CA2220354A1 - Method and apparatus using organic vapor phase deposition for the growth of organic thin films - Google Patents

Method and apparatus using organic vapor phase deposition for the growth of organic thin films

Info

Publication number
CA2220354A1
CA2220354A1 CA002220354A CA2220354A CA2220354A1 CA 2220354 A1 CA2220354 A1 CA 2220354A1 CA 002220354 A CA002220354 A CA 002220354A CA 2220354 A CA2220354 A CA 2220354A CA 2220354 A1 CA2220354 A1 CA 2220354A1
Authority
CA
Canada
Prior art keywords
organic
growth
thin films
vapor phase
phase deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002220354A
Other languages
French (fr)
Other versions
CA2220354C (en
Inventor
Stephen R. Forrest
Vladimir S. Ban
Paul E. Burrows
Jeffrey Schwartz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton University
Original Assignee
The Trustees Of Princeton University
Stephen R. Forrest
Vladimir S. Ban
Paul E. Burrows
Jeffrey Schwartz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Trustees Of Princeton University, Stephen R. Forrest, Vladimir S. Ban, Paul E. Burrows, Jeffrey Schwartz filed Critical The Trustees Of Princeton University
Publication of CA2220354A1 publication Critical patent/CA2220354A1/en
Application granted granted Critical
Publication of CA2220354C publication Critical patent/CA2220354C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/54—Organic compounds

Abstract

In a method using organic vapor phase deposition (OVPD), for the growth of thin films of organic material, a volatile precursor of each component of the organic material is carried as a vapor to a hot-wall reaction chamber by independently controlled streams of carrier gas.
CA002220354A 1995-05-19 1996-05-13 Method and apparatus using organic vapor phase deposition for the growth of organic thin films Expired - Lifetime CA2220354C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/444,252 1995-05-19
US08/444,252 US5554220A (en) 1995-05-19 1995-05-19 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities
PCT/US1996/006768 WO1996037639A2 (en) 1995-05-19 1996-05-13 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities

Publications (2)

Publication Number Publication Date
CA2220354A1 true CA2220354A1 (en) 1996-11-28
CA2220354C CA2220354C (en) 2002-12-10

Family

ID=23764114

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002220354A Expired - Lifetime CA2220354C (en) 1995-05-19 1996-05-13 Method and apparatus using organic vapor phase deposition for the growth of organic thin films

Country Status (6)

Country Link
US (1) US5554220A (en)
EP (1) EP0828867B1 (en)
JP (1) JP2000504298A (en)
CA (1) CA2220354C (en)
DE (1) DE69625684T2 (en)
WO (1) WO1996037639A2 (en)

Families Citing this family (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6048630A (en) 1996-07-02 2000-04-11 The Trustees Of Princeton University Red-emitting organic light emitting devices (OLED's)
JP2000516761A (en) * 1996-08-12 2000-12-12 ザ トラスティーズ オブ プリンストン ユニバーシティ Non-polymer flexible organic light emitting devices
US5844363A (en) * 1997-01-23 1998-12-01 The Trustees Of Princeton Univ. Vacuum deposited, non-polymeric flexible organic light emitting devices
US5811833A (en) * 1996-12-23 1998-09-22 University Of So. Ca Electron transporting and light emitting layers based on organic free radicals
US7393561B2 (en) * 1997-08-11 2008-07-01 Applied Materials, Inc. Method and apparatus for layer by layer deposition of thin films
US6224948B1 (en) 1997-09-29 2001-05-01 Battelle Memorial Institute Plasma enhanced chemical deposition with low vapor pressure compounds
US6413656B1 (en) 1998-09-14 2002-07-02 The University Of Southern California Reduced symmetry porphyrin molecules for producing enhanced luminosity from phosphorescent organic light emitting devices
US6420031B1 (en) 1997-11-03 2002-07-16 The Trustees Of Princeton University Highly transparent non-metallic cathodes
US6469437B1 (en) 1997-11-03 2002-10-22 The Trustees Of Princeton University Highly transparent organic light emitting device employing a non-metallic cathode
KR100963857B1 (en) 1997-10-09 2010-06-16 더 트러스티즈 오브 프린스턴 유니버시티 Organic light emitting device
US6451455B1 (en) 1998-04-01 2002-09-17 The Trustees Of Princeton University Metal complexes bearing both electron transporting and hole transporting moieties
US6150043A (en) 1998-04-10 2000-11-21 The Trustees Of Princeton University OLEDs containing thermally stable glassy organic hole transporting materials
US6303238B1 (en) * 1997-12-01 2001-10-16 The Trustees Of Princeton University OLEDs doped with phosphorescent compounds
US6337102B1 (en) * 1997-11-17 2002-01-08 The Trustees Of Princeton University Low pressure vapor phase deposition of organic thin films
US6387544B1 (en) 1998-04-10 2002-05-14 The Trustees Of Princeton University OLEDS containing thermally stable glassy organic hole transporting materials
US6210814B1 (en) 1998-04-10 2001-04-03 The University Of Southern California Color-tunable organic light emitting devices
US6312836B1 (en) 1998-04-10 2001-11-06 The Trustees Of Princeton University Color-tunable organic light emitting devices
US6287712B1 (en) 1998-04-10 2001-09-11 The Trustees Of Princeton University Color-tunable organic light emitting devices
US6830828B2 (en) 1998-09-14 2004-12-14 The Trustees Of Princeton University Organometallic complexes as phosphorescent emitters in organic LEDs
AU1339700A (en) 1998-11-02 2000-05-22 Presstek, Inc. Transparent conductive oxides for plastic flat panel displays
EP1145338B1 (en) 1998-12-16 2012-12-05 Samsung Display Co., Ltd. Environmental barrier material for organic light emitting device and method of making
US6217947B1 (en) 1998-12-16 2001-04-17 Battelle Memorial Institute Plasma enhanced polymer deposition onto fixtures
US6207238B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition for high and/or low index of refraction polymers
US6268695B1 (en) 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6274204B1 (en) 1998-12-16 2001-08-14 Battelle Memorial Institute Method of making non-linear optical polymer
US6228434B1 (en) 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making a conformal coating of a microtextured surface
US6207239B1 (en) 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition of conjugated polymer
US6228436B1 (en) 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making light emitting polymer composite material
US7001536B2 (en) * 1999-03-23 2006-02-21 The Trustees Of Princeton University Organometallic complexes as phosphorescent emitters in organic LEDs
US6506461B2 (en) 1999-03-31 2003-01-14 Battelle Memorial Institute Methods for making polyurethanes as thin films
US6358570B1 (en) 1999-03-31 2002-03-19 Battelle Memorial Institute Vacuum deposition and curing of oligomers and resins
JP3682465B2 (en) * 1999-03-31 2005-08-10 独立行政法人産業技術総合研究所 Resin molded product surface layer modification method and apparatus therefor, and resin molded product with modified surface layer, resin molded product surface layer colored method and apparatus and surface molded resin product with colored surface layer, and Resin molded product with added functionality by modifying the surface layer
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US6573652B1 (en) 1999-10-25 2003-06-03 Battelle Memorial Institute Encapsulated display devices
US6413645B1 (en) * 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6623861B2 (en) * 2001-04-16 2003-09-23 Battelle Memorial Institute Multilayer plastic substrates
US6548912B1 (en) 1999-10-25 2003-04-15 Battelle Memorial Institute Semicoductor passivation using barrier coatings
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US7198832B2 (en) * 1999-10-25 2007-04-03 Vitex Systems, Inc. Method for edge sealing barrier films
DE10007059A1 (en) * 2000-02-16 2001-08-23 Aixtron Ag Method and device for producing coated substrates by means of condensation coating
US6639357B1 (en) 2000-02-28 2003-10-28 The Trustees Of Princeton University High efficiency transparent organic light emitting devices
US6839368B2 (en) * 2000-03-17 2005-01-04 Mrinal Thakur Dipolar organic materials producing highly efficient laser-like emission
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
JP4597421B2 (en) * 2000-05-12 2010-12-15 株式会社半導体エネルギー研究所 Method for manufacturing light emitting device
US6572706B1 (en) * 2000-06-19 2003-06-03 Simplus Systems Corporation Integrated precursor delivery system
DE10048759A1 (en) * 2000-09-29 2002-04-11 Aixtron Gmbh Method and device for separating organic layers in particular by means of OVPD
DE10128091C1 (en) * 2001-06-11 2002-10-02 Applied Films Gmbh & Co Kg Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials
EP1421827B1 (en) 2001-08-29 2012-02-22 The Trustees Of Princeton University Organic light emitting devices having carrier blocking layers comprising metal complexes
KR100918988B1 (en) * 2001-08-29 2009-09-25 더 트러스티즈 오브 프린스턴 유니버시티 Use of metal complexes to facilitate hole transport in light emitting devices, and methods for fabrication thereof
US7431968B1 (en) * 2001-09-04 2008-10-07 The Trustees Of Princeton University Process and apparatus for organic vapor jet deposition
US7404862B2 (en) * 2001-09-04 2008-07-29 The Trustees Of Princeton University Device and method for organic vapor jet deposition
US8535759B2 (en) * 2001-09-04 2013-09-17 The Trustees Of Princeton University Method and apparatus for depositing material using a dynamic pressure
US6734038B2 (en) * 2001-09-04 2004-05-11 The Trustees Of Princeton University Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
US6835469B2 (en) 2001-10-17 2004-12-28 The University Of Southern California Phosphorescent compounds and devices comprising the same
US20050109281A1 (en) * 2002-03-22 2005-05-26 Holger Jurgensen Process for coating a substrate, and apparatus for carrying out the process
US8900366B2 (en) 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
JP2004055401A (en) * 2002-07-22 2004-02-19 Sony Corp Organic film formation device
KR100473806B1 (en) * 2002-09-28 2005-03-10 한국전자통신연구원 Method and apparatus using large area organic vapor deposition for organic thin film and organic devices
US20040199052A1 (en) 2003-04-01 2004-10-07 Scimed Life Systems, Inc. Endoscopic imaging system
US7510913B2 (en) 2003-04-11 2009-03-31 Vitex Systems, Inc. Method of making an encapsulated plasma sensitive device
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
US20050137459A1 (en) 2003-12-17 2005-06-23 Scimed Life Systems, Inc. Medical device with OLED illumination light source
EP1717356A1 (en) * 2004-01-23 2006-11-02 Daiichi Pure Chemicals Co., Ltd. Dast twin crystal, process for producing the same and use thereof
US7737625B2 (en) * 2004-03-25 2010-06-15 Idemitsu Kosan Co., Ltd. Organic electroluminescent device with carrier blocking layer interposed between two emitting layers
EP1747578A1 (en) * 2004-05-18 2007-01-31 Mecharonics Co., Ltd. Method for forming organic light-emitting layer
EP1672715A1 (en) * 2004-12-17 2006-06-21 Applied Films GmbH & Co. KG Apparatus for coating a substrate
US20060273713A1 (en) * 2005-06-02 2006-12-07 Eastman Kodak Company Process for making an organic light-emitting device
DE502005001749D1 (en) 2005-07-28 2007-11-29 Applied Materials Gmbh & Co Kg Vapor deposition
EP1752555A1 (en) 2005-07-28 2007-02-14 Applied Materials GmbH & Co. KG Vaporizing device
US7615501B2 (en) * 2005-08-11 2009-11-10 3M Innovative Properties Company Method for making a thin film layer
US7767498B2 (en) 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
EP2987450B1 (en) 2006-02-07 2019-06-05 Boston Scientific Limited Medical device light source
WO2008054477A2 (en) * 2006-03-17 2008-05-08 Northwestern University High-performance field effect transistors with self-assembled nanodielectrics
WO2008034272A1 (en) * 2006-09-18 2008-03-27 ETH Zürich Stilbazolium salt
US8778508B2 (en) * 2006-12-08 2014-07-15 Universal Display Corporation Light-emitting organometallic complexes
US8519130B2 (en) * 2006-12-08 2013-08-27 Universal Display Corporation Method for synthesis of iriduim (III) complexes with sterically demanding ligands
JP5519293B2 (en) 2006-12-28 2014-06-11 スリーエム イノベイティブ プロパティズ カンパニー Nucleation layer for thin metal layer formation
JP2008216947A (en) * 2007-03-06 2008-09-18 Tetsuzo Yoshimura Polymer chain/thin film growing method
US8431243B2 (en) 2007-03-08 2013-04-30 Universal Display Corporation Phosphorescent materials containing iridium complexes
US9130177B2 (en) 2011-01-13 2015-09-08 Universal Display Corporation 5-substituted 2 phenylquinoline complexes materials for light emitting diode
DE102007030499A1 (en) 2007-06-30 2009-01-08 Aixtron Ag Apparatus and method for depositing in particular doped layers by means of OVPD or the like
DE102009003781A1 (en) * 2008-06-03 2009-12-10 Aixtron Ag A method for depositing a thin-film polymer in a low pressure gas phase
US8350451B2 (en) 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
KR101055606B1 (en) * 2008-10-22 2011-08-10 한국과학기술원 Organic dry jet printing head and printing apparatus and method using same
US9337446B2 (en) 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
US9184410B2 (en) 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US8801856B2 (en) * 2009-09-08 2014-08-12 Universal Display Corporation Method and system for high-throughput deposition of patterned organic thin films
US8590338B2 (en) 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
US10008677B2 (en) 2011-01-13 2018-06-26 Universal Display Corporation Materials for organic light emitting diode
DE102011107894A1 (en) 2011-07-18 2013-01-24 Creaphys Gmbh Coating device, in particular for the inner coating of hollow bodies, and coating method
KR101289851B1 (en) * 2011-07-29 2013-07-26 아주대학교산학협력단 Method of growing stilbazolium-salt crystals
KR101389011B1 (en) * 2012-03-28 2014-04-24 주식회사 유니텍스 Source container and reactor for vapor phase deposition
EP3674381B1 (en) * 2017-08-25 2023-05-10 Japan Science and Technology Agency Organic optical material

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE279032C (en) *
US4731756A (en) * 1983-02-07 1988-03-15 The Johns Hopkins University Optical storage and switching devices using organic charge transfer salts
US4684598A (en) * 1984-11-23 1987-08-04 The Johns Hopkins University Enhanced optically sensitive medium using organic charge transfer materials to provide reproducible thermal/optical erasure
US4800173A (en) * 1986-02-20 1989-01-24 Canon Kabushiki Kaisha Process for preparing Si or Ge epitaxial film using fluorine oxidant
JPH01172297A (en) * 1987-12-26 1989-07-07 Toray Ind Inc Production of organic single crystal
US5139592A (en) * 1988-07-13 1992-08-18 Minnesota Mining And Manufacturing Company Low gravity enhanced growth of phthalocyanine polymorphs and films
DD279032A1 (en) * 1988-12-30 1990-05-23 Elektronische Bauelemente Veb PROCESS FOR PRODUCING DUENNER ORGANIC SEMICONDUCTOR LAYERS
US5284779A (en) * 1989-11-24 1994-02-08 Semiconductor Energy Laboratory Co., Ltd. Method of forming organic charge-transfer thin films
WO1992005577A1 (en) * 1990-09-21 1992-04-02 Fujitsu Limited Method and apparatus for growing compound semiconductor crystals
US5256595A (en) * 1993-02-19 1993-10-26 The United States Of America As Represented By The Secretary Of The Army. Method of growing device quality InP onto an InP substrate using an organometallic precursor in a hot wall reactor
US5323482A (en) * 1993-05-27 1994-06-21 General Electric Company Deuterated organic salts useful in nonlinear optical applications

Also Published As

Publication number Publication date
JP2000504298A (en) 2000-04-11
DE69625684D1 (en) 2003-02-13
WO1996037639A2 (en) 1996-11-28
DE69625684T2 (en) 2003-10-23
EP0828867B1 (en) 2003-01-08
EP0828867A4 (en) 1999-10-27
CA2220354C (en) 2002-12-10
EP0828867A2 (en) 1998-03-18
WO1996037639A3 (en) 1997-01-16
US5554220A (en) 1996-09-10

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