CA2243347A1 - Method and apparatus for using an array of grating light valves to produce multicolor optical images - Google Patents
Method and apparatus for using an array of grating light valves to produce multicolor optical imagesInfo
- Publication number
- CA2243347A1 CA2243347A1 CA002243347A CA2243347A CA2243347A1 CA 2243347 A1 CA2243347 A1 CA 2243347A1 CA 002243347 A CA002243347 A CA 002243347A CA 2243347 A CA2243347 A CA 2243347A CA 2243347 A1 CA2243347 A1 CA 2243347A1
- Authority
- CA
- Canada
- Prior art keywords
- light
- configuration
- array
- grating
- subpixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
- B81C2201/115—Roughening a surface
Abstract
A multicolor optical image-generating device comprised of an array of grating light valves (GLVs) organized to form light-modulating pixel units for spatially modulating incident rays of light. The pixel units are comprised of three subpixel components each including a plurality of elongated, equally spaced apart reflective grating elements arranged parallel to each other with their light-reflective surfaces also parallel to each other. Each subpixel component includes means for supporting the grating elements in relation to one another, and means for moving alternate elements relative to the other elements and between a first configuration wherein the component acts to reflect incident rays of light as a plane mirror, and a second configuration wherein the component diffracts the incident rays of light as they are reflected from the grating elements. The three subpixel components of each pixel unit are designed such that when red, green and blue light sources are trained on the array, colored light diffracted by particular subpixel components operating in the second configuration will be directed through a viewing aperture, and light simply reflected from particular subpixel components operating in the first configuration will not be directed through the viewing aperture.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/591,231 US6219015B1 (en) | 1992-04-28 | 1996-01-18 | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
US08/591,231 | 1996-01-18 | ||
PCT/US1997/000854 WO1997026569A2 (en) | 1996-01-18 | 1997-01-17 | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2243347A1 true CA2243347A1 (en) | 1997-07-24 |
CA2243347C CA2243347C (en) | 2005-05-10 |
Family
ID=24365635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002243347A Expired - Fee Related CA2243347C (en) | 1996-01-18 | 1997-01-17 | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
Country Status (7)
Country | Link |
---|---|
US (2) | US6219015B1 (en) |
EP (1) | EP0875010B1 (en) |
JP (1) | JP4053598B2 (en) |
AT (1) | ATE217094T1 (en) |
CA (1) | CA2243347C (en) |
DE (1) | DE69712311T2 (en) |
WO (1) | WO1997026569A2 (en) |
Families Citing this family (334)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US20080248046A1 (en) * | 1997-03-17 | 2008-10-09 | Human Genome Sciences, Inc. | Death domain containing receptor 5 |
US6088102A (en) * | 1997-10-31 | 2000-07-11 | Silicon Light Machines | Display apparatus including grating light-valve array and interferometric optical system |
US6392775B1 (en) * | 1998-01-13 | 2002-05-21 | Seagate Technology Llc | Optical reflector for micro-machined mirrors |
EP1054726B1 (en) | 1998-02-11 | 2003-07-30 | University of Houston, Office of Technology Transfer | Apparatus for chemical and biochemical reactions using photo-generated reagents |
US6512502B2 (en) * | 1998-05-27 | 2003-01-28 | International Business Machines Corporation | Lightvalve projection system in which red, green, and blue image subpixels are projected from two lightvalves and recombined using total reflection prisms |
US5953161A (en) * | 1998-05-29 | 1999-09-14 | General Motors Corporation | Infra-red imaging system using a diffraction grating array |
US6271957B1 (en) * | 1998-05-29 | 2001-08-07 | Affymetrix, Inc. | Methods involving direct write optical lithography |
US6215579B1 (en) * | 1998-06-24 | 2001-04-10 | Silicon Light Machines | Method and apparatus for modulating an incident light beam for forming a two-dimensional image |
US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
US6080994A (en) * | 1998-07-30 | 2000-06-27 | Litton Systems, Inc. | High output reflective optical correlator having a folded optical axis using ferro-electric liquid crystal spatial light modulators |
US6962419B2 (en) | 1998-09-24 | 2005-11-08 | Reflectivity, Inc | Micromirror elements, package for the micromirror elements, and projection system therefor |
US6172796B1 (en) | 1998-12-18 | 2001-01-09 | Eastman Kodak Company | Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device |
US6144481A (en) * | 1998-12-18 | 2000-11-07 | Eastman Kodak Company | Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream |
US6181458B1 (en) | 1998-12-18 | 2001-01-30 | Eastman Kodak Company | Mechanical grating device with optical coating and method of making mechanical grating device with optical coating |
US6243194B1 (en) | 1998-12-18 | 2001-06-05 | Eastman Kodak Company | Electro-mechanical grating device |
US6335831B2 (en) | 1998-12-18 | 2002-01-01 | Eastman Kodak Company | Multilevel mechanical grating device |
AU2577700A (en) * | 1999-02-10 | 2000-08-29 | Macrogen Inc. | Method and apparatus for compound library preparation using optical modulator |
US6724125B2 (en) | 1999-03-30 | 2004-04-20 | Massachusetts Institute Of Technology | Methods and apparatus for diffractive optical processing using an actuatable structure |
US6826330B1 (en) | 1999-08-11 | 2004-11-30 | Lightconnect, Inc. | Dynamic spectral shaping for fiber-optic application |
US6501600B1 (en) | 1999-08-11 | 2002-12-31 | Lightconnect, Inc. | Polarization independent grating modulator |
US6674563B2 (en) | 2000-04-13 | 2004-01-06 | Lightconnect, Inc. | Method and apparatus for device linearization |
US6497490B1 (en) | 1999-12-14 | 2002-12-24 | Silicon Light Machines | Laser beam attenuator and method of attenuating a laser beam |
US6888983B2 (en) | 2000-04-14 | 2005-05-03 | Lightconnect, Inc. | Dynamic gain and channel equalizers |
JP2002082652A (en) * | 2000-05-18 | 2002-03-22 | Canon Inc | Image display device and method |
US6480634B1 (en) * | 2000-05-18 | 2002-11-12 | Silicon Light Machines | Image projector including optical fiber which couples laser illumination to light modulator |
CA2352729A1 (en) | 2000-07-13 | 2002-01-13 | Creoscitex Corporation Ltd. | Blazed micro-mechanical light modulator and array thereof |
DE10041896B4 (en) * | 2000-08-25 | 2005-07-21 | Carl Zeiss Jena Gmbh | Projection arrangement for projecting an image onto a projection surface |
DE10041722B4 (en) * | 2000-08-25 | 2004-11-25 | Carl Zeiss Jena Gmbh | Projection arrangement with a projector for projecting an image onto a projection surface and projection unit for coupling to a projector |
US7172296B2 (en) | 2000-08-30 | 2007-02-06 | Reflectivity, Inc | Projection display |
US7136159B2 (en) * | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
US6411425B1 (en) * | 2000-09-27 | 2002-06-25 | Eastman Kodak Company | Electromechanical grating display system with spatially separated light beams |
DE60120079T8 (en) * | 2000-10-31 | 2007-06-28 | Dainippon Screen Mfg. Co., Ltd. | Laser irradiation device and image recorder |
JP2002162599A (en) * | 2000-11-24 | 2002-06-07 | Sony Corp | Stereoscopic image display device |
US6693930B1 (en) | 2000-12-12 | 2004-02-17 | Kla-Tencor Technologies Corporation | Peak power and speckle contrast reduction for a single laser pulse |
US6387723B1 (en) | 2001-01-19 | 2002-05-14 | Silicon Light Machines | Reduced surface charging in silicon-based devices |
US6804429B2 (en) * | 2001-02-09 | 2004-10-12 | The Board Of Trustees Of The Leland Stanford Junior University | Reconfigurable wavelength multiplexers and filters employing micromirror array in a gires-tournois interferometer |
US6567584B2 (en) | 2001-02-12 | 2003-05-20 | Silicon Light Machines | Illumination system for one-dimensional spatial light modulators employing multiple light sources |
US20020167695A1 (en) * | 2001-03-02 | 2002-11-14 | Senturia Stephen D. | Methods and apparatus for diffractive optical processing using an actuatable structure |
US7177081B2 (en) * | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
US7903337B1 (en) | 2001-03-08 | 2011-03-08 | Silicon Light Machines | High contrast grating light valve |
US6614580B2 (en) | 2001-04-10 | 2003-09-02 | Silicon Light Machines | Modulation of light out of the focal plane in a light modulator based projection system |
US6707591B2 (en) | 2001-04-10 | 2004-03-16 | Silicon Light Machines | Angled illumination for a single order light modulator based projection system |
FI20010917A (en) * | 2001-05-03 | 2002-11-04 | Nokia Corp | Electrically reconfigurable optical devices and methods for their formation |
US7081928B2 (en) * | 2001-05-16 | 2006-07-25 | Hewlett-Packard Development Company, L.P. | Optical system for full color, video projector using single light valve with plural sub-pixel reflectors |
US7785098B1 (en) | 2001-06-05 | 2010-08-31 | Mikro Systems, Inc. | Systems for large area micro mechanical systems |
WO2002098624A1 (en) | 2001-06-05 | 2002-12-12 | Mikro Systems Inc. | Methods for manufacturing three-dimensional devices and devices created thereby |
US7141812B2 (en) * | 2002-06-05 | 2006-11-28 | Mikro Systems, Inc. | Devices, methods, and systems involving castings |
US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
US6485150B1 (en) | 2001-07-03 | 2002-11-26 | The United States Of America As Represented By The Secretary Of The Navy | Tunable spectral source |
US6646778B2 (en) | 2001-08-01 | 2003-11-11 | Silicon Light Machines | Grating light valve with encapsulated dampening gas |
US7023606B2 (en) | 2001-08-03 | 2006-04-04 | Reflectivity, Inc | Micromirror array for projection TV |
US6639722B2 (en) | 2001-08-15 | 2003-10-28 | Silicon Light Machines | Stress tuned blazed grating light valve |
US6785001B2 (en) | 2001-08-21 | 2004-08-31 | Silicon Light Machines, Inc. | Method and apparatus for measuring wavelength jitter of light signal |
US6930364B2 (en) * | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
US6750998B2 (en) * | 2001-09-20 | 2004-06-15 | Eastman Kodak Company | Electro-mechanical grating device having a continuously controllable diffraction efficiency |
KR100486495B1 (en) * | 2001-09-28 | 2005-04-29 | 엘지전자 주식회사 | Optical modulator and manufacturing method for thereof |
US6532097B1 (en) | 2001-10-11 | 2003-03-11 | Applied Materials, Inc. | Image registration apparatus having an adjustable reflective diffraction grating and method |
US7046410B2 (en) | 2001-10-11 | 2006-05-16 | Polychromix, Inc. | Actuatable diffractive optical processor |
JP3755460B2 (en) | 2001-12-26 | 2006-03-15 | ソニー株式会社 | Electrostatically driven MEMS element and manufacturing method thereof, optical MEMS element, light modulation element, GLV device, laser display, and MEMS apparatus |
JP3770158B2 (en) * | 2001-12-26 | 2006-04-26 | ソニー株式会社 | Manufacturing method of MEMS element |
US6800238B1 (en) | 2002-01-15 | 2004-10-05 | Silicon Light Machines, Inc. | Method for domain patterning in low coercive field ferroelectrics |
US6728023B1 (en) | 2002-05-28 | 2004-04-27 | Silicon Light Machines | Optical device arrays with optimized image resolution |
US6767751B2 (en) * | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
US6822797B1 (en) | 2002-05-31 | 2004-11-23 | Silicon Light Machines, Inc. | Light modulator structure for producing high-contrast operation using zero-order light |
US6829258B1 (en) | 2002-06-26 | 2004-12-07 | Silicon Light Machines, Inc. | Rapidly tunable external cavity laser |
US6908201B2 (en) * | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
US6714337B1 (en) | 2002-06-28 | 2004-03-30 | Silicon Light Machines | Method and device for modulating a light beam and having an improved gamma response |
US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
US6801354B1 (en) | 2002-08-20 | 2004-10-05 | Silicon Light Machines, Inc. | 2-D diffraction grating for substantially eliminating polarization dependent losses |
US6712480B1 (en) | 2002-09-27 | 2004-03-30 | Silicon Light Machines | Controlled curvature of stressed micro-structures |
US7729030B2 (en) * | 2002-10-21 | 2010-06-01 | Hrl Laboratories, Llc | Optical retro-reflective apparatus with modulation capability |
US7113320B2 (en) * | 2003-02-06 | 2006-09-26 | Evans & Sutherland Computer Corporation | GLV based fiber optic transmitter |
US7042622B2 (en) | 2003-10-30 | 2006-05-09 | Reflectivity, Inc | Micromirror and post arrangements on substrates |
US7639419B2 (en) * | 2003-02-21 | 2009-12-29 | Kla-Tencor Technologies, Inc. | Inspection system using small catadioptric objective |
US7884998B2 (en) | 2003-02-21 | 2011-02-08 | Kla - Tencor Corporation | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy |
US7869121B2 (en) | 2003-02-21 | 2011-01-11 | Kla-Tencor Technologies Corporation | Small ultra-high NA catadioptric objective using aspheric surfaces |
US7646533B2 (en) * | 2003-02-21 | 2010-01-12 | Kla-Tencor Technologies Corporation | Small ultra-high NA catadioptric objective |
US7672043B2 (en) * | 2003-02-21 | 2010-03-02 | Kla-Tencor Technologies Corporation | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth |
JP4366961B2 (en) * | 2003-02-25 | 2009-11-18 | ソニー株式会社 | Optical MEMS element, method for manufacturing the same, and diffractive optical MEMS element |
US6806997B1 (en) | 2003-02-28 | 2004-10-19 | Silicon Light Machines, Inc. | Patterned diffractive light modulator ribbon for PDL reduction |
US6829077B1 (en) | 2003-02-28 | 2004-12-07 | Silicon Light Machines, Inc. | Diffractive light modulator with dynamically rotatable diffraction plane |
US7042611B1 (en) * | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
US7063920B2 (en) * | 2003-05-16 | 2006-06-20 | Asml Holding, N.V. | Method for the generation of variable pitch nested lines and/or contact holes using fixed size pixels for direct-write lithographic systems |
US6873398B2 (en) * | 2003-05-21 | 2005-03-29 | Esko-Graphics A/S | Method and apparatus for multi-track imaging using single-mode beams and diffraction-limited optics |
EP1480080A1 (en) * | 2003-05-22 | 2004-11-24 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7183566B2 (en) * | 2003-05-28 | 2007-02-27 | Asml Netherlands B.V. | Lithographic apparatus for manufacturing a device |
US6989920B2 (en) * | 2003-05-29 | 2006-01-24 | Asml Holding N.V. | System and method for dose control in a lithographic system |
US7061591B2 (en) * | 2003-05-30 | 2006-06-13 | Asml Holding N.V. | Maskless lithography systems and methods utilizing spatial light modulator arrays |
EP1482373A1 (en) | 2003-05-30 | 2004-12-01 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN1297830C (en) * | 2003-06-05 | 2007-01-31 | 华新丽华股份有限公司 | Producing method for raster structure |
JP4411875B2 (en) * | 2003-06-20 | 2010-02-10 | ソニー株式会社 | Light modulation element and image display apparatus using the same |
EP1489449A1 (en) * | 2003-06-20 | 2004-12-22 | ASML Netherlands B.V. | Spatial light modulator |
US7016015B2 (en) * | 2003-06-20 | 2006-03-21 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US7110082B2 (en) * | 2003-06-24 | 2006-09-19 | Asml Holding N.V. | Optical system for maskless lithography |
SG119224A1 (en) * | 2003-06-26 | 2006-02-28 | Asml Netherlands Bv | Calibration method for a lithographic apparatus and device manufacturing method |
US7154587B2 (en) * | 2003-06-30 | 2006-12-26 | Asml Netherlands B.V | Spatial light modulator, lithographic apparatus and device manufacturing method |
US7158215B2 (en) * | 2003-06-30 | 2007-01-02 | Asml Holding N.V. | Large field of view protection optical system with aberration correctability for flat panel displays |
US6856449B2 (en) * | 2003-07-10 | 2005-02-15 | Evans & Sutherland Computer Corporation | Ultra-high resolution light modulation control system and method |
US7224504B2 (en) | 2003-07-30 | 2007-05-29 | Asml Holding N. V. | Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use |
US6831768B1 (en) * | 2003-07-31 | 2004-12-14 | Asml Holding N.V. | Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography |
US7334902B2 (en) | 2003-08-18 | 2008-02-26 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
US7012669B2 (en) * | 2003-08-18 | 2006-03-14 | Evans & Sutherland Computer Corporation | Reflection barrier for panoramic display |
US6871958B2 (en) * | 2003-08-18 | 2005-03-29 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
SG110196A1 (en) * | 2003-09-22 | 2005-04-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US7414701B2 (en) * | 2003-10-03 | 2008-08-19 | Asml Holding N.V. | Method and systems for total focus deviation adjustments on maskless lithography systems |
US7410736B2 (en) * | 2003-09-30 | 2008-08-12 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones |
US7023526B2 (en) * | 2003-09-30 | 2006-04-04 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation |
US6876440B1 (en) * | 2003-09-30 | 2005-04-05 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region |
US7109498B2 (en) * | 2003-10-09 | 2006-09-19 | Asml Netherlands B.V. | Radiation source, lithographic apparatus, and device manufacturing method |
US7116398B2 (en) * | 2003-11-07 | 2006-10-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7196772B2 (en) * | 2003-11-07 | 2007-03-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7001232B2 (en) * | 2003-12-11 | 2006-02-21 | Montgomery Robert E | Personal watercraft air intake assembly |
US6995830B2 (en) * | 2003-12-22 | 2006-02-07 | Asml Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
US7012674B2 (en) * | 2004-01-13 | 2006-03-14 | Asml Holding N.V. | Maskless optical writer |
US6847461B1 (en) * | 2004-01-29 | 2005-01-25 | Asml Holding N.V. | System and method for calibrating a spatial light modulator array using shearing interferometry |
US7580559B2 (en) * | 2004-01-29 | 2009-08-25 | Asml Holding N.V. | System and method for calibrating a spatial light modulator |
JP4083751B2 (en) * | 2004-01-29 | 2008-04-30 | エーエスエムエル ホールディング エヌ.ブイ. | System for calibrating a spatial light modulator array and method for calibrating a spatial light modulator array |
US7133118B2 (en) * | 2004-02-18 | 2006-11-07 | Asml Netherlands, B.V. | Lithographic apparatus and device manufacturing method |
US7190434B2 (en) * | 2004-02-18 | 2007-03-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7016014B2 (en) * | 2004-02-27 | 2006-03-21 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US7081947B2 (en) * | 2004-02-27 | 2006-07-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7061586B2 (en) * | 2004-03-02 | 2006-06-13 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US7094506B2 (en) * | 2004-03-09 | 2006-08-22 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US6967711B2 (en) * | 2004-03-09 | 2005-11-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
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US7561251B2 (en) * | 2004-03-29 | 2009-07-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7053981B2 (en) * | 2004-03-31 | 2006-05-30 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7153616B2 (en) * | 2004-03-31 | 2006-12-26 | Asml Holding N.V. | System and method for verifying and controlling the performance of a maskless lithography tool |
US7002666B2 (en) * | 2004-04-16 | 2006-02-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7173751B2 (en) * | 2004-04-29 | 2007-02-06 | Samsung Electro-Mechanics Co., Ltd. | Open hole-based diffractive light modulator |
US20050243295A1 (en) * | 2004-04-30 | 2005-11-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing |
US6963434B1 (en) * | 2004-04-30 | 2005-11-08 | Asml Holding N.V. | System and method for calculating aerial image of a spatial light modulator |
US20050259269A1 (en) | 2004-05-19 | 2005-11-24 | Asml Holding N.V. | Shearing interferometer with dynamic pupil fill |
US7242456B2 (en) * | 2004-05-26 | 2007-07-10 | Asml Holdings N.V. | System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions |
US7477403B2 (en) * | 2004-05-27 | 2009-01-13 | Asml Netherlands B.V. | Optical position assessment apparatus and method |
US6989886B2 (en) * | 2004-06-08 | 2006-01-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7123348B2 (en) | 2004-06-08 | 2006-10-17 | Asml Netherlands B.V | Lithographic apparatus and method utilizing dose control |
US7016016B2 (en) * | 2004-06-25 | 2006-03-21 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US7116403B2 (en) * | 2004-06-28 | 2006-10-03 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US7116404B2 (en) * | 2004-06-30 | 2006-10-03 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US7158208B2 (en) * | 2004-06-30 | 2007-01-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20060001890A1 (en) * | 2004-07-02 | 2006-01-05 | Asml Holding N.V. | Spatial light modulator as source module for DUV wavefront sensor |
US20060012779A1 (en) * | 2004-07-13 | 2006-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7573574B2 (en) * | 2004-07-13 | 2009-08-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US7227613B2 (en) * | 2004-07-26 | 2007-06-05 | Asml Holding N.V. | Lithographic apparatus having double telecentric illumination |
US7259829B2 (en) * | 2004-07-26 | 2007-08-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7335398B2 (en) * | 2004-07-26 | 2008-02-26 | Asml Holding N.V. | Method to modify the spatial response of a pattern generator |
US7142286B2 (en) * | 2004-07-27 | 2006-11-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20060026431A1 (en) * | 2004-07-30 | 2006-02-02 | Hitachi Global Storage Technologies B.V. | Cryptographic letterheads |
US7251020B2 (en) * | 2004-07-30 | 2007-07-31 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7538855B2 (en) * | 2004-08-10 | 2009-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7102733B2 (en) * | 2004-08-13 | 2006-09-05 | Asml Holding N.V. | System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool |
US7304718B2 (en) * | 2004-08-17 | 2007-12-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7500218B2 (en) * | 2004-08-17 | 2009-03-03 | Asml Netherlands B.V. | Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same |
US7079225B2 (en) * | 2004-09-14 | 2006-07-18 | Asml Netherlands B.V | Lithographic apparatus and device manufacturing method |
US7405861B2 (en) | 2004-09-27 | 2008-07-29 | Idc, Llc | Method and device for protecting interferometric modulators from electrostatic discharge |
US7373026B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | MEMS device fabricated on a pre-patterned substrate |
US7078323B2 (en) | 2004-09-29 | 2006-07-18 | Sharp Laboratories Of America, Inc. | Digital light valve semiconductor processing |
US7177012B2 (en) | 2004-10-18 | 2007-02-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7388663B2 (en) | 2004-10-28 | 2008-06-17 | Asml Netherlands B.V. | Optical position assessment apparatus and method |
JP4445373B2 (en) * | 2004-10-29 | 2010-04-07 | 富士通株式会社 | Light switch |
US7423732B2 (en) * | 2004-11-04 | 2008-09-09 | Asml Holding N.V. | Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane |
US7609362B2 (en) * | 2004-11-08 | 2009-10-27 | Asml Netherlands B.V. | Scanning lithographic apparatus and device manufacturing method |
US7170584B2 (en) * | 2004-11-17 | 2007-01-30 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7061581B1 (en) * | 2004-11-22 | 2006-06-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7474384B2 (en) * | 2004-11-22 | 2009-01-06 | Asml Holding N.V. | Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus |
US7643192B2 (en) * | 2004-11-24 | 2010-01-05 | Asml Holding N.V. | Pattern generator using a dual phase step element and method of using same |
US7333177B2 (en) * | 2004-11-30 | 2008-02-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7713667B2 (en) * | 2004-11-30 | 2010-05-11 | Asml Holding N.V. | System and method for generating pattern data used to control a pattern generator |
US7365848B2 (en) * | 2004-12-01 | 2008-04-29 | Asml Holding N.V. | System and method using visible and infrared light to align and measure alignment patterns on multiple layers |
US7391499B2 (en) * | 2004-12-02 | 2008-06-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7362415B2 (en) * | 2004-12-07 | 2008-04-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7355677B2 (en) * | 2004-12-09 | 2008-04-08 | Asml Netherlands B.V. | System and method for an improved illumination system in a lithographic apparatus |
US7349068B2 (en) * | 2004-12-17 | 2008-03-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7180577B2 (en) * | 2004-12-17 | 2007-02-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane |
US7256867B2 (en) * | 2004-12-22 | 2007-08-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7230677B2 (en) * | 2004-12-22 | 2007-06-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing hexagonal image grids |
US7274502B2 (en) * | 2004-12-22 | 2007-09-25 | Asml Holding N.V. | System, apparatus and method for maskless lithography that emulates binary, attenuating phase-shift and alternating phase-shift masks |
US7391676B2 (en) * | 2004-12-22 | 2008-06-24 | Asml Netherlands B.V. | Ultrasonic distance sensors |
US7202939B2 (en) * | 2004-12-22 | 2007-04-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7375795B2 (en) * | 2004-12-22 | 2008-05-20 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
US7656506B2 (en) * | 2004-12-23 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
US7426076B2 (en) * | 2004-12-23 | 2008-09-16 | Asml Holding N.V. | Projection system for a lithographic apparatus |
US7242458B2 (en) * | 2004-12-23 | 2007-07-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates |
US7538857B2 (en) * | 2004-12-23 | 2009-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
US20060138349A1 (en) * | 2004-12-27 | 2006-06-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7459247B2 (en) * | 2004-12-27 | 2008-12-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7317510B2 (en) * | 2004-12-27 | 2008-01-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7126672B2 (en) * | 2004-12-27 | 2006-10-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7279110B2 (en) * | 2004-12-27 | 2007-10-09 | Asml Holding N.V. | Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays |
US7274029B2 (en) * | 2004-12-28 | 2007-09-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7145636B2 (en) * | 2004-12-28 | 2006-12-05 | Asml Netherlands Bv | System and method for determining maximum operational parameters used in maskless applications |
US7403865B2 (en) * | 2004-12-28 | 2008-07-22 | Asml Netherlands B.V. | System and method for fault indication on a substrate in maskless applications |
US7756660B2 (en) | 2004-12-28 | 2010-07-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7253881B2 (en) * | 2004-12-29 | 2007-08-07 | Asml Netherlands Bv | Methods and systems for lithographic gray scaling |
US7342644B2 (en) * | 2004-12-29 | 2008-03-11 | Asml Netherlands B.V. | Methods and systems for lithographic beam generation |
US7567368B2 (en) * | 2005-01-06 | 2009-07-28 | Asml Holding N.V. | Systems and methods for minimizing scattered light in multi-SLM maskless lithography |
US7542013B2 (en) * | 2005-01-31 | 2009-06-02 | Asml Holding N.V. | System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode |
US7460208B2 (en) * | 2005-02-18 | 2008-12-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7286137B2 (en) * | 2005-02-28 | 2007-10-23 | Asml Holding N.V. | Method and system for constrained pixel graytones interpolation for pattern rasterization |
US7499146B2 (en) * | 2005-03-14 | 2009-03-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping |
US7812930B2 (en) * | 2005-03-21 | 2010-10-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume |
US7209216B2 (en) * | 2005-03-25 | 2007-04-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography |
US7403265B2 (en) | 2005-03-30 | 2008-07-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing data filtering |
US7728956B2 (en) * | 2005-04-05 | 2010-06-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing multiple die designs on a substrate using a data buffer that stores pattern variation data |
US7330239B2 (en) * | 2005-04-08 | 2008-02-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device |
US7209217B2 (en) | 2005-04-08 | 2007-04-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing plural patterning devices |
US7221514B2 (en) * | 2005-04-15 | 2007-05-22 | Asml Netherlands B.V. | Variable lens and exposure system |
US20060244805A1 (en) * | 2005-04-27 | 2006-11-02 | Ming-Hsiang Yeh | Multicolor pen |
US7400382B2 (en) * | 2005-04-28 | 2008-07-15 | Asml Holding N.V. | Light patterning device using tilting mirrors in a superpixel form |
US7738081B2 (en) * | 2005-05-06 | 2010-06-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler |
US7477772B2 (en) * | 2005-05-31 | 2009-01-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression |
US7197828B2 (en) * | 2005-05-31 | 2007-04-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement |
US7292317B2 (en) * | 2005-06-08 | 2007-11-06 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing substrate stage compensating |
US7742148B2 (en) * | 2005-06-08 | 2010-06-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method for writing a digital image |
US7233384B2 (en) * | 2005-06-13 | 2007-06-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor |
US7321416B2 (en) * | 2005-06-15 | 2008-01-22 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion |
US7408617B2 (en) * | 2005-06-24 | 2008-08-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method |
US7965373B2 (en) * | 2005-06-28 | 2011-06-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load |
US7307694B2 (en) * | 2005-06-29 | 2007-12-11 | Asml Netherlands B.V. | Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method |
US7522258B2 (en) * | 2005-06-29 | 2009-04-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination |
US20070013889A1 (en) * | 2005-07-12 | 2007-01-18 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby having an increase in depth of focus |
US7251019B2 (en) * | 2005-07-20 | 2007-07-31 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging |
EP2495212A3 (en) * | 2005-07-22 | 2012-10-31 | QUALCOMM MEMS Technologies, Inc. | Mems devices having support structures and methods of fabricating the same |
US7606430B2 (en) * | 2005-08-30 | 2009-10-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD |
US20070046917A1 (en) * | 2005-08-31 | 2007-03-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method that compensates for reticle induced CDU |
JP2007114750A (en) * | 2005-09-09 | 2007-05-10 | Asml Netherlands Bv | Projection system design method, lithography apparatus, and device manufacturing method |
CN101272982B (en) | 2005-09-30 | 2012-03-21 | 高通Mems科技公司 | MEMS device and interconnects for same |
US7391503B2 (en) * | 2005-10-04 | 2008-06-24 | Asml Netherlands B.V. | System and method for compensating for thermal expansion of lithography apparatus or substrate |
US7830493B2 (en) * | 2005-10-04 | 2010-11-09 | Asml Netherlands B.V. | System and method for compensating for radiation induced thermal distortions in a substrate or projection system |
KR20070037864A (en) * | 2005-10-04 | 2007-04-09 | 엘지.필립스 엘시디 주식회사 | Liquid crystal display panel and fabrication method thereof |
US7332733B2 (en) * | 2005-10-05 | 2008-02-19 | Asml Netherlands B.V. | System and method to correct for field curvature of multi lens array |
US20070127005A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Holding N.V. | Illumination system |
US7626181B2 (en) * | 2005-12-09 | 2009-12-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20070133007A1 (en) * | 2005-12-14 | 2007-06-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device |
US20070153249A1 (en) * | 2005-12-20 | 2007-07-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types |
US7440078B2 (en) * | 2005-12-20 | 2008-10-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units |
US7466394B2 (en) * | 2005-12-21 | 2008-12-16 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array |
US8356905B2 (en) * | 2005-12-21 | 2013-01-22 | Parellel Consulting Limited Liability Company | Optically enhanced image sequences |
US7652814B2 (en) | 2006-01-27 | 2010-01-26 | Qualcomm Mems Technologies, Inc. | MEMS device with integrated optical element |
WO2007089770A2 (en) * | 2006-01-31 | 2007-08-09 | Polychromix Corporation | Hand-held ir spectrometer with a fixed grating and a diffractive mems-array |
US7532403B2 (en) * | 2006-02-06 | 2009-05-12 | Asml Holding N.V. | Optical system for transforming numerical aperture |
US7547568B2 (en) * | 2006-02-22 | 2009-06-16 | Qualcomm Mems Technologies, Inc. | Electrical conditioning of MEMS device and insulating layer thereof |
US7450295B2 (en) * | 2006-03-02 | 2008-11-11 | Qualcomm Mems Technologies, Inc. | Methods for producing MEMS with protective coatings using multi-component sacrificial layers |
US7528933B2 (en) * | 2006-04-06 | 2009-05-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement |
US7508491B2 (en) * | 2006-04-12 | 2009-03-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity |
US7839487B2 (en) * | 2006-04-13 | 2010-11-23 | Asml Holding N.V. | Optical system for increasing illumination efficiency of a patterning device |
US7948606B2 (en) * | 2006-04-13 | 2011-05-24 | Asml Netherlands B.V. | Moving beam with respect to diffractive optics in order to reduce interference patterns |
US7711239B2 (en) | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US7623287B2 (en) * | 2006-04-19 | 2009-11-24 | Qualcomm Mems Technologies, Inc. | Non-planar surface structures and process for microelectromechanical systems |
US7527996B2 (en) * | 2006-04-19 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Non-planar surface structures and process for microelectromechanical systems |
US8264667B2 (en) * | 2006-05-04 | 2012-09-11 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using interferometric and other exposure |
US8934084B2 (en) * | 2006-05-31 | 2015-01-13 | Asml Holding N.V. | System and method for printing interference patterns having a pitch in a lithography system |
US7728954B2 (en) * | 2006-06-06 | 2010-06-01 | Asml Netherlands B.V. | Reflective loop system producing incoherent radiation |
US7649676B2 (en) * | 2006-06-14 | 2010-01-19 | Asml Netherlands B.V. | System and method to form unpolarized light |
US7936445B2 (en) * | 2006-06-19 | 2011-05-03 | Asml Netherlands B.V. | Altering pattern data based on measured optical element characteristics |
US8896808B2 (en) * | 2006-06-21 | 2014-11-25 | Asml Netherlands B.V. | Lithographic apparatus and method |
US7697115B2 (en) * | 2006-06-23 | 2010-04-13 | Asml Holding N.V. | Resonant scanning mirror |
US7593094B2 (en) * | 2006-06-26 | 2009-09-22 | Asml Netherlands B.V. | Patterning device |
US20080002174A1 (en) * | 2006-06-30 | 2008-01-03 | Asml Netherlands B.V. | Control system for pattern generator in maskless lithography |
US7630136B2 (en) | 2006-07-18 | 2009-12-08 | Asml Holding N.V. | Optical integrators for lithography systems and methods |
US7548315B2 (en) * | 2006-07-27 | 2009-06-16 | Asml Netherlands B.V. | System and method to compensate for critical dimension non-uniformity in a lithography system |
US7738077B2 (en) * | 2006-07-31 | 2010-06-15 | Asml Netherlands B.V. | Patterning device utilizing sets of stepped mirrors and method of using same |
US7626182B2 (en) * | 2006-09-05 | 2009-12-01 | Asml Netherlands B.V. | Radiation pulse energy control system, lithographic apparatus and device manufacturing method |
US7628875B2 (en) * | 2006-09-12 | 2009-12-08 | Asml Netherlands B.V. | MEMS device and assembly method |
US8049865B2 (en) * | 2006-09-18 | 2011-11-01 | Asml Netherlands B.V. | Lithographic system, device manufacturing method, and mask optimization method |
US7683300B2 (en) * | 2006-10-17 | 2010-03-23 | Asml Netherlands B.V. | Using an interferometer as a high speed variable attenuator |
US20080111977A1 (en) * | 2006-11-14 | 2008-05-15 | Asml Holding N.V. | Compensation techniques for fluid and magnetic bearings |
US7453551B2 (en) * | 2006-11-14 | 2008-11-18 | Asml Netherlands B.V. | Increasing pulse-to-pulse radiation beam uniformity |
US7738079B2 (en) * | 2006-11-14 | 2010-06-15 | Asml Netherlands B.V. | Radiation beam pulse trimming |
US8054449B2 (en) * | 2006-11-22 | 2011-11-08 | Asml Holding N.V. | Enhancing the image contrast of a high resolution exposure tool |
EP2104930A2 (en) | 2006-12-12 | 2009-09-30 | Evans & Sutherland Computer Corporation | System and method for aligning rgb light in a single modulator projector |
US8259285B2 (en) * | 2006-12-14 | 2012-09-04 | Asml Holding N.V. | Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data |
US7706042B2 (en) | 2006-12-20 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | MEMS device and interconnects for same |
US7965378B2 (en) * | 2007-02-20 | 2011-06-21 | Asml Holding N.V | Optical system and method for illumination of reflective spatial light modulators in maskless lithography |
US8009269B2 (en) | 2007-03-14 | 2011-08-30 | Asml Holding N.V. | Optimal rasterization for maskless lithography |
US8009270B2 (en) * | 2007-03-22 | 2011-08-30 | Asml Netherlands B.V. | Uniform background radiation in maskless lithography |
WO2008124397A1 (en) * | 2007-04-03 | 2008-10-16 | David Fishbaine | Inspection system and method |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US7714986B2 (en) * | 2007-05-24 | 2010-05-11 | Asml Netherlands B.V. | Laser beam conditioning system comprising multiple optical paths allowing for dose control |
US20080304034A1 (en) * | 2007-06-07 | 2008-12-11 | Asml Netherlands B.V. | Dose control for optical maskless lithography |
US7768627B2 (en) * | 2007-06-14 | 2010-08-03 | Asml Netherlands B.V. | Illumination of a patterning device based on interference for use in a maskless lithography system |
US8189172B2 (en) * | 2007-06-14 | 2012-05-29 | Asml Netherlands B.V. | Lithographic apparatus and method |
US8692974B2 (en) * | 2007-06-14 | 2014-04-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control |
US8665536B2 (en) * | 2007-06-19 | 2014-03-04 | Kla-Tencor Corporation | External beam delivery system for laser dark-field illumination in a catadioptric optical system |
US7570415B2 (en) * | 2007-08-07 | 2009-08-04 | Qualcomm Mems Technologies, Inc. | MEMS device and interconnects for same |
JP5205113B2 (en) * | 2008-04-08 | 2013-06-05 | 浜松ホトニクス株式会社 | Grating element and manufacturing method thereof |
US8358317B2 (en) | 2008-05-23 | 2013-01-22 | Evans & Sutherland Computer Corporation | System and method for displaying a planar image on a curved surface |
US8702248B1 (en) | 2008-06-11 | 2014-04-22 | Evans & Sutherland Computer Corporation | Projection method for reducing interpixel gaps on a viewing surface |
EP2559534B1 (en) | 2008-09-26 | 2023-10-25 | Raytheon Technologies Corporation | Composition and method for casting manufacturing |
US8077378B1 (en) | 2008-11-12 | 2011-12-13 | Evans & Sutherland Computer Corporation | Calibration system and method for light modulation device |
US7864403B2 (en) * | 2009-03-27 | 2011-01-04 | Qualcomm Mems Technologies, Inc. | Post-release adjustment of interferometric modulator reflectivity |
NO333724B1 (en) * | 2009-08-14 | 2013-09-02 | Sintef | A micromechanical series with optically reflective surfaces |
US8547626B2 (en) * | 2010-03-25 | 2013-10-01 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of shaping the same |
KR20130100232A (en) | 2010-04-09 | 2013-09-10 | 퀄컴 엠이엠에스 테크놀로지스, 인크. | Mechanical layer of an electromechanical device and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9641826B1 (en) | 2011-10-06 | 2017-05-02 | Evans & Sutherland Computer Corporation | System and method for displaying distant 3-D stereo on a dome surface |
US8813824B2 (en) | 2011-12-06 | 2014-08-26 | Mikro Systems, Inc. | Systems, devices, and/or methods for producing holes |
US9175957B2 (en) * | 2012-09-24 | 2015-11-03 | Alces Technology, Inc. | Grayscale patterns from binary spatial light modulators |
KR102136275B1 (en) * | 2013-07-22 | 2020-07-22 | 삼성디스플레이 주식회사 | Organic light emitting device and method for manufacturing the same |
TWI511282B (en) * | 2013-08-05 | 2015-12-01 | Ye Xin Technology Consulting Co Ltd | Organic light emitting diode panel |
WO2015019064A1 (en) * | 2013-08-06 | 2015-02-12 | Bae Systems Plc | Display system |
US9967546B2 (en) | 2013-10-29 | 2018-05-08 | Vefxi Corporation | Method and apparatus for converting 2D-images and videos to 3D for consumer, commercial and professional applications |
US20150116458A1 (en) | 2013-10-30 | 2015-04-30 | Barkatech Consulting, LLC | Method and apparatus for generating enhanced 3d-effects for real-time and offline appplications |
US9232172B2 (en) | 2013-11-04 | 2016-01-05 | Christie Digital Systems Usa, Inc. | Two-stage light modulation for high dynamic range |
US9195122B2 (en) | 2013-11-28 | 2015-11-24 | Christie Digital Systems Usa, Inc. | Light modulator system including relay optics for correcting optical distortions |
CN104036700B (en) * | 2014-05-30 | 2016-02-03 | 京东方科技集团股份有限公司 | Display panel, display packing and display device |
CN106415346B (en) * | 2014-06-03 | 2019-05-10 | 华为技术有限公司 | Two-dimensional grating polarization beam apparatus and light coherent receiver |
US10158847B2 (en) | 2014-06-19 | 2018-12-18 | Vefxi Corporation | Real—time stereo 3D and autostereoscopic 3D video and image editing |
CN105720074B (en) * | 2014-12-03 | 2018-12-04 | 上海和辉光电有限公司 | Dot structure, metal mask plate and OLED display screen |
NZ773820A (en) | 2015-03-16 | 2022-07-29 | Magic Leap Inc | Methods and systems for diagnosing and treating health ailments |
KR102449800B1 (en) | 2015-06-15 | 2022-09-29 | 매직 립, 인코포레이티드 | Virtual and augmented reality systems and methods |
WO2017056080A1 (en) | 2015-10-02 | 2017-04-06 | Pure Depth Limited | Method and system using refractive beam mapper to reduce moiré interference in a display system including multiple displays |
WO2017056058A1 (en) | 2015-10-02 | 2017-04-06 | Pure Depth Limited | Method and system for performing color filter offsets in order to reduce moiré interference in a display system including multiple displays |
JP2018533080A (en) * | 2015-10-02 | 2018-11-08 | ピュア・デプス・リミテッド | Method and system for performing sub-pixel compression to reduce moire interference in a display system with multiple displays |
WO2017176898A1 (en) | 2016-04-08 | 2017-10-12 | Magic Leap, Inc. | Augmented reality systems and methods with variable focus lens elements |
AU2017361424B2 (en) | 2016-11-18 | 2022-10-27 | Magic Leap, Inc. | Spatially variable liquid crystal diffraction gratings |
US11067860B2 (en) | 2016-11-18 | 2021-07-20 | Magic Leap, Inc. | Liquid crystal diffractive devices with nano-scale pattern and methods of manufacturing the same |
CN115685626A (en) | 2016-11-18 | 2023-02-03 | 奇跃公司 | Multilayer liquid crystal diffraction grating for redirecting light with a wide range of incident angles |
JP7237830B2 (en) | 2016-11-18 | 2023-03-13 | マジック リープ, インコーポレイテッド | Waveguide optical multiplexer using cross gratings |
JP7069160B2 (en) | 2016-12-08 | 2022-05-17 | マジック リープ, インコーポレイテッド | Diffraction device based on cholesteric liquid crystal |
CA3046328A1 (en) | 2016-12-14 | 2018-06-21 | Magic Leap, Inc. | Patterning of liquid crystals using soft-imprint replication of surface alignment patterns |
KR20230053724A (en) | 2017-01-23 | 2023-04-21 | 매직 립, 인코포레이티드 | Eyepiece for virtual, augmented, or mixed reality systems |
JP7158396B2 (en) | 2017-02-23 | 2022-10-21 | マジック リープ, インコーポレイテッド | Display system with variable power reflector |
AU2018239264B2 (en) | 2017-03-21 | 2023-05-18 | Magic Leap, Inc. | Eye-imaging apparatus using diffractive optical elements |
KR20190126408A (en) | 2017-03-21 | 2019-11-11 | 매직 립, 인코포레이티드 | Stacked waveguides with different diffraction gratings for the combined field of view |
US11841481B2 (en) | 2017-09-21 | 2023-12-12 | Magic Leap, Inc. | Augmented reality display with waveguide configured to capture images of eye and/or environment |
US10852547B2 (en) | 2017-12-15 | 2020-12-01 | Magic Leap, Inc. | Eyepieces for augmented reality display system |
CN110223644B (en) * | 2018-03-02 | 2020-08-04 | 京东方科技集团股份有限公司 | Display device, virtual reality apparatus, and driving method |
JP2022509083A (en) | 2018-11-20 | 2022-01-20 | マジック リープ, インコーポレイテッド | Eyepieces for augmented reality display systems |
WO2020257469A1 (en) | 2019-06-20 | 2020-12-24 | Magic Leap, Inc. | Eyepieces for augmented reality display system |
Family Cites Families (299)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE16767E (en) * | 1927-10-11 | Charles prancis jenkins | ||
USRE16757E (en) * | 1922-10-31 | 1927-10-04 | knight | |
US1548262A (en) * | 1924-07-02 | 1925-08-04 | Freedman Albert | Manufacture of bicolored spectacles |
US1814701A (en) * | 1930-05-31 | 1931-07-14 | Perser Corp | Method of making viewing gratings for relief or stereoscopic pictures |
US2415226A (en) * | 1943-11-29 | 1947-02-04 | Rca Corp | Method of and apparatus for producing luminous images |
US2991690A (en) * | 1953-09-04 | 1961-07-11 | Polaroid Corp | Stereoscopic lens-prism optical system |
US2783406A (en) * | 1954-02-09 | 1957-02-26 | John J Vanderhooft | Stereoscopic television means |
US3553364A (en) * | 1968-03-15 | 1971-01-05 | Texas Instruments Inc | Electromechanical light valve |
US3576394A (en) * | 1968-07-03 | 1971-04-27 | Texas Instruments Inc | Apparatus for display duration modulation |
US3600798A (en) * | 1969-02-25 | 1971-08-24 | Texas Instruments Inc | Process for fabricating a panel array of electromechanical light valves |
BE757764A (en) * | 1969-10-21 | 1971-04-21 | Itt | SOLID STATE EXPLORATION SYSTEM |
US3802769A (en) * | 1972-08-28 | 1974-04-09 | Harris Intertype Corp | Method and apparatus for unaided stereo viewing |
US4093346A (en) * | 1973-07-13 | 1978-06-06 | Minolta Camera Kabushiki Kaisha | Optical low pass filter |
US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
US3947105A (en) * | 1973-09-21 | 1976-03-30 | Technical Operations, Incorporated | Production of colored designs |
US3896338A (en) * | 1973-11-01 | 1975-07-22 | Westinghouse Electric Corp | Color video display system comprising electrostatically deflectable light valves |
US3969611A (en) * | 1973-12-26 | 1976-07-13 | Texas Instruments Incorporated | Thermocouple circuit |
JPS5742849B2 (en) * | 1974-06-05 | 1982-09-10 | ||
US3912386A (en) | 1974-06-14 | 1975-10-14 | Rca Corp | Color image intensification and projection using deformable mirror light valve |
US4001663A (en) * | 1974-09-03 | 1977-01-04 | Texas Instruments Incorporated | Switching regulator power supply |
US4090219A (en) * | 1974-12-09 | 1978-05-16 | Hughes Aircraft Company | Liquid crystal sequential color display |
US4020381A (en) * | 1974-12-09 | 1977-04-26 | Texas Instruments Incorporated | Cathode structure for a multibeam cathode ray tube |
US3935500A (en) * | 1974-12-09 | 1976-01-27 | Texas Instruments Incorporated | Flat CRT system |
US3935499A (en) * | 1975-01-03 | 1976-01-27 | Texas Instruments Incorporated | Monolythic staggered mesh deflection systems for use in flat matrix CRT's |
US4017158A (en) * | 1975-03-17 | 1977-04-12 | E. I. Du Pont De Nemours And Company | Spatial frequency carrier and process of preparing same |
US4012116A (en) * | 1975-05-30 | 1977-03-15 | Personal Communications, Inc. | No glasses 3-D viewer |
US4084437A (en) * | 1975-11-07 | 1978-04-18 | Texas Instruments Incorporated | Thermocouple circuit |
CH595664A5 (en) * | 1975-11-17 | 1978-02-15 | Landis & Gyr Ag | |
US4184700A (en) * | 1975-11-17 | 1980-01-22 | Lgz Landis & Gyr Zug Ag | Documents embossed with optical markings representing genuineness information |
US4127322A (en) * | 1975-12-05 | 1978-11-28 | Hughes Aircraft Company | High brightness full color image light valve projection system |
CH594495A5 (en) * | 1976-05-04 | 1978-01-13 | Landis & Gyr Ag | |
US4135502A (en) * | 1976-09-07 | 1979-01-23 | Donald Peck | Stereoscopic patterns and method of making same |
US4139257A (en) * | 1976-09-28 | 1979-02-13 | Canon Kabushiki Kaisha | Synchronizing signal generator |
US4067129A (en) * | 1976-10-28 | 1978-01-10 | Trans-World Manufacturing Corporation | Display apparatus having means for creating a spectral color effect |
CH604279A5 (en) * | 1976-12-21 | 1978-08-31 | Landis & Gyr Ag | |
US4093922A (en) * | 1977-03-17 | 1978-06-06 | Texas Instruments Incorporated | Microcomputer processing approach for a non-volatile TV station memory tuning system |
US4093921A (en) * | 1977-03-17 | 1978-06-06 | Texas Instruments Incorporated | Microcomputer processing approach for a non-volatile TV station memory tuning system |
CH616253A5 (en) * | 1977-06-21 | 1980-03-14 | Landis & Gyr Ag | |
CH622896A5 (en) * | 1978-03-20 | 1981-04-30 | Landis & Gyr Ag | |
US4225913A (en) * | 1978-09-19 | 1980-09-30 | Texas Instruments Incorporated | Self-referencing power converter |
US4338660A (en) * | 1979-04-13 | 1982-07-06 | Relational Memory Systems, Inc. | Relational break signal generating device |
US4327966A (en) * | 1980-02-25 | 1982-05-04 | Bell Telephone Laboratories, Incorporated | Variable attenuator for laser radiation |
US4327411A (en) * | 1980-03-04 | 1982-04-27 | Bell Telephone Laboratories, Incorporated | High capacity elastic store having continuously variable delay |
US4454591A (en) * | 1980-05-29 | 1984-06-12 | Texas Instruments Incorporated | Interface system for bus line control |
US4418397A (en) * | 1980-05-29 | 1983-11-29 | Texas Instruments Incorporated | Address decode system |
US4430584A (en) * | 1980-05-29 | 1984-02-07 | Texas Instruments Incorporated | Modular input/output system |
US4447881A (en) * | 1980-05-29 | 1984-05-08 | Texas Instruments Incorporated | Data processing system integrated circuit having modular memory add-on capacity |
US4503494A (en) * | 1980-06-26 | 1985-03-05 | Texas Instruments Incorporated | Non-volatile memory system |
US4443845A (en) * | 1980-06-26 | 1984-04-17 | Texas Instruments Incorporated | Memory system having a common interface |
US4420717A (en) * | 1980-10-06 | 1983-12-13 | Texas Instruments Incorporated | Use of motor winding as integrator to generate sawtooth for switch mode current regulator |
US4594501A (en) * | 1980-10-09 | 1986-06-10 | Texas Instruments Incorporated | Pulse width modulation of printhead voltage |
JPS57122981U (en) * | 1981-01-27 | 1982-07-31 | ||
US4440839A (en) * | 1981-03-18 | 1984-04-03 | United Technologies Corporation | Method of forming laser diffraction grating for beam sampling device |
US4408884A (en) * | 1981-06-29 | 1983-10-11 | Rca Corporation | Optical measurements of fine line parameters in integrated circuit processes |
US4571603A (en) * | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
US4571041A (en) * | 1982-01-22 | 1986-02-18 | Gaudyn Tad J | Three dimensional projection arrangement |
US4484188A (en) * | 1982-04-23 | 1984-11-20 | Texas Instruments Incorporated | Graphics video resolution improvement apparatus |
US4468725A (en) * | 1982-06-18 | 1984-08-28 | Texas Instruments Incorporated | Direct AC converter for converting a balanced AC polyphase input to an output voltage |
US4492435A (en) * | 1982-07-02 | 1985-01-08 | Xerox Corporation | Multiple array full width electro mechanical modulator |
JPS602073A (en) * | 1983-04-06 | 1985-01-08 | テキサス・インスツルメンツ・インコ−ポレイテツド | Ac converting device and method |
US4655539A (en) * | 1983-04-18 | 1987-04-07 | Aerodyne Products Corporation | Hologram writing apparatus and method |
CH661683A5 (en) * | 1983-09-19 | 1987-08-14 | Landis & Gyr Ag | DEVICE FOR MAINTAINING HIGH-RESOLUTION RELIEF PATTERNS. |
US4561044A (en) * | 1983-09-22 | 1985-12-24 | Citizen Watch Co., Ltd. | Lighting device for a display panel of an electronic device |
US4809078A (en) * | 1983-10-05 | 1989-02-28 | Casio Computer Co., Ltd. | Liquid crystal television receiver |
FR2553893B1 (en) * | 1983-10-19 | 1986-02-07 | Texas Instruments France | METHOD AND DEVICE FOR DETECTING A TRANSITION OF THE CONTINUOUS COMPONENT OF A PERIODIC SIGNAL, IN PARTICULAR FOR A TELEPHONE TRUNK |
JPS60127888A (en) * | 1983-12-15 | 1985-07-08 | Citizen Watch Co Ltd | Liquid crystal display device |
JPS60214684A (en) * | 1984-04-10 | 1985-10-26 | Citizen Watch Co Ltd | Liquid crystal television device |
CH664030A5 (en) * | 1984-07-06 | 1988-01-29 | Landis & Gyr Ag | METHOD FOR GENERATING A MACROSCOPIC SURFACE PATTERN WITH A MICROSCOPIC STRUCTURE, IN PARTICULAR A STRUCTURALLY EFFECTIVE STRUCTURE. |
US4566935A (en) * | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US4710732A (en) * | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
US4662746A (en) * | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US4596992A (en) * | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
JPS6188676A (en) * | 1984-10-05 | 1986-05-06 | Citizen Watch Co Ltd | Liquid crystal television device |
US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US5281957A (en) | 1984-11-14 | 1994-01-25 | Schoolman Scientific Corp. | Portable computer and head mounted display |
US4772094A (en) * | 1985-02-05 | 1988-09-20 | Bright And Morning Star | Optical stereoscopic system and prism window |
US4866488A (en) * | 1985-03-29 | 1989-09-12 | Texas Instruments Incorporated | Ballistic transport filter and device |
US4623219A (en) * | 1985-04-15 | 1986-11-18 | The United States Of America As Represented By The Secretary Of The Navy | Real-time high-resolution 3-D large-screen display using laser-activated liquid crystal light valves |
US4719507A (en) * | 1985-04-26 | 1988-01-12 | Tektronix, Inc. | Stereoscopic imaging system with passive viewing apparatus |
US4751509A (en) * | 1985-06-04 | 1988-06-14 | Nec Corporation | Light valve for use in a color display unit with a diffraction grating assembly included in the valve |
US4772593A (en) * | 1985-07-01 | 1988-09-20 | The Dow Chemical Company | Alkoxysilane compounds in the treatment of swine dysentery |
US4728185A (en) * | 1985-07-03 | 1988-03-01 | Texas Instruments Incorporated | Imaging system |
US5299037A (en) | 1985-08-07 | 1994-03-29 | Canon Kabushiki Kaisha | Diffraction grating type liquid crystal display device in viewfinder |
US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US4811210A (en) * | 1985-11-27 | 1989-03-07 | Texas Instruments Incorporated | A plurality of optical crossbar switches and exchange switches for parallel processor computer |
IT209019Z2 (en) * | 1986-01-24 | 1988-09-02 | Filiberti Antonio | BALL VALVE, IN PARTICULAR FOR GAS. |
US4744633A (en) * | 1986-02-18 | 1988-05-17 | Sheiman David M | Stereoscopic viewing system and glasses |
US4803560A (en) * | 1986-02-21 | 1989-02-07 | Casio Computer Co., Ltd. | Liquid-crystal television receiver with cassette tape recorder |
US4829365A (en) * | 1986-03-07 | 1989-05-09 | Dimension Technologies, Inc. | Autostereoscopic display with illuminating lines, light valve and mask |
US4856869A (en) * | 1986-04-08 | 1989-08-15 | Canon Kabushiki Kaisha | Display element and observation apparatus having the same |
GB2198867A (en) * | 1986-12-17 | 1988-06-22 | Philips Electronic Associated | A liquid crystal display illumination system |
US4807965A (en) * | 1987-05-26 | 1989-02-28 | Garakani Reza G | Apparatus for three-dimensional viewing |
US4814759A (en) * | 1987-07-08 | 1989-03-21 | Clinicom Incorporated | Flat panel display monitor apparatus |
US4859012A (en) * | 1987-08-14 | 1989-08-22 | Texas Instruments Incorporated | Optical interconnection networks |
US5072418A (en) | 1989-05-04 | 1991-12-10 | Texas Instruments Incorporated | Series maxium/minimum function computing devices, systems and methods |
US5142677A (en) | 1989-05-04 | 1992-08-25 | Texas Instruments Incorporated | Context switching devices, systems and methods |
US5155812A (en) | 1989-05-04 | 1992-10-13 | Texas Instruments Incorporated | Devices and method for generating and using systems, software waitstates on address boundaries in data processing |
US5024494A (en) | 1987-10-07 | 1991-06-18 | Texas Instruments Incorporated | Focussed light source pointer for three dimensional display |
HU197469B (en) | 1987-10-23 | 1989-03-28 | Laszlo Holakovszky | Spectacle like, wearable on head stereoscopic reproductor of the image |
US5155604A (en) | 1987-10-26 | 1992-10-13 | Van Leer Metallized Products (Usa) Limited | Coated paper sheet embossed with a diffraction or holographic pattern |
US4952925A (en) * | 1988-01-25 | 1990-08-28 | Bernd Haastert | Projectable passive liquid-crystal flat screen information centers |
US4956619A (en) * | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
EP0330738B1 (en) * | 1988-03-03 | 1991-11-13 | Landis & Gyr Betriebs AG | Document |
JPH01296214A (en) * | 1988-05-25 | 1989-11-29 | Canon Inc | Display device |
US4827391A (en) * | 1988-06-01 | 1989-05-02 | Texas Instruments Incorporated | Apparatus for implementing output voltage slope in current mode controlled power supplies |
JPH01306886A (en) | 1988-06-03 | 1989-12-11 | Canon Inc | Volume phase type diffraction grating |
JP2585717B2 (en) * | 1988-06-03 | 1997-02-26 | キヤノン株式会社 | Display device |
US4856863A (en) * | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US5058992A (en) | 1988-09-07 | 1991-10-22 | Toppan Printing Co., Ltd. | Method for producing a display with a diffraction grating pattern and a display produced by the method |
EP0360969B1 (en) | 1988-09-30 | 1993-12-15 | Landis & Gyr Business Support AG | Diffraction element |
US4915463A (en) * | 1988-10-18 | 1990-04-10 | The United States Of America As Represented By The Department Of Energy | Multilayer diffraction grating |
JPH07121097B2 (en) | 1988-11-18 | 1995-12-20 | 株式会社日立製作所 | Liquid crystal television and manufacturing method thereof |
US4982184A (en) * | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
US5287096A (en) | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
US5079544A (en) | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
US5214420A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
US5214419A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
US5206629A (en) | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
KR100202246B1 (en) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | Apparatus and method for digital video system |
US5192946A (en) | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
US5128660A (en) | 1989-02-27 | 1992-07-07 | Texas Instruments Incorporated | Pointer for three dimensional display |
US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
US4978202A (en) * | 1989-05-12 | 1990-12-18 | Goldstar Co., Ltd. | Laser scanning system for displaying a three-dimensional color image |
US5060058A (en) | 1989-06-07 | 1991-10-22 | U.S. Philips Corporation | Modulation system for projection display |
US5046827C1 (en) * | 1989-07-20 | 2001-08-07 | Honeywell Inc | Optical reconstruction filter for color mosaic displays |
US5022750A (en) * | 1989-08-11 | 1991-06-11 | Raf Electronics Corp. | Active matrix reflective projection system |
JPH0343682U (en) | 1989-09-06 | 1991-04-24 | ||
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
JP2508387B2 (en) | 1989-10-16 | 1996-06-19 | 凸版印刷株式会社 | Method of manufacturing display having diffraction grating pattern |
US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
US5101236A (en) | 1989-12-21 | 1992-03-31 | Texas Instruments Incorporated | Light energy control system and method of operation |
US5041851A (en) | 1989-12-21 | 1991-08-20 | Texas Instruments Incorporated | Spatial light modulator printer and method of operation |
US5072239A (en) | 1989-12-21 | 1991-12-10 | Texas Instruments Incorporated | Spatial light modulator exposure unit and method of operation |
US5142303A (en) | 1989-12-21 | 1992-08-25 | Texas Instruments Incorporated | Printing system exposure module optic structure and method of operation |
US5237340A (en) | 1989-12-21 | 1993-08-17 | Texas Instruments Incorporated | Replaceable elements for xerographic printing process and method of operation |
US5105369A (en) | 1989-12-21 | 1992-04-14 | Texas Instruments Incorporated | Printing system exposure module alignment method and apparatus of manufacture |
DE4001448C1 (en) | 1990-01-19 | 1991-07-11 | Mercedes-Benz Aktiengesellschaft, 7000 Stuttgart, De | |
JPH03217814A (en) | 1990-01-24 | 1991-09-25 | Canon Inc | Liquid crystal projector |
US5121231A (en) | 1990-04-06 | 1992-06-09 | University Of Southern California | Incoherent/coherent multiplexed holographic recording for photonic interconnections and holographic optical elements |
US5291473A (en) | 1990-06-06 | 1994-03-01 | Texas Instruments Incorporated | Optical storage media light beam positioning system |
US5502481A (en) | 1992-11-16 | 1996-03-26 | Reveo, Inc. | Desktop-based projection display system for stereoscopic viewing of displayed imagery over a wide field of view |
US5165013A (en) | 1990-09-26 | 1992-11-17 | Faris Sadeg M | 3-D stereo pen plotter |
JP2622185B2 (en) | 1990-06-28 | 1997-06-18 | シャープ株式会社 | Color liquid crystal display |
US5099353A (en) | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5018256A (en) * | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
DE69113150T2 (en) | 1990-06-29 | 1996-04-04 | Texas Instruments Inc | Deformable mirror device with updated grid. |
US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5291317A (en) | 1990-07-12 | 1994-03-01 | Applied Holographics Corporation | Holographic diffraction grating patterns and methods for creating the same |
US5121343A (en) | 1990-07-19 | 1992-06-09 | Faris Sadeg M | 3-D stereo computer output printer |
US5113285A (en) | 1990-09-28 | 1992-05-12 | Honeywell Inc. | Full color three-dimensional flat panel display |
US5148157A (en) | 1990-09-28 | 1992-09-15 | Texas Instruments Incorporated | Spatial light modulator with full complex light modulation capability |
US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
US5231363A (en) | 1990-11-26 | 1993-07-27 | Texas Instruments Incorporated | Pulse width modulating producing signals centered in each cycle interval |
US5181231A (en) | 1990-11-30 | 1993-01-19 | Texas Instruments, Incorporated | Non-volatile counting method and apparatus |
US5105207A (en) | 1990-12-31 | 1992-04-14 | Texas Instruments Incorporated | System and method for achieving gray scale DMD operation |
US5172161A (en) | 1990-12-31 | 1992-12-15 | Texas Instruments Incorporated | Unibody printing system and process |
US5105299A (en) | 1990-12-31 | 1992-04-14 | Texas Instruments Incorporated | Unfolded optics for multiple row deformable mirror device |
US5151718A (en) | 1990-12-31 | 1992-09-29 | Texas Instruments Incorporated | System and method for solid state illumination for dmd devices |
US5159485A (en) | 1990-12-31 | 1992-10-27 | Texas Instruments Incorporated | System and method for uniformity of illumination for tungsten light |
CA2060057C (en) | 1991-01-29 | 1997-12-16 | Susumu Takahashi | Display having diffraction grating pattern |
US5178728A (en) | 1991-03-28 | 1993-01-12 | Texas Instruments Incorporated | Integrated-optic waveguide devices and method |
CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
US5148506A (en) | 1991-04-26 | 1992-09-15 | Texas Instruments Incorporated | Optical crossbar switch |
US5170269A (en) | 1991-05-31 | 1992-12-08 | Texas Instruments Incorporated | Programmable optical interconnect system |
US5155778A (en) | 1991-06-28 | 1992-10-13 | Texas Instruments Incorporated | Optical switch using spatial light modulators |
US5221982A (en) | 1991-07-05 | 1993-06-22 | Faris Sadeg M | Polarizing wavelength separator |
US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
CA2075026A1 (en) | 1991-08-08 | 1993-02-09 | William E. Nelson | Method and apparatus for patterning an imaging member |
US5255100A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | Data formatter with orthogonal input/output and spatial reordering |
US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
US5307056A (en) | 1991-09-06 | 1994-04-26 | Texas Instruments Incorporated | Dynamic memory allocation for frame buffer for spatial light modulator |
US5245686A (en) | 1991-09-06 | 1993-09-14 | Faris Sadeg M | Method of fabricating an image plane translator device and apparatus incorporating such device |
CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
EP0841810B1 (en) | 1991-12-05 | 2000-06-21 | Texas Instruments Incorporated | Method to improve a video signal |
US5176274A (en) | 1991-12-13 | 1993-01-05 | Jenkins James H | Leg supported tray |
US5212555A (en) | 1991-12-17 | 1993-05-18 | Texas Instruments Incorporated | Image capture with spatial light modulator and single-cell photosensor |
US5231388A (en) | 1991-12-17 | 1993-07-27 | Texas Instruments Incorporated | Color display system using spatial light modulators |
US5247593A (en) | 1991-12-18 | 1993-09-21 | Texas Instruments Incorporated | Programmable optical crossbar switch |
US5311349A (en) | 1991-12-18 | 1994-05-10 | Texas Instruments Incorporated | Unfolded optics for multiple row spatial light modulators |
US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
US5202785A (en) | 1991-12-20 | 1993-04-13 | Texas Instruments Incorporated | Method and device for steering light |
CA2084923A1 (en) | 1991-12-20 | 1993-06-21 | Ronald E. Stafford | Slm spectrometer |
CA2085961A1 (en) | 1991-12-23 | 1993-06-24 | William E. Nelson | Method and apparatus for steering light |
US5247180A (en) | 1991-12-30 | 1993-09-21 | Texas Instruments Incorporated | Stereolithographic apparatus and method of use |
US5285407A (en) | 1991-12-31 | 1994-02-08 | Texas Instruments Incorporated | Memory circuit for spatial light modulator |
US5296950A (en) | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
US5504514A (en) | 1992-02-13 | 1996-04-02 | Texas Instruments Incorporated | System and method for solid state illumination for spatial light modulators |
JP3396890B2 (en) | 1992-02-21 | 2003-04-14 | 松下電器産業株式会社 | Hologram, optical head device and optical system using the same |
US5212582A (en) | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
DE69310974T2 (en) | 1992-03-25 | 1997-11-06 | Texas Instruments Inc | Built-in optical calibration system |
US5312513A (en) | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
US5319214A (en) | 1992-04-06 | 1994-06-07 | The United States Of America As Represented By The Secretary Of The Army | Infrared image projector utilizing a deformable mirror device spatial light modulator |
US5459592A (en) | 1992-04-24 | 1995-10-17 | Sharp Kabushiki Kaisha | Projection display system including a collimating tapered waveguide or lens with the normal to optical axis angle increasing toward the lens center |
WO1993022694A1 (en) * | 1992-04-28 | 1993-11-11 | Leland Stanford Junior University | Modulating a light beam |
US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
GB2267579A (en) | 1992-05-15 | 1993-12-08 | Sharp Kk | Optical device comprising facing lenticular or parallax screens of different pitch |
US5307185A (en) | 1992-05-19 | 1994-04-26 | Raychem Corporation | Liquid crystal projection display with complementary color dye added to longest wavelength imaging element |
US5347433A (en) | 1992-06-11 | 1994-09-13 | Sedlmayr Steven R | Collimated beam of light and systems and methods for implementation thereof |
US5315418A (en) | 1992-06-17 | 1994-05-24 | Xerox Corporation | Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path |
JP3329887B2 (en) | 1992-06-17 | 2002-09-30 | ゼロックス・コーポレーション | Two-path liquid crystal light valve color display |
US5486841A (en) | 1992-06-17 | 1996-01-23 | Sony Corporation | Glasses type display apparatus |
US5256869A (en) | 1992-06-30 | 1993-10-26 | Texas Instruments Incorporated | Free-space optical interconnection using deformable mirror device |
US5430524A (en) | 1992-07-22 | 1995-07-04 | Texas Instruments Incorporated | Unibody printing and copying system and process |
US5313479A (en) | 1992-07-29 | 1994-05-17 | Texas Instruments Incorporated | Speckle-free display system using coherent light |
US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
US5348619A (en) | 1992-09-03 | 1994-09-20 | Texas Instruments Incorporated | Metal selective polymer removal |
US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
GB9220412D0 (en) | 1992-09-28 | 1992-11-11 | Texas Instruments Holland | Transponder systems for automatic identification purposes |
US5285196A (en) | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
US5289172A (en) | 1992-10-23 | 1994-02-22 | Texas Instruments Incorporated | Method of mitigating the effects of a defective electromechanical pixel |
GB2272555A (en) | 1992-11-11 | 1994-05-18 | Sharp Kk | Stereoscopic display using a light modulator |
EP0599375B1 (en) | 1992-11-20 | 1999-03-03 | Ascom Tech Ag | Light modulator |
US5450088A (en) | 1992-11-25 | 1995-09-12 | Texas Instruments Deutschland Gmbh | Transponder arrangement |
US5410315A (en) | 1992-12-08 | 1995-04-25 | Texas Instruments Incorporated | Group-addressable transponder arrangement |
US5420655A (en) | 1992-12-16 | 1995-05-30 | North American Philips Corporation | Color projection system employing reflective display devices and prism illuminators |
JPH06260470A (en) | 1992-12-16 | 1994-09-16 | Texas Instr Inc <Ti> | Cleaning prepared of metal layer created on pattern |
US5357369A (en) | 1992-12-21 | 1994-10-18 | Geoffrey Pilling | Wide-field three-dimensional viewing system |
US5418584A (en) | 1992-12-31 | 1995-05-23 | Honeywell Inc. | Retroreflective array virtual image projection screen |
AU5306494A (en) | 1993-01-08 | 1994-07-14 | Richard A Vasichek | Magnetic keeper accessory for wrench sockets |
US5371543A (en) | 1993-03-03 | 1994-12-06 | Texas Instruments Incorporated | Monolithic color wheel |
US5293511A (en) | 1993-03-16 | 1994-03-08 | Texas Instruments Incorporated | Package for a semiconductor device |
US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
US5461410A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Gray scale printing using spatial light modulators |
US5435876A (en) | 1993-03-29 | 1995-07-25 | Texas Instruments Incorporated | Grid array masking tape process |
US5455602A (en) | 1993-03-29 | 1995-10-03 | Texas Instruments Incorporated | Combined modulation schemes for spatial light modulators |
US5451103A (en) | 1993-04-06 | 1995-09-19 | Sony Corporation | Projector system |
US5321450A (en) | 1993-05-11 | 1994-06-14 | Proxima Corporation | Low profile liquid crystal projector and method of using same |
KR970003007B1 (en) | 1993-05-21 | 1997-03-13 | 대우전자 주식회사 | Optical path regulating apparatus and the driving method |
US5445559A (en) | 1993-06-24 | 1995-08-29 | Texas Instruments Incorporated | Wafer-like processing after sawing DMDs |
US5453747A (en) | 1993-06-28 | 1995-09-26 | Texas Instruments Deutschland Gmbh | Transponder systems for automatic identification purposes |
US5491715A (en) | 1993-06-28 | 1996-02-13 | Texas Instruments Deutschland Gmbh | Automatic antenna tuning method and circuit |
US5345521A (en) | 1993-07-12 | 1994-09-06 | Texas Instrument Incorporated | Architecture for optical switch |
US5489952A (en) | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
US5461547A (en) | 1993-07-20 | 1995-10-24 | Precision Lamp, Inc. | Flat panel display lighting system |
US5510824A (en) | 1993-07-26 | 1996-04-23 | Texas Instruments, Inc. | Spatial light modulator array |
US5453778A (en) | 1993-07-30 | 1995-09-26 | Texas Instruments Incorporated | Method and apparatus for spatial modulation in the cross-process direction |
US5389182A (en) | 1993-08-02 | 1995-02-14 | Texas Instruments Incorporated | Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
US5459492A (en) | 1993-08-30 | 1995-10-17 | Texas Instruments Incorporated | Method and apparatus for printing stroke and contone data together |
US5485354A (en) | 1993-09-09 | 1996-01-16 | Precision Lamp, Inc. | Flat panel display lighting system |
US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
EP0657760A1 (en) | 1993-09-15 | 1995-06-14 | Texas Instruments Incorporated | Image simulation and projection system |
KR970003466B1 (en) | 1993-09-28 | 1997-03-18 | 대우전자 주식회사 | Manufacturing method of optical path regulating apparatus for projector |
US5347321A (en) | 1993-09-30 | 1994-09-13 | Texas Instruments Incorporated | Color separator for digital television |
US5367585A (en) | 1993-10-27 | 1994-11-22 | General Electric Company | Integrated microelectromechanical polymeric photonic switch |
US5497197A (en) | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
US5398071A (en) | 1993-11-02 | 1995-03-14 | Texas Instruments Incorporated | Film-to-video format detection for digital television |
CA2134370A1 (en) | 1993-11-04 | 1995-05-05 | Robert J. Gove | Video data formatter for a digital television system |
US5450219A (en) | 1993-11-17 | 1995-09-12 | Hughes Aircraft Company | Raster following telecentric illumination scanning system for enhancing light throughout in light valve projection systems |
US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
US5491510A (en) | 1993-12-03 | 1996-02-13 | Texas Instruments Incorporated | System and method for simultaneously viewing a scene and an obscured object |
US5442411A (en) | 1994-01-03 | 1995-08-15 | Texas Instruments Incorporated | Displaying video data on a spatial light modulator with line doubling |
US5499060A (en) | 1994-01-04 | 1996-03-12 | Texas Instruments Incorporated | System and method for processing video data |
US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
CA2139794C (en) | 1994-01-18 | 2006-11-07 | Robert John Gove | Frame pixel data generation |
US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
US5467106A (en) | 1994-02-10 | 1995-11-14 | Hughes-Avicom International, Inc. | Retractable face-up LCD monitor with off-monitor power supply and back-EMF braking |
US5412186A (en) | 1994-02-23 | 1995-05-02 | Texas Instruments Incorporated | Elimination of sticking of micro-mechanical devices |
US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
US5447600A (en) | 1994-03-21 | 1995-09-05 | Texas Instruments | Polymeric coatings for micromechanical devices |
US5467146A (en) | 1994-03-31 | 1995-11-14 | Texas Instruments Incorporated | Illumination control unit for display system with spatial light modulator |
US5459528A (en) | 1994-03-31 | 1995-10-17 | Texas Instruments Incorporated | Video signal processor and method for secondary images |
US5486698A (en) | 1994-04-19 | 1996-01-23 | Texas Instruments Incorporated | Thermal imaging system with integrated thermal chopper |
US5512374A (en) | 1994-05-09 | 1996-04-30 | Texas Instruments Incorporated | PFPE coatings for micro-mechanical devices |
US5442414A (en) | 1994-05-10 | 1995-08-15 | U. S. Philips Corporation | High contrast illumination system for video projector |
US5458716A (en) | 1994-05-25 | 1995-10-17 | Texas Instruments Incorporated | Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid |
US5497172A (en) | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
US5550604A (en) | 1994-06-03 | 1996-08-27 | Kopin Corporation | Compact high resolution light valve projector |
US5920418A (en) * | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
US5482564A (en) | 1994-06-21 | 1996-01-09 | Texas Instruments Incorporated | Method of unsticking components of micro-mechanical devices |
US5499062A (en) | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
US5523878A (en) | 1994-06-30 | 1996-06-04 | Texas Instruments Incorporated | Self-assembled monolayer coating for micro-mechanical devices |
US5504504A (en) | 1994-07-13 | 1996-04-02 | Texas Instruments Incorporated | Method of reducing the visual impact of defects present in a spatial light modulator display |
US5512748A (en) | 1994-07-26 | 1996-04-30 | Texas Instruments Incorporated | Thermal imaging system with a monolithic focal plane array and method |
US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
US5483307A (en) | 1994-09-29 | 1996-01-09 | Texas Instruments, Inc. | Wide field of view head-mounted display |
US5490009A (en) | 1994-10-31 | 1996-02-06 | Texas Instruments Incorporated | Enhanced resolution for digital micro-mirror displays |
US5519450A (en) | 1994-11-14 | 1996-05-21 | Texas Instruments Incorporated | Graphics subsystem for digital television |
US5516125A (en) | 1994-11-30 | 1996-05-14 | Texas Instruments Incorporated | Baffled collet for vacuum pick-up of a semiconductor die |
US5463347A (en) | 1994-12-12 | 1995-10-31 | Texas Instruments Incorporated | MOS uni-directional, differential voltage amplifier capable of amplifying signals having input common-mode voltage beneath voltage of lower supply and integrated circuit substrate |
US5524155A (en) | 1995-01-06 | 1996-06-04 | Texas Instruments Incorporated | Demultiplexer for wavelength-multiplexed optical signal |
US5517340A (en) | 1995-01-30 | 1996-05-14 | International Business Machines Corporation | High performance projection display with two light valves |
US5504614A (en) | 1995-01-31 | 1996-04-02 | Texas Instruments Incorporated | Method for fabricating a DMD spatial light modulator with a hardened hinge |
US5508750A (en) | 1995-02-03 | 1996-04-16 | Texas Instruments Incorporated | Encoding data converted from film format for progressive display |
US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
-
1996
- 1996-01-18 US US08/591,231 patent/US6219015B1/en not_active Expired - Lifetime
- 1996-04-26 US US08/638,605 patent/US5808797A/en not_active Expired - Lifetime
-
1997
- 1997-01-17 JP JP52625497A patent/JP4053598B2/en not_active Expired - Fee Related
- 1997-01-17 EP EP97904813A patent/EP0875010B1/en not_active Expired - Lifetime
- 1997-01-17 CA CA002243347A patent/CA2243347C/en not_active Expired - Fee Related
- 1997-01-17 AT AT97904813T patent/ATE217094T1/en not_active IP Right Cessation
- 1997-01-17 WO PCT/US1997/000854 patent/WO1997026569A2/en active IP Right Grant
- 1997-01-17 DE DE69712311T patent/DE69712311T2/en not_active Expired - Lifetime
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US6219015B1 (en) | 2001-04-17 |
DE69712311D1 (en) | 2002-06-06 |
WO1997026569A2 (en) | 1997-07-24 |
EP0875010B1 (en) | 2002-05-02 |
WO1997026569A3 (en) | 1997-10-09 |
EP0875010A2 (en) | 1998-11-04 |
ATE217094T1 (en) | 2002-05-15 |
JP2001518198A (en) | 2001-10-09 |
DE69712311T2 (en) | 2002-12-19 |
US5808797A (en) | 1998-09-15 |
CA2243347C (en) | 2005-05-10 |
JP4053598B2 (en) | 2008-02-27 |
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