CN101415293B - Plasma head structure and plasma discharge apparatus with the structure - Google Patents
Plasma head structure and plasma discharge apparatus with the structure Download PDFInfo
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- CN101415293B CN101415293B CN2007101626953A CN200710162695A CN101415293B CN 101415293 B CN101415293 B CN 101415293B CN 2007101626953 A CN2007101626953 A CN 2007101626953A CN 200710162695 A CN200710162695 A CN 200710162695A CN 101415293 B CN101415293 B CN 101415293B
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Abstract
The invention relates to a plasma head structure and a plasma discharging device with the plasma head structure. The plasma discharging device comprises a power supply with two electrode tips. The plasma head structure consists of an external electrode, an internal electrode and a flow guiding structure, wherein, the external electrode and the internal electrode are respectively connected to the two electrode tips of the power supply. The external electrode comprises a chamber and the internal electrode is arranged in the chamber. The flow guiding structure is arranged in the internal electrode and comprises at least one input end and at least one output end. The input end is a working fluid which can be input while the output end is a chamber communicated with the external electrode. The flow guiding structure is used for guiding the working fluid to enter the interior of the internal electrode and the working fluid is then output to the chamber of the external electrode. The working fluid is used for cooling the internal electrode so as to effectively reduce temperature of the internal electrode and avoid the internal electrode loss, thereby prolonging service life of the internal electrode and avoiding pollution caused by gaffing of metal ions.
Description
Technical field
The invention relates to a kind of plasma head structure and have the plasma discharge apparatus of this plasma header structure, especially refer to a kind ofly be provided with coolant flow channel in interior electrode interior, can provide working fluid flow in electrode interior as the plasma head structure of cooling fluid and have the plasma discharge apparatus of this plasma header structure.
Background technology
Atmosphere plasma is to refer in an atmospheric pressure or near the plasma that is produced under the atmospheric state; With equipment cost, it need not use costliness and heavy vacuum equipment; With regard to the manufacture craft aspect, workpiece can not be subjected to the restriction of vacuum cavity, and can carry out the program of continous way, and these technical characteristics all can reduce the manufacturing cost of product effectively.
The generation of atmosphere plasma is to drive an electric field in the environment of normal pressure between two electrodes, when the gas between electric field because collapse when dissociating and produce plasma, and according to the difference of plasma form, multiple plasma source design and kind are also arranged, can be divided into corona discharge (Corona) haply, dielectric medium discharge (Dielectric barrierdischarge), jet plasma (Plasma jet) and plasma flare (Plasma torch) etc., in the plasma operations process, because the influence of high-tension effect and plasma high-temperature, export license is serious in can making, not only reduce useful life, its metal ion peel off the secondary pollution that more can cause in the processing procedure.
Moreover, in order to obtain plasma, need bestow an external energy and make neutral substance continue to dissociate, therefore need an energy and greater than the breakdown voltage of gas, the size of this breakdown voltage is subjected to the influence of many factors, air inclusion kind, electrode layout and operating pressure etc.; See also shown in Figure 1ly, its demonstration desires to obtain plasma in atmospheric pressure environment, and the operating voltage that need bestow is 1000V nearly; Relation between operating pressure shown in Figure 2 for another example and gas temperature Tg and the electron temperature Te, generally in environment under low pressure, because the collision probability that concerns electronics and neutral atom in average free footpath is not high, energy can't effectively transmit, thus can't reach heat balance, at this moment, electron temperature Te up to thousands of degree to several Ev (Electron volt, electron-volt) unit, and gas temperature Tg has only hundreds of K, therefore is called low temperature plasma again.When pressure increased, the collision of electronics and neutral atom increased, and energy can effectively transmit and reach balance, thus electron temperature Te and gas temperature Tg can reach unanimity gradually, so be called the heat balance plasma again.
Learnt by above-mentioned, for obtaining atmosphere plasma, must impose high voltage between two electrodes, this moment, electric energy had the temperature that partly changes heat energy into and increase electrode.Simultaneously, the plasma of the generation other heat energy of having derived again, the addition sum total of this two thermal source can make electrode be subjected to high temperature action, and more obvious with interior electrode (that is positive electrode).Therefore in the atmospheric plasma system, interior electrode is a loss material, promptly need change after hundreds of hours to thousands of hours, and more seriously, export license is represented peeling off of metallic in the electrode, causes the secondary pollution of processing workpiece easily.
With regard to known patent, as No. the 095220778th, the novel patent application of TaiWan, China " discharge of plasma in low temperature device ", see also shown in Figure 3, but this case discloses a kind of plasma discharge apparatus 100 of production cryogenic spray plasma, it comprises an external electrode 102, this external electrode 102 has one first chamber 101 and one second chamber 111, in this first chamber 101, be provided with electrode 106 in, one end of this first chamber 101 is provided with an opening 103, by input port 109 input service gases 110, produce plasma gas 121 via outside these opening 103 these first chambers 101 of ejection by interior electrode 106 and external electrode 102 arc discharges; Inner and outside in these first chamber, 101 side ancient piece of jade, round, flat and with a hole in its centres, be respectively arranged with cooling water pipe 127,129, in order to cool off this external electrode 102; In this second chamber 111 and should in electrode 106 inside be respectively equipped with heat conduction fin 120,119, this second chamber 111 is communicated with a heat-exchange device 125, can feed refrigerant 123,117 and carry out heat exchange, reach the reduction working temperature, prolong purposes such as electrode life with this; By said structure as can be known, cooling components such as the cooling water pipe 127,129 that this known case provided, heat conduction fin 120,119 and heat-exchange device 125, be to add to be located at outside the plasma discharge apparatus 100 originally, with working gas 110 paths (that is this input port 109) is the path that separates, make device volume very huge, not only complex structure, and cost height.
Summary of the invention
Because the disappearance of known technology, the plasma discharge apparatus that the objective of the invention is to propose a kind of plasma head structure and have this plasma header structure, be provided with coolant flow channel in interior electrode interior, can provide working fluid to flow into interior electrode interior as cooling fluid, effectively reduce interior electrode temperature, avoid interior export license, increase interior electrode life and avoid metal ion to peel off the pollution that is caused.
For achieving the above object, the present invention proposes a kind of plasma head structure and has the plasma discharge apparatus of this plasma header structure, and this plasma electric discharge device comprises a power supply unit, and in order to power supply, this power supply unit has two electrode tips; This plasma header structure comprises an electrode and a flow-guiding structure in the external electrode: this external electrode and interior electrode connect two electrode tips of this power supply unit respectively, and this external electrode has a chamber, and electrode is to be arranged in the chamber of this external electrode in this; This flow-guiding structure is to be arranged in this interior electrode, and it has at least one input and at least one output, and this input is in order to the input service fluid, and this output is the chamber that is communicated with this external electrode; Enter electrode interior in this by this flow-guiding structure guiding working fluid, by this output working fluid is exported to the chamber of this external electrode again.
Plasma head structure of the present invention and have the plasma discharge apparatus of this plasma header structure, flow into interior electrode interior as cooling fluid by flow-guiding structure design guiding working fluid, really can effectively reduce interior electrode temperature, avoid interior export license, increase interior electrode life and avoid metal ion to peel off the pollution that is caused; Again because the intensification of working fluid helps to enter chamber dissociation efficiency afterwards.
Description of drawings
Fig. 1 is that the demonstration gas with various desires to obtain plasma, the operating voltage graph of a relation that need bestow in atmospheric pressure environment;
Fig. 2 is the graph of a relation of operating pressure and gas temperature Tg and electron temperature Te.
Fig. 3 is the structural representation of the novel patent application of TaiWan, China No. 095220778 " discharge of plasma in low temperature device ";
Fig. 4 is the structural representation of first embodiment of plasma head structure of the present invention and the plasma discharge apparatus with this plasma header structure;
Fig. 5 is the structural representation of plasma head structure second embodiment of the present invention;
Fig. 6 is the stereochemical structure outside drawing of the guiding subassembly of plasma head structure second embodiment of the present invention;
Fig. 7 is the structural representation of plasma head structure the 3rd embodiment of the present invention;
Fig. 8 is the stereoscopic figure of the guiding subassembly of plasma head structure the 3rd embodiment of the present invention;
Fig. 9 is the structural representation of the 4th embodiment of plasma head structure of the present invention.
Background technology
The 100-plasma discharge apparatus
101-first chamber
The 102-external electrode
The 103-opening
Electrode in the 106-
The 109-input port
The 110-working gas
111-second chamber
The 117-refrigerant
119,120-heat conduction fin
The 121-plasma gas
The 123-refrigerant
The 125-heat-exchange device
127,129-cooling water pipe
The present invention
The 20-plasma discharge apparatus
The 21-power supply unit
211,212-two electrode tips
213-ground connection
22,22a, 22b, 22c-plasma head structure
The 221-external electrode
The chamber of 2211-external electrode
Electrode in the 222-
The chamber of electrode in the 2221-
223,223a, 223c-carry pipe fitting
The 2231-input
2232,2232c-flow-guiding structure
2233 c-helical form sluice ways
The 224-insulating barrier
225a, 225b-guiding subassembly
The 2251-body
The 2252-vertical passage
The 2253-interconnection
The 2254-groove
2255-helical form sluice way
Fin-working fluid path initiating terminal
Fout-working fluid path ends
Embodiment
Further understand and approval for making to have for structure purpose of the present invention and effect, now conjunction with figs. describe in detail as after.
Describe the present invention for reaching employed technological means of purpose and effect hereinafter with reference to accompanying drawing, and following graphic cited embodiment only is an aid illustration, in order to understanding, but technological means of the present invention is not limited to cited accompanying drawing.
See also shown in Figure 4, it is the structural representation of first embodiment of plasma head structure of the present invention and plasma discharge apparatus with this plasma header structure, this plasma electric discharge device 20 mainly is to be made of a power supply unit 21 and a plasma header structure 22, this power supply unit 21 is in order to power supply, this power supply unit 21 has two electrode tips 211,212, and wherein this is positioned at electrode tip 211 ground connection 213 of below; This plasma header structure 22 comprises electrode 222 in an external electrode 221 and, and this external electrode 221 has a chamber 2211, and electrode 222 is to be arranged in the chamber 2211 of this external electrode 221 in this, is provided with an insulating barrier 224 in the madial wall of this external electrode 211; This external electrode 221 and interior electrode 222 connect two electrode tips 211,212 of this power supply unit 21 respectively, usually, external electrode 221 is a negative electrode, and electrode 222 is a positive electrode in this, as for the material of this external electrode 221 and interior electrode 222, be to adopt to have high conductivity, high-melting point metal material; In addition, in this external electrode 221 and should in electrode 222 tops be provided with a conveying pipe fitting 223, it is that this working fluid can be gases such as dry air, oxygen, nitrogen, helium, alkanes, alkene class, alkynes class in order to input service fluid (as this dotted arrow path of Fig. 4 initiating terminal Fin) that this conveying pipe fitting 223 has an input 2231.
Characteristics of the present invention are electrode 222 inner and these input 2231 formation one paths in this, this path is communicated with the chamber 2211 of this external electrode 221, can flow into again in the chamber 2211 of this external electrode 211 in order to the flow through inside of electrode 222 in this of the working fluid of guiding this input; In embodiment illustrated in fig. 4, interior electrode 222 inside are provided with a chamber 2221, are provided with a flow-guiding structure 2232 in these conveying pipe fitting 223 bottoms and stretch in this chamber 2221, and form path between this flow-guiding structure 2232 and this chamber 2221; Shown in this dotted arrow path of Fig. 4, after working fluid was sent into by path initiating terminal Fin, the chamber 2221 of electrode 222 inside in can flowing through flowed into the chamber 2211 (as this dotted arrow path ends of Fig. 4 Fout) of this external electrode 221 again.
What must emphasize is that in the traditional plasma discharge process, working fluid is directly to pass through interior electrode outside, forms plasma dissociation in the chamber of external electrode; And characteristics of the present invention are to be provided with flow-guiding structure, electrode 222 in working fluid guiding turnover can being somebody's turn to do, enter the formation plasma that dissociates in the chamber 2211 of this external electrode 221 again, carry out cooling effect by the internal electrode 222 of this working fluid, can effectively reduce interior electrode 222 temperature, avoid loss, increase interior 222 useful lifes of electrode and avoid metal ion to peel off the pollution that is caused; In addition again because the intensification of working fluid helps to enter chamber dissociation efficiency afterwards.And the fit system of aforementioned this chamber 2211 and flow-guiding structure 2232 is only routine as an illustration, and design focal point of the present invention is can be with the working fluid directed stream through should interior electrode interior getting final product.
See also this plasma header structure embodiment shown in Figure 5, it is based on plasma head structure embodiment shown in Figure 4, and this plasma header structure 22a comprises electrode 222 in an external electrode 221 and, and these external electrode 221 madial walls are provided with an insulating barrier 224; Electrode 222 tops are provided with one and carry pipe fitting 223a in this, and this conveying pipe fitting 223a has an input 2231 in order to input service fluid (path initiating terminal Fin); Should form paths with this input 2231 in interior electrode 222 inside, and this path is communicated with the chamber 2211 of this external electrode 221; The effect of above-mentioned each member does not repeat them here with embodiment illustrated in fig. 4 identical.
The characteristics of present embodiment are, be provided with a guiding subassembly 225a between the electrode 222 bottom this conveying pipe fitting 223a and in being somebody's turn to do, that is, this flow-guiding structure 2232 of Fig. 4 is set to a stand-alone assembly, and this guiding subassembly 225a is the outside drawing of the stereochemical structure embodiment that derives according to this guiding subassembly 225a section shown in Figure 5 as shown in Figure 6; This guiding subassembly 225a has a body 2251, its inside has a channel, this channel comprises a vertical channel 2252 and an interconnection 2253, this vertical passage 2252 is longitudinal extension certain-lengths, and this interconnection 2253 is the bottoms that are arranged at this vertical passage 2252, laterally runs through these body 2251 sidewalls and is communicated with the bottom of this vertical passage 2252; By this vertical channel 2252 and horizontal channel 2253 in these body 2251 inner channels that constitute, these vertical channel 2252 tops form an input and can enter for working fluid, and this interconnection 2253 runs through the end formation output of these body 2251 sidewalls, can flow out this body 2251 for working fluid.
Moreover, be provided with sluice way in these body 2251 outer peripheral edges, in present embodiment, this sluice way is to be provided with most grooves 2254 in these body 2251 outer peripheral edges, this majority groove 2254 is to be parallel to each other and around being arranged at this body 2251 outer peripheral edges, and bottom that should majority groove 2251 is to be connected with the interconnection 2253 of this body 2251, and top that should majority groove 2254 then is communicated with the chamber 2211 of this external electrode 221; By above-mentioned runner design, after making that working fluid flows into this body 2251 by these vertical passage 2252 tops, outside the electrode 222, flow into the chamber 2211 (as this dotted arrow path ends of Fig. 5 Fout) of this external electrode 221 again in can flowing out and be somebody's turn to do via this interconnection 2253, these groove 2254 backs.
Based on this embodiment of Fig. 5, can derive this plasma header structure embodiment as shown in Figure 7, this plasma header structure 22b comprises external electrode 221, interior electrode 222, carries pipe fitting 223a, insulating barrier 224; This conveying pipe fitting 223a has an input 2231 in order to input service fluid (path initiating terminal Fin); Should be provided with a chamber 2221 by interior electrode 222, and be provided with a guiding subassembly 225b in this conveying pipe fitting 223a bottom and stretch in this chamber 2221.
Please consult Fig. 7 and shown in Figure 8 simultaneously, the structure of this guiding subassembly 225b is based on this guiding subassembly of Fig. 6 225a, it has a body 2251, its inside has a channel, this channel comprises a vertical channel 2252 and an interconnection 2253, this interconnection 2253 is the bottoms that are arranged at this vertical passage 2252, laterally runs through these body 2251 sidewalls and is communicated with the bottom of this vertical passage 2252; The characteristics of present embodiment are provided with helical form sluice way 2255 in these body 2251 outer peripheral edges, and the bottom of this helical form sluice way 2255 is to be connected with the interconnection 2253 of this body 2251; By above-mentioned runner design, after making that working fluid flows into this body 2251 by these vertical passage 2252 tops, outside the electrode 222, flow into the chamber 2211 (as this dotted arrow path ends of Fig. 7 Fout) of this external electrode 221 again in can flowing out and be somebody's turn to do via this interconnection 2253, these helical form sluice way 2255 backs.
According to above-mentioned Fig. 5 to Fig. 8 embodiment, show that flow-guiding structure design of the present invention has not in specie, its design focal point is to guide working fluid before the chamber that flows into external electrode, can pass in and out electrode in this earlier, provide interior electrode cooling effect with this, so its structure is not limited to shown in the previous embodiment, and the kenel of its sluice way can be groove 2254 shown in Figure 6, also can be helical form sluice way 2255 shown in Figure 8, also can be rule or random pattern or other arbitrary shape; And, therefore can increase the convenience that maintenance is replaced because this guiding subassembly 225a, 225b are stand-alone assembly.
According to Fig. 4 and this plasma header structure 22 of Fig. 7,22b embodiment, can derive example structure as shown in Figure 9; That is, Fig. 8 this guiding subassembly 225b and this conveying pipe fitting 223a are combined as a whole, form this plasma header structure 22c structure as shown in Figure 9, this embodiment of its kenel and Fig. 4 is similar, and this plasma header structure 22c comprises external electrode 221, interior electrode 222, carries pipe fitting 223c, insulating barrier 224; This conveying pipe fitting 223c has an input 2231 in order to input service fluid (path initiating terminal Fin); Should be provided with a chamber 2221 by interior electrode 222, being provided with a flow-guiding structure 2232c in this conveying pipe fitting 223c bottom stretches in this chamber 2221, this flow-guiding structure 2232c outer peripheral edges are provided with helical form sluice way 2233c, with this, the chamber 2221 of working fluid directed stream electrode 222 in being somebody's turn to do can be flowed into the chamber 2211 of external electrode 221 again.
Fig. 9 embodiment is combined as a whole guiding subassembly with carrying pipe fitting, can be one with guiding subassembly and interior electrode design also in addition, and this is one of simple change of the present invention, is can learn easily and the implementer for being familiar with this technical field person, so repeat no more.
In sum, plasma head structure provided by the present invention and have the plasma discharge apparatus of this plasma header structure, flow into interior electrode interior as cooling fluid by flow-guiding structure design guiding working fluid, really can effectively reduce interior electrode temperature, avoid interior export license, increase interior electrode life and avoid metal ion to peel off the pollution that is caused; In addition again because the intensification of working fluid helps to enter chamber dissociation efficiency afterwards.
The above only is embodiments of the invention, when not limiting the scope that the present invention is implemented with this.Promptly the equalization of doing according to claim of the present invention generally changes and modifies, and all should belong in the scope that claim protection of the present invention contained.
Claims (14)
1. a plasma head structure is characterized in that, comprises:
One external electrode, it has a chamber;
Electrode in one is arranged in the chamber of this external electrode;
One flow-guiding structure is arranged in this interior electrode, and it has at least one input and at least one output, and this input is in order to the input service fluid, and this output is communicated with the chamber of this external electrode; Enter electrode interior in this by this flow-guiding structure guiding working fluid, export working fluid the chamber of this external electrode to by this output again,
Wherein, this flow-guiding structure comprises:
One chamber is arranged at electrode interior in this;
One guiding subassembly is arranged in the chamber of electrode in this, and it comprises:
One body, its inside has a passage, and this passage has at least one input and at least one output, and this input enters this body for working fluid, and this output flows out this body for working fluid;
At least one sluice way is arranged at this body outer peripheral edges, and an end of this sluice way is communicated with an end of the passage of this body interior, and the other end of this sluice way is communicated with the chamber of this external electrode.
2. plasma head structure as claimed in claim 1 is characterized in that, this sluice way is most grooves, and this majority groove is parallel to each other and around being arranged at this body outer peripheral edges, and bottom that should the majority groove is connected with the output of the passage of this body.
3. plasma head structure as claimed in claim 1 is characterized in that this sluice way is shape in the shape of a spiral.
4. plasma head structure as claimed in claim 1 is characterized in that, the passage of this body comprises:
At least one vertical passage, the longitudinal extension certain-length, its top enters for working fluid;
At least one interconnection laterally runs through this body sidewall, and this interconnection is arranged at the bottom of this vertical passage and is communicated with the bottom of this vertical passage; And this interconnection is communicated with an end of this sluice way.
5. plasma head structure as claimed in claim 1 is characterized in that, comprising:
One carries pipe fitting, and it has an input in order to the input service fluid, and this conveying pipe fitting is arranged at this external electrode and is somebody's turn to do interior electrode top, and should carry the channel connection of pipe fitting and this body interior;
One insulating barrier is arranged at the madial wall of this external electrode, this insulating barrier and should in have certain distance between the electrode and form a path, this path is communicated with the chamber of this external electrode.
6. plasma head structure as claimed in claim 5 is characterized in that, this guiding subassembly and this carry pipe fitting one-body molded.
7. plasma head structure as claimed in claim 1 is characterized in that, this working fluid is dry air, oxygen, nitrogen, helium, alkanes, alkene class, alkynes class gas.
8. a plasma discharge apparatus is characterized in that, comprises:
One power supply unit, in order to power supply, it has two electrode tips;
One plasma header structure, it comprises:
One external electrode, it has a chamber;
Electrode in one is arranged in the chamber of this external electrode;
One flow-guiding structure is arranged in this interior electrode, and it has at least one input and at least one output, and this input is in order to the input service fluid, and this output is communicated with the chamber of this external electrode; Enter electrode interior in this by this flow-guiding structure guiding working fluid, export working fluid the chamber of this external electrode to by this output again,
Wherein, this flow-guiding structure comprises:
One chamber is arranged at electrode interior in this;
One guiding subassembly is arranged in the chamber of electrode in this, and it comprises:
One body, its inside has a passage, and this passage has at least one input and at least one output, and this input enters this body for working fluid, and this output flows out this body for working fluid;
At least one sluice way is arranged at this body outer peripheral edges, and an end of this sluice way is communicated with an end of the passage of this body interior, and the other end of this sluice way is communicated with the chamber of this external electrode.
9. plasma discharge apparatus as claimed in claim 8 is characterized in that, this sluice way is most grooves, and this majority groove is parallel to each other and around being arranged at this body outer peripheral edges, and bottom that should the majority groove is connected with the output of the passage of this body.
10. plasma discharge apparatus as claimed in claim 8 is characterized in that this sluice way is shape in the shape of a spiral.
11. plasma discharge apparatus as claimed in claim 8 is characterized in that, the passage of this body comprises:
At least one vertical passage, the longitudinal extension certain-length, its top enters for working fluid;
At least one interconnection laterally runs through this body sidewall, and this interconnection is arranged at the bottom of this vertical passage and is communicated with the bottom of this vertical passage; And this interconnection is communicated with an end of this sluice way.
12. plasma discharge apparatus as claimed in claim 8 is characterized in that, more comprises:
One carries pipe fitting, and it has an input in order to the input service fluid, and this conveying pipe fitting is arranged at this external electrode and is somebody's turn to do interior electrode top, and should carry the channel connection of pipe fitting and this body interior;
One insulating barrier is arranged at the madial wall of this external electrode, this insulating barrier and should in have certain distance between the electrode and form a path, this path is communicated with the chamber of this external electrode.
13. plasma discharge apparatus as claimed in claim 12 is characterized in that, this guiding subassembly and this carry pipe fitting one-body molded.
14. plasma discharge apparatus as claimed in claim 8 is characterized in that, this working fluid is dry air, oxygen, nitrogen, helium, alkanes, alkene class, alkynes class gas.
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| CN2007101626953A CN101415293B (en) | 2007-10-16 | 2007-10-16 | Plasma head structure and plasma discharge apparatus with the structure |
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| CN2007101626953A CN101415293B (en) | 2007-10-16 | 2007-10-16 | Plasma head structure and plasma discharge apparatus with the structure |
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| CN101415293B true CN101415293B (en) | 2011-05-18 |
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| CN102065625B (en) * | 2009-11-16 | 2012-08-22 | 财团法人工业技术研究院 | Plasma system with introducing device |
| CN113546920B (en) * | 2021-07-20 | 2023-04-07 | 浙江洁美电子科技股份有限公司 | Electric arc burning-off system and paper tape manufactured by using same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4902871A (en) * | 1987-01-30 | 1990-02-20 | Hypertherm, Inc. | Apparatus and process for cooling a plasma arc electrode |
| CN1053379A (en) * | 1990-01-17 | 1991-07-31 | 悉尼大学 | The gas-cooled cathode that arc torch is used |
| CN1993010A (en) * | 2005-12-31 | 2007-07-04 | 馗鼎奈米科技股份有限公司 | Plasma discharge apparatus and method of use thereof |
-
2007
- 2007-10-16 CN CN2007101626953A patent/CN101415293B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4902871A (en) * | 1987-01-30 | 1990-02-20 | Hypertherm, Inc. | Apparatus and process for cooling a plasma arc electrode |
| CN1053379A (en) * | 1990-01-17 | 1991-07-31 | 悉尼大学 | The gas-cooled cathode that arc torch is used |
| CN1993010A (en) * | 2005-12-31 | 2007-07-04 | 馗鼎奈米科技股份有限公司 | Plasma discharge apparatus and method of use thereof |
Non-Patent Citations (1)
| Title |
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| JP特开昭57-68269A 1982.04.26 |
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