CA2276401A1 - Micropump with a built-in intermediate part - Google Patents
Micropump with a built-in intermediate part Download PDFInfo
- Publication number
- CA2276401A1 CA2276401A1 CA002276401A CA2276401A CA2276401A1 CA 2276401 A1 CA2276401 A1 CA 2276401A1 CA 002276401 A CA002276401 A CA 002276401A CA 2276401 A CA2276401 A CA 2276401A CA 2276401 A1 CA2276401 A1 CA 2276401A1
- Authority
- CA
- Canada
- Prior art keywords
- plate
- micropump
- upper plate
- machining
- intermediate part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005086 pumping Methods 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000000737 periodic effect Effects 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 44
- 238000003754 machining Methods 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000003466 welding Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000005297 pyrex Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Abstract
A micropump including at least one main plate (1), at least one upper plate (2), and a middle plate (3) arranged between the other two plates (1, 2) and forming a pumping chamber (4) that is connected with at least one inlet of the micropump and at least one outlet of the micropump. The pumping chamber comprises a movable wall (5) machined into the middle plate (3); the upper plate is equipped with at least one opening (12) linking a cavity (8) with at least one portion of the movable wall (5). Actuation devices (6, 7, 13) attached to the free surface of the upper plate (2) are used to shift said movable wall (5) in order to bring about a periodic variation in the volume of the pumping chamber (4). According to the invention, the actuating devices (6, 7, 13) are formed by an actuating plate (7) of a material which can be machined so as to define a movable area (11) and said cavity (8). A intermediate part (13), formed from the upper plate (2), is fastened to the actuating plate so as to establish contact with the movable wall (5).
Description
MICROPUMP WITH A BUILT-IN INTERMEDIATE PART
The invention relates to a micropump and to its process of manufacture, this micropump comprising at least one base plate, at least one upper plate and an intermediate plate interposed between the other two plates and made of a material capable of being machined so as to define a pumping chamber, at least one fluid inlet control member for connecting the pumping chamber with at least one inlet of the micropump, and at least one fluid outlet control member for connecting the pumping chamber with at least one outlet of the micropump, the pumping chamber comprising a movable wall machined in the intermediate plate, said movable wall being capable of moving in two opposite directions during suction or delivery of said fluid in the pumping chamber, the upper plate being provided with at least one opening linking a cavity with at least one portion of the movable wall, actuation means fixed on the free face of the upper plate being provided to displace said movable wall in order to bring about a periodic variation of the volume of the pumping chamber.
In certain micropumps of the prior art, which are called "PIN-TYPE", one of the elements of the actuation means is constituted by an intermediate part which is intended to place the piezoelectric device in contact with the movable wall of the pumping chamber.
Manufacture of this intermediate part by micro-machining and its assembly in the micropump device require high precision in order to obtain a micropump which operates reliably and regularly.
Such a micropump is described for example in International Application WO
to the firm WESTONBRIDGE. Figure 1 shows one of the embodiments of the micropump described in the document mentioned above. This micropump comprises a base plate 82, an intermediate plate 86, an upper plate 88, actuation elements 87 intended to cooperate with the piezoelectric device 80 and an intermediate part 84 in the form of a drawing pin connected by its flat head to the actuation elements 87.
It will be understood that the use of such an intermediate part 84, necessary for correct operation of the micropump, brings about considerable complications when this micropump is manufactured.
The invention relates to a micropump and to its process of manufacture, this micropump comprising at least one base plate, at least one upper plate and an intermediate plate interposed between the other two plates and made of a material capable of being machined so as to define a pumping chamber, at least one fluid inlet control member for connecting the pumping chamber with at least one inlet of the micropump, and at least one fluid outlet control member for connecting the pumping chamber with at least one outlet of the micropump, the pumping chamber comprising a movable wall machined in the intermediate plate, said movable wall being capable of moving in two opposite directions during suction or delivery of said fluid in the pumping chamber, the upper plate being provided with at least one opening linking a cavity with at least one portion of the movable wall, actuation means fixed on the free face of the upper plate being provided to displace said movable wall in order to bring about a periodic variation of the volume of the pumping chamber.
In certain micropumps of the prior art, which are called "PIN-TYPE", one of the elements of the actuation means is constituted by an intermediate part which is intended to place the piezoelectric device in contact with the movable wall of the pumping chamber.
Manufacture of this intermediate part by micro-machining and its assembly in the micropump device require high precision in order to obtain a micropump which operates reliably and regularly.
Such a micropump is described for example in International Application WO
to the firm WESTONBRIDGE. Figure 1 shows one of the embodiments of the micropump described in the document mentioned above. This micropump comprises a base plate 82, an intermediate plate 86, an upper plate 88, actuation elements 87 intended to cooperate with the piezoelectric device 80 and an intermediate part 84 in the form of a drawing pin connected by its flat head to the actuation elements 87.
It will be understood that the use of such an intermediate part 84, necessary for correct operation of the micropump, brings about considerable complications when this micropump is manufactured.
The object of the present invention is to provide a micropump presenting an intermediate part whose manufacture is simplified while making it possible to obtain a micropump functioning reliably and constantly.
In accordance with the invention, this object is attained thanks to the fact that the actuation means are formed by an actuating plate constituted by a material capable of being machined so as to define a movable area and said cavity, an intermediate part obtained from the upper plate being fixed on the actuating plate so as to establish contact with the movable wall.
It will be understood that manufacture of the intermediate part from the upper plate avoids manufacturing the intermediate part independently of all the other elements of the micropump, with the result that this intermediate part is perfectly integrated in the micropump, as will be explained hereinbelow.
The invention will be more readily understood and secondary characteristics and their advantages will appear in the course of the description of two embodiments given hereinafter by way of example.
Reference will be made to the accompanying drawings, in which:
Figure l, described hereinabove, shows a micropump of the prior art in section.
Figure 2 schematically and partially shows, in section, a first embodiment of the micropump according to the invention.
Figure 3 is a Figure similar to Figure 2, showing a second embodiment of the micropump according to the invention.
Figures 4A to 4D show certain steps of manufacturing a micropump in accordance with a preferential process of manufacture, and Figures SA to SF show the different steps of the process of manufacture of a micropump according to the invention.
The partial and schematic sections of the two preferred embodiments of a micropump illustrated in Figures 1 and 2 show solely the central part of a micropump as is defined by zone A of Figure 1.
With reference to Figure 2, the central part of this micropump comprises a base plate 1 and an upper plate 2 which are preferably made of glass such as Pyrex. Between these two plates 1 and 2, is interposed the intermediate plate 3 which defines, with the base plate 1, the pumping chamber 4. The central portion of the intermediate plate 3 constitutes a mobile wall 5 intended to allow the variation of the volume of the pumping chamber 4 under the action of a piezoelectric device 6 surmounting the micropump.
An actuating plate 7 is interposed and fixed between the piezoelectric device 6 and the upper plate 2, creating a cavity 8 between the actuating plate 7 and the upper plate 2.
A free face 9 of the upper plate 2 is fixed, preferably by anodic welding, to a portion of the actuating plate 7, on either side of the cavity 8. On the side opposite the cavity 8, the free face 10 of the actuating plate 7 is connected to the piezoelectric device, in line with the central part of the cavity 8. Between the piezoelectric device 6 and the central portion of the cavity 8, the central portion of the actuating plate 7 constitutes a movable area 11.
The cavity 8 extends at the level of the upper plate 2 by an annular linking opening 12 surrounding an intermediate part 13 made from the same original piece as the upper plate 2.
The cavity 8 also presents an annular shape and surrounds a portion of movable area 11 fixed to the intermediate part 13. On the periphery of the linking opening 12, the upper plate 2 is in simple contact, without fixation, with the movable wall 5 (area 16 forming stop) so as to block any movement of the movable wall 5 beyond this zone of contact. Such fixation is preferably avoided thanks to an insulating layer covering the area 16 forming stop of the upper plate 2, this layer being , for example, made of silicon oxide.
An annular intermediate cavity 14 between the upper plate 2 and the intermediate plate 3 is also distinguished, this intermediate cavity issuing from the removal of material of the intermediate plate 3, located in line with a portion of the cavity 8, on the other side of the upper plate 2, and placed outside with respect to the linking opening 12.
In the same way as the area 16 forming stop limits the ascending movement of the movable wall 5, stops 17, fixed on the face of the movable wall 5 located opposite the pumping chamber 4, limit the descending movement of the movable wall 5.
It should be noted that the upper plate 2 and the intermediate plate 3 are fixed to each other, preferably by anodic welding, in the contact areas located outside with respect to the intermediate cavity 14. The intermediate (3) and actuating (7) plates are preferably constituted by a semi-conductor such as silicon.
The actuating means, composed in particular of the piezoelectric device 6, the intermediate part 13 and the movable wall 5 are preferably centred around the same axis.
As the intermediate part 13 and the upper plate 2 come from the same initial plate, it will be understood that manufacture of the micropump device is considerably simplified, that the problems of tolerance and compatibility between the different elements constituting this micropump are considerbly minimized, and even eliminated. In effect, the thickness of the intermediate part 13 being forcibly identical to the thickness of the upper plate 2, during assembly, adjustment between the parts of the micropump device is then possible with a high degree of precision.
The first preferred embodiment illustrated in Figure 2 provides that the intermediate plate 3 and the actuating plate 7 delimit a tight space, composed of the cavity 8, the linking opening 12 and the intermediate cavity 14, a partial vacuum being able to be established within this tight space.
Tightness of the above-mentioned space is rendered possible by the very high precision adjustment between the parts composing the micropump (movable area 11 of the actuating plate 7, upper plate 2, intermediate part 13, and movable wall 5). The strictly identical nature between the thickness of the intermediate part 13 and the upper plate 2 is a very important characteristic for obtaining a good adjustment between the parts, this allowing the tightness of the space mentioned above.
According to an advantageous characteristic, the presence of a partial vacuum in the tight space 8, 12, 14 makes it possible to draw the movable wall 5 of the pumping chamber 4 in the direction of the upper plate 2.
If a partial vacuum is established in the tight space 8, 12, 14, it is preferable not to fasten the intermediate part 13 to the movable wall 5 in order not to create residual stresses at the level of such fixation.
According to a second preferred embodiment shown in Figure 3, the tight space 8, 12, 5 14 cannot be placed under partial vacuum but a conduit 15 connects this tight space to the outside of the micropump. This conduit 15 is preferably made in the upper part of the actuating plate 7 and communicates with the cavity 8, connecting the latter with the outside of the part of the micropump shown in Figure 3, so that the space defined hereinabove presents a pressure equal to that of the outer space in which the conduit 15 opens out, this pressure being able to be atmospheric pressure.
Where a conduit 15 connecting the tight space 8, 12, 14 with the outside of the pump is provided, if it is desired to draw the movable wall 5 in the direction of the piezoelectric device 6, it is necessary to fasten the intermediate part 13 to the movable wall 5, such fixation being able to be effected by anodic welding.
Three preferred processes for manufacturing a micropump according to the invention as has been described hereinbefore will now be presented.
Whatever the process of manufacture among the three processes which will be presented, it is firstly necessary to furnish an actuating plate 7, an upper plate 2, an actuation device and an intermediate plate 3/base plate 1 assembly in which the intermediate plate 3 is fixed to the base plate 1, a pumping chamber 4 being formed between these two plates, for example by prior machining of the intermediate plate 3.
In accordance with a first process of manufacturing a micropump according to the invention, the following steps are carried out:
a) machining of the actuating plate 7 so as to create the cavity 8, b) fastening of the actuating plate 7 to the upper plate 2, c) machining of the upper plate 2 so as to create the linking opening 12 and the intermediate part 13, d) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, and e) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
A solution favourable so much to the technique of manufacture provides, in the case of the first process of manufacture, that the machining of the linking opening 12 is obtained by electro-erosive machining or EDM (Electro Discharge Machining) process, by ultrasonic machining or UD (Ultrasonic Drilling) process or by chemical attack of the glass.
According to a second process of manufacturing a micropump, it is possible, by machining the linking opening 12 and the intermediate part 13 in two steps, to obtain a better precision on the sizes of the different elements of the micropump in order that the functioning thereof is more reliable.
In accordance with this second process of manufacture, the following steps are carried out:
a) machining of the actuating plate 7 so as to create the cavity 8, b) machining of the upper plate 2 so as to partially create the linking opening 12 and the intermediate part 13, c) fastening of the actuating plate 7 to the upper plate 2, d) machining of the upper plate 2 so as to terminate creation of the linking opening 12 and the intermediate part 13, e) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, and f) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
Here it is advantageously possible that the partial machining of the upper plate 2 is effected by electro-erosive machining (EDM) process or by ultrasonic machining (UD) process.
Furthermore, it is possible that the creation of the linking opening 12 and the intermediate part 13 be terminated by chemical attack of the upper plate 2.
On the other hand, as is illustrated in Figures 4A to 4D, within the framework of the second process for manufacturing the micropump, it is possible to deposit one or more metal layers on a face of the upper plate 2 before starting the creation of the linking opening 12 and of the intermediate part 13 (step b) by machining this face. In fact, the metal layer or layers S may be located on one or the other of the two faces of the upper plate 2: on the face undergoing the partial creation of the opening 12 and the part 13 or on the machined face when the creation of this opening is terminated but in any case said metal layer or layers are on the side opposite the actuating plate 7.
As illustrated in Figure 4A, a layer of chromium Za, followed by a layer of copper 2b, are deposited on the upper plate 2. Then (Figure 4B), the upper plate 2 is machined so as to partially create the linking opening 12 of the intermediate part 13, such partial machining not bearing on the whole thickness of the upper plate 2. As is seen in Figure 4C
which corresponds to step c) of the second process of manufacture, the actuating plate 7, already machined and presenting cavity 8, is fixed to the upper plate 2, for example by anodic welding on the side opposite that bearing the metal layers. Figure 4D illustrates step d) of the second process of manufacture and shows that an additional machining of the upper plate 2 makes it possible to terminate the creation of the annular linking opening 12 surrounding the intermediate part 13, with the result that the linking opening 12 communicates with the cavity 8 and the intermediate part 13 is fast with the actuating plate 7 at the level of the central area of the movable area 11.
A third process for manufacturing a micropump making it possible to minimize the tolerances of thickness, particularly at the level of the upper plate 2 and the intermediate part 13, will now be presented in relation with Figures SA to SF.
According to this third process of manufacture, the following steps are carried out:
a) deposit of a holding layer 18 on a face of the upper plate 2 (Figure SB), b) machining of the upper plate 2 on the face opposite the face in contact with the holding layer 18 so as to create the linking opening 12 and the intermediate part 13, the g holding layer 18 also being able be be machined (Figure SC), but only partially, c) fastening of the actuating plate 7 on the face of the upper plate 2 which is opposite the face in contact with the holding layer 18 (Figure SD), d) removal of the holding layer 18 (Figure SE), e) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly (Figure SF), f) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
In this third process of manufacture, the holding layer 18 makes it possible to produce the linking opening 12 and the intermediate part 3 by machining in one single step, while allowing the upper plate 2 and the intermediate part 13 to remain quite aligned during the process of manufacture.
The holding layer is preferably a polymer or a metal and the plates constituting the micropump device are fixed together, as the case may be, by anodic welding.
The three processes of manufacture which have just been described are suitable for producing the first or the second embodiment of the micropump as shown in Figures 2 and 3.
In the case of the first embodiment of micropump shown in Figure 2, in addition to the process steps mentioned above, a partial vacuum is preferably, but not necessarily, established within the tight space constituted by the cavity 8, the linking opening 12 and the intermediate cavity 14.
In the case of the second embodiment shown in Figure 3, in addition to the process steps mentioned above, a conduit 15 is machined, linking the tight space formed by the cavity 8, the linking opening 12 and the intermediate cavity 14, this space being defined by the intermediate plate 3 and the actuating plate 7, to the outside of the micropump. Preferably, during fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, the intermediate part 13 is fixed on the movable wall 5, for example by anodic welding.
In accordance with the invention, this object is attained thanks to the fact that the actuation means are formed by an actuating plate constituted by a material capable of being machined so as to define a movable area and said cavity, an intermediate part obtained from the upper plate being fixed on the actuating plate so as to establish contact with the movable wall.
It will be understood that manufacture of the intermediate part from the upper plate avoids manufacturing the intermediate part independently of all the other elements of the micropump, with the result that this intermediate part is perfectly integrated in the micropump, as will be explained hereinbelow.
The invention will be more readily understood and secondary characteristics and their advantages will appear in the course of the description of two embodiments given hereinafter by way of example.
Reference will be made to the accompanying drawings, in which:
Figure l, described hereinabove, shows a micropump of the prior art in section.
Figure 2 schematically and partially shows, in section, a first embodiment of the micropump according to the invention.
Figure 3 is a Figure similar to Figure 2, showing a second embodiment of the micropump according to the invention.
Figures 4A to 4D show certain steps of manufacturing a micropump in accordance with a preferential process of manufacture, and Figures SA to SF show the different steps of the process of manufacture of a micropump according to the invention.
The partial and schematic sections of the two preferred embodiments of a micropump illustrated in Figures 1 and 2 show solely the central part of a micropump as is defined by zone A of Figure 1.
With reference to Figure 2, the central part of this micropump comprises a base plate 1 and an upper plate 2 which are preferably made of glass such as Pyrex. Between these two plates 1 and 2, is interposed the intermediate plate 3 which defines, with the base plate 1, the pumping chamber 4. The central portion of the intermediate plate 3 constitutes a mobile wall 5 intended to allow the variation of the volume of the pumping chamber 4 under the action of a piezoelectric device 6 surmounting the micropump.
An actuating plate 7 is interposed and fixed between the piezoelectric device 6 and the upper plate 2, creating a cavity 8 between the actuating plate 7 and the upper plate 2.
A free face 9 of the upper plate 2 is fixed, preferably by anodic welding, to a portion of the actuating plate 7, on either side of the cavity 8. On the side opposite the cavity 8, the free face 10 of the actuating plate 7 is connected to the piezoelectric device, in line with the central part of the cavity 8. Between the piezoelectric device 6 and the central portion of the cavity 8, the central portion of the actuating plate 7 constitutes a movable area 11.
The cavity 8 extends at the level of the upper plate 2 by an annular linking opening 12 surrounding an intermediate part 13 made from the same original piece as the upper plate 2.
The cavity 8 also presents an annular shape and surrounds a portion of movable area 11 fixed to the intermediate part 13. On the periphery of the linking opening 12, the upper plate 2 is in simple contact, without fixation, with the movable wall 5 (area 16 forming stop) so as to block any movement of the movable wall 5 beyond this zone of contact. Such fixation is preferably avoided thanks to an insulating layer covering the area 16 forming stop of the upper plate 2, this layer being , for example, made of silicon oxide.
An annular intermediate cavity 14 between the upper plate 2 and the intermediate plate 3 is also distinguished, this intermediate cavity issuing from the removal of material of the intermediate plate 3, located in line with a portion of the cavity 8, on the other side of the upper plate 2, and placed outside with respect to the linking opening 12.
In the same way as the area 16 forming stop limits the ascending movement of the movable wall 5, stops 17, fixed on the face of the movable wall 5 located opposite the pumping chamber 4, limit the descending movement of the movable wall 5.
It should be noted that the upper plate 2 and the intermediate plate 3 are fixed to each other, preferably by anodic welding, in the contact areas located outside with respect to the intermediate cavity 14. The intermediate (3) and actuating (7) plates are preferably constituted by a semi-conductor such as silicon.
The actuating means, composed in particular of the piezoelectric device 6, the intermediate part 13 and the movable wall 5 are preferably centred around the same axis.
As the intermediate part 13 and the upper plate 2 come from the same initial plate, it will be understood that manufacture of the micropump device is considerably simplified, that the problems of tolerance and compatibility between the different elements constituting this micropump are considerbly minimized, and even eliminated. In effect, the thickness of the intermediate part 13 being forcibly identical to the thickness of the upper plate 2, during assembly, adjustment between the parts of the micropump device is then possible with a high degree of precision.
The first preferred embodiment illustrated in Figure 2 provides that the intermediate plate 3 and the actuating plate 7 delimit a tight space, composed of the cavity 8, the linking opening 12 and the intermediate cavity 14, a partial vacuum being able to be established within this tight space.
Tightness of the above-mentioned space is rendered possible by the very high precision adjustment between the parts composing the micropump (movable area 11 of the actuating plate 7, upper plate 2, intermediate part 13, and movable wall 5). The strictly identical nature between the thickness of the intermediate part 13 and the upper plate 2 is a very important characteristic for obtaining a good adjustment between the parts, this allowing the tightness of the space mentioned above.
According to an advantageous characteristic, the presence of a partial vacuum in the tight space 8, 12, 14 makes it possible to draw the movable wall 5 of the pumping chamber 4 in the direction of the upper plate 2.
If a partial vacuum is established in the tight space 8, 12, 14, it is preferable not to fasten the intermediate part 13 to the movable wall 5 in order not to create residual stresses at the level of such fixation.
According to a second preferred embodiment shown in Figure 3, the tight space 8, 12, 5 14 cannot be placed under partial vacuum but a conduit 15 connects this tight space to the outside of the micropump. This conduit 15 is preferably made in the upper part of the actuating plate 7 and communicates with the cavity 8, connecting the latter with the outside of the part of the micropump shown in Figure 3, so that the space defined hereinabove presents a pressure equal to that of the outer space in which the conduit 15 opens out, this pressure being able to be atmospheric pressure.
Where a conduit 15 connecting the tight space 8, 12, 14 with the outside of the pump is provided, if it is desired to draw the movable wall 5 in the direction of the piezoelectric device 6, it is necessary to fasten the intermediate part 13 to the movable wall 5, such fixation being able to be effected by anodic welding.
Three preferred processes for manufacturing a micropump according to the invention as has been described hereinbefore will now be presented.
Whatever the process of manufacture among the three processes which will be presented, it is firstly necessary to furnish an actuating plate 7, an upper plate 2, an actuation device and an intermediate plate 3/base plate 1 assembly in which the intermediate plate 3 is fixed to the base plate 1, a pumping chamber 4 being formed between these two plates, for example by prior machining of the intermediate plate 3.
In accordance with a first process of manufacturing a micropump according to the invention, the following steps are carried out:
a) machining of the actuating plate 7 so as to create the cavity 8, b) fastening of the actuating plate 7 to the upper plate 2, c) machining of the upper plate 2 so as to create the linking opening 12 and the intermediate part 13, d) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, and e) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
A solution favourable so much to the technique of manufacture provides, in the case of the first process of manufacture, that the machining of the linking opening 12 is obtained by electro-erosive machining or EDM (Electro Discharge Machining) process, by ultrasonic machining or UD (Ultrasonic Drilling) process or by chemical attack of the glass.
According to a second process of manufacturing a micropump, it is possible, by machining the linking opening 12 and the intermediate part 13 in two steps, to obtain a better precision on the sizes of the different elements of the micropump in order that the functioning thereof is more reliable.
In accordance with this second process of manufacture, the following steps are carried out:
a) machining of the actuating plate 7 so as to create the cavity 8, b) machining of the upper plate 2 so as to partially create the linking opening 12 and the intermediate part 13, c) fastening of the actuating plate 7 to the upper plate 2, d) machining of the upper plate 2 so as to terminate creation of the linking opening 12 and the intermediate part 13, e) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, and f) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
Here it is advantageously possible that the partial machining of the upper plate 2 is effected by electro-erosive machining (EDM) process or by ultrasonic machining (UD) process.
Furthermore, it is possible that the creation of the linking opening 12 and the intermediate part 13 be terminated by chemical attack of the upper plate 2.
On the other hand, as is illustrated in Figures 4A to 4D, within the framework of the second process for manufacturing the micropump, it is possible to deposit one or more metal layers on a face of the upper plate 2 before starting the creation of the linking opening 12 and of the intermediate part 13 (step b) by machining this face. In fact, the metal layer or layers S may be located on one or the other of the two faces of the upper plate 2: on the face undergoing the partial creation of the opening 12 and the part 13 or on the machined face when the creation of this opening is terminated but in any case said metal layer or layers are on the side opposite the actuating plate 7.
As illustrated in Figure 4A, a layer of chromium Za, followed by a layer of copper 2b, are deposited on the upper plate 2. Then (Figure 4B), the upper plate 2 is machined so as to partially create the linking opening 12 of the intermediate part 13, such partial machining not bearing on the whole thickness of the upper plate 2. As is seen in Figure 4C
which corresponds to step c) of the second process of manufacture, the actuating plate 7, already machined and presenting cavity 8, is fixed to the upper plate 2, for example by anodic welding on the side opposite that bearing the metal layers. Figure 4D illustrates step d) of the second process of manufacture and shows that an additional machining of the upper plate 2 makes it possible to terminate the creation of the annular linking opening 12 surrounding the intermediate part 13, with the result that the linking opening 12 communicates with the cavity 8 and the intermediate part 13 is fast with the actuating plate 7 at the level of the central area of the movable area 11.
A third process for manufacturing a micropump making it possible to minimize the tolerances of thickness, particularly at the level of the upper plate 2 and the intermediate part 13, will now be presented in relation with Figures SA to SF.
According to this third process of manufacture, the following steps are carried out:
a) deposit of a holding layer 18 on a face of the upper plate 2 (Figure SB), b) machining of the upper plate 2 on the face opposite the face in contact with the holding layer 18 so as to create the linking opening 12 and the intermediate part 13, the g holding layer 18 also being able be be machined (Figure SC), but only partially, c) fastening of the actuating plate 7 on the face of the upper plate 2 which is opposite the face in contact with the holding layer 18 (Figure SD), d) removal of the holding layer 18 (Figure SE), e) fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly (Figure SF), f) fastening of an actuation device, such as a piezoelectric one 6, to the actuating plate 7.
In this third process of manufacture, the holding layer 18 makes it possible to produce the linking opening 12 and the intermediate part 3 by machining in one single step, while allowing the upper plate 2 and the intermediate part 13 to remain quite aligned during the process of manufacture.
The holding layer is preferably a polymer or a metal and the plates constituting the micropump device are fixed together, as the case may be, by anodic welding.
The three processes of manufacture which have just been described are suitable for producing the first or the second embodiment of the micropump as shown in Figures 2 and 3.
In the case of the first embodiment of micropump shown in Figure 2, in addition to the process steps mentioned above, a partial vacuum is preferably, but not necessarily, established within the tight space constituted by the cavity 8, the linking opening 12 and the intermediate cavity 14.
In the case of the second embodiment shown in Figure 3, in addition to the process steps mentioned above, a conduit 15 is machined, linking the tight space formed by the cavity 8, the linking opening 12 and the intermediate cavity 14, this space being defined by the intermediate plate 3 and the actuating plate 7, to the outside of the micropump. Preferably, during fastening of the upper plate 2/actuating plate 7 assembly to the intermediate plate 3/base plate 1 assembly, the intermediate part 13 is fixed on the movable wall 5, for example by anodic welding.
Claims (25)
1. Micropump comprising at least one base plate (1), at least one upper plate (2) and an intermediate plate (3) interposed between the other two plates (1, 2) and made of a material machinable so as to define a pumping chamber (4), at least one fluid inlet control member for connecting the pumping chamber (4) with at least one inlet of the micropump, and at least one fluid outlet control member for connecting the pumping chamber (4) with at least one outlet of the micropump, the pumping chamber comprising a movable wall (5) machined in the intermediate plate (3), said movable wall (5) being adapted to move in two opposite directions during suction or delivery of said fluid in the pumping chamber (4), the upper plate being provided with at least one opening (12) linking a cavity (8) with at least one portion of the movable wall (5), actuation means (6, 7, 13) fixed on the free face (9) of the upper plate (2) being provided to displace said movable wall (5) in order to bring about a periodic variation of the volume of the pumping chamber (4), characterized in that the actuation means (6, 7, 13) are formed by an actuating plate (7) constituted by a material machinable so as to define a movable area (11) and said cavity (8); an intermediate part (13) machined in the upper plate (2) being fixed on the actuating plate (7) so as to establish contact with the movable wall (5).
2. Micropump according to Claim 1, characterized in that the intermediate part (13) is fixed to the mobile wall (5).
3. Micropump according to Claim 1, characterized in that the intermediate plate (3) and the actuating plate (7) define a tight space (8, 12, 14).
4. Micropump according to Claim 3, characterized in that a partial vacuum is established within the tight space (8, 12, 14).
5. Micropump according to Claim 2, characterized in that a conduit (15) links the tight space (8, 12, 14) with the outside of the micropump.
6. Micropump according to any one of the preceding Claims, characterized in that means (16, 17) limit the displacement of the movable wall (5).
7. Micropump according to any one of the preceding Claims, characterized in that the actuation means (6, 7, 13) are composed in particular of a piezoelectric device (6).
8. Micropump according to any one of the preceding Claims, characterized in that the ease (1) and upper (2) plates are constituted of glass such as pyrex.
9. Micropump according to any one of the preceding Claims, characterized in that the intermdiate (3) and actuating (7) plates are constituted of a metal such as silicon.
10. Micropump according to any one of the preceding Claims, characterized in that the actuation means (6), the intermediate part (13) and the movable wall (5) are centered about the same axis.
11. Process for manufacturing a micropump as described in Claim 1, characterized in that the following steps are carried out:
a) machining of the actuating plate (7) so as to create the cavity (8), b) fastening of the actuating plate (7) to the upper plate (2), c) machining of the upper plate (2) so as to create the linking opening (12) and the intermediate part (13), d) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, and e) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
a) machining of the actuating plate (7) so as to create the cavity (8), b) fastening of the actuating plate (7) to the upper plate (2), c) machining of the upper plate (2) so as to create the linking opening (12) and the intermediate part (13), d) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, and e) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
12. Process according to Claim 11, characterized in that the machining of the linking opening (12) is obtained by electro-erosive machining or EDM (Electro Discharge Machining) process, by ultrasonic machining or UD (Ultrasonic Drilling) process or by chemical attack of the glass.
13. Process for manufacturing a micropump as described in Claim 1, characterized in that the following steps are carried out:
a) machining of the actuating plate (7) so as to create the cavity (8), b) machining of the upper plate (2) so as to partially create the linking opening (12) and the intermediate part (13), c) fastening of the actuating plate (7) to the upper plate (2), d) machining of the upper plate (2) so as to terminate creation of the linking opening (12) and the intermediate part (13), e) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, and f) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
a) machining of the actuating plate (7) so as to create the cavity (8), b) machining of the upper plate (2) so as to partially create the linking opening (12) and the intermediate part (13), c) fastening of the actuating plate (7) to the upper plate (2), d) machining of the upper plate (2) so as to terminate creation of the linking opening (12) and the intermediate part (13), e) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, and f) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
14. Process according to Claim 13, characterized in that the machining of the linking opening (2) is obtained by electro-erosive machining or EDM (Electro Discharge Machining) process, by ultrasonic machining or UD (Ultrasonic Drilling) process.
15. Process according to Claim 13 or 14, characterized in that the termination of the creation of the linking opening (12) and of the intermediate part (13) is made by chemical attack of the upper plate (2).
16. Process according to Claim 13, characterized in that one or more metal layers (2a, 2b) are deposited on a face of the upper plate (2) before starting the creation of the linking opening (12) and of the intermediate part (13), the metal layer or layers being removed after having created the linking opening (12) and the intermediate part (13).
17. Process according to Claim 16, characterized in that the metal layer or layers are deposited on the face of the upper plate (2) undergoing the partial creation of the linking opening (12) and of the intermediate part (13).
18. Process according to Claim 16, characterized in that the metal layer or layers are deposited on the face of the upper plate (2) machined during termination of the creation of the linking opening (12) and of the intermediate part (13).
19. Process according to any one of Claims 16 to 18, characterized in that a layer of chromium (2a) followed by a layer of copper (2b) are deposited.
20. Process for manufacturing a micropump as described in Claim 1, characterized in that the following steps are carried out:
a) deposit of a holding layer (18) on a face of the upper plate (2), b) machining of the upper plate (2) on the face opposite the face in contact with the holding layer (18) so as to create the linking opening (12) and the intermediate part (13), the holding layer (18) also being able be be machined, but only partially, c) fastening of the actuating plate (7) on the face of the upper plate (2) which is opposite the face in contact with the holding layer (18), d) removal of the holding layer (18), e) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, f) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
a) deposit of a holding layer (18) on a face of the upper plate (2), b) machining of the upper plate (2) on the face opposite the face in contact with the holding layer (18) so as to create the linking opening (12) and the intermediate part (13), the holding layer (18) also being able be be machined, but only partially, c) fastening of the actuating plate (7) on the face of the upper plate (2) which is opposite the face in contact with the holding layer (18), d) removal of the holding layer (18), e) fastening of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, f) fastening of an actuation device, such as a piezoelectric one (6), to the actuating plate (7).
21. Process according to Claim 18, characterized in that the holding layer (18) is a polymer or a metal.
22. Process according to any one of Claims 11 to 19, characterized in that the plates are fixed by anodic welding.
23. Process according to any one of Claims 11 to 20, characterized in that, during fixation of the upper plate (2)/actuating plate (7) assembly to the intermediate plate (3)/base plate (1) assembly, the intermediate part (13) is fixed on the movable wall (5).
24. Process according to Claim 21, characterized in that a conduit (15) is machined, linking the tight space (8, 12, 14) defined by the intermediate plate (3) and the actuating plate (7) with the outside of the micropump.
25. Process according to any one of Claims 11 to 22, characterized in that a partial vacuum is established within the tight space (8, 12, 14).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9616278A FR2757906A1 (en) | 1996-12-31 | 1996-12-31 | MICROPUMP WITH INTEGRATED INTERMEDIATE PART |
| FR96/16278 | 1996-12-31 | ||
| PCT/EP1997/007278 WO1998029661A1 (en) | 1996-12-31 | 1997-12-19 | Micropump with a built-in intermediate part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2276401A1 true CA2276401A1 (en) | 1998-07-09 |
Family
ID=9499354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002276401A Abandoned CA2276401A1 (en) | 1996-12-31 | 1997-12-19 | Micropump with a built-in intermediate part |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6309189B1 (en) |
| EP (1) | EP0951617B1 (en) |
| JP (1) | JP2001507425A (en) |
| CN (1) | CN1245547A (en) |
| AU (1) | AU5955798A (en) |
| CA (1) | CA2276401A1 (en) |
| DE (1) | DE69718820T2 (en) |
| ES (1) | ES2189994T3 (en) |
| FR (1) | FR2757906A1 (en) |
| WO (1) | WO1998029661A1 (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000314381A (en) * | 1999-03-03 | 2000-11-14 | Ngk Insulators Ltd | Pump |
| GB2352283A (en) * | 1999-06-28 | 2001-01-24 | California Inst Of Techn | Microfabricated valves, pumps, mirror array and refracting structure |
| US6629820B2 (en) * | 2001-06-26 | 2003-10-07 | Micralyne Inc. | Microfluidic flow control device |
| GB0123054D0 (en) * | 2001-09-25 | 2001-11-14 | Randox Lab Ltd | Passive microvalve |
| US6736796B2 (en) | 2001-11-26 | 2004-05-18 | Nili-Med Ltd. | Fluid drug delivery device |
| US7291126B2 (en) * | 2001-11-26 | 2007-11-06 | Nilimedix Ltd. | Drug delivery device and method |
| US7311693B2 (en) * | 2001-11-26 | 2007-12-25 | Nilimedix Ltd. | Drug delivery device and method |
| CN100335784C (en) * | 2003-12-05 | 2007-09-05 | 清华大学 | Mini jockey pump |
| DE10360709A1 (en) * | 2003-12-19 | 2005-10-06 | Bartels Mikrotechnik Gmbh | Micropump and glue-free process for bonding two substrates |
| US8202267B2 (en) | 2006-10-10 | 2012-06-19 | Medsolve Technologies, Inc. | Method and apparatus for infusing liquid to a body |
| US8708961B2 (en) | 2008-01-28 | 2014-04-29 | Medsolve Technologies, Inc. | Apparatus for infusing liquid to a body |
| US8197235B2 (en) | 2009-02-18 | 2012-06-12 | Davis David L | Infusion pump with integrated permanent magnet |
| US8353864B2 (en) | 2009-02-18 | 2013-01-15 | Davis David L | Low cost disposable infusion pump |
| FR2952628A1 (en) * | 2009-11-13 | 2011-05-20 | Commissariat Energie Atomique | PROCESS FOR MANUFACTURING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP |
| EP2333340A1 (en) | 2009-12-07 | 2011-06-15 | Debiotech S.A. | Flexible element for a micro-pump |
| EP2469089A1 (en) | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Electronic control method and system for a piezo-electric pump |
| JP5682513B2 (en) * | 2011-09-06 | 2015-03-11 | 株式会社村田製作所 | Fluid control device |
| DE102012221832A1 (en) * | 2012-11-29 | 2014-06-05 | Robert Bosch Gmbh | Metering pump, pump element for the metering pump and method for producing a pump element for a metering pump |
| DE102018120782B3 (en) | 2018-08-24 | 2019-08-22 | Bartels Mikrotechnik Gmbh | micro-blower |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH679555A5 (en) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
| DE3925749C1 (en) * | 1989-08-03 | 1990-10-31 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| US5096388A (en) * | 1990-03-22 | 1992-03-17 | The Charles Stark Draper Laboratory, Inc. | Microfabricated pump |
| US5259737A (en) * | 1990-07-02 | 1993-11-09 | Seiko Epson Corporation | Micropump with valve structure |
| DE69410487T2 (en) * | 1993-12-28 | 1998-11-05 | Westonbridge Int Ltd | MICRO PUMP |
| CH689836A5 (en) * | 1994-01-14 | 1999-12-15 | Westonbridge Int Ltd | Micropump. |
| DE4422972A1 (en) * | 1994-06-30 | 1996-01-04 | Bosch Gmbh Robert | Electro-magnetic drive for a miniature valve |
| US5961298A (en) * | 1996-06-25 | 1999-10-05 | California Institute Of Technology | Traveling wave pump employing electroactive actuators |
| US6116863A (en) * | 1997-05-30 | 2000-09-12 | University Of Cincinnati | Electromagnetically driven microactuated device and method of making the same |
-
1996
- 1996-12-31 FR FR9616278A patent/FR2757906A1/en not_active Withdrawn
-
1997
- 1997-12-19 JP JP52960498A patent/JP2001507425A/en not_active Ceased
- 1997-12-19 CA CA002276401A patent/CA2276401A1/en not_active Abandoned
- 1997-12-19 EP EP97954671A patent/EP0951617B1/en not_active Expired - Lifetime
- 1997-12-19 ES ES97954671T patent/ES2189994T3/en not_active Expired - Lifetime
- 1997-12-19 DE DE69718820T patent/DE69718820T2/en not_active Expired - Lifetime
- 1997-12-19 WO PCT/EP1997/007278 patent/WO1998029661A1/en active IP Right Grant
- 1997-12-19 AU AU59557/98A patent/AU5955798A/en not_active Abandoned
- 1997-12-19 CN CN97181688A patent/CN1245547A/en active Pending
- 1997-12-19 US US09/331,952 patent/US6309189B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0951617B1 (en) | 2003-01-29 |
| ES2189994T3 (en) | 2003-07-16 |
| FR2757906A1 (en) | 1998-07-03 |
| WO1998029661A1 (en) | 1998-07-09 |
| AU5955798A (en) | 1998-07-31 |
| DE69718820D1 (en) | 2003-03-06 |
| DE69718820T2 (en) | 2004-01-22 |
| US6309189B1 (en) | 2001-10-30 |
| CN1245547A (en) | 2000-02-23 |
| JP2001507425A (en) | 2001-06-05 |
| EP0951617A1 (en) | 1999-10-27 |
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| Date | Code | Title | Description |
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| EEER | Examination request | ||
| FZDE | Dead |