CA2308484A1 - Polymer optical waveguide and method for fabricating the same - Google Patents
Polymer optical waveguide and method for fabricating the same Download PDFInfo
- Publication number
- CA2308484A1 CA2308484A1 CA002308484A CA2308484A CA2308484A1 CA 2308484 A1 CA2308484 A1 CA 2308484A1 CA 002308484 A CA002308484 A CA 002308484A CA 2308484 A CA2308484 A CA 2308484A CA 2308484 A1 CA2308484 A1 CA 2308484A1
- Authority
- CA
- Canada
- Prior art keywords
- polymer
- optical waveguide
- fabricating
- core
- polymer optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Drying Of Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Abstract
The present invention discloses a polymer optical waveguide and a method of fabricating the same. The polymer optical waveguide comprises a core formed of polymer containing fluoride (F) of a 12-37 wt.% on the basis of total weight of the polymer, and having repeating units with at least two -C(=O)-N-C(=O) functional groups or at least four -N-C(=O)- functional groups; and a cladding in contact with the core and formed of polymer having a refractive index lower than the polymer for forming the core. If a core layer is etched according to the ICP etching method, the etch rate becomes at least three times faster than that of the conventional RIE etching method. Also, etching characteristics including uniformity of an etched plane and vertical profile are improved, thereby reducing damage to an optical waveguide. Thus, the light scattering loss of the optical waveguide can be minimized. Also, the method for fabricating of a polymer optical waveguide according to the present invention is useful for mass production of polymer optical waveguides.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR19970058238 | 1997-11-05 | ||
| KR1998/46821 | 1998-11-02 | ||
| KR1019980046821A KR100283955B1 (en) | 1997-11-05 | 1998-11-02 | Polymer optical waveguide and its manufacturing method |
| KR1997/58238 | 1998-11-02 | ||
| PCT/KR1998/000352 WO1999023514A1 (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2308484A1 true CA2308484A1 (en) | 1999-05-14 |
| CA2308484C CA2308484C (en) | 2004-03-23 |
Family
ID=26633162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002308484A Expired - Fee Related CA2308484C (en) | 1997-11-05 | 1998-11-04 | Polymer optical waveguide and method for fabricating the same |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6233388B1 (en) |
| EP (1) | EP1029251A1 (en) |
| JP (1) | JP3728398B2 (en) |
| CN (1) | CN1122186C (en) |
| AR (1) | AR014388A1 (en) |
| AU (1) | AU735433B2 (en) |
| CA (1) | CA2308484C (en) |
| WO (1) | WO1999023514A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6377732B1 (en) | 1999-01-22 | 2002-04-23 | The Whitaker Corporation | Planar waveguide devices and fiber attachment |
| CN1216304C (en) | 2001-03-08 | 2005-08-24 | 大金工业株式会社 | Fluorine-containing material for optical waveguide |
| US6864041B2 (en) * | 2001-05-02 | 2005-03-08 | International Business Machines Corporation | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching |
| US6599957B2 (en) | 2001-05-07 | 2003-07-29 | Corning Incorporated | Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material |
| AU2002307120A1 (en) * | 2001-05-07 | 2002-11-18 | Corning Incorporated | Photosensitive material suitable for making waveguides and method of making waveguides utilizing this photosensitive optical material |
| US6947651B2 (en) * | 2001-05-10 | 2005-09-20 | Georgia Tech Research Corporation | Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
| US7672560B2 (en) * | 2008-05-13 | 2010-03-02 | International Business Machines Corporation | Coupling device for use in optical waveguides |
| KR102548183B1 (en) * | 2018-06-29 | 2023-06-28 | 주식회사 엘지화학 | Method for plasma etching process using faraday box |
| CN109669234B (en) * | 2019-02-27 | 2020-11-03 | 南宁旭越光纤有限责任公司 | Light guide strip capable of emitting light on whole body and preparation method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2041133C (en) * | 1990-04-27 | 1995-01-03 | Toru Matsuura | Polymide optical waveguide |
| US5225517A (en) * | 1991-10-03 | 1993-07-06 | E. I. Du Pont De Nemours And Company | Polyimides from bis(4-aminophenoxy) naphthalene and 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride |
| US5324813A (en) * | 1992-07-22 | 1994-06-28 | International Business Machines Corporation | Low dielectric constant fluorinated polymers and methods of fabrication thereof |
| US5317082A (en) * | 1992-12-22 | 1994-05-31 | Amoco Corporation | Photodefinable optical waveguides |
| JPH07159738A (en) * | 1993-12-06 | 1995-06-23 | Hitachi Chem Co Ltd | Composition for active optical waveguide, production of active optical waveguide using the same and active optical waveguide |
| US5649045A (en) * | 1995-12-13 | 1997-07-15 | Amoco Corporation | Polymide optical waveguide structures |
-
1998
- 1998-11-04 AU AU97650/98A patent/AU735433B2/en not_active Ceased
- 1998-11-04 CA CA002308484A patent/CA2308484C/en not_active Expired - Fee Related
- 1998-11-04 EP EP98951804A patent/EP1029251A1/en not_active Withdrawn
- 1998-11-04 CN CN98810616.7A patent/CN1122186C/en not_active Expired - Fee Related
- 1998-11-04 WO PCT/KR1998/000352 patent/WO1999023514A1/en not_active Application Discontinuation
- 1998-11-04 JP JP2000519315A patent/JP3728398B2/en not_active Expired - Fee Related
- 1998-11-05 AR ARP980105586A patent/AR014388A1/en unknown
- 1998-11-05 US US09/186,361 patent/US6233388B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| AR014388A1 (en) | 2001-02-28 |
| EP1029251A1 (en) | 2000-08-23 |
| AU9765098A (en) | 1999-05-24 |
| AU735433B2 (en) | 2001-07-05 |
| CN1277677A (en) | 2000-12-20 |
| CN1122186C (en) | 2003-09-24 |
| WO1999023514A1 (en) | 1999-05-14 |
| CA2308484C (en) | 2004-03-23 |
| US6233388B1 (en) | 2001-05-15 |
| JP2001522059A (en) | 2001-11-13 |
| JP3728398B2 (en) | 2005-12-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |