CA2290514A1 - A method of coating edges with diamond-like carbon - Google Patents

A method of coating edges with diamond-like carbon Download PDF

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Publication number
CA2290514A1
CA2290514A1 CA002290514A CA2290514A CA2290514A1 CA 2290514 A1 CA2290514 A1 CA 2290514A1 CA 002290514 A CA002290514 A CA 002290514A CA 2290514 A CA2290514 A CA 2290514A CA 2290514 A1 CA2290514 A1 CA 2290514A1
Authority
CA
Canada
Prior art keywords
diamond
substrate
approximately
carbon
carbon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002290514A
Other languages
French (fr)
Other versions
CA2290514C (en
Inventor
Jeffrey A. Hopwood
David L. Pappas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northeastern University Boston
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2290514A1 publication Critical patent/CA2290514A1/en
Application granted granted Critical
Publication of CA2290514C publication Critical patent/CA2290514C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/104—Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma

Abstract

A method of creating a diamond-like carbon film on a substrate (22), including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5 x 10 10 per cm3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment. Also, an article of manufacture which includes a substrate having a surface and a diamond-like carbon film on the surface, wherein the film has a hardness greater than approximately 20 Gpa and no discemable grains 300 .ANG. or greater in diameter when viewed at a magnification of 50,000X in a field-emission scanning electron microscope.
CA002290514A 1997-06-18 1998-06-11 A method of coating edges with diamond-like carbon Expired - Fee Related CA2290514C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/878,222 US6077572A (en) 1997-06-18 1997-06-18 Method of coating edges with diamond-like carbon
US878,222 1997-06-18
PCT/US1998/012270 WO1998058097A1 (en) 1997-06-18 1998-06-11 A method of coating edges with diamond-like carbon

Publications (2)

Publication Number Publication Date
CA2290514A1 true CA2290514A1 (en) 1998-12-23
CA2290514C CA2290514C (en) 2004-06-01

Family

ID=25371614

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002290514A Expired - Fee Related CA2290514C (en) 1997-06-18 1998-06-11 A method of coating edges with diamond-like carbon

Country Status (22)

Country Link
US (1) US6077572A (en)
EP (1) EP0990060B1 (en)
JP (1) JP4145361B2 (en)
KR (1) KR100586803B1 (en)
CN (1) CN1121510C (en)
AR (1) AR017505A1 (en)
AT (1) ATE234371T1 (en)
AU (1) AU736551B2 (en)
BR (1) BR9810170A (en)
CA (1) CA2290514C (en)
CO (1) CO5031272A1 (en)
DE (1) DE69812092T2 (en)
EG (1) EG21236A (en)
ES (1) ES2190084T3 (en)
HK (1) HK1023791A1 (en)
PL (1) PL186562B1 (en)
RU (1) RU2205894C2 (en)
TR (1) TR199902875T2 (en)
TW (1) TW574397B (en)
UA (1) UA59401C2 (en)
WO (1) WO1998058097A1 (en)
ZA (1) ZA985256B (en)

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KR101598645B1 (en) * 2008-06-11 2016-02-29 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 트뤼프바흐 Workpiece carrier
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JP5905297B2 (en) 2012-02-27 2016-04-20 株式会社パイロットコーポレーション Writing instrument
JP6234860B2 (en) 2014-03-25 2017-11-22 株式会社Ｓｃｒｅｅｎホールディングス Film forming apparatus and film forming method
US10415904B1 (en) 2015-04-23 2019-09-17 The United States Of America As Represented By The Secretary Of The Army Firing weapons bonded with diamond-like carbon solid and methods for production thereof
CN108085657B (en) * 2017-12-29 2020-03-17 苏州大学 Method for preparing nitrogen-doped diamond-like carbon film based on helicon wave plasma technology
CN112044706A (en) * 2020-08-05 2020-12-08 王华彬 Coating technology of coating scraper coating

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Also Published As

Publication number Publication date
TW574397B (en) 2004-02-01
WO1998058097A9 (en) 1999-04-08
AU8069498A (en) 1999-01-04
ATE234371T1 (en) 2003-03-15
UA59401C2 (en) 2003-09-15
TR199902875T2 (en) 2000-05-22
CN1260843A (en) 2000-07-19
US6077572A (en) 2000-06-20
EP0990060A1 (en) 2000-04-05
BR9810170A (en) 2000-08-08
CA2290514C (en) 2004-06-01
CN1121510C (en) 2003-09-17
HK1023791A1 (en) 2000-09-22
JP4145361B2 (en) 2008-09-03
CO5031272A1 (en) 2001-04-27
PL186562B1 (en) 2004-01-30
EG21236A (en) 2001-03-31
KR20010013862A (en) 2001-02-26
ES2190084T3 (en) 2003-07-16
ZA985256B (en) 1999-01-06
KR100586803B1 (en) 2006-06-07
DE69812092D1 (en) 2003-04-17
AU736551B2 (en) 2001-08-02
WO1998058097A1 (en) 1998-12-23
AR017505A1 (en) 2001-09-12
PL337485A1 (en) 2000-08-28
JP2002505716A (en) 2002-02-19
DE69812092T2 (en) 2003-11-20
RU2205894C2 (en) 2003-06-10
EP0990060B1 (en) 2003-03-12

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