CA2212639A1 - Substrate system for optoelectronic/microwave circuits - Google Patents

Substrate system for optoelectronic/microwave circuits

Info

Publication number
CA2212639A1
CA2212639A1 CA002212639A CA2212639A CA2212639A1 CA 2212639 A1 CA2212639 A1 CA 2212639A1 CA 002212639 A CA002212639 A CA 002212639A CA 2212639 A CA2212639 A CA 2212639A CA 2212639 A1 CA2212639 A1 CA 2212639A1
Authority
CA
Canada
Prior art keywords
substrate
optoelectronic
microwave
substrate system
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002212639A
Other languages
French (fr)
Other versions
CA2212639C (en
Inventor
Daniel Yap
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DirecTV Group Inc
Original Assignee
He Holdings, Inc.
Daniel Yap
Hughes Aircraft Company
Hughes Electronics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by He Holdings, Inc., Daniel Yap, Hughes Aircraft Company, Hughes Electronics Corporation filed Critical He Holdings, Inc.
Publication of CA2212639A1 publication Critical patent/CA2212639A1/en
Application granted granted Critical
Publication of CA2212639C publication Critical patent/CA2212639C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4246Bidirectionally operating package structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques

Abstract

A low-loss substrate system is provided for carrying and interconnecting optoelectronic/microwave circuits. The system includes a high-resistivity substrate, e.g., silicon of resistivity >1x10 3 ohm-centimeter. A dielectric layer, e.g., silicon dioxide, is preferably deposited over at least a portion of the substrate. Low-loss microwave transmission members and passive microwave components, e.g:, capacitors and spiral inductors, can be fabricated directly on the dielectric layer with thin-film techniques. Optoelectronic and microwave integrated circuits are preferably mounted on the substrate system with solder bumps and bonding pads.
Other portions of the substrate can define grooves for receiving optical fibers. To enhance optical alignment, the grooves and bonding pads are preferably located with photolithographic techniques. The substrate system is especially suited for optoelectronic/microwave circuits that are realized with hybrid integration structures.
CA002212639A 1996-01-26 1997-01-24 Substrate system for optoelectronic/microwave circuits Expired - Lifetime CA2212639C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/591,854 US5611008A (en) 1996-01-26 1996-01-26 Substrate system for optoelectronic/microwave circuits
US08/591,854 1996-01-26
PCT/US1997/001090 WO1997027508A1 (en) 1996-01-26 1997-01-24 Substrate system for optoelectronic/microwave circuits

Publications (2)

Publication Number Publication Date
CA2212639A1 true CA2212639A1 (en) 1997-07-31
CA2212639C CA2212639C (en) 2003-04-08

Family

ID=24368227

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002212639A Expired - Lifetime CA2212639C (en) 1996-01-26 1997-01-24 Substrate system for optoelectronic/microwave circuits

Country Status (7)

Country Link
US (1) US5611008A (en)
EP (1) EP0817983A1 (en)
JP (1) JPH10504663A (en)
KR (1) KR19980703337A (en)
CA (1) CA2212639C (en)
IL (1) IL121717A0 (en)
WO (1) WO1997027508A1 (en)

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US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
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Also Published As

Publication number Publication date
JPH10504663A (en) 1998-05-06
WO1997027508A1 (en) 1997-07-31
IL121717A0 (en) 1998-02-22
CA2212639C (en) 2003-04-08
EP0817983A1 (en) 1998-01-14
KR19980703337A (en) 1998-10-15
US5611008A (en) 1997-03-11

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Effective date: 20170124