CA2564037A1 - Packaging for an interferometric modulator - Google Patents
Packaging for an interferometric modulator Download PDFInfo
- Publication number
- CA2564037A1 CA2564037A1 CA002564037A CA2564037A CA2564037A1 CA 2564037 A1 CA2564037 A1 CA 2564037A1 CA 002564037 A CA002564037 A CA 002564037A CA 2564037 A CA2564037 A CA 2564037A CA 2564037 A1 CA2564037 A1 CA 2564037A1
- Authority
- CA
- Canada
- Prior art keywords
- back plate
- transparent substrate
- sealing
- pressure
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Abstract
A package is made of a transparent substrate (12) having an interferometric modulator (10) and a back plate (30). A non-hermetic seal (32) joins the back plate to the substrate to form a package, and a desiccant (34) resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.
Claims (40)
1. A package, comprising:
a transparent substrate;
an interferometric modulator on the substrate;
a back plate;
a seal joining the back plate to the substrate to form a package; and a desiccant inside the package.
a transparent substrate;
an interferometric modulator on the substrate;
a back plate;
a seal joining the back plate to the substrate to form a package; and a desiccant inside the package.
2. The package of claim 1, wherein the transparent substrate comprises at least one of: glass, plastic, and transparent polymers.
3. The package of claim 1, wherein the seal comprises a non-hermetic seal.
4. The package of claim 1, wherein the seal comprises a hermetic seal.
5. The package of claim 1, wherein the interferometric modulator comprises at least one of a membrane modulator, and a separable modulator.
6. The package of claim 1, wherein the back plate comprises at least one of:
glass, metal, foil, polymer, plastic, ceramic and semiconductor materials.
glass, metal, foil, polymer, plastic, ceramic and semiconductor materials.
7. The device of claim 1, wherein the seal comprises at least one of: epoxy-based adhesives, o-rings, PIBs, poly-urethane, thin film metal welds, liquid spin-on glass, solder, polymers, and plastics.
8. The device of claim 1, wherein the desiccant comprises at least one of:
zeolites, molecular sieves, desiccants, surface adsorbents, bulk adsorbents, and chemical reactants.
zeolites, molecular sieves, desiccants, surface adsorbents, bulk adsorbents, and chemical reactants.
9. A method of packaging an interferometric modulator, comprising:
providing a transparent substrate;
manufacturing an interferometric modulator array on a side of the substrate;
providing a back plate;
applying a desiccant to the back plate;
sealing the back plate to the side of the substrate with a seal in ambient conditions.
providing a transparent substrate;
manufacturing an interferometric modulator array on a side of the substrate;
providing a back plate;
applying a desiccant to the back plate;
sealing the back plate to the side of the substrate with a seal in ambient conditions.
10. The method of claim 9, the method further comprising:
sealing in non-ambient conditions as a controlled environment of one of either inert gas or dry air, instead of sealing the back plate in ambient conditions.
sealing in non-ambient conditions as a controlled environment of one of either inert gas or dry air, instead of sealing the back plate in ambient conditions.
11. The method of claim 9, the method further comprising:
hardening the seal;
scribing the substrate between multiple packages;
breaking the substrate into individual devices; and applying an end seal to the individual devices.
hardening the seal;
scribing the substrate between multiple packages;
breaking the substrate into individual devices; and applying an end seal to the individual devices.
12. The method of claim 9, wherein providing a back plate comprises providing a back plate having recessed regions.
13. The method of claim 12, wherein providing a back plate with recessed regions comprises forming ribs on the back plate.
14. The method of claim 13, wherein forming ribs on the back plate comprises patterning ribs onto the back plate.
15. The method claim 13, wherein forming ribs on the back plate comprises printing a material onto the back plate.
16. The method of claim 13, wherein forming ribs on the back plate comprises stenciling a material onto the back plate.
17. The method of claim 12, wherein providing a back plate having recessed regions comprises eroding the back plate in those regions to form cavities.
18. The method of claim 12, wherein providing a back plate having recessed regions comprises providing a back plate having molded regions.
19. The method of claim 12, wherein providing a back plate having recessed regions comprises mounting a frame on a flat back plate, the frame defining cavities between struts of the frame and the transparent substrate.
20. The method of claim 9, wherein providing a back plate comprises providing a sheet of foil with integral spacer posts such that the spacer posts lie between multiple interferometric modulator arrays on the transparent substrate.
21. The method of claim 9, wherein providing a transparent substrate comprises providing a transparent substrate with recessed regions in which the interferometric modulators are formed.
22. The method of claim 9, wherein providing a back plate comprises providing a flexible, polymer sheet.
23. The method of claim 9, wherein providing a transparent substrate further comprising providing a transparent substrate having integrated spacers.
24. The method of claim 9, wherein applying the desiccant comprises:
aligning the transparent substrate to the back plate;
joining the transparent substrate to the back plate;
sealing the back plate to the transparent substrate.
aligning the transparent substrate to the back plate;
joining the transparent substrate to the back plate;
sealing the back plate to the transparent substrate.
25. The method of claim 9, wherein applying the desiccant comprises:
applying the desiccant through a hole; and sealing the hole.
applying the desiccant through a hole; and sealing the hole.
26. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate with a self-healing seal.
27. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing a hole in the back plate.
28. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises forming a seal line of a width that is sufficient to allow scribing and breaking of the substrate without breaking the seal.
29. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in a vacuum environment.
30. The method of claim 29, further comprising maintaining the vacuum pressure in the package.
31. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having an initial vacuum, and wherein environmental pressure increases from vacuum to a higher pressure as sealing occurs such that, as pressure in the package increases due to reduction in volume, increased environmental pressure aids in improving the seal.
32. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having a pressure at higher than vacuum up to and including ambient pressure to form the seal.
33. The method of claim 31, further comprising maintaining the higher pressure at ambient pressure in the package.
34. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having an initial pressure higher than vacuum up to an including ambient pressure, and wherein environmental pressure increases to a pressure higher than the initial pressure as sealing occurs such that, as pressure in the package increases due to reduction in volume, increased environmental pressure aids in improving the seal.
35. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having a pressure higher than ambient pressure to form the seal.
36. The method of claim 35, further comprising maintaining the pressure in the package at a level that is higher than ambient pressure.
37. The method of claim 9, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having an initial environmental pressure higher than ambient pressure, and wherein the environmental pressure increases to a pressure higher than the initial pressure as sealing occurs such that, as pressure in the package increases due to reduction in volume, increased environmental pressure aids in improving the seal.
38. The method of claim 31, wherein the increased pressure inside the package during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the package is at a level that is higher than the initial pressure.
39. The method of claim 34, wherein the increased pressure inside the cavity during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the cavity is at said higher pressure level.
40. The method of claim 37, wherein the increased pressure inside the package during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the package is at said higher pressure level.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/844,819 US7164520B2 (en) | 2004-05-12 | 2004-05-12 | Packaging for an interferometric modulator |
| US10/844,819 | 2004-05-12 | ||
| PCT/US2005/013464 WO2005114294A1 (en) | 2004-05-12 | 2005-04-20 | Packaging for an interferometric modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2564037A1 true CA2564037A1 (en) | 2005-12-01 |
| CA2564037C CA2564037C (en) | 2012-08-07 |
Family
ID=34966531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2564037A Expired - Fee Related CA2564037C (en) | 2004-05-12 | 2005-04-20 | Packaging for an interferometric modulator |
Country Status (8)
| Country | Link |
|---|---|
| US (4) | US7164520B2 (en) |
| EP (2) | EP2028521A1 (en) |
| KR (1) | KR101118067B1 (en) |
| CA (1) | CA2564037C (en) |
| MY (1) | MY139178A (en) |
| SG (1) | SG136124A1 (en) |
| TW (1) | TWI291219B (en) |
| WO (1) | WO2005114294A1 (en) |
Families Citing this family (71)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| KR100703140B1 (en) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | Interferometric modulation and its manufacturing method |
| US7417782B2 (en) | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
| TWI251712B (en) | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
| US7164520B2 (en) | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
| US7710629B2 (en) * | 2004-09-27 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | System and method for display device with reinforcing substance |
| US7259449B2 (en) * | 2004-09-27 | 2007-08-21 | Idc, Llc | Method and system for sealing a substrate |
| US7424198B2 (en) * | 2004-09-27 | 2008-09-09 | Idc, Llc | Method and device for packaging a substrate |
| US20060076632A1 (en) * | 2004-09-27 | 2006-04-13 | Lauren Palmateer | System and method for display device with activated desiccant |
| US7668415B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Method and device for providing electronic circuitry on a backplate |
| US20060076631A1 (en) * | 2004-09-27 | 2006-04-13 | Lauren Palmateer | Method and system for providing MEMS device package with secondary seal |
| US7184202B2 (en) * | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
| US7701631B2 (en) * | 2004-09-27 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Device having patterned spacers for backplates and method of making the same |
| US7446926B2 (en) | 2004-09-27 | 2008-11-04 | Idc, Llc | System and method of providing a regenerating protective coating in a MEMS device |
| US8124434B2 (en) | 2004-09-27 | 2012-02-28 | Qualcomm Mems Technologies, Inc. | Method and system for packaging a display |
| US7405924B2 (en) * | 2004-09-27 | 2008-07-29 | Idc, Llc | System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| US20060076634A1 (en) * | 2004-09-27 | 2006-04-13 | Lauren Palmateer | Method and system for packaging MEMS devices with incorporated getter |
| US7551246B2 (en) * | 2004-09-27 | 2009-06-23 | Idc, Llc. | System and method for display device with integrated desiccant |
| US7573547B2 (en) | 2004-09-27 | 2009-08-11 | Idc, Llc | System and method for protecting micro-structure of display array using spacers in gap within display device |
| US7368803B2 (en) * | 2004-09-27 | 2008-05-06 | Idc, Llc | System and method for protecting microelectromechanical systems array using back-plate with non-flat portion |
| US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
| US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US9261694B2 (en) * | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
| US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
| US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
| US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
| US7746529B2 (en) | 2005-02-23 | 2010-06-29 | Pixtronix, Inc. | MEMS display apparatus |
| US20060209012A1 (en) * | 2005-02-23 | 2006-09-21 | Pixtronix, Incorporated | Devices having MEMS displays |
| US7561334B2 (en) * | 2005-12-20 | 2009-07-14 | Qualcomm Mems Technologies, Inc. | Method and apparatus for reducing back-glass deflection in an interferometric modulator display device |
| US7916980B2 (en) * | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
| US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| WO2007120887A2 (en) * | 2006-04-13 | 2007-10-25 | Qualcomm Mems Technologies, Inc | Packaging a mems device using a frame |
| WO2007136706A1 (en) * | 2006-05-17 | 2007-11-29 | Qualcomm Mems Technologies Inc. | Desiccant in a mems device |
| US20070268201A1 (en) | 2006-05-22 | 2007-11-22 | Sampsell Jeffrey B | Back-to-back displays |
| US7876489B2 (en) | 2006-06-05 | 2011-01-25 | Pixtronix, Inc. | Display apparatus with optical cavities |
| WO2007149475A2 (en) * | 2006-06-21 | 2007-12-27 | Qualcomm Mems Technologies, Inc. | Method for packaging an optical mems device |
| WO2008051362A1 (en) | 2006-10-20 | 2008-05-02 | Pixtronix, Inc. | Light guides and backlight systems incorporating light redirectors at varying densities |
| US7816164B2 (en) * | 2006-12-01 | 2010-10-19 | Qualcomm Mems Technologies, Inc. | MEMS processing |
| US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
| US7852546B2 (en) | 2007-10-19 | 2010-12-14 | Pixtronix, Inc. | Spacers for maintaining display apparatus alignment |
| EP2116508A3 (en) * | 2007-09-28 | 2010-10-13 | QUALCOMM MEMS Technologies, Inc. | Optimization of desiccant usage in a MEMS package |
| US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
| US8248560B2 (en) | 2008-04-18 | 2012-08-21 | Pixtronix, Inc. | Light guides and backlight systems incorporating prismatic structures and light redirectors |
| US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
| US20090323170A1 (en) * | 2008-06-30 | 2009-12-31 | Qualcomm Mems Technologies, Inc. | Groove on cover plate or substrate |
| US20100020382A1 (en) * | 2008-07-22 | 2010-01-28 | Qualcomm Mems Technologies, Inc. | Spacer for mems device |
| US7920317B2 (en) | 2008-08-04 | 2011-04-05 | Pixtronix, Inc. | Display with controlled formation of bubbles |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| US8739390B2 (en) | 2008-12-16 | 2014-06-03 | Massachusetts Institute Of Technology | Method for microcontact printing of MEMS |
| US8963262B2 (en) * | 2009-08-07 | 2015-02-24 | Massachusettes Institute Of Technology | Method and apparatus for forming MEMS device |
| US10570005B2 (en) | 2008-12-16 | 2020-02-25 | Massachusetts Institute Of Technology | Method and apparatus for release-assisted microcontact printing of MEMS |
| US8410690B2 (en) * | 2009-02-13 | 2013-04-02 | Qualcomm Mems Technologies, Inc. | Display device with desiccant |
| US8379392B2 (en) * | 2009-10-23 | 2013-02-19 | Qualcomm Mems Technologies, Inc. | Light-based sealing and device packaging |
| KR101567764B1 (en) * | 2009-11-25 | 2015-11-11 | 반얀 에너지, 인크 | Solar module construction |
| US8149496B2 (en) * | 2009-12-22 | 2012-04-03 | Qualcomm Mems Technologies, Inc. | Integrated touch for IMOD displays using back glass |
| JP2013519121A (en) | 2010-02-02 | 2013-05-23 | ピクストロニックス・インコーポレーテッド | Method for manufacturing a cold sealed fluid filled display device |
| CN102834859B (en) | 2010-02-02 | 2015-06-03 | 皮克斯特罗尼克斯公司 | Circuits for controlling display apparatus |
| CN103038568A (en) | 2010-04-16 | 2013-04-10 | 弗莱克斯照明第二有限责任公司 | Front illumination device comprising a film-based lightguide |
| JP2013525955A (en) | 2010-04-16 | 2013-06-20 | フレックス ライティング ２，エルエルシー | Lighting device with film-based light guide |
| US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
| US20120235959A1 (en) * | 2011-03-15 | 2012-09-20 | Qualcomm Mems Technologies, Inc. | Seal anchor structures |
| US9148726B2 (en) * | 2011-09-12 | 2015-09-29 | Infineon Technologies Ag | Micro electrical mechanical system with bending deflection of backplate structure |
| US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
| FR3047604B1 (en) * | 2016-02-04 | 2018-02-02 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | HUMIDITY PROTECTED HYBRID ELECTRONIC DEVICE AND HUMIDITY PROTECTION METHOD OF HYBRID ELECTRONIC DEVICE |
| US10986435B2 (en) | 2017-04-18 | 2021-04-20 | Massachusetts Institute Of Technology | Electrostatic acoustic transducer utilized in a hearing aid or audio processing system |
| DE102019201274A1 (en) * | 2019-01-31 | 2020-08-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | METHOD FOR PRODUCING A PANEL ARRANGEMENT |
Family Cites Families (269)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2534846A (en) | 1946-06-20 | 1950-12-19 | Emi Ltd | Color filter |
| DE1288651B (en) * | 1963-06-28 | 1969-02-06 | Siemens Ag | Arrangement of electrical dipoles for wavelengths below 1 mm and method for producing such an arrangement |
| FR1603131A (en) * | 1968-07-05 | 1971-03-22 | ||
| US3813265A (en) * | 1970-02-16 | 1974-05-28 | A Marks | Electro-optical dipolar material |
| US3653741A (en) * | 1970-02-16 | 1972-04-04 | Alvin M Marks | Electro-optical dipolar material |
| DE2336930A1 (en) * | 1973-07-20 | 1975-02-06 | Battelle Institut E V | INFRARED MODULATOR (II.) |
| US4036360A (en) | 1975-11-12 | 1977-07-19 | Graham Magnetics Incorporated | Package having dessicant composition |
| US4074480A (en) * | 1976-02-12 | 1978-02-21 | Burton Henry W G | Kit for converting single-glazed window to double-glazed window |
| US4099854A (en) | 1976-10-12 | 1978-07-11 | The Unites States Of America As Represented By The Secretary Of The Navy | Optical notch filter utilizing electric dipole resonance absorption |
| US4389096A (en) | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
| US4663083A (en) * | 1978-05-26 | 1987-05-05 | Marks Alvin M | Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics |
| US4445050A (en) * | 1981-12-15 | 1984-04-24 | Marks Alvin M | Device for conversion of light power to electric power |
| US4431691A (en) * | 1979-01-29 | 1984-02-14 | Tremco, Incorporated | Dimensionally stable sealant and spacer strip and composite structures comprising the same |
| US4228437A (en) | 1979-06-26 | 1980-10-14 | The United States Of America As Represented By The Secretary Of The Navy | Wideband polarization-transforming electromagnetic mirror |
| NL8001281A (en) | 1980-03-04 | 1981-10-01 | Philips Nv | DISPLAY DEVICE. |
| US4377324A (en) * | 1980-08-04 | 1983-03-22 | Honeywell Inc. | Graded index Fabry-Perot optical filter device |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| FR2506026A1 (en) | 1981-05-18 | 1982-11-19 | Radant Etudes | METHOD AND DEVICE FOR ANALYZING A HYPERFREQUENCY ELECTROMAGNETIC WAVE RADIATION BEAM |
| NL8103377A (en) | 1981-07-16 | 1983-02-16 | Philips Nv | DISPLAY DEVICE. |
| US4571603A (en) * | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
| NL8200354A (en) * | 1982-02-01 | 1983-09-01 | Philips Nv | PASSIVE DISPLAY. |
| US4500171A (en) * | 1982-06-02 | 1985-02-19 | Texas Instruments Incorporated | Process for plastic LCD fill hole sealing |
| US4482213A (en) | 1982-11-23 | 1984-11-13 | Texas Instruments Incorporated | Perimeter seal reinforcement holes for plastic LCDs |
| US4710732A (en) | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4566935A (en) * | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
| US5096279A (en) * | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4662746A (en) * | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4615595A (en) | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5835255A (en) | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
| GB8610129D0 (en) | 1986-04-25 | 1986-05-29 | Secr Defence | Electro-optical device |
| US4748366A (en) * | 1986-09-02 | 1988-05-31 | Taylor George W | Novel uses of piezoelectric materials for creating optical effects |
| US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
| US4844614A (en) * | 1987-09-01 | 1989-07-04 | Nicolet Instrument Corporation | Interchangeable beam splitting holder and compartment therefor |
| US4977009A (en) | 1987-12-16 | 1990-12-11 | Ford Motor Company | Composite polymer/desiccant coatings for IC encapsulation |
| US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
| US4856863A (en) | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
| US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
| JPH0268513A (en) | 1988-09-05 | 1990-03-08 | Fuji Photo Film Co Ltd | Color filter |
| US4982184A (en) * | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
| US5214420A (en) * | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
| US5287096A (en) * | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
| KR100202246B1 (en) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | Apparatus and method for digital video system |
| US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
| US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
| US5206629A (en) * | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
| US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
| US5079544A (en) * | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
| US5192946A (en) * | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
| US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
| US5214419A (en) * | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
| US4983824A (en) * | 1989-07-06 | 1991-01-08 | Metricor Inc. | Optically resonant sensor with increased monotonic range |
| US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
| US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
| US5381253A (en) | 1991-11-14 | 1995-01-10 | Board Of Regents Of University Of Colorado | Chiral smectic liquid crystal optical modulators having variable retardation |
| US5124834A (en) | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
| US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
| JPH03199920A (en) | 1989-12-27 | 1991-08-30 | Tdk Corp | Light-displacement transducer and sensor |
| US5500635A (en) | 1990-02-20 | 1996-03-19 | Mott; Jonathan C. | Products incorporating piezoelectric material |
| CH682523A5 (en) * | 1990-04-20 | 1993-09-30 | Suisse Electronique Microtech | A modulation matrix addressed light. |
| GB9012099D0 (en) | 1990-05-31 | 1990-07-18 | Kodak Ltd | Optical article for multicolour imaging |
| EP0467048B1 (en) * | 1990-06-29 | 1995-09-20 | Texas Instruments Incorporated | Field-updated deformable mirror device |
| US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5018256A (en) * | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
| US5099353A (en) * | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5304419A (en) * | 1990-07-06 | 1994-04-19 | Alpha Fry Ltd | Moisture and particle getter for enclosures |
| US5153771A (en) | 1990-07-18 | 1992-10-06 | Northrop Corporation | Coherent light modulation and detector |
| US5526688A (en) | 1990-10-12 | 1996-06-18 | Texas Instruments Incorporated | Digital flexure beam accelerometer and method |
| US5192395A (en) * | 1990-10-12 | 1993-03-09 | Texas Instruments Incorporated | Method of making a digital flexure beam accelerometer |
| US5044736A (en) | 1990-11-06 | 1991-09-03 | Motorola, Inc. | Configurable optical filter or display |
| US5602671A (en) * | 1990-11-13 | 1997-02-11 | Texas Instruments Incorporated | Low surface energy passivation layer for micromechanical devices |
| US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
| US5233459A (en) | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
| CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
| US5142414A (en) | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
| US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
| US5179274A (en) * | 1991-07-12 | 1993-01-12 | Texas Instruments Incorporated | Method for controlling operation of optical systems and devices |
| US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
| US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
| US5563398A (en) | 1991-10-31 | 1996-10-08 | Texas Instruments Incorporated | Spatial light modulator scanning system |
| CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
| US5233385A (en) | 1991-12-18 | 1993-08-03 | Texas Instruments Incorporated | White light enhanced color field sequential projection |
| US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
| US5244707A (en) | 1992-01-10 | 1993-09-14 | Shores A Andrew | Enclosure for electronic devices |
| CA2087625C (en) * | 1992-01-23 | 2006-12-12 | William E. Nelson | Non-systolic time delay and integration printing |
| US5296950A (en) * | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
| US5231532A (en) | 1992-02-05 | 1993-07-27 | Texas Instruments Incorporated | Switchable resonant filter for optical radiation |
| EP0562424B1 (en) | 1992-03-25 | 1997-05-28 | Texas Instruments Incorporated | Embedded optical calibration system |
| US5312513A (en) * | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
| US5401983A (en) | 1992-04-08 | 1995-03-28 | Georgia Tech Research Corporation | Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices |
| US5311360A (en) * | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
| JPH0651250A (en) * | 1992-05-20 | 1994-02-25 | Texas Instr Inc <Ti> | Monolithic space optical modulator and memory package |
| JPH06214169A (en) * | 1992-06-08 | 1994-08-05 | Texas Instr Inc <Ti> | Controllable optical and periodic surface filter |
| US5818095A (en) | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
| US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
| US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
| US5659374A (en) | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
| JP3547160B2 (en) | 1993-01-11 | 2004-07-28 | テキサス インスツルメンツ インコーポレイテツド | Spatial light modulator |
| US6674562B1 (en) * | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
| US5489952A (en) | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
| US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
| US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
| US5581272A (en) | 1993-08-25 | 1996-12-03 | Texas Instruments Incorporated | Signal generator for controlling a spatial light modulator |
| FR2710161B1 (en) | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Miniature array of light shutters. |
| US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
| US5497197A (en) | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
| US5526051A (en) | 1993-10-27 | 1996-06-11 | Texas Instruments Incorporated | Digital television system |
| US5459602A (en) | 1993-10-29 | 1995-10-17 | Texas Instruments | Micro-mechanical optical shutter |
| US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
| US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
| CA2137059C (en) | 1993-12-03 | 2004-11-23 | Texas Instruments Incorporated | Dmd architecture to improve horizontal resolution |
| US5583688A (en) | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
| US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
| US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
| US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
| US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
| US6680792B2 (en) * | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US7550794B2 (en) * | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
| US20010003487A1 (en) * | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
| US6710908B2 (en) * | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
| US7460291B2 (en) * | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
| US6040937A (en) * | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
| US7123216B1 (en) * | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
| DE69522856T2 (en) | 1994-05-17 | 2002-05-02 | Sony Corp | Display device with position detection of a pointer |
| US5497172A (en) | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
| US5673106A (en) | 1994-06-17 | 1997-09-30 | Texas Instruments Incorporated | Printing system with self-monitoring and adjustment |
| US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
| US5499062A (en) | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
| US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
| US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
| US5703710A (en) | 1994-09-09 | 1997-12-30 | Deacon Research | Method for manipulating optical energy using poled structure |
| US6053617A (en) | 1994-09-23 | 2000-04-25 | Texas Instruments Incorporated | Manufacture method for micromechanical devices |
| US5619059A (en) * | 1994-09-28 | 1997-04-08 | National Research Council Of Canada | Color deformable mirror device having optical thin film interference color coatings |
| US5650881A (en) | 1994-11-02 | 1997-07-22 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
| US5552924A (en) | 1994-11-14 | 1996-09-03 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
| US5610624A (en) * | 1994-11-30 | 1997-03-11 | Texas Instruments Incorporated | Spatial light modulator with reduced possibility of an on state defect |
| US5567334A (en) | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
| US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| US5535047A (en) | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
| US6486231B1 (en) | 1995-04-19 | 2002-11-26 | Csp Technologies, Inc. | Co-continuous interconnecting channel morphology composition |
| US5784190A (en) | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| US6969635B2 (en) | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US5614785A (en) * | 1995-09-28 | 1997-03-25 | Texas Instruments Incorporated | Anode plate for flat panel display having silicon getter |
| US5739945A (en) * | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
| JPH09148066A (en) | 1995-11-24 | 1997-06-06 | Pioneer Electron Corp | Organic electroluminescent element |
| US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
| JP3799092B2 (en) * | 1995-12-29 | 2006-07-19 | アジレント・テクノロジーズ・インク | Light modulation device and display device |
| US5939785A (en) * | 1996-04-12 | 1999-08-17 | Texas Instruments Incorporated | Micromechanical device including time-release passivant |
| US5815141A (en) | 1996-04-12 | 1998-09-29 | Elo Touch Systems, Inc. | Resistive touchscreen having multiple selectable regions for pressure discrimination |
| EP0802125B1 (en) | 1996-04-17 | 2001-06-27 | Mitsubishi Gas Chemical Company, Inc. | Package to hold a product under controlled environmental conditions, in particular for a glass item |
| US5710656A (en) * | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
| US5912758A (en) | 1996-09-11 | 1999-06-15 | Texas Instruments Incorporated | Bipolar reset for spatial light modulators |
| US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
| DE69806846T2 (en) * | 1997-05-08 | 2002-12-12 | Texas Instruments Inc | Improvements for spatial light modulators |
| US6480177B2 (en) | 1997-06-04 | 2002-11-12 | Texas Instruments Incorporated | Blocked stepped address voltage for micromechanical devices |
| GB9724077D0 (en) * | 1997-11-15 | 1998-01-14 | Dow Corning Sa | Insulating glass units |
| US6028690A (en) * | 1997-11-26 | 2000-02-22 | Texas Instruments Incorporated | Reduced micromirror mirror gaps for improved contrast ratio |
| US6180428B1 (en) * | 1997-12-12 | 2001-01-30 | Xerox Corporation | Monolithic scanning light emitting devices using micromachining |
| IL127790A (en) | 1998-04-21 | 2003-02-12 | Ibm | System and method for selecting, accessing and viewing portions of an information stream(s) using a television companion device |
| US6160833A (en) | 1998-05-06 | 2000-12-12 | Xerox Corporation | Blue vertical cavity surface emitting laser |
| US6282010B1 (en) | 1998-05-14 | 2001-08-28 | Texas Instruments Incorporated | Anti-reflective coatings for spatial light modulators |
| US6323982B1 (en) | 1998-05-22 | 2001-11-27 | Texas Instruments Incorporated | Yield superstructure for digital micromirror device |
| US6147790A (en) | 1998-06-02 | 2000-11-14 | Texas Instruments Incorporated | Spring-ring micromechanical device |
| US6295154B1 (en) | 1998-06-05 | 2001-09-25 | Texas Instruments Incorporated | Optical switching apparatus |
| JP2000003783A (en) | 1998-06-12 | 2000-01-07 | Tdk Corp | Organic electroluminescent display device |
| US6496122B2 (en) | 1998-06-26 | 2002-12-17 | Sharp Laboratories Of America, Inc. | Image display and remote control system capable of displaying two distinct images |
| US6113239A (en) | 1998-09-04 | 2000-09-05 | Sharp Laboratories Of America, Inc. | Projection display system for reflective light valves |
| US6031657A (en) | 1998-10-15 | 2000-02-29 | Memsolutions, Inc. | Membrane-actuated charge controlled mirror (CCM) projection display |
| JP3180794B2 (en) | 1999-02-19 | 2001-06-25 | 日本電気株式会社 | Semiconductor device and manufacturing method thereof |
| WO2000053220A1 (en) | 1999-03-12 | 2000-09-14 | University Of Massachusetts | Lipoglycan compositions and methods of treating parasitic infections |
| US6606175B1 (en) | 1999-03-16 | 2003-08-12 | Sharp Laboratories Of America, Inc. | Multi-segment light-emitting diode |
| US6201633B1 (en) * | 1999-06-07 | 2001-03-13 | Xerox Corporation | Micro-electromechanical based bistable color display sheets |
| US6862029B1 (en) * | 1999-07-27 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Color display system |
| WO2003007049A1 (en) * | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
| AT408157B (en) | 1999-10-15 | 2001-09-25 | Electrovac | METHOD FOR PRODUCING A FIELD EMISSION DISPLAY |
| US6232923B1 (en) * | 1999-11-11 | 2001-05-15 | Lucent Technologies Inc. | Patch antenna construction |
| US6549338B1 (en) * | 1999-11-12 | 2003-04-15 | Texas Instruments Incorporated | Bandpass filter to reduce thermal impact of dichroic light shift |
| US6552840B2 (en) * | 1999-12-03 | 2003-04-22 | Texas Instruments Incorporated | Electrostatic efficiency of micromechanical devices |
| US6545335B1 (en) * | 1999-12-27 | 2003-04-08 | Xerox Corporation | Structure and method for electrical isolation of optoelectronic integrated circuits |
| US6548908B2 (en) * | 1999-12-27 | 2003-04-15 | Xerox Corporation | Structure and method for planar lateral oxidation in passive devices |
| JP2001249287A (en) | 1999-12-30 | 2001-09-14 | Texas Instr Inc <Ti> | Method for operating bistabl micro mirror array |
| US6261853B1 (en) | 2000-02-07 | 2001-07-17 | Therma-Wave, Inc. | Method and apparatus for preparing semiconductor wafers for measurement |
| US6473274B1 (en) | 2000-06-28 | 2002-10-29 | Texas Instruments Incorporated | Symmetrical microactuator structure for use in mass data storage devices, or the like |
| US6853129B1 (en) * | 2000-07-28 | 2005-02-08 | Candescent Technologies Corporation | Protected substrate structure for a field emission display device |
| US6778155B2 (en) | 2000-07-31 | 2004-08-17 | Texas Instruments Incorporated | Display operation with inserted block clears |
| US6643069B2 (en) | 2000-08-31 | 2003-11-04 | Texas Instruments Incorporated | SLM-base color projection display having multiple SLM's and multiple projection lenses |
| US7315115B1 (en) | 2000-10-27 | 2008-01-01 | Canon Kabushiki Kaisha | Light-emitting and electron-emitting devices having getter regions |
| US6859218B1 (en) * | 2000-11-07 | 2005-02-22 | Hewlett-Packard Development Company, L.P. | Electronic display devices and methods |
| KR20020084084A (en) | 2000-11-08 | 2002-11-04 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | Electro-optical device |
| US7178927B2 (en) | 2000-11-14 | 2007-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Electroluminescent device having drying agent |
| US6664779B2 (en) * | 2000-11-16 | 2003-12-16 | Texas Instruments Incorporated | Package with environmental control material carrier |
| US6762868B2 (en) * | 2000-11-16 | 2004-07-13 | Texas Instruments Incorporated | Electro-optical package with drop-in aperture |
| AU2002237682A1 (en) | 2000-11-27 | 2002-06-03 | Microsensors Inc. | Wafer eutectic bonding of mems gyros |
| US6992375B2 (en) | 2000-11-30 | 2006-01-31 | Texas Instruments Incorporated | Anchor for device package |
| US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US6906847B2 (en) * | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
| US6775174B2 (en) | 2000-12-28 | 2004-08-10 | Texas Instruments Incorporated | Memory architecture for micromirror cell |
| EP1220010A3 (en) | 2000-12-29 | 2004-10-27 | Texas Instruments Incorporated | Micromechanical device recoat methods |
| US6625047B2 (en) | 2000-12-31 | 2003-09-23 | Texas Instruments Incorporated | Micromechanical memory element |
| US6630786B2 (en) | 2001-03-30 | 2003-10-07 | Candescent Technologies Corporation | Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance |
| US6534850B2 (en) | 2001-04-16 | 2003-03-18 | Hewlett-Packard Company | Electronic device sealed under vacuum containing a getter and method of operation |
| US6465355B1 (en) | 2001-04-27 | 2002-10-15 | Hewlett-Packard Company | Method of fabricating suspended microstructures |
| JP2002341320A (en) | 2001-05-15 | 2002-11-27 | Fuji Photo Film Co Ltd | Liquid crystal display device and optical laminate |
| US6716276B2 (en) * | 2001-06-25 | 2004-04-06 | Desiccare, Inc. | Desiccant system |
| US6822628B2 (en) | 2001-06-28 | 2004-11-23 | Candescent Intellectual Property Services, Inc. | Methods and systems for compensating row-to-row brightness variations of a field emission display |
| TW583049B (en) | 2001-07-20 | 2004-04-11 | Getters Spa | Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| US6862022B2 (en) * | 2001-07-20 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method and system for automatically selecting a vertical refresh rate for a video display monitor |
| US6589625B1 (en) | 2001-08-01 | 2003-07-08 | Iridigm Display Corporation | Hermetic seal and method to create the same |
| US6600201B2 (en) | 2001-08-03 | 2003-07-29 | Hewlett-Packard Development Company, L.P. | Systems with high density packing of micromachines |
| US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
| US6590157B2 (en) * | 2001-09-21 | 2003-07-08 | Eastman Kodak Company | Sealing structure for highly moisture-sensitive electronic device element and method for fabrication |
| US6870581B2 (en) * | 2001-10-30 | 2005-03-22 | Sharp Laboratories Of America, Inc. | Single panel color video projection display using reflective banded color falling-raster illumination |
| US6776538B2 (en) * | 2001-12-12 | 2004-08-17 | Axsun Technologies, Inc. | MEMS tunable optical filter system with moisture getter for frequency stability |
| JP3881888B2 (en) * | 2001-12-27 | 2007-02-14 | セイコーエプソン株式会社 | Optical device manufacturing method |
| US6923625B2 (en) * | 2002-01-07 | 2005-08-02 | Integrated Sensing Systems, Inc. | Method of forming a reactive material and article formed thereby |
| JP2003217828A (en) | 2002-01-22 | 2003-07-31 | Seiko Epson Corp | Sealing board, manufacturing method for it, display device and electronic device |
| US6791660B1 (en) | 2002-02-12 | 2004-09-14 | Seiko Epson Corporation | Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances |
| US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
| US6793829B2 (en) * | 2002-02-27 | 2004-09-21 | Honeywell International Inc. | Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices |
| DE10392340T5 (en) | 2002-03-05 | 2005-04-07 | Corning Incorporated | Optical elements and methods for predicting the performance of an optical element and optical system |
| US6707351B2 (en) * | 2002-03-27 | 2004-03-16 | Motorola, Inc. | Tunable MEMS resonator and method for tuning |
| US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
| US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
| US20030202264A1 (en) | 2002-04-30 | 2003-10-30 | Weber Timothy L. | Micro-mirror device |
| US20040212026A1 (en) | 2002-05-07 | 2004-10-28 | Hewlett-Packard Company | MEMS device having time-varying control |
| DE10224780A1 (en) | 2002-06-04 | 2003-12-18 | Linde Ag | High-velocity cold gas particle-spraying process for forming coating on workpiece, is carried out below atmospheric pressure |
| US6741377B2 (en) * | 2002-07-02 | 2004-05-25 | Iridigm Display Corporation | Device having a light-absorbing mask and a method for fabricating same |
| TW544787B (en) * | 2002-09-18 | 2003-08-01 | Promos Technologies Inc | Method of forming self-aligned contact structure with locally etched gate conductive layer |
| US6747785B2 (en) * | 2002-10-24 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | MEMS-actuated color light modulator and methods |
| US6666561B1 (en) | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
| US7370185B2 (en) | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| KR100474455B1 (en) * | 2002-11-08 | 2005-03-11 | 삼성전자주식회사 | Method and device for mounting vacumm of micro electro mechanical system at wafer level |
| US6741503B1 (en) | 2002-12-04 | 2004-05-25 | Texas Instruments Incorporated | SLM display data address mapping for four bank frame buffer |
| US7205675B2 (en) | 2003-01-29 | 2007-04-17 | Hewlett-Packard Development Company, L.P. | Micro-fabricated device with thermoelectric device and method of making |
| US20040147056A1 (en) | 2003-01-29 | 2004-07-29 | Mckinnell James C. | Micro-fabricated device and method of making |
| US6903487B2 (en) | 2003-02-14 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with increased mirror tilt |
| US20040166603A1 (en) | 2003-02-25 | 2004-08-26 | Carley L. Richard | Micromachined assembly with a multi-layer cap defining a cavity |
| US6844953B2 (en) | 2003-03-12 | 2005-01-18 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
| US20040189195A1 (en) * | 2003-03-24 | 2004-09-30 | Osram Opto Semiconductors Gmbh | Devices including, methods using, and compositions of reflowable getters |
| JP2004296202A (en) | 2003-03-26 | 2004-10-21 | Tohoku Pioneer Corp | Organic el panel and its manufacturing method |
| US7371452B2 (en) | 2003-04-28 | 2008-05-13 | Eastman Kodak Company | Conductive patterned sheet utilizing multi-layered conductive conduit channels |
| US6741384B1 (en) | 2003-04-30 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Control of MEMS and light modulator arrays |
| US7358966B2 (en) | 2003-04-30 | 2008-04-15 | Hewlett-Packard Development Company L.P. | Selective update of micro-electromechanical device |
| US6829132B2 (en) * | 2003-04-30 | 2004-12-07 | Hewlett-Packard Development Company, L.P. | Charge control of micro-electromechanical device |
| US7400489B2 (en) | 2003-04-30 | 2008-07-15 | Hewlett-Packard Development Company, L.P. | System and a method of driving a parallel-plate variable micro-electromechanical capacitor |
| US7072093B2 (en) * | 2003-04-30 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Optical interference pixel display with charge control |
| US6853476B2 (en) | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
| US6819469B1 (en) | 2003-05-05 | 2004-11-16 | Igor M. Koba | High-resolution spatial light modulator for 3-dimensional holographic display |
| US7218499B2 (en) | 2003-05-14 | 2007-05-15 | Hewlett-Packard Development Company, L.P. | Charge control circuit |
| US6917459B2 (en) | 2003-06-03 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | MEMS device and method of forming MEMS device |
| US6811267B1 (en) | 2003-06-09 | 2004-11-02 | Hewlett-Packard Development Company, L.P. | Display system with nonvisible data projection |
| US7279431B2 (en) | 2003-06-18 | 2007-10-09 | Semitool, Inc. | Vapor phase etching MEMS devices |
| US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
| US7190380B2 (en) * | 2003-09-26 | 2007-03-13 | Hewlett-Packard Development Company, L.P. | Generating and displaying spatially offset sub-frames |
| US7173314B2 (en) * | 2003-08-13 | 2007-02-06 | Hewlett-Packard Development Company, L.P. | Storage device having a probe and a storage cell with moveable parts |
| US20050057442A1 (en) * | 2003-08-28 | 2005-03-17 | Olan Way | Adjacent display of sequential sub-images |
| US20050068583A1 (en) * | 2003-09-30 | 2005-03-31 | Gutkowski Lawrence J. | Organizing a digital image |
| US6861277B1 (en) * | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
| US20050093134A1 (en) * | 2003-10-30 | 2005-05-05 | Terry Tarn | Device packages with low stress assembly process |
| US7105960B2 (en) * | 2004-02-24 | 2006-09-12 | Denso Corporation | Generator mountable to vehicle |
| US7060895B2 (en) * | 2004-05-04 | 2006-06-13 | Idc, Llc | Modifying the electro-mechanical behavior of devices |
| US7164520B2 (en) | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
| US7327510B2 (en) * | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
-
2004
- 2004-05-12 US US10/844,819 patent/US7164520B2/en not_active Expired - Fee Related
-
2005
- 2005-04-20 SG SG200706523-8A patent/SG136124A1/en unknown
- 2005-04-20 CA CA2564037A patent/CA2564037C/en not_active Expired - Fee Related
- 2005-04-20 KR KR1020067025535A patent/KR101118067B1/en not_active IP Right Cessation
- 2005-04-20 EP EP08168731A patent/EP2028521A1/en not_active Withdrawn
- 2005-04-20 WO PCT/US2005/013464 patent/WO2005114294A1/en active Application Filing
- 2005-04-20 EP EP05738076A patent/EP1751603A1/en not_active Withdrawn
- 2005-04-27 MY MYPI20051837A patent/MY139178A/en unknown
- 2005-05-04 TW TW094114334A patent/TWI291219B/en not_active IP Right Cessation
-
2007
- 2007-01-12 US US11/653,088 patent/US7443563B2/en active Active
-
2008
- 2008-01-24 US US12/019,590 patent/US7816710B2/en not_active Expired - Fee Related
-
2010
- 2010-10-14 US US12/904,825 patent/US8853747B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20070170568A1 (en) | 2007-07-26 |
| US20080164544A1 (en) | 2008-07-10 |
| US20110053304A1 (en) | 2011-03-03 |
| EP1751603A1 (en) | 2007-02-14 |
| TW200608531A (en) | 2006-03-01 |
| US8853747B2 (en) | 2014-10-07 |
| WO2005114294A1 (en) | 2005-12-01 |
| EP2028521A1 (en) | 2009-02-25 |
| SG136124A1 (en) | 2007-10-29 |
| US20050254115A1 (en) | 2005-11-17 |
| KR101118067B1 (en) | 2012-02-24 |
| MY139178A (en) | 2009-08-28 |
| KR20070016162A (en) | 2007-02-07 |
| US7164520B2 (en) | 2007-01-16 |
| US7816710B2 (en) | 2010-10-19 |
| CA2564037C (en) | 2012-08-07 |
| US7443563B2 (en) | 2008-10-28 |
| TWI291219B (en) | 2007-12-11 |
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| EEER | Examination request | ||
| MKLA | Lapsed |
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