CN100437100C - Instrument for measuring surface work function - Google Patents
Instrument for measuring surface work function Download PDFInfo
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- CN100437100C CN100437100C CNB2005100277424A CN200510027742A CN100437100C CN 100437100 C CN100437100 C CN 100437100C CN B2005100277424 A CNB2005100277424 A CN B2005100277424A CN 200510027742 A CN200510027742 A CN 200510027742A CN 100437100 C CN100437100 C CN 100437100C
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Abstract
The present invention relates to an instrument for measuring surface work functions, which comprises a standard template, an adjustable direct current power supply, an alternate current measurement meter, an oscillation source or a chopping piece, wherein a capacitor pole plate is composed of the standard template and a measured sample plate; the adjustable direct current power supply is connected between the standard template and the measured sample plate; the alternate current measurement meter is connected in series with the adjustable direct current power supply; the oscillation source is added to the standard template; the chopping piece is inserted between the standard template and the measured sample plate. The present invention has the characteristics of no need of scanning, larger measuring area, simple structure, convenient sample exchange and easy regulation.
Description
Technical field
The present invention relates to a kind of instrument for measuring surface work function, be used to measure conductor, semiconductor, the work function on metal or surface such as nonmetal.
Background technology
The definition of work function is that an electronics is moved to the needed minimum energy of outer surface from material internal.And this work function is easy to be subjected to the influence of its surface nature, as absorption for gas and aqueous vapor, and the pollution of organic or inorganic thing, the variation of surface chemistry component and the influence of specific coatings etc.Therefore it can be used for judging cleanliness, the quality of surface quality and the situation of surface contamination on surface.Especially the variation of the work function before and after special processing is particularly useful to the effect of judgment processing on the surface.As in the preparation of organic electroluminescence device, the cleaning of electro-conductive glass and the size of work function are very big to the performance impact of device.When electro-conductive glass after UV ozone or Cement Composite Treated by Plasma because the organism of surface adsorption is removed, and its work function has tangible increase, thereby can judge the degree of cleaning surfaces and the condition of rationally handling.To the influence of work function, the performance of device is also played a big part under the plated film condition of these external various metal electrodes.
The ultimate principle of surface work function tester is based on when metal connects can form contact potential difference, and the difference that the value of its contact potential difference equals their work function is divided by electron charge e:
V
12＝(φ
1-φ
2)/e ……(1)
(1) in the formula, V
12Metal Contact potential difference (PD) when contacting with conductive material 2 for conductive material 1,
φ
1Be the work function of conductive material 1, φ
2It is the work function of conductive material 2.
When these two kinds of materials form a capacitor, promptly be equivalent to add a V at the two end electrodes plate of capacitor
12Voltage.Therefore when changing electric capacity, will produce electric current.Equate but the opposite current potential-V of direction when between this two battery lead plate, adding a numerical value
12The time, just can not produce electric current.Therefore in the time of can measuring its exchange current and be zero-V
12Measure the poor of work function between material 1 and 2.If wherein the work function of material 1 is known then can measures the work function of material 2.
Formerly in the technology, with " Kai Erwen probe " measure and monitor the growth of standing timber the material work function, (as McAllister Kp6500digital Kelvin probe), the principle of its structure also is based on the mode of capacitance-type vibration, but it is to use probe measurement, the area of test is little, and it can scan certainly, but structure is complicated.Require the condition of use harsh, cost an arm and a leg.Chinese patent ZL 01216763.0 provides a kind of " Kai Erwen capacitance-type vibration current potential is surveyed probe ", based on same structural principle, measures the scanning of current potential collection of illustrative plates with it.Its feature is that the oscillation source of probe is a piezo-ceramic vibrators, has the little problem of test area too.
Summary of the invention
The objective of the invention is in order to overcome above-mentioned deficiency in technology, a kind of scanning that need not is provided, just can measure the larger area sample, instrument for measuring surface work function simple in structure.
To achieve the above object, the technical solution used in the present invention is: it comprises the standard form that can constitute capacitor plate with the sample plate, is connected adjustable direct supply between standard form and the sample plate and the ac current measurement instrument of connecting with adjustable direct supply.For making the capacitor vibration between standard form and the sample plate two-plate, be added in the oscillation source on the standard form, perhaps insert the copped wave sheet between standard form and the sample plate.
The present invention such as above-mentioned structure, standard form and sample plate (being dull and stereotyped) constitute two pole plates of capacitor, add vibration source on standard form, or insert the copped wave sheet between two-plate, make and space change between the two-plate promptly changed the electric capacity between the two-plate.Regulate adjustable direct supply, make the current value on its ac current measurement instrument be " 0 ".At this moment, i.e. magnitude of voltage V between the two-plate
12Equal the magnitude of voltage on the regulated power supply, just the utmost point is-V on the contrary
12According to above-mentioned formula (1), get sample plate V
2Surface work function φ
2For:
φ
2＝φ
1-V
12·e ........(2)
(2) in the formula, φ
1For the surface work function of standard form is known.
V
12Being the magnitude of voltage on the adjustable direct supply, also is as can be known.
E is that the electron charge of sample plate can be tabled look-up.
Surface work function tester of the present invention such as above-mentioned structure have solved formerly in the technology " Kai Erwen probe " not little problem of scanning survey area.The present invention need not scanning, and survey area is just bigger.The fairly simple compactness of apparatus structure, the transposing sample is convenient, adjusts easily.Therefore, cost is also cheaper.The data of measuring can be dripped the requirement of foot to sample apparent surface changed condition fully.
Description of drawings
Fig. 1 is the structural representation of instrument for measuring surface work function the 1st embodiment of the present invention.
Fig. 2 is the structural representation of instrument for measuring surface work function the 2nd embodiment of the present invention.
Fig. 3 is the structural representation of instrument for measuring surface work function the 3rd embodiment of the present invention.
Fig. 4 is the structural representation of instrument for measuring surface work function the 4th embodiment of the present invention.
Fig. 5 is the structural representation of instrument for measuring surface work function the 5th embodiment of the present invention.
Fig. 6-1, Fig. 6 the-the 2nd, the structural representation of instrument for measuring surface work function the 6th embodiment of the present invention.
Fig. 7 is to use sample surface work function that instrument for measuring surface work function of the present invention the records change curve with the surface treatment time.
Embodiment
Further specify the structure of instrument for measuring surface work function of the present invention below in conjunction with drawings and Examples.
Fig. 1 is the 1st an embodiment synoptic diagram of the present invention, and as shown in Figure 1, standard form 1 and sample plate 2 constitute two pole plates of capacitors.The ac millivoltmeter 3 that between standard form 1 and sample plate 2, is connected with adjustable direct supply 5 and connects as the ac current measurement instrument with adjustable direct supply 5.Being added with as oscillation source on standard form 1 is the oscillator coil 7 of being powered by AC power 6.
The flat board that described standard form 1 comprises surfacing covers the golden film or the Copper Foil of substrate surface as substrate, or metal oxide film etc.Substrate can be a circuit board, or sandwich plate, glass plate etc.
Fig. 2 is the 2nd an embodiment synoptic diagram of the present invention.Different is that to change standard form 1 be the dielectric rotating disk 9 of between insertion as the copped wave sheet with electric capacity between the sample plate 2 for Fig. 2 and embodiment shown in Figure 1.In the present embodiment, have a cycle as the dielectric rotating disk 9 of copped wave sheet and cut hole (as shown in Figure 2), and be contained on the motor 8 by AC power 6 power supplies.
Described copped wave sheet is a kind of high dielectric-constant dielectric thin slice that has.As potsherd, or sheet metal etc.
The thickness of copped wave sheet is generally 0.3mm～0.5mm.
Fig. 3 is the 3rd embodiment of the present invention.Different is for embodiment shown in Figure 3 and Fig. 1 embodiment: the vibration source that is added on the standard form 1 is that the ac current measurement instrument is an oscillograph 10 by the loudspeaker 11 of AC power 6 power supplies.Among Fig. 3, standard form 1 one side is as constituting the standard electric pole plate of capacitors with sample plate 2, and another side ground connection is with the shielding undesired signal.
Fig. 4 is the 4th embodiment of the present invention.Different is for embodiment shown in Figure 4 and Fig. 1 embodiment: the vibration source that is added on the on-gauge plate 1 is the piezoelectric ceramic loudspeaker 11 that is driven by audio frequency oscillator 15.The ac current measurement instrument is the amplifier 14 of connecting successively, phase-sensitive detector (PSD) 13 and galvanometer 12.The measured ac current signal remolding sensitivity of the measurement instrument of this structure is higher.With the embodiment of Fig. 3, standard form 1 one side is as constituting the standard electric pole plate of capacitors with sample plate 2, and another side ground connection is with the shielding undesired signal.
Fig. 5 is the 5th embodiment of the present invention.Embodiment shown in Figure 5 and embodiment shown in Figure 2 are inserting being contained in by the dielectric rotating disk 9 on the motor 8 of AC power 6 power supplies as the copped wave sheet between standard form 1 and the sample plate 2.Different is that the ac current measurement instrument is an oscillograph 10, and the synchronous signal input end of oscillograph 10 is connected on the photoswitch 16 that places on the dielectric rotating disk 9.Make the signal that shows on the oscillograph 10 and the rotation of dielectric rotating disk 9 like this, just and between standard form 1 and the sample plate 2, the signal of capacitance variations is synchronous.It is this that to measure its AC power interference ratio with synchronizing signal less.Identical with the embodiment of Fig. 4, standard form 1 one side is as constituting the standard electric pole plate of capacitors with sample plate 2, and another side ground connection is with the shielding undesired signal.
Fig. 6-1, Fig. 6 the-the 2nd, and the 6th embodiment of the present invention is the embodiment of inner concrete physical construction.Fig. 6-the 1st wherein, front view, Fig. 6-the 2nd, left view.Shown in Fig. 6-1, Fig. 6-2.
The internal mechanical structure of measuring instrument of the present invention comprises: the standard form box for putting 100 and the sample pressure accumulator 200 that is pressed on the sample plate 2 of putting standard form 1.
Described standard form box for putting 100 comprises by lower wall 105, places cylinder 104 and middle upward dish 101 casings that constituted that have step through-hole on the lower wall 105; Place the inner disc 102 in the casing, the set screw 103 that inner disc 102 is connected with last dish 101.Be fixed in the oscillation source 11 on the inner disc 102.Place the standard form 1 in the band step through-hole on the dish 101.Be connected in the joint pin 106 between standard form 1 and the oscillation source 11.Place the sample spring electrode 107 around the band step through-hole on the dish 101. Sample spring electrode 107 and 2 crimping of sample plate are as the extraction electrode of sample plate 2.In the present embodiment, oscillation source is a Yang Sheng device 11.Standard form 1 is connected with Yang Sheng device 11 by joint pin 106.Specifically, standard form 1 is connected on the vibrating voice coil in the Yang Sheng device 11 by joint pin 106.
Described sample pressure accumulator 200 comprises: upright piece 209, place the lower lock block 207 that stands piece 209 lower ends, and place the upper holder block 208 above the lower lock block 207, place the bottom of standing in piece 209 tops to have the Jar with spring 204 of through hole.Place the centre at upright piece 209 tops to have the horizontal piece 203 on Jar with spring 204 of covering of through hole.Place spring 205 and internal gasket 206 in the Jar with spring 204.And the through hole that passes through hole on the horizontal piece 203, spring 205, internal gasket 206, Jar with spring 204 bottoms is connected the pull bar that has pull-button 201 202 on upper holder block 208 and the lower lock block 207.That is to say, have draw turn round 201 pull bar 202 by horizontal piece 203 through hole and the through hole of Jar with spring 204 is connected with lower lock block 207 with upper holder block 208 by the pressure of internal gasket 206 in the Jar with spring 204 and spring 205 and can have certain rotation to make the plane of the lower plane of lower lock block 207 and sample plate 2 and last dish 101 identical.
When measuring, sample plate 2 is seated on the loam cake 101 of standard form box for putting 100, is subjected to the pressure of the lower lock block 207 of sample pressure accumulator 200 to be pressed on two pole plates that constitute capacitor on the upper surface of loam cake 101 with standard form 1.Sample spring electrode 107 on the loam cake 101 and 2 crimping of sample plate as the extraction electrode line of sample plate to circuit board.Can regulate the distance and the depth of parallelism between sample plate 2 and the standard form 1 by regulating set screw 103, enough sensitivity be arranged with assurance.Be drawn out on the testing circuit board as another electrode of capacitor upper surface from standard form 1.For the lower surface ground connection of standard form 1 is disturbed in the interchange that prevents the loudspeaker power supply.
Fig. 7 is to use the measured result of instrument for measuring surface work function of the present invention.
Horizontal ordinate is that unit is minute (min) with the processing time (time) on treatment with ultraviolet light sample surface among Fig. 7, and ordinate is that surface work function (work Function) unit is electron-volt (Δ ev). Curve 01,02,03 is respectively the situation that three sample plates change along with its surface work function of time with treatment with ultraviolet light.Variation by surface work function shows the situation that goes up sample plate cleaning surfaces.
The condition of handling is that the glass plate that is coated with the ITO rete is dried after standard washing, puts into then in the UV-03 type ultraviolet bromine oxygen cleaning surfaces machine, handles the different time.
Condition one, measure the surface work function of the glass plate relative standard template of cleaned band ITO rete earlier, and then a glass plate of band ITO rete is placed on the bottom of the drawer of UV-03 type ultraviolet bromine oxygen surface cleaning machine, the ITO rete faces up, handle the different time, survey the raising of its apparent surface's work function again.Curve 03 among measurement result such as Fig. 7, icon are the sample plate of 03 " bottom/glass/ITO ".
Condition two.Measure the surface work function of two washed glass plate relative standard templates that have the ITO rete earlier, and then the back-to-back drawer that sample carrier is housed of putting into of glass plate of two band ITO retes, ITO rete face a slice of two glass sheets upwards, a slice is downward, handle the different time, survey the raising of their apparent surface's work function again. Curve 01,02 among measurement result such as Fig. 7 is denoted as 01 " carriage/glass/ITO " (referring to that ito surface upwards), the sample plate of 02 " carriage/ITO/ glass " (referring to that ito surface is downward) on its icon.
Claims (5)
1, a kind of instrument for measuring surface work function, comprise the standard form that can constitute capacitor plate with the sample plate, be connected adjustable direct supply between standard form and the sample plate and the ac current measurement instrument of connecting with adjustable direct supply, being added in Chun on the standard form swings the source or inserts copped wave sheet between standard form and the sample plate, it is characterized in that conduct of described standard form one side and sample plate constitute the standard electric pole plate of capacitor, another side ground connection is with the shielding undesired signal.
2. instrument for measuring surface work function according to claim 1 is characterized in that the internal mechanical structure of described measuring instrument comprises: the standard form box for putting and the sample pressure accumulator that is pressed on the sample plate of putting standard form; Described standard form box for putting comprises by lower wall, places cylinder and the middle casing that dish is constituted of going up that has step through-hole on the lower wall; Place the inner disc in the casing, the set screw that inner disc is connected with last dish, be fixed in the oscillation source on the inner disc, place the standard form that coils the band step through-hole, be connected in the joint pin of standard form and oscillation source, place coil band around the step through-hole with the sample spring electrode of sample plate lower surface crimping as sample plate extraction electrode; Described sample pressure accumulator comprises upright piece, place the lower lock block of upright piece lower end, place the upper holder block above the lower lock block, place the bottom of standing in the piece top to have the Jar with spring of through hole, place the centre at upright piece top to have the horizontal piece on Jar with spring of covering of through hole, place spring and internal gasket in the Jar with spring, and the through hole that passes through hole on the horizontal piece, spring, internal gasket, Jar with spring bottom is connected the pull bar that has pull-button on upper holder block and the lower lock block.
3. instrument for measuring surface work function according to claim 1 is characterized in that described copped wave sheet is a kind of high dielectric-constant dielectric thin slice that has.
4. instrument for measuring surface work function according to claim 3 is characterized in that described copped wave sheet is to have a cycle to cut the dielectric rotating disk in hole.
5. instrument for measuring surface work function according to claim 1 is characterized in that parallel flat that described standard form comprises surfacing is as substrate and cover golden film or Copper Foil or metal oxide film on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100277424A CN100437100C (en) | 2005-07-14 | 2005-07-14 | Instrument for measuring surface work function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100277424A CN100437100C (en) | 2005-07-14 | 2005-07-14 | Instrument for measuring surface work function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1712947A CN1712947A (en) | 2005-12-28 |
| CN100437100C true CN100437100C (en) | 2008-11-26 |
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|---|---|---|---|
| CNB2005100277424A Expired - Fee Related CN100437100C (en) | 2005-07-14 | 2005-07-14 | Instrument for measuring surface work function |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4100442A (en) * | 1976-03-30 | 1978-07-11 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Electrically driven oscillating capacitor device |
| US6097196A (en) * | 1997-04-23 | 2000-08-01 | Verkuil; Roger L. | Non-contact tunnelling field measurement for a semiconductor oxide layer |
| CN1301029A (en) * | 1999-12-22 | 2001-06-27 | 株式会社村田制作所 | Trimmer capacitors |
| CN2468039Y (en) * | 2001-02-26 | 2001-12-26 | 中国科学院海洋研究所 | Kelvin vibrating capacitance potential detecting probe |
-
2005
- 2005-07-14 CN CNB2005100277424A patent/CN100437100C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4100442A (en) * | 1976-03-30 | 1978-07-11 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Electrically driven oscillating capacitor device |
| US6097196A (en) * | 1997-04-23 | 2000-08-01 | Verkuil; Roger L. | Non-contact tunnelling field measurement for a semiconductor oxide layer |
| CN1301029A (en) * | 1999-12-22 | 2001-06-27 | 株式会社村田制作所 | Trimmer capacitors |
| CN2468039Y (en) * | 2001-02-26 | 2001-12-26 | 中国科学院海洋研究所 | Kelvin vibrating capacitance potential detecting probe |
Non-Patent Citations (6)
| Title |
|---|
| An acoustically driven Kelvin probe for work-functionmeasurements in gas ambient. Kendall B. Johnson,Wilford N. Hansen.Rev. Sci. Instrum.,Vol.66 No.4. 1995 |
| An acoustically driven Kelvin probe for work-functionmeasurements in gas ambient. Kendall B. Johnson,Wilford N. Hansen.Rev. Sci. Instrum.,Vol.66 No.4. 1995 * |
| 大气中测量功函数的Kelvin探头. 陈烈敏，黄金林，章壮健.仪器仪表学报，第9卷第1期. 1988 |
| 大气中测量功函数的Kelvin探头. 陈烈敏，黄金林，章壮健.仪器仪表学报，第9卷第1期. 1988 * |
| 测量固体表面功函数的几种Kelvin探针的研制. 魏赛珍，毛祖遂，潘涛.真空科学与技术，第8卷第6期. 1988 |
| 测量固体表面功函数的几种Kelvin探针的研制. 魏赛珍，毛祖遂，潘涛.真空科学与技术，第8卷第6期. 1988 * |
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| CN1712947A (en) | 2005-12-28 |
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