CA2248386A1 - Liquid dispensing apparatus and method - Google Patents
Liquid dispensing apparatus and methodInfo
- Publication number
- CA2248386A1 CA2248386A1 CA002248386A CA2248386A CA2248386A1 CA 2248386 A1 CA2248386 A1 CA 2248386A1 CA 002248386 A CA002248386 A CA 002248386A CA 2248386 A CA2248386 A CA 2248386A CA 2248386 A1 CA2248386 A1 CA 2248386A1
- Authority
- CA
- Canada
- Prior art keywords
- pressure
- liquid
- point
- chamber
- return mode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D99/00—Subject matter not provided for in other groups of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
Abstract
A liquid dispensing method and apparatus in which liquid is dispensed from chambers, that can be pressure vessels, to a flow circuit. A valve network is designed such that when one chamber functions in a dispense mode of operation another chamber functions in a return mode of operation in which unused liquid is sent back to such chamber so that liquid is continually circulated. The chamber or vessel undergoing the return mode of operation is vented through a valve that is either a pressure regulation valve having a set point of pressure or a remotely activated control valve response to liquid pressure at the point of use. In such manner internal pressure within the chamber or pressure vessel undergoing the return mode of operation is regulated to in turn regulate liquid pressure at the point of use. In case of pressure vessel operation, gas pressure within each pressure vessel can also be regulated in conjunction with internal pressure during the return mode to in turn regulate liquid pressure at the point of use. As a result of such pressure regulation, constant flow rate of liquid through the flow circuit and at the point or points of use can be assured.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/950,150 US6019250A (en) | 1997-10-14 | 1997-10-14 | Liquid dispensing apparatus and method |
US08/950,150 | 1997-10-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2248386A1 true CA2248386A1 (en) | 1999-04-14 |
CA2248386C CA2248386C (en) | 2003-02-25 |
Family
ID=25490029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002248386A Expired - Fee Related CA2248386C (en) | 1997-10-14 | 1998-09-25 | Liquid dispensing apparatus and method |
Country Status (9)
Country | Link |
---|---|
US (1) | US6019250A (en) |
EP (1) | EP0909610B1 (en) |
JP (1) | JP4354551B2 (en) |
KR (1) | KR100274925B1 (en) |
CA (1) | CA2248386C (en) |
DE (1) | DE69826804T2 (en) |
IL (1) | IL126410A (en) |
SG (1) | SG70129A1 (en) |
TW (1) | TW396144B (en) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6616014B1 (en) * | 2000-02-25 | 2003-09-09 | The Boc Group, Inc. | Precision liquid mixing apparatus and method |
KR20010025249A (en) * | 2000-11-18 | 2001-04-06 | 김동관 | a quantitative mixing of a chemical and a removing system |
US6736154B2 (en) * | 2001-01-26 | 2004-05-18 | American Air Liquide, Inc. | Pressure vessel systems and methods for dispensing liquid chemical compositions |
KR100431714B1 (en) * | 2001-06-13 | 2004-05-17 | 플러스엔지니어링 주식회사 | Apparatus for controlling quantity of flow in the slurry supply system |
US6783429B2 (en) * | 2001-08-17 | 2004-08-31 | The Boc Group, Inc. | Apparatus and method for sampling a chemical-mechanical polishing slurry |
US20050224523A1 (en) * | 2004-04-13 | 2005-10-13 | Advanced Technology Materials, Inc. | Liquid dispensing method and system with headspace gas removal |
JP4763262B2 (en) * | 2004-10-15 | 2011-08-31 | 株式会社ディスコ | High-pressure liquid jet cutting device |
GB0501335D0 (en) * | 2005-01-21 | 2005-03-02 | Cryostar France Sa | Natural gas supply method and apparatus |
US7810516B2 (en) * | 2005-03-04 | 2010-10-12 | Air Liquide Electronics U.S. Lp | Control of fluid conditions in bulk fluid distribution systems |
CN101208258A (en) * | 2005-03-04 | 2008-06-25 | 波克爱德华兹股份有限公司 | Control of fluid conditions in bulk fluid distribution systems |
TWI286086B (en) * | 2005-04-11 | 2007-09-01 | Unaxis Int Trading Ltd | Method for operating a pneumatic device for the metered delivery of a liquid and pneumatic device |
US20070215639A1 (en) * | 2006-02-15 | 2007-09-20 | Roberts Benjamin R | Method and Apparatus for Dispensing Liquid with Precise Control |
US20070205214A1 (en) * | 2006-03-03 | 2007-09-06 | Roberts Benjamin R | Liquid dispense system |
WO2008141206A2 (en) * | 2007-05-09 | 2008-11-20 | Advanced Technology Materials, Inc. | Systems and methods for material blending and distribution |
TW200939335A (en) * | 2007-12-06 | 2009-09-16 | Advanced Tech Materials | Systems and methods for delivery of fluid-containing process material combinations |
US8997789B2 (en) * | 2008-06-22 | 2015-04-07 | Malema Engineering Corporation | Internal leak detection and backflow prevention in a flow control arrangement |
US9038855B2 (en) | 2009-06-10 | 2015-05-26 | Advanced Technology Materials, Inc. | Fluid processing systems and methods |
US9279419B2 (en) | 2013-01-16 | 2016-03-08 | Prochem Ulc | System and process for supplying a chemical agent to a process fluid |
US9770804B2 (en) | 2013-03-18 | 2017-09-26 | Versum Materials Us, Llc | Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
TWI517935B (en) * | 2013-04-16 | 2016-01-21 | 國立台灣科技大學 | Supplying system of adding gas into slurry and method thereof |
US11761582B2 (en) * | 2019-09-05 | 2023-09-19 | Dhf America, Llc | Pressure regulation system and method for a fluidic product having particles |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
US5417346A (en) * | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
US5485941A (en) * | 1994-06-30 | 1996-01-23 | Basf Corporation | Recirculation system and method for automated dosing apparatus |
JPH10503431A (en) * | 1994-07-19 | 1998-03-31 | アプライド ケミカル ソルーションズ インコーポレーティッド | Apparatus and method for use in chemical mechanical polishing processes |
-
1997
- 1997-10-14 US US08/950,150 patent/US6019250A/en not_active Expired - Lifetime
-
1998
- 1998-09-18 JP JP26510298A patent/JP4354551B2/en not_active Expired - Lifetime
- 1998-09-21 SG SG1998003781A patent/SG70129A1/en unknown
- 1998-09-25 CA CA002248386A patent/CA2248386C/en not_active Expired - Fee Related
- 1998-09-28 IL IL12641098A patent/IL126410A/en not_active IP Right Cessation
- 1998-10-02 TW TW087116408A patent/TW396144B/en not_active IP Right Cessation
- 1998-10-13 DE DE69826804T patent/DE69826804T2/en not_active Expired - Fee Related
- 1998-10-13 EP EP98308357A patent/EP0909610B1/en not_active Expired - Lifetime
- 1998-10-13 KR KR1019980042778A patent/KR100274925B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG70129A1 (en) | 2000-01-25 |
IL126410A (en) | 2001-01-11 |
US6019250A (en) | 2000-02-01 |
EP0909610A3 (en) | 2001-01-31 |
EP0909610A2 (en) | 1999-04-21 |
CA2248386C (en) | 2003-02-25 |
DE69826804T2 (en) | 2006-03-09 |
JPH11182800A (en) | 1999-07-06 |
KR100274925B1 (en) | 2000-12-15 |
TW396144B (en) | 2000-07-01 |
KR19990037056A (en) | 1999-05-25 |
IL126410A0 (en) | 1999-05-09 |
JP4354551B2 (en) | 2009-10-28 |
EP0909610B1 (en) | 2004-10-06 |
DE69826804D1 (en) | 2004-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |
Effective date: 20130925 |