CN100478045C - Device for chemical gaseous phase deposition industrial furnace tail gas purification - Google Patents
Device for chemical gaseous phase deposition industrial furnace tail gas purification Download PDFInfo
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- CN100478045C CN100478045C CNB2007100349417A CN200710034941A CN100478045C CN 100478045 C CN100478045 C CN 100478045C CN B2007100349417 A CNB2007100349417 A CN B2007100349417A CN 200710034941 A CN200710034941 A CN 200710034941A CN 100478045 C CN100478045 C CN 100478045C
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Abstract
A tail gas cleanup device for CVD industrial furnace is composed of a condensing tower and a freeze tower. The condensing tower comprises a gravity settling chamber where a set of loading trays is fixed, wherein the middle-lower part of the condensing tower mounts a round condenser tube, of which the upper and lower ends is connected with a sieve pore type baffle, in manner of closest arrangement based on the round section. The upper part of the condensing tower comprises a spherical cover without hem, a pre refrigerating chamber, a gas pipe type refrigerated trap, and the lower there of is a passive cold trap. The invention is provided to avoid the CVI tail gas pollutants damaging the vacuum system of electric furnace, and to make sure the continuous production of CVI industrial furnace without the problem that the pollutants disturb continuous normal operation of the industrial furnace. The removal ratio of bitumen and tar in tail gas reaches or approaches 100%, the removal ratio of suspended solid comprising carbon black particles and smoke dust reaches the range of 90% to 95%, and the removal ratio of naphthalene with volatility is more than 90%.
Description
Technical field
The present invention relates to a kind of chemical vapour deposition (CVD) (Chemical Vapour Deposition-CVD) or chemical vapor infiltration (Chemical Vapour Infiltration-CVI) industrial furnace tail gas purification, particularly relate to a kind of carbon/carbon composite and charcoal/ceramic composite material preparation (density) device with the CVI industrial furnace tail gas purification.
Background technology
Producing of high temperature, superhigh temperature C/C composite comprises 2 key technologies: 1. fiber base substrate (fiber reinforcement precast body) design and manufacturing; 2. base substrate density (densification).By density, making closely knit is the fibre-reinforced C/C composite of matrix, charcoal with the pyrolytic carbon.Density comprises three class methods again: solid phase cracking charing, liquid impregnation/cracking charing and chemical vapor infiltration (CVI) cracking charing, wherein only CVI cracking charing can be regulated and control most effectively, exactly as the tissue and structure of the pyrolytic carbon of matrix and mechanics, calorifics, electricity and other physical properties, the chemical property of material, fiber-basal body interface structure and state in the regulation and control composite makes the combination property of material arrive best.
The chemical vapor infiltration density of the plain workpiece of charcoal must be carried out in special CVI density vacuum electric furnace, and existing C VI industrial furnace once can carry out density to-several tons workpiece of hundreds of kilograms.During density, feed carbon source gas (reaction gas) to the reaction in furnace district continuously, by CVI Pintsch process process, the carbon atom of considerable part enters workpiece generation matrix heat (splitting) and separates charcoal in the reaction gas, workpiece density constantly increases, and constantly produces a large amount of tail gas simultaneously, is discharged by the electric furnace escape pipe.
Mainly contain two classes: CH as CVI industrial furnace reaction gas
2(methane)+carrier gas and C
3H
6(propylene)+carrier gas is as the N that is mainly of carrier gas
2(nitrogen) also adds section H sometimes
2(hydrogen), in a word, its composition is fairly simple, pure.Through after the CVI reaction, the carbon atom in the reaction gas in the hydrocarbon compound has 10～25% to change pyrolytic carbon among entering the density sample approximately, and all the other major parts become tail gas together with carrier gas.Reaction gas flow path electric furnace zones of different experiences the very complicated all reactions of cracking, polymerization, coking, produces a large amount of derivatives, comprises various chain hydrocarbons, cyclic hydrocarbon and coking product.Thereby, the tail gas composition is very complicated, derivative is with carbon black, pitch, heavy tar, tar light oil, gas-liquid-solid multiphase mixture forms such as naphthalene crystal with different China-cohesion characteristics exist, thereby tail gas ten minutes " dirt " and " foul " total amount is huge, this tail gas will the severe contamination electric furnace vacuum system, and this system brought very big infringement:
A) stop up vacuum line;
B) pollute vacuum control valve, vacuum transducer spare, make it to lose efficacy;
C) polluting vavuum pump (comprising sliding vane rotary pump, lobe pump) makes it to lose efficacy;
D) hard carbon granule heavy wear vavuum pump assembly shortens its life-span greatly;
Based on above reason, after electric furnace moved 40～80 hours, (being less than the CVI cycle of operation one time), its vacuum system will lose efficacy, and difficult cleaning work is carried out in the blowing out of having to.This shows, CVI industrial furnace tail gas is not effectively purified, and this stove just can't normally move.
At present, the gas purification technique metallurgical, chemical, that a series of maturations have been developed and developed to energy industry, but these technology all can not satisfy or can not satisfy fully the needs of CVI stove special operation condition tail gas clean-up, for example:
(1) the gravitational settling efficiency of dust collection is low, only can partly remove (collection) thick solid particulate matter.
(2) cyclone dust removal consumes air-flow power (kinetic energy) greatly, should not work under above-mentioned low pressure, and not allow to have in the gas adherence grease to exist.
(3) electrostatic precipitation generally can not be in vacuum state work, and pollutant has electric conductivity, adds strongly adherent collecting plate can't be regenerated, and can not use.
(4) bag collection can only be used for " drying " gas and can only work than under the atmospheric pressure, can not be used for low vacuum, can not regenerate.
(5) silk screen filter is big because of amount of pollutant, and the large tracts of land silk screen also can be blocked and interruption of work very soon, and is difficult to regeneration, can not use.
(6) active carbon or coke absorption finite capacity, very fast saturated and inefficacy can't be regenerated.
(7) the liquid spraying washing can destroy vacuum system work with absorption cleaning itself, can not use.
(8) condenser pipe captures and only can partly remove pollutant.
Summary of the invention is in order to solve the difficult problem of chemical gaseous phase deposition industrial furnace tail gas purification, the normal continuously operation that keeps industrial furnace, the present invention is big according to chemical gaseous phase deposition industrial furnace exhaust pollutant amount, pollutant state complex and the low characteristics of confined space atmosphere pressures, a kind of device that is used for chemical gaseous phase deposition industrial furnace tail gas purification is provided, realizes the continuous purification of CVI industrial furnace tail gas.
A kind of device that is used for chemical gaseous phase deposition industrial furnace tail gas purification, form by preposition condensing tower and freezing tower two big units, condensing tower is the garden column, and the spherical top cover 1 of no flanging is equipped with in its top, and top cover has been set up water cooling plant, the top cover center is provided with tail gas air inlet A, link with CVI industrial furnace offgas duct gas outlet, there is inversed taper platform shape bottom the condensing tower below, and the bottom center is provided with tar outlet 7, top cover, bottom connect with body of the tower by ring flange, and realize vacuum seal.
Condensing tower top is gravity settling chamber 2, and the expansion chamber outer wall is a water-cooling jacket formula structure, and the bottom is provided with tail gas gas outlet B; Be equipped with one group of material bearing disc 3 in the expansion chamber, comprise that the outer is respectively with the disc material bearing disc and the annular material bearing disc on Volume limit, disc material bearing disc center atresia, there are enough gaps between its outer and condensing tower inwall, and there is a macropore at annular material bearing disc center, the condensing tower inwall is close in its outer, and the rectification cylinder is equipped with in the annular material bearing disc bottom of foot, and it is slit into center and two spaces that isolate mutually of outer shroud with the expansion chamber lower part; Disc material bearing disc and annular material bearing disc are staggered evenly to be installed, and leaves enough wide uniform gap between the material bearing disc.All material bearing discs are unified into a black box by one group of thrust screw rod, make this assembly be easy to take out from the top of condensing tower.
Annular material bearing disc diameter of bore is 100～200 millimeters of Φ, and disc material bearing disc edge is 10～20 millimeters to the inner wall of tower spacing.
In the inner chamber of condensing tower middle and lower part, by the most compact arranged mode in circular section circular condensation tube bank 5 is set, the condenser pipe upper and lower end is connected with sieve aperture shape dividing plate.Condenser pipe is made with seamless steel pipe, is exhaust gas channel in the pipe, adopts the condensed water cooling between the pipe outer wall.Air-flow and liquid stream are thoroughly isolated.
The used condensate temperature of condensing tower should be lower than 15 ℃.If can be controlled at below 10 ℃, then the effect of its condensation cleaning also can be much better, below 10 ℃ the time, should lay thin thermal insulation layer at the body of the tower outer surface.
The interior thin tail gas air velocity of condensation tube bank is 4～16 meter per seconds in the condensing tower.The air velocity height of healing means that to purify load higher, and the air-flow pressure drop is bigger.The length of condenser pipe should not coexist by CVI stove production capacity and selects appropriate value in 0.8～2 meter scope.Condenser pipe too short-range missile refrigeration to coagulate the pipe internal surface area too small, tail gas time of staying in pipe is too short, purification efficiency reduces.
When the tar oil film that condenses in the condenser pipe increases to certain thickness, tar will flow on the below back taper bottom of condensing tower automatically, be gathered in (heavy) tar outlet 7 at lower central position and be expelled in the tar holding vessel of tower bottom.
Condensing tower air inlet pipe A and CVI industrial furnace offgas duct gas outlet link, and this offgas duct also has the water-cooled external jacket.After the cooling of water-cooled offgas duct, its gas outlet exhaust temperature has been reduced to 100～150 ℃, enter gravity settling chamber after the water-cooling wall cooling through air inlet pipe A, its temperature continues to reduce, at this moment, in the tail gas, pitch and heavy tar are with carbon black flue dust in the tail gas, suspended particulate is a core, be condensed into a large amount of larger-size carbon black-pitch particles and carbon black-tar drop, be difficult to keep suspended state this moment, they are blown to carry by tail gas with the speed of 3～10 meter per seconds and rush at material bearing disc, and this carrier gas such as accompanying drawing 1 expansion chamber arrow direction flow fast, its path bends repeatedly, under the acting in conjunction of gravity and centrifugal force, these particles and droplet-like contaminants also stick on each material bearing disc, the mink cell focus that these material bearing discs of while also are condensed soaks into and forms the oil film that constantly thickens, this oil film constantly captures solid carbon granule thinner in the tail gas again, the carbon black flue dust ... in a word, high-temperature tail gas is flowed through behind the expansion chamber of condensation cleaning tower, at gravity, under centrifugal force and the adhesion effect, wherein most pitches, the solid particle of most of mink cell focus and considerable part and flue dust all adhere to deposition (also to be had small part to be deposited on the expansion chamber inwall) on the material bearing disc and is eliminated, and tail gas has obtained preliminary purification.Tail gas is come expansion chamber lower central position, and its temperature is reduced to 30～50 ℃, comes the porch of descending tube bank 5.
Restrain 5 through the preliminary tail gas that constantly purifies through descending condensation and flow to the condensing tower bottom, make progress, flow to wherein upper chamber outer annular space, and flow to and come together in tail gas outlet B through up condenser pipe 6 fold backs near the condensing tower inner chamber outside.Temperature further reduced when tail gas flowed in condenser pipe, tar and part cyclic hydrocarbon (as benzene, naphthalene etc.) steam constantly condense upon on the tube bank inwall and form oil film in the tail gas, carbon black fine particle is constantly captured by oil film in the tail gas, so, most heavy tars, part tar light oil and cyclic hydrocarbon compound in the tail gas (high, middle temperature is divided) and considerable part carbon black suspension are separated, and tail gas has obtained purifying for the second time.
Freezing tower is cylindric, freezing Tata is disconnected in lower portion wherein, become upper and lower two parts, epimere partly is the body of the tower main body, be installed on the unified crosshead table top that the CVI electric furnace body is housed by the wing rib of body of the tower separately, its hypomere part is then interconnected by ring flange and epimere, is suspended on the below of epimere, and the hypomere part can be removed from the body of the tower bottom by the dedicated trolley of being furnished with elevating mechanism.Central part has escape pipe F at the bottom of the freezing Tata, and freezing tower bottom is provided with drain line 14.
Freezing tower top comprises the spherical tower lid 8 of no flanging, precooling chamber 9 and air-tube type freezing trap, and the bottom is divided into passive cold trap trapping device 12.
9 outer walls have air inlet pipe E in the precooling chamber, and air inlet pipe E directly docks with condensing tower escape pipe B, enters precooling chamber 9 through the cooled tail gas of condensing tower by air inlet pipe E.
Freezing trap is made up of cryovial 10, be provided with freezing liquid inlet tube G and freezing liquid outlet H at freezing trap outer wall 11, the reaming of cryovial inlet makes horn-like, the air velocity of thin tail gas should be delayed in condenser pipe in the cryovial, should be controlled in 2～10 meter per second scopes, cryovial length is 0.8～2.0 meter, from condensing tower, tail gas through double purification at first enters precooling chamber 9, enter in the cryovial by cryovial 10 tops then, and constantly inject freezing liquid by freezing liquid inlet tube G between the freezing tube bank, cryovial is remained on-14～-24 ℃ temperature by freezing liquid, freezing liquid is realized refluxing by outlet H.
Passive cold trap trapping clarifier 12 is made up of thin-sheet metal disk and annulus, and disk is not with centre bore, keeps suitable distance between its periphery and inner wall of tower, the ring belt centre bore, and its periphery is adjacent to inner wall of tower, and dish-ring is alternate, keeps evenly equidistant between them.Form a large amount of (labyrinth type) slot-shaped gas circuits thus.Disk and annulus make (latter only is used to the tail gas with strong corruption, and this tail gas often is derived from the CVI density process of charcoal/ceramic composite material) by cold rolling antirust aluminium flake or cold-rolling stainless steel thin slice.All disk annulus are assembled into a capture clarifier integral body by the array bolt rod member that is with a large amount of thrust rings.
Disk and annulus must be smooth, strict equidistant between disk and annulus, the sheet spacing should be controlled at 8～15 millimeters, and annulus diameter of bore and disk edge are relevant with CVI furnace exhaust gas flow to the inner wall of tower spacing, is controlled at the scope of 100～200 millimeters of Φ and 10～20 millimeters respectively.
It is different and different that the total surface area of cold-trap thin plate is gone into stove hydrocarbon reaction entraining air stream amount according to the CVI stove, is 1～5 meter of per kilogram/hour hydro carbons gas
2
Freezing Tata body; comprise top cover, sloped footing, upper and lower flange and freezing liquid carrier pipe; all taked strict provision for thermal insulation; used thermal insulation layer is the cellular rubber felt or the foam felt of excellent in heat insulating performance; thermal insulation layer gross thickness ≮ 50 millimeter; on the inside and outside surface of thermal insulation layer air-locked aluminium-plastic film is installed, and is added illiteracy glass cloth and install the galvanized iron sheet containment vessel additional at the thermal insulation layer outer surface.
The precooling chamber 9 that enters freezing tower top through the tail gas of double purification tentatively is cooled to subzero, further reduce to about-20 ℃ after entering cryovial (10), tar light oil steam in the tail gas constantly is condensate in and forms oil film on the inside pipe wall at this moment, simultaneously, volatility naphthalene in the tail gas is separated out and sticks on the oil film with small white plates crystal form, residual smoke in the tail gas, also constantly caught gathering by oil film, thereby tail gas stream has just experienced after freezing tube bank for the third time and has purified the most of tar light oil in the tail gas, most of naphthalene steam and quite most residual smoke suspension all are eliminated.When the tar light oil amount of freezing tube bank inwall cohesion increases, with the freezing tower bottom of automatic stream.
The reaming of cryovial inlet makes horn-like, can prevent from too much to form " bottleneck " that hinders exhaust gas flow at cryovial import department " tar-naphthalene crystal-carbon black " condensation product.
Experienced the tail gas that purifies for the third time and come freezing tower below, and entered the cold trap trapping device, purified subtly to carry out the 4th time (for the last time).Tail gas temperature from cryovial is frozen into about-20 ℃, it self just has enough " Yu Leng ", it is remaining refrigeration output, after the cold-trap diskware brushes through this tail gas, also reduce to about-20 ℃ thereupon and (therefore need not again the freezing liquid cooling of outer source), and on disc surface, form the aggegation oil film.Tail gas is bending repeatedly in the cold-trap narrow slit, flows fast, contacts by large tracts of land between its disc and gas, makes in the tail gas residual smoke be adsorbed by oil film and disposed comparatively up hill and dale.Be folded to enter to turn to down again behind the radome fairing 13 through tail gas stream to the freezing tower bottom that purifies for the 4th time and enter tail gas outlet (F), and flow to the vacuum unit by the pipe fitting of being correlated with.
After adopting the present invention that tail gas is purified, still have a small amount of volatility naphthalene (≯ 10%), because furnace atmosphere pressure low (~ 1/100 atmospheric pressure) naphthalene steam promptly or also have minute quantity to residue in the tail gas when being refrigerated to-20 ℃, residual naphthalene steam will arrive mechanical pump oil, gas outlet always, because of this locates pressure rises to normal pressure, i.e. atmospheric pressure, can separate out with the form of flake crystal attitude, it will be mixed in the pump oil in oil, the gas outlet fuel tank, when pump oil refluxed in pump, the naphthalene crystal of separating out under normal pressure may stop up oil return pipe.In order to prevent that the naphthalene crystal from stopping up oil return pipe, in oil return opening the place ahead one 50 ~ 80 enough big purpose copper wire string bags are set and block, make it not bring oil return pipe (string bag is put back to after only needing regularly to take out and simply clearing up again) into from fuel tank with reflux pump oil.
Adopt the present invention, can avoid CVI exhaust pollutant damage electric furnace vacuum system, and the contaminated solution thing seriously disturbs the electric furnace problem of normal operation continuously smoothly, assurance CVI industrial furnace is produced continuously.The removal efficiency of the pitch in the tail gas, tar is reached respectively and near 100%, can reach 90～95%, also can reach more than 90% the removal efficiency that wherein has volatile naphthalene to wherein solid suspension (carbon black fine particle and flue dust) removal efficiency; In-line purification follows the electric furnace running to carry out continuously always, can satisfy the needs of electric furnace long period (150～300 hours/every heat) operation; Eliminated the infringement of pollutant to vavuum pump; Eliminated pollutant stained to the vacuum instrumentation sensor; Eliminated the injury of pollutant to vacuum line, valve.
Description of drawings
Fig. 1: condensing tower structural representation;
Fig. 2: freezing tower structure schematic diagram.
The specific embodiment
The exhaust gas cleaner that makes according to the present invention is used for the CVI industrial furnace.Concrete parameter is:
(1) is implemented the CVI industrial furnace of gas purification
Its important technological parameters is as follows:
Electric furnace model: RT-2 furnace power: 60～90KW
Charge: 120～240kg/ stove furnace temperature: 300～1250 ℃, continuous controllable
Vacuum: 20Pa atmosphere voltage rise rate: ≯ 100Pa/hr
Reaction gas flow speed: 0-4.0M
3/ hr continuous controllable
Atmosphere pressures: 500～2000Pa is controlled
Vavuum pump: X-100A, exhaust capacity 100L/S
The single heat cycle of operation: 150～300hr
(2) purifier specification important technological parameters sees Table 1
Table 1 exhaust gas cleaner correlation technique parameter
| Technical parameter | Condensing tower | Freezing tower |
| Body of the tower internal diameter (mm) | Φ400 | Φ500 |
| Body of the tower height (mm) | H1650 | H1800 |
| Advance (going out) tracheal diameter (mm) | Φ100 | Φ100 |
| Coolant water temperature * flow (℃ * M 3/h) | (5～15)×(1～2) | - |
| Freezing liquid temperature * flow (℃ * M 3/h) | - | (14～-24) * (1～2) (continuous controllable automatically) |
| Refrigerator refrigerating capacity (KCal/h) (in the time of-20 ℃) | - | 1000～2500 |
* annotate: freezing (circulation) liquid must be nontoxic, non-corrosiveness, low viscosity and do not have combustibility
(3) implementation result
This device demonstrates the good result to the CVI tail gas clean-up through operation in 5 years, and concrete condition is as shown in table 2:
Table 2 tail gas clean-up effect table
Such purifier also can be used for the tail gas clean-up of the CVI industrial furnace of different model, comprise isotherm formula CVI industrial furnace, thermal gradient formula CVI industrial furnace had both comprised pure pillar stove, also comprise many stock columns formula stove, satisfied the needs that varied Aeronautics and Astronautics is made with the C/C composite products.
Claims (7)
1. device that is used for chemical gaseous phase deposition industrial furnace tail gas purification, it is characterized in that: this device is made up of preposition condensing tower and freezing tower two big units;
Condensing tower is the garden column, the spherical top cover (1) of no flanging is equipped with in its top, top cover has been set up the water-cooling jacket device, the top cover center is provided with tail gas air inlet (A), link with CVI industrial furnace offgas duct gas outlet, there is inversed taper platform shape bottom the condensing tower below, and the bottom center is provided with tar outlet (7), top cover, bottom connect with body of the tower by ring flange, and realize vacuum seal;
Condensing tower top is gravity settling chamber (2), and the expansion chamber outer wall is a water-cooling jacket formula structure, and its underpart is provided with tail gas gas outlet (B); Be equipped with one group of material bearing disc (3) in the expansion chamber, comprise that the outer is respectively with the disc material bearing disc and the annular material bearing disc on Volume limit, disc material bearing disc outer and cooling tower inwall spacing are 10～20 millimeters, the cooling tower inwall is close in annular material bearing disc outer, annular material bearing disc diameter of bore is 100～200 millimeters of Φ, the rectification cylinder is equipped with in the annular material bearing disc bottom of foot, and disc material bearing disc and annular material bearing disc are staggered evenly to be installed, and leaves enough wide uniform gap between the material bearing disc;
In the inner chamber of condensing tower middle and lower part, by the most compact arranged mode in circular section circular condenser pipe (5) is set, the condenser pipe upper and lower end is connected with sieve aperture shape dividing plate;
Freezing tower is cylindric, and freezing Tata is disconnected in lower portion wherein, becomes upper and lower two parts, and upper and lower two parts are interconnected by ring flange, and central part has escape pipe (F) at the bottom of the tower, and the bottom is provided with drain line (14);
Freezing tower top comprises the spherical tower lid of no flanging (8), precooling chamber (9) and air-tube type freezing trap, and the bottom is divided into passive cold trap trapping device (12);
Tower lid (8) links by flange and body of the tower top;
Outer wall has air inlet pipe (E) in precooling chamber (9), and air inlet pipe (E) is directly docked with condensing tower escape pipe (B);
Freezing trap is made up of cryovial (10), is provided with freezing liquid inlet tube (G) and freezing liquid outlet (H) at the freezing trap outer wall, and the reaming of cryovial inlet makes horn-like, and cryovial length is 0.8～2.0 meter;
Passive cold trap trapping clarifier (12) is made up of thin-sheet metal disk and annulus, disk is not with centre bore, its periphery is 10～20 millimeters with the inner wall of tower spacing, the ring belt centre bore, the aperture is 100～200 millimeters of Φ, and its periphery is adjacent to inner wall of tower, and dish-ring is alternate, keep evenly equidistant between the dish-ring, the sheet spacing is 8～15 millimeters.
2. device according to claim 1 is characterized in that: described condensing tower disc material bearing disc and annular material bearing disc are unified into a black box of taking apart easily by one group of thrust screw rod.
3. device according to claim 1 is characterized in that: described condenser pipe and cryovial are made with seamless steel pipe, are exhaust gas channel in the pipe, adopt condensed water and freezing liquid cooling between the pipe outer wall respectively.
4. device according to claim 1 is characterized in that: all disks of the passive cold-trap in described freezing tower bottom, annulus are assembled into an integral body by the array bolt rod member that is with the thrust ring.
5. device according to claim 1 is characterized in that: the total surface area of cold-trap thin plate is 1～5 meter of a per kilogram/hour hydro carbons gas
2
6. device according to claim 1 is characterized in that: freezing Tata body, top cover, big ring flange and freezing liquid carrier pipe are provided with thermal insulation layer, and thermal insulation layer thickness is not less than 50 millimeters.
7. device according to claim 6 is characterized in that: thermal insulation layer is cellular rubber felt or foam felt, is laid with air-locked aluminium-mould thin-film material at the inboard of thermal insulation layer and outer surface.
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| CNB2007100349417A CN100478045C (en) | 2007-05-18 | 2007-05-18 | Device for chemical gaseous phase deposition industrial furnace tail gas purification |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101561374B (en) * | 2009-05-21 | 2012-10-03 | 苏州宝化炭黑有限公司 | Purifying and detecting method of carbon black smoke and device thereof |
| CN101690912B (en) * | 2009-08-13 | 2012-05-30 | 曾涛 | Energy-saving static tar precipitating and dust removing design method |
| CN103239943B (en) * | 2013-05-14 | 2015-09-23 | 陈朝阳 | Solid-containing vapor-state substance separation device |
| CN105582771B (en) * | 2013-09-09 | 2017-05-24 | 清远先导材料有限公司 | Dust collection device |
| CN103908795B (en) * | 2013-12-19 | 2015-11-25 | 柳州市京阳节能科技研发有限公司 | Multifunction efficient energy-saving rapid hardening tank |
| CN105255534B (en) * | 2015-10-23 | 2018-06-08 | 石家庄新华能源环保科技股份有限公司 | A kind of device of the anhydrous processing of tar |
| CN111905514A (en) * | 2019-05-08 | 2020-11-10 | 宁夏尼西活性炭有限公司 | Tail gas purification device for activated carbon small-scale carbonization furnace |
| CN112944379A (en) * | 2021-01-27 | 2021-06-11 | 河北北方学院 | Online high temperature dust collecting equipment based on living beings micron fuel rubbish hydrogen manufacturing furnace |
| CN113058342B (en) * | 2021-04-13 | 2022-10-28 | 西安航空制动科技有限公司 | CVD furnace filter equipment convenient to online real-time clearance |
| CN114146485B (en) * | 2021-12-02 | 2022-10-21 | 玉溪沃森生物技术有限公司 | Centrifugal liquid separation drawing liquid device |
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