CN100440471C - Method for manufacturing electronic device - Google Patents

Method for manufacturing electronic device Download PDF

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Publication number
CN100440471C
CN100440471C CNB2006101628672A CN200610162867A CN100440471C CN 100440471 C CN100440471 C CN 100440471C CN B2006101628672 A CNB2006101628672 A CN B2006101628672A CN 200610162867 A CN200610162867 A CN 200610162867A CN 100440471 C CN100440471 C CN 100440471C
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China
Prior art keywords
ball
scolder
substrate
temperature
chip
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Expired - Fee Related
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CNB2006101628672A
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Chinese (zh)
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CN1983542A (en
Inventor
曾我太佐男
秦英惠
中塚哲也
根岸干夫
中嶋浩一
远藤恒雄
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Renesas Electronics Corp
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Hitachi Ltd
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457—Solder materials or compositions; Methods of application thereof
    • H05K3/3485—Applying solder paste, slurry or powder
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    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/11—Manufacturing methods
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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  • Wire Bonding (AREA)

Abstract

In an electronic device which realizes high-temperature-side solder bonding in temperature-hierarchical bonding, a bonding portion between a semiconductor device and a substrate is formed of metal balls made of Cu, or the like, and compounds formed of metal balls and Sn, and the metal balls are bonded together by the compounds.

Description

A kind of method of making electronic installation
The application is that application number is 03120151.2, the applying date is dividing an application of March 10, denomination of invention in 2003 application that is electronic installation.
Technical field
The present invention relates to the electronic installation of a kind of use lead-free solder (certain lead-free scolder), and the electronic installation that relates in particular to a kind of serviceability temperature level and make by welding joint method, this temperature level can be installed the module that is formed by electronic installation or the like effectively.
Background technology
Use the Sn lead-based solder carry out in conjunction with the time, adopt temperature level associated methods.In this combination technology, each element at first uses the used scolder of high-temperature soldering, as the scolder (fusing point: 314-310 degree centigrade) of the plumbous Pb-5Sn mass percent of richness or the scolder (fusing point: 302-275 degree centigrade) of Pb-10Sn mass percent, a temperature between 330 and 350 degrees centigrade is welded, then, use the used scolder of soldered, carry out another time welding and do not melt the part (hereinafter no longer indicate " mass percent ", only list numeral) of having welded as Sn-37Pb eutectic (183 degrees centigrade).In the semiconductor device fabrication processes of chip being carried out die attachment and use this temperature level associated methods of employing in the semiconductor device fabrication processes or the like of flip-chip associated methods.For instance, when forming BGA, WL-CSP (wafer level chip size package), multi-chip module (being abbreviated as MCM) and the like, need use this temperature level associated methods.In other words, in the semiconductor fabrication process, provide temperature level associated methods to become very important, this temperature level associated methods can once weld so that with the inside of each combination of elements in semiconductor device, and carries out another time welding so that semiconductor device self is incorporated on the substrate.
On the other hand, for some products, the situation of existence is, considers the thermal endurance restricted problem of each element thereby need carry out combination not being higher than under 290 degrees centigrade the temperature.As having the scolder that is in the composition in the used composition range of the high-temperature soldering that adapts to this requirement in the conventional type Sn lead-based solder, consideration be Pb-15Sn scolder (liquidus temperature: 183 degrees centigrade) and scolder with analogous components.Yet when Sn content was higher than this level, low temperature eutectic (183 degrees centigrade) will precipitate.In addition, when Sn content was lower than this level, liquidus temperature will raise so just be difficult to and carry out combination not being higher than under 290 degrees centigrade the temperature.Reason for this reason, even when being used to be incorporated into secondary soft heat scolder on the printed circuit board (PCB) and being eutectic Sn lead-based solder, problem is melted in the combination that also can not avoid high-temperature soldering occurring again.When lead-free solder was used for the secondary soft heat, cohesive process carried out under being in the 240-250 degree centigrade of temperature in the scope.This temperature is than using eutectic Sn lead-based solder to carry out in conjunction with about the high 20-30 of required temperature degree centigrade.Therefore, use no alucol not being higher than under 290 degrees centigrade the temperature in conjunction with becoming difficult more.
More specifically, also do not allow at present under the welding temperature in 330 to 350 degrees centigrade of scopes or the high-temp leadless welding material that carries out the combination of temperature level under 290 degrees centigrade the temperature levels.
Hereinafter this situation is described in detail.At present, according to environmental requirement, lead-free solder just is being applied in the increasing application scenario.For being used for element is welded in for the lead-free solder on the printed circuit board (PCB), eutectic SnAg parent metal, eutectic SnAgCu parent metal and eutectic SnCu parent metal are becoming main flow.Therefore, the welding temperature in the mounted on surface is in 240 to 250 degrees centigrade the scope usually.Yet the lead-free solder that still is not used in the temperature level of temperature end can be used from the mounted on surface with these low eutectic lead free solders one.Become the scolder of composition of the candidate of temperature end scolder as having most probable, can consider Sn-5Sb scolder (240-232 degree centigrade).Yet, the situation of irregular variation of temperature still of the substrate in the soft heat stove and so on be taken into account, still there is not the low-temperature end scolder with high reliability that can carry out the combination and can not melt the Sn-5Sb scolder.On the other hand, although Au-20Sn scolder (fusing point: 280 degrees centigrade) is counted as high-temperature solder, yet because it is that hard material and cost are very high, so its purposes is restricted.Particularly, with the Si chips incorporate on the material that has with the very big coefficient of expansion of the coefficient of expansion difference of Si chip or when combining large-sized Si chip, can not use this scolder, because it is too hard thereby may destroy the Si chip.
Summary of the invention
Consider above-mentioned situation, here just need a kind of technology so that can adapt to the requirement of using lead-free solder, and stable on heating not being higher than under 290 degrees centigrade the temperature that can be no more than each element in the module installation process uses the temperature end scolder to carry out in conjunction with (first soft heat), and the combination that can carry out subsequently uses Sn-3Ag-0.5Cu scolder (fusing point: 217-221 degree centigrade) that the terminal surfaces of module is installed on printed circuit board (PCB) or the suchlike external cabling terminal (secondary soft heat).For instance, developed a kind of module (for example high-frequency model) that is used for portable product, chip component and semiconductor chip wherein have been installed.In this module, chip component and semiconductor chip use high-temperature solder to be incorporated on the module substrate, and need to use calotte or by resin moulded they are encapsulated.According to its thermal endurance, these chip components require its cohesive process to carry out being higher than most under 290 degrees centigrade the temperature.Yet owing to use the temperature end scolder to carry out determining according to the thermal endurance of chip component in conjunction with required temperature, therefore this temperature is not to be limited to 290 degrees centigrade always.When the secondary soft heat of this module used the Sn-3Ag-0.5Cu scolder to carry out, welding temperature reached about 240 degrees centigrade.Therefore, also only be 232 degrees centigrade even consider the fusing point of the Sn-5Sb scolder that in all Sn parent metals, has peak melting point, and when comprising in the coating of chip electrode when plumbous or like that, the fusing point of scolder also can reduce, and therefore cannot avoid the welding portion of the chip component in the module owing to the secondary soft heat takes place to melt again.Therefore, even need a kind of system or method that when scolder melts again, also can not produce this class problem.
For solving this class problem, a kind of common way is to use lead-based solder under the highest 290 degrees centigrade temperature the chip matrix to be incorporated on the module substrate so that carry out the soft heat of chip component.Then, soft silicone gel is coated on the chip that toe-in closes, on the upper surface of module substrate, covers a calotte of making by Al etc., and use eutectic Sn-Pb scolder to carry out the secondary soft heat.Owing to use this formation, therefore in the secondary soft heat, even can not produce stress when a part of solder fusing of module joint, so chip can not move and can not produce the problem of high-frequency characteristic yet.Yet, need now to use no lead-based solder to carry out the secondary soft heat, simultaneously, must develop a kind of resin-encapsulated pattern piece so that reduce cost.In order to break through this situation, need to solve following problem:
1) must in air, carry out soft heat welding (the assurance heat resisting temperature of chip component: 290 degrees centigrade) under 290 degrees centigrade the temperature being higher than most.
2) (the highest 260 degrees centigrade) can not melt in the secondary soft heat, even perhaps melt, chip can not move (because if chip moves, high frequency characteristics will be affected).
3), can not produce short circuit because of the volumetric expansion of the scolder of chip component even when the scolder of inside modules takes place to melt again in the secondary softening-melting process.
Hereinafter the problem of finding when checking the evaluation result of RF (radio frequency) module is narrated.
In the RF module, chip component and module substrate use conventional lead-based solder to combine.Although the solidus of lead-based solder is 245 degrees centigrade, will be coated on the splicing ear of chip component by Sn lead-based solder coating, fusing again takes place thereby therefore will form low its melt of low temperature Sn lead base.The relation that various types of insulating resins that the short circuit incidence that produces owing to the outflow of scolder after the secondary installing soft heat is had different modulus of elasticity with respect to use carry out between the module that once-through operation encapsulates is studied.
The key diagram of Figure 12 (a) for flowing out shows the principle of the scolder stream in the secondary installing softening-melting process of the chip component in the module.Figure 12 (b) is the perspective view of an example of the scolder stream of chip component.
The mechanism that produces short circuit owing to the scolder outflow is as follows.The fusing that produces in the scolder of inside modules and the bulbs of pressure make peels off along the interface between chip component and the resin or along the generation of the interface between resin and the module substrate.Therefore, scolder flowed in the interface of peeling off in this moment, thereby so just made the terminal at two ends of element of mounted on surface be coupled to each other the generation short circuit.
By above research, obviously, because the modulus of elasticity of short circuit frequency that the scolder outflow produces and resin is proportional.In addition, obviously, the conventional type high-elasticity epoxy resin is also inapplicable, and, for soft silicone resin, when its modulus of elasticity at 180 degrees centigrade (fusing points of the plumbous eutectic of Sn) is relatively lower, just can not produce short circuit.
Yet in actual applications, what the low elasticity resin referred to is exactly silicone resin, and therefore, in the substrate partition process, because the performance of resin, the some parts of resin can not demarcate fully and may produce the situation that they are kept intact.In this case, just need a kind of method of using laser beam and so on that remainder is cut.On the other hand, when using common epoxy resin, can carry out machinery and divide, although produce short circuit thereby and inapplicable owing to it has high rigidity.Yet,, at present, be difficult in 180 degrees centigrade with the softening degree that extremely can not be short-circuited of resin according to resin property.If can carry out to play the mechanical protection effect and can also prevent the resin-encapsulated that scolder flows out simultaneously, just need not to use shell or calotte to cover, so cost be minimized.
In addition, welding joint method for the use leadless welding material that is used to make the electronic installation (a plurality of electronic installation) that comprises the RF module, particularly for the welding of carrying out at high temperature (solder bond temperature: about 240 degrees centigrade to 300 degrees centigrade) in air, the present inventor has carried out a large amount of tests and has obtained following result.Promptly, different with the welding of in inert gas (for example nitrogen environment), carrying out, weld in air and can make temperature end leadless welding material generation oxidation, this will produce serious problem in the solder bond process, for example reduce the welding wettability and the soldering reliability of combination.In addition, because therefore the diffusion rapidly in scolder of small metallic will quicken to form the process of compound thereby the fusing point that can raise.Therefore, can not carry out smoothly by the scolder distortion that release gas produces, thereby will comprise a large amount of spaces in the scolder.This phenomenon is not limited to the welding of radio-frequency module.
Therefore, an object of the present invention is to provide a kind of brand-new soldering paste, a kind of welding joint method and a kind of solder joints structure.Especially, an object of the present invention is to provide a kind of soldering paste, a kind of welding joint method and a kind of solder joints structure of considering airborne pb-free solder combination and developing.
Another object of the present invention provides the temperature level associated methods that a kind of use can at high temperature keep the scolder of bond strength.Especially, an object of the present invention is to provide a kind of temperature level associated methods, even when using lead-free to weld in air, it also can reduce void defects and keep in conjunction with reliability in the temperature end bound fraction.
Another object of the present invention provides a kind of electronic installation that comprises the solder bond part that can at high temperature keep bond strength.Especially, an object of the present invention is to provide a kind of electronic installation, even when in air, using lead-free to weld, it also can keep the temperature end bound fraction in conjunction with reliability.
Below to for realizing that the disclosed in this application typical essential characteristic of the present invention of above purpose summarizes.
The objective of the invention is to a kind of method of making electronic installation, wherein this electronic installation has the substrate that chip component and semiconductor chip are installed in the above, described method comprises: by scolder chip component is welded to described substrate, wherein scolder comprises Sn base soldered ball and the Metal Ball that is coated with N i layer and Au layer; It is characterized in that welding temperature is greater than the fusion temperature of Sn base soldered ball and less than the fusion temperature of Metal Ball.
The objective of the invention is to a kind of electronic component and electronic installation that the installation substrate of electronic component is installed of comprising in the above, wherein, the electrode of the electrode of electronic component and installation substrate partly is connected to each other by the solder bond that is formed by the scolder that comprises Sn base soldered ball and Metal Ball, wherein the fusing point of Metal Ball is higher than the fusing point of Sn soldered ball, and wherein the surface coverage of each Metal Ball has a Ni layer and is coated with an Au layer on the Ni layer.
The present invention also aims to a kind of semiconductor device and electronic installation that the installation substrate of semiconductor device is installed of comprising in the above, wherein, the electrode of semiconductor device and electrode utilization that substrate is installed are connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and each Metal Ball combines by the compound that is made of metal and Sn.
The present invention also aims to a kind of semiconductor device that comprises, one is installed with first substrate of semiconductor device and the electronic installation of second substrate that first substrate is installed in the above in the above, wherein, the electrode utilization of the electrode of semiconductor device and first substrate is connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and the electrode of the electrode of first substrate and second substrate is by each free Sn-Ag parent metal, the Sn-Ag-Cu parent metal, the bound fraction of any one formation at least in Sn-Cu parent metal and the Sn-Zn parent metal is connected to each other.
The present invention also aims to a kind of semiconductor chip and electronic installation that the substrate of semiconductor chip is installed of comprising in the above, wherein, the joint terminal of substrate closes the joint terminal that forms on the side surface with semiconductor chip by toe-in and is connected, and the opposite side of semiconductor chip surface and substrate utilization are connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and each Metal Ball of bound fraction combines by the compound that is made of metal and Sn.
The present invention also aims to a kind of be used for making comprise electronic component, the method of the electronic installation of first substrate that electronic component is installed in the above and second substrate that first substrate is installed in the above, wherein, this method comprises a first step and one second step, in first step, the electrode of the electrode of electronic component and first substrate is being equal to or higher than 240 degrees centigrade and be equal to or less than and stand soft heat under the temperature of heat resisting temperature of electronic component and be connected to each other by making first lead-free solder, wherein first lead-free solder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and in second step, first substrate and second substrate that electronic component is installed above are bonded to each other by making second lead-free solder stand soft heat under the temperature of the reflowing temperature that is lower than first step.
In addition, first substrate that electronic component is installed in the above is installed in one second substrate for example in the electronic installation on printed circuit board (PCB) or the motherboard, it is that the soft heat of soldering paste by comprising Cu ball and Sn base soldered ball is carried out that electronic component is incorporated on first substrate, is that soft heat by a kind of Sn-(2.0-3.5) Ag-(0.5-1.0) Cu scolder is carried out and first substrate is incorporated on second substrate.
For instance, for the combination of temperature level, even when the part fusing of the scolder of the temperature end that has been combined, if the not fusing of the other parts of scolder, scolder also can proof strength be enough to bear the process of being carried out during subsequently the solder bond so.
The fusing point of intermetallic compound is very high.Even because the part that combines with intermetallic compound also can provide enough bond strengths at 300 degrees centigrade, so intermetallic compound can be used in the temperature level combination of temperature end.Therefore, these balls that the inventor uses Cu (or Ag, Au, Al or plastics) ball or surface to be coated with Sn and so on combine with the soldering paste that the mixture of Sn base soldered ball constitutes, and wherein the two is mixed in the soldering paste according to the volume ratio that accounts for about 50% separately.Therefore, the Cu ball contact with each other or part close to each other in, because the diffusion between Cu and the Sn, thereby react with the Sn of fusing on every side and form the Cu6Sn5 intermetallic compound, thereby can guarantee at high temperature have enough bond strengths between the Cu ball.Because the fusing point of this compound is high and (have only the Sn partial melting) can guarantee enough intensity under 250 degrees centigrade welding temperature, therefore the phenomenon that bound fraction peels off can not take place for module being installed in the secondary softening-melting process that carries out on the printed circuit board (PCB).Therefore, the welding portion of module is made of the composite material with two kinds of functions, promptly pass through first function that in the secondary softening-melting process, guarantees elevated temperature strength in conjunction with the elasticity adhesion that produces by high melting compound, and second function that in temperature cycles, guarantees useful life by the flexibility of soft Sn.The part of therefore, having welded can suitably be used for the temperature level combination under the high temperature.
In addition, can also use the high rigidity scolder of the hard with required fusing point, for example Au-20Sn scolder, Au-(50-55) Sn scolder (fusing point: 309-370 degree centigrade) and Au-12Ge (fusing point: 356 degrees centigrade).In this case, by using granular Cu and Sn particle and with the diffusion of soft elastic caoutchouc particle and mix or by with the scolder diffusion of soft low melting point Sn, indium and so on and be mixed in the high rigidity scolder of above-mentioned hard, even just can under the temperature of the solidus temperature that is not less than the high rigidity scolder of above hard, also can guarantee enough bond strengths, and can alleviate because therefore the phenomenon that the distortion of soft Sn, indium or the rubber that exists in the metallic causes can expect to utilize this new advantage to compensate the shortcoming of scolder.
Below, the solution of the RF modular structure that is applied to resin-encapsulated is described.
Prevent owing to the countermeasure of welding the short circuit that causes comprises (1) a kind of structure, wherein the scolder in the module can not melt in the secondary installing softening-melting process, and (2) a kind of structure, even wherein when the solder fusing in the module, the fusing that also can be by reducing scolder and the bulbs of pressure prevent between element and the resin at the interface and peeling off at the interface between resin and the module substrate.Yet, be difficult to carry out the design of required resin according to these measures.
On the other hand, (3) it is also conceivable that and use a kind of structure, and it can utilize the soft resin of gel state to wait the fusing and the bulbs of pressure of the inside scolder that reduces fusing.Yet,, just need utilize shell or calotte to cover scolder because the protection (mechanical strength) of this structure is little.Because therefore this measure meeting rising cost can not adopt.
Figure 13 (will be described hereinafter) shows under a kind of situation of using the conventional type scolder in the resin-encapsulated structure and the scolder stream melting phenomenon of another kind between using under the situation of scolder of the present invention relatively.The volumetric expansion of lead-based solder is 3.6%[Science andEngineering of Metallic Materials; Masuo Kawamori, P.14442].According to integrated structure of the present invention, in secondary soft heat installation process, have only Sn under the temperature about 240 degrees centigrade, to melt.Therefore, consider that the Cu ball and the volume ratio of Sn ball are about 50% to 50%, just melted the back scolder of the present invention volumetric expansion be 1.4%, be approximately lead-based solder volumetric expansion 1/2.5.On the other hand, for the state that melts again, when scolder melted again, the conventional type scolder expanded 3.6% at once.Therefore, when the conventional type scolder was made by hard resin, because resin can not be out of shape, the scolder that pressure will increase so melt will flow in the interface that forms between chip component and the resin.For this reason, it is soft requiring resin in the conventional type scolder.On the other hand, according to scolder of the present invention, from the model of the chip cross section shown in Fig. 1 (will be described hereinafter), can know and see that the Cu particle mainly combines by the Cu6Sn5 compound.Therefore, even when the Sn in the gap that is in the Cu particle melts, the Cu particle is owing to combining thereby can not moving.
Therefore, the pressure that is produced by resin will balance each other with the repulsive force of the Cu particle that combines, and pressure just can not act on the Sn of fusing easily like this.In addition,, be 1/2.5 of conventional type scolder,, can expect that the probability that Sn flows in the interface of chip component is very little therefore because above the two synergy because the volumetric expansion of bound fraction is little.Therefore, by in module, adopting integrated structure of the present invention, can provide a kind of low-cost RF module that can use softening a little epoxy resin to encapsulate and can be easy to cut simultaneously.
Description of drawings
Fig. 1 (a) to Fig. 1 (c) be the cutaway view of a model, show the material and the formation of the soldering paste that is used for combination;
Fig. 2 (a) shows with respect to the section model of having used an example of the present invention, and Fig. 2 (b) and Fig. 2 (c) are respectively for the cream method with in conjunction with the illustraton of model of situation;
Fig. 3 (a) and Fig. 3 (b) are the cutaway views that applies the present invention to a kind of situation of surface etching pattern;
Fig. 4 be apply the present invention in the situation of the coating that can be easy to into alloy in conjunction with before cutaway view;
Fig. 5 (a) is the cutaway view that module is installed on a model on the printed circuit board (PCB) to Fig. 5 (c);
Fig. 6 is the cutaway view of the model of a Plastic Package;
Fig. 7 (a) is the cutaway view of the model of an installation RF module to 7 (c);
Fig. 8 (a) and Fig. 8 (b) are the flow charts that the RF module is installed;
Fig. 9 (a) is the cutaway view of model of the processing sequence of a RF module to 9 (d);
Figure 10 is the perspective view that is positioned at the installment state that the RF module on the substrate is installed;
Figure 11 is the perspective view of the resin printing process in a kind of RF module assembling process;
Figure 12 (a) and Figure 12 (b) are respectively the cutaway view and the perspective views of the principle of the scolder stream in the comparative example of RF module;
Figure 13 shows to the phenomenon of the RF module between a comparative example and the embodiment according to the present invention relatively;
Figure 14 (a) to Figure 14 (c) be the plane graph of a high output resin-encapsulated and the cutaway view of this encapsulation;
Figure 15 is the flow chart of the process of high output resin-encapsulated;
Figure 16 (a) is the cutaway view of the model that engages of a CSP who obtains by the combination of composite balls to Figure 16 (d);
Figure 17 (a) is the cutaway view of the model of a BGA/CSP who uses Cu ball protuberance to Figure 17 (c);
Figure 18 (a) is the cutaway view of model of the BGA/CSP of a plating Cu protuberance that uses distressed structure to Figure 18 (b);
Figure 19 show Sn/Cu than with the proper range that combines between relation;
Figure 20 (a) and Figure 20 (b) show the view in conjunction with the section model of the material of cream and formation; And
Figure 21 (a) and Figure 21 (b) show at nitrogen environment and carry out the outward appearance of scolder in the operating process of solder reflows in air.
Embodiment
Below embodiments of the invention are described.
(embodiment 1)
Fig. 1 (a) illustrates conceptual model according to a kind of integrated structure of the present invention to Fig. 1 (c).Another kind of situation after also shown is the preceding situation of welding and welding.Fig. 1 (a) shows a use and is wherein suitably spreading the example that particle size is about the soldering paste of the Sn base soldered ball 2 (fusing point: 232 degrees centigrade) that 30 microns Cu ball 1 (the perhaps ball of Ag, Au, CuSn alloy and so on) and particle size be about 30 microns slightly by solder flux 4.When standing soft heat under this soldering paste is being not less than 250 degrees centigrade temperature, Sn base soldered ball 2 will melt, and the Sn3 of fusing spread out so that make the Sn3 of fusing that Cu ball 1 is wetting and come across more equably between the Cu ball 1.After this, the Sn3 of Cu ball 1 and fusing reacts to each other so that make each Cu ball 1 be connected to each other by means of the compound (mainly being Cu6Sn5) of Cu and Sn.The particle size of Cu ball 1 and Sn base soldered ball 2 is not limited to above-mentioned value.
Because the Cu6Sn5 compound can form at short notice by improve reflowing temperature as far as possible, therefore do not need to form the required ag(e)ing process of compound.When the formation of Cu6Sn5 compound is not enough, just need guarantee to have enough big bond strength between each Cu ball 1 by in the heat resisting temperature scope of element, carrying out of short duration Ageing Treatment.Because the fusing point of Cu6Sn5 compound is not poor up to the mechanical performance of about 630 degrees centigrade and Cu6Sn5 compound, so does not have problems on the intensity.If at high temperature carry out long Ageing Treatment, the Cu3Sn compound will be long to the Cu adnation.It is believed that,, it has been generally acknowledged that it is not only hard but also crisp for the mechanical performance of Cu3Sn.Yet, even when Cu3Sn forms in the scolder around each Cu particle, in this scope, do not have problems, because it is to middle did not influence of measuring in useful life such as temperature cycling tests yet.In the experiment that Cu3Sn at high temperature fully formed in the short time, there is not the problem on the intensity.It is believed that this be because at Cu3Sn to aspect the influence of fracture, resemble in this example with Cu3Sn in the very long situation in the another kind of situation of each particle formation on every side, to exist the cause of difference Cu3Sn forming along combination interface of resembling up to now to be run into.In this case, think that also the booster action that is present in compound soft Sn3 on every side is also very big.
As above disclosed, because each Cu ball 1 is bonded to each other by compound (Cu6Sn5), be contact (Cu6Sn5) or Cu ball 1 can not melt, even therefore after combination, also can guarantee bond strength during through about 240 degrees centigrade soft heat stove when module.Consider each Cu ball 1 in conjunction with reliability, preferably, the thickness of the compound of formation (Cu6Sn5) is approximately several microns.Yet, do not need to make all combining by compound in abutting connection with the Cu particle.On the contrary, according to probability, preferably, also there is not the part of the connection of the Cu ball 1 that produces by compound, because this is providing the degree of freedom aspect scolder distortion.
In another example that Fig. 1 (b) illustrates, be coated with Sn and so on (thickness: be about 0) on the above Cu ball 1 to being no more than 0.1 micron.When causing the Sn quantity not sufficient owing to Sn coating is too thin, not enough Sn amount is replenished by the Sn ball that has with soldered ball 2 identical sphere diameters.The Sn coating that is coated on the Cu ball 1 makes that the Sn3 of fusing can be easy to scatter and wetting Cu ball 1 along Cu ball 1, thereby makes that the gap between each Cu ball 1 is more even.In addition, this also can produce very favorable effect to eliminating the space.The oxide-film of solder coating is destroyed and each Cu ball 1 suction and closer to each other to form the Cu6Sn5 compound mutually each other under surface tension effects in softening-melting process.In addition, by in Sn, adding trace (1-2%) thus bismuth and so on the flowability of improving scolder improve the wettability of scolder on terminal.Yet, add a large amount of bismuths and do not meet the requirements, because scolder can become fragile.
When carrying out in being welded on nitrogen environment, the scolder (welding material, soldering paste) shown in Fig. 1 (a) and Fig. 1 (b) is very effective.In addition, even when carrying out in being welded on air, if temperature is equal to or less than 240 degrees centigrade, it is also very effective.This is because be equal to or less than under 240 degrees centigrade the temperature, and the oxidative phenomena of Cu ball 1 and S n base soldered ball 2 and solder flux 4 is also inactive.The Sn parent metal means and comprises Sn-(0-4) Ag-(0-2) Cu in the composition and sneak into antimony, bismuth, Ni and so on.Especially, for solder flux,, still there is residual problem, therefore uses a kind of weak rosin flux usually even when cleaning.The oxidation of solder flux 4 is very not big to the influence in conjunction with reliability.
Yet, when in air, (considering the thermal endurance of electronic component in the temperature that surpasses 240 degrees centigrade, preferably under being in 240 degrees centigrade to the 300 degrees centigrade temperature in the scope, weld) when welding, find can to reduce owing to the problems such as oxidation of Cu ball 1, Sn base soldered ball 2 and solder flux 4 in conjunction with reliability.For instance, in the solder bond experiment of using the soldering paste (welding material) shown in Fig. 1 (a) and Fig. 1 (b) to carry out under 290 degrees centigrade temperature in air, the solder bond part is faded owing to oxidation thereby is reduced in conjunction with reliability.Figure 21 (a) and Figure 21 (b) show this result of experiment, wherein Figure 21 (a) shows the outward appearance that is incorporated into 1005 chip components on the heat resistant substrate by soft heat in nitrogen environment, and Figure 21 (b) shows the outward appearance that is incorporated into 1005 chip components on the heat resistant substrate in air.Obtain in air in the integrated structure, oxidation takes place and fades in the surface of welding.In addition, integrated structure shows relatively poor wettability.Here, the setting of 290 degrees centigrade of temperature is to consider the semiconductor device (semiconductor chip) that is installed on the printed circuit board (PCB) or the thermal endurance of electronic building brick.Yet, this be not mean the scolder according to the present invention reflowing temperature on be limited to 290 degrees centigrade.
Here, the result to experimental check illustrates specially.In the soldering paste according to the foregoing description shown in Fig. 1 (a) and Fig. 1 (b), Cu ball 1, Sn base soldered ball 2 and solder flux 4 are all owing to oxidation takes place in soft heat.In other words, when the amount of solder flux 4 was very big, Cu ball 1 and Sn base soldered ball 2 were present in and therefore can contact with air in the solder flux 4 of liquid form thereby oxidation can not take place.Yet, combination have Cu ball 1 and Sn base soldered ball 2 according to scolder of the present invention in, the diameter of Cu ball 1 and Sn base soldered ball 2 is equivalent to several microns to tens microns (being approximately 5 microns to 40 microns or 1 to 5 micron when the outflow of Cu is controlled), and therefore all the total surface area of Cu ball 1 and Sn base soldered ball 2 is very big.On the other hand, the amount of the solder flux in the soldering paste 4 is restricted so that keep the performance of soldering paste.Therefore, just be difficult to utilize solder flux 4 to be covered with whole Cu balls 1 and Sn base soldered ball 2, therefore wherein a part will be exposed from solder flux 4.Therefore, Cu ball 1 and Sn base soldered ball 2 just oxidations in air probably.Sn is easy to take place oxidation especially.
On the other hand, for Cu ball 1, when Sn base soldered ball 2 melted during soft heat, the Sn parent metal that Cu ball 1 just is melted (the Sn parent metal 3 of fusing) covered, and therefore can think that Cu ball 1 oxidation can not take place.Yet, because the wettability difference of Cu and spreading out, therefore the part of the Cu ball 1 that is covered by the Sn parent metal, the part that promptly is formed with the Cu ball 1 of the compound that is formed by Sn parent metal and Cu is not in the above extended on the whole surface of Cu ball, thereby the part of Cu ball is revealed and done well.Therefore, oxidation takes place in Cu ball 1.In addition, till the time of Sn parent metal fusing (temperature reaches 232 degrees centigrade), Cu also can obtain heating by preheating and so on.
Here, solder flux has the effect of the oxidation of reduction Cu ball 1 and Sn base soldered ball 2.Yet, because when temperature is equal to or higher than 240 degrees centigrade, oxidation itself also can take place in solder flux 4 breezily, and all oxidation all takes place in solder flux 4, therefore when the quantity of solder flux 4 very little the time, the redox intensity of solder flux 4 will descend, thereby solder flux 4 can not reduce the oxidation of Cu ball 1 and Sn base soldered ball 2.In addition, although the abietyl solder flux can reductive copper oxide, the abietyl solder flux is reduction-oxidation tin effectively.When oxidation took place for Cu ball 1, the Sn3 of fusing just was difficult to wetting and intersperses among on the whole surface of Cu ball 1, therefore just was difficult to form compound (Cu6Sn5), thereby the solder bond reliability when using the temperature end scolder will reduce.Especially, in the state shown in Fig. 1 (a), Cu ball 1 is in naked state (not covering state), so Cu ball 1 is easy to take place oxidation.
In addition, in the state shown in Fig. 1 (b), although covered by Sn on the Cu ball 1, thickness has only the thin Sn film about 0.1 micron to be not enough to prevent the oxidation of Cu ball 1.Technologically speaking, be difficult in particle size and be that to form thickness on tens microns the surface of Cu ball 1 be several microns Sn film here.In addition, when Cu ball 1 was covered by thin Sn film, Sn and Cu were easy to form a kind of compound (Cu3Sn), and therefore the situation that may occur is that oxidation takes place this Cu3Sn.The reduction ratio oxidation Cu of this oxide that Sn and Cu form and the reduction of oxidation Sn are more difficult.In addition, in case after Cu3Sn formed, Sn just can not wetting Cu ball 1.
Described in conjunction with Fig. 1 (a) and Fig. 1 (b) as mentioned, when in air, surpassing when welding under about 240 degrees centigrade the temperature, will produce problem in conjunction with the reliability aspect.In view of above these problems, we have proceeded broad research to this point, and find Fig. 1 (c) even shown in soldering paste also can guarantee in these cases in conjunction with reliability.
Soldering paste (welding material) shown in Fig. 1 (c) comprises the surface and goes up Cu ball, Sn base soldered ball 2 and the solder flux 4 that is covered by Ni/Au coating 124.Figure 20 (a) shows the Cu ball 1 that is formed with Ni/Au coating 124 on the surface.Here, Au can prevent the oxidation of Cu and Ni.In addition, Ni can prevent that Au from diffusing among the Cu and prevent that Cu from flowing out (fusing) in Sn, this situation can occur when carrying out soft heat under being equal to or higher than 240 degrees centigrade temperature.Especially, when the particle size of Cu particle was very little, Cu at high temperature was easy to fuse in the Sn parent metal.In common welding, Cu melts and discharges reacting gas and so on and finish and solidifies.Yet,, will form CuSn compound and rising fusing point, so process of setting will be easy to finish under the still undischarged state of gas when Cu is too fast when diffusing in the scolder.Therefore, when in the gap that solder residue limits, will increase apparent space between chip and substrate.This shortcoming can be overcome as bar by using Ni.In other words, Ni can prevent that Cu from flowing out in the scolder, and therefore welding just can normally be carried out.Here, Cu3Sn can stop the wetting Cu ball 1 of Sn and intersperse among on the whole surface of Cu ball 1, and Cu3Sn is not only hard but also crisp in general.Because Ni coating can prevent that Au from diffusing among the Cu, even therefore also can prevent the oxidation of Cu under the non-wetted high temperature Au of Sn, and when solder, Cu will intersperse among in the scolder (Sn) after soft heat.
For preventing that Au from interspersing among on the whole surface of Cu ball 1, need with the thickness setting of Ni film the value that equals more than 0.1 micron or 0.1 micron usually.On the other hand, the film thickness that can form on particle size is tens microns particle is about 1 micron.Therefore, preferably, the film thickness of Ni is set at and is in 0.1 micron value to 1 micrometer range.Here, thus the thickness that also can increase Ni coating film forms the Ni3Sn4 compound that the Cu particle is bonded to each other.
In addition, the Au film thickness should be set at the value that is enough to prevent Ni and Cu oxidation, and preferably, considers that Au is covered with the whole C u ball 1 that has irregular part on its surface, and the Au film thickness is set at and is equal to or greater than 0.01 micron value.On the other hand, for considering cost factor and, preferably, the Au film thickness is set at is equal to or greater than 0.005 to 0.1 micron by determining the Au film thickness under the situation of the available film thickness of coating method (flushing coating method).
When owing to considering that in advance Au diffuses into factor in the Cu ball 1 and forms the bigger Au coating of thickness, do not need to form Ni coating film usually here.Yet cost factor and technical difficulty factor in view of the Au coating film that forms big thickness (being equal to or greater than 0.1 micron) preferably form Ni coating film.
In addition, as shown in Figure 20 (b), oxidation taking place and prevent Sn and the active reaction of Cu ball generation for preventing Sn, preferably forms layer protecting film 122 on the surface of Sn base soldered ball 2.Here; as diaphragm; can use for example coated film, the plasma cleans film that (3) are formed by argon and so on, the ion that (4) use argon and so on or the coating film that atom forms made by glycerine and so on of urethane film, (2) of resin molding that (1) have a solder flux effect, or the like.For Sn base soldered ball 2, even when slight oxidation takes place on its surface, portion is still keeping pure Sn within it, so when standing soft heat under soldering paste is being equal to or higher than 240 degrees centigrade temperature, the Si of pure interior will destroy oxide-film and occur.Therefore, although always be not on the surface of Sn base soldered ball 2, to form diaphragm 122, but the formation of diaphragm 122 can suppress the oxidation of Sn base soldered ball 2 to minimum degree and can guarantee solder bond reliability partly.
The soldering paste (Fig. 1 (c)) that is coated with the Cu ball 1 of Ni/Au coating 124 and Sn base soldered ball 2 on comprising the surface is when standing soft heat, according to the identical mode of soldering paste shown in Fig. 1 (a) and Fig. 1 (b), Cu ball 1 is bonded to each other by the compound (Cu6Sn5) that is formed by Cu and Sn.
In this manner, according to the scolder shown in Fig. 1 (c), even in air under the temperature that is equal to or higher than about 240 degrees centigrade, thereby also can prevent to the oxidation in conjunction with the Cu ball 1 of reliability effect maximum guarantee the solder bond part in conjunction with reliability.
Here, except Cu ball 1 and Sn base soldered ball 2, the formed Cu6Sn5 ball of intermetallic compound that is made of Cu and Sn also can be contained in the soldering paste in advance.In this case, even when the oxidation reaction of Cu ball 1 and Sn base soldered ball 2 is relatively enlivened once in a while, because Cu6Sn5, Cu ball 1 also can be easier to be bonded to each other.Because the discharge that Cu flows among the Sn for the Cu6Sn5 ball is very little, even therefore the elasticity that at high temperature also can not produce between the Cu ball 1 is subjected to the shortcoming that Cu6Sn5 forms too much restriction.
Needless to say more, Fig. 1 (a) can be used for making disclosed various electronic installations of above-mentioned each embodiment and electronic component to the soldering paste shown in Fig. 1 (c).
Below, the electronic component that will have a this integrated structure for example large scale integrated circuit encapsulation and element is installed on the printed circuit board (PCB).In this installation process, need serviceability temperature level associated methods.For instance, on the splicing ear that Sn-3Ag-0.5Cu soldering paste (fusing point: 221-217 degree centigrade) is printed in printed circuit board (PCB) and electronic component has been installed for example after large scale integrated circuit encapsulation and the element, can in air or in nitrogen environment, under 240 degrees centigrade, carry out soft heat.Especially, for the scolder shown in Fig. 1 (c), can under the temperature that is in the scope that is not less than 240 degrees centigrade of heat resisting temperatures (for example from being not less than 240 degrees centigrade), carry out soft heat to not being higher than 300 degrees centigrade to electronic component.This Sn-(2.0-3.5) Ag-(0.5-1.0) Cu scolder is counted as being used for replacing the standard solder of conventional type eutectic Sn kupper solder.Yet,, therefore just require to develop a kind of high temperature lead-free solder that is applicable to this purposes because the fusing point of this scolder is higher than eutectic Sn kupper solder.As mentioned above, the intensity under the high temperature between Cu and the Cu6Sn5 is guaranteed by the joint that has formed, and the intensity height that engages must be enough to bear the stress that the distortion owing to printed circuit board (PCB) in the softening-melting process produces, or the like.Therefore, even when Sn-(2.0-3.5) Ag-(0.5-1.0) Cu scolder being used for the secondary soft heat so that being welded on the printed circuit board (PCB), this scolder also can be realized the combination of temperature level, because this scolder has the function that scolder had of high-temperature use.In this case, the solder flux that use can be RMA (rosin that appropriateness is active) type that is used for non-cleaning purposes or RA (active rosin) type that is used to clean purposes, and can not only use clean type but also use non-clean type.
(embodiment 2)
In Fig. 2 (a), use a kind of Au-20Sn scolder 7 and so on that semiconductor device 13 is incorporated on the bonded substrate 6.Using gold thread 8 and so on to carry out after toe-in closes, going up the outer peripheral portion of the calotte of making 9 and use above-mentioned non-clean type soldering paste 10 to be incorporated on the bonded substrate 6 by soft heat by NiAu coating being coated on Al plate, iron Ni plate and so on.In this case, when thinking that dielectric features is very important, need to use the scolder that has not chloride solder flux in nitrogen environment, to carry out combination.Yet, in the time can not guaranteeing wettability, can use the weak active rosin of RMA type to encapsulate.Do not need to guarantee encapsulation or sealed semiconductor device 13 fully.In other words, if solder flux has sufficient dielectric features, even when semiconductor device 13 remains in the solder flux for a long time, semiconductor device 13 can not be subjected to negative effect yet.The purpose of using calotte 9 encapsulation mainly is to realize the mechanical protection effect.As a kind of method for packing, can use pulse current resistance calandria 15 and so on that hermetic unit is carried out the pressure combination.In this case, the coating of soldering paste uses distributor to carry out along hermetic unit, and forms a continuous pattern 12 of precision (Fig. 2 (b)).
Amplify the cross section A-A that shows pattern on the right side of Fig. 2 ' model.Cu ball 1 and Sn soldered ball 2 remain in the solder flux 4.When from above when using when soldering paste exerted pressure pulse current resistance calandria 15 to carry out combining of calotte 9 and bonded substrate 6, soldering paste will flatten, as shown in Fig. 2 (c).Show the section B-B that shows that soldering paste flattens in the amplification of the right side of Fig. 2 '.In this case, when use was of a size of 30 microns Cu ball 1, the solder bond between bonded substrate 6 and the calotte 9 partly provided 1 to 1.5 times the gap of a size (being about 50 microns) for the size of Cu ball 1.Because the cohesive process that uses PULSE HEATING body 15 to carry out under pressure continues maximum 5 seconds down at 350 degrees centigrade, so just easy lip-deep this section that is formed at calotte 9 at thick Cu base or the basic coating of N i of the contact portion between the contact portion between the terminal of Cu ball 1 and bonded substrate 6 and Cu ball 1 and the calotte 9 forms Cu6Sn5 and Ni3Sn4 compound in the short time.Therefore, in this case, generally imitate process when not required.Have a mind to use the narrower soldering paste of width here.For instance, the width of the cross section of the soldering paste of using under pressure is 250 microns and thickness is 120 microns.When putting on pressure on the soldering paste subsequently, the thickness of cross section just becomes 1 to 1.5 times of the size that is roughly Cu ball 1, so the width of cross section increases to about 750 microns.
Eutectic Sn-0.75Cu soldered ball is along with external engagement terminal 11 feeds to encapsulation place that this has been sealed in advance, and soldering paste then places and is installed on the printed circuit board (PCB) according to the mode identical with other element by printing.Then, carry out mounted on surface by soft heat.As the soft heat scolder, can use Sn-3Ag scolder (fusing point: 221 degrees centigrade, reflowing temperature: 250 degrees centigrade), Sn-0.75Cu scolder (fusing point: 228 degrees centigrade, reflowing temperature: 250 degrees centigrade), any in Sn-3Ag-0.5Cu scolder (fusing point: 221-217 degree centigrade, reflowing temperature: 240 degrees centigrade) etc.The performance inventory of the plumbous eutectic welding of the Sn that obtains of considering over can guarantee to have enough intensity between Cu and the Cu6Sn5 by eutectic Sn kupper solder, and therefore in the reflow operation process, part that has encapsulated or the like can not be peeled off.By the way, when by using this soldering paste that the combine lap jointing type joint that produces of Cu paillon foil is stood the shear tension test at 270 degrees centigrade (extensibility: in the time of 50mm/min), the value that obtains is approximately 0.3kgf/mm.This shows at high temperature can guarantee to engage to have enough big intensity.
When the calotte of module part is made of the Al plate that is coated with Ni/Au or is made of the iron Ni plate that is coated with Ni/Au, the NiSn alloy-layer is higher than the growth rate of CuSn alloy-layer being not less than growth rate under 175 degrees centigrade the temperature, be about 3 microns (D.Olsen et al. for instance, at the film thickness that the Ni layer has that contains that forms; Reliability Physics, 13 ThAnnualProc., pp 80-86,1975) situation under, handle by high-temperature aging, the Ni3Sn4 alloy-layer also can fully form.Yet with respect to the performance of alloy-layer, Cu6Sn5 will surpass the Ni3Sn4 alloy-layer.Therefore, do not make preferably that the Ni3Sn4 alloy-layer grows to bigger thickness.Yet, in this case since high-temperature aging handle can not last very long, thereby therefore needn't worry that Ni3Sn4 alloy-layer excess growth causes the problem of embrittlement.According to being lower than the growth rate of Sn alloy-layer about its alloy-layer growth rate and in practical operation, using the data of Sn-40Pb scolder for many years, growth rate that can rough estimate Sn.Even under 280 degrees centigrade through 10 hours, Sn-40Pb with respect to the growth rate of Ni also be no more than 1 micron (according to some data, under 170 degrees centigrade through 8 hours after growth rate be 1 micron).Therefore, carry out at short notice can not producing the problem of embrittlement under the situation of high-temperature aging processing.About the growth rate of the alloy-layer (Ni3Sn4) that produces by the Sn that is coated with Ni, as you know,, for example to electroplate and chemical plating or the like according to the type difference of plating, the growth rate of alloy-layer has very big difference.Owing to need to keep high bond strength, therefore require alloy-layer to have high growth rate in the present embodiment.On the other hand, there are following data, at 170 degrees centigrade in following 6 hours, the growth rate of the Sn-40Pb scolder that is produced by Cu is 1 micron (per hour 1 micron growth rate is consistent under 230 degrees centigrade under the situation of using Sn-0.75Cu eutectic soldered ball among the solid-state embodiment with just being at the supposition soldered ball).In the combination experiment of carrying out in 350 degrees centigrade of following 5 seconds, the inventor can observe and be formed with the part that thickness is 5 microns Cu6Sn5 to the maximum between the Cu particle.By this fact, think when welding is at high temperature carried out, generally to imitate when not required and handle.
In this soldering paste method, also having a most important task is to reduce the generation in space as much as possible.In order to reduce the generation in space, importantly to improve the wettability and the flowability of improving scolder of scolder to the Cu particle.For achieving this end, be regarded as effective measures comprise Sn is plated on the Cu ball, the Sn-Cu scolder is plated on the Cu ball, the Sn-Bi scolder is plated on the Cu ball and with the Sn-Ag scolder be plated on the Cu ball, adopt eutectic Sn-0.7Cu soldered ball, with bismuth add in the soldered ball, or the like.
In addition, soldered ball is not limited to the Sn soldered ball.In other words, soldered ball can join the soldered ball that obtains in any these soldered balls for eutectic Sn-Cu base soldered ball, eutectic Sn-Ag base soldered ball, eutectic Sn-Ag-Cu base soldered ball or by at least a element that will select from elements such as In, Zn, Bi.Equally, Sn has constituted the essential element of these composition of such solder balls, can produce any required compound.In addition, can mix two or more soldered balls.Because the fusing point of these soldered balls is lower than the fusing point of Sn, therefore observed trend is for these soldered balls, and the growth rate of alloy-layer is at high temperature faster in general.
(embodiment 3)
Can also be used for the die attachment 7 shown in Fig. 2 (a) according to soldering paste of the present invention.After using, carry out clean and toe-in and close according to soldering paste bonding semiconductor device 13 of the present invention.In the prior art, die attachment uses Au-20Sn in conjunction with carrying out.Yet in view of the reliability of Au-20Sn scolder, the use of Au-20Sn scolder is only limited in the matrix installation of small chip.In addition, when using the soldering paste that is made of lead-based solder to carry out die attachment, employed is Pb-10Sn scolder and so on.Also be applicable to have the larger area chip according to associated methods of the present invention.The thickness of bound fraction is big more, will prolong useful life and reliability will increase.According to the present invention, can increase thickness by using the high-melting-point ball that has large-size separately.Under the situation that thickness reduces, undertaken by the size that reduces particle (being ball).In some associated methods, can also when reducing particle size, form thicker bound fraction.Even can use the Cu particle that is of a size of the 5-10 micron, and can mix with it by the particle that size is littler.Between Si chip (providing Cr-Cu-Au, Ni coating and so on its back side) and Cu ball as the coat of metal and the compound that between the splicing ear on Cu ball and the substrate, forms can be Sn-Cu compound or Sn-Ni compound.Because the growth rate of alloy-layer is very little, therefore can not produce the problem of embrittlement.
(embodiment 4)
Bearing temperature in the softening-melting process that the joint that is provided by high-temperature soldering only need carry out in later step, and it is believed that the stress that puts on this joint is very little in softening-melting process.Therefore, what replace the use Metal Ball is, one side of each splicing ear or both sides by roughening so that can form the protuberance that forms by Cu, Ni and so on, thereby make alloy-layer be formed at the contact portion of protuberance and the other parts of using solder bonds really.This has identical effect with using ball.Scolder uses distributor to be coated on one of terminal, utilize the resistance heating body of pulse current then and make scolder by when forming protuberance fusing taking place with upper type so that force among their invade each other, thereby at high temperature carry out die attachment.Therefore, owing to protuberance has anchor effect and formed compound in contact portion, so contact portion can obtain sufficiently high intensity so that bear the stress that produces in the softening-melting process.Fig. 3 (a) shows the model of the cross section of joint, wherein the surface of the Cu pad 18 of substrate 19 by etching 20 roughening and be applied on the coarse surface by the soldering paste that Sn parent metal 2 forms.In this case, meticulous Cu particle and so on is added in the Sn parent metal.The back side of the terminal part 75 of element can be flat surface.Yet, in this case, be coated with Cu or Ni and so on the straight back side, and the surface of coating by etching 20 roughening.Fig. 3 (b) shows the state that carries out combination by heating under pressure, and wherein compound is formed at the contact site office by carry out soft heat under higher temperature, so that make contact portion have high strength.Therefore, in the soft heat step subsequently that external connection terminals is incorporated on the substrate terminal, this part can not peeled off.
(embodiment 5)
Use the Au-Sn alloy carry out in conjunction with the time, wherein increased the quantity of the element that spreads and changed the different compound of formation under the lower temperature in being in the very little scope of variations in temperature by the synthetic compound that these elements constitute from low temperature to the high-melting-point end according to three phases by Ageing Treatment.It is Au-20Sn (fusing point: 280 degrees centigrade, eutectic build) that the composition that Au-Sn alloy a kind of is well known constitutes.The composition range that eutectic point is remained in 280 degrees centigrade Sn is that Sn accounts for about 10% to 37%.When Sn content increased, Au-Sn was in conjunction with presenting the trend that becomes fragile.It is believed that the composition range that can realize is that Sn accounts for 55% to 70% in containing the alloy of a small amount of Au, and in this composition range, 252 degrees centigrade of phase (Hansen occur; Constitution of Binary Alloys, McGRAW-HILL, 1958).The temperature that it is believed that the part of combination in the step (first soft heat) formerly is very little in the possibility that reaches afterwards 252 degrees centigrade through the combination in the step (secondary soft heat) subsequently, even therefore can think in this composition range, also can realize the target of temperature level combination.Constitute about composition, it is believed that composition formation and these compounds in can forming from AuSn2 to the AuSn4 scope can be applied to the packed part of die attachment 7 or calotte 9.For further guaranteeing safety, can adopt to comprise the Au-Sn alloy of 50% to 55% Sn.In this alloy, its solidus and liquidus curve best result are not 309 degrees centigrade and 370 degrees centigrade, so that can prevent to separate out 252 degrees centigrade phase.Fig. 4 shows the model that plates the cross section of Ni (2 microns)-Au (0.1 micron) 24 at the back side of Si chip 25 in advance, for example is coated with the contact pin 22 on the lead frame 19 of Ni (2 microns) 22-Sn (2-3 micron) 23.In the die attachment process of in nitrogen environment, carrying out when under pressure, heating, and in the Ageing Treatment process that adds in addition according to the occasion needs, part Sn is used to form Ni-Sn alloy-layer (being the Ni-Sn compound layer), and remaining Sn then forms the Au-Sn alloy-layer.Containing under the too high situation of Sn amount, forming the Sn and the AuSn4 of eutectic point very low (217 degrees centigrade).Therefore, need control to contain the Sn amount so that can not form this eutectic point.In addition, can coat a kind of soldering paste that wherein is mixed with fine metal particle, Sn and so in the above.Because die attachment uses the Au-Sn scolder to carry out under 350-380 degree centigrade high temperature, therefore can form by controlling diaphragm thickness, temperature and time and contain the compound that contains the Sn amount that the Sn amount is lower than AuSn2, thereby can be so that its fusing point is not less than 252 degrees centigrade.Therefore can think and in softening-melting process subsequently, can not have problems.
As mentioned above, by making scolder be much higher than 300 degrees centigrade of fusings down of Sn fusing point, diffusion that just can active element and form compound, thus can guarantee intensity required under the high temperature and the temperature level in conjunction with in realize the high reliability combination of temperature end.
About above-mentioned Metal Ball, any one in the ball of the ball that can use the ball that constitutes by single element metal (for example Cu, Ag, Au, Al and Ni), constitute by alloy (for example Cu alloy, Cu-Sn alloy and Ni-Sn alloy), the ball that constitutes by compound (for example Cu6Sn5 compound) and the mixture that comprises above various balls.In other words, can use and to form compound with the Sn of fusing thereby can guarantee any material that combines between each Metal Ball.Therefore, Metal Ball is not limited to one type, but can mix two or more Metal Ball.These Metal Ball can provide Au coating, Ni/Au coating, single element Sn coating or contain the alloy layer of Sn.In addition, can use the resin balls that is coated with a kind of coating selected from Ni/Au coating, Ni/Sn coating, Ni/Cu/Sn coating, Cu/Ni coating and Cu/Ni/Au coating on the surface.By resin balls is sneaked in the soldering paste, can expect to have the effect that eliminates stress.
Here, if scolder comprise have Ni coating, the Metal Ball (single element metal, alloy, compound or the like) of Au coating or Cu coating and be positioned at its lip-deep Sn ball, in air, surpassing the solder bond part that also can show the high reliability combination under the soft heat situation of carrying out soft heat under 240 degrees centigrade the temperature even just can obtain.
In addition, in the present invention, also can use this scolder, wherein be formed with the bigger coating of the thickness that constitutes by Cu or Ni on the surface of heat stable resin ball and on the coating surface that constitutes by Cu or Ni, also be covered with Au coating.In addition, also can use this scolder, wherein be formed with the bigger coating of the thickness that constitutes by Cu or Ni on the surface of ball and on the coating surface that constitutes by Cu or Ni, also be covered with Au coating with low thermal coefficient of expansion.Use the reason of heat stable resin ball to be that resin has the thermal shock of alleviating effect, therefore can expect to be increased in conjunction with after useful life of thermal fatigue resistance.On the other hand, the reason that use has a ball of low thermal coefficient of expansion is that this ball can reduce the thermal coefficient of expansion of scolder thereby make the thermal coefficient of expansion after reducing be approximately the material coefficient of thermal expansion coefficient for the treatment of combination, therefore can expect to be increased in conjunction with after useful life of thermal fatigue resistance.
(embodiment 6)
Below, to using the situation of Al ball to be described by other metal ball as using.In general, refractory metal is very hard, and pure Al then is a kind of soft metal of available cheapness.Pure Al (99.99%) usually can not wetting Sn, although it is soft metal (Hvl7).Yet, can go up that to make that Sn is easy to wetting by Ni/Au coating, Ni/Cu/Au coating, Au coating, Ni/Sn coating, Cu/Ni/Sn coating being coated on pure Al.At high temperature pure Al is easy to spread in a vacuum.Therefore, by at some in conjunction with using the Sn parent metal contain Ag under the condition, just can form for example Al-Ag of compound with Al.In this case, the Al surface do not need metal lining and this point have very big benefit for the aspect that reduces cost.Ag, Zn, Cu, Ni and so on of trace can be added among the Sn so that make that Sn is easy to react with Al.The Al surface can complete wetting or wetting in the spot mode.Adopting under the mottled wetting latter event, when stress was applied on the Metal Ball, because bond strength can be guaranteed, thereby restraining force reduced when distortion, thus scolder is easy to deform and not wetted portions absorb energy as friction loss.Therefore, just obtain the very superior material of a kind of deformability.The coating that is formed by Si, Ni-Sn, Ag and so on can also be coated on the Al line and will be cut into the particle pattern with the Al line of coating then.Can produce the Al particle at low cost in a large number by in nitrogen environment, carrying out atomization process and so on.Be difficult in and produce the Al particle under the situation that surface oxidation does not take place.Yet, even when the surface once or initial when oxidized, also can handle and remove oxide-film by metal deposition.
In addition, consider and be difficult to the Al chou is lumped together, effective measures are to use the scolder (welding material, soldering paste) that wherein comprises Al ball and Sn ball, wherein the Al ball forms like this, a Ni layer is formed on the surface of Al ball, the Cu layer of big thickness is formed on this Ni layer, and also has a thin Ni layer to be coated on the surface of this Cu layer, and a thin Au layer is coated on the surface of this thin Ni layer.By Cu is provided layer, the Cu layer will form Cu-Sn compound (mainly being Cu6Sn5) with the Sn of fusing, and therefore owing to the effect of these Cu-Sn compounds, each Al ball can be bonded to each other.The Au layer that provides is used to prevent Cu layer generation oxidation.
More specifically, particle is combined, can will be coated on the surface of Al ball by the coating that Ni (1-5 micron)/Au (0.1 micron) forms for using the Ni3Sn4 compound.In addition, particle is combined, can will be coated on the surface of Al ball by the coating that Ni (0.5 micron)/Cu (3-5 micron)/Ni (0.3 micron)/Au (0.1 micron) forms for using the Cu6Sn5 compound.In addition, particle is combined, the Au coating with big thickness of 3 microns can be coated on the surface of Al particle for using the Au-Su compound.The compound that comprises a spot of Sn by use for example AuSn2, AuSn or the like combines the Al particle, just can obtain bearing the combination of high temperature.
Being formed with the Al ball of Ni/Au layer, Ni/Cu/Au layer, Ni/Cu/Ni/Au layer or Au layer and Sn ball on the surface separately can be used for carrying out solder bond at air being equal to or higher than under 240 degrees centigrade the temperature very effectively.In addition, because Al is softer than Cu, even therefore when the compound that is formed by Al and Su is very hard, the scolder that comprises Al ball and Sn ball also presents the flexibility higher than the scolder that comprises Cu ball and Sn ball (performance eliminates stress).Therefore, the scolder by the verified Al of comprising ball of temperature cycling test and so on and Sn ball can prevent effectively that the material for the treatment of combination from rupturing.
(embodiment 7)
Below, the Au ball is described.In the situation of Au ball, Sn is easy to them wetting, is therefore handling in conjunction with need not to carry out metal deposition under the situation of carrying out at short notice.Yet when weld time was longer, Sn will diffuse among the Au in a large number thereby will worry to form the Au-Sn compound of fragility.Therefore, in order to obtain a kind of soft structures, effective measures are to use very low In (indium) coating of the diffusion in Au and so on.In this case, also can use Ni, Ni-Au and so on to do to stop.By making the barrier layer thin as much as possible, the Au ball will be easily deformable.In addition, under the situation of the alloy-layer growth that can suppress to have Au, also can adopt other metal deposition structure.When combination was carried out at short notice in the die attachment method, the thickness that the alloy-layer that forms at the granule boundary place has was very little, even therefore do not providing under the situation about stopping, can expect that also the flexibility of Au can produce good effect.Also can be used in combination Au ball and indium soldered ball.
(embodiment 8)
Below, the Ag ball is described.The formation of using the Ag ball to obtain is roughly similar to the Cu ball with advantageous effects.Yet, in the present embodiment since the mechanical performance of Ag3Sn compound for example hardness and so on is highly beneficial, therefore also can use compound that the Ag particle is combined by common method.Ag ball and Cu and so on can also be mixed.What need not speak more is that Ni layer and Au layer can be formed on the surface of Ag ball.
(embodiment 9)
Below, to the situation of metal material as the Metal Ball material is described.As typical alloy-based material, available have Zn-Al base and an Au-Sn sill.The fusing point of Zn-Al parent metal is mainly in 330 degrees centigrade to 370 degrees centigrade scope, and this temperature range is suitable for utilizing Sn-Ag-Cu parent metal, Sn-Ag parent metal and Sn-Cu parent metal to carry out the level combination.Representative instance as the Zn-Al parent metal, can use Zn-Al-Mg parent metal, Zn-Al-Mg-Ga parent metal, Zn-Al-Ge parent metal, Zn-Al-Mg-Ge parent metal, and in these scolders any one, but also comprise at least a element selected from Sn, In, Ag, Cu, Au, Ni or the like.Under the situation of Zn-Al parent metal, therefore the scolder rigidity is very high for the strong generation of its oxidation.Owing to these reasons, it is pointed out that when the time in conjunction with the Si chip, may in the Si chip, crack (Shimizu et al.: " Zn-Al-Mg-GaAlloys for Pb-Free Solders for Die Attachment, " Mate 99,1999).Therefore, when using the Zn-Al parent metal, must address these problems as Metal Ball.
Therefore, in order to address these problems, in other words,, the heat resistant plastice ball that is coated with Ni/ scolder, Ni/Cu/ scolder, Ni/Ag/ scolder or Au is spread in the Zn-Al base ball equably so that reduce Young's modulus in order to reduce the rigidity of scolder.Preferably, the particle size of the particle of these diffusions is less than the particle size of Zn-Al base ball and be spread in equably in the Zn-Al base ball.When scolder was out of shape, size was about 1 micron rubber-like flexible plastics ball and also deforms so that make scolder obtaining very favorable effect aspect thermal shock and the mechanical shock eliminating.When rubber was spread in the Zn-Al base soldered ball, Young's modulus will reduce.Because baton round is spread in the Zn-Al base soldered ball almost evenly, therefore when fusing was carried out at short notice, this even diffusion form can not be subjected to very havoc.In addition, be about 400 degrees centigrade baton round, just can prevent that its organic substance from decomposing in the use resistance heating body carries out the process of combination in scolder by using heat decomposition temperature.
Zn-Al is easy to take place oxidation.Therefore, considering under the situation of its storage, preferably on the surface of Zn-Al ball, plating and be used for the Sn of replaced C u.Under the very little situation of the amount of Sn and Cu, Sn and Cu dissolve in the Zn-Al scolder in cohesive process.Because Sn is present on the surface of Zn-Al ball, therefore, for instance, is convenient to Sn is incorporated on the Ni/Au coating that forms on the Cu bar.Be not less than under 200 degrees centigrade the high temperature, therefore the situation that can not carry out combination owing to compound forms deficiency can not take place greater than the growth rate of Cu6Sn5 in the growth rate of Ni-Sn alloy-layer (Ni3Sn4).
In addition, by the Sn ball of 5-50% being sneaked in the scolder except baton round, the Sn layer will infiltrate in the Zn-Al parent metal again.In this case, the part of Sn layer is used to make the directly combination each other of Zn-Al ball.Yet the other parts of Sn layer have constituted low-melting softer Sn-Zn mutually and be present in remaining Sn in the Zn-Al parent metal etc.Therefore, any distortion can be absorbed by the rubber of Sn, Sn-Zn phase and baton round.Especially, because the compound action of baton round and Sn layer can expect that rigidity is further reduced.Even in this case, the solidus temperature of Zn-Al parent metal also can guarantee to be not less than 280 degrees centigrade, thereby is not having problems aspect the required intensity of high temperature.
By Sn coating being coated on the Zn-Al base soldered ball so that have a mind to stay the Sn phase that is not dissolved in the ball, Sn just plays the effect that absorbs distortion mutually so the rigidity of Zn-Al soldered ball just can be reduced.In order further to reduce rigidity, can when using Zn-Al base soldered ball, mix the baton round that the size that applies by metal deposition and welding is about 1 micron therein.Therefore, its Young's modulus is minimized its shock-resistant ability with regard to being improved.In addition, by using the soldering paste that will be spread in by ball, plating Sn baton round or the rubber that Sn, In etc. forms therein in Zn-Al base (for example Zn-Al-Mg, Zn-Al-Ge, Zn-Al-Mg-Ge and the Zn-Al-Mg-Ga) soldered ball, heatproof degree circulation ability and shock-resistant ability can be improved equally, thereby the high reliability of soldering paste can be guaranteed.When only using the Zn-Al parent metal, ball will very hard (being approximately 120-160Hv) and rigidity very big so will worry that large-sized Si chip breaks.In order to eliminate this worry, be arranged at soft Sn layer by will having low melting point Sn or In layer segment ball around, and by rubber is spread in ball around, just can guarantee deformability and reduce rigidity.
(embodiment 10)
In the example that Fig. 5 (a) illustrates to Fig. 5 (c), by a flat packaging type encapsulating structure less output module of being used in the portable mobile phone carrying out signal processing etc. is installed on the printed circuit board (PCB), wherein this module is a large square, the length on one bar limit is greater than 15 millimeters, in this flat packaging type encapsulating structure, come the difference of the thermal coefficient of expansion between cancellation module and the substrate by lead-in wire.In the structure of this pattern, in the system that adopts, the back side of each circuit element is incorporated on the bonded substrate with thermal conductive resin by the die attachment method, and they close on the terminal that is connected in bonded substrate by toe-in usually.For this system, the example of many employing MCM (multi-chip module) design is arranged, wherein be equipped with several chips and be positioned at each chip chip component on every side for example resistor and capacitor.Its representative instance has conventional type HIC (hybrid integrated circuit), MOS IC and so on.Module substrate material as available has the Si film-substrate, has the AIN substrate of low thermal coefficient of expansion and high-termal conductivity, glass ceramic substrate and the thermal coefficient of expansion and the approaching Al of GaAs of low thermal coefficient of expansion 2O 3Metal-cored organic substrate that substrate, the Cu and so on high-fire resistance and improved capacity of heat transmission make.
Fig. 5 (a) shows Si chip 8 is installed on a example on the Si substrate 35.Because resistor, capacitor and so on can be made of the film on the Si substrate 35, therefore can carry out higher density and install.In this example, show a kind of flip-chip mounting structure of Si chip 8.Also can adopt the Si chip by the die attachment method carry out in conjunction with and terminal closes the system that couples together by toe-in.In another example that Fig. 5 (b) illustrates, the installation method that element is installed on the printed circuit board (PCB) 49 is to use QFP-LSI pattern block structure and adopt soft Cu base lead-in wire 29.Usually, using Ni/Pd, Ni/Pd/Au, Ni/Sn to wait at the Cu 29 enterprising row metal plating that go between handles.Lead-in wire 29 carries out with combining by using soldering paste according to the present invention to heat under pressure of Si substrate 35.About going between 29, can adopt the method for using distributor to supply with lead-in wire as the straight line on row's terminal, perhaps the method for Cai Yonging is, the supply of its material separates corresponding to single terminal by heating under pressure by each terminal printing is carried out going between and forms.The Au of each Si chip 8 or Cu protuberance 18 carry out combination by will soldering paste according to the present invention feeding to bonded substrate 35.In addition, can carry out Au-Sn combination or Cu-Sn combination on the terminal that be positioned at substrate side by Sn coating is coated on.In addition, as another kind of associated methods, when providing simultaneously plating Sn terminal on substrate using Au ball protuberance, the Au-Sn combination realizes by the hot binding technology so that make the joint that forms can be enough to bear 250 degrees centigrade reflowing temperature.In addition, also can use heat-resisting electrically conductive paste.In order to protect chip; on each chip, provide silicone gel 26, comprise for example silicone and have low thermal coefficient of expansion and the flexibility of certain level and can after installation, keep the epoxy resin or the silicone resin of flowability and mechanical strength simultaneously of filler and/or rubber, thus the feasible chip that can protect and strengthen comprising the terminal part of lead-in wire.This just can carry out unleaded combination by the temperature level, and the realization to this method has proposed demand.
When using thick film substrate for example AIN substrate, glass ceramic substrate or Al 2O 3When substrate replaced the Si substrate, the installation of resistor, capacitor and so on was installed as chip component basically.In addition, can adopt the manufacturing process that carries out laser reconditioning and use the thick film soldering paste simultaneously.When resistor and capacitor are made of the thick film soldering paste, can adopt and the identical installation system of above-mentioned Si substrate.
The another kind of system that Fig. 5 (b) illustrates may further comprise the steps, and will be installed on the Al with good thermal conductivity and mechanical performance under its supine situation by the chip 8 that Si or GaAs make 2O 3On the substrate 19, utilize the pulse resistance calandria under pressure to its carry out in conjunction with, the soft heat of carrying out chip component in conjunction with, it is cleaned and carries out toe-in and close.In this case, usually according to adopt resin-encapsulated in conjunction with mode identical in the described situation of Fig. 5 (a).Similar to the situation of Fig. 5 (a), here used resin 26 has quartz filler and rubber such as silicone rubber and can reduce the epoxy resin with low thermal coefficient of expansion of thermal shock for wherein loosing, perhaps silicone resin, the perhaps a kind of resin that epoxy resin and silicone resin is mixed according to certain state or form.In this system, before having finished, the installation of chip and chip component uses to be in the not big substrate of cutting state always, and subsequently big substrate is cut apart, and after combined leads, on each part of cutting apart, covered resin.GaAs and Al 2O 3Thermal coefficient of expansion closer to each other, comprise about 50% Cu in the soldering paste of the present invention, and carry out combination by the structure of the Cu particle that combines, therefore this structure has good thermal conductivity.In order further to improve heat-sinking capability, provide heat passage under the metal-plated coating that forms below near chip 8, therefore can also be from the back heat radiation of substrate 19.Soldering paste according to the present invention is fed to the process of these terminals by printing or using distributor to carry out.Can also be used at lead-in wire 29 and Al according to soldering paste of the present invention 2O 3Solder joints 33 places of combination are provided between the substrate 19.
In situation in conjunction with the Al fin, if can adopt non-clean type, then available a kind of system may further comprise the steps,, perhaps utilize by the operation of soft heat to combine to supply with soldering paste and to use resistance heating body, laser, light beam or the like under pressure, to carry out combination by distributor or printing with the chip component while around the form of fin.Under the situation of Al material, plating Ni and so on handles as metal deposition and carries out.Under the situation of fin combination, in order to realize non-clean type, Al formation paper tinsel shape and the paper tinsel that so obtains carry out combination by resistance heating body under pressure in nitrogen environment.
Fig. 5 (c) shows the part of a modular structure, and wherein electronic component is installed on the metal core substrate that wherein has metal 39 and utilizes Al fin 31 to encapsulate.Chip 13 can have structure down and can directly be incorporated into by dead end 45 is installed on the metal 39 of metal core substrate so that heat radiation.In conjunction with being undertaken by LGA (lead-in wire grid array) system, the pad of die terminals (electrode) is made by Ni/Au or Ag/-Pt/Ni/Au, and the pad of substrate terminal (electrode) is made by Cu/Ni/Au, and they use soldering paste according to the present invention to combine each other.Have in use under the situation of the polyimide substrate of low thermal coefficient of expansion and heat resistance or the composite type substrate that use has the heat resistance similar to it, can utilize the module of temperature level to install, wherein semiconductor device 13 uses and directly installs according to soldering paste 36 of the present invention.Under the situation of the chip of high calorific capacity, also can be by heat passage with the heat metal 39 that leads.Owing in every hot road, have the Cu particle that contacts with each other, so heat can instantaneous guiding metal.In other words, this structure has good thermal conductivity.In this case, same, for part, also use soldering paste 31 according to the present invention to carry out combination in conjunction with calotte 31.Soldering paste part 36 can be finished printing in once-through operation.
An example as present embodiment being applied to circuit element above is described the RF module.Yet the present invention also can be applicable to any one SAW that is used as the used band pass filter of various types of device for mobile communication (surface acoustic wave) apparatus structure, PA (high frequency power amplifier) module, is used for monitoring module and other module and the circuit element of lithium battery.The product scope that can use scolder of the present invention both had been not limited to comprise and also had been not limited to notebook-sized personal computer or the like by the portable cell phone of mobile product.In other words, in current digital times, scolder of the present invention can be applied to the module installation elements that can use in novel household electrical equipment and so on.Need not speak more, can be used for using the temperature level combination of lead-free solder according to scolder of the present invention.
(embodiment 11)
Fig. 6 shows an example in the Plastic Package that applies the present invention to use always.In the usual way, the back side of Si chip 25 uses electrically conductive paste 54 to be incorporated in the contact pin 53 of being made by 42 alloys.Circuit element uses gold thread 8 and so on to close by toe-in and is connected on the corresponding lead-in wire 29 and uses resin 5 to carry out molding.Then, with unleaded to combine design corresponding, Sn base coating is coated on the lead-in wire.In the usual way, fusing point is that 183 degrees centigrade eutectic Sn-37Pb scolder can be used on printed circuit board (PCB) and installs, and therefore, just can the highlyest carry out the soft heat combination under 220 degrees centigrade.Yet, under the situation of unleaded combination, because soft heat is used in combination Sn-3Ag-0.5Cu scolder (fusing point: 217-221 degree centigrade) and carries out, reflowing temperature just becomes about 240 degrees centigrade, in other words, maximum temperature has improved about 20 degrees centigrade than the maximum temperature of conventional method.Therefore, with regard to the heat-resisting conductivity type soldering paste commonly used that is used for forming combination between the Si chip 25 and the contact pin 53 of being made by the 42-alloy, the bond strength high temperature under can reduce, so will worry that its reliability is subjected to negative effect.Therefore, the soldering paste of the application of the invention replaces the conductivity type soldering paste, just can carry out unleaded combination about 290 degrees centigrade for die attachment.In all Plastic Package structures that this application in Plastic Package can be applied to therein Si chip and contact pin are combined.Shape about lead-in wire structurally has gull aerofoil profile, platypelloid type, J wire type, flushes wire type and unleaded type.Need not speak more, the present invention can be applied to all these types.
(embodiment 12)
Fig. 7 (a) shows an example more specifically that applies the present invention to the installation of high-frequency RF module to Fig. 7 (c).Fig. 7 (a) is the cutaway view of module, and Fig. 7 (b) is the plane graph of module, and the Al fin 31 that wherein is positioned at upper surface has been dismantled.
In practical structure, several MOSFET elements comprise that separately is used to produce the chip 13 that radio wave is of a size of 1 * 1.5 millimeter, these MOSFET elements use up in conjunction with installing so that be adapted to the multiband design, and for example resistor and capacitor also form a high-frequency circuit that is used for effectively producing radio wave at the MOSFET component ambient by element 17.Chip component also is miniaturization and use is 1005,0603 and so on.Block length is about 7 millimeters, and width is about 14 millimeters, utilizes high-density installation and is miniaturization.
In the present embodiment, only consider the function aspects of scolder, and in a described model, a circuit element and a chip component are installed as its typical case's representative.In this case, described in hereinafter, chip 13 and chip component 17 pass through solder bonds according to the present invention on substrate 43.The terminal of Si (or GaAs) chip 13 closes 8 by toe-in and is incorporated on the pad (electrode) of substrate 43, and is electrically connected on the terminal 46 that provides external connecting to divide on the back side of substrate by through hole 44 and interconnector 45.Chip component 17 solder bond are on the terminal 46 that provides external connecting to divide on the back side that is electrically connected on the pad of substrate and by through hole 44 and interconnector 45 at substrate.Usually scribble silicone gel (omitting among the figure) on the chip 13.Below chip 13, provide the heat passage 44 that is used to dispel the heat, this heat passage 44 leads to terminal 42 so that go up heat radiation overleaf.Under the situation of ceramic substrate, the thick film soldering paste of the good Cu sill of thermal conductivity is housed in the heat passage.When using the poor organic substrate of thermal endurance, by using according to soldering paste of the present invention, can in 250 degrees centigrade to 290 degrees centigrade scope, weld, carry out combination or the like in conjunction with chip component with in heat passage for use in the back side in conjunction with chip.In addition, being covered with the Al fin 31 of whole module and substrate 43 is fixed together by calking and so on.The installation of this module is undertaken by providing outside terminal 46 solder bond that connect to go up in printed circuit board (PCB) and so on, and in this case, need carry out the combination of temperature level.
In the example that Fig. 7 (c) illustrates, except this FR module, BGA N-type semiconductor N device and chip component 17 are installed also on printed circuit board (PCB) 49.In semiconductor device, use soldering paste according to the present invention with semiconductor chip 25 with up combinations of states on bonded substrate 14, and the terminal of the terminal of semiconductor chip 25 and bonded substrate 14 closes by toe-in and combines, and resin-encapsulated is carried out in the zone around the bound fraction.For instance, by under 290 degrees centigrade, soldering paste being melted for 5 seconds, just can use resistance heating body with semiconductor chip 25 die attachment on bonded substrate 14.In addition, at the back side of bonded substrate 14, be formed with solder ball terminals 30.What use in solder ball terminals 30 for instance, is the Sn-3Ag-0.5Cu scolder.And, semiconductor device (being TSOP-LSI in this example) also solder bond in the back side of substrate 49, an example of so-called two-sided installation that Here it is.
For instance, as a kind of two-sided installation method, at first the Sn-3Ag-0.5Cu soldering paste is printed in the pad part 18 on the printed circuit board (PCB) 49.Then, for from semiconductor device for example this side of installed surface of TSOP-LSI 50 carry out solder bond, TSOP-LSI 50 is positioned and under the highest 240 degrees centigrade it is carried out the soft heat combination.Then, chip component 17, module and semiconductor are positioned and under the highest 240 degrees centigrade it carried out the soft heat combination, thereby realize two-sided installation.Common way is at first the Light gauge elements with temperature capacity to be carried out the soft heat combination, carries out combination to not having a heavy element of temperature capacity then.In the stage of back, carry out soft heat in conjunction with the time, require the scolder of the element of at first combination not fall, and desirable idea is to prevent that scolder from melting again.
In soft heat and undertaken by soft heat under the situation of two-sided installation, will produce the situation that the temperature that has been installed on the joint on the back side surpasses the fusing point of scolder.Yet, in most of the cases, when the element of installing can not fall, just not do not have problems.Under the situation of soft heat, the temperature difference between the substrate upper and lower surface is very little, so the warpage of substrate is very little, and even when solder fusing, because capillary effect, Light gauge elements can not fall yet.Although above the combination to Cu ball and Sn is described in representative instance according to the present invention, need not speak more, the present invention is equally applicable to other compound mode described in the claim.
(embodiment 13)
Below, in order further to reduce the cost of RF module, hereinafter to using resin encapsulation method to be described according to soldering paste of the present invention.
Fig. 8 (a) shows the RF module installation step of resin encapsulation method, and Fig. 8 (b) shows module is installed on secondary installing and installation step on the printed circuit board (PCB).Fig. 9 (a) to Fig. 9 (d) be section model figure, show the assemble sequence in the RF module installation step shown in Fig. 8 (a).Square Al 2O 3The size of multi-layer ceramics substrate 43 1 sides is 100 to 150 millimeters, and Al 2O 3Provide the slit 62 that is used to disconnect on the multi-layer ceramics substrate 43 so that can be divided into corresponding a plurality of module substrate.Will be to Al 2O 3Each Si chip 13 on the multi-layer ceramics substrate 43 carries out being formed with cavity 61 on the position of die attachment, and all is coated with thick Cu film/Ni/Au or Ag-Pi/Ni/Au on each surface of cavity 61.Just be formed with a plurality of heat passages (Cu thick film conductor etc. is housed) 44 under die attachment, they are connected on the pad 45 that is formed on the substrate back so that by multilayer board 49 dispel the heat (Fig. 9 (d)).This just feasible heat that high pio chip produced by several watts can distribute smoothly.Use the Ag-Pt thick film conductor to constitute Al 2O 3Cushion material on the MULTILAYER SUBSTRATE 43.In addition, according to the type of bonded substrate and manufacture method (in the present embodiment by Al 2O 3Make), can use the Cu thick film conductor, perhaps can use W-Ni conductor or Ag-Pd conductor.The pad part that chip component is installed is separately made by the thickness coating that Ag-Pt film/Ni/Au forms.About being formed at the pad part of Si chip back, what use in the present embodiment is the Ti/Ni/Au film.Yet pad is not limited to this structure, also can be used as pad as Cr/Ni/Au film commonly used etc.
Si chip 13 being carried out die attachment and chip component 17 being carried out soft heat (will be described in detail this subsequently) afterwards, cleaning Al 2O 3The laggard line of MULTILAYER SUBSTRATE is in conjunction with 8 (Fig. 9 (b)).In addition, resin is provided and obtains section as shown in Fig. 9 (c) to it by printing.Resin is silicone resin or low elasticity epoxy resin, prints by scraper plate 65, as shown in Figure 10, so that utilize resin to cover Al by once-through operation 2O 3MULTILAYER SUBSTRATE 43, thereby at Al 2O 3Form a single operation packed part 73 on the MULTILAYER SUBSTRATE 43.After resin is installed or solidified, do distinguishing mark by laser and so on.After cutting apart substrate, carry out flag check.Figure 11 is the perspective view of a module of finishing by following steps, and these steps comprise, cut apart Al 2O 3MULTILAYER SUBSTRATE 43, it is installed on the printed circuit board (PCB) and to it carries out soft heat.Module is made with the LGA structure so that can carry out high-density installation on printed circuit board (PCB).
Below, by above description being replenished with reference to the sequence of steps of the assembling of the RF module shown in the figure 8 (a).Soldering paste according to the present invention feeds to chip component by printing, and for the chip 13 that will be installed on the cavity, utilizes distributor to supply with this soldering paste.At first, passive device 17, for example chip resister, chip capacitor and so on are installed.Then, 1 millimeter * 1.5 millimeters chip 13 is installed, by under 290 degrees centigrade, utilizing calandria to push Si chip 13 lightly and equably it is carried out die attachment simultaneously and its leveling.The soft heat of the die attachment of Si chip and chip component 17 is mainly by being positioned at Al 2O 3The calandria of MULTILAYER SUBSTRATE below order set by step carries out.In order to eliminate the space, use the Cu ball of plating Sn.At 290 degrees centigrade, the Cu ball a bit softens and the at high temperature mobile raising of Sn, thereby activates the reaction between Cu and the Ni.In this case, be in contact with one another and Cu particle and metal deposition part forms the contact site office that contacts each other and will form compound at the Cu particle.In case after compound forms,, therefore just can not melt again, even under 250 degrees centigrade secondary reflowing temperature because their fusing points are very high.In addition, because the die attachment temperature is higher than the secondary reflowing temperature, thereby Sn just can be fully wetting and be fully spread out and form compound.Therefore, in the secondary softening-melting process, compound layer at high temperature can provide enough intensity, even thereby Si in the structure of resin-encapsulated, can not move yet.In addition, even take place at low melting point Sn under the situation of fusing again, because it has lived through the heating under the higher temperature, even therefore it can not flow out yet under 250 degrees centigrade high temperature.Owing to these reasons, the Si chip just is maintained fixed in the secondary softening-melting process, so the module feature can not be subjected to the influence that Sn melts again.
Below, by the situation according to the situation of soldering paste of the present invention and conventional type Pb parent metal (make and can carry out soft heat under 290 degrees centigrade) is compared, the influence that resin is produced is described hereinafter.
In Figure 12 (a) and 12 (b), show and carrying out secondary soft heat (220 degrees centigrade), because the outflow 71 of conventional type Pb parent metal (solidus temperature is 245 degrees centigrade) and the model of the short circuit phenomenon that in chip component 17, produces so that be incorporated under the situation (and composition scolder 30 similar to the installment state of Figure 11 is a kind of Sn-Pb eutectic) on the printed circuit board (PCB).Under the situation of high-elasticity epoxy resin 68 encapsulation of module by comprising filler (promptly, be coated with under the situation that is usually used in carrying out Sn that metal deposition handles or Sn-Pb at chip component, because the formation of Sn-Pb eutectic phase, the fusing point that scolder melts is again reduced to about 180 degrees centigrade), short circuit is owing to cause under the pressure at this resin at 180 degrees centigrade of modulus of elasticity that use down resins, reaches 1000MPa in the outflow of 180 degrees centigrade of following scolders.Although the fusing point of Pb parent metal is initially 245 degrees centigrade solidus temperature, owing to be coated with the Sn-Pb scolder and substrate side is coated with Au on the pad of chip component, thereby it is reduced to about 180 degrees centigrade.Therefore, Pb parent metal (220 degrees centigrade) in the secondary softening-melting process is in molten state again.When the Pb parent metal when solid becomes liquid, 3.6% volumetric expansion will take place suddenly in scolder.Form the pressure 70 of melting dilation again of Pb parent metal 76 of a leg and resin pressure 69 in chip component one side with the mutual balance of very big power and make and peel off, thereby make scolder outflow 71 as the interface that between chip upper surface and resin, forms of structural fragile part.Therefore, the probability very high (70%) that is short-circuited with the pad of opposite one side.Also find just can reduce the incidence of this short circuit phenomenon by reducing the modulus of elasticity of (180 degrees centigrade) determined resin at high temperature.Because for the softening existence restriction of epoxy resin, discovering by add filler and so in soft silicone resin to increase modulus of elasticity.Therefore, it is found that when the modulus of elasticity under 180 degrees centigrade is not higher than 10Mpa, will the outflow 71 of scolder can not take place.When 180 degrees centigrade of following modulus of elasticity increase to 200Mpa, the probability that short circuit takes place is 2%.In view of the foregoing, in the solder structure of fusing again, require the modulus of elasticity of resin under 180 degrees centigrade, to be no more than 200MPa.
Then,, figure 13 illustrates the influence that produces by flowing out, simultaneously itself and conventional type scolder are compared for solder paste texture according to the present invention.As mentioned above, when use according to soldering paste of the present invention carry out in conjunction with the time, Sn shared volume in the part of fusing is about half, and part also is because the swell value of Sn self is very little, therefore to present size be 1.4% very little value to the volume expansion ratio of scolder, has only 1/2.6 times of expansion ratio of Pb parent metal.In addition, shown in the model as shown in Figure 13, the Cu particle combines with a contact condition, even when Sn melts, the pressure of resin also can obtain balance by the reaction of affined Cu particle, therefore fragmentation can not take place in welding portion, in other words, can expect a kind of completely different phenomenon in the situation of solder fusing.In other words, can expect that the probability that is short-circuited owing to the outflow of Sn is very low between pad (electrode).Therefore, even use, also can prevent the outflow of scolder according to designing even when adding filler, also can become some soft epoxy resin.According to the result of Figure 13, suppose that Sn melts fully and allow that the modulus of elasticity of resin and volume expansion ratio are inversely proportional to that then the resin modulus of elasticity of Yun Xuing becomes 500Mpa.In fact, can expect that the reaction of Cu particle can tell on, even thereby also can not flow out can expect to use resin the time with high elastic modulus.Under the situation that can use epoxy resin, cutting apart of substrate can be carried out mechanically, and do not need to utilize laser etc. to cut in resin, therefore can also boost productivity and efficient.
Above-mentioned module installation method also can be applied to other ceramic substrate, organic metal core substrate and composite type substrate.In addition, chip component can either be according to carrying out combination towards upper type, can carry out combination according to mode down again.About module, the present invention also can be applicable to surface acoustic wave (SAW) module, MOS IC module, memory module, multi-chip module or the like.
(embodiment 14)
Below, to apply the present invention to high pio chip for example an example in the resin-encapsulated of motor driver IC be described.Figure 14 (a) is the plane graph of high output resin-encapsulated, and wherein lead frame 51 and heating panel 52 combine and calking.Figure 14 (b) is the cutaway view of encapsulation.Figure 14 (c) is the partial enlarged drawing of the circle part among Figure 14 (b).In this example, semiconductor chip 25 uses soldering paste according to the present invention to be incorporated on the heating panel (fin) 52.The lead-in wire 51 and the terminal of semiconductor chip 25 close 8 by toe-in and combine and use resin-encapsulated.Lead-in wire is made by the Cu sill.
Figure 15 is the flow chart of the step of high output resin-encapsulated.At first, by supplying with soldering paste 3 with semiconductor chip 25 die attachment on the lead frame 51 and heating panel 52 that connect by calking.Then, as shown in FIG., utilize lead-in wire 51, gold thread 8 and so on that the semiconductor chip 25 that carries out combination by the die attachment method is proceeded toe-in and close.Subsequently, after the baffle plate cutting, carry out resin-encapsulated and carry out Sn parent metal plating.Then, go between cutting and lead forming are processed and are carried out the heating panel cutting, thereby finish encapsulation.The back side pad of Si chip can be by material commonly used, and for example Cr-Ni-Au, Cr-Cu-Au and Ti-Pt-Au carry out metal deposition.Even,, just can obtain good effect as long as form rich Au compound with high Au-Sn fusing point containing under the bigger situation of Au amount.About die attachment, it uses initial pressure to carry out for 5 seconds as the resistance heating body of 1kgf down at 300 degrees centigrade after supplying with soldering paste by printing.
For jumbo chip, preferably, under the situation of hard especially Zn-Al parent metal, guarantee high reliability by adding rubber and low bulk filler.
(embodiment 15)
For the example of BGA and CSP, Figure 16 (a) and 16 (b) show the encapsulation of chip 25 and bonded substrate 14, and this encapsulation is by using even also can keeping the Cu ball 80 of intensity to carry out the temperature level of Pb-free solder in conjunction with realizing under 270 degrees centigrade.According to routine, the temperature level is used in combination high-melting-point Pb-(5-10) Sn scolder and carries out so that chip and ceramic bonded substrate are combined.Yet, in the time will using Pb-free solder, just do not have method can replace conventional method.Therefore even when the solder portion fractional melting, also can keep bond strength therefore, provide a kind of like this structure, in this structure, utilized the Sn parent metal and by its compound that forms, bound fraction can not melt when soft heat.Figure 16 (a) shows the section model of BGA/CSP, wherein as a kind of organic substrate, uses the composite type substrate to adopt and makes bonded substrate 14, although composite type substrate, metal core substrate, ceramic substrate or the like can be considered to use.About the shape of protuberance, the plating Cu protuberance (Figure 16 (d)) that has spherical protuberance (Figure 16 (b)), toe-in to close protuberance (Figure 16 (c)) and have easily deformable structure.External connection terminals be the Cu pad or be ball or the soldering paste form be coated with on the Ni/Au part 83 the Sn-Ag-Cu base welding portion 30 that forms.
In the situation shown in Figure 16 (a), can obtain to bear the combination of soft heat by following steps: utilize vapour deposition, plating, soldering paste or comprise Metal Ball and the composite solder paste of soldered ball is sent to Sn on the film pad 82 of Si chip 25 sides; By the thermal pressure associated methods with Metal Ball 80 for example the ball, the Al ball, the organic resin ball of metal deposition of plating Au of Cu, Ag, Au combine with it, thereby with film cushion material (Cu, Ni, Ag etc.) contacted contact portion 84 places or this contact portion near formation have the intermetallic compound 84 of Sn.Then, the ball pad 83 that will form on above chip is positioned bonded substrate (Al 2O 3, AlN, organic, composite type substrate or metal core substrate) on 14 the pad, supply to have the Metal Ball of comprising, scolder (Sn, Sn-Ag, Sn-Ag-Cu, Sn-Cu or the like on this pad in advance, perhaps comprise at least a scolder among In, Bi and the Zn) and the soldering paste of ball, and carry out the thermal pressure combination, so that similarly, form a kind of pad 83 of bonded substrate and the metallic compound 84 of Sn, thereby a kind of structure that can bear 280 degrees centigrade can be provided.Even work as the protuberance height not simultaneously, this difference also can be compensated by composite solder paste.Therefore; just can obtain the BGA or the CSP of high reliability; the mechanical load that wherein acts on each soldering paste protuberance and the Si chip mat is very little; therefore will increase the useful life of protuberance; and wherein have good flowability, be in the Young's modulus and 10 to 60 * 10 in 50 to the 15000Mpa scopes in order to provide mechanical protection to avoid drop impact down, to use -6/ degree centigrade the solventfree resin 81 of thermal coefficient of expansion form fillers.
Figure 16 (b) is described below to the method for Figure 16 (d).
Figure 17 (a) shows the associated methods that the system by the Cu ball 80 shown in Figure 16 (b) combines Si chip 25 and bonded substrate 14 to Figure 17 (c).Although the electrode terminal on the chip 20 82 is made by Ti/Pt/Au in this case, material is not limited to Ti/Pt/Au.In the processing of wafers stage, with Sn coating, Sn-Ag-Cu parent metal or comprise Metal Ball and the composite solder paste of soldered ball 85 is delivered on the film pad 82 that forms on each chip.The purpose that Au is provided mainly is to be used for preventing surface oxidation, and the thickness of Au is no more than 0.1 micron.Therefore, Au is in the scolder of solid solution state after being dissolved in fusing.About the Pt-Sn compound layer, there are multiple compound for example Pt3Sn and PtSn2.When the diameter of ball 80 is big, needs to adopt and to supply with the printing process of thick scolder 85 so that ball is fixed.In addition, also can use the ball of the scolder of plating in advance.
In the state that Figure 17 (a) illustrates, after solder flux 4 being coated on the terminal 23 that is coated with Sn, 150 microns Metal Ball (Cu ball) 80 positions and fixes by metal-mask miter guide.Contact in order to guarantee that all balls on wafer or the chip can both just form with the core of film pad 82, by the fusing of flat pulse current resistance calandria and so under the pressure that carried out for 5 seconds under 290 degrees centigrade.Because the size difference of the Cu ball 80 in the chip, some balls can not form with the pad part and contact.Yet under the situation of these balls near the pad part, the probability that forms alloy-layer will uprise, although this will depend on Cu plastic deformation at high temperature.Even exist a little protuberance to contact and do not form alloy-layer with the pad part, just can not have problems as long as most of protuberance forms alloy-layer by the Sn layer.Under the situation of composite solder paste 34, even when Cu ball 80 does not contact with the formation of pad part, the pad part also can be by being connected with C u ball at the alloy-layer in conjunction with back formation, even therefore at high temperature also can proof strength.
The section of fusing rear electrode part has been shown among Figure 17 (b).The Cu ball forms with terminal and contacts, and contact portion 84 is carried out combination by Pt-Sn and Cu-Sn compound.Even by under the situation of the complete combination of compound, also can exist because therefore measure such as the heating in the subsequent step, pressurization thereby generate such a case of alloy-layer can realize its connection in contact portion.Although the Sn leg forms in the neighboring area, Sn usually can not wetting and distribution on whole C u always.After the combination of ball is finished, each wafer to chip cleans (under the situation of wafer, the wafer incision is thought that each chip is used), utilize pulse current resistance calandria to attract the back side of chip then, pommel is positioned and fixed on the composite solder paste 36 that forms on the electrode terminal 83 in composite type bonded substrate 14, and melts under the pressure that carried out for 5 seconds under 290 degrees centigrade when spraying nitrogen.When not carrying out the resin filling in the subsequent step, can use solder flux.
The section that Figure 17 (c) obtains after showing and having carried out melting under the pressure.Electrode terminal 83 from the electrode terminal 82 of chip side to the bonded substrate side, all refractory metals and intermetallic compound 41 or the like adjoining land is connected to each other, even therefore also can not peel off in follow-up soft heat step.Because the height difference of ball protuberance, some protuberances can not form with the pad on the bonded substrate and contact.Yet, owing to these ball protuberances are connected by intermetallic compound 84, even therefore in softening-melting process, also can not have problems.
Figure 16 (c) shows the toe-in of Si chip side to be closed terminal (Cr/Ni/Au, or the like) 48 and gives prominence to terminal 86 and so on by the line that Cu, Ag or Au and so on form in conjunction with (in some cases, can using ultrasound ripple) by thermal pressure and combines.The outstanding terminal of line is characterised in that shape that it is out of shape by capillarity and the neck of tearing thereof.Although in the middle of some, the height difference of the neck of tearing is very big, and irregular height has obtained smoothly in pressure process, and because it carries out combination by mixing soldering paste, therefore can not have problems.About the material of the outstanding terminal of line, can adopt can with Sn good wet and softer Au, Ag, Cu and Al material.Under the situation of Al, its purposes is limited to can be very narrow with the scolder and the range of choice of Sn good wet.Yet, can use Al.Similar to the situation shown in Figure 16 (b), because the cleaning in narrow crack can produce difficulty in operation, so prerequisite is to use non-clean method.After the location, same just can be by when spraying nitrogen, carrying out the intermetallic compound 84 that thermal pressure forms in conjunction with the pad that forms by Sn and bonded substrate, can form the intermetallic compound 41 that forms by bonded substrate electrode and Sn equally, therefore just can obtain a kind of integrated structure that can bear 280 degrees centigrade, similar to the situation of Figure 16 (b).
The method of the structure of production Figure 16 (d) has been shown in Figure 18 (a) and 18 (b).This method is a kind of system, in this system, in wafer processing, settle again by the Cu terminal 87 on the semiconductor device of Si chip 25, polyimide insulative film 90 and so on, and in this system, form protuberance by Cu coating 88 subsequently.Use photoresist 89 and Cu coating technology, the protuberance structure 91 of a kind of Cu of plating is provided, this structure is not simple protuberance, but has the thin neck that is easy in the distortion of stress lower edge in-plane.Figure 18 (a) is the profile of the model that forms in the wafer processing, wherein, in order to guarantee that can not produce stress on the terminal of resetting concentrates, use photoresist 89 and coating to form a kind of easily deformable structure, photoresist is removed so that can form the Cu protuberance subsequently.Figure 18 (b) shows the section that utilizes the bound fraction that the intermetallic compound 84 of Cu6Sn5 forms by following steps between Cu protuberance 91 and Cu terminal, and these steps comprise: the Cu protuberance 91 of the composite solder paste of coating Cu and Sn on the bonded substrate 14, positioning chip and under the situation of not using solder flux in nitrogen environment to its pressurized, heated (under 290 degrees centigrade, carrying out for 5 seconds).
(embodiment 16)
Below, in order to check the proper range of the Metal Ball (selection Cu is a typical composition) that is included in the soldering paste and the ratio of soldered ball (selection Sn is a typical composition), the weight ratio of weight ratio (selection Sn is a typical composition), Sn and the Cu (Sn/Cu) of Sn and Cu is changed.Assay as shown in Figure 19.About evaluation method, according to contact situation and/or Cu particle near situation or the like, the section of the bound fraction after the soft heat is observed and is checked the right quantity of the composition of mixing.Here used solder flux is non-clean type commonly used.About the particle size of Cu and Sn, use 20 to 40 microns bigger particle.Found that preferred 0.6 to 1.4 the scope of Sn/Cu ratio ranges, and more preferably 0.8 to 1.0 scope.Unless particle size mostly is 50 microns or littler most, otherwise can not adopt meticulous design (for the diameter of spacing, each terminal and distance therebetween), wieldy is 20 to 30 microns level.Also use 5 to 10 microns fine particle to be used as the limit particle size of above meticulous design.Yet, under the too meticulous situation of size, because surface area increases and because the reducing power of solder flux is restricted, will produce the problems such as softness feature that remain and lose Sn owing to the acceleration of Cu-Sn alloying such as soldered ball.Scolder (Sn) does not relate to the problem of particle size, because it finally can melt.Yet, under the soldering paste state, require Cu ball and Sn soldered ball uniformly dispersing, so that reach the basic demand that the particle size that makes two kinds of balls is in same level.In addition, need coating layer thickness be reached about 1 micron so that make scolder become wetting easily plating Sn on the surface of Cu particle.This just makes the burden on the solder flux to be minimized.
In order to reduce the rigidity of compound flux, effectively way is that baton round with soft metal deposition intersperses among in Metal Ball and the soldered ball.Especially, under the situation of hard metal, this way can effectively improve reliability, because the flexible plastics ball plays the effect that reduces distortion and thermal shock.Similarly,,, just can reduce the stress in the joint, therefore can expect to obtain high reliability as invar, silicon dioxide, aluminium nitride and carborundum by scattering the material of the low-thermal-expansion of metal deposition in composite solder.Here, alloy refers to and can reduce its fusing point but not the new material of its mechanical performance.Although alloy is generally hard material, the Al that this performance of alloy can be by scattering soft metal ball such as metal deposition, baton round or the like are improved.
Although the present invention who is made by the present inventor is illustrated in conjunction with some embodiment, the present invention is not limited to the foregoing description, and can make various changes under the situation that does not deviate from main idea of the present invention.
In addition, in view of disclosed various aspects in the foregoing description, recapitulaion following typical case of the present invention constitute, and they are as follows:
(1) comprises that a kind of electronic component and one are installed with in the electronic installation of installation substrate of electronic component in the above, the electrode of electronic component is connected by the welded joint branch that is formed by the scolder that comprises Sn base soldered ball and Metal Ball with the electrode that substrate is installed, wherein the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, and wherein the surface coverage of each Metal Ball has a Ni layer and is coated with an Au layer on the Ni layer.
(2) in constituting the electronic installation described in (1), Metal Ball is the Cu ball.
(3) in constituting the electronic installation described in (1), Metal Ball is the Al ball.
(4) in constituting the electronic installation described in (1), Metal Ball is the Ag ball.
(5) in constituting the electronic installation described in (1), Metal Ball is any one that select from the group that comprises Cu alloying pellet, Cu-Sn alloying pellet, Ni-Sn alloying pellet, Zn-Al base alloying pellet and Au-Sn base alloying pellet.
(6) in constituting the electronic installation described in (1), Metal Ball comprises Cu ball and Cu-Sn alloying pellet.
(7) in the electronic installation described in each in constituting (1) to (6), the diameter of Metal Ball is 5 microns to 40 microns.
(8) in the electronic installation described in each in constituting (1) to (7), be equal to or higher than under 240 degrees centigrade the welding temperature in air, the function of Au layer is to prevent Metal Ball generation oxidation, and the effect of Ni layer is to prevent that the Au layer from diffusing in the Metal Ball.
(9) in constituting the electronic installation described in (8), Metal Ball is that Cu ball and the effect of Ni layer are to prevent to form the Cu3Sn compound that produces by Cu ball and reaction between the basic soldered ball of Sn.
(10) in the electronic installation described in each in constituting (1) to (6), the Ni layer has from being equal to or higher than 0.1 micron to the thickness that is equal to or less than 1 micron.
(11) in the electronic installation described in each in constituting (1) to (6), the Au layer has from being equal to or higher than 0.01 micron to the thickness that is equal to or less than 0.1 micron.
(12) comprise that a kind of semiconductor device and one are installed with in the electronic installation of installation substrate of semiconductor device in the above, wherein the electrode of semiconductor device and electrode utilization that substrate is installed are connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and each Metal Ball combines by the compound that is made of metal and Sn.
(13) in constituting the electronic installation described in (12), Metal Ball is the Cu ball.
(14) in constituting the electronic installation described in (12), in bound fraction, Metal Ball combines by the compound that is made of metal and Sn.
(15) at a kind of semiconductor device that comprises, in the electronic installation of first substrate that semiconductor device is installed in the above and second substrate that first substrate is installed in the above, wherein the electrode utilization of the electrode of semiconductor device and first substrate is connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and the electrode of the electrode of first substrate and second substrate is by each free Sn-Ag parent metal, the Sn-Ag-Cu parent metal, the bound fraction of any one formation at least in Sn-Cu parent metal and the Sn-Zn parent metal is connected to each other.
(16) in constituting the electronic installation described in (15), the electrode of the electrode of first substrate and second substrate is connected to each other by the bound fraction that is formed by Sn-(2.0-3.5) Ag-(0.5-1.0) Cu scolder.
(17) comprise that a kind of semiconductor chip and one are installed with in the electronic installation of installation substrate of semiconductor chip in the above, wherein the joint terminal of substrate closes the joint terminal that forms on the side surface with semiconductor chip by toe-in and is connected, and the opposite side of semiconductor chip surface and substrate utilization are connected to each other by making scolder stand the bound fraction that soft heat forms separately, wherein scolder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and each Metal Ball combines by the compound that is made of metal and Sn.
(18) in constituting the electronic installation described in (17), substrate has and is positioned at and the combined outside terminal that is formed with on the substrate surface opposing backside surface of joint terminal, and the combined outside terminal by in Sn-Ag parent metal, Sn-Ag-Cu parent metal, Sn-Cu parent metal and the Sn-Zn parent metal any one forms at least.
(19) a kind of be used for making comprise electronic component, in the method for the electronic installation of first substrate that electronic component is installed in the above and second substrate that first substrate is installed in the above, wherein this method comprises a first step and one second step, in first step, the electrode of the electrode of electronic component and first substrate is being equal to or higher than 240 degrees centigrade and be equal to or less than and stand soft heat under the temperature of heat resisting temperature of electronic component and be connected to each other by making first lead-free solder, wherein first lead-free solder comprises Sn base soldered ball and Metal Ball, the fusing point of Metal Ball is higher than the fusing point of Sn base soldered ball, be coated with a Ni layer on each Metal Ball and be coated with an Au layer on the Ni layer, and in second step, first substrate and second substrate that electronic component is installed above are bonded to each other by making second lead-free solder stand soft heat under the temperature of the reflowing temperature that is lower than first step.
(20) constituting the method that is used for making electronic installation described in (19), the soft heat of first pb-free solder is carried out in air.
(21) constituting the method that is used for making electronic installation described in (19), the soft heat of first pb-free solder is carried out to being equal to or less than under 300 degrees centigrade of temperature in the scope being equal to or higher than 270 degrees centigrade.
(22) constituting the method that is used for making electronic installation described in (19), first substrate combines by using Sn-Ag parent metal, Sn-Ag-Cu parent metal and Sn-Zn parent metal to carry out as second lead-free solder with second substrate.
(23) constituting the method that is used for making electronic installation described in (22), first substrate combines by using Sn-(2.0-3.5) Ag-(0.5-1.0) Cu scolder to carry out as the Sn-Ag-Cu parent metal with second substrate.
Below the advantageous effects that obtains by typical essential characteristic of the present invention is carried out briefly Describe.
According to the present invention, can provide and in the combination of temperature level, at high temperature to keep combination The scolder of intensity. Especially, can provide and consider that airborne pb-free solder connects and develops Soldering paste, welding joint method and weld connection structure.
In addition, according to the present invention, can provide a kind of use can at high temperature keep in conjunction with strong The temperature level associated methods of the scolder of degree. Especially, can provide the temperature level in conjunction with the side Method, even when in air, using leadless welding material to weld, also can be in temperature end Keep in conjunction with reliability in the bound fraction.
In addition, according to the present invention, can provide a kind of have can at high temperature keep in conjunction with strong The electronic installation of the bound fraction of degree. Especially, can provide electronic installation, even work as at sky When using leadless welding material to weld in the gas, the combination that also has the temperature end bound fraction can Lean on property.

Claims (7)

1. method of making electronic installation, wherein this electronic installation has the substrate that chip component and semiconductor chip are installed in the above, and described method comprises:
By scolder chip component is welded to described substrate, wherein scolder comprises Sn base soldered ball and the Metal Ball that is coated with Ni layer and Au layer;
It is characterized in that welding temperature is greater than the fusion temperature of Sn base soldered ball and less than the fusion temperature of Metal Ball.
2. the method for manufacturing electronic installation as claimed in claim 1 is characterized in that, described Metal Ball is the Cu ball.
3. the method for manufacturing electronic installation as claimed in claim 1 is characterized in that, Metal Ball is choose wantonly from following a kind of: Ag ball, Au ball, Al ball, Ni ball, Cu alloying pellet, Cu-Sn alloying pellet, Ni-Sn alloying pellet.
4. the method for manufacturing electronic installation as claimed in claim 1 is characterized in that, Sn base soldered ball is choose wantonly from following a kind of: Sn, Sn-Cu parent metal, Sn-Ag parent metal, Sn-Ag-Cu parent metal.
5. the method for manufacturing electronic installation as claimed in claim 1 is characterized in that, chip component and substrate link together by the intermetallic compound of being made by described metal and described Sn.
6. the method for manufacturing electronic installation as claimed in claim 5 is characterized in that, described intermetallic compound is together with each other Metal Ball.
7. the method for manufacturing electronic installation as claimed in claim 5 is characterized in that, described intermetallic compound comprises Cu6Sn5.
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CN1983542A (en) 2007-06-20
US20060145352A1 (en) 2006-07-06
CN1444273A (en) 2003-09-24
CN1295783C (en) 2007-01-17
US20040007384A1 (en) 2004-01-15
JP4416373B2 (en) 2010-02-17
TW200402135A (en) 2004-02-01

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