CA2303474A1 - Optical apparatus and method for adjustment thereof - Google Patents

Optical apparatus and method for adjustment thereof Download PDF

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Publication number
CA2303474A1
CA2303474A1 CA002303474A CA2303474A CA2303474A1 CA 2303474 A1 CA2303474 A1 CA 2303474A1 CA 002303474 A CA002303474 A CA 002303474A CA 2303474 A CA2303474 A CA 2303474A CA 2303474 A1 CA2303474 A1 CA 2303474A1
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CA
Canada
Prior art keywords
optical
stipulated
optical elements
parameters
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002303474A
Other languages
French (fr)
Other versions
CA2303474C (en
Inventor
Yuji Kasai
Masahiro Murakawa
Tetsuya Higuchi
Taro Itatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Publication of CA2303474A1 publication Critical patent/CA2303474A1/en
Application granted granted Critical
Publication of CA2303474C publication Critical patent/CA2303474C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/005Motorised alignment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Abstract

An optical apparatus has an adjustment apparatus and an optical unit including a plurality of optical elements. The adjustment apparatus sequentially provides control signals that, according to a probabilistic search technique, change the parameters of a stipulated plurality of optical elements among the optical elements to become parameters that cause the functions of the optical apparatus to satisfy stipulated specifications. A method of adjusting the optical apparatus includes sequentially providing control signals that, according to a probabilistic search technique, change the parameters of the stipulated plurality of optical elements among the optical elements, and searching for optical values at which the functions of the optical apparatus the stipulated specification.
CA002303474A 2000-01-17 2000-03-30 Optical apparatus and method for adjustment thereof Expired - Fee Related CA2303474C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-7741 2000-01-17
JP2000007741A JP3885183B2 (en) 2000-01-17 2000-01-17 Optical device, method for adjusting optical device, and recording medium recorded with processing program executed by the adjusting method

Publications (2)

Publication Number Publication Date
CA2303474A1 true CA2303474A1 (en) 2001-07-17
CA2303474C CA2303474C (en) 2006-03-28

Family

ID=18536104

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002303474A Expired - Fee Related CA2303474C (en) 2000-01-17 2000-03-30 Optical apparatus and method for adjustment thereof

Country Status (8)

Country Link
US (2) US6781682B1 (en)
EP (1) EP1116977B1 (en)
JP (1) JP3885183B2 (en)
CN (1) CN1306220A (en)
AT (1) ATE396459T1 (en)
AU (1) AU782480B2 (en)
CA (1) CA2303474C (en)
DE (1) DE60038944D1 (en)

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US7378636B2 (en) 2002-02-13 2008-05-27 Riken Method of evaluating non-linear optical crystal and device therefor and wavelength conversion method and device therefor
CN110007472A (en) * 2019-05-24 2019-07-12 平顶山学院 Self-adjustable laser expansion/shrink beam device

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US7248759B2 (en) 2002-12-03 2007-07-24 Fujitsu Limited Optical signal switching apparatus, and controller and method for control of optical switch
WO2004051359A1 (en) * 2002-12-03 2004-06-17 Fujitsu Limited Optical signal exchanging device, optical switch control device, and control method
US6757113B1 (en) * 2003-03-18 2004-06-29 Lucent Technologies Inc. Optical grating mount
EP1598751B1 (en) * 2004-01-12 2014-06-25 Honda Research Institute Europe GmbH Estimation of distribution algorithm (EDA)
EP1557788B1 (en) * 2004-01-26 2008-04-16 Honda Research Institute Europe GmbH Reduction of fitness evaluations using clustering technique and neural network ensembles
DE102004035595B4 (en) * 2004-04-09 2008-02-07 Carl Zeiss Smt Ag Method for adjusting a projection objective
US7116411B2 (en) * 2004-08-26 2006-10-03 Asml Masktools B.V. Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
US20070150240A1 (en) * 2004-10-07 2007-06-28 Bridson William D Automated selection of optical systems
US7149662B2 (en) * 2004-10-07 2006-12-12 Navitar, Inc. Automated selection of optical systems
JP4635606B2 (en) * 2004-12-27 2011-02-23 富士ゼロックス株式会社 Optical scanning device
JP4873441B2 (en) * 2005-03-01 2012-02-08 財団法人電力中央研究所 High energy particle generating method and high energy particle generating apparatus
JP4650090B2 (en) * 2005-05-12 2011-03-16 株式会社島津製作所 Solid-state laser device and appropriate temperature measurement method
EP1768053A1 (en) * 2005-09-12 2007-03-28 Honda Research Institute Europe GmbH Evolutionary search for robust solutions
US20080031097A1 (en) * 2006-08-04 2008-02-07 Leehter Yao Method and System for Automatically Locating the Optimal Controller Parameters of Optical Drive
JP2010263247A (en) * 2010-08-18 2010-11-18 Shimadzu Corp Solid-state laser device
EP2546776B1 (en) * 2011-07-11 2013-06-12 Sick Ag Camera-based code reader and method for its adjusted manufacture
JP6182949B2 (en) * 2013-04-17 2017-08-23 日本電気株式会社 Wavefront compensation device for light beam, wavefront compensation method, and program thereof
CN103323944B (en) * 2013-06-17 2016-06-15 清华大学 A kind of modulated beam of light wavefront control device
RU2554315C1 (en) * 2014-03-04 2015-06-27 Открытое акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Solid-state pulse laser
CN104992225B (en) * 2015-06-19 2017-09-15 南京航空航天大学 A kind of compensation method of large deformation flexible body dynamic measuring data temperature and humidity
CN105894127B (en) * 2016-04-25 2019-08-27 中国科学院西安光学精密机械研究所 Segmentation variable step simulated annealing method applied to the different wavefront sensing of phase difference
JP6339655B1 (en) 2016-12-19 2018-06-06 ファナック株式会社 Machine learning device and light source unit manufacturing device for learning alignment procedure of optical component of light source unit
DE102016225899A1 (en) * 2016-12-21 2018-06-21 Carl Zeiss Smt Gmbh Method and apparatus for modifying imaging properties of an optical system for microlithography
CN107356276B (en) * 2017-07-06 2023-03-21 郑州轻工业学院 Method and device for weakening amplitude oscillation of spontaneous Brillouin scattering of optical fiber
KR102054243B1 (en) * 2018-02-19 2019-12-10 부경대학교 산학협력단 High-order optical fiber multiwavelength filter and continuous spectrum control method using the same
CN111563393B (en) * 2019-02-13 2022-07-05 杭州海康威视数字技术股份有限公司 Method and device for adjusting modulation depth of card reader based on genetic algorithm
CN110531462B (en) * 2019-09-06 2020-09-01 北京大学 Conical structure parameter optimization method and system for optical mode division multiplexer
JP7019736B2 (en) * 2020-02-27 2022-02-15 ニューポート コーポレーション Component shift device with shape memory alloy actuator
US11910083B2 (en) * 2020-11-06 2024-02-20 Samsung Electro-Mechanics Co., Ltd. Method and system with optimization of lens module assembly
CN112557363B (en) * 2020-12-07 2022-05-31 山西大学 Single-particle rapid identification method based on femtosecond laser modulation phase
CN112784457B (en) * 2021-01-19 2022-05-20 中国人民解放军国防科技大学 Thin film structure reinforcing band layout optimization method and system based on genetic algorithm
CN113340438B (en) * 2021-07-08 2022-05-03 电子科技大学 Method for calibrating distance error of hot end component of aero-engine in non-contact temperature field
CN114137736B (en) * 2021-12-03 2022-12-30 中国科学院长春光学精密机械与物理研究所 Large-aperture optical element adjusting device and adjusting method thereof
CN115494652B (en) * 2022-09-22 2024-04-16 广纳四维(广东)光电科技有限公司 Method, device, equipment and storage medium for assembling head display equipment
CN117685881A (en) * 2024-01-31 2024-03-12 成都建工第七建筑工程有限公司 Sensing and detecting system for concrete structure entity position and size deviation

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7378636B2 (en) 2002-02-13 2008-05-27 Riken Method of evaluating non-linear optical crystal and device therefor and wavelength conversion method and device therefor
CN110007472A (en) * 2019-05-24 2019-07-12 平顶山学院 Self-adjustable laser expansion/shrink beam device
CN110007472B (en) * 2019-05-24 2023-09-26 平顶山学院 Automatically adjustable laser beam expander/contractor

Also Published As

Publication number Publication date
US6879388B2 (en) 2005-04-12
EP1116977B1 (en) 2008-05-21
ATE396459T1 (en) 2008-06-15
CN1306220A (en) 2001-08-01
US20040232237A1 (en) 2004-11-25
US6781682B1 (en) 2004-08-24
EP1116977A3 (en) 2004-01-02
DE60038944D1 (en) 2008-07-03
JP2001196669A (en) 2001-07-19
AU782480B2 (en) 2005-08-04
EP1116977A2 (en) 2001-07-18
JP3885183B2 (en) 2007-02-21
CA2303474C (en) 2006-03-28
AU2517200A (en) 2001-07-26

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