CN101102070B - Linear motor and parts carrying device - Google Patents
Linear motor and parts carrying device Download PDFInfo
- Publication number
- CN101102070B CN101102070B CN2007101275660A CN200710127566A CN101102070B CN 101102070 B CN101102070 B CN 101102070B CN 2007101275660 A CN2007101275660 A CN 2007101275660A CN 200710127566 A CN200710127566 A CN 200710127566A CN 101102070 B CN101102070 B CN 101102070B
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- stator
- linear motor
- head
- electronic unit
- magnet
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Abstract
The invention is to reduce a gap while keeping the rigidity of a base material as a shaft of a both-sided stator when using both sides of the magnet. A linear motor (41) of the invention has a stator (411) which includes permanent magnets (411C) juxtaposed in its axial direction and a plurality of moving members (414A and 414B) which shift along both sides of the stator (411), the stator (411) includes a shaft rigidity member (411A) extending axially and a permanent magnet (411C) buried in the shaft rigidity member (411A), the shaft rigidity member (411A) has a flange, the permanent magnets (411C) are inserted in the holes arranged in the axial direction and formed by the flange on the shaft rigidity member (411A) from the flange end.
Description
Technical field
The present invention relates to a kind of linear motor and part carrying device, particularly a kind of linear motor that is suitable for the part carrying device use, and part carrying device with this linear motor with two sides stator.
Background technology
Known electronic units such as IC, resistance, electric capacity are automatically carried part carrying device to printed circuit board (PCB) or the ceramic substrate etc.
As this part carrying device, in patent documentation 1, a kind of scheme is disclosed, it will have the boarded head that is used to adsorb the adsorption nozzle that keeps electronic unit, constitute along X-direction by linear motor with can move freely.
But, utilize the axle drive system of linear motor, mostly with magnet as stator, coil is as mover.This is because the quality of magnet is bigger usually, is not suitable as mover.
In above-mentioned part carrying device, on the coil of movable side, boarded head is set.In this case, and if then append a parallel axle with axle, then also need to be provided as the magnet of stator, it is very high that price just becomes.
In addition, in patent documentation 2, recorded and narrated, the mover that is made of magnet has been set on the stator two sides that constitutes by coil.
In addition, in patent documentation 3, recorded and narrated the situation of in yoke, burying permanent magnet underground.In this case, preferred gap (520 the distance from magnet 510 to mover) G as shown in Figure 1 is less, from structure, need make shown in Figure 1 from magnet 510 to stator the wall thickness C minimum (for example being less than or equal to 1mm) on 500 surface.Under the situation of the one side of only using stator 500, as shown in Figure 2, by will not using the wall thickness D thickening (C＜D), can keep rigidity of side.
Patent documentation 1: the spy opens the 2001-309634 communique
Patent documentation 2: the spy opens the 2000-159305 communique
Patent documentation 3: the spy opens the 2004-215414 communique
Summary of the invention
But the central authorities magnet 510 at high price being embedded in stator 500 are provided with on the two sides under the situation of mover 520, need make wall thickness D also the same with wall thickness C minimum (for example being less than or equal to 1mm).Like this, though because magnet 510 composed components as axle own, and non-rigid support, so the reduction of the intensity of axle as illustrated in Fig. 3, may be ruptured in the part of thin-walled.
The objective of the invention is to, when using the two sides of magnet, keep strength of parent, the gap of reducing magnet and mover simultaneously as the axle of two sides stator.
The present invention is a kind of linear motor, and it has: stator (411), and it comprises the permanent magnet that axially is arranged side by side; And a plurality of movers (414A, 414B), it moves along the two sides of this stator (411) respectively, by the axle strength member (411A) that said stator comprised axially extend be embedded in permanent magnet (411C) in this strength member, addresses the above problem.
Above-mentioned permanent magnet can insert to be configured in and be formed at the window (411B) on the above-mentioned axle strength member, that axially arrange from the side.
In addition, can in above-mentioned axle strength member flange (411F) be set, above-mentioned permanent magnet inserts configuration from this flange end face and is formed the hole (411G) on this strength member, that axially arrange by flange.
In addition, come out in the side of above-mentioned permanent magnet.
The present invention also provides a kind of part carrying device, and it utilizes above-mentioned linear motor driver part boarded head at least.
The effect of invention
According to the present invention, in the time of can using magnet on the two sides, keep strength of parts as the axle of two sides stator, reduce the gap simultaneously.
Description of drawings
Fig. 1 is the oblique view that expression magnet is embedded in the stator in the strength member.
Fig. 2 is the oblique view of the same single face stator of expression.
Fig. 3 is the oblique view of the problem points of the same two sides stator of expression.
Fig. 4 is the integrally-built plane graph that the part carrying device of linear motor involved in the present invention is adopted in expression.
Fig. 5 is the block diagram of the structure of the same control system of expression.
Fig. 6 is the oblique view of the same linear motor of expression.
Fig. 7 is the same profile.
Fig. 8 is the exploded perspective view of the structure of stator in execution mode 1 of expression linear motor involved in the present invention.
Fig. 9 is the same three-view diagram.
Figure 10 is the oblique view of wanting portion of the same variation of expression.
Figure 11 is the exploded perspective view of the structure of stator in execution mode 2 of expression linear motor involved in the present invention.
Figure 12 is the same three-view diagram.
Figure 13 is the oblique view of the structure of stator in execution mode 3 of expression linear motor involved in the present invention.
Figure 14 is the same profile.
Figure 15 is the exploded perspective view of the structure of stator in execution mode 4 of expression linear motor involved in the present invention.
Figure 16 is the same horizontal sectional drawing.
Figure 17 is the exploded perspective view of the structure of stator in execution mode 5 of expression linear motor involved in the present invention.
Figure 18 is the exploded perspective view of the structure of stator in execution mode 6 of expression linear motor involved in the present invention.
Embodiment
Below, describe embodiments of the present invention with reference to the accompanying drawings in detail.
Fig. 4 is the plane graph that expression is applicable to the execution mode of part carrying device 100 of the present invention, and Fig. 5 is the block diagram of the control system of expression part carrying device 100.
As Fig. 4 and shown in Figure 5, the part carrying device 100 of present embodiment has: parts supply unit 1, and it keeps a plurality of electronic unit feed appliances 11 side by side, and these electronic unit feed appliances 11 are supplied with the electronic unit P (with reference to figure 7) that will carry to the substrate K; Carry homework department 2, it carries out the lift-launch operation of electronic unit P on substrate K; The 1st head 3A and the 2nd head 3B, it carries the adsorption nozzle 31 that a plurality of (showing 4 in Fig. 4) are used to adsorb maintenance electronic unit P respectively; X-Y portal frame 4, it is driven into the 1st head 3A and the 2nd head 3B on the optional position in the prescribed limit; Camera head 5, it is made a video recording to the electronic unit P that remains on the adsorption nozzle 31; And control part 6, it carries out the action control of each part mentioned above.
In addition, in following explanation, will be called X-direction along a mutually orthogonal direction of horizontal plane, other direction is called Y direction, and direction is called Z-direction vertically.
Above-mentioned lift-launch homework department 2 is arranged on from the way of the transportation route that installs the Handling device 21 of moving into substrate K in the outside, has clamping part 22 etc., and the substrate K on substrate station (omitting diagram) is carried in these clamping part 22 clampings.
At first, Handling device 21 for example has: carrying track 211, and it disposes along this transportation route (X-direction); And conveyer belt (omitting diagram), it is used for will moving into this lift-launch homework department 2 from the substrate K that an end of device is moved into along this carrying track 211, maybe the electronic unit P that stipulates is carried the substrate K that finishes and takes out of to the device outside from carrying homework department 2.
By Handling device 21 to carry homework department's 2 carryings, be equipped on the substrate K on the substrate station, be held by being held portion's 22 clampings.
In addition, remain on the substrate K on the clamping part 22, when this substrate K is carried electronic unit P, also can drive to X-direction with predetermined timing by not shown X-direction drive division.
Above-mentioned parts supply unit 1 is arranged on the both sides of Y direction across Handling device 21, to be arranged side by side the mode on the assigned position of bank (not shown) along X-direction, a plurality of electronic unit feed appliances 11 are installed.
Above-mentioned X-Y portal frame 4 has: linear motor 41, and it is used for moving the 1st head 3A and the 2nd head 3B to X-direction; 2 Y-axis guide rails 42, its with this linear motor 41 along Y direction lead the 1st head 3A and the 2nd head 3B; And Y-axis motor 43, it drives the 1st head 3A and the 2nd head 3B via above-mentioned linear motor 41 along Y direction.In addition, X-Y portal frame 4 can be carried the 1st head 3A and the 2nd head 3B in the roughly whole zone between 2 Y-axis guide rails 42.
In addition, transition, all is configured in and can be carried in the zone of the 1st head 3A and the 2nd head 3B by X-Y portal frame 4 by carrying the zone that the 2 pairs of electronic printing plates K of homework department carries out the lift-launch operation of electronic unit P from the transition part of the electronic unit P of parts supply unit 1.
Below, with reference to figure 6 and Fig. 7 linear motor 41 is described.
Here, Fig. 6 is the oblique view of expression linear motor 41, and Fig. 7 is the profile of Fig. 6 along the linear motor 41 of VII-VII line.
As Figure 6 and Figure 7, linear motor 41 has: stator 411, and it is to dispose along the long mode of X-direction; Upside support portion 412A and downside support portion 412B, its connect this stator 411 the Z-direction side both ends and support this stator 411; X-axis guide rail 413, it is configured in along X-direction on the both ends of the surface of Y direction side of upside support portion 412A and downside support portion 412B; And carry the 1st mover 414A of the 1st head 3A and the 2nd mover 414B of lift-launch the 2nd head 3B, they are supported by these X-axis guide rail 413 guiding, constitute along X-direction simultaneously with can move freely.
The said stator 411 of linear motor 41 involved in the present invention as Fig. 8 (exploded perspective view) and the expression at length of Fig. 9 (three-view diagram) institute, comprising: axle strength member 411A, and it forms the ladder shape by the window 411B that axially arranges; And magnet 411C, it inserts from the side and is configured in the window 411B of this strength member 411A, and its two sides that form cylinder are cut into plane shape.Each magnet 411C for example by limit screw 411D or dowel fixes on axle strength member 411A.
In addition, in the example of Fig. 8 and Fig. 9, limit screw 411D or pin are provided with 1 on the avris (upside of figure) of axle strength member 411A, but as shown in phantom in Figure 9, also can on opposite side, (downside of figure) be provided with, variation that also can be as shown in figure 10 is such, is provided with 2 on an avris.
Above-mentioned upside support portion 412A, downside support portion 412B and X-axis guide rail 413 constitute the guiding support portion, and its guiding supports the 1st mover 414A and the 2nd mover 414B moving along X-direction (direction of principal axis of linear motor 41).
The 1st mover 414A and the 2nd mover 414B dispose opposed to each other across stator 411 on Y direction.
Specifically, the 1st mover 414A has: slide block 415A, and its card ends on each X-axis guide rail 413, can freely move back and forth along X-direction; The 1st moving coil 416A, it disposes opposed to each other with the Y direction left surface of stator 411 as shown in Figure 7, produces magnetic field by energising, thereby by and the magnetic field of stator 411 between magnetic interaction and move along X-direction; And supporting bracket 417A, it carries and supports the 1st head 3A, slide block 415A and the 1st moving coil 416A.
On the other hand, the 2nd mover 414B is also identical with the 1st mover 414A, has: slide block 415B; The 2nd moving coil 416B, it disposes opposed to each other with the Y direction right flank of stator 411 as shown in Figure 7; And supporting bracket 417B, it carries and supports the 2nd head 3B, slide block 415B and the 2nd moving coil 416B.
Above-mentioned the 1st moving coil 416A and the 2nd moving coil 416B for example are electrically connected with control part 6, by change the current value of energising, the magnetic field size variation that the 1st moving coil 416A and the 2nd moving coil 416B are produced under the control of control part 6.
The 1st mover 414A constitutes: by the magnetic interaction of stator 411 between lateral surface (the paper outside of Fig. 6) magnetic field that produces of Y direction and the magnetic field that energising produces to the 1st moving coil 416A, move freely along X-direction.On the other hand, the structure of the 2nd mover 414B is: by the magnetic interaction of stator 411 between magnetic field that the medial surface (the paper inboard of Fig. 6) of Y direction produces and energising produces to the 2nd moving coil 416B magnetic field, move freely along X-direction.
Above-mentioned the 1st head 3A and the 2nd head 3B have respectively: 4 adsorption nozzles 31, and it attracts to keep electronic unit P at leading section by air; Z axle motor 32, it moves above-mentioned adsorption nozzle 31 respectively along Z-direction (above-below direction); And θ axle motor 33, its electronic unit P that will be kept by adsorption nozzle 31 is that the center rotation drives with the Z-direction.
The 1st head 3A for example is the device that is used for keeping from a plurality of electronic unit feed appliances that are positioned at Handling device 21 downsides 11 absorption that are configured in Fig. 4 electronic unit P, and the 2nd head 3B is the device that is used for keeping from a plurality of electronic unit feed appliances that are positioned at Handling device 21 upsides 11 absorption that are configured in Fig. 4 electronic unit P.
A plurality of adsorption nozzles 31 are along X-direction and row arrangement, each adsorption nozzle 31 is connected with vacuum generator 7 via the inlet valve that carries out open and close controlling (omitting diagram), its leading section becomes the attraction state by regularly opening inlet valve with regulation, can adsorb to keep electronic unit P.
Above-mentioned camera head 5, for example be configured in and carry in the zone of the 1st head 3A and the 2nd head 3B by X-Y portal frame 4, constitute by CMOS camera or CCD camera etc., based on shooting to electronic unit P, generate view data by light-to-current inversion, export this view data to CPU 61.
Above-mentioned control part 6 has CPU (Central Proccessing Unit) 61, RAM (Random Access Memory) 62 and ROM (Read Only Memory) 63 etc.
In addition, the view data that CPU 61 imports based on exporting from camera head 5, the image processing program that puts rules into practice, identification is adsorbed on the attitude of the electronic unit P on the adsorption nozzle 31 etc.
The various programs of various processing such as ROM 63 storage is used to control, judgement are stored in various programs that the control of CPU 61 carries out down and the data relevant with each routine processes etc.
The following describes the lift-launch action of electronic unit P on substrate K.
At first, carry out the absorption maintenance of electronic unit P by adsorption nozzle 31.Specifically, under the control of control part 6, drive the linear motor 41 of X-Y portal frame 4 and Y-axis motor 43 and the 1st head 3A and the 2nd head 3B are moved on the electronic unit feed appliance 11 of regulation.More particularly, based on the energising control of being undertaken by 6 couples the 1st moving coil 416A of control part, the 1st head 3A is moved to be configured on the electronic unit feed appliance 11 of the regulation that is positioned at Handling device 21 downsides among Fig. 4, energising control based on being undertaken by 6 couples the 2nd moving coil 416B of control part moves to the 2nd head 3B and is configured on the electronic unit feed appliance 11 of the regulation that is positioned at Handling device 21 upsides among Fig. 4.
Then, the driving of the Z axle motor 32 of control part 6 control regulation, the adsorption nozzle 31 that makes regulation (Z-direction) along the vertical direction moves, and is kept the electronic unit P of regulation by these adsorption nozzle 31 absorption by the driving of vacuum generator 7.
Then, remain on electronic unit P shooting on the adsorption nozzle 31 by 5 pairs of camera heads, based on the view data that generates by this shooting, the image processing of stipulating by CPU 61 and discern the attitude of electronic unit P.In addition, according to recognition result, driving θ axle motor 33 rotates the electronic unit P that is adsorbed on the adsorption nozzle 31 around the axial prescribed direction of Z under the control of control part 6, thereby carries out the centrally aligned (centering) of this electronic unit P.
Then, drive linear motor driving mechanism 41 and Y-axis motor 43 under the control of control part 6, the adsorption nozzle 31 that keeps electronic unit P is moved on the predetermined member loading position on the substrate K, K carries out the lift-launch of electronic unit P to this substrate.
After the lift-launch of 1 electronic unit P finishes, the lift-launch action of control part 6 sequential control electronic unit P on substrate K.
In the present embodiment, can be by the window 411B holding magnet 411C of axle strength member 411A, guarantee rigidity by the part outside the window 411B simultaneously as orbital plane.
In addition, execution mode 2 shown in Figure 11 (exploded perspective view) and Figure 12 (three-view diagram), can be provided with and make the section of strength member 411A be for example flange 411F of H shape, for example columned magnet 411C is configured in the hole 411G that is formed by the flange 411F on the axle strength member 411A from this flange end face insertion, by for example bonding fixing.
According to present embodiment, come out in the side of magnet 411C, can guarantee enough intensity by flange 411F simultaneously.In addition, because magnet is cylindrical, so, also can have enough confining forces even magnet 411C is attracted to the mover direction along with passing through of mover.In addition, flange 411F also can be only on any one side.
In addition, the shape of magnet is not defined as cylindrical yet, can be such prismatic of execution mode 3 shown in Figure 13 (oblique view) and Figure 14 (profile) yet.
In addition, in the above-described embodiment, owing to all come out in the side of magnet 411C, can access high magnetic field intensity, but execution mode 4 that also can be shown in Figure 15 (oblique view) and Figure 16 (plane graph) is such, keeps the part of thin axle strength member 411A.
In addition, axle strength member 411A is not defined as the one thing yet, execution mode 5 (corresponding with execution mode 3) that can be as shown in figure 17 or execution mode 6 (corresponding with execution mode 4) shown in Figure 180 are such, flange 411F up and down separates with central portion 411H, is fixed by for example limit screw 411I.
As noted above, by the head that will be used to adsorb the head of lift-launch and need self contained function, the two sides that is arranged on magnet in whole or in part of identification camera, optical unit or BOC (Borad On Clip) camera, can use the two sides of motor with magnet.Thus, do not need to prepare 2 groups of magnet and just can access identical effect, can reduce cost.In addition, compare, shorten, can realize the miniaturization of machine along the length of occupying of directions X with the situation that above-mentioned drive system is set on single face.
Claims (3)
1. linear motor, it has: stator, it comprises the permanent magnet that axially is arranged side by side; And a plurality of movers, it moves along the two sides of this stator respectively,
It is characterized in that said stator comprises axle strength member that axially extends and the permanent magnet that is embedded in this strength member,
Above-mentioned axle strength member has flange, and above-mentioned permanent magnet inserts to be configured in by flange-shape from this flange end face and is formed in the hole on this strength member, that axially arrange.
2. linear motor according to claim 1 is characterized in that,
Come out in the side of above-mentioned permanent magnet.
3. a part carrying device is characterized in that,
Have claim 1 or 2 linear motors of recording and narrating, utilize this linear motor driver part boarded head at least.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-184383 | 2006-07-04 | ||
| JP2006184383A JP5084189B2 (en) | 2006-07-04 | 2006-07-04 | Linear motor and component mounting device |
| JP2006184383 | 2006-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101102070A CN101102070A (en) | 2008-01-09 |
| CN101102070B true CN101102070B (en) | 2011-06-15 |
Family
ID=39036218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101275660A Expired - Fee Related CN101102070B (en) | 2006-07-04 | 2007-07-03 | Linear motor and parts carrying device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5084189B2 (en) |
| CN (1) | CN101102070B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4838372B2 (en) * | 2010-04-23 | 2011-12-14 | Ｔｈｋ株式会社 | Actuator unit |
| JP5664177B2 (en) * | 2010-11-29 | 2015-02-04 | 日立金属株式会社 | Linear motor and linear drive stage |
| CN102195439B (en) * | 2011-05-26 | 2013-06-12 | 清华大学 | Multi-stator multi-rotor array linear motor driving device |
| DE102015113396B4 (en) * | 2015-08-13 | 2018-05-24 | Asm Assembly Systems Gmbh & Co. Kg | Automatic placement machine, handling system and placement system with a handling system detachably mounted on a placement machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4859974A (en) * | 1988-10-11 | 1989-08-22 | General Electric Company | Electromagnetic motor/actuator |
| US4868431A (en) * | 1987-03-05 | 1989-09-19 | Shinko Electric Co., Ltd. | Linear motor with an elongated core using oppositely polarized magnets to maximize perpendicular flux lines |
| US5072144A (en) * | 1989-07-15 | 1991-12-10 | Matsushita Electric Works, Ltd. | Moving-coil linear motor |
| CN1619927A (en) * | 2003-11-18 | 2005-05-25 | 株式会社日立制作所 | Linear motor and X-Y stage |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3945149B2 (en) * | 2000-11-06 | 2007-07-18 | 株式会社日立製作所 | Linear motor and manufacturing method thereof |
| JP2006054973A (en) * | 2004-08-13 | 2006-02-23 | Shin Etsu Chem Co Ltd | Linear motor for machine tool |
-
2006
- 2006-07-04 JP JP2006184383A patent/JP5084189B2/en not_active Expired - Fee Related
-
2007
- 2007-07-03 CN CN2007101275660A patent/CN101102070B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4868431A (en) * | 1987-03-05 | 1989-09-19 | Shinko Electric Co., Ltd. | Linear motor with an elongated core using oppositely polarized magnets to maximize perpendicular flux lines |
| US4859974A (en) * | 1988-10-11 | 1989-08-22 | General Electric Company | Electromagnetic motor/actuator |
| US5072144A (en) * | 1989-07-15 | 1991-12-10 | Matsushita Electric Works, Ltd. | Moving-coil linear motor |
| CN1619927A (en) * | 2003-11-18 | 2005-05-25 | 株式会社日立制作所 | Linear motor and X-Y stage |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008017571A (en) | 2008-01-24 |
| JP5084189B2 (en) | 2012-11-28 |
| CN101102070A (en) | 2008-01-09 |
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