CA2283563A1 - Micromachined opto-flow gas sensor - Google Patents

Micromachined opto-flow gas sensor Download PDF

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Publication number
CA2283563A1
CA2283563A1 CA002283563A CA2283563A CA2283563A1 CA 2283563 A1 CA2283563 A1 CA 2283563A1 CA 002283563 A CA002283563 A CA 002283563A CA 2283563 A CA2283563 A CA 2283563A CA 2283563 A1 CA2283563 A1 CA 2283563A1
Authority
CA
Canada
Prior art keywords
opto
gas
micromachined
detected
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002283563A
Other languages
French (fr)
Other versions
CA2283563C (en
Inventor
Bonne Ulrich
Barrett E. Cole
Robert E. Higashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc.
Bonne Ulrich
Barrett E. Cole
Robert E. Higashi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc., Bonne Ulrich, Barrett E. Cole, Robert E. Higashi filed Critical Honeywell Inc.
Publication of CA2283563A1 publication Critical patent/CA2283563A1/en
Application granted granted Critical
Publication of CA2283563C publication Critical patent/CA2283563C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Abstract

A micromachined integrated opto-fluidic or opto-acoustic sensor (10) having a rapidly intensity-varying or pulsing light source (14), an interference filter (16), a gas cavity (20), which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse via a filter (22), and a fluidic or pressure sensor (19) to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
CA002283563A 1997-04-30 1998-04-29 Micromachined opto-flow gas sensor Expired - Fee Related CA2283563C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/841,748 1997-04-30
US08/841,748 US5869749A (en) 1997-04-30 1997-04-30 Micromachined integrated opto-flow gas/liquid sensor
PCT/US1998/008741 WO1998049540A1 (en) 1997-04-30 1998-04-29 Micromachined opto-flow gas sensor

Publications (2)

Publication Number Publication Date
CA2283563A1 true CA2283563A1 (en) 1998-11-05
CA2283563C CA2283563C (en) 2008-07-15

Family

ID=25285606

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002283563A Expired - Fee Related CA2283563C (en) 1997-04-30 1998-04-29 Micromachined opto-flow gas sensor

Country Status (6)

Country Link
US (2) US5869749A (en)
EP (1) EP0979401B1 (en)
JP (1) JP4183285B2 (en)
CA (1) CA2283563C (en)
DE (1) DE69806477T2 (en)
WO (1) WO1998049540A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8826724B2 (en) 2010-12-24 2014-09-09 Honeywell International Inc. Carbon dioxide sensor

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO300078B1 (en) * 1995-02-10 1997-04-01 Sinvent As Photo acoustic gas detector
DK174312B1 (en) * 1996-06-06 2002-12-02 Ole Pedersen Method for measuring flow rate and diffusivity, microsensor for use in the method and use of such microsensor
US5854431A (en) * 1997-12-10 1998-12-29 Sandia Corporation Particle preconcentrator
US6794981B2 (en) * 1998-12-07 2004-09-21 Honeywell International Inc. Integratable-fluid flow and property microsensor assembly
US7258003B2 (en) * 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
US6911894B2 (en) * 1998-12-07 2005-06-28 Honeywell International Inc. Sensor package for harsh environments
WO2000042287A1 (en) * 1999-01-13 2000-07-20 Vermeer Manufacturing Company Automated bore planning method and apparatus for horizontal directional drilling
FR2791134A1 (en) * 1999-03-16 2000-09-22 Commissariat Energie Atomique Miniaturized photoacoustic detection device has infrared source mounted on first support, pressure detector mounted on second support and chamber containing gas to be measured
US6315062B1 (en) 1999-09-24 2001-11-13 Vermeer Manufacturing Company Horizontal directional drilling machine employing inertial navigation control system and method
US6474138B1 (en) 2000-11-28 2002-11-05 Honeywell International Inc. Adsorption based carbon monoxide sensor and method
US6550310B1 (en) 2000-11-28 2003-04-22 Honeywell International Inc. Catalytic adsorption and oxidation based carbon monoxide sensor and detection method
US6550664B2 (en) * 2000-12-09 2003-04-22 Agilent Technologies, Inc. Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
US20030021572A1 (en) * 2001-02-07 2003-01-30 Steinberg Dan A. V-groove with tapered depth and method for making
US6907150B2 (en) 2001-02-07 2005-06-14 Shipley Company, L.L.C. Etching process for micromachining crystalline materials and devices fabricated thereby
US6885786B2 (en) * 2001-02-07 2005-04-26 Shipley Company, L.L.C. Combined wet and dry etching process for micromachining of crystalline materials
US6964804B2 (en) * 2001-02-14 2005-11-15 Shipley Company, L.L.C. Micromachined structures made by combined wet and dry etching
US6567753B2 (en) * 2001-04-04 2003-05-20 General Electric Company Devices and methods for simultaneous measurement of transmission of vapors through a plurality of sheet materials
US20020195417A1 (en) * 2001-04-20 2002-12-26 Steinberg Dan A. Wet and dry etching process on <110> silicon and resulting structures
US6797303B2 (en) * 2001-09-04 2004-09-28 Lycored Natural Products Industries Ltd. Carotenoid extraction process
US6681623B2 (en) 2001-10-30 2004-01-27 Honeywell International Inc. Flow and pressure sensor for harsh fluids
JP2004012141A (en) * 2002-06-03 2004-01-15 Omron Corp Electrostatic capacity type pressure sensor and its manufacturing method
US7530257B2 (en) * 2002-09-27 2009-05-12 Honeywell International Inc. Phased micro analyzer VIII
US6792794B2 (en) * 2002-09-27 2004-09-21 Honeywell International Inc. Low power gas leak detector
JP2006515667A (en) * 2002-09-27 2006-06-01 ハネウェル・インターナショナル・インコーポレーテッド Phase micro analyzer
CN100365775C (en) 2003-05-23 2008-01-30 罗姆和哈斯电子材料有限责任公司 Etching process for micromachining crystalline materials and devices fabricated thereby
US6766837B1 (en) 2003-09-04 2004-07-27 The United States Of America As Represented By The Secretary Of The Navy Acoustic fuel shutoff
US8226576B2 (en) * 2004-02-25 2012-07-24 Becton, Dickinson And Company Safety blood collection holder
DE102004032176A1 (en) * 2004-07-02 2006-01-26 Robert Bosch Gmbh Coated micromechanical radiator
US7502109B2 (en) * 2005-05-17 2009-03-10 Honeywell International Inc. Optical micro-spectrometer
WO2007042336A2 (en) * 2005-10-14 2007-04-19 Stmicroelectronics S.R.L. Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device
US7549206B2 (en) * 2007-08-13 2009-06-23 Honeywell International Inc. Shell flow sensor
US7508567B1 (en) * 2008-01-08 2009-03-24 Hewlett-Packard Development Company, L.P. Metal etalon with enhancing stack
DE102008047658B3 (en) 2008-09-12 2010-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gas sensor and use of a gas sensor
US8124953B2 (en) * 2009-03-12 2012-02-28 Infineon Technologies Ag Sensor device having a porous structure element
DE102009029002B3 (en) 2009-08-28 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoacoustic sensor and method for its production and use
FR2951545B1 (en) * 2009-10-21 2014-01-03 Commissariat Energie Atomique PHOTOACOUSTIC GAS SENSOR
EP2558851B1 (en) * 2010-04-15 2017-07-19 QCM lab Aktiebolag Method for detecting gas and a gas detector comprising an acoustic resonator cell with thermocompensation therefor
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
FR2974413B1 (en) * 2011-04-21 2014-06-13 Commissariat Energie Atomique PHOTOACOUSTIC GAS DETECTOR WITH HELMHOLTZ CELL
WO2013134463A1 (en) 2012-03-08 2013-09-12 Cornell University Tunable optofluidic apparatus, method and applications
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
DE102012008102B3 (en) * 2012-04-25 2013-08-01 Testo Ag Measuring device and measuring method
TWM444585U (en) * 2012-06-04 2013-01-01 Az Instr Corp Gas concentration detector
TWI512930B (en) * 2012-09-25 2015-12-11 Xintex Inc Chip package and method for forming the same
US9513261B2 (en) 2013-10-14 2016-12-06 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
DE102014200583B3 (en) * 2014-01-15 2015-05-13 Robert Bosch Gmbh METHOD FOR PRODUCING AN INTEGRATED MICROMECHANICAL FLUIDSENSOR COMPONENT, INTEGRATED MICROMECHANICAL FLUIDSENSOR COMPONENT AND METHOD FOR DETECTING A FLUID BY MEANS OF AN INTEGRATED MICROMECHANICAL FLUIDSENSOR COMPONENT
US10883875B2 (en) 2015-03-05 2021-01-05 Honeywell International Inc. Use of selected glass types and glass thicknesses in the optical path to remove cross sensitivity to water absorption peaks
DE202015002315U1 (en) * 2015-03-27 2015-05-06 Infineon Technologies Ag gas sensor
JP6548480B2 (en) * 2015-06-29 2019-07-24 日本光電工業株式会社 Gas sensor kit and gas measurement system
CN108351294A (en) 2015-09-10 2018-07-31 霍尼韦尔国际公司 Detector with normalized response and improvement sensitivity
US10393591B2 (en) 2015-10-09 2019-08-27 Honeywell International Inc. Electromagnetic radiation detector using a planar Golay cell
DE102016103646B4 (en) * 2016-01-22 2023-03-02 Infineon Technologies Ag INTEGRATED PHOTOACOUSTIC GAS SENSOR MODULE
DE102016122479B4 (en) 2016-11-22 2020-10-22 Infineon Technologies Ag Infrared emitter assembly and method of making an infrared emitter assembly
IT201700103489A1 (en) 2017-09-15 2019-03-15 St Microelectronics Srl METHOD OF MANUFACTURE OF A THIN FILTERING MEMBRANE, ACOUSTIC TRANSDUCER INCLUDING THE FILTERING MEMBRANE, ASSEMBLY METHOD OF THE ACOUSTIC TRANSDUCER AND ELECTRONIC SYSTEM
US11187655B2 (en) 2018-05-16 2021-11-30 Sensera, Inc. Compact gas sensors

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3659452A (en) * 1969-04-22 1972-05-02 Perkin Elmer Corp Laser excited spectrophone
DE2109568A1 (en) * 1971-03-01 1972-09-14 Siemens Ag Detection system for an ultra-red gas analyzer
US3938365A (en) * 1973-11-29 1976-02-17 Massachusetts Institute Of Technology Detecting trace gaseous species acoustically in response to radiation from an intense light source
US4457162A (en) * 1982-09-17 1984-07-03 Institute Of Gas Technology Multi-frequency photo-acoustic detector
US4622845A (en) * 1985-03-21 1986-11-18 Westinghouse Electric Corp. Method and apparatus for the detection and measurement of gases
DK247786D0 (en) * 1986-05-27 1986-05-27 Brueel & Kjaer As PHOTOACUSTIC GAS ANALYZER
US4958076A (en) * 1989-02-10 1990-09-18 Gas Research Institute Selective natural gas detecting apparatus
US5341214A (en) * 1989-09-06 1994-08-23 Gaztech International Corporation NDIR gas analysis using spectral ratioing technique
US5060508A (en) * 1990-04-02 1991-10-29 Gaztech Corporation Gas sample chamber
US5222389A (en) * 1990-04-02 1993-06-29 Gaztech International Corporation Multi-channel gas sample chamber
DE9006169U1 (en) * 1990-05-31 1991-07-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De
DE4034375A1 (en) * 1990-10-29 1992-04-30 Diehl Gmbh & Co Acousto=optical gas measuring device - with pollutant enrichment cell preceding measuring chamber
US5340986A (en) * 1991-11-18 1994-08-23 Gaztech International Corporation Diffusion-type gas sample chamber
DE4208135A1 (en) * 1992-03-13 1993-09-16 Siemens Ag Arrangement for measuring gas or liquid flow - contains four temp. dependent resistances forming two sensors in Wheatstone bridge
DE4224518C2 (en) * 1992-07-24 1996-03-14 Siemens Ag Flow sensor and method for its production
US5444249A (en) * 1994-02-14 1995-08-22 Telaire Systems, Inc. NDIR gas sensor
US5747808A (en) * 1994-02-14 1998-05-05 Engelhard Sensor Technologies NDIR gas sensor
US5600148A (en) * 1994-12-30 1997-02-04 Honeywell Inc. Low power infrared scene projector array and method of manufacture
NO300078B1 (en) * 1995-02-10 1997-04-01 Sinvent As Photo acoustic gas detector
DE19601873C2 (en) * 1995-03-04 1999-02-11 Horiba Ltd Gas analyzer
JPH0989773A (en) * 1995-09-20 1997-04-04 Horiba Ltd Infrared gas analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8826724B2 (en) 2010-12-24 2014-09-09 Honeywell International Inc. Carbon dioxide sensor

Also Published As

Publication number Publication date
JP2001522463A (en) 2001-11-13
EP0979401A1 (en) 2000-02-16
US5869749A (en) 1999-02-09
CA2283563C (en) 2008-07-15
WO1998049540A1 (en) 1998-11-05
JP4183285B2 (en) 2008-11-19
DE69806477D1 (en) 2002-08-14
DE69806477T2 (en) 2003-02-20
EP0979401B1 (en) 2002-07-10
US5886249A (en) 1999-03-23

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