CN102253437A - Preparation method of micro lens array - Google Patents
Preparation method of micro lens array Download PDFInfo
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- CN102253437A CN102253437A CN2011102081048A CN201110208104A CN102253437A CN 102253437 A CN102253437 A CN 102253437A CN 2011102081048 A CN2011102081048 A CN 2011102081048A CN 201110208104 A CN201110208104 A CN 201110208104A CN 102253437 A CN102253437 A CN 102253437A
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- preparation
- gluing equipment
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- microlens array
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Abstract
The invention relates to a preparation method of a micro lens array, and in particular relates to a preparation method of a micro lens array by using a jet dispensing technology. The preparation method specifically comprises the following steps: placing a substrate material on a jet dispensing device worktable; injecting a UV glue in the jet dispensing device, wherein a micro drop array is formed on a surface of the substrate material by the jet dispensing device; and curing the micro drop array through the UV-irradiation, forming a bump array with a definite shape on the substrate material surface, wherein the bump array is the micro lens array. The micro lens array is prepared by using the jet dispensing technology. The preparation method is simple for operation, short in period, high in efficiency, and low in preparation cost, is more suitable for preparing a large-area micro lens array, and the prepared micro lens array has a complete shape and good performance.
Description
Technical field
The present invention relates to a kind of preparation method of microlens array, be specifically related to a kind of preparation method who utilizes the microlens array that sprays dispensing technology.
Background technology
Micro lens array is the array that micron-sized lens are formed by clear aperature and relief depth, it not only has the basic function such as focusing, imaging of conventional lenses, and have the advantages that unit size is little, integrated level is high, make it can finish the function that the traditional optical element can't be finished, and can constitute many novel optical systems.According to the difference of its optical principle, lenticule can be divided into two kinds basically: based on the refractive microlens array of the refraction theory of light with based on the diffraction microlens array of theory of light diffraction.
Current development along with modern technologies, people require optical element miniaturization, integrated, and microlens array has obtained using widely in optical field as optical element of new generation.In micro-optical systems, it can be used for optical information processing, photometry calculation, light interconnection, light data transmission, the generation of bidimensional pointolite.Also can be used in duplicating machine, image scanning machine, facsimile recorder, camera and the medical sanitary apparatus.
For refractive micro lenses, the method of the making microlens array of having reported at present mainly contains planar technology ion exchange process, fotoceram method, holography method, Fresnel zone lens method, sol-gal process, photoresist fusion method, PMMAX rayed and fusion method, these methods have higher requirement to technology, the manufacturing process relative complex; The secondary of micro lens embark on journey facture respond ion etching method, electron beam lithography method, and laser ablation method, these three kinds of method Production Times are longer, are not suitable for batch making; And for diffraction microlens, its method for making mainly contains: binary optical technique, bundle energy direct writing technology and gray scale mask technique etc., though diffraction microlens making precision is higher, and complex process, cost of manufacture is higher.In sum, respectively there is length the aspects such as technology difficulty, cost of manufacture and fabrication cycle that are produced on that microlens array is present.
Summary of the invention
The problem to be solved in the present invention provides a kind of preparation method of microlens array, and this preparation method has utilized the injection dispensing technology, and is simple to operate, cycle is short, and the efficient height helps the preparation of microlens array more, and the microlens array shape that makes is complete, functional.
In order to achieve the above object, the technical solution used in the present invention is:
A kind of preparation method of microlens array specifically comprises the steps,
Backing material is positioned on the spray site gluing equipment worktable;
Inject UV glue in described spray site gluing equipment, described spray site gluing equipment forms miniature drop array in substrate material surface;
Described miniature drop array is solidified through UV-irradiation, form the salient point array of fixed in shape in described substrate material surface;
Described salient point array is microlens array.
In the such scheme, described method also comprises, described backing material is positioned on the spray site gluing equipment worktable before, backing material is cleaned.
In the such scheme, specifically comprise the steps: (1) of described cleaning uses deionized water rinsing 2 minutes; (2) use acetone rinsing 2 minutes; (3) use alcohol flushing 2 minutes, dry up with blower fan then;
In the such scheme, described spray site gluing equipment forms miniature drop array in substrate material surface, specifically comprise: regulate described spray site gluing equipment point glue parameter, the specking valve of controlling described spray site gluing equipment carries out a glue operation on described backing material, form miniature drop array in described substrate material surface.
In the such scheme, described spray site gluing equipment forms miniature drop array in substrate material surface and also comprises: the specking valve of described spray site gluing equipment is heated to 30 ℃-80 ℃.
In the such scheme, the specking valve heating-up temperature of described spray site gluing equipment preferably can be 55 ℃-60 ℃.
Compared with prior art, the beneficial effect of technical solution of the present invention generation is as follows:
The present invention utilizes the injection dispensing technology to prepare microlens array, and this preparation method is simple to operate, and the cycle is short, the efficient height, and cost of manufacture is cheap, be fit to the preparation of large tracts of land microlens array more, and the microlens array shape that makes is complete, functional.
Description of drawings
The process synoptic diagram of the preparation microlens array that Fig. 1 provides for the embodiment of the invention;
Fig. 2 is the structural representation of the specking valve closed condition of spray site gluing equipment in the embodiment of the invention;
Fig. 3 is the structural representation of the specking opening of valves state of spray site gluing equipment in the embodiment of the invention.
Embodiment
Below in conjunction with drawings and Examples technical solution of the present invention is described in detail.
Embodiment 1:
A kind of preparation method of microlens array comprises the steps:
Step 101 is cleaned substrate material surface, and backing material can be selected materials such as glass, polyester film for use, and the step of cleaning is: 1) use deionized water rinsing 2 minutes; 2) use acetone rinsing 2 minutes; 3) use alcohol flushing 2 minutes, dry up with blower fan then;
Step 102 loads onto UV glue for the spray site gluing equipment;
Step 103, the backing material that cleaning is good are placed on the spray site gluing equipment worktable;
Step 104 is regulated spray site gluing equipment point glue parameter, and such as mandrel movement velocity and array sizes parameter etc., the specking valve of control spray site gluing equipment carries out a glue operation on backing material;
Step 105 obtains required glue lattice array on backing material, be placed under the UV-irradiation and solidify, and promptly obtains required microlens array after curing is finished, and manufacturing process as shown in Figure 1.
Embodiment 2:
A kind of preparation method of microlens array comprises the steps:
Step 101 is cleaned through row substrate material surface, and backing material can be selected materials such as glass, polyester film for use, and the step of cleaning is: 1) use deionized water rinsing 2 minutes; 2) use acetone rinsing 2 minutes; 3) use alcohol flushing 2 minutes, dry up with blower fan then;
Step 102 loads onto UV glue for the spray site colloid system;
Step 103, the backing material that cleaning is good are placed on the spray site gluing equipment worktable;
Step 104 is regulated spray site gluing equipment point glue parameter, such as mandrel movement velocity and array sizes parameter etc., will control the specking valve simultaneously and be heated to 30 ℃, and with the control lens curvature, control specking valve carries out a glue operation on backing material;
Step 105 obtains required glue lattice array on backing material, be placed under the UV-irradiation and solidify, and promptly obtains required microlens array after curing is finished, and manufacturing process as shown in Figure 1.
Embodiment 3:
In the present embodiment, will control the specking valve and be heated to 55 ℃, other steps are identical with embodiment 2.
Embodiment 4:
In the present embodiment, will control the specking valve and be heated to 60 ℃, other steps are identical with embodiment 2.
Embodiment 5:
In the present embodiment, will control the specking valve and be heated to 80 ℃, other steps are identical with embodiment 2.
The principle of work of specking valve is as follows in the spray site colloid system that the embodiment of the invention provides: piezoelectricity specking valve is driven by two piezoelectric actuators 1, and the connection that moves through of these two piezoelectric actuators 1 is sent on the rod 2, thereby makes rod 2 move up and down.Low side at rod 2 has been fixed a ball sealer 3 that the stupalith that resistance to wears is made, the ball sealer sealing thus of the nozzle place of specking valve.When ball sealer 3 is raised, liquid just can flow out from valve port.A work period of specking valve is: as shown in Figure 2, at first mandrel closely contacts with valve seat, and liquid can't flow out, and this moment, the specking valve was a closed condition; As shown in Figure 3, when mandrel is lifted, the gap between liquid filling mandrel and the valve seat, this moment, the specking valve was an opening; When mandrel moves downward fast, mandrel bump valve seat, high viscosity liquid is extruded, and forms a glue point; Then mandrel is lifted again, so goes round and begins again.
The present invention utilizes the injection dispensing technology to prepare microlens array, and this preparation method is simple to operate, and the cycle is short, the efficient height, and cost of manufacture is cheap, be fit to the preparation of large tracts of land microlens array more, and the microlens array shape that makes is complete, functional.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the preparation method of a microlens array is characterized in that, specifically comprises the steps:
Backing material is positioned on the spray site gluing equipment worktable;
Inject UV glue in described spray site gluing equipment, described spray site gluing equipment forms miniature drop array in substrate material surface;
Described miniature drop array is solidified through UV-irradiation, form the salient point array of fixed in shape in described substrate material surface;
Described salient point array is microlens array.
2. the preparation method of microlens array as claimed in claim 1 is characterized in that, described method also comprises, described backing material is positioned on the spray site gluing equipment worktable before, backing material is cleaned.
3. the preparation method of microlens array as claimed in claim 2 is characterized in that, described backing material is cleaned specifically comprises the steps: (1) usefulness deionized water rinsing 2 minutes; (2) use acetone rinsing 2 minutes; (3) use alcohol flushing 2 minutes, dry up with blower fan then.
4. the preparation method of microlens array as claimed in claim 1, it is characterized in that, described spray site gluing equipment forms miniature drop array in substrate material surface, specifically comprise: regulate described spray site gluing equipment point glue parameter, the specking valve of controlling described spray site gluing equipment carries out a glue operation on described backing material, form miniature drop array in described substrate material surface.
5. the preparation method of microlens array as claimed in claim 4 is characterized in that, described spray site gluing equipment forms miniature drop array in substrate material surface and also comprises: the specking valve of described spray site gluing equipment is heated to 30 ℃-80 ℃.
6. the preparation method of microlens array as claimed in claim 5 is characterized in that, the specking valve heating-up temperature of described spray site gluing equipment preferably can be 55 ℃-60 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201110208104 CN102253437B (en) | 2011-07-25 | 2011-07-25 | Preparation method of micro lens array |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110208104 CN102253437B (en) | 2011-07-25 | 2011-07-25 | Preparation method of micro lens array |
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| CN102253437A true CN102253437A (en) | 2011-11-23 |
| CN102253437B CN102253437B (en) | 2013-08-28 |
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| CN 201110208104 Expired - Fee Related CN102253437B (en) | 2011-07-25 | 2011-07-25 | Preparation method of micro lens array |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110058332A (en) * | 2019-04-30 | 2019-07-26 | 安徽大学 | A kind of production method of lenticule |
| CN110756986A (en) * | 2019-10-21 | 2020-02-07 | 华南理工大学 | Method and device for preparing micro-lens array by laser-induced forward transfer |
| CN112034540A (en) * | 2020-09-24 | 2020-12-04 | 北京北方华创微电子装备有限公司 | Processing method of micro-convex lens array structure |
| CN113406736A (en) * | 2021-06-16 | 2021-09-17 | 广东工业大学 | Micro-lens array chip based on super-infiltration, preparation method thereof and related aptamer sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5707684A (en) * | 1994-02-28 | 1998-01-13 | Microfab Technologies, Inc. | Method for producing micro-optical components |
| US20070029277A1 (en) * | 2005-08-02 | 2007-02-08 | International Business Machines Corporation | Injection molded microoptics |
| CN101794080A (en) * | 2010-03-10 | 2010-08-04 | 中国科学院光电技术研究所 | Device for imagery photoetching by utilizing micro lens array |
-
2011
- 2011-07-25 CN CN 201110208104 patent/CN102253437B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5707684A (en) * | 1994-02-28 | 1998-01-13 | Microfab Technologies, Inc. | Method for producing micro-optical components |
| US20070029277A1 (en) * | 2005-08-02 | 2007-02-08 | International Business Machines Corporation | Injection molded microoptics |
| CN101794080A (en) * | 2010-03-10 | 2010-08-04 | 中国科学院光电技术研究所 | Device for imagery photoetching by utilizing micro lens array |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110058332A (en) * | 2019-04-30 | 2019-07-26 | 安徽大学 | A kind of production method of lenticule |
| CN110058332B (en) * | 2019-04-30 | 2020-09-11 | 安徽大学 | Method for manufacturing micro lens |
| CN110756986A (en) * | 2019-10-21 | 2020-02-07 | 华南理工大学 | Method and device for preparing micro-lens array by laser-induced forward transfer |
| CN112034540A (en) * | 2020-09-24 | 2020-12-04 | 北京北方华创微电子装备有限公司 | Processing method of micro-convex lens array structure |
| CN112034540B (en) * | 2020-09-24 | 2022-05-27 | 北京北方华创微电子装备有限公司 | Processing method of micro-convex lens array structure |
| CN113406736A (en) * | 2021-06-16 | 2021-09-17 | 广东工业大学 | Micro-lens array chip based on super-infiltration, preparation method thereof and related aptamer sensor |
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| CN102253437B (en) | 2013-08-28 |
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