CN100470106C

CN100470106C - Gate valve unit for vacuum equipment

Info

Publication number: CN100470106C
Application number: CNB2006100663306A
Authority: CN
Inventors: 黄泳钊; 郑博仁
Original assignee: BEIRU PRECISION Co Ltd
Current assignee: BEIRU PRECISION Co Ltd; Bay Zu Precision Co Ltd
Priority date: 2006-03-30
Filing date: 2006-03-30
Publication date: 2009-03-18
Anticipated expiration: 2026-03-30
Also published as: CN101046259A

Abstract

The gate valve unit for vacuum equipment includes one seat with two separated valve walls possessing valve port, one driving mechanism in the seat, one driving seat capable of rising and falling linearly inside the control chamber of the seat under the driving of the driving mechanism, and one closing mechanism. The closing mechanism includes one closing plate, several pivoting and oscillating units to set the closing plate on the driving seat and several rebounding units. The rebounding units are set between the driving seat and the closing plate and can press the closing plate to one of the valve walls. The gate valve unit with single point pivoting and rebounding units has easy manufacture.

Description

The gate-valve device of vacuum equipment

Technical field

The present invention relates to a kind of gate-valve device, particularly relates to a kind of being installed between two of vacuum equipment between the separate space seat, and is used for sealing and open the gate-valve device of the vacuum equipment of described chamber gangway.

Background technique

Consult Fig. 1, Fig. 2, the gate-valve device 1 of vacuum equipment was to be erected between two chamber seats 10 in the past, and be used for opening and closing the passage of described chamber seat 10, above-mentioned gate-valve device 1 comprises a pedestal 11 that is fixedly mounted in 10 of described chamber seats, said base 11 has two between left and right every the valve wall 111 of also offering a valve port 110 respectively, and control room 112 that is positioned at 111 on described valve wall, and this pedestal 11 also comprises: a piston mechanism 12 that is erected at pedestal 11 tops, one is positioned at control room 112 and driven and the driving plate 13 of straight line lifting by piston mechanism 12, one be positioned at control room 112 and and the parallel shut 14 of driving plate 13, and a plurality of upper linking plates 15 of connection shut 14 and driving plate 13, a plurality of lower plates 16 (only illustrating one among the figure).Above-mentioned piston mechanism 12 comprises a piston seat 122 that is erected at pedestal 11 tops and defines a piston chamber 121, a piston rod 123 that runs through piston chamber 121 and control room 112, and this driving plate 13 just is mounted in the bottom of piston rod 123.

When gate-valve device 1 is positioned at shown in Figure 1 one non-closing position in the past, this piston rod 123 is to be positioned at a retracted position, that is to say, under this state, these driving plate 13 adjacent piston seats 122, and shut 14 and driving plate 13 fit, and shut 14 does not seal the valve port 110 of right hand valve wall 111 simultaneously, and the passage of two chamber seats 10 can communicate by described valve port 110.When driving driving plate 13, piston rod 123 moves down, and when making shut 14 root edges lean against on the diapire of pedestal 11, the driving plate 13 that continues to move down can utilize the connecting plate 15 of upper and lower settings and being connected of connecting plate 16, and the shut 14 side valve wall 111 of turning right is pushed away, when shut 14 closely was pressed against valve wall 111 inner side surfaces, this gate-valve device 2 can be transformed into the closing position of Fig. 2 by the non-closing position of Fig. 1.

Gate-valve device 1 utilized piston mechanism 12 straight lines to move down in the past, and the cooperation of 16 on the connecting rod 15 of driving plate 13 and two groups of upper and lower settings and connecting rod, and with the design of shut 14 tops to one of them valve wall 111, though can close port 110, but with regard to the angle of making, these shut 14 levels are accurately moved toward valve wall 111 directions, and it is closely connected at valve wall 111 inner side surfaces, need preferable machining accuracy, that is to say, press in the process of valve wall 111 at shut 14, this shut 14 is toward 111 closings of valve wall in nonelastic parallel mode, this do not have a flexible connection pressing design, the precision of inter-module will cause tabular shut 14 warpages of growing crosswise, and can't closely press to valve wall 111 as long as deviation is arranged slightly during fabrication, therefore this gate-valve device 1 in the past inter-module during fabrication needs accurate dimensions and cooperation, and is relatively more difficult during fabrication.

Summary of the invention

The objective of the invention is is providing a kind of structure innovation, and makes the gate-valve device of more or less freely vacuum equipment.

Gate-valve device of the present invention is to be erected between two chamber seats of vacuum equipment, comprise: one is erected at that pedestal, between described chamber is erected at that driving mechanism, on the pedestal is activated that mechanism drives and driving seat that can straight line lifting in a control room of pedestal, an and closing means, this pedestal comprises two intervals and has the valve wall of a valve port respectively, and this closing means comprises that one is parallel to the shut of this driving seat.

This closing means comprise draw together at least one with shut can the swing mode to be erected at the pivot pendulum unit that drives on the seat, and a plurality of time power unit that are erected between described driving seat and shut and shut can be pressed to a described wherein plate valve wall, and above-mentioned time power unit is positioned at the top and the below of this pivot pendulum unit, single-point by pivot pendulum unit articulates, and upper and lower settings is returned the elasticity butt of power unit, can improve the difficult problems of precision control that pair group connecting rods connection is in the past produced, make this gate-valve device more or less freely in manufacturing.

Description of drawings

Fig. 1 is a kind of combined side sectional view of gate-valve device of vacuum equipment in the past, and this gate-valve device is positioned at an open position among the figure;

Fig. 2 is the combined side sectional view of a similar Fig. 1, and this gate-valve device is positioned at a closing position among the figure;

Fig. 3 is the stereo appearance figure of a preferred embodiment of gate-valve device of the present invention;

Fig. 4 is the side combination sketch of this preferred embodiment, two guide rails on the pedestal of omission gate-valve device, and this gate-valve device is positioned at an open position among the figure;

Fig. 5 is not complete stereogram of this preferred embodiment, omits a pedestal of this gate-valve device;

Fig. 6 is a sectional perspective exploded view of this preferred embodiment, shows a part structure that drives a seat and a closing means of this gate-valve device separately; And

Fig. 7 is the side combination sketch of a similar Fig. 4, and this gate-valve device is positioned at a closing position among the figure.

Embodiment

Below by most preferred embodiment and accompanying drawing gate-valve device of the present invention is elaborated, in the accompanying drawing:

Consult Fig. 3, Fig. 4, Fig. 5, a preferred embodiment of gate-valve device of the present invention is to be erected at 22 of one first chamber seat 21 of vacuum equipment and one second chamber seats, and is used for being communicated with and closes the passage of 22 of the described first chamber seat 21 and the second chamber seats.Above-mentioned gate-valve device comprises: can be activated mechanism 4 and drive and the driving seat 5 of straight line lifting but pedestal that is folded in 22 of the described first chamber seat 21 and the second chamber seats 3, one are installed in driving mechanism 4 on the pedestal 3, one, and one and drive seat 5 and be connected the closing means 6 that also can carry out to open and seal action.

Pedestal 3 of the present invention is long rectangles of accumbency, comprise: the first valve wall 31 of the combination that a slice and the first chamber seat 21 are fixing, a slice and the first valve wall 31 at interval and and the second chamber seat 22 the second valve wall 32, a slice of combination are engaged on roof 33, a slice between described first valve wall 31 and the second valve wall, 32 apical margins and are erected at diapire 34 between described first valve wall 31 and the second valve wall, 32 root edges regularly, and compartment of terrain, two left and right sides is connected the sidewall 35 of 32 on the described first valve wall 31 and the second valve wall, and described wallboard defines the control room 36 of the rectangle of growing crosswise.Wherein this first valve wall 31 has an outer wall 312 that 36 internal face 311, and the first chamber seat 21 recline towards the control room, and first valve port 313 of alongst offering and running through described internal face 311 and outer wall 312, and the second valve wall 32 also is to have first valve port 321 of alongst offering, and has a plurality of intervals and the up outstanding piece 341 that supports on diapire 34.And described sidewall 35 all have one towards the control room 36 internal face 351, and two parallel interval and from internal face 351 toward control rooms 36 outstanding guide rails 352,352 on described guide rail define one directly to and opening towards the guide groove 353 of another sidewall 35.

The driving mechanism 4 of present embodiment comprises that two compartment of terrains are erected at the driving cylinder pressure 41 on the roof 33, and described driving cylinder pressure 41 all has a cylinder axle 411 that penetrates in the control room 36.

Consult Fig. 4, Fig. 5, Fig. 6, but the driving seat 5 of present embodiment is to be activated mechanism 4 to drive and the straight line lifting, guide groove 353 restrictions that are subjected to pedestal 3 are simultaneously moved stably.Above-mentioned driving seat 5 comprises the grow crosswise driving plate 51 of strip of a slice, this driving plate 51 has first a plate face 511 towards the first valve wall 31, one and the first plate face 511 are at interval and towards the second plate face 512 of the second valve wall 32, a bottom surface 513 that is connected between described plate face 512 root edges, an end face 514 that is connected between described plate face 512 apical margins, two respectively towards the side 515 of the internal face 351 of sidewall 35, a plurality of wheel mounting holes 516 that run through the described first plate face 511 and the second plate face 512 and adjacent side face 515, compartment of terrain, a plurality of left and right sides is run through the described first plate face 511 and the second plate face 512 and is positioned at the hole 517 that is pivoted of driving plate 51 central height and positions, and a plurality of slotted holes 518 of going up that run through the described first plate face 511 and the second plate face 512, a plurality of slotted holes 519 down, the above-mentioned slotted hole 518 of going up is the above and belows that are symmetrically located at the hole 517 that is pivoted with following slotted hole 519.

And this driving seat 5 also comprises: a plurality of end rollers 52 that are installed in 513 belows, bottom surface, a plurality ofly be installed in leaning wheel 53, a plurality ofly be erected on described end face 514 and the bottom surface 515 and first runner 54 of neighboring edge on the second plate face 512, and a plurality ofly be installed in described second runner 55 of taking turns on the mounting hole 516.Above-mentioned first runner 54 can abut on the described internal face 351 of pedestal 3 when driving plate 51 liftings, and the wheel face of described second runner 55 can abut in 352 on the described guide rail of pedestal 3, the smoothness when promoting driving plate 51 liftings whereby.

The closing means 6 of present embodiment comprise a slice and driving plate 51 between left and right every shut 61, the width of above-mentioned shut 61 is less than this driving plate 51, have a sealing surface 611, a attachment face 612 towards driving plate 51 towards the internal face 311 of the first valve wall 31, and a bottom surface 613 that is positioned between described sealing surface 611 and attachment face 612 bottoms.And this closing means 6 also comprises: a plurality of be installed in

driving plate

51 and 61 of shuts and make shut 61 can single-point swing pivot pendulum unit 62, a plurality ofly be fixedly mounted in the end roller 63 on the bottom surface 613, a plurality of last times power unit 64, and a plurality of power next time unit 64 '.

Roller of the above-mentioned end 63 can roll along the direction of the first valve wall 31 and the second valve wall 32, each pivot pendulum unit 62 all has one and is fixedly mounted on the attachment face 612 and has two fitting seat 622, a slices toward the outstanding fin 621 of driving plates 51 and borrow a fulcrum 623 pivot pendulum head part 624, stationary links 626 of passing a binding end 625 of this pivot pendulum head part 624 can the swing mode to be erected at 621 of described fins, and two through the screw 628 of driving plate 51 screw locks 627 of two fixed ends of this stationary links 626.And described time power unit 64 is identical with the structure that goes back to power unit 64 ', and be symmetrically located at the top and the below of described pivot pendulum unit 62, described last time, power unit 64 all had a screwed pipe 641, one of them and the assembling bar 642 of screw lock on screwed pipe 641 in last slotted hole 518 that passes this driving plate 51 on the attachment face 612 that is combined in shut 61 regularly, and one is set on the assembling bar 642 and shores return spring 644 on 643 on a head of driving plate 51 and assembling bar 642.

Consult Fig. 3, Fig. 4, Fig. 6, when gate-valve device of the present invention is positioned at open position of Fig. 4, the cylinder axle 411 of described driving cylinder pressure 41 is to contract toward in, that is to say, be subjected to the interlock of cylinder axle 411, this driving seat 5 and closing means 6 are 36 tops, contiguous control room, and the sealing surface 611 of the shut 61 of this closing means 6 does not seal first valve port 313 of the first valve wall 31 at this moment, therefore, 22 of first chamber 21 and second chambers can communicate by first valve port 313 and second valve port 321.

Consult Fig. 5, Fig. 6, Fig. 7, when this driving seat 51 of the down outstanding driving of the cylinder axle 411 that drives cylinder pressure 41 moves down synchronously, because the left and right sides of this driving seat 5 is stretched into respectively in the guide groove 353 of pedestal 3, and be provided with runner 54 and runner 55 in the position of stretching into guide groove 353, therefore, in the process that moves down, this driving seat 5 can smooth and easy and not move down with rocking.When the end roller 63 of the shut 61 that moves down synchronously lean against pedestal 3 described when supporting on the piece 341, this shut 61 will continue to move down, at the same time, being activated cylinder pressure 41 drives the binding end 625 that the driving plate 51 that moves down still can drive pivot pendulum head part 624 and moves down, and therefore with internal face 311 pushings of shut 61 toward the first valve wall 31, and at shut 61 in 31 closings of the first valve wall, be distributed in going back to power unit 64 and returning the effect that power unit 64 ' also can produce Hui Li of described pivot pendulum 62 tops, unit and below, flexibly press to the first valve wall 31 and allow shut 61 have, and seal first valve port 313 on the first valve wall 31.

In sum, the present invention connects driving plate 51 and shut 61 in the mode that single-point articulates, and a plurality of going back to power unit 64 and going back to power unit 64 ' of elastic reset effect that have are set between the two, and described time power unit 64 is distributed in the design that single-point articulates the above and below at position with time power unit 64 ', do not see the gate-valve device of vacuum equipment in the past, this design can also improve two group connecting rod erection modes and produce the shortcoming that lacks flexibility and compress, and makes more or less freely effect to reach.

Claims

1. the gate-valve device of a vacuum equipment, it is erected between two chamber seats of vacuum equipment, this gate-valve device comprises a pedestal, one and is erected at driving mechanism on the pedestal, one and drives seat and a closing means, wherein this pedestal comprises two intervals and has the valve wall of a valve port respectively, between described valve wall, has a control room, and this driving seat be activated that mechanism drives can straight line lifting in the control room of pedestal, this closing means comprises a slice and drives a parallel shut;

It is characterized in that: this closing means comprises that also at least one pivot pendulum unit and a plurality of being erected at also can press to shut the wherein go back to power unit of a plate valve wall between described driving seat and shut, described shut to be can the swing mode being erected at the pivot pendulum unit that drives on the seat, and above-mentioned time power unit is positioned at the position, above and below of this pivot pendulum unit;

But described pivot pendulum unit have stationary links on pivot pendulum head part that a fitting seat, on the attachment face that is fixedly mounted in shut borrows a fulcrum and fitting seat to be connected in pivot pendulum mode, the binding end that is erected at this pivot pendulum head part and two passing drive seat after the screws of screw lock on this stationary links.

2. according to the gate-valve device of the described vacuum equipment of claim 1, it is characterized in that: described time power unit all has a screwed pipe, on the fixing attachment face that is installed in shut and passes the return spring that drives between seat back screw lock driving seat and assembling bar in the assembling bar on the screwed pipe and contact a head.

3. according to the gate-valve device of the described vacuum equipment of claim 2, it is characterized in that: this pedestal also have two between left and right every sidewall, all have on each sidewall one directly to and about the guide groove that is oppositely arranged, and should drivings seat comprise that is limited in a runner that also can roll in driving plate between described guide groove and a plurality of position that is installed in driving plate vicinity both sides in guide groove.

4. according to the gate-valve device of the described vacuum equipment of claim 3, it is characterized in that: this closing means also comprises a plurality of this shut bottom and end rollers outstanding than driving plate of being installed in, and roller of the described end can move between described valve wall.