CN102162938A - Optical structure for improving output frequency of pulsed laser - Google Patents

Optical structure for improving output frequency of pulsed laser Download PDF

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Publication number
CN102162938A
CN102162938A CN 201110093670 CN201110093670A CN102162938A CN 102162938 A CN102162938 A CN 102162938A CN 201110093670 CN201110093670 CN 201110093670 CN 201110093670 A CN201110093670 A CN 201110093670A CN 102162938 A CN102162938 A CN 102162938A
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China
Prior art keywords
wave plate
pulsed laser
polarization splitting
adjustable wave
output frequency
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CN 201110093670
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CN102162938B (en
Inventor
吴砺
任策
林江铭
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Photop Technologies Inc
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Photop Technologies Inc
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Abstract

The invention discloses an optical structure for improving the output frequency of a pulsed laser. The optical structure comprises two polarization beam splitting (PBS) prisms, two tunable wave plates made of electro-optic crystals or magneto-optic crystals, and two cavity mirrors. An original pulsed laser beam is introduced to the cavity of the above optical structure by an electro-optical switch, and the laser output energy can be controlled by adjusting the waveform of the electro-optic wave plate or the magneto-optic wave plate at the rotation time so as to improve the output frequency of the pulsed laser and reduce the single-pulse energy without influencing the average power of the original pulse. The output new pulses are of the same sequence in the space.

Description

A kind of optical texture that improves the pulsed laser output frequency
Technical field
The present invention relates to laser technology field, relate in particular to a kind of optical texture that improves the pulsed laser output frequency.
Background technology
Ultra-Violet Laser success be applied in field of microelectronic fabrication, as the check of wafer, microcircuit etc.An advantage of ultraviolet light is that it can realize very high spatial resolution.In commercial Application, the average power of Ultra-Violet Laser is very important, and output is directly proportional with average power; And high-peak power is harmful to application, and it causes the damage of device easily.Therefore, continuous Ultra-Violet Laser just becomes people's a selection.
Yet Ultra-Violet Laser generally is that the method by frequency transformation obtains, and the nonlinear frequency transformation efficient of continuous light is low-down, will expect that therefore continuous Ultra-Violet Laser just needs huge fundamental frequency luminous power.This causes the structure of laser instrument very complicated, and costs an arm and a leg, and is unfavorable for the reduction of industrial cost and popularizing of application.The pulsed ultraviolet laser device is another selection of commercial Application, and its frequency transformation efficient is higher, and structure is simple relatively, and cost is also much lower, but it has the shortcoming of above-mentioned easy damage device.Therefore, need a kind of relatively low peak power that has, the ultraviolet laser of high-average power is to satisfy the demand of commercial Application.
A kind of method that reduces the ultraviolet light peak power is to utilize the pulse segmenting device that the primary light pulse with high-peak power is divided into two or more new pulses that have than low peak power, improves pulsed frequency under the situation that does not reduce average power.
August 14 calendar year 2001, the disclosed patent No. was US6,275, the said method that 514 United States Patent (USP) " Laser repetition rate multiplier (laser repetition rate multiplier) " is used, this patent is plated the deielectric-coating with different transmitances on a substrate, make laser pulse when the diverse location by substrate, be divided into the different new pulse of energy, these new pulses are not on same spatial sequence, and the new pulse that needs a bundling device that diverse location is separated is closed bundle and is the pulse of same sequence.This method not only has very high requirement to plated film, and the use of bundling device increases the loss of device, the average power of reduction laser pulse.
Summary of the invention
The object of the present invention is to provide a kind of optical texture that improves the pulsed laser output frequency, by regulating adjustable wave plate rotation time Waveform Control laser output energy, thereby improve the frequency of pulse laser output, and under the prerequisite of not losing laser original pulse average power, reduce its peak power.
For achieving the above object, technical scheme proposed by the invention is: a kind of optical texture that improves the pulsed laser output frequency, it is characterized in that, and comprising: two polarization splitting prisms: first polarization splitting prism 1 and second polarization splitting prism 2; Two adjustable wave plates: the first adjustable wave plate 3 and the second adjustable wave plate 4; Two chamber mirrors: the first chamber mirror 5 and the second chamber mirror 6; The described first adjustable wave plate 3 is between first polarization splitting prism 1 and second polarization splitting prism 2; The described second adjustable wave plate 4 is between second polarization splitting prism 2 and the first chamber mirror 5; The described second chamber mirror 6 is positioned on the reflected light path of first polarization splitting prism 1.
Further, the light path (L1+L2) between described first adjustable wave plate 3 to the first chamber mirrors 5 is greater than the time width of original pulse.
Preferably, the described first adjustable wave plate 3 and the second adjustable wave plate 4 are electro-optic crystal or magneto-optical crystal.
Preferably, the described first chamber mirror 5 and the second chamber mirror 6 are the flat-concave cavity mirror.
Beneficial effect of the present invention: this optical texture has reduced single pulse energy under the situation of not losing the original pulse average power, improved pulsed frequency; And the new pulse that produces through above-mentioned optical texture spatially becomes same sequence.
Description of drawings
Fig. 1 is the prior art constructions principle schematic;
Fig. 2 is the structure and the light path synoptic diagram of the embodiment of the invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
Be illustrated in figure 2 as a specific embodiment of the present invention, a kind of optical texture that improves the pulsed laser output frequency comprises two polarization splitting prisms (PBS): first polarization splitting prism 1 and second polarization splitting prism 2; Two adjustable wave plates: the first adjustable wave plate 3 and the second adjustable wave plate 4; Two chamber mirrors: the first chamber mirror 5 and the second chamber mirror 6.Two adjustable wave plates 3,4 can be electro-optic crystal, also can be magneto-optical crystal; Two chamber mirrors 5,6 can be the flat-concave cavity mirror.
Its course of work is as follows, and when original pulse laser a entered into this optical texture through first polarization splitting prism 1, the first adjustable wave plate 3 was in the state of λ/2 wave plates, and after the first adjustable wave plate 3 was passed through in this pulse, this wave plate was converted to the full-wave plate state.Pulse is reflected after the second adjustable wave plate 4 arrives the first chamber mirror 5 through second polarization splitting prism 2, regulate the phase delay degree of the second adjustable wave plate 4, make the original pulse polarization state of returning change through 5 total reflections of the first chamber mirror, make its part energy transmission cross 2 outputs of second polarization splitting prism, become new pulse b, another part light is in the full-wave plate state by the reflection of second polarization splitting prism 2 through the first adjustable wave plate 3(first adjustable wave plate 3 this moment) back enters the second chamber mirror, 6, the second chamber mirrors 6 by 1 total reflection of first Amici prism and this part light total reflection returned in the original optical path again.So, original pulse will vibrate between the first chamber mirror 5 and the second chamber mirror 6, regulate the phase delay degree of the second adjustable wave plate, make above-mentioned original pulse once export by second polarization splitting prism 2 with regard to some energy in every vibration, become new pulse b.For preventing energy loss, light path (L1+L2) between first adjustable wave plate 3 to the first chamber mirrors 5 is set greater than the time width of original pulse a.
The present invention adopts electrooptical switching that original pulse laser is incorporated in the above-mentioned optical texture chamber, by regulating electric light wave plate or magneto-optic wave plate rotation time Waveform Control laser output energy, thereby improve the frequency of pulse laser output, and reduced single pulse energy under the situation of the average power of not losing original pulse, the new pulse of output spatially becomes same sequence.
Although specifically show and introduced the present invention in conjunction with preferred embodiment; but the those skilled in the art should be understood that; in the spirit and scope of the present invention that do not break away from appended claims and limited; in the form and details the present invention is made various variations, be protection scope of the present invention.

Claims (4)

1. an optical texture that improves the pulsed laser output frequency is characterized in that, comprising: two polarization splitting prisms: first polarization splitting prism and second polarization splitting prism; Two adjustable wave plates: the first adjustable wave plate and the second adjustable wave plate; Two chamber mirrors: the first chamber mirror and the second chamber mirror; The described first adjustable wave plate is between first polarization splitting prism and second polarization splitting prism; The described second adjustable wave plate is between second polarization splitting prism and the first chamber mirror; The described second chamber mirror is positioned on the reflected light path of first polarization splitting prism.
2. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1 is characterized in that: the described first adjustable wave plate is to the time width of the light path between the first chamber mirror greater than original pulse.
3. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1 is characterized in that: the described first adjustable wave plate and the second adjustable wave plate are electro-optic crystal or magneto-optical crystal.
4. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1 is characterized in that: the described first chamber mirror and the second chamber mirror are the flat-concave cavity mirror.
CN 201110093670 2011-04-14 2011-04-14 Optical structure for improving output frequency of pulsed laser Active CN102162938B (en)

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CN102162938B CN102162938B (en) 2013-01-30

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427316A (en) * 2013-08-22 2013-12-04 中国科学院上海光学精密机械研究所 Laser pulse stretching device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5327338A (en) * 1990-01-31 1994-07-05 Etec Systems, Inc. Scanning laser lithography system alignment apparatus
CN1310871A (en) * 1998-08-20 2001-08-29 奥宝科技有限公司 Laser repetition rate multiplier
US6689985B2 (en) * 2001-01-17 2004-02-10 Orbotech, Ltd. Laser drill for use in electrical circuit fabrication
US7483146B1 (en) * 2006-01-19 2009-01-27 Kla-Tencor Technologies Corp. Systems configured to provide illumination of a specimen or to inspect a specimen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5327338A (en) * 1990-01-31 1994-07-05 Etec Systems, Inc. Scanning laser lithography system alignment apparatus
CN1310871A (en) * 1998-08-20 2001-08-29 奥宝科技有限公司 Laser repetition rate multiplier
US6689985B2 (en) * 2001-01-17 2004-02-10 Orbotech, Ltd. Laser drill for use in electrical circuit fabrication
US7483146B1 (en) * 2006-01-19 2009-01-27 Kla-Tencor Technologies Corp. Systems configured to provide illumination of a specimen or to inspect a specimen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427316A (en) * 2013-08-22 2013-12-04 中国科学院上海光学精密机械研究所 Laser pulse stretching device
CN103427316B (en) * 2013-08-22 2015-09-16 中国科学院上海光学精密机械研究所 Laser pulse stretching device

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