CN100478488C - Transitional optical thin-film coating device and its smelting tool ring - Google Patents
Transitional optical thin-film coating device and its smelting tool ring Download PDFInfo
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- CN100478488C CN100478488C CNB2005100654228A CN200510065422A CN100478488C CN 100478488 C CN100478488 C CN 100478488C CN B2005100654228 A CNB2005100654228 A CN B2005100654228A CN 200510065422 A CN200510065422 A CN 200510065422A CN 100478488 C CN100478488 C CN 100478488C
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- substrate
- collar
- plating
- shield
- gradual change
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Abstract
The related gradational optical film plating device comprises material for plating, a substrate up the material with coating surface toward the material that can rotate with a central axis. Wherein, it arranges a shield plate with height, thickness and included angle with substrate all determined by coating layer gradational slope and range.
Description
Technical field
The present invention is about a kind of film coating apparatus and control the instrument collar, particularly is coated with device and controls the instrument collar in order to a kind of of optical coating layer who forms accurate gradual change slope and gradual change scope on a substrate.
Background technology
In coating technique, plate the coatings of specific gradual change slope and gradual change scope in same substrate, have the certain difficulty degree.Existing gradual change type optical thin film is coated with method, be to adjust the substrate angle of inclination or to utilize the difference of amending plates shape, and then the control plating is attached to the number of medicinal material amount on the substrate, promptly control its thickness, the change that sees through coatings thickness changes its spectral response curve, forms the optical thin film of various different fade effect; Yet with this method, can not accurately control thickness, and, be difficult to reach with aforementioned two kinds of methods for the optical thin film of the progressive quantitative changeization (little) of comparatively meticulous progressive quantitative changeization (little) and small scope to every centimetre of progressive amount that precisely changes to several centimetres.
See also Fig. 1, adjust in the existing film coating apparatus 5 at substrate angle of inclination one, one substrate 51 that tilts is arranged at the top of a pedestal 52, and the plating source 53 of desire plating is set on the surface of pedestal 52, utilize the mode of vacuum evaporation or sputter on substrate 51, to form coatings 54.At this, the placement location of substrate 51 is not parallel with pedestal 52, but certain angle that tilts.This technology promptly be utilize coatings 54 thickness approximately and the principle that is inversely proportional to of pedestal 52 to 1.5 to 1.9 powers of the distance between the substrate 51, so near more substrate 51 parts of pedestal 52, its thickness is thick more, otherwise, from pedestal 52 substrate 51 parts far away more, its thickness is thin more.
See also another kind of prior art scheme shown in Figure 2, it utilizes the film coating apparatus of different shapes amending plates, roughly include a coating umbrella 91, an amending plates 92 are installed in an evacuated vacuum chamber 90 of vacuum available pump, the upper chamber in vacuum chamber 90, and a plating source 93.Wherein, coating umbrella 91 is located in the axle center of a propulsion source 94 and can be driven by this propulsion source 94 and is rotated, establish and plating source 93 and coating umbrella 91 are relative, amending plates 92 be arranged at the position of contiguous coating umbrella 91 and be in coating umbrella 91 and plating source 93 between, can influence coating film thickness on some substrates by control profile of amending plates 92 and position.But be provided with plating film hole (not shown) and the open holes 910 that can be connected on propulsion source 94 bearings of plural number installation base plate 95 in the umbrella shape pedestal of coating umbrella.The detailed construction of this film coating apparatus 9 can be consulted the content of No. the 540585th, TaiWan, China patent announcement.
When using film coating apparatus 9 to carry out film-plating process, usually earlier a plurality of substrates 95 are fixed on the coating umbrella 91, drive propulsion source 94 then with rotary plating umbrella 91, utilize modes such as vacuum evaporation or sputter that the Coating Materials on the plating source 93 is deposited on these substrates 95 more at last.After substrate 95 is by one or more layers film of evaporation (or sputter), these have been coated with the substrate 95 that finishes shifts out in vacuum chamber 90, and once more the substrate 95 of same quantity is moved in the vacuum chambers 90, so that then be similarly the film of their evaporation one or many.Owing between amending plates 92 and the substrate 95 larger distance is arranged, so the coating film thickness on the substrate 95 is difficult to accurately be controlled.
Republic of China's patent application has disclosed the filming equipment of another kind of pattern for No. 092212662, it comprises at least two plating sources, and corresponding with it at least two shields (amending plates) unit, with structural similitude shown in Figure 2, this kind shield also can't accurately be controlled the gradual change slope and the gradual change scope of plated film.
Summary of the invention
The object of the present invention is to provide a kind of gradual optical thin film that can accurately be coated with different gradual change slopes and gradual change scope to be coated with device and to control the instrument collar.
Technical essential of the present invention is: a kind of gradual change type optical thin film is coated with device, comprise a plating source, one substrate is positioned at the upside of plating source, substrate can rotate around a central axis, the plated film face of substrate is towards plating source, this plated film face can receive the plating material of plating source and form plated film thereon, wherein on the plated film face of substrate a shield is set, the height of this shield, thickness and with gradual change slope and the decision of gradual change scope of the angle of substrate by coatings.
Described gradual change type optical thin film is coated with device and comprises that further one can be along the coating umbrella of described central axis rotation, and this coating umbrella and plating source are oppositely arranged, and some plating film holes are set on this coating umbrella, install in plating film hole and put described substrate.
The side of described substrate is a sheathed collar further, and described shield is arranged at vertically also can rotating to it on the dual-side relatively of the collar.
Described gradual change type optical thin film is coated with device and further includes the described coating umbrella of installation in an evacuated vacuum chamber of vacuum available pump, the upper chamber in vacuum chamber, coating umbrella is located in the axle center of a propulsion source and can be rotated by this drive power source, and plating source preferably is positioned at and the coating umbrella bottom of the vacuum chamber on same vertical centre axis not.
The present invention also provides a kind of above-mentioned gradual change type optical thin film to be coated with the instrument of the controlling collar that uses in the device.
Compared with prior art, the present invention can accurately control the gradual change slope and the gradual change scope of gradual change type plated film, and this gradual change slope and gradual change scope can be as small as every centimetre of progressive amount that precisely changes.
Description of drawings
Fig. 1 is a kind of synoptic diagram of existing film coating apparatus.
Fig. 2 is the synoptic diagram of another kind of existing film coating apparatus.
Fig. 3 is that gradual change type optical thin film of the present invention is coated with schematic representation of apparatus.
Fig. 4 is the synoptic diagram that gradual change type optical thin film of the present invention is coated with the instrument of the controlling collar in the device.
Fig. 5 is the synoptic diagram that the present invention controls second preferred embodiment of the instrument collar.
Embodiment
Now in conjunction with Figure of description, to gradual change type optical thin film of the present invention be coated with device with and the instrument collar of controlling describe in detail.
See also Fig. 3, film coating apparatus roughly includes in an evacuated vacuum chamber 10 of vacuum available pump, the upper chamber in vacuum chamber 10 coating umbrella 11 is installed, be installed to one on the coating umbrella 11 controls the instrument collar 2, and at a plating source 13 of vacuum chamber 10 bottoms.Wherein, coating umbrella 11 is located in the axle center of a propulsion source 14 and can be driven by this propulsion source 14 and be rotated, and the bottom that plating source 13 is positioned at vacuum chamber 10 and coating umbrella 11 are relative and establish, and optimum be with coating umbrella 11 not on same vertical center line.The umbrella shape pedestal of coating umbrella 11 is provided with several plating film holes (not shown), controls in the corresponding plating film hole that the instrument collar 2 is fixed in coating umbrella 11.
Please continue and consult Fig. 4, control the instrument collar 2 and can accommodate roughly rectangular substrate 23, a plated film face 231 of this substrate 23 can receive the plating material of plating source 13 and form plated film thereon.Along the sheathed collar 21 of four sides of substrate 23, and on the vertically relative dual-side 211 of the collar 21, a shield that can rotate to it 22 is set, this shield 22 is positioned at a side of the plated film face 231 of substrate 23, and it has predetermined height, thickness and is predetermined angle with substrate 22.
After controlling the instrument collar 2 and being fixed to coating umbrella 11, substrate 23 is positioned at the outside surface of coating umbrella 11 away from plating source 13, shield 22 passes the plating film hole of coating umbrella 11, and the plated film face 231 of substrate 23 arrives plated film face 231 towards plating film hole thereby the plating material that plating source 13 is sent can reach this.
When using film coating apparatus of the present invention to carry out film-plating process, should drive propulsion source 14 earlier with rotary plating umbrella 11, utilize modes such as vacuum evaporation or sputter that the Coating Materials on the plating source 13 is deposited on these plated film faces 231 again.After plated film face 231 is by one or more layers film of evaporation (or sputter), these have been coated with the instrument of the controlling collar 2 that finishes shifts out in vacuum chamber 10, and once more the instrument of the controlling collar 2 of same quantity is moved in the vacuum chambers 90, so that then be similarly the film of their evaporation one or many.
Because it is quite approaching to control the distance of shield 22 above the instrument collar 2 and substrate 23, so when utilizing vacuum evaporation, sputter or during with Ion Aided Film Coating, the height of shield 22, thickness and and basic 23 angle change (detailed aftermentioned) and can be used for controlling the number that plating is attached to medicinal material amount on the substrate 23, and then change the thickness of each point coatings on the substrate 23, the change that sees through coatings thickness changes its spectral response curve, forms the optical thin film of the progressive effect of various differences.Because the existence of shield 22, the plating material that sends on plating source 23 different positionss changes in plated film face 231 sedimentary amounts, so that the thickness of the coatings on the substrate 23 produces progressive variation, and relative plating source 13 relatively moves because substrate 23 is along with the rotation of coating umbrella 11, it is big that this coatings gradual change scope becomes, and the gradual change slope also changes.So, can realize that the present invention accurately controls the purpose of gradual change scope and gradual change slope as long as design the suitable instrument of the controlling collar according to coatings gradual change scope and the isoparametric requirement of gradual change slope.
Angle, height and the thickness that below will introduce shield respectively is to the gradual change slope of plated film and the influence of gradual change scope:
1. shield 22 height (H):
The height of shield 22 is big more, and gradation zone is big more; The height of shield 22 is more little, and gradation zone is more little; The height of shield 22 also can influence the slope of gradual change.
H＝K.D
Wherein: K is relevant with evaporation plating parameter, coating umbrella curvature, plating assortment class etc.
D is the size of gradation zone
2. the angle (θ) of shield 22 and the collar 21 (substrate 23):
The angle theta of the shield 22 and the collar 21, angle theta can be for the unspecified angle between 0 °～180 °, and in common application examples, preferably in the scope of 135 ° of 45 ° of θ, it influences the size and the gradual change slope in progressive zone; With the shield 22 of equal height, | 90-θ | big more, progressive quantitative change zone is big more; For example with the shield plated film of equal height 22mm, when θ=90 °, its progressive scope is 6.3mm, if shield is tilted an angle when making θ=70 °, its progressive scope increases to 8.5mm.
3. the size of the non-coating film area of thickness effect of shield 22, shield 22 thickness are big more, and non-coating film area is also big more.
4. the substrate 23 of the coating umbrella 11 different number of turns, with respect to evaporation source, its angle is neither identical, so must adjust shield 22 height and angles, to coat the eyeglass of same effect at its position.
So, take all factors into consideration the angle of above-mentioned shield 22, highly, the influence of key element such as thickness and coating umbrella number of turns, can design the gradual change type plated film of predetermined gradual change slope and gradual change scope, this gradual change slope and gradual change scope can be as small as every centimetre of progressive amount that precisely changes.
See also Fig. 5, the present invention controls in second preferred embodiment of the instrument collar, control the instrument collar 3 and comprise substrate 33, around the collar 31 of substrate 33 and several shields 32 of parallel arranged, control the gradual change type plated film that the instrument collar 3 also can be used for making predetermined gradual change slope and gradual change scope, and each shield 32 can have separately independently highly in the present embodiment, thickness reaches and the angle of substrate 33, and when formal production, its angle can be fixed; Avoid because of factors such as artificial, machineries, and change set angle value.
Claims (17)
1. a gradual change type optical thin film is coated with device, comprise a plating source, at least one substrate is positioned at a side of plating source, the plated film face of substrate is towards plating source, this plated film face can receive the plating material of plating source and form plated film thereon, it is characterized in that: a side that is close to the plated film face of substrate is provided with a shield, this shield has specific height and thickness, and and substrate between have a specific angle, the sheathed collar of the side of described substrate, described shield is arranged on the relative dual-side of the collar and can rotates around relative this collar in its articulated section with collar dual-side, in order to pass through to control the height of shield, thickness and and substrate between angle control the gradual change slope and the gradual change scope of coatings.
2. gradual change type optical thin film as claimed in claim 1 is coated with device, it is characterized in that: described substrate can rotate around a central axis.
3. gradual change type optical thin film as claimed in claim 2 is coated with device, it is characterized in that: comprise that also one can be along the coating umbrella of described central axis rotation, this coating umbrella and plating source are oppositely arranged, and some plating film holes are set on this coating umbrella, and described substrate is installed in plating film hole.
4. be coated with device as claim 1 or 3 described gradual change type optical thin films, it is characterized in that: the angle of shield and substrate is between 0 ° to 180 °.
5. gradual change type optical thin film as claimed in claim 4 is coated with device, it is characterized in that: the angle between described shield and substrate is a certain angle that is positioned between 45 ° to 135 °.
6. gradual change type optical thin film as claimed in claim 3 is coated with device, it is characterized in that: also include described coating umbrella is installed in an evacuated vacuum chamber of vacuum available pump, the upper chamber in vacuum chamber, coating umbrella is located in the axle center of a propulsion source and can be rotated by this drive power source.
7. gradual change type optical thin film as claimed in claim 6 is coated with device, it is characterized in that: plating source is positioned at and the coating umbrella bottom of the vacuum chamber on same vertical centre axis not.
8. the instrument of controlling collar that is used for gradual change type thin-film-coating device, it is characterized in that: can accommodate at least one substrate in wherein, this substrate comprises a plated film face, it can receive the plating material of plating source and form plated film thereon, plated film face one side that is close to substrate is provided with shield, the height of this shield, thickness and with gradual change slope and the decision of gradual change scope of the angle of substrate by coatings; The described collar has two opposed side edges, and described shield promptly is arranged on the relative dual-side of the collar and can rotates along relative this collar in its articulated section with collar dual-side.
9. the instrument collar of controlling as claimed in claim 8 is characterized in that: the height of described shield to the influence of plated film gradual change scope is:
H＝K·D
Wherein H is the height of shield;
K is a constant, and is relevant with evaporation plating parameter, coating umbrella curvature, plating assortment class etc.;
D is the size of gradual change scope.
10. the instrument collar of controlling as claimed in claim 8 is characterized in that: the angle between described shield and substrate is the unspecified angle between 0 ° to 180 °.
11. the instrument collar of controlling as claimed in claim 10 is characterized in that: the angle between described shield and substrate is a certain angle that is positioned between 45 ° to 135 °.
12. the instrument collar of controlling as claimed in claim 8, it is characterized in that: this collar is provided with more than one shield, and each shield all has separately independently, and height, thickness reach the relative angle with respect to substrate.
13. as the claim 8 or the 12 described instrument collars of controlling, it is characterized in that: by being applied on a kind of optical coating equipment, and this kind optical coating equipment is one of vacuum evaporation and sputter both.
14. the instrument collar of controlling as claimed in claim 13 is characterized in that: this optical coating equipment has a vacuum chamber, and has a coating umbrella in this vacuum chamber.
15. the instrument collar of controlling as claimed in claim 14 is characterized in that: the coating umbrella of this optical coating equipment has a pivotable central shaft, and can be driven by power and around the rotation of this central shaft.
16. the instrument collar of controlling as claimed in claim 15 is characterized in that: the vacuum chamber bottom at this optical coating equipment is provided with plating source.
17. the instrument collar of controlling as claimed in claim 16, it is characterized in that: have more than one plating film hole on the coating umbrella of this optical coating equipment, described substrate and shield formed a coated surface mutually close with described plating source by this plating film hole when the instrument collar of controlling was set on the plating film hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100654228A CN100478488C (en) | 2005-04-01 | 2005-04-01 | Transitional optical thin-film coating device and its smelting tool ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100654228A CN100478488C (en) | 2005-04-01 | 2005-04-01 | Transitional optical thin-film coating device and its smelting tool ring |
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| Publication Number | Publication Date |
|---|---|
| CN1840732A CN1840732A (en) | 2006-10-04 |
| CN100478488C true CN100478488C (en) | 2009-04-15 |
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| CNB2005100654228A Expired - Fee Related CN100478488C (en) | 2005-04-01 | 2005-04-01 | Transitional optical thin-film coating device and its smelting tool ring |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105002470A (en) * | 2015-07-13 | 2015-10-28 | 中国建筑材料科学研究总院 | Film coating method and masking jig |
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| CN104937135B (en) * | 2013-01-28 | 2018-01-19 | 应用材料公司 | Substrate carrier configures the method with clamping substrate |
| CN103993267B (en) * | 2014-04-30 | 2016-05-25 | 光驰科技(上海)有限公司 | In a kind of coating machine, amending plates arranges modification method |
| CN108300964B (en) * | 2017-12-08 | 2021-11-30 | 蓝思科技(东莞)有限公司 | Method for electroplating gradient |
| CN108947590A (en) * | 2018-07-27 | 2018-12-07 | Oppo（重庆）智能科技有限公司 | Plate, the method for preparing plate, shell, electronic equipment |
| CN114000119B (en) * | 2021-10-31 | 2023-08-25 | 东莞市齐品光学有限公司 | Coating device and coating process capable of gradually changing color left and right |
| CN114318239B (en) * | 2021-12-30 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating |
-
2005
- 2005-04-01 CN CNB2005100654228A patent/CN100478488C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105002470A (en) * | 2015-07-13 | 2015-10-28 | 中国建筑材料科学研究总院 | Film coating method and masking jig |
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| CN1840732A (en) | 2006-10-04 |
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Granted publication date: 20090415 Termination date: 20120401 |