CN100524892C - Laser induced thermal imaging apparatus and laser induced thermal imaging method - Google Patents
Laser induced thermal imaging apparatus and laser induced thermal imaging method Download PDFInfo
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- CN100524892C CN100524892C CNB2006101433674A CN200610143367A CN100524892C CN 100524892 C CN100524892 C CN 100524892C CN B2006101433674 A CNB2006101433674 A CN B2006101433674A CN 200610143367 A CN200610143367 A CN 200610143367A CN 100524892 C CN100524892 C CN 100524892C
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- contact frame
- magnet
- thermal imaging
- substrate platform
- induced thermal
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/211—Changing the shape of the active layer in the devices, e.g. patterning by selective transformation of an existing layer
Abstract
A laser induced thermal imaging apparatus for imaging an imaging layer of a donor film on an acceptor substrate. The laser induced thermal imaging apparatus includes: a substrate stage having an electromagnet, and adapted to receive an acceptor substrate having a pixel area of the organic light emitting device and a donor film including the organic light emitting layer to be imaged on the pixel area; a laser oscillator for irradiating a laser on the donor film; a contact frame adapted to be located between the substrate stage and the laser oscillator and including an opening portion of a pattern corresponding to a part to be imaged of the donor film and a permanent magnet for forming a magnetic force with the substrate stage; and a contact frame moving mechanism for moving the contact frame toward the substrate stage.
Description
Technical field
The present invention relates to laser induced thermal imaging apparatus and laser induced thermal imaging method, particularly, relate to by utilizing magnetic force to carry out the laser induced thermal imaging apparatus and the laser induced thermal imaging method of the lamination process of donor film (donor film) and acceptor substrate (acceptors substrate).
Background technology
Organic light-emitting devices is to have the device that is arranged on the luminescent layer between first electrode and second electrode.When voltage was applied between this electrode, this organic light-emitting devices was by launching light in conjunction with hole in this luminescent layer and electronics.Hereinafter, prior art and the present invention are described with reference to the laser induced thermal imaging apparatus that is used to make organic light-emitting devices, yet, the invention is not restricted to this.
This laser induced thermal imaging method comprises the structure base board of executing of substrate, light-heat converting layer and transport layer (imaging layer) with laser radiation, and the laser of conversion by this substrate becomes the heat in this light-heat converting layer, like this this light-heat converting layer distortion and expanding so that contiguous transport layer distortion and expanding.Like this, this transport layer adheres on this receptor substrate, thereby this transport layer can convert this receptor substrate to.
When this laser induced thermal imaging method of execution, the inside of finishing the cavity of imaging should be the vacuum shape, with consistent with the deposition process that forms this light-emitting device.Yet, when under this vacuum state, carrying out this laser induced thermal imaging according to prior art, there is a problem to be, because execute foreign substance (impurity) or the influence in (space or gap) at interval that produces between structure base board and this receptor substrate at this, the picture in the imaging layer can not well show.Therefore, in this laser induced thermal imaging method, this method of executing structure base board and this receptor substrate of lamination is just very important, and has considered the scheme of this interval of multiple solution or impurity problem.
Fig. 1 is the partial cross section figure according to the laser induced thermal imaging apparatus that is used to overcome the problems referred to above in the prior art.According to Fig. 1, laser induced thermal imaging apparatus 10 comprises substrate platform (substrate stage) 12 that is positioned at cavity 11 inboards and the laser oscillator 13 that is positioned at these cavity 11 tops.
This substrate platform 12 is steps of placing acceptor substrate 14 and donor film 15, and they introduce in this cavity 11.
In this case, for lamination acceptor substrate 14 and this donor film 15, do not produce foreign substance (foreign substance) or at interval between the structure base board 15 and do not execute simultaneously at this receptor substrate 14 and this, the inboard of carrying out this cavity 11 of this laser induced thermal imaging does not keep vacuum state, but by connecting the bottom of flexible pipe 16 to this substrate platform 12, P bleeds with vacuum air pump, thereby adheres to this receptor substrate 14 and this donor film 15.Yet, in such prior art, owing to can not prevent the foreign substance 1 between this receptor substrate 14 and this donor film 15 and the generation in space fully, and can not keep the vacuum state of these cavity 11 inside, therefore can have a negative impact to the reliability of products and the term of validity.
Summary of the invention
One aspect of the present invention provides laser induced thermal imaging apparatus and laser induced thermal imaging method, is used to adopt magnetic force in vacuum condition laminated acceptor substrate and donor film.
In one exemplary embodiment according to the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, and wherein, this substrate platform comprises electromagnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame (contact frame), it is adapted to be arranged between this substrate platform and this laser oscillator and comprises corresponding to the pattern openings part of the imaging moiety of donor film and be used for forming with this substrate platform the magnet of magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, and wherein, this substrate platform comprises permanent magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame, it is adapted to be arranged between this substrate platform and this laser oscillator and comprises corresponding to the opening portion of the pattern of the imaging moiety of donor film and be used for forming with this substrate platform the magnet of magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, and wherein, this substrate platform comprises permanent magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame, it is adapted to be arranged between this substrate platform and this laser oscillator and comprises corresponding to the opening portion of the pattern of the imaging moiety of donor film and be used for forming with this substrate platform the electromagnet of magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, and wherein, this substrate platform comprises magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame, the magnet that it is adapted to be arranged between this substrate platform and this laser oscillator and comprises at least one hop that is used for the transparent material that laser passes through and be used for forming with this substrate platform magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, wherein, this substrate platform comprises magnetisable material, and is adapted to put this receptor substrate and donor film, the this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame, the magnet that it is adapted to be arranged between this substrate platform and this laser oscillator and comprises at least one hop that is used for the transparent material that laser passes through and be used for forming with this substrate platform magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging apparatus of the luminescent layer that is used to form organic light-emitting devices.This equipment comprises: the substrate platform, and wherein, this substrate platform comprises magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region; Laser oscillator, its emission laser is on this donor film; Contact frame, the magnetisable material that it is adapted to be arranged between this substrate platform and this laser oscillator and comprises at least one hop that is used for the transparent material that laser passes through and be used for forming with this substrate platform magnetic force; With contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging method of the luminescent layer that is used to form organic light-emitting devices.This method comprises: in the contact frame that comprises electromagnet with comprise between the substrate platform of permanent magnet, the acceptor substrate of the pixel region with organic light-emitting devices is set and comprises the donor film that is imaged on this organic light-emitting layer on this pixel region; The electromagnetic force that utilization forms between this contact frame and this substrate platform adheres to this receptor substrate and this donor film; Launch laser on this donor film corresponding to this organic light-emitting layer with passing through, the organic light-emitting layer of this of this donor film of imaging is to this receptor substrate.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging method of the luminescent layer that is used to form organic light-emitting devices.This method comprises: in the contact frame that comprises permanent magnet with comprise between the substrate platform of permanent magnet, the acceptor substrate of the pixel region with organic light-emitting devices is set and comprises the donor film that is imaged on this organic light-emitting layer on this pixel region; The electromagnetic force that utilization forms between this contact frame and this substrate platform adheres to this receptor substrate and this donor film; Launch laser on this donor film corresponding to this organic light-emitting layer with passing through, the organic light-emitting layer of this of this donor film of imaging is to this receptor substrate.
In according to another exemplary embodiment of the present invention, provide the laser induced thermal imaging method of the luminescent layer that is used to form organic light-emitting devices.This method comprises: in the contact frame that comprises permanent magnet with comprise between the substrate platform of electromagnet, the acceptor substrate of the pixel region with organic light-emitting devices is set and comprises the donor film that is imaged on this organic light-emitting layer on this pixel region; The electromagnetic force that utilization forms between this contact frame and this substrate platform adheres to this receptor substrate and this donor film; Launch laser on this donor film corresponding to this organic light-emitting layer with passing through, the organic light-emitting layer of this of this donor film of imaging is to this receptor substrate.
Description of drawings
In conjunction with the accompanying drawings, by following description to one exemplary embodiment, these and/or others of the present invention and feature will become more apparent with easier to understand, wherein:
Fig. 1 has showed the partial cross section figure according to the LASER HEAT imaging device of prior art.
Fig. 2 is the decomposition diagram according to the laser induced thermal imaging apparatus of first embodiment of the invention to the six embodiment.
Fig. 3 has showed the topology view that is used for laser induced thermal imaging apparatus laser oscillator embodiment of the present invention.
Fig. 4 is the schematic sectional view that A-A ' line cuts open the contact frame of the laser induced thermal imaging apparatus of getting in Fig. 2.
Fig. 5 has showed the perspective view according to the contact frame travel mechanism of laser induced thermal imaging apparatus of the present invention.
Fig. 6 is the flow chart of showing according to the laser induced thermal imaging method of the embodiment of the invention.
Embodiment
Hereinafter, particular exemplary embodiment of the present invention is described with reference to the accompanying drawings in more detail.Fig. 2 is the decomposition diagram according to the laser induced thermal imaging apparatus of first embodiment of the invention to the six embodiment.According to this figure, laser induced thermal imaging apparatus 100 comprises substrate platform 110, laser oscillator 120, contact frame 130, contact frame travel mechanism 140 and cavity 150.
＜the first embodiment 〉
Set forth the donor film 200 of employing substrate platform 110 and the contact process (or adhesion process) of acceptor substrate 300 according to the first embodiment of the present invention, this substrate platform 110 comprises electromagnet, has the contact frame 130 of opening portion predetermined pattern and permanent magnet.This opening portion on this contact frame 130 can be opening or use transparent material, as the hop of glass or transparent polymer covering.This substrate platform 110 comprises one or more magnet 111, and it can be that permanent magnet, electromagnet, magnetisable material or any other have the suitable material of magnetic.
This cavity 150 can be the cavity that is used in traditional laser induced thermal imaging apparatus, and the inside of this cavity 150 is equipped with substrate platform 110 at least and is adapted to put this contact frame 130 etc.In these cavity 150 inboards, this donor film 200 and this receptor substrate 300 can transmit or locate, and at this, are used to transmit this donor film 200 and this receptor substrate 300 are provided at this cavity 150 to the connecting gear (not shown) of these cavity 150 inboards the outside.From the viewpoint of manufacture process, the inboard of this cavity 150 should remain vacuum state, but the invention is not restricted to this.
This substrate platform 110 is positioned on this cavity 150 or near its bottom side, in this first embodiment, this substrate platform 110 provides electromagnet (not shown among Fig. 2) at least.In described embodiment, electromagnet is provided at the inboard of this substrate platform 110.At this, this electromagnet can be arranged in the plane.Yet when using a plurality of electromagnet, this electromagnet can form the concentric circles pattern or have length and the multiple row of width.
This substrate platform 110 can also comprise the driving mechanism (not shown) that moves this substrate platform.When this substrate platform 110 moves, this laser oscillator 120 can be set make it at a direction emission laser.For example, when this laser when vertically emission and this substrate platform 110 also comprise the driving mechanism that moves this substrate platform, this laser can be transmitted on the whole zone of this donor film 200.
Equally, this substrate platform 110 can comprise the installing mechanism that puts and install this receptor substrate 300 and this donor film 200.This installing mechanism allows to utilize this connecting gear to transmit this receptor substrate 300 and the inboard of this donor film 200 to this cavity 150, so that accurately be installed in the position (for example, preposition) of expectation.
In the present embodiment, this installing mechanism can form have through hole 410,510, guide post 420,520, movable plate 430,530, bearing 440,40 and groove 450,550 is installed.At this, this guide post 420 that promotes action or down maneuver that provides along this movable plate 430 and this bearing 440 has such structure, so that its by and pass and put this receptor substrate 300 when this through hole 410 promotes, when by and pass and allow this receptor substrate 300 to arrive this installation groove 450 that is formed on this substrate platform 110 safely when this through hole 410 descends.Multiple modification to this installing mechanism can realize by one of ordinary skill in the art, therefore, omits detailed explanation to it at this.
This laser oscillator 120 can be installed in the inboard or the outside of this cavity 150.In described embodiment, this laser oscillator 120 is installed in the inboard of this cavity so that laser can be from the top emission of this cavity 150.According to Fig. 3, it is the schematic diagram of this laser oscillator 120, in the present embodiment, this laser oscillator 120 adopts CW ND:YAG laser (1604mm) and comprises two galvanometers (galvanometer scanners) 121,123, scanning lens 125 and cylindrical lens 127, but is not limited thereto.
Fig. 4 is the schematic sectional view that A-A ' line cuts open the contact frame 130 of getting in Fig. 2.This contact frame 130 comprise one or more permanent magnets with form and the electromagnet of this substrate platform between magnetic force, thereby this donor film 200 and this receptor substrate 300 of lamination (adhering to each other) between this substrate platform 110 and this contact frame 130 effectively.At this, this contact frame 130 itself can form permanent magnet, or one or more permanent magnet is formed on the upside or the downside of this contact frame 130.In described embodiment, this permanent magnet comprises the permanent magnet nano particle.This contact frame 130 also comprises opening portion (or opening) 133, and in other embodiments, this opening portion can be the hop that is covered by transparent material (for example, glass or transparent polymer).
This contact frame 130 comprises one or more opening portions that laser beam passes through.That is, corresponding to the imaging moiety of this donor film 200, the desired region of this donor film 200 can adopt the opening portion of this pattern to be imaged on (or being sent to) this receptor substrate 300.Therefore, this contact frame 130 can be in the position of one or more expectations or the shielding of position (for example, precalculated position) executed in parallel emission laser.
This contact frame 130 can exchange each other or replace and operate, and is formed with at least one opening portion, corresponding to this opening portion, is formed with each subpixel of the organic light-emitting devices that adopts organic light-emitting layer imaging.
This contact frame travel mechanism 140 is that it can manufacture various forms to the mechanism that this substrate platform moves this contact frame 130.Yet according to the embodiment that shows among Fig. 5, it comprises: carriage 141 comprises bracket slot 142; Connecting rod 143 is connected on this carriage 141 of these cavity 150 upsides; With the driving mechanism (not shown), be used to drive connecting rod 143 and move up and down with this carriage 141 that is connected thereto.When travel mechanism shown in Figure 5 moved, this contact frame 130 was installed and is moved on the pallet 135 that comprises carriage projection 134.This contact frame 130 comprises one or more magnet 137, and it can be electromagnet, permanent magnet or magnetisable material.
Exchange mechanism such as robotic arm etc. can be used for exchanging this first contact frame and this second contact frame.For example, be arranged on first subpixel and second subpixel of first contact frame on this carriage in formation after, this robotic arm can transmit this first contact frame to the outside from this carriage, and can place second contact frame to this carriage, so that they can exchange each other.
Next, the formation method of the organic light-emitting devices that adopts above-mentioned laser induced thermal imaging apparatus is described with reference to Fig. 2 and Fig. 6.When forming this organic light-emitting devices, adopt the method for above-mentioned laser induced thermal imaging apparatus may further comprise the steps: to transmit (placement) this receptor substrate ST100; Transmit (placement) this donor film ST200; Contact (or adhesion) this contact frame ST300; Imaging (or transmission) is corresponding to the organic layer of this subpixel ST400; Separate this contact frame ST500.
In the step that transmits this receptor substrate ST100, place or lay this receptor substrate 300 that forms this organic light-emitting layer and comprising on this substrate platform 110 of magnet or magnetisable material.This pixel region is limited on this receptor substrate 300, is formed with the luminescent layer of imaging on this donor film on it.
In the step that transmits this donor film ST200, this donor film that transmits or place this luminescent layer that comprises imaging is on (or being sent to) this receptor substrate 300.Simultaneously, this luminescent layer can be constructed with any suitable color, as redness.
In the step of contact (or adhesion) this contact frame ST300, move this contact frame to this substrate platform with magnetic pull, wherein, this contact frame comprises opening portion and permanent magnet, wherein, the laser of organic light-emitting layer of this donor film of imaging is by this opening portion.Therefore, this donor film and therebetween this receptor substrate lamination or closely contact or adhere to each other each other.In described embodiment, this contact frame at first adopt this contact frame moving structure to move and towards and/or with this receptor substrate contacts.Then, adopt magnetic pull more effectively to be in contact with it (or adhesion).
In the step of this subpixel of imaging ST400, this opening portion emission laser by this contact frame is expanded this organic light-emitting layer that is provided in this donor film on this donor film, and this organic light-emitting layer of imaging (or transmission) is in this pixel area of this receptor substrate.Simultaneously, the transmitting boundary of control laser so that laser only be transmitted in the pixel area corresponding to this opening portion.
In the step of separating this contact frame ST500, adopt this contact frame travel mechanism that this contact frame is separated from this receptor substrate, wherein, in described embodiment, at first separate this contact frame by magnetic pull, then, with this contact frame travel mechanism this contact frame is risen to the top of this cavity.
Although explained the present invention substantially with reference to first embodiment, can carry out numerous modifications and variations to it under condit without departing from the spirit and scope of the present invention.For example, based on the announcement among the application, on the structure of this contact frame travel mechanism, in shape at hop, at opening portion in shape, the first-class variation of shape at the magnet that comprises (adopting magnet nano particle etc.) can obtain by one of ordinary skill in the art.Hereinafter, will describe and second to the 6th consistent embodiment of structure, yet substrate platform separately is different with the scope of contact frame application with reference to first embodiment of Fig. 2.Therefore, except substrate platform and contact frame,, hereinafter will omit description to it owing to can be applied in the description of other assembly and process approach to the description of first embodiment.
＜the second embodiment 〉
The donor film 200 of employing substrate platform and (or adhesion) process that contacts of acceptor substrate 300 have been set forth according to a second embodiment of the present invention, wherein this substrate platform comprises one or more permanent magnets and the contact frame that comprises opening portion pattern (for example, Yu Ding pattern) and one or more permanent magnets.
With reference to Fig. 2, this substrate platform 110 is positioned on this cavity 150 or near its bottom side, and in this second embodiment, this substrate platform 110 provides a permanent magnet at least.In described embodiment, permanent magnet is provided at the inboard of this substrate platform 110.
This contact frame 130 comprises one or more permanent magnets forming magnetic force with the one or more electromagnet of this of this substrate platform, thus this donor film 200 and this receptor substrate 300 of lamination between this substrate platform 110 and this contact frame 130 effectively.In described embodiment, this contact frame 130 itself can form permanent magnet, or one or more upside or downside that is formed on this contact frame 130.In described embodiment, this permanent magnet comprises (or comprising) permanent magnet nano particle.
This contact frame 130 comprises opening portion (or hop) 133 (shown in Fig. 5), and wherein laser can pass through.That is, by the opening portion corresponding to the pattern of the imaging of this donor film 200 (or transmission) part, the desired region of this donor film 200 can be imaged on (or being sent to) this receptor substrate 300.Therefore, this contact frame 130 can only be carried out the shielding task of emission laser simultaneously in the position (for example, precalculated position) of an expectation.
This contact frame 130 can exchange or replace each other, and it is formed with at least one opening portion, corresponding to this opening portion, utilizes organic light-emitting layer imaging (or transmission) to form each subpixel of organic light-emitting devices.
＜the three embodiment 〉
A third embodiment in accordance with the invention has been set forth and has been adopted the donor film 200 of substrate platform and the contact process of acceptor substrate 300, and wherein this substrate platform comprises one or more permanent magnets and the contact frame that comprises opening portion predetermined pattern and one or more permanent magnets.
This substrate platform 110 is positioned on this cavity 150 or near its bottom side, and in the 3rd embodiment, this substrate platform 110 provides a permanent magnet at least.In described embodiment, permanent magnet is provided at the inboard of this substrate platform 110.In described embodiment, this permanent magnet can comprise (or comprising) permanent magnet nano particle.
In described embodiment, this contact frame 130 comprises that one or more electromagnet form electromagnetic forces with the one or more permanent magnets with this substrate platform 110, thus this donor film 200 and this receptor substrate 300 of lamination between this substrate platform 110 and this contact frame 130 effectively.At this, this electromagnet can be arranged in the plane, yet when using a plurality of electromagnet, this electromagnet can form the concentric circles pattern or have length and the multiple row of width.
This contact frame 130 comprises opening portion 133, and wherein laser can pass through.That is, by the opening portion corresponding to the pattern of the imaging moiety of this donor film 200, the desired region of this donor film 200 can be imaged on (or being sent to) this receptor substrate 300.Therefore, this contact frame 130 can only be carried out the shielding task of emission laser simultaneously in the position (for example, precalculated position) of an expectation.
This contact frame 130 can exchange or replace each other, and it is formed with at least one opening portion, corresponding to this opening portion, adopts organic light-emitting layer imaging to form each subpixel of organic light-emitting devices.
＜the four embodiment 〉
A fourth embodiment in accordance with the invention has been set forth and has been adopted the donor film 200 of substrate platform and the contact process of acceptor substrate 300, and wherein this substrate platform comprises one or more magnet and comprises by the hop of transparent material manufacturing and the contact frame of one or more magnet.
This substrate platform 110 is positioned on this cavity 150 or near its bottom side, and in the 4th embodiment, this substrate platform 110 is provided with at least one magnet.In described embodiment, one or more magnet are provided at the inboard of this substrate platform 110.
This contact frame 130 comprises that one or more magnet form electromagnetic forces with the one or more magnet with this substrate platform 110, thus this donor film 200 and this receptor substrate 300 of lamination (or each other closely bonding) between this substrate platform 110 and this contact frame 130 effectively.At this, this substrate platform 110 and this contact frame 130 can form (or comprising) electromagnet and permanent magnet separately; This substrate platform 110 and this contact frame 130 can form (or comprising) permanent magnet and electromagnet separately; And this substrate platform 110 and this contact frame 130 can form (or comprising) electromagnet and permanent magnet.In described embodiment, this permanent magnet comprises (or comprising) permanent magnet nano particle.
This contact frame 130 comprises hop 133, and it can allow laser to pass through.Fig. 4 is the schematic sectional view that A-A ' line cuts open the structure of this hop 133 of displaying of getting in Fig. 2.Because this hop 133, this contact frame 130 can only be carried out the shielding task of emission laser simultaneously in the position (for example, precalculated position) of an expectation.To the transparent material of this hop 133 without limits.In described embodiment, can be with glass or transparent polymer material as this hop.Equally, because this hop 133 can not be magnetic in described embodiment, therefore, keep this hop 133, so that this donor film and this receptor substrate layer are forced together with the magnetic force of this contact frame 130 in proper level.Therefore, in described embodiment, the gross area of this hop 133 is restricted to 1% to 50% of these contact frame 130 gross areas.
This contact frame 130 can exchange or replace each other, and it is formed with at least one opening portion (hop), wherein adopts organic light-emitting layer imaging to form each subpixel of organic light-emitting devices.
＜the five embodiment 〉
Set forth according to a fifth embodiment of the invention and adopted the donor film 200 of substrate platform 110 and the contact process of acceptor substrate 300, wherein this substrate platform comprises magnetisable material and comprises the hop 133 of transparent material and the contact frame 130 of at least one magnet.
This substrate platform 110 is positioned on this cavity 150 or near its bottom side, and in the 5th embodiment, this substrate platform 110 provides a kind of magnetisable material at least.In described embodiment, this magnetisable material can be ferromagnetic material or non-ferromagnetic material, and comprises and being selected from by Fe, Ni,, Cr, Fe
2O
3, Fe
3O
4, CoFe
2O
4In the group of forming with its composition one of them.
This contact frame 130 comprises magnet forming electromagnetic force with the magnetisable material of this substrate platform 110, thus this donor film 200 and this receptor substrate 300 of lamination (or each other closely bonding) between this substrate platform 110 and this contact frame 130 effectively.At this, this substrate platform 110 and this contact frame 130 can form electromagnet and permanent magnet separately; And this substrate platform 110 and this contact frame 130 can form permanent magnet and electromagnet separately.
This contact frame 130 comprises hop 133, and it can allow laser to pass through.Fig. 4 is the schematic sectional view that A-A ' line cuts open the structure of this hop 133 of displaying of getting in Fig. 2.Because this hop 133, this contact frame 130 can only be carried out the shielding task of emission laser simultaneously at the desired locations (for example, precalculated position) of this donor film 200.To the transparent material of this hop 133 without limits.In described embodiment, can be with glass or transparent polymer material as this hop.Equally, because this hop 133 does not typically have magnetic, therefore, the zone at these hop 133 places should remain on proper level, comes this donor film of lamination and this receptor substrate so that provide enough magnetic force for this contact frame 130.By example, in one embodiment, the area constraints of this hop 133 is to 1% to 50% of these contact frame 130 gross areas.
This contact frame 130 can exchange or replace each other, and it is formed with at least one opening portion (that is, hop), by this opening portion, adopts the organic luminous layer imaging to form each subpixel of organic light emitting apparatus.
＜the six embodiment 〉
Set forth the donor film 200 of employing substrate platform 110 and (or adhesion) process that contacts of acceptor substrate 300 according to a sixth embodiment of the invention, wherein this substrate platform comprises one or more magnet and the contact frame 130 that comprises the transparent part 133 and the magnetisable material of transparent material.
With reference to Fig. 2, this substrate platform 110 is positioned on this cavity 150 or near its bottom side, and in the 6th embodiment, this substrate platform 110 provides at least a magnetisable material.In described embodiment, this magnetisable material can be electromagnet or permanent magnet, and when this magnet was permanent magnet, it can comprise the permanent magnet nano particle.
This contact frame 130 comprises magnetisable material forming electromagnetic force with the magnet of this substrate platform 110, thus this donor film 200 and this receptor substrate 300 of lamination (or each other closely bonding) between this substrate platform 110 and this contact frame 130 effectively.This magnetisable material can comprise ferromagnetic material or non-ferromagnetic material, and comprises and being selected from by Fe, Ni, Cr, Fe
2O
3, Fe
3O
4, CoFe
2O
4In the group of forming with its composition one of them.This substrate platform 110 and this contact frame 130 can form (or comprising) one or permanent magnet and electromagnet separately; Or this substrate platform 110 can form (or comprising) electromagnet and permanent magnet separately with this contact frame 130.
This contact frame 130 comprises hop 133, and it can allow laser to pass through.Fig. 5 is the schematic sectional view that A-A ' line cuts open the structure of this hop 133 of displaying of getting in Fig. 2.Because this hop 133, this contact frame 130 can only be carried out the shielding task of emission laser simultaneously at the desired locations (for example, precalculated position) of this donor film 200.To the transparent material of this hop 133 without limits.In one embodiment, can be with glass or transparent polymer as transparent material.Equally, because this hop 133 does not typically have magnetic, therefore, the gross area of this hop 133 should remain on proper level, so that this contact frame 130 provides enough this donor film of magnetic force lamination and this receptor substrates.This for example finishes to 1% to 50% of these contact frame 130 gross areas by the area that limits this hop 133.
This contact frame 130 can exchange or replace each other, and it is formed with at least one opening portion (that is, hop), wherein adopts organic light-emitting layer imaging to form each subpixel of organic light emitting apparatus.
Be applicable to that according to laser induced thermal imaging apparatus of the present invention and laser induced thermal imaging method employing magnetic force lamination is executed structure base board and acceptor substrate under vacuum, therefore, can equally keep this vacuum state with existing organic light-emitting devices process, and can lamination this execute structure base board and this receptor substrate, and do not produce foreign substance or space (at interval) betwixt, therefore, make the luminescent layer imaging more effectively of this organic light-emitting devices.
Although showed and described particular exemplary embodiment of the present invention, but it should be appreciated by those skilled in the art, can change on these embodiment, and not break away from principle of the present invention and spirit, scope of the present invention is limited in the claims and equivalent.
Claims (20)
1, a kind of laser induced thermal imaging apparatus that is used to form organic light-emitting layer of organic light-emitting devices, this equipment comprises:
The substrate platform, wherein, this substrate platform comprises magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of this organic light-emitting devices, and this donor film comprises this organic light-emitting layer that is imaged on this pixel region;
Laser oscillator is used for launching laser on this donor film;
Contact frame is suitable for being arranged between this substrate platform and this laser oscillator, and comprises corresponding to the opening portion of the pattern of the imaging moiety of this donor film and be used for forming with this substrate platform the magnet of magnetic force; With
Contact frame travel mechanism is used for moving this contact frame to this substrate platform.
2, laser induced thermal imaging apparatus according to claim 1 also comprises vacuum cavity, and this substrate platform is arranged on wherein, and is adapted to put this contact frame.
3, laser induced thermal imaging apparatus according to claim 1, wherein, this contact frame forms magnet, or this magnet is formed on the upside or the downside of this contact frame.
4, laser induced thermal imaging apparatus according to claim 1, wherein, this magnet in this substrate platform comprises electromagnet or permanent magnet, and this magnet in this contact frame comprises permanent magnet or electromagnet.
5, laser induced thermal imaging apparatus according to claim 4, wherein, at least one this magnet of this substrate platform or this contact frame comprises the permanent magnet nano particle.
6, a kind of laser induced thermal imaging apparatus that is used to form organic light-emitting layer of organic light-emitting devices, this equipment comprises:
The substrate platform, wherein, this substrate platform comprises magnet, and is adapted to put acceptor substrate and donor film, and this receptor substrate has the pixel region of organic light-emitting devices, and this donor film comprises the organic light-emitting layer that is imaged on this pixel region;
Laser oscillator is used for launching laser on this donor film;
Contact frame, it is adapted to be arranged between this substrate platform and this laser oscillator, and comprises at least one hop that is used to allow the transparent material that laser passes through and the magnet that is used for forming with this substrate platform magnetic force; With
Contact frame travel mechanism, it is used for moving this contact frame to this substrate platform.
7, laser induced thermal imaging apparatus according to claim 6 also comprises vacuum cavity, and this substrate platform is arranged on wherein, and is adapted to put this contact frame.
8, laser induced thermal imaging apparatus according to claim 6, wherein, the gross area of this hop of this contact frame is 1% to 50% of this contact frame gross area.
9, laser induced thermal imaging apparatus according to claim 6, wherein, this transparent material comprises glass or transparent polymer.
10, laser induced thermal imaging apparatus according to claim 6, wherein, this magnet that is provided in this contact frame is electromagnet or permanent magnet.
11, laser induced thermal imaging apparatus according to claim 6, wherein, this magnet that is provided in this substrate platform is electromagnet or permanent magnet.
12, laser induced thermal imaging apparatus according to claim 6, wherein, this magnet in this substrate platform comprises magnetisable material.
13, laser induced thermal imaging apparatus according to claim 12, wherein, this magnetisable material is to be selected from by Fe, Ni, Cr, Fe
2O
3, Fe
3O
4, CoFe
2O
4In the group of forming with its composition one of them.
14, laser induced thermal imaging apparatus according to claim 6, wherein, this magnet of this contact frame comprises magnetisable material.
15, laser induced thermal imaging apparatus according to claim 14, wherein, this magnetisable material is to be selected from by Fe, Ni, Cr, Fe
2O
3, Fe
3O
4, CoFe
2O
4In the group of forming with its composition one of them.
16, a kind of laser induced thermal imaging method that is used to form organic light-emitting layer of organic light-emitting devices, this method comprises:
Setting have this organic light-emitting devices pixel region acceptor substrate and comprise that the donor film that is imaged on this organic light-emitting layer on this pixel region is in the contact frame that comprises magnet with comprise between the substrate platform of magnet;
Magnetic force bonding this receptor substrate and this donor film that utilization forms between this contact frame and this substrate platform; With
On this donor film corresponding to this organic light-emitting layer, the organic light-emitting layer of this of this donor film of imaging is to this receptor substrate by emission laser.
17, laser induced thermal imaging method according to claim 16, wherein, this magnet of this contact frame comprises electromagnet, and this magnet of this substrate platform comprises permanent magnet.
18, laser induced thermal imaging method according to claim 16, wherein, this magnet of this contact frame comprises permanent magnet, and this magnet of this substrate platform comprises permanent magnet.
19, laser induced thermal imaging method according to claim 16, wherein, this magnet of this contact frame comprises permanent magnet, and this magnet of this substrate platform comprises electromagnet.
20, laser induced thermal imaging method according to claim 16, wherein, one of them in this magnet comprises magnetisable material.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050105695A KR100711888B1 (en) | 2005-11-04 | 2005-11-04 | Laser induced thermal imaging apparatus |
| KR105695/05 | 2005-11-04 | ||
| KR109825/05 | 2005-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1958302A CN1958302A (en) | 2007-05-09 |
| CN100524892C true CN100524892C (en) | 2009-08-05 |
Family
ID=38070218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101433674A Expired - Fee Related CN100524892C (en) | 2005-11-04 | 2006-11-06 | Laser induced thermal imaging apparatus and laser induced thermal imaging method |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100711888B1 (en) |
| CN (1) | CN100524892C (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6042076A (en) | 1983-08-19 | 1985-03-06 | Canon Inc | Thermal transfer recording method |
| JPH07304194A (en) * | 1994-05-11 | 1995-11-21 | Asahi Optical Co Ltd | Thermal recording device |
| KR100441522B1 (en) * | 1996-10-23 | 2004-10-14 | 삼성에스디아이 주식회사 | Transfer film for forming microimages useful for construction of transfer optical system and forming complicated pattern, and apparatus for forming microimages |
| JP4058149B2 (en) | 1997-12-01 | 2008-03-05 | キヤノンアネルバ株式会社 | Mask alignment method for vacuum deposition system |
| US6695029B2 (en) | 2001-12-12 | 2004-02-24 | Eastman Kodak Company | Apparatus for permitting transfer of organic material from a donor to form a layer in an OLED device |
| US6688365B2 (en) | 2001-12-19 | 2004-02-10 | Eastman Kodak Company | Method for transferring of organic material from a donor to form a layer in an OLED device |
| KR100623698B1 (en) * | 2004-09-02 | 2006-09-19 | 삼성에스디아이 주식회사 | Method of fabricating donor substrate and method of fabricating OLED using the same |
| KR100721564B1 (en) * | 2004-10-19 | 2007-05-23 | 삼성에스디아이 주식회사 | substrate supporting frame, substrate supporting frame assembly including the frame, method for framing a substrate using the frame, fabrication method for donor substrate using the substrate supporting frame and fabrication method for OLED using the donor substrate |
-
2005
- 2005-11-04 KR KR1020050105695A patent/KR100711888B1/en active IP Right Grant
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2006
- 2006-11-06 CN CNB2006101433674A patent/CN100524892C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1958302A (en) | 2007-05-09 |
| KR100711888B1 (en) | 2007-04-25 |
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