CN100485356C - Microstructure bidirection bending pulling fatigue experimental device - Google Patents
Microstructure bidirection bending pulling fatigue experimental device Download PDFInfo
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- CN100485356C CN100485356C CNB2005101321138A CN200510132113A CN100485356C CN 100485356 C CN100485356 C CN 100485356C CN B2005101321138 A CNB2005101321138 A CN B2005101321138A CN 200510132113 A CN200510132113 A CN 200510132113A CN 100485356 C CN100485356 C CN 100485356C
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Abstract
The present invention discloses a microstructure two-way bend pulling fatigue test device. The present invention comprises a driving electrode, a detecting electrode and suspension comb units connecteA two - way bending fatigue test device of microstructure is prepared as distributing six broach units at multiple nonclosed disc ring arms with the same circular center and different diameter, using d with the detecting electrode, wherein six comb units are distributed on a plurality of opened round disk-shaped ring arms with the same circle center and different diameters, the comb units are divisaid units as driving set to drive suspension structure and as detecting set to measure swing amplitude of suspension structure separately, forming each board unit by a suspension board and two fixed ded into a driving group for driving the whole suspension structure and a detecting group for measuring the amplitude of the swing of the suspension structure, the driving group and the detecting groubroaches at two sides of suspension broach, connecting suspension broach to DC electrode and fixed broach to driving electrode, connecting two AC with the same frequency and opposite phase separately p are distributed alternately, each of the comb units comprises a suspension comb and two fixing combs positioned on both sides of the suspension comb, the suspension combs of all the comb units are cto driving electrode. onnected into a whole through ring arms on the inner sides and are connected with a direct current electrode finally, the fixing combs on both sides of each driving comb unit are connected with the driving electrode, and two kinds of alternating current electricity with the same frequency and opposite phase positions are respectively switched in the driving electrode. The minitype fatigue test structure device has the characteristics of easy processing, convenient operation, etc., and has high practicability to the research of MEMS structural strength.
Description
Technical field
The present invention is used for the research of MEMS (Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) structured material polysilicon fatigue properties, belongs to micro-nano technical foundation research field.
Background technology
Discover that the silicon that belongs to hard brittle material under macrostate can produce fatigue properties under micro-nano-scale, also not too clear and definite at present for the mechanism that this variation takes place.Understand this mechanism and measure the fatigue properties parameter of silicon under micro-meter scale and have great significance for MEMS reliability design and life prediction.
Under the yardstick that current MEMS can reach, because size is dwindled the influence (Scaling Effects) that brings, many physical phenomenons and macrocosm have very big difference, therefore are necessary oligodynamics, microfluid mechanics, microthermodynamics, little tribology, micro-optic and microstructure are carried out deep research.Though this research on the one hand comes into one's own, difficulty is bigger.
Torture test under the traditional macro yardstick is generally undertaken by the fatigue test of materials machine of special use, mainly contains type of drive such as hydraulic pressure, electromagnetism, and standard sample is clamped in wherein with dop.But this method also is not suitable for the research of MEMS fatigue properties, and at first, the type of drive of hydraulic pressure, electromagnetic force is inapplicable under micron order size state, and secondly, the clamping of micron-scale sample and centering operate extremely difficult, even may not finish.In view of micro-mechanical component often works under the bidirection bending pulling multiaxis stress state, be necessary to design a kind of bidirection bending pulling multiaxle fatigue experimental device that is used for little component fatigue characteristic research, and this device can be processed by existing MEMS job operation.
Summary of the invention
The objective of the invention is to by providing a kind of, to be used for the research of the little member bidirection bending pulling of MEMS silicon fatigue properties based on the power-actuated microstructure bidirection bending pulling fatigue experimental device of static.This device can be processed by MEMS two-layer polysilicon surface sacrifice layer standard technology.
The thinking of technical scheme that the present invention adopts is: (1) is driven by the opposite electrostatic force two way alternate of phase place, apply the opposite alternating current of phase place to produce periodic two way alternate electrostatic force for the broach on three groups of interlaced microstructures that are distributed in circumference, when the natural frequency of the frequency of this electrostatic force and structure is consistent, the part that suspends of microstructure will resonate, make the sample that is connected on the vibrating mass be subjected to periodic compound bending tensile load, to reach the effect of bidirection bending pulling multiaxle fatigue experimental; (2) by capacitive transducer and microscope measurement suspend the part Oscillation Amplitude, capacitive transducer is realized by the other three groups of comb units that are distributed in circumference, the vibration of the part that suspends will cause that the electric capacity between the broach changes in these three groups of comb units, just the amplitude of the partial vibration that suspends can be obtained according to the amplitude of capacitance variations, the suffered stress level of sample can be tried to achieve by this Oscillation Amplitude; (3) sample, drive part and test section are integrated in one, and have removed the trouble of sample holder and centering from; (4) force environment that is subjected to of Zhuan Zhi structure, each several part size and sample must come from the typical MEMS member, and its result of study just has practical significance like this; (5) Zhuan Zhi preparation must be suitable for existing MEMS process technology condition, can not exist to be difficult to the structure of processing or can't process at all.
The present invention adopts following technological means to realize:
A kind of microstructure bidirection bending pulling fatigue experimental device includes drive electrode, detecting electrode and is attached thereto the suspension comb unit that connects; Identical in the center of circle but several non-closed circle plate-like ring arms that diameter is different are distributed with several comb units; This comb unit is divided into the test set that is used for driving the driving group of whole mounting structure and is used for measuring the amplitude of mounting structure swing; Described driving group and test set are alternately distributed;
Described each comb unit comprises a suspension comb and two and is positioned at the suspension comb both sides fixed fingers of clamping with it;
The suspension comb of above-mentioned all comb units is connected in one by interior side ring arm and finally links to each other with DC electrode;
The fixed fingers of above-mentioned all both sides, driving comb unit finally all links to each other with drive electrode or links to each other with drive electrode by hearth electrode, inserts the alternating current that two frequencies are identical, phase place swings with the suspension comb that spurs the driving comb unit on the contrary on drive electrode respectively;
The fixed fingers of above-mentioned all both sides, detection comb unit finally all links to each other with detecting electrode or links to each other with detecting electrode by hearth electrode, inserts the opposite high-frequency carrier signal of two frequency same phases respectively at this detecting electrode;
In described, be connected with the sample that produces the multiaxis alterante stress between side ring arm and the non-closed circle plate-like ring arm center.
Aforesaid comb unit is connected with electrode respectively by the hearth electrode that is arranged on ring arm downside.
Aforesaid suspension comb is 6.
Aforesaid electrode is 5; Comprising 2 drive electrodes, 2 detecting electrodes and 1 DC electrode.
Aforesaid each both sides, suspension comb end are equipped with link stopper.
The opposite alternating current of the aforesaid two frequency same phases that link to each other with detecting electrode is the high-frequency carrier signal of 180 ° of phasic differences mutually.
Aforesaid described sample is a root gap beam shape.
Aforesaid control terminal is a computing machine.
Aforesaid control terminal is the single card microcomputer microprocessor.
The present invention compared with prior art has remarkable advantages and beneficial effect:
The force environment that is subjected to of the structure of microstructure bidirection bending pulling fatigue experimental device of the present invention, each several part size and sample comes from the typical MEMS member, be applicable to the processing of MEMS standard technology, sample and driving and pick-up unit are connected in one, have avoided the clamping of micron-scale fatigue sample when torture test and the operation of centering fully.The drive part of structure and test section branch come respectively and to be born by different two groups of comb units and circuit, have avoided interfering with each other between them.Because it is opposite to insert the alternating current phases of driving comb both sides, so the electrostatic force of both sides will cause the effect of compound bending in turn to the suspension comb generation stretching action of centre.In the test, sample is in stretching, bending, shear multiaxis is subjected in the force environment, with the residing stressed environmental classes of MEMS typical structure seemingly.In addition, the introducing of pointer and index dial makes and utilizes microscope that the observation of broach amplitude is become convenient and accurate.Characteristics such as this little torture test constructional device has handling ease, and is easy and simple to handle have very high practical value to the research of MEMS structural strength, have reached purpose and requirement proposed by the invention.
Description of drawings
Fig. 1 is the isometric front view of microstructure bidirection bending pulling fatigue experimental device;
Fig. 2 is the microstructure bidirection bending pulling fatigue experimental device partial enlarged drawing;
Fig. 3 is the microstructure bidirection bending pulling fatigue experimental device partial enlarged drawing;
Fig. 4 for microstructure bidirection bending pulling fatigue experimental device suspend the part structural drawing;
Fig. 5 is the structural drawing at microstructure bidirection bending pulling fatigue experimental device sample place;
Fig. 6 is the cut-open view of each electrode structure;
Fig. 7 is test assembling synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the invention are illustrated:
, shown in Figure 6 according to the structural representation of the designed microstructure bidirection bending pulling fatigue experimental device of this technical scheme thinking referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5.Fig. 1 is positive overall situation figure, Fig. 2, Fig. 3 are the partial enlarged drawing of primary structure part, and its maximum characteristic dimension is about 1000 μ m, and Fig. 4 is the structural drawing of all oscillating components that suspend, Fig. 5 is the pattern of sample place after amplifying, and Fig. 6 is the cut-open view of each layer of electrode structure.The distribution in the form of annular discs of whole device, 1,2,3,4,5 is five electrodes, and wherein 2,4 is drive electrode, links to each other with ring arm 6,7 respectively, and 1,5 is detecting electrode, links to each other with ring arm 8,9 respectively, and 3 is DC electrode.All cover layer of metal on each electrode, purpose is in order to strengthen electric conductivity, and the cut-open view of electrode structure is participated in Fig. 6, has four layers: metal level 50, polysilicon structure layer 51, anchoring layer 52 and bottom electrode layer 53.Six suspension comb unit circumferentially see also shown in Figure 2ly, can be divided into two groups, and wherein one group is the driving group, and another group is the measurement group.Each comb unit structure is the same substantially, comprise a suspension comb and two fixed fingers, wherein suspension comb is positioned in the middle of the comb unit, can swing under the drive of the close interior side ring arm 15 that is connected with suspension comb in the driving comb unit, fixed fingers is positioned at the clamping with it of suspension comb both sides.Typical case's driving comb cellular construction is seen Fig. 2, and wherein 31 be suspension comb, can swing under the driving of electrostatic force, be positioned at both sides with it the broach 311,312 of clamping be fixed fingers, link to each other with drive electrode 4,2 electricity respectively by encircling arm 6,7.The suspension comb of other two groups of driving comb unit is 32,33, links to each other with ring arm 7 electricity by hearth electrode 323 with a wherein fixed fingers 321 of suspension comb 32 clampings, and another fixed fingers 322 directly links to each other with ring arm 6; Link to each other with ring arm 7 electricity by hearth electrode 333 with a wherein fixed fingers 331 of suspension comb 33 clampings, another fixed fingers 332 directly links to each other with ring arm 6.Typical case's detection comb cellular construction as shown in Figure 3, wherein 41 are the activity broach that suspends, be positioned at both sides with it the broach 411,412 of clamping be fixed fingers, solid on bottom electrode layer 413,414 by the anchoring layer of its sidewall bottom, wherein hearth electrode 413,414 is respectively applied for fixed fingers 411,412 and is connected with the circuit of ring arm 8,9, and the ring arm 8,9 by discoid distribution is connected two detecting electrodes 1,5 with fixed fingers 411,412.The suspension comb of other two groups of detection comb unit is 42,43, link to each other with outer ring arm 8,9 by hearth electrode 423,424 with two fixed fingers 421,422 of 42 clampings, link to each other with outer shroud 8,9 by hearth electrode 433,434 with two fixed fingers 431,432 of 43 clampings.The middle broach 31,32,33,41,42,43 of each driving comb unit and detection comb unit all is suspended in the air, interior ring 15 links to each other these six the middle broach that suspending, and link to each other with the fixed block 19 of disc centre by two beams 17,27, fixed block 19 passes through hearth electrode 18 again and links to each other with DC electrode 3 electricity.The structure of the whole part that suspends as shown in Figure 4, comprising six suspension combs, connect in 15, two beams 17,27 of ring, the fixed block 19 of the whole part that suspends by the center is fixed in the substrate.In fact ring 15 is exactly the fatigue testing specimen that test will be analyzed with two beams 17,27 of fixed block 19 in connecting, and sees also shown in Figure 5ly, and the sample end is provided with breach 171, and purpose is concentrated in order to introduce stress, adds the suffered stress level of bulk specimen.Each both sides, suspension comb end is equipped with link stopper 16 as shown in Figure 3, thereby in order to avoid in vibration processes the too big and fixed fingers of amplitude bump to connect and cause short circuit.For the ease of the Oscillation Amplitude of observation structure, pointer 13 and index dial 14 have been designed in the end of one group of suspension comb bar therein.
Its principle of work of microstructure bidirection bending pulling fatigue experimental device of the present invention is: drive electrode 2,4 inserts the opposite alternating current of two frequency same phases respectively, and DC electrode 3 inserts dc offset voltage.The both sides of suspension comb will produce periodic alternately electrostatic force in driving group comb unit like this, both sides electrostatic force drives the whole part (referring to Fig. 4) that suspends in turn and produces rotational vibration, when the plane natural frequency of the frequency of this electrostatic force and whole mounting structure is suitable, will resonate, thereby drive sample 17,27 produce periodic compound bending load, in addition, the variation of angular velocity will cause sample 17 in the partial vibration process that suspends, the variation of 27 suffered centrifugal force generating periods, bending load and action of centrifugal force will make sample 17,27 produce the multiaxis alterante stress, thereby cause sample 17,27 fatigue damage is until fracture.The high-frequency carrier signal that the phase phasic difference is 180 ° inserts detecting electrode 1,5 respectively, signal by the sense current in direct biasing circuit changes the amplitude of fluctuation that just can measure suspension comb indirectly, this measurement result can compare with microscopical observed result, checks its correctness.Calculate the fatigue properties that the suffered stress of sample break part is studied the micro-dimension test specimen according to this Oscillation Amplitude.
Embodiments of the invention are the micromechanics torture test scheme of utilizing above-mentioned microstructure bidirection bending pulling fatigue experimental device designed.This scheme synoptic diagram mainly is made of terminal control mechanism 200, signal generator 500, power amplifier 400, test operation platform 100 and amplitude measurement circuit 300 referring to Fig. 7.The microstructure bidirection bending pulling fatigue experimental device chip is put on the operator's console, its circuit connects to be provided by probe on the operator's console 120, the fatigue testing specimen top is placed with microscope 140, is provided with ccd video camera 150 and is used to observe the Oscillation Amplitude of suspension comb and the situation of carrying out of test on microscope 140.The sinusoidal signal with fixed frequency that signal generator 500 produces is amplified the microstructure bidirection bending pulling fatigue experimental device chip is inserted in the back by probe 120 electrode by power amplifier 400, detection signal is drawn by probe 130, insert amplitude measurement circuit 300, last entry terminal control device carries out analyzing and processing.Need to prove that terminal control mechanism can be that computing machine also can be the single card microcomputer microprocessor.
It should be noted that at last: above embodiment only in order to the explanation the present invention and and unrestricted technical scheme described in the invention; Therefore, although this instructions has been described in detail the present invention with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the present invention; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present invention.
Claims (8)
1, a kind of microstructure bidirection bending pulling fatigue experimental device includes drive electrode, detecting electrode and is attached thereto the suspension comb unit that connects; It is characterized in that:
Identical in the center of circle but several non-closed circle plate-like ring arms that diameter is different are distributed with several comb units; This comb unit is divided into the test set that is used for driving the driving group of whole mounting structure and is used for measuring the amplitude of mounting structure swing; Described driving group and test set are alternately distributed;
Described each comb unit comprises a suspension comb and two and is positioned at the suspension comb both sides fixed fingers of clamping with it;
The suspension comb of above-mentioned all comb units is connected in one by interior side ring arm and finally links to each other with DC electrode;
The fixed fingers of above-mentioned all both sides, driving comb unit finally all links to each other with drive electrode or links to each other with drive electrode by hearth electrode, inserts the alternating current that two frequencies are identical, phase place swings with the suspension comb that spurs the driving comb unit on the contrary on drive electrode respectively;
The fixed fingers of above-mentioned all both sides, detection comb unit finally all links to each other with detecting electrode or links to each other with detecting electrode by hearth electrode, inserts the opposite high-frequency carrier signal of two frequency same phases respectively at this detecting electrode;
In described, be connected with the sample that produces the multiaxis alterante stress between side ring arm and the non-closed circle plate-like ring arm center.
2, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that described comb unit is connected with electrode respectively by the hearth electrode that is arranged on ring arm downside.
3, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that described suspension comb is 6.
4, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that described electrode is 5; Comprising 2 drive electrodes, 2 detecting electrodes and 1 DC electrode.
5, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that described each both sides, suspension comb end are equipped with link stopper.
6, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that described sample is a root gap beam shape.
7, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is a computing machine.
8, microstructure bidirection bending pulling fatigue experimental device according to claim 1 is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is the single card microcomputer microprocessor.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101321138A CN100485356C (en) | 2005-12-16 | 2005-12-16 | Microstructure bidirection bending pulling fatigue experimental device |
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| CNB2005101321138A CN100485356C (en) | 2005-12-16 | 2005-12-16 | Microstructure bidirection bending pulling fatigue experimental device |
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| CN1793826A CN1793826A (en) | 2006-06-28 |
| CN100485356C true CN100485356C (en) | 2009-05-06 |
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| CN103424323B (en) * | 2012-05-14 | 2016-03-30 | 海洋王（东莞）照明科技有限公司 | Cable bending fatigue proving installation |
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Non-Patent Citations (5)
| Title |
|---|
| MEMS reliability from a failure mechanisms perspective. W. Merlijn van Spengen.Microelectronics Reliability,Vol.43 No.7. 2003 |
| MEMS reliability from a failure mechanisms perspective. W. Merlijn van Spengen.Microelectronics Reliability,Vol.43 No.7. 2003 * |
| Rupture Tests on Polysilicon Films through On-chipelectrostatic Actuation. Fabrizio Cacchione，Biagio De Masi，Albert0 Corigliano，Marco Ferrera.Thermal and Mechanical Simulation and Experiments in Micro-electronics and Micro-Systems, EuroSimE2004. 2004 |
| Subcritical Crack Growth in Silicon MEMS. William W. Van Arsdell ,Stuart B. Brown.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,Vol.8 No.3. 1999 |
| Subcritical Crack Growth in Silicon MEMS. William W.Van Arsdell ,Stuart B. Brown.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,Vol.8 No.3. 1999 * |
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