CA2506725A1 - Thermal ink jet printhead with low heater mass - Google Patents

Thermal ink jet printhead with low heater mass Download PDF

Info

Publication number
CA2506725A1
CA2506725A1 CA002506725A CA2506725A CA2506725A1 CA 2506725 A1 CA2506725 A1 CA 2506725A1 CA 002506725 A CA002506725 A CA 002506725A CA 2506725 A CA2506725 A CA 2506725A CA 2506725 A1 CA2506725 A1 CA 2506725A1
Authority
CA
Canada
Prior art keywords
ink jet
jet printhead
thermal ink
bubble
low heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002506725A
Other languages
French (fr)
Other versions
CA2506725C (en
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memjet Technology Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2506725A1 publication Critical patent/CA2506725A1/en
Application granted granted Critical
Publication of CA2506725C publication Critical patent/CA2506725C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/1412—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/20—Modules

Abstract

There is disclosed an ink jet printhead which comprises a plurality of nozzles and one or more heater elements (10) corresponding to each nozzle. Each heater element (10) is configured to heat a bubble forming liquid in the printhead to a temperature above its boiling point to form a gas bubble therein. The generation of the bubble causes the ejection of a drop of an ejectable liquid (such as ink) through the respective corresponding nozzle (3), to effect printing. Each heater element includes solid material and is configured so that, when heated, a mass of less than 10 nanograms of that solid material is heated for heating the bubble forming liquid.
CA002506725A 2002-11-23 2003-11-17 Thermal ink jet printhead with low heater mass Expired - Fee Related CA2506725C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/302,617 2002-11-23
US10/302,617 US6736489B1 (en) 2002-11-23 2002-11-23 Thermal ink jet printhead with low heater mass
PCT/AU2003/001512 WO2004048106A1 (en) 2002-11-23 2003-11-17 Thermal ink jet printhead with low heater mass

Publications (2)

Publication Number Publication Date
CA2506725A1 true CA2506725A1 (en) 2004-06-10
CA2506725C CA2506725C (en) 2009-10-27

Family

ID=32298015

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002506725A Expired - Fee Related CA2506725C (en) 2002-11-23 2003-11-17 Thermal ink jet printhead with low heater mass

Country Status (12)

Country Link
US (7) US6736489B1 (en)
EP (1) EP1567349B1 (en)
JP (1) JP2006507153A (en)
KR (1) KR20050083936A (en)
CN (1) CN100386206C (en)
AT (1) ATE495015T1 (en)
AU (1) AU2003275797B2 (en)
CA (1) CA2506725C (en)
DE (1) DE60335735D1 (en)
DK (1) DK1567349T3 (en)
IL (1) IL168707A (en)
WO (1) WO2004048106A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8287099B2 (en) 2002-11-23 2012-10-16 Zamtec Limited Printhead having annular shaped nozzle heaters

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736489B1 (en) * 2002-11-23 2004-05-18 Silverbrook Research Pty Ltd Thermal ink jet printhead with low heater mass
US6755509B2 (en) * 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
US7448729B2 (en) * 2005-04-04 2008-11-11 Silverbrook Research Pty Ltd Inkjet printhead heater elements with thin or non-existent coatings
JP4921101B2 (en) * 2006-10-04 2012-04-25 キヤノン株式会社 Ink jet recording head and ink discharge method
CA2662725A1 (en) * 2006-10-09 2008-04-17 Silverbrook Research Pty Ltd Mems bubble generator for large stable vapor bubbles
EP2084008B1 (en) * 2006-10-09 2014-05-07 Zamtec Limited Inkjet printhead with adjustable bubble impulse
US20080084447A1 (en) * 2006-10-10 2008-04-10 Silverbrook Research Pty Ltd Inkjet printhead with adjustable bubble impulse
KR101155991B1 (en) * 2007-06-27 2012-06-18 삼성전자주식회사 Head chip for ink jet type image forming apparatus and menufacturing method for the same
US8263785B2 (en) * 2008-10-29 2012-09-11 Janssen Pharmaceutica N.V. Process for the preparation of chymase modulators
SG187483A1 (en) * 2008-11-10 2013-02-28 Silverbrook Res Pty Ltd Printhead with increasing drive pulse to counter heater oxide growth
US20110063371A1 (en) * 2009-09-11 2011-03-17 Silverbrook Research Pty Ltd Method of ejecting solvent-based ink composition comprising ketone solvent
US8376541B2 (en) 2009-09-11 2013-02-19 Zamtec Ltd Method of ejecting solvent-based ink composition comprising pyrrolidinone solvent
US20110063372A1 (en) * 2009-09-11 2011-03-17 Silverbrook Research Pty Ltd Method of ejecting solvent-based ink composition comprising acetate solvent
WO2012118496A1 (en) * 2011-03-01 2012-09-07 Hewlett-Packard Development Company, L.P. Ring-type heating resistor for thermal fluid-ejection mechanism
KR101728628B1 (en) * 2016-01-28 2017-04-19 숭실대학교산학협력단 RF Transformer for differential amplifier
JP2021069993A (en) * 2019-10-31 2021-05-06 キヤノン株式会社 Ultrafine bubble generation device and method for controlling the same

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE349676B (en) 1971-01-11 1972-10-02 N Stemme
JPS6294347A (en) * 1985-10-22 1987-04-30 Ricoh Seiki Kk Thermal ink jet printing head
US4965594A (en) * 1986-02-28 1990-10-23 Canon Kabushiki Kaisha Liquid jet recording head with laminated heat resistive layers on a support member
DE3771269D1 (en) 1986-04-28 1991-08-14 Hewlett Packard Co THERMAL INK JET PRINT HEAD.
DE3717294C2 (en) * 1986-06-10 1995-01-26 Seiko Epson Corp Ink jet recording head
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
AU657930B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
JPH04257450A (en) * 1991-02-13 1992-09-11 Sharp Corp Ink-jet printer head and its manufacture
JPH06188108A (en) * 1992-12-21 1994-07-08 Canon Inc Manufacture of thin-film resistor, attachment-repellent plate for film deposition equipment and film deposition equipment
JP3157964B2 (en) 1993-08-30 2001-04-23 キヤノン株式会社 INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE PRINT HEAD
US6084619A (en) * 1995-04-21 2000-07-04 Seiko Epson Corporation Ink jet recording method
US5992769A (en) * 1995-06-09 1999-11-30 The Regents Of The University Of Michigan Microchannel system for fluid delivery
US5706041A (en) * 1996-03-04 1998-01-06 Xerox Corporation Thermal ink-jet printhead with a suspended heating element in each ejector
JPH1017803A (en) * 1996-07-08 1998-01-20 Fuji Xerox Co Ltd Ink jet recording ink and ink jet recording method
US6296350B1 (en) * 1997-03-25 2001-10-02 Lexmark International, Inc. Ink jet printer having driver circuit for generating warming and firing pulses for heating elements
US6293654B1 (en) * 1998-04-22 2001-09-25 Hewlett-Packard Company Printhead apparatus
US6126277A (en) * 1998-04-29 2000-10-03 Hewlett-Packard Company Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens
WO2000023279A1 (en) 1998-10-16 2000-04-27 Silverbrook Research Pty. Limited Improvements relating to inkjet printers
JP3762172B2 (en) * 1998-12-03 2006-04-05 キヤノン株式会社 LIQUID DISCHARGE HEAD, HEAD CARTRIDGE WITH LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND METHOD FOR PRODUCING THE LIQUID DISCHARGE HEAD
US6409316B1 (en) * 2000-03-28 2002-06-25 Xerox Corporation Thermal ink jet printhead with crosslinked polymer layer
US6482574B1 (en) * 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
JP2002084338A (en) * 2000-07-07 2002-03-22 Matsushita Electric Ind Co Ltd Data transmitter, data receiver and data communication system
FR2811588B1 (en) * 2000-07-13 2002-10-11 Centre Nat Rech Scient THERMAL INJECTION AND DOSING HEAD, MANUFACTURING METHOD THEREOF, AND FUNCTIONALIZATION OR ADDRESSING SYSTEM COMPRISING THE SAME
JP3467030B2 (en) 2000-08-04 2003-11-17 キヤノン株式会社 Ink jet recording head and ink jet recording apparatus
US6561627B2 (en) 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
KR100506079B1 (en) * 2000-12-05 2005-08-04 삼성전자주식회사 Bubble-jet type inkjet print head
KR100506082B1 (en) 2000-12-18 2005-08-04 삼성전자주식회사 Method for manufacturing ink-jet print head having semispherical ink chamber
AUPR399101A0 (en) * 2001-03-27 2001-04-26 Silverbrook Research Pty. Ltd. An apparatus and method(ART105)
US6543879B1 (en) * 2001-10-31 2003-04-08 Hewlett-Packard Company Inkjet printhead assembly having very high nozzle packing density
GB0205794D0 (en) * 2002-03-12 2002-04-24 Montelius Lars G Mems devices on a nanometer scale
US7018022B2 (en) * 2002-06-12 2006-03-28 Sharp Kabushiki Kaisha Inkjet printhead and inkjet image apparatus
US6755509B2 (en) * 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
US6736489B1 (en) * 2002-11-23 2004-05-18 Silverbrook Research Pty Ltd Thermal ink jet printhead with low heater mass
US7377623B2 (en) * 2005-04-04 2008-05-27 Silverbrook Research Pty Ltd Printhead heaters with a nanocrystalline composite structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8287099B2 (en) 2002-11-23 2012-10-16 Zamtec Limited Printhead having annular shaped nozzle heaters

Also Published As

Publication number Publication date
US20100231653A1 (en) 2010-09-16
US20090009558A1 (en) 2009-01-08
US20090213184A1 (en) 2009-08-27
US7980665B2 (en) 2011-07-19
EP1567349A1 (en) 2005-08-31
US8287096B2 (en) 2012-10-16
US7543914B2 (en) 2009-06-09
US6736489B1 (en) 2004-05-18
US6974209B2 (en) 2005-12-13
US20080055367A1 (en) 2008-03-06
EP1567349A4 (en) 2008-07-30
AU2003275797A1 (en) 2004-06-18
JP2006507153A (en) 2006-03-02
CN100386206C (en) 2008-05-07
DE60335735D1 (en) 2011-02-24
DK1567349T3 (en) 2011-04-04
US20040212662A1 (en) 2004-10-28
ATE495015T1 (en) 2011-01-15
WO2004048106A1 (en) 2004-06-10
CA2506725C (en) 2009-10-27
US20060125883A1 (en) 2006-06-15
EP1567349B1 (en) 2011-01-12
US20040100525A1 (en) 2004-05-27
KR20050083936A (en) 2005-08-26
CN1713994A (en) 2005-12-28
IL168707A (en) 2008-06-05
US7306326B2 (en) 2007-12-11
AU2003275797B2 (en) 2006-09-07
US7726781B2 (en) 2010-06-01

Similar Documents

Publication Publication Date Title
CA2506725A1 (en) Thermal ink jet printhead with low heater mass
CA2506731A1 (en) High efficiency thermal ink jet printhead
CA2506701A1 (en) Thermal ink jet printhead with suspended beam heater
CA2506733A1 (en) Thermal ink jet printhead with symmetric bubble formation
US5666143A (en) Inkjet printhead with tuned firing chambers and multiple inlets
CA2506721A1 (en) Ink jet printhead with conformally coated heater
EP0352978A3 (en) A thermal drop-on-demand ink jet print head
US8899721B2 (en) Method of operating inkjet printhead in printing and maintenance modes
EP1520712A3 (en) Dual droplet size printhead
CA2506728A1 (en) Thermal ink jet with chemical vapor deposited nozzle plate
JP2009012223A5 (en)
CA2506678A1 (en) Thermal ink jet printhead with heaters formed from low atomic number elements
CA2506694A1 (en) Thermal ink jet printhead with cavitation gap
US6132030A (en) High print quality thermal ink jet print head
JP2002103621A (en) Bubble jet (r) system ink jet print head
CA2506699A1 (en) Self-cooling thermal ink jet printhead
JP2005231366A (en) Method and apparatus for thermal fluid jet drop volume control using variable length pre-pulses
EP1195253A4 (en) Ink jet system image forming device
EP2084008B1 (en) Inkjet printhead with adjustable bubble impulse
Liou et al. Inkjet technology addressing and precise control of DNA liquid
JPS5613177A (en) Liquid jet recording method
JP2656834B2 (en) Ink jet recording device
US20130321531A1 (en) Ring-type heating resistor for thermal fluid-ejection mechanism
GB2351042A (en) Ink jet printhead with pressure concentrater
JPS60143970A (en) Ink jet recording head

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20211117