CN101076889A - 双应力soi衬底 - Google Patents
双应力soi衬底 Download PDFInfo
- Publication number
- CN101076889A CN101076889A CN200580042739.8A CN200580042739A CN101076889A CN 101076889 A CN101076889 A CN 101076889A CN 200580042739 A CN200580042739 A CN 200580042739A CN 101076889 A CN101076889 A CN 101076889A
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- dielectric layer
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- 239000000463 material Substances 0.000 claims description 25
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- 229910000077 silane Inorganic materials 0.000 claims description 9
- 239000003989 dielectric material Substances 0.000 claims description 7
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- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
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- 229920002120 photoresistant polymer Polymers 0.000 description 16
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- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
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- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
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- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
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- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/938—Lattice strain control or utilization
Abstract
Description
Claims (30)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/905,062 US7262087B2 (en) | 2004-12-14 | 2004-12-14 | Dual stressed SOI substrates |
US10/905,062 | 2004-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101076889A true CN101076889A (zh) | 2007-11-21 |
CN100495687C CN100495687C (zh) | 2009-06-03 |
Family
ID=36582810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200580042739.8A Expired - Fee Related CN100495687C (zh) | 2004-12-14 | 2005-12-13 | 双应力soi衬底 |
Country Status (8)
Country | Link |
---|---|
US (2) | US7262087B2 (zh) |
EP (1) | EP1825509B1 (zh) |
JP (1) | JP5039902B2 (zh) |
CN (1) | CN100495687C (zh) |
AT (1) | ATE487234T1 (zh) |
DE (1) | DE602005024611D1 (zh) |
TW (1) | TWI366264B (zh) |
WO (1) | WO2006065759A2 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102067144A (zh) * | 2008-06-13 | 2011-05-18 | Nxp股份有限公司 | 使用应力变化的侵入保护 |
CN102237382A (zh) * | 2010-04-27 | 2011-11-09 | 台湾积体电路制造股份有限公司 | 有源像素单元及在基板上形成有源像素单元的方法 |
CN108461448A (zh) * | 2017-02-17 | 2018-08-28 | 力晶科技股份有限公司 | 半导体元件的制造方法 |
CN110660773A (zh) * | 2018-06-28 | 2020-01-07 | 晟碟信息科技(上海)有限公司 | 包含应力消除层的半导体产品衬底 |
Families Citing this family (35)
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JP4157496B2 (ja) | 2004-06-08 | 2008-10-01 | 株式会社東芝 | 半導体装置及びその製造方法 |
US7202513B1 (en) * | 2005-09-29 | 2007-04-10 | International Business Machines Corporation | Stress engineering using dual pad nitride with selective SOI device architecture |
US8319285B2 (en) * | 2005-12-22 | 2012-11-27 | Infineon Technologies Ag | Silicon-on-insulator chip having multiple crystal orientations |
JP2007335573A (ja) * | 2006-06-14 | 2007-12-27 | Hitachi Ltd | 半導体装置およびその製造方法 |
US7803690B2 (en) * | 2006-06-23 | 2010-09-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Epitaxy silicon on insulator (ESOI) |
JP5532527B2 (ja) * | 2006-08-03 | 2014-06-25 | 株式会社デンソー | Soi基板およびその製造方法 |
US7829407B2 (en) * | 2006-11-20 | 2010-11-09 | International Business Machines Corporation | Method of fabricating a stressed MOSFET by bending SOI region |
US7888197B2 (en) * | 2007-01-11 | 2011-02-15 | International Business Machines Corporation | Method of forming stressed SOI FET having doped glass box layer using sacrificial stressed layer |
US20080185655A1 (en) * | 2007-02-02 | 2008-08-07 | United Microelectronics Corp. | Smiconductor device, method for fabricating thereof and method for increasing film stress |
US20080203485A1 (en) * | 2007-02-28 | 2008-08-28 | International Business Machines Corporation | Strained metal gate structure for cmos devices with improved channel mobility and methods of forming the same |
US20080237733A1 (en) * | 2007-03-27 | 2008-10-02 | International Business Machines Corporation | Structure and method to enhance channel stress by using optimized sti stress and nitride capping layer stress |
US7615435B2 (en) * | 2007-07-31 | 2009-11-10 | International Business Machines Corporation | Semiconductor device and method of manufacture |
US20090095991A1 (en) * | 2007-10-11 | 2009-04-16 | International Business Machines Corporation | Method of forming strained mosfet devices using phase transformable materials |
US20090140351A1 (en) * | 2007-11-30 | 2009-06-04 | Hong-Nien Lin | MOS Devices Having Elevated Source/Drain Regions |
US7883956B2 (en) * | 2008-02-15 | 2011-02-08 | International Business Machines Corporation | Method of forming coplanar active and isolation regions and structures thereof |
US8232186B2 (en) * | 2008-05-29 | 2012-07-31 | International Business Machines Corporation | Methods of integrating reverse eSiGe on NFET and SiGe channel on PFET, and related structure |
FR2934085B1 (fr) * | 2008-07-21 | 2010-09-03 | Commissariat Energie Atomique | Procede pour containdre simultanement en tension et en compression les canaux de transistors nmos et pmos respectivement |
US8138523B2 (en) * | 2009-10-08 | 2012-03-20 | International Business Machines Corporation | Semiconductor device having silicon on stressed liner (SOL) |
WO2011084269A2 (en) * | 2009-12-16 | 2011-07-14 | National Semiconductor Corporation | Stress compensation for large area gallium nitride or other nitride-based structures on semiconductor substrates |
US8685837B2 (en) * | 2010-02-04 | 2014-04-01 | Sharp Kabushiki Kaisha | Transfer method, method for manufacturing semiconductor device, and semiconductor device |
US8318563B2 (en) | 2010-05-19 | 2012-11-27 | National Semiconductor Corporation | Growth of group III nitride-based structures and integration with conventional CMOS processing tools |
US8377759B2 (en) | 2010-08-17 | 2013-02-19 | International Business Machines Corporation | Controlled fin-merging for fin type FET devices |
US8592292B2 (en) | 2010-09-02 | 2013-11-26 | National Semiconductor Corporation | Growth of multi-layer group III-nitride buffers on large-area silicon substrates and other substrates |
US9064974B2 (en) * | 2011-05-16 | 2015-06-23 | International Business Machines Corporation | Barrier trench structure and methods of manufacture |
US8921209B2 (en) | 2012-09-12 | 2014-12-30 | International Business Machines Corporation | Defect free strained silicon on insulator (SSOI) substrates |
CN103296013B (zh) * | 2013-05-28 | 2017-08-08 | 上海华虹宏力半导体制造有限公司 | 射频器件的形成方法 |
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US20150372096A1 (en) * | 2014-06-20 | 2015-12-24 | Ishiang Shih | High Electron Mobility Transistors and Integrated Circuits with Improved Feature Uniformity and Reduced defects for Microwave and Millimetre Wave Applications |
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-
2004
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- 2005-12-13 JP JP2007545712A patent/JP5039902B2/ja not_active Expired - Fee Related
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Cited By (7)
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CN102067144A (zh) * | 2008-06-13 | 2011-05-18 | Nxp股份有限公司 | 使用应力变化的侵入保护 |
CN102067144B (zh) * | 2008-06-13 | 2014-08-06 | Nxp股份有限公司 | 使用应力变化的侵入保护 |
CN102237382A (zh) * | 2010-04-27 | 2011-11-09 | 台湾积体电路制造股份有限公司 | 有源像素单元及在基板上形成有源像素单元的方法 |
CN102237382B (zh) * | 2010-04-27 | 2013-05-29 | 台湾积体电路制造股份有限公司 | 有源像素单元及在基板上形成有源像素单元的方法 |
CN108461448A (zh) * | 2017-02-17 | 2018-08-28 | 力晶科技股份有限公司 | 半导体元件的制造方法 |
CN108461448B (zh) * | 2017-02-17 | 2021-05-25 | 力晶积成电子制造股份有限公司 | 半导体元件的制造方法 |
CN110660773A (zh) * | 2018-06-28 | 2020-01-07 | 晟碟信息科技(上海)有限公司 | 包含应力消除层的半导体产品衬底 |
Also Published As
Publication number | Publication date |
---|---|
ATE487234T1 (de) | 2010-11-15 |
WO2006065759A3 (en) | 2007-06-14 |
US7312134B2 (en) | 2007-12-25 |
US20060125008A1 (en) | 2006-06-15 |
CN100495687C (zh) | 2009-06-03 |
EP1825509B1 (en) | 2010-11-03 |
JP5039902B2 (ja) | 2012-10-03 |
US20070202639A1 (en) | 2007-08-30 |
US7262087B2 (en) | 2007-08-28 |
WO2006065759A2 (en) | 2006-06-22 |
EP1825509A2 (en) | 2007-08-29 |
DE602005024611D1 (de) | 2010-12-16 |
JP2008523631A (ja) | 2008-07-03 |
TWI366264B (en) | 2012-06-11 |
EP1825509A4 (en) | 2009-04-15 |
TW200636979A (en) | 2006-10-16 |
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