CN101799582A - 具有集成式光学结构的空间光调制器 - Google Patents

具有集成式光学结构的空间光调制器 Download PDF

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CN101799582A
CN101799582A CN201010140527A CN201010140527A CN101799582A CN 101799582 A CN101799582 A CN 101799582A CN 201010140527 A CN201010140527 A CN 201010140527A CN 201010140527 A CN201010140527 A CN 201010140527A CN 101799582 A CN101799582 A CN 101799582A
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compensation structure
optical compensation
optical
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spatial light
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克拉伦斯·徐
杰弗里·B·桑普塞尔
威廉·J·卡明斯
唐明华
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Qualcomm MEMS Technologies Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13356—Structural association of cells with optical devices, e.g. polarisers or reflectors characterised by the placement of the optical elements

Abstract

本发明揭示一种空间光调制器，其包括一集成式光学补偿结构，例如一布置于一衬底与复数个可单独寻址的光调制元件之间的光学补偿结构，或一位于所述光调制元件的与所述衬底相对的一侧上的光学补偿结构。所述可单独寻址的光调制元件经构造以调制透射过所述透明衬底或自所述透明衬底反射的光。用于制作此种空间光调制器的方法包括在一衬底上制作一光学补偿结构并在所述光学补偿结构上制作复数个可单独寻址的光调制元件。所述光学补偿结构可为一无源式光学补偿结构。所述光学补偿结构可包括一辅助正面照明源、一漫射体、一黑色掩膜、一衍射式光学元件、一滤色镜、一抗反射层、一散射光的结构、一微透镜阵列、及一全息薄膜中的一者或多者。

Description

具有集成式光学结构的空间光调制器
分案申请的相关信息
本申请为发明名称为“快闪存储器数据校正及擦除技术”的原中国发明专利申请的分案申请。原申请的申请号为200580003812.0；原申请的申请日为2005年2月2日。
相关申请案交叉参考
本申请案为一在2005年1月14日提出申请的第11/036,965号美国专利申请案的接续申请案，第11/036,965号美国专利申请案主张基于下列美国临时专利申请案的优先权：2004年2月3日提出申请的第60/541,607号美国临时专利申请案；2004年9月27日提出申请的第60/613,482号美国临时专利申请案；2004年9月27日提出申请的第60/613,536号美国临时专利申请案；及2004年9月27日提出申请的第60/613,542号美国临时专利申请案。
技术领域
本发明涉及对例如干涉式调制器等空间光调制器的制造及性能的改良。
背景技术
空间光调制器为显示装置，其包含由可单独寻址的光调制元件形成的阵列。空间光调制器的实例包括液晶显示器及干涉式调制器阵列。此种装置中的光调制元件通常通过改变经由各单独元件所反射或透射的光的特性，从而改变显示外观来起作用。
发明内容
随着空间光调制器变得越来越先进，本发明的发明者预计与通过当前制造工艺流程制作空间光调制器相关的困难也会随之增大。因此，本发明的发明者已开发出具有集成式光学补偿结构的空间光调制器及其制作方法。
一实施例提供一种空间光调制器，其包括：一衬底；复数个布置于所述衬底上并经构造以调制光的可单独寻址的光调制元件；及一光学补偿结构；其中所述光学补偿结构布置于所述衬底与所述复数个可单独寻址的光调制元件之间。在某些实施例中，所述光学补偿结构为一无源式光学补偿结构。
一实施例提供一种空间光调制器，其包括：一衬底；复数个布置于所述衬底上并经构造以调制光的可单独寻址的光调制元件；及一光学补偿结构；其中所述复数个可单独寻址的光调制元件布置于所述衬底与所述光学补偿结构之间。所述光学补偿结构包括一滤色镜、黑色掩膜、及抗反射层中的至少一者。
另一实施例提供一种制作一空间光调制器的方法，所述方法包括：在一透明衬底上制作一光学补偿结构；并在所述光学补偿结构上制作复数个可单独寻址的光调制元件，所述可单独寻址的光调制元件经构造以调制经由所述透明衬底透射的光。在某些实施例中，制作所述光学补偿结构包括制作一无源式光学补偿结构。
另一实施例提供一种用以制作一空间光调制器的方法，所述方法包括：在一衬底上制作复数个可单独寻址的光调制元件；并在所述复数个可单独寻址的光调制元件上制作一光学补偿结构，所述可单独寻址的光调制元件经构造以调制经由所述光学补偿结构透射的光。所述光学补偿结构包括一滤色镜、掩膜、及抗反射层中的至少一者。
另一实施例提供一种空间光调制器，其包括：一透明衬底；复数个布置于所述透明衬底上并经构造以调制经由所述透明衬底透射的光的可单独寻址的干涉式光调制元件，所述干涉式光调制元件包括一空腔及一可移动壁；及至少一布置于所述透明衬底与所述复数个可单独寻址的干涉式光调制元件之间的光学补偿结构，所述光学补偿结构包括一滤色镜或漫射体。
另一实施例提供一种空间光调制器，其包括：一衬底；一用于调制透射过所述衬底或自所述衬底反射的光的构件；一用于补偿透射过所述衬底或自所述衬底反射的所述光的构件；其中所述用于补偿所述光的构件以操作方式布置于所述衬底与所述用于调制透射过所述衬底或自所述衬底反射的光的构件之间。在某些实施例中，所述用于补偿透射过所述衬底或自所述衬底反射的所述光的构件为一用于以无源方式补偿透射过所述衬底或自所述衬底反射的所述光的构件。
另一实施例提供一种空间光调制器，其包括：一衬底；一用于调制透射过所述衬底或自所述衬底反射的光的构件；及一用于补偿透射过所述衬底或自所述衬底反射的所述光的构件；其中所述用于调制透射过所述衬底或自所述衬底反射的光的构件以操作方式布置于所述衬底与所述用于补偿所述光的构件之间。所述用于补偿透射过所述衬底或自所述衬底反射的所述光的构件包括一滤色镜、黑色掩膜、及抗反射层中的至少一者。
另一实施例提供一种根据一种方法制成的空间光调制器，所述方法包括：在一透明衬底上制作一光学补偿结构；并在所述光学补偿结构上制作复数个可单独寻址的光调制元件，所述可单独寻址的光调制元件经构造以调制透射过所述透明衬底的光。
另一实施例提供一种根据一种方法制成的空间光调制器，所述方法包括在一衬底上制作复数个可单独寻址的光调制元件；并在所述复数个可单独寻址的光调制元件上制作一光学补偿结构，所述可单独寻址的光调制元件经构造以调制透射过所述光学补偿结构的光。所述光学补偿结构包括一滤色镜、黑色掩膜、及抗反射层中的至少一者。
本文中所述的其它实施例在某些情况下还可实现简化的制造。
在另一实施例中，一显示区包括一黑白光调制元件及一滤色镜。所述黑白光调制元件包括第一及第二反射表面及其间的一空腔。所述第二表面可相对于所述第一表面移动。所述滤色镜经构造以在由白光照明时透射彩色光。所述滤色镜相对于所述光调制元件定位成使来自所述光调制元件的光输出经所述滤色镜过滤。
所述黑白光调制元件可包括一黑白干涉式调制器。所述黑白干涉式调制元件可包括于一由其它光调制元件(例如其它黑白调制元件)组成的阵列中。也可包括其他滤色镜(可为一阵列形式)。具有不同响应的滤色镜可用于不同的光调制元件以产生不同的色彩(例如红、绿、及蓝)。
在另一实施例中，一显示区包括复数个光调制元件，所述光调制元件包括第一及第二反射表面及其间的一空腔。所述第二表面可相对于所述第一表面移动。所述显示区进一步包括复数个滤色镜元件，所述滤色镜元件经构造以在由一较宽的波长范围照明时透射一较窄的波长范围。所述滤色镜元件相对于所述光调制元件定位成使来自所述光调制元件的光输出经所述滤色镜元件过滤。当所述光调制元件输出光(例如白光)时，所述第一反射表面与所述第二反射表面分开一对于所述复数个光调制元件中的每一个而言均基本相等的距离。
所述光调制元件可包括黑白光调制元件。所述光调制元件可包括干涉式调制器或其它类型的调制器。所述光调制元件可在处于(例如)一反射状态下时输出光。
所述复数个滤色镜元件可包括两个或三个或更多个经构造以产生不同色彩的输出(例如红、绿、及蓝)的滤色镜元件。所述滤色镜元件可包括在由一较宽的波长范围照明时透射一较窄的波长范围的材料(例如像经过染色的光阻剂之类的经过染色的材料)。在各实施例中，此材料可在由白光照明时透射彩色光。
在另一实施例中，一显示区包括复数个光调制元件及一滤色镜阵列。所述光调制元件中的每一个均包括第一及第二反射表面及其间的一空腔。所述第二表面可相对于所述第一表面移动。所述滤色镜阵列包括复数个经构造以在由一较宽的波长范围照明时透射一较窄的波长范围的滤色镜元件。所述滤色镜阵列相对于所述光调制元件定位成使来自所述光调制元件的光输出经所述滤色镜元件过滤。当所述光调制元件输出光(例如白光)时，所述第一反射表面与所述第二反射表面分开一对于所述复数个光调制元件中的每一个而言均基本相等的距离。所述滤色镜元件中的至少两个经构造以产生不同色彩的输出。
另一实施例包括一种用以制造一显示装置的方法。在此方法中，提供一黑白光调制元件。所提供的黑白光调制元件包括第一及第二光学表面，其中所述第二光学表面可相对于所述第一光学表面移动。一滤色镜相对于所述光调制元件定位成使来自所述光调制元件的白光输出经所述滤色镜过滤。所述滤色镜经构造以在由白光照明时透射彩色光。
所述黑白光调制元件可包括一黑白干涉式调制器。所述黑白光调制元件可包括于一由其它光调制元件(例如其它黑白调制元件)组成的阵列中。也可包括其他滤色镜(可为一阵列形式)。具有不同响应的滤色镜可用于不同的光调制元件以产生不同的色彩(例如红、绿、及蓝)。
另一实施例包括一种用以制造一显示区的方法。在此方法中，提供复数个分别包括第一及第二光学表面的光调制元件及其间的一空腔。当所述光调制元件输出光时，所述第一反射表面与所述第二反射表面分开一对于所述复数个光调制元件中的每一个而言均基本相等的距离。滤色镜元件相对于所述光调制元件定位成使来自所述光调制元件的光输出经相应滤色镜元件过滤。在各实施例中，所述滤色镜元件可包括经构造以在由一宽的波长范围照明时透射一窄的波长范围的材料。在某些实施例中，所述滤色镜元件包括于一阵列中。所述阵列可包括至少两个经构造以产生不同色彩的输出的滤色镜元件。
所述光调制元件可包括黑白光调制元件。所述光调制元件可包括干涉式调制器或其它类型的调制器。所述光调制元件可在处于(例如)一反射状态下时输出光。
所述复数个滤色镜元件可包括两个或三个或更多个经构造以产生不同色彩的输出(例如红、绿、及蓝)的滤色镜元件。所述滤色镜元件可包括例如像经染色的光阻剂之类的经染色材料的材料。所述材料可在由白光照明时透射彩色。
另一实施例包括一显示装置，所述显示装置包括用于产生一经调制的白光信号并包括第一及第二光学表面的构件，其中所述第二光学表面可相对于所述第一光学表面移动。所述显示装置进一步包括用于过滤经调制的白光信号以将所述白光信号变换成一彩色光信号的元件。
下文将更详细地说明这些及其他实施例。
附图说明
根据下文说明及附图，将易知本发明的这些及其他方面，这些附图旨在例示而非限定本发明，且在附图中：
图1A及1B说明一典型干涉式调制器的一些特性(参见第2002/0126364 A1号美国专利公开案的图1A及1B)。
图2说明一典型干涉式调制器的一些特性(参见第2002/0126364 A1号美国专利公开案的图2)。
图3A-3F说明制作于衬底中与驻留有一光调制元件阵列的表面相对置的表面上的光学补偿薄膜(参见第2002/0126364 A1号美国专利公开案的图6A-6F)。
图4说明一制作于衬底中与驻留有一光调制元件的表面相对置的表面上的光学补偿薄膜(漫射体)。
图5A至5C说明包括集成式光学补偿结构的空间光调制器的各实施例。
图6说明一包括一散射光的集成式光学补偿结构的空间光调制器的一实施例。
图7A及7B说明包括集成式光学补偿结构的空间光调制器的各实施例。
图8说明一用以制作包括集成式光学补偿结构的空间光调制器的制造工艺流程图。
图9说明一包括一集成式补偿结构的空间光调制器的一实施例。
具体实施方式
一较佳实施例为一包括至少一个集成式光学补偿结构的干涉式调制器。在一些构造中，该光学补偿结构布置于衬底与干涉式调制器的光调制元件之间。在其它构造中，光调制元件布置于衬底与光学补偿结构之间。
干涉式调制器的各种实例阐述于第2002/0126364 A1号美国专利公开案中。图1及2说明一典型干涉式调制器的一些特性(参见第2002/0126364 A1号美国专利公开案的图1及2及对应文字)。参见图1A及1B，两个干涉式调制器结构114及116各自包括一个副镜102，所述副镜102具有一使用各种已知技术中的任一种蚀刻到其上(外)表面103中的皱褶图案104。所述皱褶并不贯穿上面形成有所述镜的薄膜106，以使反射镜的内表面108保持平滑。图1B显示副镜上所蚀刻皱褶104的图案及在蚀刻后剩下的平滑内表面112。皱褶图案—其可形成多种几何形态(例如矩形、金字塔形、圆锥形)—对反射镜进行结构加强，从而使反射镜更不易受材料应力变化的影响、减小总质量并防止在致动反射镜时出现变形。
通常，将一未施加电压或施加某个相对稳定状态的电压、或偏压的干涉式调制器视为处于静止状态并将反射一特定色彩，即静止色彩。如在第2002/0126364 A1号美国专利公开案中所提及，静止色彩取决于上面制作有副镜的牺牲间隔层的厚度。
每一干涉式调制器114、116均为矩形并通过支撑臂(例如120及122)在其四个角上连接至四根柱118。在某些情况(参见第2002/0126364 A1号美国专利公开案中的说明)中，干涉式调制器阵列将在一所选恒定偏压下工作。在这些情况下，副镜102通常将保持一较不施加任何偏压时更接近于对应主镜128的静止位置。制作具有不同尺寸支撑臂的干涉式调制器能够使每一干涉式调制器的机械恢复力取决于其几何结构。因此，在对多个干涉式调制器施加相同偏压时，每一干涉式调制器均可通过控制支撑臂尺寸及其所得到的弹簧常数来保持一不同的偏置位置(距主镜的距离)。支撑臂越厚，其弹簧常数就越大。因此，可由不同干涉式调制器来显示不同色彩(例如红、绿、及蓝)而无需沉积不同厚度的间隔层。而是，可使用单个间隔层(其在制作期间沉积且随后被移除)，同时通过在用于界定所述臂的单个光刻步骤期间修改支撑臂尺寸来确定色彩。例如，在图2中，将干涉式调制器114、116二者均显示成施加有相同偏压的静止状态。然而，干涉式调制器114的间隙间距126因其相应支撑臂的尺寸较大而大于干涉式调制器116的间隙间距128。亦已知干涉式调制器的各种其它实例。
第2002/0126364 A1号美国专利公开案还阐述各种用于在入射角度变化时使色移最小化的无源式光学补偿结构及用于提供辅助照明的有源式光学补偿结构。例如，如图3A-3F中所示(参见第2002/0126364 A1号美国专利公开案的图6A-6F)，可在衬底中与驻存有光调制元件阵列的表面相对置的表面上制作一光学补偿薄膜。此种薄膜可按许多种方式设计并制作，并可彼此结合使用。
在图3A中，一无源式光学补偿薄膜600为一体积或表面凹凸全息膜。体积全息膜可通过将一光敏聚合物曝光至由两个或更多个相干光源(例如激光器)相交所形成的干涉图案来形成。通过使用适当频率及光束定向，可在薄膜内形成任意的周期性折射率图案。一表面凹凸全息膜可通过使用所属领域的技术人员已知的任一数量的微制作技术来形成。随后使用原图来图案化所述薄膜。此种薄膜可用于增强在一可界定的角度圆锥体内的光透射及反射，从而使离轴光最少化。以同轴光所观察到的显示器的色彩及亮度得到增强且因亮度在所述圆锥体之外显著降低而使色移减小。
在图3B中，针对一其中一无源式光学补偿结构阵列606制作于衬底上的装置604显示另一方法。这些结构—其可使用第2002/0126364 A1号美国专利公开案中所提及的技术来制作—可视为由John D.Joannopoulos等人在“光子晶体(Photonic Crystals)”一书中所述的光子晶体。其实质上为展示出全方位干涉的三维干涉式阵列。此提供了设计可执行多种功能的波导的能力，包括将某些频率的入射光引导至适当色彩的像素、或使某一入射角的光改变成一新的入射角、或二者的某一组合。
在一无源式光学补偿结构的另一实例(图3C中所见)中，一三层式聚合薄膜610包含悬浮粒子。所述粒子实际上为已制作成微观板形式的单层或多层式电介质反射镜。例如，可通过将多层电介质膜沉积到一聚合物薄片上来制作这些板，所述聚合物薄片在溶解时留下一膜，可将所述膜可按一种方式碾碎而形成所述板。随后将所述板混合于一液晶前驱物中。通过在固化工艺期间施加电场，可使这些板的定向在制造期间固定。所述反射镜可设计成使其只在一掠射角范围内反射。因此，光根据相对于所述反射镜的入射角而反射或透射。在图3C中，层612经定向以将高入射角的光609更接近于垂直地反射入膜601中。层614将较低入射角的光613反射入一更垂直的路径内。层616会修改甚至更低角度的入射光615。因为所述层对接近于垂直的光的影响微乎其微，所以其分别充当一单独的“角度选择性入射过滤器”，结果使随机定向的入射光以更高的垂直度耦合至衬底中。此使透过此膜所观察到的显示器的色移最小化。
在一无源式光学补偿结构的另一实例(其显示于图3D中)中，在装置602中的一阵列中使用微透镜622。每一透镜622均可用于通过有效放大每一像素的有源区来增强显示器的填充因数。此方法可单独使用也可与其它色移补偿膜结合使用。
在一有源式光学补偿结构的一实例(其显示于图3E中)中，装置624使用一正面照明阵列形式的辅助照明。在此种情况下，可在衬底上沉积并图案化一有机发光材料626(例如Alq/二元胺结构及聚(亚苯基乙炔))。该俯视图(图3F)显示一与下面的干涉式调制器阵列相对应的图案627。换句话说，发光区626经设计以使干涉式调制器之间的非有源区变暗，并允许在剩余区域中存在一通光孔径。光有效地射入衬底中的干涉式调制器上并随后反射回至观察者。相反地，可在显示器的底板上涂覆一经图案化的发射膜且光可通过各子像素之间的间隙向前透射。通过将显示器正面上的一反射镜图案化，可使此光反射回到干涉式调制器阵列上。再一方法是将外围安装的光源与依赖全内反射的薄膜一起使用。第6,055,090号美国专利还揭示一种具有一包括一辅助正面照明源的有源式光学补偿结构的干涉式调制器。
图4说明一干涉式调制器10，干涉式调制器10包括一制作于衬底中与驻留有光调制元件的表面相对置的表面上的无源式光学补偿膜(漫射体22)。漫射体22通常(例如)通过使反射阵列看起来不太像一反射镜而更像纸张来补偿一未经补偿空间光调制器阵列的镜面外观。在图4中，一光调制元件8包括一可移动壁或元件16、一空腔20、及一支柱18。如图4中所示，可移动壁16由支柱18支撑于空腔20上方。一光学堆叠14形成空腔20的一与可移动壁16对置的壁。光学堆叠14可视为光调制元件8的一部分。光学堆叠14制作于一透明衬底12上，且漫射体22制作于衬底12中与光调制元件8相对置的一侧上。在工作中，可移动壁16经由与空腔20的前壁平行的平面移动。可移动壁16为高度反射性且通常包含一种金属。当可移动壁16朝空腔12的对置侧上的光学堆叠14移动时，会在空腔20内发生光(通常经由透明衬底12及光学堆叠14进入)的自干涉。可通过改变光学堆叠14与可移动壁16之间的距离来控制经由透明衬底12及光学堆叠14射出空腔的反射光的色彩。与光学堆叠14相接触的透明衬底12的表面为上面制作有光调制元件8的表面。漫射体22通常是在制成光调制元件8后制作或附装至透明衬底12的对置表面上。
如在图4中所示及在第2002/0126364 A1号美国专利公开案中所揭示，用于空间光调制器的无源式光学补偿结构通常制作于衬底中与驻留有光调制元件阵列的表面相对置的表面上，以利于现有的制造工艺流程。制造整个显示系统通常包括：分别制作各种组件(例如无源式光学补偿结构、干涉式调制器结构、驱动电子器件、图形控制功能、等等)，且随后在制造工艺流程中的一后续阶段中将其整合在一起。分别制作各种组件并随后在一后续阶段中将其整合在一起可通过降低对复杂沉积及微制作方案的需要而使制造光调制元件的复杂任务得到简化。
随着空间光调制器变得越来越复杂，预计与通过当前制造工艺流程来制作空间光调制器相关的困难也将增大。因此，已开发出具有集成式光学补偿结构的空间光调制器及其制造方法。一实施例提供具有一集成式光学补偿结构(例如一位于衬底与光调制元件之间的光学补偿结构，或一位于光调制元件中与衬底相对置的一侧上的光学补偿结构)的空间光调制器。光学补偿结构可根据需要而为有源式或无源式结构。在此上下文中，“无源式”光学补偿结构为一种不提供辅助正面照明源的光学补偿结构。
如上所述，图4说明一制作于衬底中与驻留有光调制元件的表面相对置的表面上的无源式光学补偿膜(漫射体22)。在图4中，光调制元件8为一干涉式调制器，其包括可移动壁或元件16、空腔12、支柱18。光学堆叠14制作于透明衬底12上，且漫射体12制作于衬底12中与光调制元件8相对置的一侧上。光学堆叠14可视为光调制元件8的一部分。所属领域的技术人员应了解，在一些实施例中，干涉式调制器可在一黑色或吸收状态与一反射状态之间进行调制。反射状态为一种看起来为白色的不基于干涉的状态。虽然这些实施例中的白色状态并不特别依赖于调制器的干涉特性，但调制元件的结构较佳类似于那些依赖干涉特性的干涉式调制器实施例并将在本文中如此加以称谓。干涉式调制器可在一吸收状态与一干涉状态之间、在一吸收状态与一反射状态之间、在一反射状态与一干涉状态之间、或在两个不同干涉状态之间进行调制。
图5A说明一空间光调制器40的一实施例，其中一无源式光学补偿结构(漫射体41)布置于一衬底42与一光调制元件44之间，而不是如图4中所示位于衬底中与光调制元件相对置的一侧上。在图5A中所示的实施例中，光调制元件44为一干涉式调制器，其包括一空腔45、一可移动壁46、一光学堆叠43、及一支撑件47。光学堆叠43位于空腔45的与可移动壁46相对的壁上。在所示实施例中，空间光调制器40进一步包括一位于衬底42与光学堆叠43之间的平坦化层48。可移动壁46及光学堆叠43二者均为反射性的，因而空间光调制器40的作业大体类似于针对图4中所示空间光调制器10所述的作业。通常，衬底42至少为部分透明的衬底。所属领域的技术人员将了解，光调制元件44可构造成一阵列形式，该阵列包括复数个布置于透明衬底上并构造成调制经由透明衬底所透射的光的可单独寻址的光调制元件。
所属领域的技术人员还将了解，图5A中所示的漫射体41代表各种可布置于所述衬底与所述复数个可单独寻址的光调制元件之间的光学补偿结构(有源式及无源式二者)。例如，一有源式光学补偿结构可提供一辅助正面照明源。无源式光学补偿结构的非限制性实例包括一抗反射层、一衍射式光学元件、一散射光的结构、一黑色掩膜、一滤色镜、一微透镜阵列、一全息膜(例如其减轻对于透射过透明衬底的光的入射角的所反射色彩的色移)、或其一组合。在图5中，光调制元件44包括一干涉式调制器，但也可使用其它空间光调制器。
图5B说明一空间光调制器33的一实施例，其中一无源式光学补偿结构(黑色掩膜32)布置于一透明衬底12与一反射元件31之间。所述反射元件可为一光学堆叠。可使用黑色掩膜(例如黑色掩膜32)来遮罩空间光调制器结构中不希望让观察者看到的部分。为清楚起见，在图5B中省去了一个或多个光调制元件(例如复数个可单独寻址的光调制元件)，但其应理解为布置于衬底12上并构造用于调制透射过透明衬底12的光。例如，图5B中的光调制元件可包括复数个如上文相对于图5A所述布置于反射元件31上的可单独寻址的光调制元件。空间光调制器33可包括一例如如图5B中所示位于黑色掩膜32与反射元件31之间的平坦化层30。
图5C说明一其中一无源式光学补偿结构(包括滤色镜元件34、36、38)布置于一透明衬底12与一反射元件39之间的空间光调制器37。如在图5B中，反射元件39可为一光学堆叠。在所示实施例中，滤色镜元件34、36、38分别为红、绿及蓝色，但所属领域的技术人员可选择其它色彩以使所得到的空间光调制器产生所需色彩。如在图5B中一般，为清楚起见，在图5C中省去了一个或多个光调制元件(例如复数个可单独寻址的光调制元件)，但其应理解成布置于透明衬底12上并构造用于调制透射过透明衬底12的光。例如，图5C中的光调制元件可包括复数个如上文参照图5A所述布置于光学堆叠上的可单独寻址的光调制元件。空间光调制器37可包括一例如如图5C中所示位于滤色镜元件34、36、38与光学堆叠39之间的平坦化层30。
可将只产生黑白色的干涉式调制器与滤色镜结合使用来产生彩色光。干涉式调制器可制作成通过改变空腔尺寸来产生各种色彩。然而，改变空腔尺寸可涉及到改变制造工艺，例如，通过为一产生绿光的干涉式调制器制造一其尺寸不同于一产生红光的干涉式调制器的空腔。将黑白干涉式调制器与滤色镜结合使用可明显简化制造工艺。将滤色镜整合到图5C中所示的干涉式调制器中会实现制造工艺的其它改良。
图6说明一其中一无源式光学补偿结构105(一包括一散射元件110的平坦化层)布置于一透明衬底115与一光调制元件120之间的空间光调制器100的一实施例。在图6中所示实施例中，光调制元件120为一干涉式调制器，其包括一空腔130、一可移动壁125、及一光学堆叠135。光学堆叠135位于空腔130中与可移动壁124对置的壁上。可移动壁125及光学堆叠135二者均为反射性的(光学堆叠135为局部反射性)，因而空间光调制器100的作业大体上类似于针对图4中所示的空间光调制器100所述的作业。光140穿过可移动壁125中的一槽口150并自散射元件110反射，以使其将光140散射回至可移动壁125(且在一些情况下重新回至散射元件110)，从而最终穿过透明衬底115并射出160、165，如图6中所示。较佳地，散射元件110的形状使光140随机地散射。为清楚起见，图6中显示单个散射元件110及单个槽口150，但应了解，空间光调制器100可包括复数个经布置以提供所需散射光量的散射元件及槽口。
图7A及7B说明包括集成式光学补偿结构的不同组合的空间光调制器的各实施例。图7A说明一其中一无源式光学补偿结构(包括一滤色镜元件34及一黑色掩膜32)布置于一透明衬底12与一光学堆叠61之间的空间光调制器60的一实施例。图7B说明一其中一第一无源光学补偿结构(包括一滤色镜元件40及一黑色掩膜32)及一第二无源光学补偿结构(包括漫射体26)布置于一透明衬底12与一光学堆叠63之间的空间光调制器62的一实施例。如在图5B及5C中一样，为清楚起见，在图7A及7B中省去了一个或多个光调制元件(例如复数个可单独寻址的光调制元件)，但其应理解为布置于透明衬底12上并经构造以调制透射过透明衬底的光。空间光调制器60、62可包括一平坦化层30，平坦化层30(例如)如图7A中所示位于无源式光学补偿结构(包括滤色镜元件34及黑色掩膜32)与光学堆叠61之间，或如图7B中所示位于第一与第二无源式光学补偿结构之间。空间光调制器可包括另一平坦化层，例如一如在图7B中所示位于第一无源式光学补偿结构(包括滤色镜元件40及一黑色掩膜32)与光学堆叠63之间的平坦化层35。
空间光调制器可包括一实施一种或多种功能(例如图7A中所示的一滤色镜及一黑色掩膜)的光学补偿结构，及/或所述光学补偿结构可包括多个视需要通过平坦化层(例如图7B中所示)彼此隔开的层。所属领域的技术人员将了解，术语“光学补偿结构”可用来指一具有一特定功能的结构(例如漫射体26)、一具有多种功能(例如包括滤色镜元件34及黑色掩膜32)的层、或多个分别具有图7B中所示一种或多种功能的层(视需要包括一个或多个平坦化层)。因此，空间光调制器可包括有源式及/或无源式光学补偿结构的任一组合，例如一黑色掩膜与一滤色镜；一黑色掩膜与一漫射体；一滤色镜与一漫射体；一黑色掩膜、滤色镜与一漫射体；等等。用于补偿透射过透明衬底的光的构件包括如本文中所述的光学补偿结构。
可通过将光学补偿结构的制作整合至空间光调制器的制作工艺中来制作包括一光学补偿结构的空间光调制器。此一工艺的一实例说明于图8中。所述工艺首先在步骤50处提供衬底。通常，所述衬底为玻璃、塑料或其它透明衬底。所属领域的技术人员将了解，本文中所使用的措词“透明”涵盖对空间光调制器的工作波长基本透明的材料，且因此透明衬底不需要透射所有波长的光并可吸收处于空间光调制器工作波长的光的一部分。例如，若在特定应用中需要，则可对透明衬底进行微染及/或使其偏振化。因此，可根据所需构造及功能来改变衬底的透明度及反射率。在一些实施例中，衬底至少局部透明并可实质上透明。在其它实施例中，衬底至少局部为反射性并可实质上为反射性。应了解，衬底可既局部透明又局部为反射性。
图8中所示工艺在步骤52处继续进行来制作光学补偿结构。根据结构而定，用于其制作的材料及方法可有所不同。例如，使用与可单独寻址光调制元件的制作相兼容的技术及方法(例如通过旋涂及/或化学气相沉积技术)来制作光学补偿结构通常较为方便。例如，可通过使用一包含有分散的散射元件的聚合物或聚合物溶液对衬底进行旋涂来制作一漫射体薄膜。例如，所述聚合物可为聚酰亚胺且散射元件可为极小的玻璃珠。滤色镜及黑色掩膜可为使用已知的光阻剂沉积及遮罩技术制作于衬底上的经适当染色的光阻剂聚合物。黑色掩膜也可为使用已知的沉积及遮罩技术制作于衬底上的例如氧化铬(亦称作黑铬)等无机材料。
图8中所示工艺在步骤54处继续进行来沉积一平坦化层。所述平坦化层通常为聚合物(例如聚酰亚胺)，并可使用已知的沉积及遮罩技术沉积而成。平坦化层的沉积为可选的，但往往是优选进行的，因为其会形成一适于后续处理步骤的衬底。图8中所示工艺在步骤56处继续进行以在光学补偿结构及平坦化层(若存在)上制作可单独寻址的光调制元件(例如干涉式调制元件)。通常使用例如阐述于第5,835,255号及第6,055,090号美国专利及第2002/0126364 A1号美国专利公开案中的薄膜沉积工艺来制作干涉式调制器。此工艺的一变化形式(其亦显示于图8中)涉及在步骤58处制作另一平坦化层，接着在步骤59处制作另一光学补偿结构。在步骤59处的制作后，该制作工艺可返回至步骤58、59来制作其他平坦化层及光学补偿结构，或者可进行至步骤54、56来制作平坦化层及可单独寻址的光调制元件。所属领域的技术人员将了解，图8中所示工艺或其变化形式可用于制作本文中所述的空间光调制器，包括但不限于图5-7中所示的空间光调制器。用于调制透射过透明衬底的光的构件包括干涉式调制器及液晶显示器。
图9说明一其中一光调制元件205布置于一衬底210与一光学补偿结构215之间的空间光调制器200的一实施例。在图9所示实施例中，光调制元件205为一干涉式调制器，其包括一空腔220、一可移动壁225、一光学堆叠230、及若干支撑件235。光学堆叠230位于空腔220中与可移动壁225相对置的壁上。光学补偿结构215可为本文中所述的任一光学补偿结构，例如一提供辅助正面照明源的有源式光学补偿结构、及/或一无源式光学补偿结构，例如一抗反射层、一衍射式光学元件、一散射光的结构、一黑色掩膜、一滤色镜、一漫射体、一微透镜阵列、一减轻对于透射过所述衬底的光的入射角的所反射色彩的色移的全息膜、或其一组合。在图9中，光调制元件205包括一干涉式调制器，但也可使用其它空间光调制器。
一其中光调制元件布置于一衬底与一光学补偿结构(例如图9中所示的光学补偿结构)之间的空间光调制器也可通过一类似于图8中所示的工艺来制成，不同之处在于在衬底上制成可单独寻址的光调制元件、接着在所述可单独寻址的光调制元件上制作光学补偿结构(例如在步骤50后及步骤52前实施图8中的步骤56)。视情况，可在可单独寻址的光调制元件上制作一平坦化层，接着在平坦化层上制作光学补偿结构。
尽管上文详细说明已显示、说明及指出本发明的适用于各种实施例的新颖特征，然而应了解，所属领域的技术人员可在形式及细节上对所示装置或工艺作出各种省略、替代及改变，此并不背离本发明的精神。应知道，由于某些特征可与其它特征相独立地使用或付诸实践，因而可在一并不提供本文所述的所有特征及优点的形式内实施本发明。

Claims (55)

1.一种显示装置，其包括：
衬底；
经构造以形成图像的显示像素阵列，每个显示像素包括至少一个可单独寻址的光调制元件，其布置于所述衬底上方并经构造以对透射过所述衬底的光进行干涉式调制，所述可单独寻址的光调制元件包括干涉调制器；及
光学补偿结构，
其中，所述显示像素阵列布置于所述衬底和所述光学补偿结构之间，且
其中，所述光的一部分透射过所述衬底和单个光调制元件到达所述光学补偿结构。
2.如权利要求1所述的显示装置，其中所述干涉式调制器包括可移动元件和空腔。
3.如权利要求1所述的显示装置，其中所述光学补偿结构包括黑色掩膜。
4.如权利要求1或3所述的显示装置，其中所述光学补偿结构包括滤色镜。
5.如权利要求1所述的显示装置，其中所述光学补偿结构包括漫射体。
6.如权利要求1所述的显示装置，其中所述光学补偿结构包括抗反射层。
7.如权利要求1所述的显示装置，其中所述光学补偿结构包括复数个散射元件。
8.如权利要求1所述的显示装置，其中所述光学补偿结构包括微透镜阵列。
9.如权利要求1所述的显示装置，其中所述光学补偿结构包括衍射式光学元件。
10.如权利要求1所述的显示装置，其中所述光学补偿结构包括平坦化层，所述平坦化层包括散射元件。
11.如权利要求1所述的显示装置，其中所述光学补偿结构包括全息膜，所述全息膜用于减轻对于透射过所述衬底的所述光的入射角的所反射色彩的色移。
12.如权利要求1所述的显示装置，其中所述光学补偿结构包括黑色掩膜和滤色镜。
13.如权利要求1所述的显示装置，其中所述光学补偿结构包括黑色掩膜和漫射体。
14.如权利要求1所述的显示装置，其中所述光学补偿结构包括滤色镜和漫射体。
15.如权利要求1所述的显示装置，其进一步包括平坦化层。
16.如权利要求1所述的显示装置，其中所述衬底为至少局部透明的。
17.如权利要求1所述的显示装置，其中所述衬底为局部反射性的。
18.如权利要求1所述的显示装置，其中所述光学补偿结构式为无源式光学补偿结构。
19.如权利要求1所述的显示装置，其中所述衬底为至少局部透明且局部反射性的。
20.如权利要求1所述的显示装置，其中所述光调制元件是反射性的。
21.一种用于制造显示装置的方法，其包括：
制作经构造以形成图像的显示像素阵列，每个显示像素包括在衬底上方的至少一个可单独寻址的光调制元件，所述可单独寻址的光调制元件包括干涉调制器；及
在所述显示像素阵列上制作光学补偿结构，其中，所述光的一部分透射过所述衬底和单个光调制元件到达所述光学补偿结构。
22.如权利要求21所述的方法，其中制作所述可单独寻址的光调制元件包括：
制作空腔和可移动元件。
23.如权利要求21所述的方法，其进一步包括：
在所述显示像素阵列上制作平坦化层。
24.一种通过如权利要求21所述的方法制作的空间光调制器，其中所述衬底包括塑料或玻璃。
25.一种显示装置，其包括：
衬底；
经构造以形成图像的显示像素阵列，每个显示像素包括用于对透射过所述衬底或从所述衬底反射的光进行干涉式调制的装置；及
用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置，
其中，所述用于对透射过所述衬底或从所述衬底反射的光进行干涉式调制的装置可操作地布置于所述衬底和所述用于对所述光进行补偿的装置之间，
其中，所述用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置包括至少一个干涉调制器，且
其中，所述光的一部分透射过所述衬底和单个干涉调制器到达所述补偿装置。
26.如权利要求25所述的显示装置，其中所述用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置包括从由如下组成的群组中选择的结构：
衍射式光学元件、漫射体、抗反射层、复数个散射元件、微透镜阵列、全息膜。
27.如权利要求25所述的显示装置，其中所述用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置包括漫射体。
28.如权利要求25所述的显示装置，其中所述用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置包括黑色掩膜。
29.如权利要求25所述的显示装置，其中所述用于对透射过所述衬底或从所述衬底反射的光进行补偿的装置包括滤色镜。
30.一种空间光调制器，其包括：
衬底；
复数个可单独寻址的干涉式光调制元件，其布置于所述衬底上方并经构造以对透射过所述衬底或从所述衬底反射的光进行调制，所述干涉式光调制元件包括空腔和可移动壁；及
至少一个光学补偿结构，所述复数个可单独寻址的干涉式光调制元件是布置于所述衬底与所述光学补偿结构之间，所述光学补偿结构包括从抗反射层、衍射式光学元件、用于散射光的结构、漫射体、微透镜阵列、全息膜组成的群组中选择的结构，
其中，所述光的一部分透射过所述衬底和单个光调制元件到所述至少一个光学补偿结构。
31.如权利要求30所述的空间光调制器，其中所述至少一个光补偿结构包括黑色掩膜。
32.如权利要求30所述的空间光调制器，其中所述至少一个光补偿结构包括滤色镜。
33.如权利要求30所述的空间光调制器，其进一步包括平坦化层。
34.如权利要求30所述的空间光调制器，其中所述衬底为局部反射性的。
35.如权利要求30所述的空间光调制器，其中所述光学补偿结构为无源式光学补偿结构。
36.如权利要求30所述的空间光调制器，其中所述衬底为至少局部透明的。
37.如权利要求30所述的空间光调制器，其中所述衬底为至少局部透明且局部反射性的。
38.一种空间光调制器，其包括：
衬底；
在所述衬底上方的复数个光调制元件，所述光调制元件经构造以对透射过所述衬底的光进行干涉式调制；
在所述衬底下方的第一光学补偿结构；及
布置于所述衬底和所述光调制元件之间的第二光学补偿结构，所述第二光学补偿结构的至少一部分是大致是不平坦的。
39.如权利要求38所述的空间光调制器，其中所述衬底是光透的。
40.如权利要求38所述的空间光调制器，其中所述第一光学补偿结构包括漫射体。
41.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构包括复数个散射元件。
42.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构包括微透镜阵列。
43.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构包括衍射式光学元件。
44.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构包括散射元件。
45.如权利要求38所述的空间光调制器，其中所述第一光学补偿结构为无源式光学补偿结构。
46.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构为无源式光学补偿结构。
47.如权利要求38所述的空间光调制器，其中所述第二光学补偿结构包括由如下组成的群组中的一项或多项：
复数个散射元件、微透镜阵列、漫射体、黑色掩膜、衍射式光学元件。
48.如权利要求47所述的空间光调制器，其中所述第一光学补偿结构包括由如下组成的群组中的一项或多项：
漫射体、滤色镜、复数个散射元件、微透镜阵列、全息膜、衍射式光学元件。
49.如权利要求38所述的空间光调制器，其中每个所述光调制元件包括衍射式光学元件。
50.如权利要求49所述的空间光调制器，其中，每个所述光调制元件包括空腔和可移动壁。
51.如权利要求38所述的空间光调制器，其中所述第一光学补偿结构达到与所述第二光学补偿结构不同的光学效应。
52.如权利要求38所述的空间光调制器，其进一步包括：
在所述光调制元件和所述第二光学补偿结构之间的平坦化层。
53.如权利要求38所述的空间光调制器，其中所述第一光学补偿结构大致是不平坦的。
54.一种空间光调制器，其包括：
衬底；
在所述衬底上方的复数个光调制元件，所述光调制元件经构造以对透射过所述衬底的光进行干涉式调制；
在所述衬底下方的第一光学补偿结构；及
布置于所述衬底和所述光调制元件之间的第二光学补偿结构，其中所述第二光学补偿结构包括由复数个散射元件、微透镜阵列、漫射体、衍射式光学元件组成的群组中的一项或多项。
55.一种空间光调制器，其包括：
衬底；
在所述衬底上方的复数个光调制元件，所述光调制元件经构造以对透射过所述衬底的光进行干涉式调制；
在所述衬底下方的第一光学补偿结构；及
布置于所述衬底和所述光调制元件之间的第二光学补偿结构，其中所述第一光学补偿结构经构造以达到与所述第二光学补偿结构不同的光学效应。
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