CN100401015C - Two dimensional raler reading head mechanism - Google Patents

Two dimensional raler reading head mechanism Download PDF

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Publication number
CN100401015C
CN100401015C CNB2004100024106A CN200410002410A CN100401015C CN 100401015 C CN100401015 C CN 100401015C CN B2004100024106 A CNB2004100024106 A CN B2004100024106A CN 200410002410 A CN200410002410 A CN 200410002410A CN 100401015 C CN100401015 C CN 100401015C
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China
Prior art keywords
hollow cone
diffraction
cone body
time
reading head
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Expired - Lifetime
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CNB2004100024106A
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Chinese (zh)
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CN1648598A (en
Inventor
林庆芳
高清芬
张中柱
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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Abstract

The present invention relates to a two-dimensional ruler reading head which comprises a lens seat group fixing seat, a hollow cone, a plurality of diffraction lens seats and a light source seat, wherein an included angle between the conical surface and the center line of the hollow cone is a diffraction included angle. The diffraction lens seats utilize the hollow cone to position angles; therefore, the diffraction lens seats can keep the same angle relative to the center line of the hollow cone. Required processing cost and angle error caused by keeping the same angle of the diffraction lens seats are decreased.

Description

Two dimension ruler reading head mechanism
Technical field
The invention relates to a kind of two-dimentional ruler reading head mechanism, refer to a kind of two-dimentional ruler reading head mechanism that is applicable to measuring two dimensional direction amount of movement especially.
Background technology
The two dimension chi is a measuring element for the two-dimensional directional amount of movement, and it mainly comprises two-dimensional grating chi and two-dimentional ruler reading head mechanism.Two-dimensional grating chi and two-dimentional ruler reading head are individually fixed in two objects that desire produces relative motion, when these two objects produce relative motion, can read the distance of two articles institute relative motion by two-dimentional chi, the principle of its running can be with reference to Taiwan patent announcement numbers 479125, patent name " a kind of conjugated optical channels formula two-dimension displacement measurement method ", and explain in following part omitted.
As shown in Figure 1, when two-dimentional diffraction grating 2 produces two-dimentional aspect mobile, because Doppler frequency shift effect (doppler effect), diffraction light 3 inside first time that incident light 1 is for the first time produced have the relevant phase-shift signal of two dimensional motion displacement, and incident light 1 is the first diffraction angle θ (as shown in Figure 2) with angle between the first time diffraction light 3 for the first time.After diffraction light 3 reflects via diffraction lens base group 4 for the first time, light source as the incident light second time, and reflex to two-dimentional diffraction grating 2 to produce diffraction light 5 for the second time, and received by the optical signal receiver (not shown), light intensity signal via the signal receiver acquisition diffraction light second time 5, and after being converted into electronic signal, promptly can be used for high-precision displacement examining system.
For reach several for the second time diffraction light 5 can overlap producing interference effect, and receive diffraction light 5 for the second time, to carry out follow-up processing by optical signal receiver.So the optical axis of several diffraction lens base groups 4 is necessary identical with the center line angle of incident light 1 first time, and when the optical axis included angle of diffraction lens base group 4 equals the first diffraction angle θ, can obtain preferable signal light intensity.Yet, diffraction lens base group 4 is to be fixed in the fixed mount (not shown), and use the mode of sealed or processing engaging, and cooperate manual synchronizing with fixing, not only the optical axis of 4 of several diffraction lens base groups and the angle of incident light 1 for the first time are not easy identically, and also are easy to generate error when wishing to get the best first diffraction angle θ, and can't effectively diffraction lens base group 4 be fixed in the fixed mount, the error that this will cause two-dimentional dipstick metering to survey, this non-user institute desire is seen.
Summary of the invention
Fundamental purpose of the present invention is that a kind of two-dimentional ruler reading head mechanism is being provided, so that can guarantee that angle that the diffraction lens base group places is for correctly to increase the intensity of signal.
Another object of the present invention is in that a kind of two-dimentional ruler reading head mechanism is provided, so that can reduce the manufacturing cost of two-dimentional ruler reading head device.
For reaching above-mentioned purpose, the present invention discloses a kind of two-dimentional ruler reading head mechanism, in order to moving of the two-dimensional directional that measures a two-dimensional grating chi, it is characterized in that it comprises:
One mirror seat set holder comprises a circular hole, most plane, reaches an end face;
One hollow cone body is placed in this circular hole, and this hollow cone body comprises a hollow hole, a circular conical surface, reaches an end face, and this hollow hole runs through the center line of this hollow cone body;
Most diffraction lens base groups, in order to be coupled to this majority plane and this circular conical surface, making the optical axis of this majority diffraction lens base group is to be identical angle with the angle of the center line of this hollow cone body; And
One light source base is in order to assemble a light source generator and to be coupled the end face of this light source generator to this mirror seat set holder and this hollow cone body.
Wherein, when a first time, incident light was incident to the two-dimensional grating chi by this hollow hole, to reflect most diffraction light for the first time to this majority diffraction lens base group, this majority diffraction lens base group according to this majority for the first time diffraction light and reflex to this two-dimensional grating chi producing most incident lights for the second time to produce most diffraction light for the second time.
Wherein, this, incident light was a center line by this hollow cone body first time.
Wherein, the angle of the center line of this circular conical surface and this hollow cone body is to be the diffraction angle.
Wherein, a bottom surface of this light source base is the end face that is coupled to this mirror seat set holder and this hollow cone body, and with this end face of this hollow cone body and this end face of this mirror seat set holder be to be copline.
According to another characteristic of the present invention, a kind of two-dimentional ruler reading head of the present invention mechanism in order to moving of the two-dimensional directional that measures a two-dimensional grating chi, is characterized in that it comprises:
One mirror seat set holder comprises a circular hole, most plane, reaches an end face;
One hollow cone body is placed in this circular hole, and this hollow cone body comprises a hollow hole, a circular conical surface, reaches an end face, and this hollow hole is the center line that runs through this hollow cone body; And
Most diffraction lens base groups are in order to being coupled to this majority plane and this circular conical surface, and making the optical axis of this majority diffraction lens base group is to be identical angle with the angle of the center line of this hollow cone body.
Wherein, when a first time, incident light was incident to this two-dimensional grating chi by this hollow hole, to reflect most diffraction light for the first time to this majority diffraction lens base group, this majority diffraction lens base group according to this majority for the first time diffraction light and reflex to this two-dimensional grating chi producing most incident lights for the second time to produce most diffraction light for the second time.
It is characterized in that wherein, this, incident light was the center line by this hollow cone body first time.
Wherein, the angle of the center line of this circular conical surface and this hollow cone body is the diffraction angle.
Description of drawings
For allowing the auditor can more understand technology contents of the present invention, as follows especially exemplified by a preferred embodiment and accompanying drawings, wherein:
Fig. 1 is the synoptic diagram of existing two-dimentional chi.
Fig. 2 is the synoptic diagram of the relation of incident light and two-dimentional diffraction grating for the first time.
Fig. 3 is the synoptic diagram of the present invention's two dimension ruler reading head mechanism.
Fig. 4 is the top view of the present invention's two dimension ruler reading head mechanism.
Fig. 5 is the top view with the present invention's two dimension ruler reading head mechanism of light source base.
Fig. 6 is the outboard profile with the present invention's two dimension ruler reading head mechanism of light source base.
Embodiment
With reference to figure 3,4 and 5, the present invention two dimension ruler reading head mechanism comprises: most diffraction lens base groups 14, hollow cone body 16, mirror seat set holder 17, and light source base 18.It is three that the number of most diffraction lens base groups 14 is preferably, and its function is identical with known most diffraction lens base group 4, also seldom explains at this.Light source base 18 is in order to fixed light source generator (not shown) and mirror seat set holder 17.Mirror seat set holder 17 has most planes 72,73, reaches 74, can be respectively in order to be coupled to first plane of single diffraction lens base group 14, and the plane can be with the coupling scheme on first plane of diffraction lens base group engage, mode such as sealed, applying, be preferably to sealed.Mirror seat set holder 17 has more circular hole 171, can be in order to ccontaining hollow cone body 16, and the circular conical surface 63 of hollow cone body 16 can be close in second plane of single diffraction lens base group 14.The hollow hole 61 of hollow cone body 16 is the center lines that run through hollow cone body 16, makes that for the first time incident light 1 not only can be by the hollow hole 61 of hollow cone body 16, and incident light 1 more can advance along the center line of hollow cone body 16 for the first time; In addition, its circular conical surface 63 has identical angle with respect to its center line, when this angle equals for the first time diffraction angle θ, diffraction lens base group 14 promptly has the identical diffraction angle θ first time with respect to the center line of hollow cone body 16, at this moment, the optical axis of diffraction lens base group 14 can with diffraction light 3 the central lines first time, making for the first time, diffraction light 3 can be used as the light source of incident light for the second time.Thus, when the first time, incident light 1 was injected by the hollow hole 61 of hollow cone body 16, because two-dimentional diffraction grating 2 is caused first time, diffraction light 3 can be incident to diffraction lens base group 14, and as the light source of incident light for the second time, to produce diffraction light 5 for the second time.
As shown in Figure 6, when the user desired permanently hollow cone body 16 to be placed the circular hole 171 of mirror seat set holder 17, the user can be coupled to light source base 18 hollow cone body 16 and mirror seat set holder 17, and fixes it.The bottom surface 82 of light source base 18 is to be copline with the end face 75 of mirror seat set holder 17 and the end face 64 of hollow cone body 16, with the height of control hollow cone body 16.Wherein, light source base 18 can be with the coupling scheme of mirror seat set holder 17 with hollow cone body 16 and light source base 18 engage, mode such as sealed, applying, be preferably to sealed.
Yet, when the user uses hollow cone body 16 to adjust the angle (the first diffraction angle θ) of diffraction lens base group 14, make diffraction lens base group 14 optical axis can with first time diffraction light 3 central lines after, the removable hollow cone body 16 of user, under no external force gets involved, the angle of diffraction lens base group 14 will can not change, and need not to adjust yet, thus, the user need not use light source base 18 with coupling diffraction lens base group 14 and hollow cone body 16.
Because the making of hollow cone body 16 is easy, and the angle of its circular conical surface 63 is an equal angles, can set according to user's requirement, and also handling ease of most planes of mirror seat set holder 17, by the cooperation of above-mentioned two elements, can adjust the angle of diffraction lens base group 14, and meet the requirement of the first diffraction angle θ, not only simple, its required processing cost is low than known technology also.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.

Claims (9)

1. two-dimentional ruler reading head mechanism in order to moving of the two-dimensional directional that measures a two-dimensional grating chi, is characterized in that it comprises:
One mirror seat set holder comprises a circular hole, most plane, reaches an end face;
One hollow cone body is placed in this circular hole, and this hollow cone body comprises a hollow hole, a circular conical surface, reaches an end face, and this hollow hole runs through the center line of this hollow cone body;
Most diffraction lens base groups, in order to be coupled to this majority plane and this circular conical surface, making the optical axis of this majority diffraction lens base group is to be identical angle with the angle of the center line of this hollow cone body; And
One light source base is in order to assemble a light source generator and to be coupled the end face of this light source generator to this mirror seat set holder and this hollow cone body.
2. two-dimentional ruler reading head as claimed in claim 1 mechanism, it is characterized in that, wherein, when a first time, incident light was incident to this two-dimensional grating chi by this hollow hole, to reflect most diffraction light for the first time to this majority diffraction lens base group, this majority diffraction lens base group according to this majority for the first time diffraction light and reflex to this two-dimensional grating chi producing most incident lights for the second time to produce most diffraction light for the second time.
3. two-dimentional ruler reading head as claimed in claim 2 mechanism is characterized in that, wherein, this, incident light was the center line by this hollow cone body first time.
4. two-dimentional ruler reading head as claimed in claim 1 mechanism is characterized in that wherein, the angle of the center line of this circular conical surface and this hollow cone body is to be the diffraction angle.
5. two-dimentional ruler reading head as claimed in claim 1 mechanism, it is characterized in that, wherein, a bottom surface of this light source base is the end face that is coupled to this mirror seat set holder and this hollow cone body, and with this end face of this hollow cone body and this end face of this mirror seat set holder be to be copline.
6. two-dimentional ruler reading head mechanism in order to moving of the two-dimensional directional that measures a two-dimensional grating chi, is characterized in that it comprises:
One mirror seat set holder comprises a circular hole, most plane, reaches an end face;
One hollow cone body is placed in this circular hole, and this hollow cone body comprises a hollow hole, a circular conical surface, reaches an end face, and this hollow hole runs through the center line of this hollow cone body; And
Most diffraction lens base groups, in order to be coupled to this majority plane and this circular conical surface, making the optical axis of this majority diffraction lens base group is to be identical angle with the angle of the center line of this hollow cone body.
7. two-dimentional ruler reading head as claimed in claim 6 mechanism, it is characterized in that, wherein, when a first time, incident light was incident to this two-dimensional grating chi by this hollow hole, to reflect most diffraction light for the first time to this majority diffraction lens base group, this majority diffraction lens base group according to this majority for the first time diffraction light and reflex to this two-dimensional grating chi producing most incident lights for the second time to produce most diffraction light for the second time.
8. two-dimentional ruler reading head as claimed in claim 7 mechanism is characterized in that, wherein, this for the first time incident light by the center line of this hollow cone body.
9. two-dimentional ruler reading head as claimed in claim 6 mechanism, wherein, the angle of the center line of this circular conical surface and this hollow cone body is the diffraction angle.
CNB2004100024106A 2004-01-29 2004-01-29 Two dimensional raler reading head mechanism Expired - Lifetime CN100401015C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2004100024106A CN100401015C (en) 2004-01-29 2004-01-29 Two dimensional raler reading head mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2004100024106A CN100401015C (en) 2004-01-29 2004-01-29 Two dimensional raler reading head mechanism

Publications (2)

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CN1648598A CN1648598A (en) 2005-08-03
CN100401015C true CN100401015C (en) 2008-07-09

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4880991A (en) * 1987-11-09 1989-11-14 Industrial Technology Institute Non-contact dimensional gage for turned parts
US5307152A (en) * 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US6259519B1 (en) * 1999-08-31 2001-07-10 Intelligent Machine Concepts, L.L.C. Method of determining the planar inclination of a surface
TW479125B (en) * 2001-05-25 2002-03-11 Ind Tech Res Inst Two dimensional displacement measurement method with conjugate optical paths

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4880991A (en) * 1987-11-09 1989-11-14 Industrial Technology Institute Non-contact dimensional gage for turned parts
US5307152A (en) * 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US6259519B1 (en) * 1999-08-31 2001-07-10 Intelligent Machine Concepts, L.L.C. Method of determining the planar inclination of a surface
TW479125B (en) * 2001-05-25 2002-03-11 Ind Tech Res Inst Two dimensional displacement measurement method with conjugate optical paths

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