CN101905851A - Electro-thermal micro-actuator based on combined action of alumina film and polymer - Google Patents
Electro-thermal micro-actuator based on combined action of alumina film and polymer Download PDFInfo
- Publication number
- CN101905851A CN101905851A CN 201010243115 CN201010243115A CN101905851A CN 101905851 A CN101905851 A CN 101905851A CN 201010243115 CN201010243115 CN 201010243115 CN 201010243115 A CN201010243115 A CN 201010243115A CN 101905851 A CN101905851 A CN 101905851A
- Authority
- CN
- China
- Prior art keywords
- layer
- resistance wire
- micro
- cantilever beam
- wire heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides an electro-thermal micro-actuator based on the combined action of an alumina film and a polymer, belonging to the technical field of a micro electro mechanical system (MEMS). The micro-actuator comprises a thermal substrate, an alumina structural layer, a nickel resistance wire heating layer and a polymer function auxiliary layer, wherein the nickel resistance wire heating layer, the alumina structural layer and the thermal substrate are arranged in sequence from top to bottom, the alumina structural layer is a T-shaped structure which is composed of an overlap part and a cantilever beam part, the polymer function auxiliary layer is coated outside the cantilever beam part of the alumina structural layer and used for wrapping the nickel resistance wire heating layer, and a driving voltage is applied to the cantilever beam part of the nickel resistance wire heating layer. In the invention, different multilayer film materials have obvious different thermal performances and mechanical performances, thereby realizing the output of bigger out-of-plane displacement driven by small power. A thermal driver has simple structure and reliable manufacturing process and is suitable for mass production.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, specifically is a kind of electric heating micro-driver based on aluminum oxide film and combination with polymers effect.
Background technology
Along with the continuous development of MEMS (MEMS) technology, micro structural component and system be in information industry, aerospace, and medical treatment, all be used widely in a lot of fields such as environmental science.The core work of MEMS technology is the design and the manufacturing of microsensor and microdrive, wherein microdrive is as moving part, the size of its actuating range, but the height of efficiency of movement, the indexs such as reliability of action have determined the success or failure of system, are most important links in the MEMS.Therefore study the invention small size, low weight, the microdrive that low-power consumption etc. have premium properties is the focus of modern study technology.
Microdrive is divided into electromagnetic type by the difference of type of drive, electrostatic, piezo-electric type, all kinds microdrives such as electroheating type.Electromagnetic type micro driver can produce bigger driving force when the number mm size, also have simultaneously bigger drive displacement, but, relate to three-dimensional micro-processing technology because electromagnetic driver needs processing coil and magnet, process the comparison difficulty, be unfavorable for standardized production; The electrostatic microdrive demonstrates many superiority when microsize, device size was more little when for example static drove, and the power on its unit volume is big more, and its shortcoming is the driving voltage height, but actuating range is very little; Piezoelectric Micro Actuator, because the size of the quantity of electric charge is directly proportional with applied force, exportable bigger driving force, but operating voltage lies prostrate hundreds of volts tens of usually, and be subjected to the restriction of material; Though electroheating type microdrive response frequency is lower, dynamic characteristic is relatively poor, with respect to preceding several drivers, advantages such as it is low to have driving voltage, and driving force is big, and stroke is big, importantly manufacture craft is simple, is suitable for mass, therefore uses extensively in micromechanics.
Find that through literature search the electroheating type microdrive is by world scholar broad research to prior art.The autograph " Scaling of Folded Electro-thermal Actuators " (Chinese " the size research of folded form electrothermal drive device ") that Peter etc. deliver in the 1151st page of " MicroElectro Mechanical Systems " (Chinese name " MEMS ") the 23rd meeting in 2010, reported a kind of by metal and oxide folded form hot driver as double membrane structure, under the condition of heating that distributes, the hot driver of this structure is higher by 26% than the thermo-responsive performance of multilayer film hot driver, this hot driver is mainly used in the rotation micromirror systems, under the situation of low voltage drive (2V～12V), can realize that big angular displacement range is from 45 °～90 °, adjustable extent is very big, but this activation configuration complexity, bring certain difficulty to processing, and yield rate is not to guarantee, so adopt topological approach to make a series of symmetrical structures in the literary composition, to replace undesirable structure.
The autograph " Polymeric Thermal Microactuator With EmbeddedSilicon Skeleton:Part II-Fabrication; Characterization; and Application for 2-DOFMicrogripper " (Chinese " the electrostrictive polymer hot micro-actuator with embedded type silicon skeleton: second portion---the making of two free micro-clamps; characteristic and application ") that Trinh Chu Duc etc. deliver on " Journal of Microelectromechanical Systems " (Chinese name " micro mechanical system ") rolled up the 823rd page in 2008 the 17th, reported that a kind of electrostrictive polymer hot micro-actuator by the embedded silicon skeleton of tool combines the micro-clamp structure, be mainly used in the micro-structural of clamping size at 6 to 40 μ m, this micro-clamp structure is made up of 4 electric heating micro-drivers based on polymer SU8, this driver drives brachium 360 μ m, wide 125 μ m, thick 30 μ m, size is less, drive displacement is less, this driver is under 2.5V voltage, and drive displacement only is 9 μ m.This structure as support structure, relates to deep reaction ion etching technology by silicon, and aluminium is made the resistance wire heat radiating structure, relates to sputtering technology, and SU8 glue filling technique, micro fabrications such as KOH etching, and technology category is many, and complicated operation is difficult for realizing.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of electric heating micro-driver based on aluminum oxide film and combination with polymers effect is provided, utilize the multi-layer film material difference, there were significant differences for its thermal property and mechanical performance, thereby being implemented in small-power drives down, export bigger face outer displacement, this hot driver is simple in structure and manufacture craft is reliable, is suitable for making in batches.
The present invention is achieved by the following technical solutions, the present invention includes: hot radical seat, aluminium oxide structure layer, nickel resistance wire heating layer and polymers function auxiliary layer, wherein: nickel resistance wire heating layer, aluminium oxide structure layer and hot radical seat from top to bottom are provided with successively, described aluminium oxide structure layer is an overlapping T font structure that constitutes with cantilever beam portion, the polymers function auxiliary layer is covered in cantilever beam portion outside of aluminium oxide structure layer and wraps up nickel resistance wire heating layer, and driving voltage puts in the cantilever beam portion of nickel resistance wire heating layer.
Described hot radical seat is metal supporting construction, this hot radical seat is a substrate with silicon or glass wafer, adopts the UV-LIGA technology, by the ultraviolet exposure photoetching external circuits is made by lithography mould, with the electroforming process electrotyping forming, guarantee the flying height of hot actuating arm again.
Described aluminium oxide structure layer, its function is as functional expansion layer, because the aluminium oxide Young's modulus is placed in the middle, greater than the polymer auxiliary functional layers, less than metallic nickel resistance wire heating layer, when nickel resistance wire heating layer adstante febre, the aluminium oxide structure layer is expanded by heating rapidly, can export big active force and displacement.
Be provided with some resistance wires that palisade is arranged that are in the described nickel resistance wire heating layer, this nickel resistance wire heating layer is the thermal source of described electric heating micro-driver.
Polymer auxiliary functional layers among the present invention has two aspect effects, on the one hand as driving layer, absorbs a small amount of waste heat output displacement, adds up in aluminium oxide output displacement, makes whole driver displacement become big; The polymer auxiliary functional layers can guarantee the heat exchange that nickel resistance wire heating layer and air are minimum as heat insulation layer on the other hand, makes the efficient of hot driver reach higher value.
The present invention is based on the MEMS Micrometer-Nanometer Processing Technology, its substrate can be selected according to the working environment and the instructions for use of device, as the substrate of silicon chip, sheet glass, aluminium oxide ceramics or other any surfacings.In the non-silicon produced by micro processing of this applying three-dimensional technology, select substrate of glass for use.
Compared with prior art, do the use of driving layer owing to used aluminium oxide to combine with the SU8 polymer phase, with used double-deck SU8 to do drives structure to compare in the past, the technology of the present invention effect comprises: initial warpage issues has been had very big improvement, tip displacement has reached about 80 microns, and uses double-deck SU8 to do drives structure (beam of same size), and tip displacement is the 30-50 micron only, and SU8 and resistance wire adhesion are bad, break away from easily; Bigger owing to aluminium oxide rigidity as can be known by simulation calculation simultaneously, power output can reach the little ox of hundreds of, and uses double-deck SU8 structure, and power output only is tens little oxen; The design's structure is simple relatively, manufacture craft be easy to realize and cost lower, simultaneously, the structural entity size is little, helps integrated, the mass manufacturing of MEMS device; Adopt aluminium oxide to combine with polymer phase, aluminium oxide drives layer as function can realize big displacement and driving force, polymer is as auxiliary functional layers, the micro-strain of being heated on the one hand, be mainly used to insulation effect on the other hand, so that the Joule heat that the abundant absorption resistance silk of aluminium oxide heating layer is sent out all is used for the heated bending distortion; Have the aperture of symmetric array on the cantilever, help the unsettled release of the thick copper of cantilever beam structures, and the distribution of the homogenising of structurally internal stress, improved cantilever beam structures greatly and discharged the degree of back because of internal stress inequality warpage.
In sum, the electric heating micro-driver based on aluminum oxide film and combination with polymers effect of the present invention's design has small size, low weight, premium properties such as low-power consumption, and processing compatibility is good, be easy to realize, help realizing that micro devices is integrated, mass, structural material adopts aluminium oxide to combine with polymer phase, can guarantee the heat exchange that nickel resistance wire heating layer and air are minimum, make the heat utilization ratio of hot driver reach higher value, when driving force is big, effectively improved hot driver response time and speed.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is an aluminium oxide structure layer structural representation.
Fig. 3 is a nickel resistance wire heating layer structural representation.
The specific embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1-Figure 3, present embodiment comprises: hot radical seat 1, aluminium oxide structure layer 2, nickel resistance wire heating layer 3, polymer auxiliary functional layers 4, wherein: nickel resistance wire heating layer 3, aluminium oxide structure layer 2 and hot radical seat 1 from top to bottom are provided with successively, polymers function auxiliary layer 4 is coated on the outside of nickel resistance wire heating layer 3, and driving voltage puts on the nickel resistance wire heating layer 3.
The length of described hot radical seat 1 is 500 μ m-3000 μ m, width 300 μ m-1500 μ m, thickness 10 μ m-50 μ m.
Described aluminium oxide structure layer 2 is the T font structure that overlapping 5 and cantilever beam portion 6 constitutes, the centre of this aluminium oxide structure layer 2 is overlapping 5, this overlapping 5 and the 1 overlapping setting of hot radical seat, the length of described cantilever beam portion 6 is 300 μ m-1000 μ m, wide 100 μ m-600 μ m, thick 1 μ m-20 μ m, described cantilever beam portion 6 is provided with several side hole arrays 7, the length of side in square hole wherein is 10 μ m-50 μ m, this side hole helps the unsettled release of cantilever beam, accelerate rate of release, disperse the effect of internal stress simultaneously.
Be provided with some resistance wires 8 that palisade is arranged that are in the described nickel resistance wire heating layer 3, described palisade arrangement is specially the unequal-interval that links from beginning to end and arranges;
The cross section length of side of described resistance wire 8 is 1 μ m-20 μ m * 1 μ m-20 μ m, and the spacing of per two adjacent resistor silks is 5 μ m-50 μ m.
Described polymer auxiliary functional layers 4 is covered in cantilever beam portion outside of aluminium oxide structure layer 2 fully and wraps up nickel resistance wire heating layer 3.
Claims (7)
1. electric heating micro-driver based on aluminum oxide film and combination with polymers effect, comprise: hot radical seat, aluminium oxide structure layer, nickel resistance wire heating layer and polymers function auxiliary layer, it is characterized in that: nickel resistance wire heating layer, aluminium oxide structure layer and hot radical seat from top to bottom are provided with successively, described aluminium oxide structure layer is an overlapping T font structure that constitutes with cantilever beam portion, the polymers function auxiliary layer is covered in cantilever beam portion outside of aluminium oxide structure layer and wraps up nickel resistance wire heating layer, and driving voltage puts in the cantilever beam portion of nickel resistance wire heating layer.
2. the described electric heating micro-driver based on aluminum oxide film and combination with polymers effect of claim 1 is characterized in that, the length of described hot radical seat is 500 μ m-3000 μ m, and width is 300 μ m-1500 μ m, and thickness is 10 μ m-50 μ m.
3. the described electric heating micro-driver of claim 1 based on aluminum oxide film and combination with polymers effect, it is characterized in that, the centre of described aluminium oxide structure layer is overlapping portion, this overlapping and the overlapping setting of hot radical seat, the length of described cantilever beam portion is 300 μ m-1000 μ m, width is 100 μ m-600 μ m, and thickness is 1 μ m-20 μ m.
4. claim 1 or 3 described electric heating micro-drivers based on aluminum oxide film and combination with polymers effect is characterized in that, described cantilever beam portion is provided with several side hole arrays, and the length of side in square hole wherein is 10 μ m-50 μ m.
5. the described electric heating micro-driver based on aluminum oxide film and combination with polymers effect of claim 1 is characterized in that, is provided with some resistance wires that palisade is arranged that are in the described nickel resistance wire heating layer.
6. the described electric heating micro-driver based on aluminum oxide film and combination with polymers effect of claim 5 is characterized in that, described palisade is arranged as the unequal-interval that links from beginning to end and arranges.
7. the described electric heating micro-driver based on aluminum oxide film and combination with polymers effect of claim 5 is characterized in that, the cross section length of side of described resistance wire is 1 μ m-20 μ m * 1 μ m-20 μ m, and the spacing of per two adjacent resistor silks is 5 μ m-50 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010243115 CN101905851A (en) | 2010-08-05 | 2010-08-05 | Electro-thermal micro-actuator based on combined action of alumina film and polymer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010243115 CN101905851A (en) | 2010-08-05 | 2010-08-05 | Electro-thermal micro-actuator based on combined action of alumina film and polymer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101905851A true CN101905851A (en) | 2010-12-08 |
Family
ID=43261475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010243115 Pending CN101905851A (en) | 2010-08-05 | 2010-08-05 | Electro-thermal micro-actuator based on combined action of alumina film and polymer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101905851A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004509368A (en) * | 2000-09-12 | 2004-03-25 | スリーエム イノベイティブ プロパティズ カンパニー | Combined vertical and horizontal thermal actuator |
| US20040090495A1 (en) * | 2002-11-13 | 2004-05-13 | Eastman Kodak Company | Tapered multi-layer thermal actuator and method of operating same |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
-
2010
- 2010-08-05 CN CN 201010243115 patent/CN101905851A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004509368A (en) * | 2000-09-12 | 2004-03-25 | スリーエム イノベイティブ プロパティズ カンパニー | Combined vertical and horizontal thermal actuator |
| US20040090495A1 (en) * | 2002-11-13 | 2004-05-13 | Eastman Kodak Company | Tapered multi-layer thermal actuator and method of operating same |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
Non-Patent Citations (2)
| Title |
|---|
| 《微细加工技术》 20070831 张丹等 电化学沉积Cu牺牲层工艺用于制备面外运动电热微驱动器 , 第4期 2 * |
| 《系统仿真学报》 20100731 吴义伯等 一种金属基聚合物电热微驱动器的设计与仿真 第22卷, 第7期 2 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Mohith et al. | Recent trends in piezoelectric actuators for precision motion and their applications: A review | |
| US6679055B1 (en) | Electrothermal quadmorph microactuator | |
| Fujita | Microactuators and micromachines | |
| Spearing | Materials issues in microelectromechanical systems (MEMS) | |
| JP2018503526A (en) | Micro-electromechanical system manufactured using roll-to-roll processing | |
| CN101488724B (en) | Electric heating micro driver of multiple polymer composite material | |
| Li et al. | Microactuators: Design and technology | |
| CN101944860A (en) | Piezoelectric cantilever vibration energy harvester and preparation method thereof | |
| Wei et al. | A novel fabrication process to realize a valveless micropump on a flexible substrate | |
| Liu et al. | Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control | |
| CN111081862B (en) | Dielectric effect-based electrostrictive device and manufacturing method thereof | |
| CN111747371B (en) | Structural ultra-smooth device and preparation method thereof | |
| WO2000075068A2 (en) | Method and apparatus for stress pulsed release and actuation of micromechanical structures | |
| CN101905851A (en) | Electro-thermal micro-actuator based on combined action of alumina film and polymer | |
| Wang et al. | Analysis of an annular PZT actuator for a droplet ejector | |
| Wang et al. | Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film | |
| US20050067919A1 (en) | Polymer actuator having a circular unit cell | |
| JP3704558B2 (en) | 3D structure assembly method | |
| CN1972102B (en) | Electrostatic actuation beam-folding nano-stepping micro-actuator | |
| CN1931529A (en) | Heat driven SU-8 base micro pliers with embedded nickel wire in double diamond structure | |
| US20140008223A1 (en) | Methods and apparatuses for mems based recovery of sequence verified dna | |
| CN109889090B (en) | Ultra-precise three-axis rotation piezoelectric attitude adjusting mechanism and excitation method thereof | |
| WO2008139378A1 (en) | Pulse driving of actuator elements for fluid actuation | |
| Ataka et al. | Micro actuator array on a flexible sheet—Smart MEMS sheet | |
| Walton | Electrostatically driven large aperture micro-mirror actuator assemblies for high fill-factor, agile optical phase arrays |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20101208 |