CN102034683B - Laser repairing stand - Google Patents
Laser repairing stand Download PDFInfo
- Publication number
- CN102034683B CN102034683B CN 201010513992 CN201010513992A CN102034683B CN 102034683 B CN102034683 B CN 102034683B CN 201010513992 CN201010513992 CN 201010513992 CN 201010513992 A CN201010513992 A CN 201010513992A CN 102034683 B CN102034683 B CN 102034683B
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- laser repairing
- probe
- stand
- base
- repairing
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- Measurement Of Resistance Or Impedance (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
The invention discloses a laser repairing stand which is suitable for repairing an active element array substrate. The active element array substrate is provided with at least one testing line, wherein the testing line is provided with at least one pair of testing pads which are electrically connected with each other. The laser repairing stand comprises a carrying table, a laser repairing device and a resistance measurement device, wherein the carrying table is suitable for carrying the active element array substrate; the laser repairing device is suitable for firstly cutting off a part of region of the testing line to electrically insulate the pair of testing pads from each other and then forming a repair line to electrically reconnect the pair of testing pads; and the resistance measurement device is arranged on the laser repairing device and provided with at least one probe which is suitable to contact the pair of testing pads to measure the resistance of the repairing line. The laser repairing stand can reduce the probability of allowing the active element array substrate which is failed in repairing due to abnormal condition of the stand to flow to the next section of machining, so the probability of wasting manpower and material resources at the next section of machining can be reduced.
Description
Technical field
The invention relates to a kind of laser repairing stand, and particularly relevant for a kind of laser repairing stand with resistance measuring equipment.
Background technology
Generally in the process of making active component array base board, can carry out audit program detecting defective (defect) place, and this defective (defect) is carried out laser preparing (laser repairing) processing.Generally speaking, laser chemical vapor deposition processing (laser CVD process) is one of common laser preparing processing.Yet, add man-hour in carrying out laser preparing, often because of the skew of the spare part position in the laser repairing stand or damage, so that laser beam axis is offset or energy changes, and then cause repairing unsuccessfully.For example, process the energy of employed laser when unstable when laser chemical vapor deposition, it possibly can't reach the purpose of repairing at patch cord that fault location forms, and then causes repairing baulk.What need special instruction is, the repairing of this type unsuccessfully can't be detected in real time by the personnel of working online, detect the resistance that measures patch cord in board and need that the active component array base board after this repairing is moved to another, can judge just whether the defective on the active component array base board has been repaired fully.But when carrying out the action of above-mentioned measurement resistance, many active component array base boards that unusually cause repairing failure because of laser repairing stand afterflow cause manpower that back segment processes and the waste of material to back segment processing.
Hold above-mentioned, how in laser preparing processing, monitoring laser is repaired the machine condition of board in real time, so that the unusual problem of laser repairing stand machine condition can be found in time, and the continuous probability that is left in the back segment processing of failed active component array base board is repaired in reduction, is one of problem of developer institute wish solution in fact.
Summary of the invention
The invention provides a kind of laser repairing stand, it has the resistance measuring equipment to monitor in real time self board situation.
The invention provides a kind of laser repairing stand, it is suitable for repairing active component array base board, and active component array base board has at least one measurement circuit, and measurement circuit has at least one pair of testing cushion that is electrically connected to each other.Laser repairing stand comprises microscope carrier, laser repairing device and resistance measuring equipment.Microscope carrier is suitable for carrying active component array base board.Laser repairing device is suitable for cutting off first the subregion of measurement circuit so that a pair of testing cushion is electrically insulated each other, forms patch cord again so that this is electrically connected again to testing cushion.The resistance measuring equipment is disposed on the laser repairing device.The resistance measuring equipment has at least one probe, and probe is suitable for this testing cushion being contacted to measure the resistance of patch cord.
In one embodiment of this invention, aforesaid resistance measuring equipment comprises drive unit, moves up and down and drive unit is connected to drive probe with probe.
In one embodiment of this invention, aforesaid probe comprises base and probe base.Base is connected with drive unit.Probe base is assembled on the base, and probe base has the pair of conductive terminal.
In one embodiment of this invention, the spacing of aforesaid testing cushion is identical in fact with the spacing of pair of conductive terminal.
In one embodiment of this invention, aforesaid probe base is detachable probe base.
In one embodiment of this invention, the spacing of aforesaid conducting terminal is capable of regulating.
In one embodiment of this invention, aforesaid probe base is the rotary type probe base, and the rotary type probe base rotates with respect to base.
In one embodiment of this invention, carry out respectively the measurement of resistance after aforesaid resistance measuring equipment formed with patch cord before patch cord forms.
Laser repairing stand of the present invention has the function of Real Time Monitoring self machine condition, therefore can reduce and unusually repairs failed active component array base board because of the machine condition and flow to the probability of back segment in processing, and then reduce the probability that manpower that back segment processes and material are wasted.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the laser repairing stand schematic diagram of one embodiment of the invention;
Fig. 2 A, Fig. 2 B, Fig. 2 C and Fig. 2 D are the measurement circuit schematic diagram of one embodiment of the invention;
Fig. 3 is the conducting terminal schematic diagram of one embodiment of the invention;
Fig. 4 A, Fig. 4 B are the probe base schematic diagram of one embodiment of the invention;
Wherein, Reference numeral
100: laser repairing stand
110: microscope carrier
120: laser repairing device
130: the resistance measuring equipment
132: probe
132a: base
132b: probe base
132c: conducting terminal
132d: adjust screw
134: drive unit
134a: stepper motor
134b: control unit
136: ammeter
200: active component array base board
210: measurement circuit
212: testing cushion
214: connection line
216: patch cord
Pc, Pt: spacing
Embodiment
Below in conjunction with the drawings and specific embodiments technical solution of the present invention being described in detail, further understanding purpose of the present invention, scheme and effect, but is not the restriction as claims protection range of the present invention.
Fig. 1 is the laser repairing stand schematic diagram of one embodiment of the invention.Please refer to Fig. 1, the laser repairing stand 100 of present embodiment can be used to repair active component array base board 200, and active component array base board 200 for example is thin-film transistor array base-plate (Thin Film Transistor Array Substrate, TFT ArraySubstrate).Yet the present invention does not limit the kind of active component array base board 200.In the present embodiment, laser repairing stand 100 comprises microscope carrier 110, laser repairing device 120 and resistance measuring equipment 130, and wherein microscope carrier 110 can be used to carry active component array base board 200, and resistance measuring equipment 130 is disposed on the laser repairing device 120.
In the present embodiment, resistance measuring equipment 130 can comprise at least one probe 132 and drive unit 134.The probe 132 of present embodiment can comprise base 132a and probe base 132b, and this probe base 132b has pair of conductive terminal 132c, shown in the bottom-right diagram of Fig. 1.In the present embodiment, drive unit 134 can comprise stepper motor 134a and control unit 134b (for example computer), and wherein stepper motor 134a can be controlled by control unit 134b.The probe base 132b of present embodiment is connected with stepper motor 134a, therefore moves up and down by the controlled manufacturing probe 132 of control unit 134b, as shown in fig. 1.The probe 132 of present embodiment can further be electrically connected to reach the function that measures resistance with ammeter 136.
Fig. 2 A is the measurement circuit schematic diagram of one embodiment of the invention.Please first with reference to Fig. 2 A, in the present embodiment, active component array base board 200 to be repaired has at least one measurement circuit 210.The measurement circuit 210 of present embodiment comprises at least one pair of testing cushion 212 and connection line 214, and wherein, this utilizes connection line 214 to be electrically connected to each other to testing cushion 212, as shown in Fig. 2 A.
In the present embodiment, the spacing Pc of conducting terminal 132c is identical in fact with the spacing Pt of testing cushion 212, as shown in Fig. 2 B.Therefore, whole probe 132 is moved down the control unit 134b of the drive unit 134 of present embodiment so that conducting terminal 132c and testing cushion 212 contact to measure the resistance R1 of measurement circuit 210, as shown in Fig. 2 A.Then, utilize the laser repairing device 120 of present embodiment cut off measurement circuits 210 subregion (for example subregion of connection line 214) so that testing cushion 210 be electrically insulated each other, as shown in Fig. 2 C.Then, utilize the laser repairing device 120 of present embodiment to form patch cord 216 so that testing cushion 212 is electrically connected again.Afterwards, the resistance R2 of the measurement circuit 210 after utilizing conducting terminal 132c and testing cushion 212 contacts to measure repairing is as shown in Fig. 2 D.The resistance R1 that the resistance R2 of the measurement circuit 210 after repairing is deducted proper testing circuit 210 can preresearch estimates goes out the resistance R of patch cord 216.Utilize the resistance R of this patch cord 216 of Real Time Monitoring whether normal, whether the mending function of laser repairing stand 100 that can judge present embodiment is normal, and then can reduce because of laser repairing stand 100 board situations and unusually cause repairing the failed active component array base board 200 continuous probability that are left in the back segment processing.
In addition, the conducting terminal 132c of present embodiment can have multiple variation, for example can be the configuration of the difformity shown in a, b among Fig. 3, c, d, e, the f and size, but the present invention is not as limit.
In addition, the probe base 132b of present embodiment can be a detachable probe base.When testing cushion 212 its spacing Pt are changed on the active component array base board to be repaired 200, this probe base 132b can be pulled down, change the spacing Pc of conducting terminal 132c and the probe base 132b identical to the spacing Pt of testing cushion 212, can successfully carry out so that measure the action of patch cord 216 resistance R.So, the invention is not restricted to this, in another embodiment of the present invention, the spacing Pc of the conducting terminal 132c of probe base 132b can adjust (shown in Fig. 4 A) by adjusting screw 132d, so that the spacing Pc of conducting terminal 132c with identical to the spacing Pt of testing cushion 212, can successfully carry out so that measure the action of the resistance R of patch cord 216.
In an again embodiment of the present invention, probe base 132b also can be a rotary type probe base (shown in Fig. 4 B), this rotary type probe base 132b can rotate with respect to base 132a, this rotary type probe base 132b rotation is rear shown in the upper right side of Fig. 4 B, and the top view of rotary type probe base 132b is shown in the lower right of Fig. 4 B.When the orientation of the testing cushion 212 on the active component array base board to be repaired 200 changes, can make the orientation of conducting terminal 132c consistent with testing cushion 212 orientations rotary type probe base 132b rotation, can successfully carry out so that measure the action of the resistance R of patch cord 216.
In sum, laser repairing stand of the present invention utilizes the resistance measuring equipment on it can monitor in real time whether abnormal of its mending function, and then promotes the repairing yield of laser repairing stand.
Certainly; the present invention also can have other various embodiments; in the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection range of the appended claim of the present invention.
Claims (7)
1. a laser repairing stand is suitable for repairing an active component array base board, and this active component array base board has at least one measurement circuit, and this measurement circuit has at least one pair of testing cushion that is electrically connected to each other, and it is characterized in that, this laser repairing stand comprises:
One microscope carrier is suitable for carrying this active component array base board;
One laser repairing device is suitable for cutting off first the subregion of this measurement circuit so that this is electrically insulated each other to testing cushion, forms a patch cord so that this is electrically connected again to testing cushion again; And
One resistance measuring equipment, be disposed on this laser repairing device, this resistance measuring equipment has at least one probe, this probe is suitable for this testing cushion being contacted to measure the resistance of this patch cord, and this resistance measuring equipment carries out respectively the measurement of resistance after forming with patch cord before patch cord forms.
2. laser repairing stand as claimed in claim 1 is characterized in that, this resistance measuring equipment comprises a drive unit, and this drive unit is connected to drive this probe with this probe and moves up and down.
3. such as claim 2 a described laser repairing stand, it is characterized in that this probe comprises:
One base is connected with this drive unit; And
One probe base is assembled on this base, and this probe base has the pair of conductive terminal.
4. such as claim 3 a described laser repairing stand, it is characterized in that this spacing to testing cushion is identical in fact with this spacing to conducting terminal.
5. such as claim 3 a described laser repairing stand, it is characterized in that this probe base is a detachable probe base.
6. such as claim 3 a described laser repairing stand, it is characterized in that this spacing to conducting terminal is capable of regulating.
7. such as claim 3 a described laser repairing stand, it is characterized in that this probe base is a rotary type probe base, and this rotary type probe base is with respect to this base rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010513992 CN102034683B (en) | 2010-10-14 | 2010-10-14 | Laser repairing stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010513992 CN102034683B (en) | 2010-10-14 | 2010-10-14 | Laser repairing stand |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102034683A CN102034683A (en) | 2011-04-27 |
| CN102034683B true CN102034683B (en) | 2013-03-20 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010513992 Expired - Fee Related CN102034683B (en) | 2010-10-14 | 2010-10-14 | Laser repairing stand |
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| CN (1) | CN102034683B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102608875A (en) * | 2012-03-27 | 2012-07-25 | 深圳市华星光电技术有限公司 | Glass substrate carved number repairing method and glass substrate carved number repairing device based on repairing cabinet |
| US10537027B2 (en) * | 2013-08-02 | 2020-01-14 | Orbotech Ltd. | Method producing a conductive path on a substrate |
| CN105420694A (en) * | 2014-08-04 | 2016-03-23 | 上海和辉光电有限公司 | Monitoring device and method for laser chemical vapor deposition (LCVD) line growing and film forming repairing quality |
| SG10201702885PA (en) * | 2016-04-20 | 2017-11-29 | Lam Res Corp | Apparatus for measuring condition of electroplating cell components and associated methods |
| CN108598094B (en) | 2018-05-25 | 2020-09-11 | 友达光电（昆山）有限公司 | Display device and repairing detection method of thin film transistor of display device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171709A (en) * | 1988-07-25 | 1992-12-15 | International Business Machines Corporation | Laser methods for circuit repair on integrated circuits and substrates |
| CN101471272A (en) * | 2007-12-29 | 2009-07-01 | 财团法人工业技术研究院 | Automatic flaw detection device and method for substrate laser repairing device |
| CN101598752A (en) * | 2009-05-14 | 2009-12-09 | 福建华映显示科技有限公司 | The real-time detection method of defect repairing of thin film transistor array circuit |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW312850B (en) * | 1996-06-28 | 1997-08-11 | Vanguard Int Semiconduct Corp | Manufacturing method of field effect device with narrow gate length |
| KR20100106748A (en) * | 2009-03-24 | 2010-10-04 | 삼성전자주식회사 | Apparatus for repairing defect pixel in flat display panel |
-
2010
- 2010-10-14 CN CN 201010513992 patent/CN102034683B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171709A (en) * | 1988-07-25 | 1992-12-15 | International Business Machines Corporation | Laser methods for circuit repair on integrated circuits and substrates |
| CN101471272A (en) * | 2007-12-29 | 2009-07-01 | 财团法人工业技术研究院 | Automatic flaw detection device and method for substrate laser repairing device |
| CN101598752A (en) * | 2009-05-14 | 2009-12-09 | 福建华映显示科技有限公司 | The real-time detection method of defect repairing of thin film transistor array circuit |
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| Publication number | Publication date |
|---|---|
| CN102034683A (en) | 2011-04-27 |
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