CN101303390B - Method for judging MOS device performance degeneration - Google Patents

Method for judging MOS device performance degeneration Download PDF

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CN101303390B
CN101303390B CN 200810039407 CN200810039407A CN101303390B CN 101303390 B CN101303390 B CN 101303390B CN 200810039407 CN200810039407 CN 200810039407 CN 200810039407 A CN200810039407 A CN 200810039407A CN 101303390 B CN101303390 B CN 101303390B
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mos device
time
decline
leakage current
function
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CN101303390A (en
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万星拱
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Shanghai IC R&D Center Co Ltd
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Shanghai Integrated Circuit Research and Development Center Co Ltd
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Abstract

The invention provides a method for judging the performance degradation of a MOS device, which comprises the following steps: 1. decline amplitude value of electrical parameters of different voltage loading time of the MOS device is measured, 2. the power exponential function which can describe the change with time of the interface state between silicon and silicon oxide and the logarithmic function which can describe the change with time of injected charge in silicon oxide and the sum of constant term are adopted as predicate to imitate the change law of decline amplitude value of electricalparameters, 3 the coefficient of the power exponential function and specific value of the exponent of the step 2 and specific value of the coefficient of the changing function describing the injectedcharger in silicon oxide and the specific value of constant term are obtained, 4. the decline amount of the electrical parameters of the measured MOS device with time according to a specific predicate, wherein, the function describing the change of injecting charger in the silicon oxide is a logarithmic function of time. The method of the invention can effectively improve the accuracy and stability of the judging result of the decline amplitude of the electrical-parameter of the MOS device performance.

Description

A kind of method of judging the MOS device performance degeneration
Technical field
The present invention relates to MOS device detection field, relate in particular to a kind of method of the MOS of judgement device performance degeneration.
Background technology
Along with the development of integrated circuit, the characteristic dimension of MOS device is also constantly reducing, and has now narrowed down to sub-micron and deep-submicron, and develops to sub-micro.But in MOS device size scaled down, MOS device operating voltage not thereupon equal proportion reduce, so that the formation probability of metal-oxide-semiconductor channel hot carrier (hot-carrier injection:HCI) increases greatly in the MOS device, and in silicon and silicon dioxide generation of interfaces interface state, or captured by the charge trap in the grid oxic horizon, cause the MOS device, such as threshold voltage (V Th), maximum transconductance (G Mmax) and linear zone leakage current (I Dlin) and saturation region leakage current (I Dsat) degeneration increase.The damage that HCI causes is the important factor in order that the MOS device reliability lost efficacy, and also is the major reason that causes each electrical parameter degeneration of MOS device performance.Deteriorated process is most important in time accurately to judge the MOS device performance, and it has influence on reliability and the mission life of integrated circuit.The method of judging at present the MOS device performance degeneration mainly is first according to the JEDEC standard, degeneration amplitude at the MOS device performance electrical parameter tested under the time of the different voltage-drop loading of record under the identical on-load voltage, then the time dependent power exponential function match of Hu model silicon/silicon dioxide interface attitude of adopting the positive penetrating judgment of Hu of University of California Berkeley to award, obtain calculating the time dependent concrete calculating formula of MOS device electrical parameter decline amplitude, so just can judge the MOS device performance degeneration of testing according to concrete calculating formula.
Yet in concrete test, along with voltage accelerates the deteriorated time lengthening of device, the degeneration amplitude of device performance can tend to saturated trend, and so simple employing silicon/silicon dioxide interface attitude time dependent power exponential function match MOS device performance deterioration law in time exists fitting precision not high.Improve precision although can carry out match by sampling long data point of accelerated test later stage, the concrete calculating formula that finally obtains is different but different staff can select different test data point like this, thereby has increased the uncertainty of last judged result.
Summary of the invention
The object of the present invention is to provide a kind of method of the MOS of judgement device performance degeneration, judge the judged result uncertain problem that has the not high problem of fitting precision and cause as improving fitting precision in the MOS device performance degeneration method to solve tradition.
For achieving the above object, a kind of method of judging the MOS device performance degeneration of the present invention, this MOS device is made based on silicon and earth silicon material, it may further comprise the steps: step 1: based on the JEDEC standard, and the decline range value of the different voltage-drop loadings of test MOS device MOS device performance electrical parameter under the time; Step 2: adopt to describe between silicon and the monox the time dependent power exponential function of interface state with describe iunjected charge in monox time dependent logarithmic function and constant term sum as judging that formula match step 1 records the decline range value change with time of MOS device performance electrical parameter; Step 3: determine the coefficient of power exponential function in the described judgement formula and the concrete numerical value of index and describe iunjected charge in monox, to change the occurrence of coefficient of function and the occurrence of constant term; Step 4: draw the time dependent decline amount of electrical parameter that the time dependent concrete judgement formula of MOS device performance electrical parameter decline amplitude of test is judged the MOS device performance according to step 3.Particularly, describe iunjected charge time dependent function in monox in the step 2 and adopt the natural logarithm function representation of time.MOS device performance electrical parameter comprises saturation current, linear leakage current and the maximum transconductance of MOS device.
Compare with the method for existing judgement MOS device performance degeneration, the method of judgement MOS device performance degeneration of the present invention, by adopt describing the time dependent power exponential function of interface state between silicon and the monox and the decline range value change with time of describing iunjected charge time dependent function and constant term sum match step 1 in monox and record MOS device performance electrical parameter, judgement formula so that electrical parameter fails in the relatively traditional determination methods of the time dependent judgement formula of amplitude is the decline range value change with time of accurate description electrical parameter more, thereby has improved precision and the accuracy thereof of judged result.
Description of drawings
Below in conjunction with the drawings and specific embodiments the method for judgement MOS device performance degeneration of the present invention is done further to describe in detail particularly.
Fig. 1 is that tradition is judged the MOS device drain saturation current method synoptic diagram of degenerating in time.
Fig. 2 is that the present invention judges the MOS device drain saturation current method synoptic diagram of degenerating in time.
Fig. 3 is that tradition is judged the MOS device linear leakage current method synoptic diagram of degenerating in time.
Fig. 4 is that the present invention judges the MOS device linear leakage current method synoptic diagram of degenerating in time.
Fig. 5 is that tradition is judged the MOS device maximum transconductance method synoptic diagram of degenerating in time.
Fig. 6 is that the present invention judges the MOS device maximum transconductance method synoptic diagram of degenerating in time.
Embodiment
The method of judgement MOS device performance degeneration of the present invention, at first carry out step 1: based on the JEDEC standard, the decline range value of the different voltage-drop loadings of test MOS device MOS device performance electrical parameter under the time.Based on the hot carrier injection into test method, the drain terminal on-load voltage is V Dd* (1+10%), the voltage that grid load is the gate voltage under the substrate current maximum case, the equal ground connection of source and substrate.Test interval is 10s, 20s, 50s, 100s, 200s, 500s, 1000s, 2000s, 5000s, according to time interval test MOS device performance electrical parameter as mentioned above, so just can record the amplitude that electrical parameter value that the MOS device electrical parameter value that at every turn measures relatively initially records descends.The electrical parameter of the MOS device of testing in the present embodiment is drain terminal saturation current I DsatStep 2: adopt to describe the time dependent power exponential function of interface state between silicon and the monox and the decline range value change with time of describing iunjected charge time dependent function and constant term sum match step 1 in monox and record MOS device performance electrical parameter.Particularly, describe iunjected charge time dependent function in monox in the step 2 and adopt the natural logarithm function representation of time.The judgement formula of the decline range value change with time of match MOS device performance electrical parameter is following formula in the step 2 like this:
P - P t P × 100 % = A · t n + B ln t + C - - - ( 1 )
Wherein, P tBe the MOS device electrical parameter value that t records constantly, the MOS device electrical parameter value of P for initially recording, the electrical parameter of P representative comprises the saturation region leakage current I of MOS device Dsat, linear zone leakage current I DlinWith maximum transconductance G MmaxA is the coefficient of power exponential function, and n is the index of power exponential function, and B is the coefficient of natural logarithm function, and C is constant term.Step 3: the electrical parameter decline amplitude data that records according to step 1, utilize judgement formula (1) to fit, determine the coefficient A of power exponential function and the concrete numerical value n of index and describe iunjected charge in monox, to change the occurrence B of coefficient of function and the occurrence of constant term C; Step 4: the expression that draws the MOS device performance electrical parameter decline time dependent concrete judgement formula of amplitude (1) of test according to step 3 is judged the time dependent decline amount of electrical parameter of MOS device performance.So just can estimate under the certain hour decline amount of MOS device electrical parameter.
With MOS device electrical parameter saturation region leakage current I DsatBe example, adopt tradition to judge MOS device performance degeneration method, fit MOS device saturation region I DsatThe curve of the judgement formula of deterioration law sees also curve among Fig. 1.Equally with MOS device electrical parameter saturation region leakage current I DsatBe example, judgement MOS device degradation method of the present invention, match MOS device saturation region leakage current I DsatThe curve of the judgement formula of deterioration law sees also curve among Fig. 2.Circle is depicted as and tests out MOS device electrical parameter saturation region leakage current I among Fig. 1 and Fig. 2 DsatThe decline amplitude data adopts numerical computation method commonly used or numerical evaluation software to determine that coefficient, the exponential sum determination methods of the present invention of the expression of judgement formula curve in traditional determination methods is for the every coefficient of expression, index and the constant of the judgement formula curve of judging MOS device electrical parameter saturation region leakage current decline amplitude.The curve expression that the tradition determination methods simulates among Fig. 1 is:
I dsat - I t I dsat = 1.246 * t 0.1904 - - - ( 2 )
And the expression that adopts the present invention to judge that MOS device performance degeneration method simulates curve among Fig. 2 is:
I dsat - I t I dsat × 100 % = 0.002797 * t 0.5 + 0.8182 * ln t - 0.4801 - - - ( 3 )
Comparison diagram 1 and Fig. 2, can find out adopt expression (3) to the degree of fitting of test data apparently higher than expression (2), better match the MOS device performance with hot carrier injection efficiency degradation trend.Adopt judgement formula (1) that the electrical parameter decline amplitude of test MOS device is carried out the result that match degree of accuracy and accuracy are carried out match apparently higher than tradition judgement formula.In like manner, to the judgement of other MOS device electrical parameter, for example the judgement of linear leakage current and maximum transconductance degeneration can adopt identical judgement MOS device performance degeneration method to judge.P replaces to the MOS device electrical parameter occurrence of test, P in the judgement formula (1) tReplacing to the electrical parameter occurrence that the MOS device t that tests tests constantly gets final product.
Comparison diagram 3 and Fig. 4, the MOS device electrical parameter linear leakage current I that Fig. 3 and the representative of Fig. 4 circle test out DlinData, Fig. 3 is according to the linear leakage current I of traditional determination methods to testing out DlinThe decline amplitude data is carried out match, and Fig. 4 adopts judgement MOS device performance degeneration method of the present invention according to linear leakage current I DlinThe data judgement formula (1) is carried out match.Comparison diagram 3 can find out obviously that with Fig. 4 the relative traditional determination methods of determination methods of the present invention is at judgement linear leakage current I DlinThe trend of decline changes in amplitude is more accurate.Comparison diagram 4 and Fig. 5, the electrical parameter maximum transconductance G that the circle representative tests out among Fig. 4 and Fig. 5 mThe decline amplitude data, Fig. 4 and Fig. 5 adopt traditional determination methods and determination methods of the present invention to judge the MOS device electrical parameter maximum transconductance G that tests mDecline changes in amplitude trend is judged formula curve maximum transconductance G from comparison diagram 4 and Fig. 5 MmaxDecline amplitude data result can find out that determination methods of the present invention is judged maximum transconductance G MmaxDecline changes in amplitude trend is more accurate.The occurrence of judging every coefficient of formula curve and constant term among Fig. 3 and Fig. 4 can draw by numerical computation method commonly used or numerical evaluation software is finished, therefore specifically do not enumerate every coefficient, index and constant term occurrence at this, in like manner Fig. 5 and Fig. 6 judge that every coefficient, index and the constant term occurrence of formula also can adopt numerical computation method commonly used to determine or numerical evaluation software is finished, and therefore specifically do not enumerate every coefficient, index and constant term occurrence at this.
Comparing result by Fig. 1 and 2, the comparing result of the comparing result of Fig. 3 and Fig. 4 and Fig. 5 and Fig. 6 can find out obviously that judgement MOS device performance degeneration method of the present invention is at judgement MOS device electrical parameter, saturation region leakage current for example, when linear leakage current or maximum transconductance, can judge more accurately the decline changes in amplitude trend of electrical parameter, improve the Stability and veracity of judged result.Therefore, when the expression that utilizes judgement formula (1) is done to judge to the time dependent rule of the electrical parameter of the MOS device of test, have higher accuracy and accuracy, can effectively solve tradition and judge the judged result uncertain problem that has the not high problem of fitting precision and cause for improving fitting precision in the MOS device performance degeneration method.

Claims (1)

1. method of judging the MOS device performance degeneration, described MOS device is made based on silicon and earth silicon material, it is characterized in that it may further comprise the steps:
Step 1: based on the JEDEC standard, the decline range value of saturation region leakage current, linear zone leakage current and the maximum transconductance of the different voltage-drop loadings of test MOS device MOS device under the time;
Step 2: the time dependent power exponential function of interface state adopts the natural logarithm function of time and the constant term sum records saturation region leakage current, linear zone leakage current and the maximum transconductance of MOS device as judgement formula match step 1 decline range value change with time with description iunjected charge time dependent function in silicon dioxide between employing description silicon and the silicon dioxide;
Step 3: the coefficient of power exponential function and the concrete numerical value of index and describe iunjected charge and in silicon dioxide, change the occurrence of system of function and the occurrence of constant term in the judgement formula described in the determining step 2;
Step 4: the time dependent decline amount of electrical parameter that the saturation region leakage current of the test MOS device that draws according to step 3, linear zone leakage current and the time dependent concrete judgement formula of maximum transconductance decline amplitude are judged the MOS device performance.
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CN106533406B (en) * 2016-11-10 2019-06-07 中国电子产品可靠性与环境试验研究所 Metal-oxide-semiconductor parameter degradation circuit, test circuit and early warning circuit
CN107144775B (en) * 2017-05-22 2020-02-21 西安电子科技大学 Device and method for measuring transconductance coefficient of CMOS inverter
CN109655691B (en) * 2018-12-25 2021-01-22 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) Method, device and system for monitoring degradation of power device in board-level circuit
CN110057406B (en) * 2019-05-22 2022-05-17 西安因联信息科技有限公司 Multi-scale self-adaptive mechanical equipment trend early warning method
CN110208684B (en) * 2019-07-08 2021-04-06 西安太乙电子有限公司 Life evaluation method for CMOS integrated circuit life prolonging test
CN111007380A (en) * 2019-12-27 2020-04-14 电子科技大学 IGBT health monitoring method based on gate voltage change
CN112444733B (en) * 2020-11-10 2023-07-21 海光信息技术股份有限公司 Chip aging state detection method and device

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