CN100485355C - Microstructure resonant single-way bending fatigue tester based on Electrostatic force drive - Google Patents
Microstructure resonant single-way bending fatigue tester based on Electrostatic force drive Download PDFInfo
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- CN100485355C CN100485355C CNB2005101320578A CN200510132057A CN100485355C CN 100485355 C CN100485355 C CN 100485355C CN B2005101320578 A CNB2005101320578 A CN B2005101320578A CN 200510132057 A CN200510132057 A CN 200510132057A CN 100485355 C CN100485355 C CN 100485355C
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Abstract
The invention discloses a unidirectional bending fatigue test device of microstructure resonance based on driving electrostatic force, which is characterized by the following: the lateral wall of fixing comb connects the AC electrode; the hung comb connects the ground electrode through the connection bridge and fixing block on the base, which interlaces the fixing comb; one end of connection bridge is the middle point of connection arm of hung comb; the other end is fixed on the lateral arm of base through anchor layer; the connection bridge is the fatigue sample. The invention contains broader comb without relative rotation between hung and fixing comb, which avoids the interference of two combs to generate more vibration amplitude.
Description
Technical field
The present invention is used for the research of MEMS (Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) structured material polysilicon fatigue properties, belongs to micro-nano technical foundation research field.
Background technology
MEMS (Micro Electromechanical System, i.e. microelectromechanical systems) is meant and integrates microsensor, actuator and signal Processing and control circuit, interface circuit, communicates by letter and the Micro Electro Mechanical System of power supply.Summary is got up, and MEMS has following basic characteristics, microminiaturized, intelligent, multi-functional, high integration and be suitable for producing in enormous quantities.The target of MEMS technology be by system microminiaturization, integrated explore have new principle, the element and the system of new function.The MEMS technology is a kind of frontier nature research field of typical multidisciplinary intersection, almost relates to all spectra of nature and engineering science, as electronic technology, mechanical technique, physics, chemistry, biomedicine, material science, energy science etc.
Discover that the silicon that belongs to hard brittle material under macrostate can produce fatigue properties under micro-nano-scale, also not too clear and definite at present for the mechanism that this variation takes place.Understand this mechanism and measure the fatigue properties parameter of silicon under micro-meter scale and have great significance for MEMS reliability design and life prediction.
Torture test under the traditional macro yardstick is generally undertaken by the fatigue test of materials machine of special use, mainly contains type of drive such as hydraulic pressure, electromagnetism, and standard sample is clamped in wherein with dop.But this method also is not suitable for the research of MEMS fatigue properties, and at first, the type of drive of hydraulic pressure, electromagnetic force is inapplicable under micron order size state, and secondly, the clamping of micron-scale sample and centering operate extremely difficult, even may not finish.Bend in one direction is the common a kind of operating load of micro-mechanical component, is necessary to design a kind of repeated bend test device that is used for little component fatigue characteristic research, and this device can be processed by existing MEMS job operation.
Summary of the invention
The objective of the invention is to by providing based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, for use in the research of the little member Flexural fatigue of MEMS silicon.This device can be processed by MEMS two-layer polysilicon surface sacrifice layer standard technology.
The thinking of technical scheme that the present invention adopts is: driven by electrostatic force, apply alternating current to produce the bend in one direction that periodic electrostatic force causes structure to a pair of interlaced broach on the microstructure, when the natural frequency of the frequency of this electrostatic force and structure is consistent, the microstructure that suspends will resonate, make the micro-test sample that is connected in mounting structure be subjected to periodic bend in one direction load, to reach the effect of repeated bend test; By the Oscillation Amplitude of microscopic mounting structure, can try to achieve the suffered stress level of sample according to this Oscillation Amplitude; Sample and other structure connect together, with the trouble of having removed sample holder and centering from; The force environment that is subjected to of structure, each several part size and the sample of device must come from the typical MEMS member, and its result of study just has practical significance like this; The preparation of device must be suitable for existing MEMS process technology condition, can not exist to be difficult to the structure of processing or can't process at all.
The present invention adopts following technological means to realize:
A kind of based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, include electrode and fixed fingers that is connected with electrode and suspension comb; The sidewall of described fixed fingers links to each other with the electrode that is connected alternating current; Described suspension comb links to each other with ground-electrode by tie-beam and the side arm fixed block that is fixed in substrate; Described fixed fingers is staggered corresponding setting with suspension comb;
One end of above-mentioned tie-beam is the mid point of the linking arm of the suspension comb 4 that becomes one with it; The side arm fixed block of its other end for becoming one with it; Tie-beam is a fatigue testing specimen.
The root of aforesaid tie-beam is provided with breach.
The bottom of aforesaid suspension comb is provided with several lug bosses.
Aforesaid electrode surface all covers the layer of metal layer, is the polysilicon structure layer in metal level lower floor, on described electrode is fixed at the bottom of the silicon wafer-based by nethermost fixed bed.
Aforesaid terminal control mechanism is a computing machine.
Aforesaid terminal control mechanism is a singlechip microprocessor.
The present invention compared with prior art has remarkable advantages and beneficial effect:
Because the center of rotation of suspension comb of the present invention is positioned at the center annex of its cantilever, and whole broach width be provided with broad, in vibration processes, do not exist substantially between suspension comb and the fixed fingers like this and relatively rotate, suspension comb is rectilinear motion straight up and down substantially, avoided between the two owing to relatively rotating the interference that causes, thereby should be able to produce more large vibration amplitude mutually.
In addition,, there is not cross section between the connecting line of two circuit, so do not need in the structure to use hearth electrode " bridging ", reduced one deck structure, reduced manufacturing cost because structure is simpler.
Can also the natural frequency of device and the Root Stress of sample break be changed by the length and width that change sample simultaneously, be convenient to study little beam fatigue properties under the stress load in a big way.
The utilization of the resonance characteristics of structure and fatigue testing specimen root gap has improved the suffered stress level of sample greatly, and torture test can be finished in the time range of allowing.In the test, sample is in bend in one direction to be subjected in the force environment, with the residing stressed environmental classes of MEMS typical structure seemingly.Characteristics such as this little torture test constructional device has handling ease, and is easy and simple to handle have very high practical value to the research of MEMS structural strength.
Description of drawings
The positive overall situation figure of Fig. 1 microstructure bend in one direction fatigue experimental device;
The partial enlarged drawing of Fig. 2 microstructure bend in one direction fatigue experimental device;
The structure cut-open view of Fig. 3 microstructure bend in one direction fatigue experimental device electrode;
Fig. 4 tests the assembling synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the invention are illustrated:
According to the structural representation of the designed microstructure bend in one direction fatigue experimental device of this technical scheme thinking referring to Fig. 1, Fig. 2, Fig. 3.Fig. 1 is positive overall situation figure, and Fig. 2 is a microstructure bend in one direction fatigue experimental device partial enlarged drawing, and Fig. 3 is the electrode structure cut-open view, and its maximum characteristic dimension is about 300 μ m.Wherein 1,2 is electrode, all covers layer of metal on each electrode metal level 9, and purpose is in order to strengthen electric conductivity, is polysilicon structure layer 10 below the metal level, on entire electrode is fixed at the bottom of the silicon wafer-based by nethermost anchoring layer 11.3,4 is a pair of broach, links to each other with electrode 1,2 by side arm 8, side arm fixed block 7 respectively.Broach 3 is fixed in the substrate by the anchoring layer of side arm 8, and broach 4 is suspended in the air, links to each other with electrode 2 by tie-beam 5 and the side arm fixed block 7 that is fixed in substrate, and suspension comb 4 can be up and down under the driving of electrostatic force.Tie-beam 5 is exactly a fatigue testing specimen of testing used analysis, and the vibration of broach 4 will produce alternating bending load to sample, reach the effect of repeated bend test.Fatigue testing specimen is that the root of tie-beam 5 is introduced breach 6, and purpose is in order to cause stress to concentrate, to add the suffered stress level of bulk specimen.It is sticking for microstructure that prevents to suspend in the dispose procedure and substrate that the reverse side design of suspension comb 4 has some small embossments, these projectioies.
Its principle of work of microstructure bend in one direction fatigue experimental device of the present invention is: electrode 1 connects the alternating current of certain frequency, electrode 2 ground connection.Between broach 3,4, will produce alternation electrostatic force like this, when the plane natural frequency of the frequency of this electrostatic force and structure is suitable, the part that suspends will resonate, and be that tie-beam 5 produces periodic bending load thereby drive sample, and the fatigue damage that causes sample is until fracture.The Oscillation Amplitude of broach 4 can be observed by microscope, calculates the fatigue properties that the suffered stress of sample break part is studied the micro-dimension test specimen according to this Oscillation Amplitude.
The present invention, mainly is made of terminal control mechanism 200, signal generator 500, power amplifier 400, test unit 110 referring to Fig. 4 according to the designed micromechanics torture test scheme synoptic diagram of above-mentioned microstructure bend in one direction fatigue experimental device.Microstructure bend in one direction fatigue experimental device is put on the operator's console, its circuit connects to be provided by probe on the operator's console 120, the fatigue testing specimen top is placed with microscope 140, is provided with ccd video camera 150 and is used to observe the amplitude of fluctuation of suspension beam 7,8 and the situation of carrying out of test on microscope 140.The sinusoidal signal with fixed frequency that signal generator 500 produces is amplified the ac electrode 1 of back by probe 120 access microstructure bend in one direction fatigue experimental devices by power amplifier 400, and electrode 2 is by probe ground connection.
The force environment that is subjected to of the structure of microstructure bend in one direction fatigue experimental device of the present invention, each several part size and sample comes from the typical MEMS member, be applicable to the processing of MEMS standard technology, sample and other structure connect together, and have avoided the clamping of micron-scale fatigue sample when torture test and the operation of centering fully.
It should be noted that at last: above embodiment only in order to the explanation the present invention and and unrestricted technical scheme described in the invention; Therefore, although this instructions has been described in detail the present invention with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the present invention; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present invention.
Claims (6)
1, a kind of based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, include electrode and fixed fingers that is connected with electrode and suspension comb; It is characterized in that:
The side arm (8) of described fixed fingers (3) links to each other with the electrode that is connected alternating current (1); Described suspension comb (4) links to each other with ground-electrode (2) by tie-beam (5) and the side arm fixed block (7) that is fixed in substrate; Described fixed fingers (3) is staggered corresponding setting with suspension comb (4);
One end of above-mentioned tie-beam (5) is the mid point of the linking arm of the suspension comb (4) that becomes one with it; The side arm fixed block (7) of its other end for becoming one with it; Tie-beam (5) is a fatigue testing specimen.
2, according to claim 1 based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, it is characterized in that; The root of described tie-beam (5) is provided with breach.
3, according to claim 1 based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, it is characterized in that: the bottom of described suspension comb (4) is provided with several lug bosses.
4, according to claim 1 based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, it is characterized in that: the electrode of described connection alternating current (1) all covers the layer of metal layer with the surface of ground-electrode (2), in metal level lower floor is the polysilicon structure layer, on the electrode of described connection alternating current (1) and ground-electrode (2) are fixed at the bottom of the silicon wafer-based by nethermost fixed bed.
5, according to claim 1 based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, it is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is a computing machine.
6, according to claim 1 based on the bent fatigue experimental device of the power-actuated microstructure resonance single direction bending of static, it is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is a singlechip microprocessor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101320578A CN100485355C (en) | 2005-12-21 | 2005-12-21 | Microstructure resonant single-way bending fatigue tester based on Electrostatic force drive |
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| CNB2005101320578A CN100485355C (en) | 2005-12-21 | 2005-12-21 | Microstructure resonant single-way bending fatigue tester based on Electrostatic force drive |
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| CN1789959A CN1789959A (en) | 2006-06-21 |
| CN100485355C true CN100485355C (en) | 2009-05-06 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101319957B (en) * | 2008-06-03 | 2010-06-02 | 东南大学 | On-line automatic testing method and system for beam vibration fatigue reliability of micro electro-mechanical systems |
| CN108801818A (en) * | 2018-05-30 | 2018-11-13 | 上海与德通讯技术有限公司 | Bending mechanism |
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