CN101583062A - Array micro audio directional transducer - Google Patents

Array micro audio directional transducer Download PDF

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Publication number
CN101583062A
CN101583062A CNA2009100597774A CN200910059777A CN101583062A CN 101583062 A CN101583062 A CN 101583062A CN A2009100597774 A CNA2009100597774 A CN A2009100597774A CN 200910059777 A CN200910059777 A CN 200910059777A CN 101583062 A CN101583062 A CN 101583062A
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CN
China
Prior art keywords
array
transducer
audio directional
micro audio
array element
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2009100597774A
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Chinese (zh)
Inventor
徐利梅
李学生
王祎
许亮锋
耿云龙
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Publication date
Application filed by University of Electronic Science and Technology of China filed Critical University of Electronic Science and Technology of China
Priority to CNA2009100597774A priority Critical patent/CN101583062A/en
Publication of CN101583062A publication Critical patent/CN101583062A/en
Pending legal-status Critical Current

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Abstract

The invention provides an array micro audio directional transducer, belonging to the technical field of ultrasound, in particular to the technical field of transducer. The transducer comprises the following working steps: a plurality of micro transducer units are arranged on a support frame evenly or unevenly for transmitting ultrasound modulated by audible signals; the ultrasound is self modulation in air to generate audible sound with high directivity. The transducer unit consists of four parts, namely, a top electrode, a bottom electrode, radiating materials and a base. The surface of the support frame is coated with plus-minus electrodes to connect with all plus-minus electrodes of the transducer units. The number of the array micro audio directional transducer units can be changed according to the requirements of directivity, sound pressure level and other parameters. The transducer features high conversation efficiency in electro mechanics, strong directivity, good stability, changeable array structure and the like.

Description

Array micro audio directional transducer
Technical field
Array micro audio directional transducer belongs to the ultrasonic technique field, particularly based on the transducer technology field of MEMS.Particularly, the present invention relates to ultrasonic transducer and directly produce ultrasonic wave, and produce audible sound with high directivity by the aerial non-linear interaction of ultrasonic wave.
Background technology
Transducer is a kind of device that the signal of telecommunication is changed into acoustical signal.Traditional transducer is the sound wave of radiation frequency in the sonic frequency segment limit in air directly, is difficult to realize high directivity.Array micro audio directional transducer produces the audible sound of high directivity by the aerial non-linear interaction of ultrasonic wave, and does not rely on the intrinsic characteristic of transducer.Its groundwork principle is: transducer is launched modulation in air have the ultrasonic wave of audio signal and since the demodulation of air Nonlinear Wave Propagation effect the voice signal of narrow ultrasonic wave modulation, produce the high audible sound that points to.
Array micro audio directional transducer can adopt PZT, PVDF, magnetostrictive material or other to have the material of piezoelectric effect.Because when adding suitable electric excitation signal, piezoelectric can produce bigger mechanical displacement or pressure.Therefore, the ultrasonic exciting signal that will contain audio-frequency information is applied on the transducer, just can be converted into mechanical oscillation, and signal is launched.But single transducer unit power output is little, and directive property is poor, and receiving sensitivity is low, and therefore, the present invention adopts transducer array, is intended to improve transducer directivity, strengthens transmission range, improves output sound pressure level, increases power output etc.
The present invention is based on MEMS (micro electro mechanical system) (Micro Electro Mechanical Systems, be called for short MEMS) process technology, to combine with the miniature transducer structure through the PZT piezoelectric membrane of MEMS processes, and adopted the form of array, make the transducer of being invented under the prerequisite that guarantees steady operation, can increase the quantity of transducer as required, adjust the transducer array form, satisfy real needs.Transducer array is a kind of array of being arranged, combine by certain way by a plurality of transducer units, and its array format comprises linear array, planar array and three-dimensional array and various combination battle array.Wherein, planar array comprises square formation, rectangle battle array, circular array, oval battle array, diamond array, polygon battle array etc. again; Three-dimensional array comprises cylindrical array, spherical shell battle array, spheroid battle array, taper battle array etc.; The combination battle array comprises even combination battle array and non-homogeneous combination battle array.
Summary of the invention
Array micro audio directional transducer provided by the invention, compare traditional transducer, can control the sound wave communication space simultaneously distributes and sound source position, produce the audible sound of the controlled direction of propagation, the quantity and the arrangement mode of array element can be set according to the size of the distance of transmission range and output acoustic pressure.
The objective of the invention is to make the micro audio directional transducer unit by using PZT piezoelectric membrane or PVDF or other piezoelectric membranes of MEMS processes, and by array design and assembly production array micro audio directional transducer.This transducer can produce ultrasonic wave in 20kHz~500kHz frequency band range.
Detailed technology scheme of the present invention is:
Array micro audio directional transducer comprises: several piezoelectric transducer array column unit and carriages.
The above array micro audio directional transducer is characterized in that, transducer device array element is arranged, is combined on the carriage by certain way, is connected in serial or parallel with each other together by the electrode on the carriage between the unit.
Described carriage is characterized in that, carriage can be metallic plate, non-metal board such as printed circuit board (PCB).
Described carriage can be square planar thin plate, circular flat plate, elliptic plane plate, parabolic type curved slab, hemisphere or ball crown type curved slab, cylindrical surface plate.
Described carriage, its surface is furnished with electrode, connects with the transducer unit electrode or parallel connection.
Described array element is characterized in that, is made up of top electrode, vibration radiation material, bottom electrode and base four parts.
Described array element, its shape can be circular, square, oval or any regular polygon.
Described array element, its radiative material are electrostriction material or magnetostrictive material;
Described electrostriction material can be a piezoelectric; Described piezoelectric can be piezoelectric crystal, piezoelectric ceramic, PZT or PVDF piezoelectric membrane.
Described array element, its base material are silicon;
In the such scheme, said carriage is the strutting piece of whole loud speaker, and all array elements are installed on the carriage, and the signal of telecommunication directly is added on the electrode of carriage, and the circuit by the carriage surface is transferred to the signal of telecommunication on each array element.Described array element, its top electrode is fixedlyed connected with the upper and lower surface of radiative material respectively with bottom electrode, is connected with the electrode of carriage by upper/lower electrode.Bottom electrode is connected with silicon base, by silicon base radiative material is fixed, and the shape of radiative material is guaranteed by the shape of upper surface of substrate.Simultaneously, upper/lower electrode is added to the signal of telecommunication on the radiative material as two positive and negative electrodes, makes it to produce vibration, and the signal of telecommunication is converted into mechanical oscillation, outwards radiate supersonic wave.Ultrasonic wave produces the high directivity audio signal through airborne non-linear interaction.Each array element can use independent electrode separately, also can use an electrode jointly.Contrast, a shared electrode can guarantee the consistency of each array element vibration preferably, make output sound wave phase place unanimity, increase the output acoustic pressure; And the phase place that each array element separately uses independent electrode separately can regulate input voltage as required.As the case may be, can self-definedly select suitable electrode form for use.
Description of drawings
Fig. 1 is one of the execution mode of the array element of array micro audio directional transducer of the present invention;
Fig. 2 is one of execution mode of array micro audio directional transducer of the present invention;
Fig. 3 be array micro audio directional transducer of the present invention execution mode two;
Fig. 4 be array micro audio directional transducer of the present invention execution mode three;
Fig. 5 be array micro audio directional transducer of the present invention execution mode four;
Fig. 6 be array micro audio directional transducer of the present invention execution mode five;
Fig. 7 be array micro audio directional transducer of the present invention execution mode six;
Fig. 8 be array micro audio directional transducer of the present invention execution mode seven;
Fig. 9 be array micro audio directional transducer of the present invention execution mode eight;
Figure 10 be array micro audio directional transducer of the present invention execution mode nine;
Figure 11 be array micro audio directional transducer of the present invention execution mode ten;
Figure 12 be array micro audio directional transducer of the present invention execution mode 11;
Figure 13 be array micro audio directional transducer of the present invention execution mode 12;
Figure 14 be array micro audio directional transducer of the present invention array element execution mode two;
Figure 15 be array micro audio directional transducer of the present invention array element execution mode three;
Figure 16 is one of the execution mode of the carriage of array micro audio directional transducer of the present invention;
Embodiment
Figure 1 shows that a kind of execution mode of circular array unit among the present invention, be illustrated in fig. 1 shown below that array element has four parts and forms top electrode 1, bottom electrode 3, ultrasonic wave radiative material 2 and base 4.3 pairs of radiative materials 2 of top electrode 1 and bottom electrode play fixation, and as the positive and negative electrode of array element.Top electrode 1 and bottom electrode 3 form through sputter, and such technology has guaranteed the stability of film both sides conductions and less dead resistance.Vibration radiation material 2 is a kind of piezoelectric film material, described piezoelectric film material can be piezoceramics film material or piezoelectric polymer thin-film material, mechanical response that radiative material 2 is had relatively high expectations and electroresponse sensitivity, its impedance require to mate with the air impedance phase as much as possible.After adding voltage in two lateral electrodes, piezoelectric membrane can produce dilatation according to institute's making alive size and frequency content wherein, and is fastening following at firm banking 4, launches directional ultrasonic thereby just can produce corresponding to the ultrasonic vibration of institute's plus signal.Aerial from the demodulation effect according to ultrasonic wave again, desired audible sound just can come out from the ultrasonic wave range of orientation in demodulation.Radiative material 2 is shaped as disk, and its size is by the size decision of base annulus area.The resonance frequency of plan radius decision array element, the resonance frequency of itself and array element is inversely proportional to.Among this embodiment, used piezoelectric membrane 2 is 2 μ m, and both sides institute plated electrode 1,3 is respectively 0.2 μ m, and thickness is 2.4 μ m altogether.It is consistent that the design parameter of the array element among the figure can adopt, or adopts different design parameters.All within the protection range of patent of the present invention.
In embodiments of the invention shown in Figure 2, rectangle carriage 8 is strutting pieces of this device, array element 5 is ultrasonic transducer device unit independently one by one, square array unit 5 is arranged on the rectangle carriage 8 uniformly, the structure size of each linear array unit 5 is identical, parameter unanimities such as resonance frequency.Top electrode 6, bottom electrode 7 are for being plated in the electrode on carriage surface.Linear array unit 5 can adopt MEMS technology to be fixed on the rectangle carriage 8.The internal structure of carriage 8 has detailed description at following Figure 16.
In embodiments of the invention shown in Figure 3, the similar of its structure and embodiment 2.The plane oval structure that array shape that carriage 10 adopts that different is is complementary, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 9 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 4, the similar of its structure and embodiment 2.The planar rectangular structure that array shape that carriage 12 adopts that different is is complementary, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 11 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 5, the similar of its structure and embodiment 2.The plane arcuate structure that array shape that carriage 14 adopts that different is is complementary, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 13 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 6, the similar of its structure and embodiment 2.The planar rondure structure that array shape that carriage 16 adopts that different is is complementary, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 15 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 7, the similar of its structure and embodiment 2.The plane hexagonal structure that array shape that carriage 18 adopts that different is is complementary, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 17 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 8, the similar of its structure and embodiment 2.Though what carriage 20 adopted is the loop configuration that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 19 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 9, the similar of its structure and embodiment 2.Though what carriage 22 adopted is the diamond structure that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 21 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 10, the similar of its structure and embodiment 2.Though what carriage 24 adopted is the triangular structure that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The structure of the array element 5 among the planform of array element 23 and the embodiment 2 is identical, is circular configuration.
In embodiments of the invention shown in Figure 11, its structure is different with the structure of embodiment 2, is cubical array.Though what carriage 26 adopted is the hemispherical dome structure that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The planform of array element 25 is a rectangular cells, and its internal structure is identical with cellular construction among Figure 14.
In embodiments of the invention shown in Figure 12, its structure is different with the structure of embodiment 2, is cubical array.Though what carriage 28 adopted is the half cylindrical structure that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The planform of array element 27 is a rectangular cells, and its internal structure is identical with cellular construction among Figure 14.
In embodiments of the invention shown in Figure 13, its structure is different with the structure of embodiment 2, is cubical array.Though what carriage 30 adopted is the pyramidal structure that is complementary with the array shape, its internal structure is identical with carriage among Figure 16.The planform of array element 29 is a rectangular cells, and its internal structure is identical with cellular construction among Figure 14.
Figure 14 shows that the another kind of execution mode of array element among the present invention, be square structure, all identical with material employed in figure 1, the base 34 of different is array element among Figure 14 is square structure, and prop up admittedly on four limits.Its top electrode 31, bottom electrode 33, middle ultrasonic wave radiative material 32 is square structure.
Figure 15 shows that the another kind of execution mode of array element among the present invention, be cantilever beam structure, all identical with material employed in figure 1, the base 38 of different is array element among Figure 15 is cantilever beam structure, and monolateral solid.Its top electrode 35, bottom electrode 37, middle ultrasonic wave radiative material 36 is rectangular configuration.
In embodiments of the invention shown in Figure 16, carriage comprises support base plate 41 and is plated in its surperficial positive electrode 39, negative electrode 40.Support base plate and adopt rectangular configuration, electrode is then made corresponding change along with the support base plate structure.Support backplate surface and be coated with insulating barrier, upper/lower electrode then is plated in outside the insulating barrier.The positive pole of array element is drawn lead, is connected in the positive electrode 39 of carriage; The negative pole of array element is drawn lead, is connected in the negative electrode 40 of carriage.Voltage is added on the positive and negative electrode 39,40 of carriage, and positive and negative electrode 39,40 is connected in parallel all array elements.
Although the invention has been described by form of implementation shown in the accompanying drawing, should also be noted that the present invention not only be confined to shown in form of implementation, but comprise all possible variation, design, the configuration revising and be equal to, arrangement mode, and by content that claims covered.

Claims (10)

1, array micro audio directional transducer, comprise: carriage and several array elements are formed, it is characterized in that, transducer is made of some independently transducer array unit cell arrangement, vibration of thin membrane by inside, unit, through pretreated directional ultrasonic, it demodulates directed audible sound certainly in air to outside vertical direction emission.The number of array element is adjusted according to hyperacoustic acoustic pressure, the isoparametric requirement of directive property.
Described array element is characterized in that, by top electrode, radiative material, bottom electrode and substrate three parts are formed.Top electrode is connected with two surfaces up and down of radiative material respectively as positive and negative electrode mutually with bottom electrode.
Described carriage is the supporting bracket that has the conducting wire of a multilayer, and the electrode that the surface is coated with positive and negative electrode and array element is in series or parallel connection.
2, array micro audio directional transducer according to claim 1, it is characterized in that the radiative material that is used for vibration can be piezoelectric ceramic, PZT piezoelectric film, magnetostriction or all kinds of materials of processing through MEMS arbitrarily that electric energy can be changed into mechanical oscillation.
According to claim 1 and the described array micro audio directional transducer of claim 2, it is characterized in that 3, described transducer unit radiating surface can be the plane, also can be cancave cambered surface or convex globoidal.
According to claim 1 and the described array micro audio directional transducer of claim 2, it is characterized in that 4, its effective work area is at 1mm 2To 10,000 mm 2Between, the external shape of transducer array column unit can be circle, ellipse, oval calotte shape, rectangle, triangle can also be a strip vibration unit or annular vibration unit.
5, array micro audio directional transducer according to claim 1 is characterized in that, the number of described array element is between 2 to 1000.
6, array micro audio directional transducer according to claim 1 is characterized in that, connects between the transducer unit electrode, can be that parallel connection, series connection or string and mixing connect.
7, array micro audio directional transducer according to claim 1 is characterized in that, the external shape of described transducer array can be circle, rhombus, polygon, annular, square, taper or be hemisphere.
8, array micro audio directional transducer according to claim 1 is characterized in that, the resonance frequency of described array element is between 20kHz ~ 500kHz.
According to the distance between the central point of the arc radiative material of claim 1 and 7 described array elements, it is characterized in that 9, its distance is less than the pairing hyperacoustic half-wavelength of the resonance frequency of array element.
According to the array element of the described array micro audio directional transducer of claim 1, it is characterized in that 10, the array element that is adopted can or adopt different unit for unit of the same race.
CNA2009100597774A 2009-06-26 2009-06-26 Array micro audio directional transducer Pending CN101583062A (en)

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Cited By (20)

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CN103234567A (en) * 2013-03-26 2013-08-07 中北大学 MEMS (micro-electromechanical systems) capacitive ultrasonic sensor on basis of anodic bonding technology
CN103240220A (en) * 2013-05-09 2013-08-14 电子科技大学 Piezoelectric array ultrasonic transducer
CN104271264A (en) * 2012-05-01 2015-01-07 富士胶片戴麦提克斯公司 Ultra wide bandwidth transducer with dual electrode
CN104622512A (en) * 2015-02-04 2015-05-20 天津大学 Capacitance type micro-ultrasonic sensor ring array with oval diaphragm unit structure and circuit system thereof
CN104919520A (en) * 2013-02-15 2015-09-16 富士胶片戴麦提克斯公司 PMUT array employing integrated MEMS switches
CN104984890A (en) * 2015-06-06 2015-10-21 中国科学院合肥物质科学研究院 Flexible focusing MEMS ultrasonic generator and preparation method thereof
CN105611456A (en) * 2016-01-15 2016-05-25 中国电子科技集团公司第三研究所 Self-compensation structure for realizing circumferential non-directivity of acoustic transducer array
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US9647195B2 (en) 2012-05-01 2017-05-09 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
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CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
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CN110830893A (en) * 2019-09-30 2020-02-21 成都泰声科技有限公司 Transparent screen directional ultrasonic loudspeaker
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TWI746925B (en) * 2018-03-05 2021-11-21 美商谷歌有限責任公司 Driving distributed mode loudspeaker actuator that includes patterned electrodes

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EP2844400B1 (en) * 2012-05-01 2022-03-16 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
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EP2844400A2 (en) * 2012-05-01 2015-03-11 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
US9647195B2 (en) 2012-05-01 2017-05-09 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
US9454954B2 (en) 2012-05-01 2016-09-27 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
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US9660170B2 (en) 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
US10589317B2 (en) 2012-10-26 2020-03-17 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
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CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
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CN110225439B (en) * 2019-06-06 2020-08-14 京东方科技集团股份有限公司 Array substrate and sound generating device
WO2020244301A1 (en) * 2019-06-06 2020-12-10 京东方科技集团股份有限公司 Array substrate and sound generation device
CN110234056A (en) * 2019-06-21 2019-09-13 京东方科技集团股份有限公司 Energy converter and preparation method thereof, transducing head
CN110234056B (en) * 2019-06-21 2021-01-12 京东方科技集团股份有限公司 Transducer, preparation method thereof and transducer device
CN111510819A (en) * 2019-09-30 2020-08-07 成都泰声科技有限公司 Ultrasonic loudspeaker system and working method thereof
CN110830893A (en) * 2019-09-30 2020-02-21 成都泰声科技有限公司 Transparent screen directional ultrasonic loudspeaker
CN112870562A (en) * 2021-01-06 2021-06-01 上海交通大学 Implanted piezoelectric MEMS ultrasonic transducer and preparation method thereof

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Application publication date: 20091118