CN101989728B - Laser arrangement and resonator element for such a laser arrangement - Google Patents
Laser arrangement and resonator element for such a laser arrangement Download PDFInfo
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- CN101989728B CN101989728B CN201010245782.7A CN201010245782A CN101989728B CN 101989728 B CN101989728 B CN 101989728B CN 201010245782 A CN201010245782 A CN 201010245782A CN 101989728 B CN101989728 B CN 101989728B
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Abstract
In a laser arrangement comprising at least one laser medium (2') for producing a laser emission, a laser resonator having a beam path (SG) with a length of at least 20 cm and with at least one end mirror (6'), the beam path (SG) within the laser resonator is formed at least partly by free-beam optics. A resonator element (9) arranged in the beam path has at least two optical surfaces as surfaces interacting with the radiation led via the beam path (SG), these optical surfaces being rigidly connected to one another and being adjustable together in the beam path (SG) in such a way that, on tilting by an angle error, they achieve substantially the same effect on the guidance of the beam path (SG) but with opposite sign, so that mutual compensation of tilt errors takes place.
Description
Technical field
The present invention relates to laser structure, specifically, relate to a kind of for generation of or amplify the laser structure of femtosecond pulse or picopulse, and the resonant element in a kind of light path of the laser resonator that is arranged in this laser structure.
Background technology
Ultrashort pulse laser system,, can produce or the amplification characteristic pulse duration at the laser structure (laser arrangement) of the laser pulse of femtosecond or picosecond, from the various execution modes of prior art, be public domain already, femtosecond laser and picosecond laser are used in increasing various application scenario.This Optical Maser System has utilized chamber (cavity) or the laser resonator with two mirror elements and laser medium, and these two mirror elements define light path.Here, the general so-called elongate chamber (extended cavity) that adopts of the femtosecond laser of Mode Coupling and picosecond laser, it has a plurality of for guiding reflection of light element, and light path folding guaranteed desirable property compact to design.When pulse repetition frequency will drop on MHz scope, for example, when typical pulse repetition frequency drops on 1-120MHz scope, this design is especially correlated with.In order to keep practical compact, such repetition rate need to be utilized this elongate chamber with two or more deflecting mirrors or catadioptric mirror, described mirror is crooked, but also can be designed as plane.
The typical resonator of this laser structure has the sensitivity of 50 μ rad in some element,, at (undesirable) element, during with this angle deviating optimum state, has occurred reaching the perceptible power loss of several percentages that is.
When assembling laser resonator, conventionally its mirror is placed in to common (base) plate as base element, common integral seat or common stablizing on (base) bar.Conventionally, actual mirror consists of the actual mirror coating being coated on the substrate mostly consisting of glass, and first this mirror is embedded in is in the microscope base of metal mostly, and microscope base is fixed on base or base element.Now the problem of appearance is, must involve at least two kinds of different materials, is the glass as mirror substrate on the one hand, is that metal is as aluminium and stainless steel on the other hand.The thermal expansion of these materials differs greatly, so variations in temperature causes stress and/or relativity shift.
Therefore, higher than the angle stability of 50 μ rad when assembling has the material of the different coefficients of expansion, be technically difficult to accomplish or can only be very bothersome accomplish, at this, must consider in the environmental impact after several years and variation.The usual conditions of observing are that, at minute surface (other end relatively) permission maximum deviation 0.5 μ m who has 10mm to expand, this is corresponding to 50 above-mentioned μ rad slope sensitivities.People will consider may superpose their error of a plurality of mirror elements, and result has improved many for the stability requirement of these mirrors.The surface roughness of the metal surface of milling or boring is generally Ra=0.4～0.85 μ m, and therefore the desired precision of laying generally cannot be provided.
Summary of the invention
Task of the present invention is to provide the improvement laser structure with elongate chamber, is particularly useful for producing femtosecond pulse or picopulse.
Another task is to provide such laser structure, even if it also has robustness and the power parameter stability of enhancing within the longer time.
Another task of the present invention is to provide a kind of laser structure, and it is very little to the crooked of substrate or base or distortion reaction, therefore for ectocine as temperature, mechanical stress or glass pressure or air pressure also insensitive.
Another task is to provide a kind of laser structure, and in this laser structure, the slope sensitivity of resonant element is so compensated, that is, the efficient light occurring is constant or there is no a significant change on irradiation position.
These tasks are completed or are improved by the theme of claim 1 or 15 or the theme of dependent claims.
The present invention relates to the design and use of the resonant element in the light path of laser structure with elongate chamber or lengthening laser resonator.In the case, according to the present invention, at least two component combinations that define laser resonator or that be arranged in its light path and affect light path itself become a common resonator element, and this resonator element integral installation is in light path, especially according to being offset or adjustable arrangement.So the interfix association and can jointly regulating in light path of the optical surface that is transmission plane and/or reflecting surface form of these parts,, optical surface has substantially been realized the same function to light path guiding when itself tilting with error angle respectively, but there is contrary symbol, thereby can realize heeling error reached at least 50% especially higher than 75% mutual compensation.Therefore, because using imbalance or the wrong problem regulating that special optics causes with resonant element to be solved.In addition the selection of parts and the calculating of the effect in resonator layout that, form such resonant element can the method based on known be carried out.The element of laser chamber is now considering that the specific practice for resonator design so selects and arrange, that is, the slope sensitivity of element reduces at double, although therefore adopted the optical-mechanical support of non-the best, has still obtained laser steady in a long-term.
This known method is the ABCDEF method as slope sensitivity computational methods, for example, in Siegman Anthony E. " Lasers ", in (University Science Books, 1986, Pages 607-614), describe.Described there for calculating the abcd matrix computational methods of laser cavity and be extended to so-called ABCDEF computational methods, can calculate by matrix unit " F " slope sensitivity of resonator thus.In resonator, imaginary catadioptric mirror element is housed, it has 3 * 3 matrixes that comprise following value:
ABCDEF(100μrad)＝{A，B，E；C，D，F；0，0，1}＝{1，0，0；0，1，2·10
-4；0，0，1}
In the case, to F, distribute a concrete angle tilting value F=210
-4, this corresponding to inclined light shaft 200 μ rad.In reality, this is corresponding to the catadioptric mirror of (imaginary) plane being arranged on to the correspondence position that has inserted matrix A BCDEF (100 μ rad) in resonator, and this catadioptric mirror element leaves optimum position with 100 μ rad error angle imbalances in reality.At reflex time, occurred such deflection angle, it is the twice of error angle.Therefore, F=210
-4error angle 100 μ rad=10
-4twice.
Based on ABCDEF method and utilize the regulating error element ABCDEF (100 μ rad) inserting at ranging resonator z to calculate the initial coordinate that resonator axis has provided optical axis, it is again (self vector definite) that " independently " forms in a harmonic period.This will represent with two Axial Bundle initial values (r, r '), wherein when not there is resonator imbalance, and when all element E and F are respectively zero, (r, r ')=(0,0).Imbalance or the error angle at element or certain the position z place of folding element in resonator can be from " self axis " (r on the impact of laser power, r ') calculate, way is, its from resonator starting point to laser medium (again by ABCDEF method) as beam propagation.If Axial Bundle is given by (r_med, r_med ') on laser medium position, be especially worth r_med and determined optical axis on laser medium and the skew of optimum state, here, optimum state is given by r_med=0.So the optical axis relevant to the theory mode radius w_med that is present in there leaves the relativity shift of Best Point and produces the qualitative index of adjusting sensitivity for the laser resonator of concrete imbalance.This take % as unit representation.20% value (r_med/w_med=0.2=20%) when use error regulating element ABCDEF (100 μ rad) or even more than 50% value be general produces perceptible slope sensitivity, and much higher value has produced undesirable high slope sensitivity.
The light beam pose parameter of the output beam of laser is significant because laser is generally integrated in optical application system, this system have for incident laser with regard to its posture at some point, the i.e. allowable tolerance of position and angle.Therefore, except element tilts on the impact of laser power, light beam pose parameter relatively the optical axis on laser output coupling mirror how much changed be significant.This can propagate into output coupling mirror and calculate by ABCDEF matrix computations through laser by Axial Bundle initial value (r, r ') by same procedure, as long as output coupling mirror is originally unequally corresponding to resonator starting point.
Also can in conjunction with shown in form observe at least two contrary parts or its optical surfaces of slope sensitivity and be combined into an insensitive common resonant element according to the present invention.In the case, occur two parts, they obtain identical or at least essentially identical effect by its optical surface when the heeling error angle, but have contrary sign.
Be noted that current calculating only described the inclination around element self axis.This device proposing be therefore highly suitable for itself or with the problematic installation that compensates any parts together with other parts as resonant element.But, if base element or substrate have changed, for example it is crooked because there is pressure condition or temperature gradient, on the position of some resonant elements or some parts, not only occurs simple inclination, and along with the lateral shift of each element has appearred in this change.This is uncorrelated when level crossing, but depends on radius of curvature when curved mirror, and here, the contribution of the lateral shift in final effect can show as again the additional contribution to tilting.
For example, when laser structure comprises gas filler or vacuum, also due to the temperature gradient causing because of input or mobile heat and material aging and its stress on base element and surface thereof, so this can realize with the form of air pressure function.The input that the inclination of some parts that result occurs and skew can be calculated as ABCDEF, wherein, except F unit, also can specifically utilize E matrix element.
In order to ensure corresponding robustness and stability, all parts to be carried out to sensitivity analysis, thereby can identify and study the possible grouping that two or three parts form, they show the adverse effect to deflection.Now, especially can utilize catadioptric mirror have object location and with being connected of other parts of resonator, for realizing the grouping of the parts with contrary sensitivity and connecting into a common resonant element.
The grouping concept with two parts of contrary sensitivity expands to similarly the parts more than the slope sensitivity of two totally with phase counter-bonification is divided into groups.
In addition, parts or its optical surface of combination both can be identical in the case, also can be different, and wherein optical surface refers to and interactive of the light beam guiding by resonator light path.Therefore, this face can be primary reflection surface, has the catadioptric mirror of plane or goggle with curve surface lens or the surface of end mirror, can be also the transmission plane of laser medium or output coupling mirror for example.Can combine equally two kinds of effects, for example, on output coupling mirror or on laser medium face, thereby not only realize reflection, and realize transmission.The face of resonant element now not only can have identical radius of curvature, also can have different radius of curvature, and parallel or relatively angled mode is orientated with optical axis.
In addition, for identifying suitable grouping or the basis of parts capable of being combined and mutually determine that at resonant element laying and being orientated in the arrangement parameter of optical surface and the light path at laser resonator thereof is in the situation that the ABCDEF form shown in adopting completes.
Accompanying drawing explanation
The embodiment schematically illustrating below with reference to accompanying drawing comes only to describe in detail for example or describe according to laser structure of the present invention with according to resonant element of the present invention, wherein:
Fig. 1 is the schematic diagram of the laser structure of prior art;
Fig. 2 is the schematic diagram of the mirror element in the laser structure of prior art;
Fig. 3 be practical resonant element of the present invention in laser structure of the present invention the first embodiment schematic diagram;
Fig. 4 is the schematic diagram of the first embodiment of resonant element of the present invention;
Fig. 5 is the schematic diagram of the second embodiment of resonant element of the present invention;
Fig. 6 is the schematic diagram of the 3rd embodiment of resonant element of the present invention;
Fig. 7 is the schematic diagram of the 4th embodiment of resonant element of the present invention;
Fig. 8 is the explanation for the slope sensitivity of the catadioptric mirror of the first embodiment of laser resonator;
Fig. 9 is the explanation for the slope sensitivity of the folding transmitting mirror of the second embodiment of laser resonance element;
Figure 10 a-10b is the schematic diagram of laser structure of the present invention, and wherein at least two optical surfaces consist of two different pips of a common curved surface.
Embodiment
Fig. 1 show as an example of the laser structure of prior art, for generation of the schematic diagram of the laser structure of the ultrashort pulse laser system form of femtosecond pulse or picopulse.Here, laser structure has at least one pumping source 1, especially laser diode source, for pumping amplifying laser medium 4, to produce Laser emission, wherein pumping light path guides by a series of lens 2 and two look pumping mirrors 3 as coupling input optical element.Can with the coupling output of Laser emission AS by the output coupling mirror 5 being connected on after laser medium 4, realize.In this example, Yb:KYW is used as laser medium 4, and it is placed in laser resonator, and this laser resonator comprises humorous galvanometer 6 a plurality of curved surfaces or plane, i.e. catadioptric mirror or end mirror.Laser resonator also has two Herriot mirrors 7 and a saturable absorbing mirror 8, as the parts that produce Mode Coupling.According to the present invention, the parts that are arranged in laser resonator and have its optical surface can be grouped and be combined into resonant element, have guaranteed according to compensating action of the present invention in resonant element.
The ultra-short pulse laser system illustrating for example is specifically take the form of the femto-second laser that Yb:KYW or Yb:KGW be laser medium, in centre wavelength, be in 1040-1045nm situation, it has as the 30W laser diode of the 980nm of pumping source 1 and 7.5 meters of long resonators is 20 megahertz pulse repetition frequencys, also has 6.5% coupling output and 250-300fs pulse length.The catadioptric mirror of saturable laser is for starting and stable mode coupling.Laser is worked and is comprised four catadioptric mirrors 6 of GTI laser in isolated mode coupling regime, and the catadioptric mirror of this GTI laser has the negative GVD of 500fs2.For example different from warble-pulse mode, will not need extraneous pulse compression., this and other laser structure may also be designed to for example recoverable amplifier form, that is, and and the form of laser amplification device.
Fig. 2 shows the schematic diagram of the mirror element in such or similar prior art laser structure, here, only exemplary and only illustrate for simplicity's sake and paid close attention to a laser medium 2 ', disk-shaped laser form for example, there is thin slice geometry, and an end mirror 6 ' and an output coupling mirror 5 '.By being arranged in these parts of laser resonator, limit light path SG, the laser LS that use is coupled output from light path through output coupling mirror 5 '.In the case, laser medium 2 ' and end mirror 6 ' have flat optical surfaces.Laser interaction in this optical surface and laser resonator and the alternating action that is reflected, focuses on or reflected by it limit or affect the light path SG in laser resonator, and wherein light path is formed by free space optical elements (Freistrahloptik) at least partly in laser resonator.And, according to the length of wherein wanting the housing of integrated this resonator, can adopt for simplicity's sake many and not shown catadioptric mirror.
In an example shown, output coupling mirror 5 ' can have the radius of curvature of 500mm, and wherein the distance between the distance between laser medium 2 ' and output coupling mirror 5 ' and laser medium 2 ' and end mirror 6 ' is 1000mm.Focal length is that the thermal lens of 800mm is arranged in laser medium 2 '.In this demonstrative structure, when output coupling mirror 5 ' tilts, for example, cause in laser medium 2 ' optical axis to be offset with 13.37% degree of the theory mode radius in laser medium 2 '.In the situation that for the 1.0mm theory mode radius of the laser medium 2 ' that calculates, the skew of this pattern is corresponding to 134 μ m, this is because output coupling mirror 5 ' offsets optimum position 100 μ rad.For fear of passing through best laser medium 2 ' because zlasing mode is non-, put caused power loss, seek now a kind of element, it has equal absolute slope sensitivity, but just has contrary sign.In the parts of end mirror 6 ', found this element, it has 13.4% theoretical sensitivity.Now, adding by position and the selection of catadioptric mirror in other words of unshowned folding element of concrete laser cavity so realizes,, two parts (being output coupling mirror 5 ' and end mirror 6 ') are arranged side by side, thereby can be combined into integral member or with the resonant element of two optical surfaces, its only once mounting on seat element or substrate.By installing or integrate two mirror elements on the mounting panel with the same material of mirror substrate at or forming described by directly whole in a homogeneous substrate, transition between each material can be avoided, and does not occur thus discrepant expansion when variations in temperature.Like this, a subject matter of the prior art is avoided, and has avoided the different materials with different heat expansion coefficient mutually touch crowded and sometimes irreversibly relatively move.
Fig. 3 using schematic diagram illustrated as resonant element 9 of the present invention such integration in homogeneous substrate and structure with and application in laser structure of the present invention.By being output coupling mirror 5 ' and end mirror 6 ' combination by two initial parts in overall resonance element 9, its optical surface, as interactive of the light with guiding by light path, has been cancelled slope sensitivity.This means, when optimum position is left in the simple inclination of resonant element 9, do not cause the skew in laser medium the 2 ' locational zlasing mode.Zlasing mode is still always perpendicular to two surfaces of the resonant element 9 tilting, and then changed the posture of coupling output light, as available above-mentioned ABCDEF method quantitatively calculates.But according to the present invention, also other component combination of laser resonator can be become to a resonant element 9, for example two minute surface also can limit or replace an end mirror and a catadioptric mirror, or can combine a minute surface and laser medium 2 ', thereby a side of laser medium 2 ' defines optical transmission reflecting surface.
By this be located in light path SG and have as two minute surfaces of two optical surfaces or the resonant element 9 of a minute surface and an optical transmission face, can change the laser resonator that 20cm length at least is especially greater than the light path of 50cm length that has of the prior art according to the present invention, and then change corresponding laser structure, at this, be specially adapted to the pulse repetition frequency of megahertz level, be particularly useful for the pulse repetition frequency of 1-120 megahertz range.Now so interfix association and can jointly adjusting in light path of optical surface,, it substantially obtains the identical impact on light path guiding when tilting with error angle, but there is contrary sign, thereby realized at least 50% especially higher than the more than 75% or 90% phase counter-bonification to heeling error about being offset responsive datum mark.Such datum mark can be for example another aperture in the plane of incidence, output coupling mirror, transmission optical element or the resonator of laser medium.Resonant element 9 can be arranged on the base member or substrate with another optical element at least.
Fig. 4 shows the schematic diagram of the first embodiment 9 of resonant element of the present invention, and this resonant element has whole homogeneous substrate material, is formed with the first and second minute surfaces, as optical surface on baseplate material.Due to Construction integration on common carrier substrate, the association and can jointly being adjusted in light path by the adjustable installing member of this resonant element 9 of unshowned carrying so two faces interfix.As suitable material, for example can use glass or (glass) pottery, also can use metal, wherein minute surface is realized by simple moulding, but also can realize by applying reflectance coating.
Except the baseplate material by homogeneous forms, resonant element 9 of the present invention can also be comprised of independent part, by the different piece of same material or expansion character enough the different piece of similar material form, therefore between different materials, do not exist transition or transition very little, or described part has such material, only differ very little expansion, therefore, because the stress that variations in temperature or pressure change or occur as aging effect because of other variation does not cause skew or the cracking between part.Several such examples have been shown in Fig. 5 and Fig. 6.
Fig. 5 shows the schematic diagram of the second embodiment 9 ' of resonant element of the present invention, and this resonant element has the optical surface structure similar to the first embodiment.But two optical surfaces are here respectively formed on part 9b separately and 9c, the described part separating is arranged on a common supporting member 9a.Specifically, part 9b has radius of curvature, and another part 9c is equipped with level crossing.Part 9b and 9c and supporting member 9a preferably consist of material or the homogeneous material with essentially identical hot expansibility, for example, glass or pottery, consist of.So part 9b and 9c and supporting member 9a after relative calibration direction in accordance with regulations by being mutually permanently connected, especially by light contact, diffusion bond, chemokinesis in conjunction with, gluing, bonding or welding.Glass substrate can carry out preprocessing according to very accurate angle, therefore can guarantee the accurate preprocessing according to angle block gauge definite value.
Fig. 6 shows the 3rd embodiment 9 of resonant element of the present invention ", here, two minute surfaces have identical radius of curvature and are configured to identical part 9b form.Two part 9b are so placed in supporting member 9d above, and the optical axis of two minute surfaces is orientated mutually at an angle.For this reason, supporting member 9d so forms, for the placed side of the bottom surface separately of two part 9b mutually at an angle.This angle can pre-determine and accurately set up by the glass blocks that grinding forms supporting member 9d according to ABCDEF form.
Fig. 7 shows the 4th embodiment 9 of resonant element of the present invention " ' schematic diagram, in the case, supporting member 9d is formed with placed side at an angle according to the mode identical with Fig. 6, and the part 9b laying and 9c are corresponding to part shown in Fig. 5.For this reason, the minute surface of the minute surface of a curved surface and a plane combines layout mutually at an angle, and, part 9c because of its moulding relatively the bottom surface of part 9c there is a surface normal angle.Owing to having occurred thus the degree of freedom, so can realize the resonant element 9 of a lot of special couplings " '.
Fig. 8 is exemplified with the slope sensitivity of the catadioptric mirror of the first embodiment of the laser resonator for example shown in Fig. 2.Left side longitudinal axis representation unit be the pattern radius of millimeter, the relative tilt sensitivity (unit %) of the catadioptric mirror that the right side longitudinal axis is illustrated in (imagination) when the some z inclination (mm) of resonator.In the case, resonator is not illustrated: z=0 is corresponding to output coupling mirror 5 ', and z=2000mm is corresponding to end mirror 6 '.At position z=1000mm, the laser medium 2 ' that has a radius of curvature 1600mm is total thermal lens of f_thl=800mm in other words.Relative tilt sensitivity is from the axle offset with respect to the zlasing mode when (imagination) catadioptric mirror tilts 100 μ rad at same position at optical axis laser medium 2 ' position, laser resonator self pattern.The extremity piece of resonant element has the slope sensitivity of little 2 times, because different from folded piece, extremity piece only reflects once in each circulation.Pattern radius now draws with solid line, and resonator slope sensitivity draws with dotted line.The position of parts is remembered by solid little collimation mark, and hollow little collimation mark note for their slope sensitivity.
Fig. 9 similar to Fig. 8 depending on there is shown patterns of change process and the slope sensitivity for the example of the second resonator,, the left side longitudinal axis also represents pattern radius (unit millimeter), and the right side longitudinal axis represents the relative tilt sensitivity (unit %) of resonant element when the position of resonator z tilts (millimeter).Resonator is not illustrated at this.This resonator has respectively two planar end mirrors in both cases, as the first element and last element, between as overall three element #3 be provided with the mirror of a radius of curvature 300mm, as a whole a radius of curvature 500mm of the 9th element # 9 mirror and as a whole a radius of curvature 400mm of the 15 element # 15 mirror and permitted multilevel catadioptric mirror.The thickness of laser medium used is 2mm, and laser medium is directly placed in the first element.As we can see from the figure, in this arrangement form, the catadioptric mirror of plane of arranging as the second element # 2 shows+36.6% relative tilt sensitivity, as the catadioptric mirror of curved surface of the 9th element # 9, has-36.6% relative tilt sensitivity.These two mirrors arrangement form arranged side by side and that relatively install has immovably obtained the almost slope sensitivity compensation of the best, thereby formed element does not almost show slope sensitivity.
Figure 10 a-b shows the schematic diagram of a part for laser structure of the present invention, wherein, described at least two optical surfaces are formed and are so arranged by two different pips of a common curved surface, that is, described optical surface in the circulation of each resonator respectively at least twice with the light reciprocation guiding by light path.In most cases, two optical surfaces form with format surface independently, are and have the optical property that can distinguish as the surperficial form of albedo, radius of curvature or surface normal orientation, are especially formed with discontinuous surface configuration tendency.But as another possibility, also can be by adopting the surface of continuous bend according to the present invention with two of this surface different pips or echo area.Functional local division of reciprocation during by the double several reciprocation by with identity element only of generally realizing by discrete surface in the case, obtains.Not having the identity element of discrete surface therefore will repeatedly to be utilized, at this, is separated in coherent lip-deep interactive position.Therefore, a unique curved surface obtains two secondary reflections for each single resonance device process, and wherein slope sensitivity similarly has respectively again contrary symbol with describing before, and generally at least the overwhelming majority compensated, but may be compensated up to 100% ground.
The difference of Figure 10 a and Figure 10 b is only the spatial attitude of parts, and has essentially identical order.In both cases, all obtained such order: the distance f that pass through, reflection on the curved surface of the radius of curvature R=f*2 of resonant element 10, another distance f that will pass through, the catadioptric mirror 6 of plane ", reflect on another distance f that will pass through, reflection on another position of the curved surface of radius of curvature R=f*2 again, another distance f that will pass through, another element at planar end mirror 6 ' or resonant element.This structure can be used as one almost the extremity piece of any resonant element device install flexibly, result, has extended chamber.Two level crossings 6 ', 6 of Figure 10 b " one of or both for example can be configured to semiconductor saturable mirror (SESAM).The outstanding advantages of the mirror of this structure is when curved surface tilts, on end mirror, to occur light beam parallel offset.But laser conditions always remains unchanged, so laser power is not affected.This structure now not necessarily must be placed on resonator termination.By this prolongation of resonator, be extended the circulation timei for a pulse in resonator, and then improved the pulse energy for power.
Only show these examples in the diagram and for laser structure of the present invention is described, therefore there is no accurately and proportionally to represent distance or the angle of dimension scale, parts.
Claims (32)
1. a laser structure, this laser structure at least comprises:
Laser medium (2,2 '), it is for generation of Laser emission;
Laser resonator, it has the light path (SG) that length is at least 20 centimetres and has at least one end mirror (6 ');
Wherein, the described light path (SG) in described laser resonator consists of free space optical elements at least in part,
This laser structure is characterised in that, comprises the resonant element (9,9 '; 9 being arranged in described light path ", 9 " '), this resonant element has at least two optical surfaces; as carrying out mutual surface with the light guiding by described light path (SG), and
Wherein, described at least two optical surfaces are rigidly connected to each other and are together arranged in described light path (SG), thereby have realized the mutual compensation of heeling error.
2. laser structure according to claim 1, is characterized in that, described laser structure for generation of or amplify femtosecond pulse or picopulse.
3. laser structure according to claim 1, is characterized in that, the length of described light path (SG) is greater than 50 centimetres.
4. laser structure according to claim 1, is characterized in that, described at least two optical surfaces separate.
5. laser structure according to claim 1, it is characterized in that, described at least two optical surfaces are according to they are substantially obtained the identical guiding function of described light path (SG) when tilting with error angle but the mode that but symbol is contrary is rigidly connected to each other and is together arranged in described light path (SG).
6. laser structure according to claim 1, is characterized in that, described at least two optical surfaces can together regulate.
7. laser structure according to claim 1, is characterized in that, described mutual compensation reaches at least 50% about being offset responsive datum mark.
8. laser structure according to claim 1, is characterized in that, described mutual compensation reaches more than 75% about being offset responsive datum mark.
9. laser structure according to claim 1, it is characterized in that, described at least two optical surfaces are respectively formed at part (9b separately, 9c), described part is arranged on public supporting member (9a, 9d) upper, wherein, described optical surface has identical or different optical property.
10. laser structure according to claim 9, is characterized in that, described part (9b, 9c) and described supporting member (9a, 9d) consist of the material with essentially identical thermal expansion behavior, or consist of identical baseplate material.
11. laser structures according to claim 10, is characterized in that, described part (9b, 9c) and described supporting member (9a, 9d) consist of the baseplate material with identical thermal coefficient of expansion.
12. laser structures according to claim 10, is characterized in that, described part (9b, 9c) and described supporting member (9a, 9d) consist of glass or pottery.
13. according to the laser structure described in claim 9 or 10, it is characterized in that, described part (9b, 9c) and described supporting member (9a, 9d) firmly connect each other.
14. laser structures according to claim 13, is characterized in that, described part (9b, 9c) and described supporting member (9a, 9d) engage, bond by optics contact, diffusion bond, chemokinesis or welding firmly connects each other.
15. laser structures according to claim 1, is characterized in that, described at least two optical surfaces are integrally formed on public supporting substrates.
16. laser structures according to claim 1, is characterized in that, described resonant element (9,9 ', 9 ", 9 " ') be arranged on the base member with another optical element at least.
17. laser structures according to claim 16, is characterized in that, described resonant element (9,9 ', 9 ", 9 " ') be arranged on substrate.
18. laser structures according to claim 1, it is characterized in that, described at least two optical surfaces consist of two different pips of public curved surface, and be arranged to, described in making, at least two optical surfaces difference at least twice in each resonator circulation is carried out with the light guiding by described light path (SG) alternately.
19. laser structures according to claim 1, is characterized in that, described at least two optical surfaces are realized by described end mirror (6 ') and catadioptric mirror.
20. laser structures according to claim 1, is characterized in that, described at least two optical surfaces show as two minute surfaces with identical or different radius of curvature.
21. laser structures according to claim 1, is characterized in that, the optical axis of described at least two optical surfaces is angularly orientated mutually.
22. laser structures according to claim 1, is characterized in that, one in described at least two optical surfaces has transmissison characteristic.
23. laser structures according to claim 22, is characterized in that, a side of described laser medium (2 ') or a side that is positioned at the output coupling mirror (5 ') in described laser medium (2 ') downstream have transmissison characteristic.
24. laser structures according to claim 1, is characterized in that, this laser structure is designed to produce Mode Coupling.
25. laser structures according to claim 1, is characterized in that, this laser structure is designed to recoverable amplifier.
26. laser structures according to claim 1, is characterized in that, this laser structure is designed to the pulse repetition frequency in megahertz range.
27. laser structures according to claim 26, is characterized in that, this laser structure is designed to the pulse repetition frequency in 1-120 megahertz range.
28. 1 kinds for be arranged according to the resonant element in the light path (SG) of the laser resonator of the laser structure described in the claims any one (9,9 ', 9 ", 9 " ', 10), this resonant element comprises:
The first optical surface, it is as carrying out mutual surface with the light guiding by described light path (SG);
Adjustable installing component, it has at least base member of another optical element for being connected to;
This resonant element is characterised in that, comprise that at least one second optical surface is as carrying out mutual surface with the light guiding by described light path (SG), wherein, the first optical surface and the second optical surface are rigidly connected to each other and can to the identical guiding function of described light path (SG) mode that still but symbol is contrary, by described adjustable installing component, be together arranged in described light path (SG) according to they are substantially obtained when tilting with error angle, thereby have realized the mutual compensation of heeling error.
29. resonant elements according to claim 28, is characterized in that, the second optical surface is the optical surface separating with the first optical surface.
30. resonant elements according to claim 28, is characterized in that, the first optical surface and the second optical surface can together regulate.
31. resonant elements according to claim 28, is characterized in that, described mutual compensation reaches at least 50% about being offset responsive datum mark.
32. resonant elements according to claim 28, is characterized in that, described mutual compensation reaches more than 75% about being offset responsive datum mark.
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| EP09167189.1 | 2009-08-04 | ||
| US12/535,044 US7991038B2 (en) | 2009-08-04 | 2009-08-04 | Laser arrangement and resonator element for such a laser arrangement |
| US12/535,044 | 2009-08-04 | ||
| EP09167189A EP2284965A1 (en) | 2009-08-04 | 2009-08-04 | Laser resonator with tilt insensitive mirrors |
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| CN101989728B true CN101989728B (en) | 2014-04-02 |
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| CN101399426A (en) * | 2007-09-28 | 2009-04-01 | 富士胶片株式会社 | Mode-locked solid-state laser apparatus |
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| ATE488891T1 (en) * | 2004-06-30 | 2010-12-15 | Pgt Photonics Spa | TUNABLE LASER WITH THERMALLY CONTROLLED EXTERNAL RESONATOR |
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| US4099141A (en) * | 1975-04-03 | 1978-07-04 | Compagnie Industrielle Des Lasers | Laser generator |
| US5163059A (en) * | 1991-05-09 | 1992-11-10 | Coherent, Inc. | Mode-locked laser using non-linear self-focusing element |
| CN1816951A (en) * | 2003-05-07 | 2006-08-09 | 联邦国家单一企业科学及工业公司瓦维洛夫光学研究所 | Laser with mixed non-stable annular resonator |
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