accur~cy of the liquid droplets is imp:roved, a~d the~efore, highly desir~le images were recorded Dye ink vi~cosity of 2~p:
~C . I . food black 2 ) dye 3 wt .
diethylene ~lycol 10 wt. ~
Thio diglycol 5 wt %

Ethanol 5 wt Water 77 wt. -%
Recording operationg were al~o carried out u6ing the following com~i~ati~n of tne liquld~ for the 5 bubble generation liquid and the ejection liquid. As a result, the liquid having a ten and several cp~
vi6co~ity, whi~h was unable to be ejected heretofore, ~as properly ej~cted, and even 150cp~ liqui~ was properl~ ejected to provide h$gh quality imag~.
Bubble genera~ion liquid 1:
Ethanol 40 wt. %
Water . 60 w~.
~ubble generati~n llquid 2:
water lO0 wt. %
15 Bubble generati~n llquid 3;
Isopr~pyl alcohollc 10 wt. ~
Water 90 wt~ %
~jectinn ll~uld l (Pigment ink approx. 15 cp~
Carbon black 5 wt Stylene-a~rylat~-acr~late ethyl copolymer resi~ materl~l1 wt. %
Disper~ion material ~oxide 140, weight average molecular weight) Z5 Mono-etha~ol a~ine 0.2~ w~.
Glyceline 69 wt. %
Thiodiglycol 5 wt. ~

-66- 2 ~ 86073 Ethanol Water 16 . 75 w~
Ejection liquid 2 (55cp):
Polyethylene glycol 200 100 wt.
5 ~jection li~id 3 ~150cp~:
Polyethylene glycol 600 100 wt. ~
In the case of the liquid ~hich has not been easily e~ected, the ejection speed 1~ low, and therefore, the ~ar~ation in the ejection dlrectlon is expanded on the recordins paper with the re~ult of poor shot accurhcy. Additionally, variation of eje~tion amount occurs due to the ejection in~ta~illty, thus pre~enting the recording o~ high qu~lity image. However, ~ccording to the embodimen~s, the u~e of the bu~ble generation liq~id permit~
sufficient and ~tabilized generation of the bubble Thu~, the improvement in the shot ac~uracy of the llguld droplet and the ~ta~ilization of the ink eJect~on ~ nl can ~e accompllshed, t~us improv~ng the recor~ed i~age quality remarka~ly.
<Liquid e~ectlon head ~a~tridge~
The descrlp~ion will ~e maae a~ to a ll~uld e~ection head cartridge havlng ~he liquid ejecting head of th~ fo~3going ex~nple.
Figure l9 $æ a ~c~ematic explode~ perspectlve view of a llquid ejection head cartridge lnclud~ng the above-described liquld e~ecting head, and tne liquid ejectlon head cartri~ge ~ompri~e~ yenerally a liquid ejecting head portion Z01 an~ a liquid c~nt~iner 80.
The liquld ejectin~ hea~ portlan 201 compriees an element substrate 1, a separatl~n wall 30, a grooved member 50, ~ c~nflning spring 78, liquid supply member 90 and a ~upporting member 70. The element ~ub~trate 1 is provided with a plurality of heat generat~ng re~istors ~or ~upplying heat to the bubble generation liquid, as descri~d hereinbefor~.
A bubble generation l~quid pa~sage is formed between the element ~ubxtrate 1 and the separation wall 30 ha~ing the movable wall. By the coupling between the separati~n wall 30 and th~ ~rooved top plate 50, ~n eJection flow path (un~hown) f~r fluid c~ ni catiOn 15 wlth the eiec~ion liquid is formed The c~nfining spring 78 functions to urge the grooved member 50 to the element ~u~strate 1, and i~
effec~iYe to prQperly integ~ate the element su~strate 1, sep~ration wall 3~, groo~ed and the s~pportlng 20 member 70 which will be descr~be~ ~ereinafter.
Support~ng member 70 func~ions to ~uppor~ ~n element substrate 1 or the like, and the supporting member 70 has thereon a circuit board 71, ~onnected t~
the element sub~trate 1, for ~upplying the electric 6ignal thereto, and contact pads 7Z for electrlc signal transfer ~etween the device ~ide when the cartridge is mo~nted on the apparatus.

The liquid container 90 contain~i the ejection llquid such as ink to be ~3upplied to the liqu~d ejecting head and the b~bble generation liquid for ~ub~le generation, separately. T~e outE;ide of the 5 liquid container 9~ is pro~ided with a positioni~g porti~n g~ for mounting a ~onn~cting member for connec~ing tne liquid e~ecting he~d with the liquid container and ~ f~xed shaft 95 for fixing the connection portion The ejection l~quid is s~pplied to the e~ection liq~id supply passage 81 of a liq~d ~upply m~mber ~0 thr~ugh a supply pass~g~ 84 o~ the ~onnecting mem~er f~om the ejection llquid supply passage 92 o~ the liquid container, and is supplied to a first co ~n liquid chamber through the ej~ction liquid supply pacsages B3, 71 and 21 of the member~. -The bu~ble gener~tion liquld is ~imilarly supplied to the bubble generation liquid supply passage 8~ of the liquid supPly member 80 thr~ugh the aupply passage of the connect~ng member from the ~upply pas~age 93 of the li~uid container. and is supplied to the ~ on~
llquld chamber ~h~ou~h the bubble generation liquid ~upply pa~age 84, 71, ZZ of the ~en~e~s. In such a liquid e~ectlon hea~ cartridye. e~en if the b~le genera~i~n liqui~ and the e~ection li~ui~ are 25 different li~uids, the liquid~3 are supplied i~ good order~ in the ca~e that the ejection liquid and the bubble gene~ation llquid ~re the same, the ~upply path -69- 2 ~ ~-6~73 for the bubble generation liq~d and ~he ejection liquid ~re not neces~ril~ separated.
After the liquid i6 used up, the liquid cont~iners ~la~ be supplled with the ~e~pective S liquids To facilitate thi~ ~upply, the liquid container is desirably provided with a liquld in~ec~ion por~. The li~uid e~ecting head and the liquid container may be integral wlth each other or separate f rom each other .
10 <liquid ejecting apparatul3~
Figure 20 s~hematlca~ly show a ~tructure of a liquid ejecting apparatu~ ha~ing the above-described liquid ejecting head ~Ol. In this e~ample, the ejection liquid i~ ink. The apparatus is an ink e~ection ~ecording apparatus. the liquid ejecting de~lce comprises a carriage HC to which the head cartridge compri~ln~ a liquid cont~in~r portio~ 90 ~nd liquid ejectlng he~ portion ZOl w~ich are detachably cannect~ble ~ith eacn ~her, ls mounta~le. thç
20 carrlage HC is reciProcahle ~n ~ dlrectlon of widt~ of the recording ma~er~al 150 6UCh as a recordlng sheet o~ the like fe~ by a reco~ding m~erl 1 transporting mean6 Wh~n a d~i~ing signs~l i6 supplled to the.
liquid ejecting means on the carriage from un~ho~
driYing signal supply means, the ~ecording li~uid i~
ejected to the recoraing m~terial from the l~quia _70_ 2186073 eiecting he~d 201 in re~ponse to the signal The 1 iquid e~ ecting apparatu~ of this ~mbo~iment comprises a motor 111 as a driving source for dri.ving the recording mater~l tran~porting means and t:t~e carriage, gears 112, 113 for transtmitting the power ~rom the driving source to the car~iage, ~n~
~arriage shaft 18 5 and ~o on By the recording device and the liquid e~ec~ing ~e~hod, satisfactory print can be pro~ided on Y~rious recordi~g materials.
10 When the liquid ejecting method is ~arried out ~or various recording material~.
Figure 21 is a block diagram of the enti~ety of the device for carrying out ink e~ection recording ~l~ing the liquid ejectinS~ head and the li~uid ejec~ing 15 meth~d of ~he pre~ent invention The recarding app~ratu~ receiv~s printing data in ~he ~orm of a control signal ~rom a host camputer 300. The p~in~n~ aata 1~ temporarily s~ored in an lnput ln~erface 301 of the prlntlng app~ratu~, and at the same timR, ls converted into proce~able data ~o be inpu~ted to a CPU 302, which dou~les as ~e~ns for supplying a head driYing s$gnal. The CPU
30~ proces6e& the afor~ Lione~ ~ata lnputted to the CPU 302, into printable d~ta (image ~ata), by 25 pro~e~ing them with the u~e of peripheral unitg su~h as RAMs 304 or the like, following control programs st~red in an ROM 303.

-71- 2~ 86~73 Further, in order to record the image data onto an appropriate spot on a recording 6heet, the CP~
30~ gener~tes drivin~ da~a for drivi~g a driving motor which moves t~e recordlng sheet and the recording head in synchronl~m wi~h the image da~a. The image data and th~ motor drlvlng data are transmitted to a he~d 200 and a driving motor 306 through a head driver 307 and a motor dri~er 305, respectlvely, which are controlled with the proper timings ~or ~orm~ng an imag~.
When the ejection power ref~e~hin~ op~ration is required a~ after rest of the head, the CPU30~
suppli~s refreshing operation instructions to the recovering device 310 including the suction recover~
de~ice 200. The reco~ering device 310 ha~ing recei~d .
the eje~tion power recovery instructions, carrie~ out the ~eries of operations $or the reco~ery o~ the eject.ion power of the head cn the basi~ of suction or pr~ssuriS~ing rec~overy ~eque~ce As for recordlng medium, to which liquid such as lnk is ~dhered, and wn~ch 1~ us~ble with a recordi~g apparatus ~uch a~ the one described above, th~ follow~ng can be ~is~ed; various ~nee~s of paper;
OHP ~heets; plastic materlal u~ed ~or forming compact disks, ornamental plates, or the like fabric;
metalllc mater~al such as al~ , ~opper, or the like; leather ma~eri~l such as cow ~idç, plg hide, _7~_ 2 1 8~73 ~ynthetic leather, or the like; lumber material such as soli~ wood, plYwood, and the like; bamboo material;
cerami~ material such a~ tlle; and m~te~i~l such a~
sponge which,has ~ three ~ ional structure.
The aforementloned recording apparatu~
lnc~udes a printing apparalu6 for various sheets of paper or OHP sheet, a r~c~rdlng apparatus ~or pl~8tic mat~rial such a~ pla~tic material used f~r fcrm1ng a compact dls~ or the like, a recording appa~atus for 10 metallic plate or the like, a recording appa~atus f~r leather material, a recording apparatus for lumber, a recording apparatus ~o~ cera~ic material, a recPr~ing apparatus for three dimensional recording ~edium such as sponge or the like, a te~tile pri~ti~g apparatu~
for recording image6 on fabric, and the like recordlng appar~tu~es.
As fo~ the liq~d to be u~ed with these liq~id eiection aPParatuses~ ~ny liquid is u~able a~
long as it is.compatible with the employed recording ZO medium, and the recording conditions.
~Rec~r~in~ ~y~tem3 Ne~t, an exemplary ~nk ~et recording 6y~tem w~ll be desc~ibed, whicn records lma~e~ on recording medium, using, a~ tne recording hea~, the liquid 25 ejectlon head in accordance with the pre~ent lnvention.
Figure 2Z is a schematic perspective view o~

_73_ Zl ~6~73 an ink iet recording system employing the aforement$oned liquid ejectlon he~d 201 in accordan~e wit~ the present invention, and depict~ its general structure. The liquid ~jecti~n head in thi~
5 embodiment i~ ~ ~ull-~ine type head, ~hich comprise5 plural ejection orifice~ aligned ~i~h a den~$ty of 360 dpi so as ~o cover the entire recor~le range of the r~cordin~ medlum 150. ~t c~mpr~ses fo~r head~, ~hich are corresp~ndent to four col~rs, yellow ~Y~, magent~
(~), cyan (C) and black ~Bk~. ~hese four heads are fixedly supported by a holder 120Z, in parallel to each other and with predetermined int~rvals.
The~e heads are driven in re~pon~e to the signal6 ~upplied from a hea~ driver 30?, which constitutes means ~or ~upplying a driving signal to each head.
Each of the four color ink6 ~Y, M, C and Bk) is ~upplied to a corre~po~dent head ~rom an ink ~.~nt~lner 1204a, 1204b, 1205c or 1204d. A re~erence 20 numeral 1204e designate~ a bubble generation liquid c~n~lner from which th~ ble yener~tion liquid ~s delivere~ ~o e~ch head.
~ e~ween the contalner and the each head. the tube is provided with pressurizing ~ecG~ering devl~
311e, 311a, 311b, 311c, ~r 311d, as shown in the Flgure The driving me~n~ for the pre~urizing reccvering device i~ a pressurizing pu~p, and when the -7~~ 2 t 860~3 recovery for the ejection power o~ the head i~
~ece~sary, the CPU~OZ shown in Figure. 5~ produces pres6urizing recovery instructions, ~nd the seri~s o~
operation~ ~or the rec~ve~y of the eiection power of the ~ead is c~iea ou~ on the ~asi6 of ~he predetermined pressurlzing ~ecovery sequence, Below each head, there 1~ ~ head cap Z03a -203d having ink absorptlon member such a~ sp~nge, which cover~ the ejection outlets o~ e~ch head ~hen the reçord~ng operation i~ not ~ecte~ to protect the head.
Designated by reference numeral 206 is a con~eye~ belt eonstituting ~ in~ means for feeding a recording materi~l as has been described. The conveyer belt 206 extends along a predetermined path using variou~ roller~, and is dr~ven by n dri~ing roller con~ted with the motor dr~ ver 305 ~
The ink ~et recording system in this ~mhodlment comprises a pre-printin~ processing apparatu~ 1251 and a po~tprint~ng proce~ing apparatu6 1252, which are dl~posed on the up~tream and downstream s~d~s, respectively, o~ the lnk jet recordlng apparatu~, alon~ the recording medium conveyance psth The~e proce~sing apparatu~es 1251 and 1252 process the recording medium in various m~nners be~ore or a~ter ~ecordlng is made, respectl~rely ~

--75- 218~6~73 The pre-printing pr~cess and the postprlntlng proces~ vary dependin~ on the t~pe o~ r~cording medium, or the type of ink. For e~ample, when recording medium compose~ o~ metalllc materlal, 5 plast$c ma~erial, ceramio material or the like is employ~d, the reoording medium i~ expo~ed to ultra-~iolet ra~s and ozone be~ore printing, acti~ating its ~urface.
In a recording material tendlng to acquire electric charye, such as plastic resin materi~l, the du~t tends to deposit on the surface bY static electricity. The d~t may impede the desired recording. In ~uch a c~se, the use is made with ionlzer to remove the static ch~rge of the recordiny material, tnu~ removing ~he du~t from the recording material When a textile is a recording material, from the standpoint of feather~ng p~Q~enti~n an~
impro~ement o~ fixing or the like, a pre-p~oceS~ing may ~e e~fected wherein ~lkali property su~stance, ZO ~at~r soluble property su~stance, composition polymeric, wat~r soluble property metal salt, urea, or thiourea i~ applied to the textile. The pre-processing is not limited to this, and it may ~e the one to pro~ide the recording material with the proper 25 te~pe~ratur~
On the other hand, the po~t-processing is a process for impartln~, to the recording material -76- 2 1 ~6~73 having ~ecei~ed the ink, a heat treatment, ultra~lolet radlation project~on t~ promote th~ fixing of the ink, or ~ cleanlng for rem~ving the p~ce~ mat~rl~l u~e~
for the pre~treatment and remainlng because ~f no reaction.
In thi~ em~odim~nt, the hea~ is a ~ull llne head, but the present $nvention iç of cour~e applicable to a ~erial type wherein the head i5 moved along a width of the recording materi~l In the foregoing, ~o-called edge shooter type ha~ been descri~e, b~t the pre~n~ invention i~ not limited to this and is applicable to a so-called 6ide ~hooter t~pe ~ead, for e~ample, shown in Figure 23.
Figure 23 is a ~c~ -tic croxs-sectionaL view schematic a show~ng an example to ~hich the prexent lnvention is applied The liquid e~ec~ing head of this example is a so-called slde shooter type head, wherein the e~ec~on outlet ll ls faced su~st~tially parallel t~ ~ nea~
generation ~u~face of the heat generatln~ e~ement 2.
The heat generating element 2 has a ~ize o~ 4B ~m x 46 ~m and ls ln t~e form of a heat generating resistcr.
It is mounted on a ~u~trate 1, and generates thermal energy u~ed to g~nQrate a bubble by film boiling of liquld as disclo~ed in USP 4,723,129 The ejection outlet 18 is formed in an orifice plate 51 which i8 an e jection outlet portion m~terial. T~e orifice plate ~1 860~3 51 is manufactu~ed from n~ckel through electro-forming.
A first liquid flow path 14 ~ provided below the ori~ice plate 1~ ~o th~t lt 1~ directly in fluid S communlcation with the ejection outlet 11 to f~ow the liquid therethrough. On the other hand, a second liquid flow path 16 is provided on the substrate 1 to f~ow the ~u~ble generation liquid. Retween the first liquid flow path 3 and the ~econd liquid flow pat~ 16, 1n a separation wall 30 is provided to i~olate the li~uid flo~ path~. Separation ~all 30 is of a material having an elafitic, fi~ch as metal. In thi~ example, the separation wall 30 is of nickel having thickne~
of 5 ~m. Thi~ ~ep~ration wall 30 ~ub~tant$ally i~olates the e~ction liquid in the first liquid flow path 14 and the b~bble generation liyuid in the second llquid flow path 16.
The e~ec~lon liquld ls supplied to the first liquid flo~ path 14 thro~g~ the firsl supply pa~age 15a from a fir~t common liquld cham~er 5 storlng the ejection liquid. The ~u~le gener~t~on llquld ~s supplled to the ~econd liquid ~low path 16 thr~ugh the ser~n~ ~uppl~ p2ssage 17a from a second common liquid ~h~- h~r 17 storing the bubhle gene~ation liquid The 25 ~lrst common liqui~ chamber 15 and the second common liquld chamber 1 are iso~ate~ by the partition la. In thls example, th~ ejecti~n liquid to ~e supplied to 21~6Q~3 -7~-the fir~t llquid flow path 14, and the ~u~ble generation l~quid to be supplled to the sec~nd liquid flow path 16, are of water base ink (a ~ixe~ uid of ethanol ~n~ water~
~h~ separation wall 5 1~ ~lsposed adjacent the portion of the projected space of the heat generatlon surface of the heat g~n~rating element Z
perpendicular to the heat generation surface, and ha~
a pair of mo~able portions 6 o~ flat plate cantilever conflg~ration, one of which i8 a moYa~le member and the other is an opposing member opposed t~ the movable member The movable portion 31 and the heat genel~ating ~urface a disposed with ~ clearance of 15 ~m ~pprox. The free ends 3~ a of ~he movable portion~
3l are oppo~ed to each other with a g~ af approx. 2 ~m ~slit 35). De~ignated by 33 is a base portion functioning as a ~ase portion upon opening of the mo~a~le portions 31. Sl~t 3S is formed in a plane $ncludlng a line co~n~cting a cen~e~ po~tion of the heat generating element 2 and the center portion o~
the ejection outlet l~. In thls example, the s~it ~
i~ ~o narrow that the bubble does not extend through the E;lit 8 ~round the movable portions 6 before the n~o~rabl~ por~ion 6 is di~placed, when the bubble 25 growths. At le~st the free end 32 of the mova~le portion 31 i~ disposed within a region to which the pressure due to the bubble ext~nd~. In F~gure 23, "A"

_79_ 2 1 86~73 designate~ an upper x~de region (eject~on outlet side) o~ the movable portion 31 in a stable ~tate, ~nd "B"
designates a lower si~e ~heat generating element side~
reglon.
When heat i~ generated at the heat generatlon ~urface of the he~t generating element 2, and a ~ub~le i6 generated in the region B, the free end 3~ o~ the moYable portion 31 i~ instantaneously mo~ed in the direction of the arrow in Figure 1 namely toward th~a r~gion A with the base portion 33 functioning a~ a fulcrum by the pres~ure resultin~ from the gene~ation and growth of the bubble and by the expanding bubble per se. By this, the liquid i~ ejected out through the e~ectlon outlet 18.
In the side ~hooter type liquid ejecting head having such a stru~ture, the pre~ent lnventlon is capable o~ ~ro~iding the ~dvantage~s e~eCts that the refilling of the e~ectlon llquid 15 improved, and t~e liguid can be e~eeted wl~h hlgh ejecti~n pres~ure. ~nd 20 with high e~ecti~n energy u~e effic~ency.
In this example, the liquld ln thR sec~
liquid ~low path 16 and the liquid in the fi~st li~ui~
flow path 14, are 6ub~tantiall~ iæolated, th~ path~
may be in fluid . ication w~th each other at le~t at a part thereof, if the liquids are the same, or they may be mlxed.
In thi6 exa~ple, the free end~ 3Z of the -80- 2 1 ~6~73 ~ovable n~ rs 31 are opposed to e~ch other, but only one movab~ e ~ember may be enough, depending on the case .
( Embodiment~ ) S Th~3 desc~iption will be made as to an en~odiment wherein m~ced liquid o~ the e~ection liquid and the bu~ble generation liquid, is discharged ~rom the in~ide, in the separation sy~tem ~he~ein t~
ejection liquid and the bubble generation liq~id are suppos~d to be su~tantial~y ~eparated When the bubble ~enerat$on li~uid ~nd the ejection liquld ~re d~fferent, and are xuppoxed to be substanti~lly ~eparate~, ~he ~ub~le generation liquid or the e~ection liqul~ ma~ di~perse into the other, or they ~i6perse lnto eAch ~ther thro~g~ the ~lit 35 (Figure 2) between the movable me~er 31 an~ the ~eparation wall 30 constitutlng the a~ove-describ~d valY~ structure, if ~he rest perlo~ (~he ejection liquid is not e~ected from the ejection head) is ~ery ZO long. If th~s occur~, mixed liguid i8 produced. If the ~ixed liquid i~ produced, some problems may arise at the initial ~tag~ of printing. ~or example, den~ity non-uniformity or the like may occur; ejection pe~fo r~ ma~ ~e une~en; feathe~ing of the liquid may be uneven; or burnt deposit ~y be produced on the heat generating element when the ejection liquid c~ntains such a component.

-81- 2 1 860~3 On the other hand, not being llmlted to the case wherein the eiection liquid and the bubble generation liqui~ are alfferent, if the re~t period o~
the eje~tion head i~ ~ery long, the visco~ity of the 5 eiection li~uid may be increased to a significant e~tent due to e~aporation of water, depending on the length ~f the rest period The vis~osity-increased e~ection liquid i~ not desirable for the satisfactory eje~tlon and the rec~rd~d image, and therefore, it is des~ra~le to exclude the viscosity-incr~ased e~ec~ion llquid to the ~ut~ide or to decrease the viscosity thereof...
In the sep r~ion type ejection head, the ejection liqui~ hav$ng a rel~t~ely high viscosity may be 8a~isfactorily ejected. But, depend~ng on ~he eject$on liquid u~ed, it i8 n~c~ssary to set the visco~ity o~ the ejection liquid at a level lower than that at the nor~al te~pe~ature h~c~nse of the property relati~e to the reoord$ng material.
Furth~rmore, under a low temperature condition, the liquid vi~cosity further increases, and under ~ low h~mi~ity condition, the evaporation i~
promoted~ In these conditions, the ~iscosity-i~orea6ed of the liquid is accelerated with the result 25 of ini-luence to the e~ec~ion or to the printing In this example, the e~clu~ion of mixed liqyid, the excl~sion of the vi6co6ity-increased 2`~ ~6073 -8~-ejection llquid, and~or the decrease of t~e vi~co~it 1~ ~r~m~lished by non-printlng e~ection from the ejection head. In ~he following, the ejection not ef~ectin~ the recording iç called " prellminary e~ectlon n, ~First Embodiment) In thi6 exa~ple, the number of the ejections ln the preli~i n~ry ejection, is ~eterminated in accordance with an initial dynamic vi6co~ of the lQ ejection liquid. The initial dynamic viscosity repre~ents an initial liquid viscosity a~ter the non-use or re~t period, and i8 dep~nd~nt upon the length of the rest time period, if ~he variation of the ~bience factor~ such as the temperat~re, is not sig~ificant ~n this embodiment, a relation between the rest time and the inlt~al dynamic viscosity a~ter a rest period, is det~ in~ted be~orehand (the initial dynamic vl~co~ity is shown in relation to it), and the ~eliminarY ejectlon ls carrled out in accordance wit~
2~ the re~t per~oa, in the ~ollowin~ manner.
~ ccordi~g to the preliminary e3ection o~ thl~
ex~mple, the temper~ure ri~e ~f the eJec~ion llguld in the e~ectlon head occurs due to t~e continuous ~riving of th~ heat gene~ating element ~y the prelimlnary e~ection, so t~at t~e dynamic ~iscofiity i~
decreased. T~s, the dynamic viscosity of the e~ection llquld lncreased during ~he rest period, i5 2 t ~6373 ~ecreased to p~rmit satisfactory ejection from the initlal ~ect~ons. Depending on the e~ection liquid used, the ~p~rati~n ~emperature lthe temperature . sultable for the eiection) i~ higher than ~he norm~l 5 tempe~ature, ~ut ln such a c~se, the temperatu~e o~
the liq~id i~ incr~ased suickly to the operatlon te~perature by the continuous ~je~tions b~ the preliminary ejection. Secondly, ~ven if the mixe~
liquid has been produced, it i~ di~harged from the ejection no~ by the preliminary ejection.
Thu~, proper preliminary ejection ~an ~e carried o~t in con~ide~tion of ~arlous am~ient conditions, by determinating beforeh~nd the relation between the viscosity increa~ and the ambient 15 temperature or humidity Figure 24 ls a flow chart showing the process carried out ln the liguid ejection recording device in thiS example.
A~ ~hown ln the Flgure, the prelimina~y 2~ ejecti~ of thi~ example is c~rrled out ~t various timings in the proce~s bein~ execute~, ~nd the e~ection mode ls d~feren~ if the timing .i s diffe~ent, as wil7 be ~escr~ bed hereln~fter.
Th~ procu~si is ~;tartecl upon hard power ON.
that ls, by connecting the pow~r suppl~ code to the plug~ I~ the rest period ç~ce~s 7Z hour~ (steps Sl, S~), a t~mer prelimin~ry e~ec~ion process is effe~ted 2 1~6073 (6tep S3). Upon soft p~wer O~, tha~ iq, uPon actua~ion ~f the main ~wltch of the r~cording device ~step S5), the preliminary ejection for ~oft power ON
is carr~ed out (step S6) S Whe~ the head exchange is carrie~ out (6~ep S7~, a preli~i~ary ejecticn ~or head exchange is carried out t~t~p S~). When suction recovery or w~ping ~s carried out ~tep Sg, Sll), preliminary ejection ~or suction reco~ery or prelimin~ry ejection for wlping, are carried out (s~ep S10, Sl~).
After completion of such process upon the soft power O~, ~ st~nd-by ~equen~e operations are carried o~t, and the preli inA~y ejection i8 ~arried out therein (step S13). Upon the start of the recording opera~ion, the preli j ~ry ejection i~
carri~d ~ut as a part of the recovery sequence during the recor~ing operation (step S14~.
Upon ~oft power O~ at ~he recordin~
com~letio~ ~step S15), th~ prelimln~ry e~ection for 20 the recovery sequence for the ~o~t pawer OFF, is carried out (~tep S16~.
Flgures 25 - 29 show details o~ xequential op~rations ~escri~e~ wl~h F~gure 24. Figure ~5 OEhows the recoYery sequcnce at the time o~ the soft power Z5 O~; Figu~e 2~ shows the recovery sequence at the time of the hea~ exchange: F1gure 27 shows the sequence at the time of the stand-~y; F$gure 28 shows four 2`~6073 recovery sequence opera~ions during recording operation; and Figure 29 shows the recovery ~equence at the ~ime of the soft power OFF.
As shown in Fiyure 25, the preliri~ry eiection in the se~uence at the time of the soft power ON, is carried out ~step S306~ after the wlp~ng (st~p S307), bef~re elapse of 7Z hou~s after the re~re~hing proce6~ by the e~ection liquid suction ~step S303): is carried out ~step ~307) after ~he suctlon operation ~step S304) when 7~ hour~ elap~es or ~hen ink leakage occurs.
As shown in, Figure ~6, i~ the recovery æequence at the time of the head ~Yrh~n~e~ the preli~i~ry ejection i8 earried out eith~r after the suction oper~tion (~tep S405) or after the ~ipin~
(step 8407), depending on whether the ink leskage occur~ or not In the xequence at the time o~ the stand-by state, ~ shown in Figure 27, th~ preli n~ry eiection 20 iB carried out ~step SS09) fo~ each 12 ~ec elap~e auring ~he transfer stand-by of the recarding da~a (s~ep s504) The prellmlnary e~ection i8 carried out after the wiping ~step s506, S511~ lf 1~ æec elapse (st~p S510~ wl.thout feeding of the ~ec:c~rding pape~ and a~ter $ prelimin~ry ejection operations are carried out ~s~ep S505).
In the four recordln~ operatlons æho~n ln -86- 2 1 &6073 Figure ~8, the recovery ~quence is carr~ed out a~ an interruptiny process. The proces~ of step S601 i executed when 72 ho~r~ elapse from the pre~ious refreshlng proce~ The process o~ step S602 is carrie~ out upon the start o~ the recordin~ for one page. The Figure 28 of the step S603 i~ c~ried o~t immedlately before the cappinq an~l immedlhtely after the cap opening The process of step S604 is carried out whe~ 12 sec elapse from the previous effect. Th~
prelimin~ry ~j~ction is executed in this manner.
In the reco~er~ quence at the time o~ the soft pow~r OFF shown in Figure ~g, t~la preli in:3ry eject~on i~ ca~ried out after the wiping ~tep S703 ) .
The prelimina~y ~jeotion carried out after only the wiping i~ effected, among the abo~e-described proce~ses, is simil~r to the preliminary ejection after the wiping sho~n in step S12 of Figllre 24.
No~, the fundamen~al u6ing condition~ of the preliminar~ ejection operations in the abo~e-described Z0 processes, will be de~cribed.
The conditions are u~able ~or the emh~iments whlch wil~ ~e de~cribed hereinafter.
u~ble range of the dri~ins fre~uency: 1 Hz -30 kHz (usable rang~) Drivlng pulse and dri~ing condition:
l It is ~electable independently of the driving pulxe for the recording. Since the preli~in~ry 2 1 86~73 e~ectlon has additional func:tion of aglng of the heater (he~Lt generatlng e~ement ), the &upplie~ energy may be l~rger than the dr~lng pul~;e ~or the recordiIIg to ~nhAnrP the effect therefor. For example, the 5 pul~;e width may be larger It 19 desirable that such driv~ ng condition~; or p~lse waveform may be changed ln accordance ~ith the non-ejection periocl of the ejection no~zle~, or that it i~ changed in accordanc:e ~ith the composi~ions, viscosity o~ the ejection liquid or the ambient condition such as the temperature or humidit~, for example.
~ . The pulse shape and pul6e number are selectable in accordance with the recording mode~ The recording modes incl~de a HG mode (high quality mode), HS moqe (hi~h speed recording mode), SHQ mode (ultra high quality m~de~ or the like. In the high quality mode, for example, h~gh precision recording i~
possible with~t den~lty non-uniformlty, by pre-pulse control using ao~le pul~e~.

3. Double p~l~e m~e or sin~le pulse mode ls possible.
Drive timing: simultaneous driving is poææibl~ with th~ heater for the hea~ tempera~ure contrdl or with the heater in the liq~i~ ch~ ~r such as a rank heater indicating ind~idual recordin~ head property .
Driving posltlon: oper~le to ~ prel~mlnary -8~- 2~f- 8fi~13 e~ectlon receptor outside the recording region or into a cap The timin~ for t~le prelim1n~ry ejection, is a~ has been described in c~njhn~tion wlth Figures 24 -Z9, and the preliminary ejection~ at ~uch tim~ngs, ~reopera~le with s~lectabl~ frequency and selectable number of ejection~, a.~ follows ~ 1) preliminary ejection in the recovery sequence at the time of the soft power ON
(preliminary ej~ction ior recoYery from the lncrea6ed viscosity ~ deposition, of the ink after rest period) 2 kH~, 50 - 104 ejectlons (2) Preliminary ejection in the recove~y ~equence at the time o~ soft power OFF
(preli~inary ejection fo~ recovery from ink dry ln ~onsideration of the rest period after the power OFF) 500 Hz, 50 - 104 ejection~
(3) preliminary ejecti on in the recovery ~equence at the time of the sta~d-~y state [preliminary ejecti~n ~r preventln~ lnitlal e~ection failure due to the ink ~ry, ln the ~t~nd-by tat~a ) ~5 500 ~z, 20 - 104 ejection~
~4) preli m i n ~ ry ~j ecti on ln the recovery sequence during the recor4ing -~39- 21 ~6~i 3 prelil in~ry eiection ~or a~uring initial proper ejection and for eiection defect pre~ention due to wetting with ink ~ depo~ition of foreign matter) 500 Hz, 20 - 104ejecticns (5) preliminary ejec~ion ht the tlme of the suction recovery ~prelim1nary ejection at t~e time o~ ~uction recovery (m?inly by userJ) Z kHz, 20 - 104ejections ~6) timer ~72 hour6) preliminary ~j~ction (preli~in~ry e~ectio~ for prevention of the la~t ejection failure due to a bu~ble produced ln the rest period) 500 ~z, 20 - 104 ejections l7) preliminary eJection after wiping 500 Hz, 50 - 104 eiection6 ~8) prelimina~y ejection in the recovery sequence at the time of the head ~çhan~e tprelimin~ry ejection for a~suring avoiding 20 of ink le~kage ~t the time of exchange with a fresh he~d~
2 k~z, 50 - 104 e~ections The descript~on will be m~de ~s to some of the examPles of t~e eject~ion freg~ncie~ anA the ~5 numbe~s eJection~ of the prelimlnary ejec~io~ in the above-describe~ ~imlngs for the initial dyn~ni~
viscositie~; A~ shown in the following Em~odiments 1 2186~73 - 3, the number of the eiections i~ larger if the initial d~namic viscosity is larger (Embodlment 1) When the ejection liquid had initial dynamic visco~ity of 1 - 2 cP, the preliminary ejec~ion timings ~ 5~ and 18) were u~ed for each ~jection outlet with ~he following freq~encie~ an~ numbers of the eiections. The results were that the ejecti~n liquid mixing was L~- ~æd, and that the flrst ejec~ion l~ upon the ejectio~ start was satisfactory.
(l~ pre~ n~ry ejection in the re~very sequence at the time o~ the so~t power OFF
500 H~, ~0 e~ection~
(2~ preliminAry ejection i~ the recovery sequence at the time of the ~o~t power ON
2 k~Z, 50 ejection~
(3) preliminar~ ejection ln the recovery sequence a~ the time of the stand-~y 500 Hz. 20 e~ection~
20~4~ prellminary ejection in the recover~ sequence aur~ng the recording 500 Hz, 20 ejection~
(5) prellminary ejection at ~he time of the 6ucti~n recovery 252 kHz, ~0 e~e~tlons (8~ prelimin~ry e~ection in the recovery sequence a~ the time of the head exchange -gl- 2:~8-~73 Z kHz, 50 e~ctions Th~ prel;m;n~ry ~ectl~n of item (S) may be omitte~ i~ the suc~ion r~cover~ i~ good (Embo~lment 2) S Whe~ the ej~ction liqui~ ha~ initial dynamic ~isco~ity of 2 - ~0 cP, the preliminary ejection timlngs (1) - (5) and (8) ~ere used for each ej~ction outlet with the followlng ~requencies and ~umbers of the ejections. ~he results were that the e~ection liquid mixing wa~ removed, and that th~ first ejection upon the ejection 6t~rt was ~ati~factor~, as in Embodiment l.
(1~ preliminary e~ection in the reco~y sequence at the time of the soft power OFF
500 Hz. 2000 e~ections (2) preli~i~ry ejecti~n in the reco~ery ~equence ~t the time of the ~oit power ON
2 kH~, 2000 e~ections ~3) pre].iminar~ eJection ln the recovery sequence ~t ~he time ~f the stand-~Y
500 Hz, 8n0 ejections (4) ~rel$minary e~ec~ion i~ the recovery sequence during the r~cording 500 Hz, 800 ejection~

(5) prellmlnary e~ectlon at the time of the suction recovery Z kHz, 800 ejectlons -92~ 6 Q 73 (~ p~l.iminary ejection ~n the rec~ve~y sequence at ~he t~me of t~e head exchang~
2 ~H~, ~000 ejection~
The sequ~nce of ~3) i~ particularl~ d~irable 5 when the vi~cosity of the ejeotion liquld is high~
In the foregoin~ pre~ nary ejection operations, the pre~i inAry eject10n~ (3) are particularly effective to a~oid firet ejec~ion defect after the inc~ea~e of the ejection li~id visoosit~
and the pre~ention of the m$xed liquid ejection printlng.
. ~Embo~i t 3) When the ejection liquia had initi~l ~ynamic vl~cosity o~ Z - lOO c~, the prellmlnary eJectlon 15 timings ( 1~ an~ were used for e~h ejectio~
outlet with the following frequ~ncles and num~ers of the ejection~. ~hP. res~lts were that th~ e~ectlon llquid ~cjn~ wa~ remoYe,d, and that the first eJectlon upon the ejection ~tart wa~ ~ati~factory, aæ in ~mhodiment l.
(1) preliminary ejection in the reco~ery 6equence at the time of the soft power OFF
500 H~, 5000 ejections (2) preli in~3ry ejection in the recoYery sequenc~
at the time of the soft pow~r ON
2 kHz, 5000 ejections (3~ preli~inary ejectio~ in th~ recovery ~eque~ce at the time of ~he 6thn~-~y sO0 Hz, 2000 e~ections ~4) preliminary ejection in the reco~ery ~equence during the recordlng 5500 H~, 2noo ejectians (5) prellmlnary ejection at the time of the ~uction reca~ery 2 kHz, 2000 ejectlons (8) prel~minary ejection in the recovery ~equence 1~ at the time of the head exchange 2 kH~, 5000 ~jection6 In the ~oregoing preliminary ejection operations, the preliminary ejections (1) - (3) are p~rtlcularly effective to a~oid first ejection defect 15 after the ln~rease of the ejection liquid ~i~co~ity and the preventi~n o~ the mixed liquid ejection prlnting. Namely, it i~ effective ~o ~vold the ~eterlor~tion of the initial image quality ~f ~he i~age recorde~ on the recording m~terial ~0The drl~ing pulse used in Embodiments 1 - 3, ix a single pulse wlth tne pulse width of 3 - 50 ~cc, When the pulse width af 30 ~sec approx was used with Embo~iment 3, ~he decrea~e of the ~ynam$c vlscoslty d~le to the templ3ratur~3 ri~e i~ remarkable, and the 25 ejection state of the f$rst e~ection was g~od.
~Em~odiment 4 Irl this e~odiment, the ~lmi~ lar process o~

-~ 21 86073 ~mhodiment 2 was used, b~t lnitial pul~e width w~ ~0 ~scc, and one half of the ~ntire prel; i n~ry ejection was carried out with this pulse width, and the rest ther~of ~a~ carried out with the pulse width o~ 5 5 ~scc. First eje~tion~ were satisfactory (Secon~ odim~nt) In the second er~ t, the eJection state in the preli~ ry ejection i~ detected, and the prel~m1nAry ejection mode is changed on the b~i~ o~
10 the detection result.
The dynamic visco~lty generally changes ~ainly depending on the pressure and temperat-~re. In a liguid recording de~ce, t~ temperature or humidity relatively greatly changes depending on the use am~ience or use state. There~ore, the preliminary ejection may be excessive or insufficient, in the fir6t embodiment wher~in ~he dynamic viscosl ty i~
predicted from the rcst period. ~en ln the case where the number o~ the prellminary ~jections is l~rge 20 because the rest time i8 relati~ely long, the dyn~mic visco~ity may ~e quite low if the ambient temperature i~ high or if the humidity i~ high~ Therefore, in such a ~e, the ~elected number of the preliminary e j ect i on~i, wi l l ~ e:~c~:ss~ ively l arge .
In this example, as sho~n in Figure 30, there is provided a ~en~or unit 190 for dynamic ~scosity detection, adjacent the capping unit at the home position. F~gure 31 shows a position~l re~ation bet~een the ~ensor unit 190 and the head 160 or t~e like.
In these F~gures, when the e~ectlon is S carried out to the cap 84 from the eiection head 160 at the tlme of the prelimin~ry e~ectlon, llght of L~D
~troboscope i~ emltted at predetermined timing from ~he ~nsor unit 1~0. The light i5 r~flected by the eje~tion li~uid in the eie~tlon range thereof, and is detec~e~ ~y CCD in the s~nsor unit 190 The emi~sion timlng of ~he L~D s~robos~ope i8 ~et to be delay~d ~y p~edetermined time from ~he pulEe application timing for the ejections in the preliminary e~ec~ion. When the e~ected droplet is in the ejection ran~e upon the e~ission of the LED stroboscope, ar.d therefore, the reflected light i~ detected, the liquid ejection (ejecti~n frequency) follows the ~pplieation (driving fr~quency) of the liquid ejection, and therefore, it is discriminated that the dynamic viscosity is at a predetermined lo~ level.
Figure 32 is a flow chart ~howing a prel~ ri n ~ ry e~ectlon sequence used wi~h the structure show~ i n Figures 30 ;~nd 31.
As shc~n in ~che ~;ame Flgur~3, LE;D strol~oscope is actuated wit~ a predetermined ti~e delay for ~ach driving pulse applica~ion ~tep S801) in the preli in~ry eJeCtiOn, ~he detection is made at the -s~ne t;im~ng as to whether there i~ z~n ejection liquid in the range where i t: lx ~uppo~ed to exist ( step ~802 -S~04 ~ n the e je~ted droplets are d~tected as a result, it i~ cc~n~idere~ that the dynam~c vlscoælty ls 5 ;Low enough, and the~e~ore, the prelS--s n~ry ~Jectlon l~;
stopped .
On the o~her hand, if the e~ected droplet is not d~t~cted ~tep ~804~, and i~ th~ selected number of preliminary e3ections are completed (~tep S~05), it is consid~red that the preli in~ry ejection i~
insuf ~ioient, and the pulse ~idth, the num~er of ejections of the preli in~ry ejection is set again (step S~06) to c~rry out the prelim$nary e~ectlon fur~her Thu~, according to this embodiment, the preliminary ejection is carried out to proper e~tent.
Figure 33 shows anothe~ example of t~is emb~ nt In thi~ Figure, de~ignated by 1~1 is a g~as~ pl~Lte provl~ed adjacent t~ the ~a~ 84 The 20 ~urfa~e ~f the g~as~ pla~e 9l is painted into white, zlnd t.he n~aa l6a e~ect~; the ll~uld onto the glass plate. 9l in the preliminar~ e~ec~on.
In ~ igure 33, the mi~ture in tnQ e~ection head 1~ detected, a~d t.he density ~f the ejection Z5 ~iquid deposited on the glasx platQ 191 is detecte~ by optical detecting me~ns. When the detected density i~
a~o~e a prede~erm~ned level (the de~sitY of the ~g7~ 21 86073 ejeetlon liqui~ ~ithout mixture). the preli i n~ry ejection is xtappe~.
Figure 34 i~ a flow ~hart o~ the preliminary ejection se~uence in the mi xed liquid detection~
As ~hown in this Figure, when it ~s discriminated that th~ ejection llquld deposited o~
the glass plate 91 at step S~3 is not less than the predets i nP~ density, the discri~ination i5 ma~e a~
to wh~ther the head temperature i~ not less than predetermin~ temperature or not at ~tep SgO4. Th~s -ix made, since e~en i~ ~he mixed liquid is removed, the dynam~c vi~cosity m~y be high. So, the dynamic vi~coxity is c~ecked using t~e he~d temperature. Whe~
the den~ity i~ not less than a predetermined value~
~n~ the he~d temperature i~ not lçss than a predet~rmin~ temperature, it i6 con~idered that the ~ixtur~ an~ the vl~cosity increase ha~ ~een o~v~ated, so th~t the preliminary e~ectlon is ~t~pped~
According ~o th~5 ex~mple, the preliminary eJectlon can be further reduce~.
~Third Embo~lmen~) Flgure ~5 is a s~he~tic secti~nal view, ln flo~ path di~e~tion, of the liqul~ ejec~ing head according to an ~mboAil - ~ of the present lnventlon.
2~ Figure 35 shows this e~b~ime~t, and is similar to Figure 9 ln ~he fundamental str~cture, ~ut on the element substr~te 1 con~titut~ng the bottom portion in the common ~ iquia chamber 17, a heat gene~ating element 2a as he~ting meanc is pr~ided, and a columnar memb~ 17a ~f thermal~y c~nductive material is planted in a bottom ~ur~ace ~ the separatio~ wall 30 and i~ extended ~o as to be in contact with the heat g~nerating element 2a. The col~mnar member 17a functions to support the intennal ~tructure of the common liq~id chamber 17 and t~
quickly transmit the heat from the heat generating elem~nt 2a to the separation wall ~0 o~ thermally conductive material~ Th~refore, the heat of the he~t generatlng ~lement 2a h~ated to a predeter~; n~
tempera~ure, functions to heat ~he bubble generation liquid in t~e ~econd llquid flow path 16 and to heat ]5 the e~ectlon 11quid in the fir~t liq~i~ rlow p~th 14 throu~h ~he co~umnar . b~r 17a an~ the ~epar~lon wall 30. ~y this heat:ing, the visco~ y o~ the ejection li~uid is lowere~, ~he first eje~ti~n o~ tne liquid ejecting head is $mproYe~ 1n this e.x~mp~.e The d~cription wlll be ma~e as ~ a posi~on of the hea~ g~nerating element Za as the heating means (Fourth ~ho~
Figure 36, (a) an~ (b), shows arrangement o~
the heat generating element 2a as the heating mean~
formed on the element 8ub8trate 1 in the liquid eject~ng head of the present ln~ention; and (a~ i~ a 99 2 1 86~73 top plan ~ie~ taken ~long a llne parallel with the surface of the element substrate l at a po~ition in the c~ro~ quid flow path, and tb~ is a s~ctlonal view ~aken along a line ~-~' line in ~a1.
The ~econd liquid flow path 16 ~s ~ormed by the liquid ~low wall 23, and the element su~strate ~s provided with heat generating elements 2 cor~e~ponding to the ~Acon~ liquid flo~ path. ~he heat generati~g element 2a creates a bub~le ln the liquid in the second liquid ~low path 16 by the he~t generated thereby. The element subst~ate, at the poxition corresponding to the r~ llqui~ ~h~mher l7 for cUpplying the liq~id to each ~econd llquid flow path 1~, is provis~on with neating me~ns 2~ for heating the bu~ble gener~tion liguid in ~he :~ n li~ui~ ~h~m~er and for heat~n~ the liquid ~eje~ion liquia) in ~he f irst 1 iquid flow path through the sepAr~tion wall disposed on the ._ - liquid ~ ~-r. ~he heating means ~a and the heat generati.ng ~lRment 2 are ZU cnnnPcted with wiring for ~upplying elect~ic ~ignals thereto The common ~iquid chamber i~ pro~ided wi~h a columnar member 17 for ~upporting the sep~ation wall In this example, the WJll constitu~ing ~he ~5 second liquid flow path a~d the columnar member, are ~imultaneou~ly formed by patternlng a DRY FILM of photo~en~iti~e ~e~in m~terial The materlal of the columnar member, may be polysulfone, polyethylene or anther resin material, o;r gold, nickel, silicon or ~nother metal, or glass.
~ or the simpli~iCatiOn of ~he manufacturing 5 step, the material is p~eferably the ~ame as that of the separatiorl wall When the columnar member or the liqu~d ~low pasE~age ~qall con~;tituting the se~ond 1 lquld f low path, are $ormed with the material ha~ing low thermal 10 conductivit~ such as :resin material, it is prefE~ra~ly ~eparated from the heat generating element 2a by not lefi~ than 0.1 mm sin~:e then the e~fect of convection of th~ liquid i~ added, ~o that th~ he~t can be more e~fectively trans~erred. In order to feed to the second liquid flow path the liquid un~formly and sufficiently heatç~d in the lltIuid ch~ her, the heat generating element 2a i~ pre~erably ~isposed adja~ent the li~id ch~mher separated from the trailing edge of ~he comm~n llquid chamber of the liq~id flow path by not less than o 5 mm.
A liq~i~ e~ectlng head provided wlth the element sub~tr~te 1 of the ~tructur~ ~h~wn in Fiç~ure 3~, (a~ and ~b~, w~ manufacturea The lnk havln~ the Yi~;Cosity 100 c~P wa6 u6ed as the ejection liguid. An a~ueous ~olution of ethanol 20 % was uqe~ a6 the bubble generatlon liyuid. The heating means 2a was heA~ed to 45 C. Then, the heat waE; ~cran~ferred malnly through the bubble generation liquid and ~he separation w~ll so that the vi~co~ity of the ejec~ion llqu~d was decreased to 50 cP, ~nd the ~irst ejection at the recor~ st~rt was improved with the sta~ilized feathering in the recording material~
~Fifth E~ho~iment~
Flgure 37, (a) and (b~ sho~s a structure of h~ating means 2a forme~ on the element ~ubstrate 1 ~n a li~uid ejecting head according to an embodiment of the pre~ent invention, wh~rein (a) is a top plan vlew, and (~) is a sect~onal view taken along z-z' line in (a). Each element o~ this em~od~ment 1s the ~ame a~
in ~he pre~ious embodiment. However, ln thi~ example, the columnar membe~ 17a i8 formed precisely through electro-fo~ming method, from nickel ha~ing a thermal co~n~tivitr of gO~5 w/m, k, for example, together with the ~eparation wall. In thi~ example, the columnar mem~er 17~ is of high ~hermal con~n~tivity ma~erlal, and th~refore, the heat generated by the heat~ng means is more ~a~ily tran~ferred to the fi~st liquia flc~w p~th, so that the ejection liquid in the fir~t l~q~ld rlow path ls morè e~icien~ly heated.
~he material of the c~lumnar mPmher may ~e any if the thermal çond~l~tivity ~hereof i~ high, for example, lt 7-5 may ~e gold, silicon, nickel, tungsten or another metal material.
By the lntegral forma~ion of the columnar 2 1 ~73 1o~

member and the ~eparation wall, the e~ficiency of the heat conducti~n is further in~reased.
A liquid eiecting head provided ~ith the element su~strate 1 o~ the structure shown in Figure 37, ~a) and (~, was manu~actured. The ink having t~e ~is~6i~y ~00 cP was used as the ejecti~n liq~id. An aqueous solution of et~anol 20 ~ wa~ u~ed as the bub~le generatlon liquid. The heating means 2a was heated to 4~ C Then, the heat was transfer~ed m~inly th~ough the bub~le generation liquld and the separation wall ~o that the viscosity of the eje~tion liqui~ ~a~ decrea~ed tb 50 cP, and the first ejection at the record start wa~ improved with the sta~ilized feathering in the r~cording material.
15 (Sixth Embo~li ~nt) Figure 38, ~a) and tb) ~hows a structure of heater 2a formed ~s the heating means on the element trate 1 in a liquid ejecting head according to an embodiment of the present inven~ion, wherein ta) is a 2~ top plan view, and ~b~ is a sectional view taken along z-z' line i~ (a~ r In thi~ example, the ~tructure~ are ~lmllar to those of the foreyoing embodiment, and the detalled description thereo~ is ~litted ~or ~impl icity. In th~ s esample . the he~t genera~ing 2S elements 2a are provided at thrçe position~, and they are energlzed through contacts 2c to be heated to a preae~ermt neA temperature. As shown in Figure 38, -(a), an end of a columnar member 17a iEs pos~itiorl~d and contacted to the position R right ~bcve the heat genera~ing elements Za. The heat generating element may be the heat ~eneratin~ resi6~ e layer alone and may be the one inclu~ing the heat generating resistance layer and a p~otection la~er thereon. In the latter case, the end of the colum~ar mP~he~ is con~act~d to the protection layer of th~ heat gener~ting element.
1~ ~he columna~ m~mber in thiæ embodiment is fo~med through the electro-forming method from the ~ame metal as the separation wall, nickel, for e~ample, similarly to the prev~ous embodiment. The m~terial of the columnar mem~er may be any if thermal conduc~ivity thereof i~ high, as sn the previo~s embodiment.
By the formation of the columnar member on the heating mean~ as in thi~.example, the heat ~enerate~ by t~e heatin~ means i~ efflclently transmltted to the fir~t liq~id flow path through the col~nar member, and the liquid in the fi~t liquid ~low path can ~e efflclently heated.
In this example, ~t h~ heen con~lrmed that b~ raislng the tempe~ature ~ ~hP heat generatin~
element 2a as tne hea~in~ means to 25 - 60 C, the heat i8 effi~iently tr~n~mitted to the liqui~ in the fir6t liquid flow path 14 through the columnar member 21 8~0~3 17a. A liquid e~ect~g hea~ pro~i~ed with the el~ment sub6trate 1 of the structure ~ho~n in Fig~re 38, (a) and (b) r was manufactured. The ink having the v~co~ity 100 cP wa6 used as the ejection liquid. An S aqueous solution of ethanol 1~ ~ was used as the bu~ble generation liquid. The heating means ~a was heated to 50 C. Then, the heat was transferred main~y throu~h the ~ubble generation liq~id and the sepa~ation w~ll so that the visco~ity of the ejection liquld ~as decreaxed to 40 cP, and the first e~ection at the r~cord start was improved with the ~tabilized feathering in the recording ma~eri~l~
In the ~oregoing e~odiment~, the stru~ture below the ~pa~ation wall, n~mely, t~e s~fnn~ liqui~
1~ flow path and the s~cond c~mmon llquid chamber portion in fluid communication with i~, is ~aken.
The first liquid flow path and the first common liquid cham~er in fluid communica~ion with it, are formed by coupling a 6eparation wall 30 and a top ~0 plate having ~n orifiee plate having the e~ection outlets 18, a grooved top plate ha~ing grooves for constituting liquid flow paths 14 and a re~ess for constituting a fi~st common liquid ehamb~ 15 rr ~, ly in ~l~id f'f ication with the liquia flo~ paths 14 25 .and for supplying the first liquid into the liquid flow path~.
(Seventh ~mbofln ~ n~

`- 2 1 86373 Figu~e 39, ~a) and t~) illu~trate driY$ng proce6~ for a liquid ej~cting head according to an embo~ nt of the present i~vention, wherein the liquid e~ecting head has the ~ame ~tructure as with the li~uid ejecting head shown in Figure 9.
In this ~jectlon head, the movable mem~er 31 ls driven ~y dri~ing the heat ~enerating element 2, a~d b~ the resultant displacement of the movable memb~r 31, the ejecti~n llquid is eje~ted. The heat gen~ration sequence for the heat generating elem~nt includ~ a feature Flgure 40 showæ driving pul~e6 $or the he~t g~nerating element 2 in this em~diment.
and each position A, B, C, ~ of the pulse correspond~
to timings (a), (b), ~c~, ~d) in Figure 3~, respectivel~
When ~he liquid ejec~ng ~ad is to be dri~en, the heat gen~rating element ~ upplied wi~h a volta~e having a pul6e width tl, and then, it rests for time t2. Thereafter, th~ voltage of the pulse width t3 is applied to eject th~ liquid. In Figure 39. (a~ shows a state wherein the liquid is not yet formed into a bubble by thermal energy from the heat generating element. In (b), first bub~le generation occurs, ~n~ the bubble yeneration at this tim~ is not eno~gh to ~ject the liquid, but i6 enough only to di~place the movable --h~r 31 to a 6mall extent.
Thi~ is accomplished by u~ing small pul~e width or low ~1 ~G073 voltage o~ by using a he~t generating element h~ving a size smaller than th~t for ejecting the liquid in the ~ame nozzle. In (c), the collapse o~ bubble occurs during the rest period, where~n the movable ~ember 31 5 is ~tlll mo~ing, that is, it h~s not yet reached the initial state In ~d), the second ~u~le generation occurs. The second bu~ble generation i~ produced ~y a ~oltage having a pulse width t3 which is larger than that in the first pulse and therefore supplying larger 10 bubble generation po~. So, the movable member 31 displaces to a larger extent th.an in tb) so that the liquid is ejected in the ~orm of a droplet onto an un~hown reco~ding mater~al~
Figure 41 is a graph showin~ vibratlons of a 15 meniscus of the liquid ~t the e~ection outlet 3 at the points of time A - D shown in Figure 40. ~t ~, no chang~ of the menisclls occurs; at E3, the menificuE~
project~ (~ direction), at C, it tends to retr~ct, but is still p~ojecl:ed to a small e~ctent. With this -20 st~te, the bub~le ~eneration with p~lse width t3 occur~, an~ therefore, the meniscus is projected a~
all times ~pon an ejecting bu~le ~eneration.
Therefnre, in thi~; Pmhodlment, the mova~le memher is once dispiace~, by which the dlspl~ nt of 25 the mo~able member an~ the ~tate of the meniscus are constant when the eJeCting ~u~le generatlon occurs, so that the ejection amount is stabilize~. In 2186û73 addition, by once displacing the movable member into the fir~t llquid flow path ~y the ~irst bubble genera~ion, the bubble generation power upon the ~econd bub~le generation may ~e smaller, and mo~ o~
5 the p~wer is directed ~oward the ejection outlet, so that the ejection amo~nt is large~ tha~ when the li~uid is e~ected with a sin~le pulse When the ~jection amount is desired to ~e smaller to form a ~maller dot, the ejection may be caused when the 10 men~scu~ i B retracted~
When the non-e~ection period i~ long, thi~
operation may be carried ~ut at the initial stage, ~y which the ambience of the liquid fluid around the movable member, i8 such that ~he movable membe~ is ~5 easily displaced, and simultaneou~ herewith, the fixing and viScosity increase of the liquid adjacent the menis~us portion are eased, and therefore, the initial ejection sta~ility and the fir~t eiection occurrence are lmproved.

Fi~ure ~2 i~ hematic ~iew xhow~ng a fun~amen~al ~ructure of a liquid ejectinq appa~atu~
for implementlng the drlving method for the liquid ejecting head accoraing to Ihl~ Pmhndlment The llqul~ e~ec.ting ~pp~r~t~ll~ rnmpri~es a liquid ~jectin~
25 head 200, a driving circuit 201 for supplying drlvlng pul~e~ ~o the heat generating elements of the liquid ejecting head 200, and a pul~e control clrcult 202 for supplying control fiignals for controlling the drl~ing pulses to the driving circuit 201. A recording timing signal and a recordi~ da~ are supplied to the pul&e control circuit por~ion Z02, and the control signal is 5 produced on the basis of the data. ~n thls device, the driving ~ircu~t portion Z01 and the pul~e control circuit portion 202 c~nstitute a drlvlng pul~e control means~
~eierrlng to Figure 43, the description will 10 ~e mad~ as to control of drivln~ pulse sln this app~ratus. The ~co~ding ~iming signal (a) an~ the recording data ~b) are 6uppli~d to the pulse control circult portion 20~. A rectangular first pulse having a pulse wi~th T~ and a voltage ~1 is applied tdriving 15 pulse (~ y the reco~ding timing signal (a~ $s applied to the heat generating element of the liquid ejecting head 200 through the driving circuit portion 201 S~bsequently, a rect~ngular second pulse having a width T3 and a ~oltage Y2 ifi applied to the heat 20 generating eleme~t after 0 voltage T2 time (rest period T~? elapeex. Here, the voltage levels of the ~irst pul~e an~ the F r~ pulse, are the ~a~e That i~, V1 = ~2 second pulse The width of the eecond pulse ls longer than the fir~t pul~e, that i~, T1 c ~5 T3.
(Eighth Em~odiment) ~igu~e ~4 ~how~ a driving pulse for -- 2~86973 implementing the ~ri~ing method of this embod~ment~
Fig~r~ 44, (a~ shows a dri~ing pulse used in the initial stage after the print start, and (~) ~hows a drlvlng pulse at the other time. ~hen li~uid ha~ing low thixotroplc property such a~ high viscoslty liq~id, is to be e~ected, ~he voltage ~idth tl is made larger. and the width t2 of the rest period is made smaller, in the initial stage at whlch the ejection is difficult. When the ~i~cosity is lower in th~ perl~d other than the lnitial ~tate, th~ pulse wi~th tl i5 decreased, and th~ rest Wid~h ~ increa~ed to eject the liquid. By this, th~ ejecti~n amount ls made constant even when the high viscosi~y liquid is to ~e eject~d. The ejectio~ property upon the record start 5 i8 improved, and ~he ejection i~ stablll~ed as a wh~le The initial stage of the print 6tart mean~ the perlod ~L~ ~e~ ~hen the llquid flo~ does not occur and ~hen ~he llquld flow occur~ It include~ the initial printing perin~ after the main swit~h i~ actuated or ~0 the. reCord ~tart for a new page, or the lik~.
Referring to Fi~ure 45, the desc~ipti~n will be made as to the ~.ontrcl Or the driving pulse in thi~
ex mple~ The viscosit~ of hi~h vi~co~ity llquid is dependent on the temPerature~ and th~refnre, the temperature in the head is detected by a tempera~ure ~ensor, and t~e data are s~pplied to a pul~e control clrcuit portion ZOZ as reccrding data. In this 2~ 86073 1 1 o example, when the temperature in the head i6 not more than 40 C (including the initial state)~ the driving pulse ~hown in ~b) is applied, and w~en it i8 not 1B~S
than 40 C, the dr~ving pulse shown in (c) i6 applied.
tNinth Embodiment) Figure 46 is a graph showiny driviny pulses ~or implementing the driving method af th~s example.
A voltage having a pul~e wi~h tl is ~pplied, and the vol.tagQ applicatlon is rested for time t2, and is repea~.ed. At this tlme, the liquid is not ejected.
W~en the liquid is to be eJecte~, a voltage having a puls~ width t3 which i~ larger than pulse wldth tl is applie~.
Figure 47 $s a graph ~howing meni~cus lS vibration in ~hi~ em~odiment. Wh~n the bubble gener~tion for the liquid ejection i9 effected, it is pro~ected at all time6. ~y thi~, the ejection is ~tabil$~ed, and sinc~ the mova~le mem~er 31 is vi~rat~, the meniscus vibration o~ the liguid flow ZO path 14 can be reduced. Particularly, when the period of the vibratlon of the movable member i~ shorter than the peri~fl o~ the vibration ~f the meniscus, the peak is di~per~e~, ~o that the effect of the Leduction of the ~ni~cuB di~lacement is ~reater In the control of the dri~ing pulse in this e~bodiment, as shown in Figure 57, when the liquid is ~o be ejected in response to the rec~rding data, the 2~-6~73 dr~ving pulse (b) i~ applied, and when the liquid i~
not eiected, the driving pulse (c) is applied.
(Tenth Embod$ment) ~igure 49 1& a ~ectional view of a ~iquid ejecting he~d ~ult~le ~or ~he driving method for the liquid e;ee~ng he~ of this example. The llqu~d e~ectlng he.ad is similar to thht ~hown in Flgure 9 and Flgure 39, but the h~a~ genera~ln~ ele~ent 2 is constitut~d ~y a f~rst heat ge~erating element 2-1 and 1~ a ~ecand he~t generating element 2-2 whi~h ha~e different heat generat~on areas. an~ the structure~
are the same as in ~lgure 1 ~nd F~gu~e 3g in the other respects. The heat generating elem~nt 2-1 and the heat generating element 2-~ can ~e dri~en in~pendently from each other. Figure ~O ~how6 driving pulses for implementing the driving method of ~his embo~i ~nt, using the heat generating element~ 2-1, 5-2. Figure 51, (a~, (b), (c~, ~d) shows the 6t~te~
i~ the li~uid ejecting head at the timing~ A - D of the driving pul~e~ shown in Figure 50. Fig~re 51, (~) sho~s the ~tate wherein the heat gener~ting elements 1-1, 5-2 ha~e not been actuated. tb) shows t~e state whereln the flrst heat ge~erating e~ement 2 a~tllated. The ~u~le gener~llon at this time is no~
enough to eject the liquid. and is only enou~h to displace the movable member 31 to a small extent. (c~
~hows the state wherein the collapse of bubble occurs 2~6~73 in the rest period, and the movable ~ember ~l is still di~placing (~ ~h~ws the state wherein the second heat generating ele~ent 2-2 i6 actu~te~. The ~u~ble generation power for the fiecond heat generatlng elem~nt 2-Z is larger than the bubble generatinn power for the fir~t heat generatln~ element 2-l, and therefore, the movable mem~r 31 ~isplac~s to a greater extent ~han at ~, and t~e liguid ejects at this time.
The meniscu~ at ~he eject~on outlet 18 for the ejection liquid, ~ibrates in the similar ~nner to seventh embodiment shown in Fi~ure 41. By ~n~e di~placing the movable member 31, the bubble gen~ration for the e~ection occurs with the constant di~placement of the movable member 31 and the eonstant s~ate of the meniscu~, ~o that the ejection amount is ~tabillzed.. In addition, mo~t of the bubble generation power for the second hea~ generating element Z-2 is directe~ ~oward the ejection outlet, and the~efore, the ejecti~n ~m~unt 1~ lncreased when the 1$qu1~ 1~ ejec~ed ~y a single pulse o~ a sin~le h~a~ generatin~ element.
The ~ontrol o~ the drlvlng pulse in thls ~xample is as shown ln Figure 52 ~he first hPat Z5 genera~ing element 2-1 is first supplied with a r~ctangular pulse havlng a widt~ Tl and a voltage Vl (driving pulse for the f~ rst heat gener~ting element 2-1) i~ r~sp~n~e to the recording timing sign~ la).
Sub~equently~ aftQr the rest ~eriod T2, the second heat generating el~ent 2-2 is suppl$ed with a rectangular conflguration pul~ ~aving a width T2 and a ~oltage V2 (driving pulse lc) for the ~econd heat generating e~e~ent 2-2). At this time, ~1 = V~, and Tl ~ T3, are satisfied.
In the liquid ejecting head, used in this exdmple, th~ portion of the 6ep~ration wall 30 between the first liqui~ ~low path 14 and the s~ro~ liquid flow p~h 16 and the portion o~ the separation wall 30 between the adjacent no~zles, are i~tegrally formed of nickel having a tnickne~s of 5 micron through electro-forming, and ~y coupling with the ~u~strate 1, the n~ liquid f~ path 16 for ~he ~u~ble generation liquid is forme~. The nozzle separa~ion wa~l ~n~ the liquid ~eparation wall may be f~rmed separa~ed and then ~o~n~ted with oach other to ~orm the bu~ble generation liquid fl~w path 16 Fi~ure 5~ i~ a block diagram showing a structur~ for drivin~ the liquid ejecting ~ead in the above-de~crlbed liguid eject~ng apparatus.
As shown ln the Fiyure, the head dri~er 102 drive the he~t g~nerating elements o~ the ejccti~n head ~0 on the ~a~is of the eject$on control signal~
and the eiectlon dat~s transferred from the ~PU101, ~y which the ~iquid ~je~tion is carried out through the --- 2la6073 above-described principle of the ejection The head driver 102 i6 ~upplied w1th pul~e data ~or th~ dri~ing pul~e to ~e applied t~ the heat generati~g element hy the pulse y~ne~at~r 105, by which the driving pul~e waveform i~ changed for the initial ejection ~tabilization which will be described hereinafter.
De~ignate~ by 105 ln Figure 53 is a feeding s~ystem for reco~ling materials P in the ~boYe-~e~cr$bed l1guld ejecting apparatus lFigure 20) Flgure 54 shows a sub~trate structure o~ the above-describe~ uid e~ectlng head 60. The pocition of the elements are ~tlifferent from the actual m~t-for the purpo~e of bette~ under~tandin~ of the embodim~nt.
In Figu,e 54, 64 heaters 1021 as heat generating elements are proYided correspondlng to the ejection ou~let~ of the ejection head 60. The 64 heaters 1021 are ~Lo~ed into 8 bloek~ each including B heater~, and the ti~e sheared dri~ing i6 ef~ected for the group~. ~ diode array~ 102Z and heaters 1021 correspond to 8 cu~on electrodex. ~d different ~egment electrodes are connected to 8 heaters in each block. The head substrate i~ provided with a temperalure keeplng heater 1023 for heating the e~ection liquid, as will be ~e~ribed hereinafter Fi~ure 55 shows an u6ual w~veform of the vol~age pulse applied t~ th~ heater 1021, and Figure -115- 2~8~073 56 s~ho~ a proper relatio~ between the pulsE~ width and voltage of: ~uch a volt2ls~e p~lse As will ~e understood rom Figur~ 56, the voltaye can be de~re~ed with increase of the pul~e width.
The description ~111 ~e made as to Eiome embodiments of the ejection stabilization proce~E;
based on the fundamental structure de~cri~ed above ( 11th Em~o~liment ) In the normal recordlng operation, the pulse application period (pul~e ~idth) is set ~o tl, and the voltage is set to Vl ~po~nt A in Figure 56~ in accordanee with the pulse applicat$on period, and thereafter, the driving pulses having the thus E3et pulse width ~nd the ~olta~e are applied in accordanc~
with the ejectlon signal However, with this said pul6e application method, th~ initial eJection property may vary ~or a certain period ~r~m the record start when high viscosity li~uid i8 uxed as the ejection liquid or 20 when the rest perio~ is long, and therefore, the ejection llquld may ~e solidified adjacent ~o the ejection D~le~, or the ~lscosity thereof may ~e lncreased. Thi~ i~ becau~e the llquld ~low 1~ not ~ ~d at thi . ~ta~e. Therefore, the featherlng on the ad~acen~ is no~ uniform ~ n em~odiment, the proce~ shown in Figure 57 is c~ied out Dur~ng a predetermlned time from the -116- 2~ 86073 record $tart (step S101), the pul8e width of the driving pulse is t2 ~hich i6 larger than normal pu~
width tl, and after that (steP 8102~, ~he normal pul6e wldth tl is use~ for the recordiny ~Figure 58, Point B
5 in Figure 56 ) . By this, thermal energy amount genera~ed b~ the hea~ generating element is increased to lncrease the generated bu~le press~re o~ the bubble generation llquid, by which the s~art up pe~iofl of thQ ejection p~operty ls decreased, so ~hat the 1~ feathering on the recor~ing materlal ic ~ulck~y stabili~ed to per~it 6ati~factory eiection from the initial stage.
Flgure 59 lllu6t~ate~ the principle of this proce~6, ~nd ~howR a relation bet~een the application period and the eject~on fip~ed when n~rmal applied pul 6e6 ~re u~ed.
A6 ~hown in this ~igure, the ejection speed î~ lower in the initial stAge of the eJe~tion and varie~. but a~ter pulses are applied for a cert~i~
~o period ~the per~od re~uired for the stabilization of the motion o~ the li~id and the operation of the mov~ble mem~er from t~e drive start~, the e~ection speed reaches a predete~ ine~ level, and the e~ection is ~ta~ili~e~. ~here~ore, the pulses ha~i~g the 25 predeteL ~ n~ pulse width are ~pplied for a period xu~fi~ient for the 6t~bllization of the eje~ion, and a~ter the e~ectlon is st~ilize~, the pul~es of normal --117- 2 1~6~73 pulse width are aPPlie~.
In th~s example, "~pon) the record start or ejection start~ means ~he t~me i ~ately after non-signal in~ lve ~f non-ejectio~, and maY be de~ined as the time ~f the non-~lgnal. Thus, what is ~eant by "~upon~ the record start or e~ectlon start" in this exampl~, i~ di~leren~ depending on the cau~e of the decrease ~f the e~ectlon pro~erty For examp~e, ln the oa~e of de~rease o~ th~ ejection property mainly caused by the ~olidification or vls~osity increase, the top o~ the page ~o be recorded can be de~ined as the "(upon) the r~cord start'` if th~ ejection li~uid h~s a relati~ely high recoYery propert~, and the pulse width in the pe~iod of predete_ j ne~ length ther~from is changed In the case of high viscosity liquid used as the ejec~ioIl liquid, the top of ~ line of recording may ~e d~fined a~ n (Upon? t~e record start or ejection ~tart" lf the property of the liquid exhibit~ the reproducibility for each line of recording.
When the liguid has a ~urther high viscosit the pulse wi~h i~ further increased ~pon the record start, so that the ~emperature of the liquid is raised to lower the viscnsity, ~ whicn tne inltial ~ection 2S property i~ improved to provide sati~factory $mag~
quality.
(12th ~mbodiment) - 2186~73 In the qriving pul~e ~:nndillon~; ~;imll~r tc~
tho~e o~ the 11th embodiment, a larger dri~ing volt~ge is used for a pre~etermined tlme from the record start or until a predQtermine~ number of pul~e~ are applied, S by which the g~n~rated b~bble pressure i5 increased to improve the initial ejection property.
As shown i~ Figure 60, a ~oltage Vz which iG
higher than the normal voltagç~ Vl is applied ~or a predetermined time from the rç~cord start (paint C in Figure 56), and thereafter [ ~fter the e jection perform~nre such a~ the ejection speed i5 stabili~ed], normal voltage ~1 pul~es are applied ~Figure 61).
Wlth thix, the deterioratlon in the initlal e~ectton property c~n be ~uppressed, as ~n the 11th ~boaiment W~en a further hl~h~r vi~co~lty liquid 1 ~sea, tne applie~ vol~ge upon the record ~tart 1~
lncreased, so that the temperature of the liq~id is lncrea6ed to lower the viscosity, thus improving the initial eJectlon property to provlde ~atl~f~ctory ZU image quality.
~13th ~bodiment) In thi~ ex~mple, th~ application and th~
pul~e width of the driving voltage are made higher for a predetermined time from the record ~tart a~ ~hown in Fi~ure 6Z in the driving pul~e condition~ ~imilar to tho~e in the ~oregoing embodi~ent~, ~o that the gen~rated bubble pressure i~ lncrea~ed to i~L~Y~ the --119- 2186~73 initial e~ection property~
Normally, a~ shown in Figure 55, the recording i~ ~ffec~e~ with the ~on~tant drivlng voltage Vl and the constant pul~ width tl In thl~
example, a~ s~own in Fi.~ure 63, f~r ~e pre~eterm~n~
time from record start, the drlvlng voltage V2 ~V2~Vl) is applie~ wit~h the width of t2 ~t2~Vtl), (point D ln Figure 5~) Aft~r thQ ~ta~ilization of the eJection, normal voltage Vl and normal pul~e width tl are lo applied for the recordlng.
(14th Embodiment) In thi~ example, two heat generating elements are provided for one movsble member, and thi~
~tructure is utili~ed ~or the ejection stabilization, Figure 64, (a) and (~) ~hows the structure.
In Figu~e 64. ~a~, the two heat generating elements 2A ~nd 2~, are driven, ~nd by ~he ~u~bl~
generation therr~, the m~v~le m~mher 6 ~ spla~e~

t~ e~ect ~he ll~uid. In Plgure 64, Ib), the mova~le member 6 ~s di~place~ ~ the hu~le ~ener~tlon ~y one heat generating elem~nt 2A.
When two heat generating elements are dri~en, the total generate~ bubble pressure is ~igher 6~ that ~h~ movable member ~ is displ~e - t to a greater extent. There~ore, a~ shown in Fi~ure 65, when the e~ection ls not s~able upon record ~tart, the two heat gener~ting,elements are driven to 6tabilize the -l~o- 2 1 86073 ejection by t~e higher generated bubble pres~ure, and a~ter the stabilization of the ejection, only the main heat generating element 2A i~ dri~en to eJect the liquld~ a~ ~hown in Figure 64, ~
~imilarly to the foregoing embodiment, the lnitial ejection property is improved to proviqe ~he ~atls~actory $mages.
The descrlptlon wlll ~e made as to a ~urther embodimen~ for tho control ~or t.he ejecti~n performance improvement of th~ ejecti.on head.
Figure 66 i~ a flow chart showing the proce~
steps relatlng to the preliminary ejecting operatlon mainly upon the print ~art, and Fi~ure 67 ~ehematically shows the content of the tabl~ u-q~d with the proces6.
A~ ~hown in Figure 66, in this example, when the completion o~ the p~inting is discriminated ~step S6), the non-printing time t therea~ter is counted (xtep Sl), and the head temperature T i5 detected ZO (step SZ). When the printing in~tructions is detected [step 53), the ~reliminary e jection i~ carrie~ out w~t~ th~ num~er o~ e~ectlons in a~ord~nce wlth the non-prlnt~ ng time t and the head temperature T
detected B~ such preli in~ry ejection~, t~e viscosity-increased in~ and the mixed i~k in the head can be satis~actorily di6charged 6imilarly to the foregoin~ e~odime~ts The nu~er N of ejec~ions in the preliminar~
ejectio~, is deter~ined ~y ~ = No x f ~t, T~. Rere, No is the num~er of ejection~ with which the visc~s~t~-increased llqul~ ~nd the mlxture llqui~ can be satisfac~orily diccharged ~hen the non-printing time ls le6~ than 12 hours, and the head temperature ls not less than 1~ C and less than 20 C, for example. ThQ f ~t, T~ is an operator f~r determinating the coefficient deteL ine~ by the non-pr~ntlng time t and the he~d temperature T, and ~sdetermine~ by re~erring to the processing tabl~ on th~
ba~is of the time t and the temperature T.
Figu~e 67 ~chematically ~hows the content of the table ~toring ~he value~ det~ ined by the processing f (t, T). With the decrease of the head temper~ture T or with the increase of the non-printing time ~. the decrea~e~ uf the ejec~ion perfor~no~ or the feathering of the liqui~ on the recor~ing materlal i5 larger due to the temperatu~e depe~ence property of Ihe visco~lty ~nd due to the viscosity-lncre~ed ~y evaparation ~f the water ~o ~n~ate for ~hi~, as shown in this Figure, the coefficient f (t, T~ is increased therewith, ~hat is, the number of ejectlon~
in the prell inAry e~ection lC increase~. The content Of the table shown in this Figure, i~ for the purpose of better understanding of the invention, and may be changed properly by one skilled i~ the art. Finer ~ntr~l or nnn-llnear ~ntrol is po~ le ~y the processing Flgure ~ a timing chart for operatlons for lmprov~ng the e~ection state upon the print start inclusion the preliminary e~ection. Each operation ~hown in thi~ ~igure, i~ similar to the operation~
de6cribed in the foregoing embodiment~. In this emboAir~nt, in addit~on to the preliminary e~ecting operation upon the print start, the head heating u~ing the heater formed on ~he head ~ub~trate, the Yibr~tion of the valve formed in the partition by supplying the energ~ not enough to eject the liquid to the heater, and the power up printlny with which the energ~
supplled to the ejection heater i .~ ely after the pr~nt start is increased, are carried out ~n com~lnatlon, ~ that the e~ection per~ormance 1~
impro~ea M~re par~i~ularly, ~he ~i~co~ity-in~rea$ed ink discharge and th~ mixe~ liq~id discharge by the preliminary e.jecting operation, the improvement in the ~0 ejectlon respon~ivity ~y the head heating, the increase of the ejection ~ount and th~ ejection stabilization by the preliminar~ valve driving, ~nd the stabilization of the initial printing by the power up printing, are ~qct _. ., 1 i~hed.
A6 de6cribed in the ~orego$ng, in this 2 ' ~i L, the state of the in~ or the like in the head is superpo~edly improved by the driving structure of the head Per se, so th~t the stabilizatlon of ~he in$tial e~ectlon performance ix improved.
Particularly, hy com~ining these sequentlal operatlon~, th~ stablllty improvement of the e~ection perform~nCe and the stabilization effect f~r the featherlng of the llquld on the recording material, are synergetically pro~ided, and therefore, the property at the initial recording stage after the re~t period i~ reoov~red, and in addition, even better l~ property iB accomplis~ed to pro~lde very high reliability and image quality.
In the foregoing em~odimentR, the the operatlon before the ejection start, ~h~t is, in the re6t period, has been describe~, the operation may be carried o~t during the ejecting ~peratiuns to Provide the effects.
As described in the fore~ing, according ta the present in~ention, a large part of the pressure by generatiGn of the bubble rësultinq from the he~t generation ~f the heat generating element ~s e~fl~1ently tran~mltted dlrectly ~ the e~e~on ~ullet ~l~e ~y the mo~a~le mem~er, ~n~ t~ere~ore~ the liquid can be eiecte~ with high ejection energy use efflclen~y and With hlgh e~ection pressure Parti~ularlyr according to an aspect of the present inventlon, the heating mean~ for ~djusting the temperatures of the bub~le gener~tion liquid an~ the eiection liquid at a liqui~ chamber position in fluid ~ lc~t~on wlth the s~con~ liquid $10w path cont~ining the bubble generation liq~la, ~y which ~he bubble generati~n li~uid can be contr~llea t~ a predetermlne~ temperature . The heat i~ efficientlY
tran~mitted ta t.he e~ectlon liquld throu~h the separation wall, ~o ~hat the viscosity decrease a~ the liquid and the proper initial ~jection can be accomplished In ad~ition, in the ca~e that the ejection li~uid is heated through the ~ubble generation liquid, the bubble generation power o~ the ~ubble generation liquid ca~ bu enhanced.
Furthe~, according to an a~pect o~ th~
prexent inventi~n, there is pro~ided a thermally conducti~e col~mnar member ~n contact ~it~ said heatin~ l-leans. ~he member ls usable as a heat transfer member ~or the e~ection liquid, and therefore, the heat tran~e~ from the heating ~ean~ 1~ improved.
According t~ an aspect of the prese~t invention, the ~u~e generating ener~y 1~ lncre~ed during a period until the ejectlon property ~uch a~
~e ejection speed at the ini~ial e~ection iG e~ectlon p~opertie~, so that ~e e~ectlon ~pee~ can ~e increased agaln~t the resistan~e by the movable m^~
ZS or by the e~ectian liquid As a reQultQ, the ~atlsfactory recording is accompli~hed from the recard start Furthermore~ according to an aspect of the present in~ention, the increase of the liquid eje¢tion amount and the stabilization of th~ liquid e3e~tion amount c~n ~e ~imult~neously a~ured. In addition, the ejection property uPon the record start can be improved. The improvemen~ in the e~ection propert~ i~
particularly remarkable when the ejection liquid h~ a ~igh vi~co~ity. Furth~r. the meniscus vibration at the e~ection outlet for the ei~tlon llquld can be lU sUppreSce~, ~n tnat high frequency rec~r~ng is accomplished As regards the mixture o~ the e~ection llguid and bub~le generation liqu$~ occurred in th~ ejection head, according to an aspect of the present.invention, the ~o-c~lled pr~liminary ejection not ~f~ecting recording, i~ oarried out on the ba6i~ of the inform~tio~ r~lating to th~ viscosity such as the dyn~mic viscosit~ ~hich is an index cf the ~ixture or on the basis of mixture iniormation directly indieati~e of the degree of the mixture, ~o that the mixed liquid can be di~charged together with viscosit~-increased ejection liquid. As a r~ult, sati~factory recording i6 accomplished with proper dYnYity ~t all times.
Using these features in combination, the eiection performance can be stably enha~ced, and in addition, the propertie~ o~ the liquid per ~e, ~uch a~

- 2t86073 - 1~6-tlen:3ity or ~eathering property, llre improved~ ~o that th~ image quali~y ix improved.

Claims (53)

1. A liquid ejecting method for ejecting a liquid using a bubble, comprising the steps of:
providing a liquid ejecting head having an ejection outlet for ejecting the liquid, a heat generating element for generating heat to form the bubble, the heat generating element having an area center, and a bubble generating region where the bubble is generated in the liquid;
a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
displacing the movable member from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to an upstream side with respect to a direction towards said ejection outlet by the displacement of said movable member, thus directing said bubble towards said ejection outlet to eject the liquid through the ejection outlet; and heating the liquid to normalize a state of the liquid in a liquid flow path for the liquid at least before liquid ejection start or at a time of non-ejection of the liquid.

2. A method according to Claim 1, wherein said operation includes discharging said liquid other than ejecting said liquid based on recording information.

3. A method according to Claim 2, wherein a condition of said discharging is changed in accordance with detecting an ejection state of said liquid.

4. A method according to Claim 2, further comprising the step of changing a condition of said discharging in accordance with output of ejection liquid viscosity detecting means for a detected ejection liquid viscosity.

5. A method according to Claim 2, further comprising the step of changing a condition of said discharging in accordance with a detected non-ejection period.

6. A method according to Claim 2, further comprising the step of changing a condition of said discharging in accordance with an estimated ejection liquid temperature.

7. A method according to Claim 2, further comprising the step of changing a condition of said discharging in accordance with a detected ambience humidity.

8. A method according to Claim 2, further comprising the step of changing a condition of said discharging in accordance with a detected ejection liquid density.

9. A method according to any one of Claims 3-8, wherein the condition of discharging of said liquid is changed in accordance with a number of ejections.

10. A method according to any one of Claims 3-8, wherein the condition of discharging of said liquid is a pulse width of a bubble generation energy application pulse.

11. A method according to any one of Claims 3-8, wherein the condition of discharging of said liquid is a bubble generation energy applying voltage.

12. A method according to any one of Claims 3-8, wherein the condition of discharging of said liquid is a plurality of pulse widths of bubble generation energy.

13. A method according to Claim 1, wherein said operation includes a step of heating said liquid.

14. A method according to Claim 13, wherein said heating is effected using a heating means for heating provided in a substrate having a bubble generation means for forming said bubble generating region.

15. A method according to Claim 13, wherein said heating is effected through a supporting member for supporting said movable member in a form of cantilever.

16. A method according to Claim 15, wherein said supporting member includes a separation wall for separating the liquid flow path in fluid communication with said ejection outlet and said bubble generating region.

17. A method according to Claim 1, wherein said operation includes a step of vibrating said movable member without ejecting said liquid through said ejection outlet.

18. A method according to Claim 17, wherein bubble generation is started to eject the liquid while a meniscus of the liquid is at the ejection outlet is outwardly extended beyond a position in a rest state by the vibration of said movable member.

19. A method according to Claim 17, wherein bubble generation is started to eject the liquid while a meniscus of the liquid is at the ejection outlet is inward beyond a position in a rest state by the vibration of said movable member.

20. A method according to Claim 17, wherein said vibration is caused by applying energy to a bubble generation means for generating the bubble, which is lower than that for ejecting the liquid.

21. A method according to Claim 20, wherein said applied energy is lowered by decreasing a pulse width thereof.

22. A method according to Claim 20, wherein said applied energy is lowered by decreasing a voltage level thereof.

23. A method according to Claim 20, wherein said bubble generation means has a plurality of heat generating elements, and said vibration is caused by one of said heat generating elements which generates a bubble insufficient to eject the liquid.

24. A liquid ejection apparatus, using a liquid ejection head having an ejection outlet for ejecting the liquid, a heat generating element for generating heat to form the bubble, the heat generating element having an area center, and a bubble generating region where the bubble is generated in the liquid; and a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of the flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; the improvement comprising:
driving means for heating the liquid to normalize a state of the liquid in a liquid flow path for the liquid at least before liquid ejection start or at the time of non-ejection of the liquid.

25. An apparatus according to Claim 24, wherein said driving means discharges said liquid other than ejecting said liquid on the basis of recording information.

26. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of ejection state detecting means for detecting ejection state of said liquid.

27. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of ejection liquid viscosity detecting means for detecting an ejection liquid viscosity.

28. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of non-ejection period detecting means for detecting non-ejection period.

29. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of ejection liquid temperature estimation means for estimating an ejection liquid temperature.

30. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of ambience humidity detecting means for detecting an ambience humidity.

31. An apparatus according to Claim 25, wherein a condition of said discharging is changed in accordance with an output of ejection liquid density detecting means for detecting an ejection liquid density.

32. An apparatus according to any one of Claims 26-31, wherein the condition is number of ejections.

33. An apparatus according to any one of Claims 26-31, wherein the condition is pulse width of a bubble generation energy application pulse.

34. An apparatus according to Claims 26-31, wherein the condition is bubble generation energy applying voltage.

35. An apparatus according to any one of Claims 26-31, wherein the condition is plural pulse widths of bubble generation energy.

36. A liquid ejecting head for ejecting liquid using a bubble, comprising:
an ejection outlet for ejecting the liquid;
a heat generating element for generating heat to form the bubble, said heat generating element having an area center;
a bubble generating region for generating the bubble in the liquid;
a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and heating means for changing a state of said liquid by changing without generating a bubble, a temperature of the liquid by heat.

37. A liquid ejection head according to Claim 36, wherein said temperature changing is effected using heating means provided in a substrate having bubble generation means for forming said bubble generating region.

38. A liquid ejection head according to Claim 36, wherein said temperature changing is effected through a supporting member for supporting said movable member in a form of cantilever.

39. A liquid ejection head according to Claim 38, further comprising a liquid flow path in communication with said ejection outlet and said bubble generating region, and wherein said supporting member includes a separation wall for separating the liquid flow path in fluid communication with said ejection outlet and said bubble generating region.

40. A liquid ejecting apparatus comprising a liquid ejecting head as in Claim 39, and recording material feeding means.

41. A liquid ejecting head for ejecting liquid using a bubble, comprising:
an ejection outlet for ejecting the liquid;
a heat generating element for generating heat to form the bubble, said heat generating element having an area center;
a bubble generating region for generating the bubble in the liquid;
a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;

wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and heating means for moving the liquid without ejecting the liquid by heating the liquid.

42. A liquid ejection head according to Claim 41, wherein said moving means vibrates said movable member, wherein the vibration is caused by applying energy to bubble generation means, which is lower than that for ejecting the liquid.

43. A liquid ejection head according to Claim 42, wherein said applied energy is lowered by decreasing a pulse width thereof.

44. A liquid ejection head according to Claim 42, wherein said applied energy is lowered by decreasing a voltage level thereof.

45. A liquid ejection head according to Claim 41, wherein said bubble generation means has a plurality of heat generating elements, and said vibration is caused by one of said heat generating elements which generates bubbles not enough to eject said liquid.

46. A liquid ejection apparatus using a liquid ejection head as defined in any one of Claims 41-45.

47. A liquid ejection apparatus for ejecting liquid, comprising:
a liquid ejecting head having an ejection outlet for ejecting the liquid, a heat generating element for generating heat to form the bubble, the heat generating element having an area center, and a bubble generating region where the bubble is generated in the liquid; and a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and heating means for increasing ejecting energy by making larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter.

48. An apparatus according to Claim 47, wherein said increasing means increases a pulse with the energy.

49. An apparatus according to Claim 47, wherein said increasing means increases a voltage level the energy.

50. An apparatus according to Claim 47, wherein said increasing means applies a plurality of pulses.

51. An apparatus according to Claim 47, wherein said increasing means includes a plurality of heat generating elements.

52. A liquid ejecting method for ejecting liquid using a bubble, comprising:
using a liquid ejecting head having an ejection outlet for ejecting the liquid, a heat generating element for generating heat to form the bubble, the heat generating element having an area center, and a bubble generating region where the bubble is generated in the liquid; and a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and making larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter, using heating means for heating the liquid.

53. A liquid ejecting apparatus for effecting recording by ejecting liquid, comprising:
a liquid ejecting head having an ejection outlet for ejecting the liquid, a heat generating element for generating heat to form the bubble, the heat generating element having an area center, and a bubble generating region where the bubble is generated in the liquid; and a movable member which is disposed faced to said bubble generating region, and which has a fulcrum and a free end located downstream of the fulcrum relative to a direction of flow of the liquid, said movable member being displaceable between a first position and a second position farther from the bubble generating region than the first position and which has a free end at a downstream side thereof, wherein a portion of said movable member corresponding to the area center of said heat generating element is displaceable;
wherein the movable member is displaced from said first position to said second position by pressure based on generation of the bubble in said bubble generating region, wherein said bubble expands more to the downstream side than to the upstream side with respect to a direction toward said ejection outlet by the displacement of said movable member, thus directing said bubble toward said ejection outlet to eject the liquid through the ejection outlet; and wherein said heat generating element being effective to discharge said liquid from the liquid flow path for the liquid to be ejected during a predetermined period in a non-ejection period at least before ejection start, using means partly constituting said liquid ejecting head, and makes larger bubble generation energy for ejecting at least during a predetermined period from ejection start than thereafter;
means for changing a state of said liquid by changing without generating a bubble, a temperature of said liquid, liquid moving means for changing a state of said liquid by moving said liquid without ejecting said liquid.