CN102253486A - Two-dimensional micro-electromechanical system (MEMS) tilting mirror with freely changeable deflection axis - Google Patents
Two-dimensional micro-electromechanical system (MEMS) tilting mirror with freely changeable deflection axis Download PDFInfo
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- CN102253486A CN102253486A CN2011102244717A CN201110224471A CN102253486A CN 102253486 A CN102253486 A CN 102253486A CN 2011102244717 A CN2011102244717 A CN 2011102244717A CN 201110224471 A CN201110224471 A CN 201110224471A CN 102253486 A CN102253486 A CN 102253486A
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Abstract
The invention discloses a two-dimensional micro-electromechanical system (MEMS) tilting mirror with a freely changeable deflection axis. An upper electrode is fixed on a substrate in a single side asymmetrical mode, and the deflection axis of the two-dimensional MEMS tilting mirror is freely changed by applying the same voltage value onto a lower electrode block of the tilting mirror in different arrangement modes or applying different voltage values onto the lower electrode block of the tilting mirror in the same arrangement mode or comprehensively using the two schemes. The tilting mirror has high flexibility, the light path conversion efficiency and quality of the tilting mirror are effectively improved, the using cost is reduced, and contribution to further application of the tilting mirror in the fields of optical communication, projection display, optical imaging, laser confocal microscope and the like is facilitated.
Description
Technical field
The invention belongs to the making field of MEMS (Micro-electromechanical Systems) tilting mirror, relate to designing and producing of the MEMS tilting mirror that is used for fields such as optical communication, Projection Display, optical imagery and confocal laser be micro-, be specifically related to the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion.
Background technology
The optical tilt mirror has important use and is worth in optical communication, Projection Display, optical imagery and confocal laser microscopic system.The MEMS tilting mirror except possess the common cost of MEMS device low, be easy to realize to produce in batches, advantage such as it is fast also to have a dynamic response, low in energy consumption.Two dimension MEMS tilting mirror can be realized the light path conversion of two-dimensional direction on a device, the space hold volume is little, high efficiency.
The yawing axis of traditional two-dimentional MEMS tilting mirror is a quadrature, when the conversion light path has specific characteristics when requiring, when in a restricted clearance, realizing the mutual conversion of two light paths on the nonopiate direction, not only need high-precision deflection mirror surface twice, efficient is low, but also may can't finish intended target because of the restriction of limited space.If the yawing axis of tilting mirror is nonopiate, then mirror is when the light path conversion that realizes on its non-orthogonal axes direction, and deflection once both can be finished, the relative efficiency height.As seen when the conversion light path was non-orthogonal states and arranges, nonopiate two-dimentional MEMS tilting mirror had special advantages.According to document 1[village palpus leaf, Wang Weimin, Tao Fenggang, Yao Jun, Gao Fuhua.The development of nonopiate two-dimentional MEMS tilting mirror.The optical precision engineering, 2011 (8), In Press] report, the author is based on the design of silicon face processing technology and made non-orthogonal two-dimentional MEMS tilting mirror, minute surface can be realized the tilted deflecting around two nonopiate yawing axis, the angle of two yawing axis is 145.37 °, can once finish the efficient height to realizing around the light path conversion of 145.37 ° of axles.Can not move but the yawing axis of mirror is fixing, for specific demand, need the specific mirror structure of design, make two yawing axis of mirror hand over into specific angle, so that the minute surface modulation that needs the light path of conversion to be turned about this axis easily just, increased the cost of manufacture of two-dimentional MEMS tilting mirror, and because the existence of design and mismachining tolerance, always there are certain difference in the two yawing axis angles and the designing requirement of the two-dimentional MEMS tilting mirror after the processing, angle angle as two yawing axis of design in the document 1 is 145 °, but actual angle is 145.37 °, causes the decline of tilting mirror to the optical path modulation quality.
Summary of the invention:
The objective of the invention is to the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion, to overcome the deficiency that exists in the known technology.
For achieving the above object, yawing axis provided by the invention can free conversion two-dimentional MEMS tilting mirror, yawing axis can free conversion two-dimentional MEMS tilting mirror, monolateral asymmetrical being fixed in the substrate of its top electrode, by on the bottom electrode piece of the different arrangement modes of tilting mirror, adding identical magnitude of voltage or on identical bottom electrode piece of arranging, add different magnitudes of voltage, or, finish the free conversion of the yawing axis of two-dimentional MEMS tilting mirror with above two kinds of schemes synthesis use.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, its bottom electrode is arranged in a combination by a plurality of bottom electrode pieces 6, the number of bottom electrode piece 6 is greater than 2, and leaves spacing between each bottom electrode piece.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the fore-and-aft distance that the bottom electrode piece exceeds the top electrode border is controlled between-500 μ m to the 500 μ m, the lateral dimension distance that exceeds the top electrode border is controlled between-500 μ m to the 500 μ m, and negative sign represents that the bottom electrode piece is in top electrode inside.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the distance of top electrode and bottom electrode piece is 0.5-100 μ m.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the minute surface of the tilting mirror vertically distance of the indentation in top electrode is controlled between-500 μ m to the 500 μ m, the minute surface of tilting mirror laterally the indentation size Control in top electrode between-500 μ m to 500 μ m, the distance of the minute surface of tilting mirror and top electrode upper surface is between the 0.5-100 μ m, and negative sign is represented the outside of the minute surface of tilting mirror at top electrode.
The present invention is by carrying out asymmetric powering up with monolateral asymmetrical being fixed in the substrate and by the bottom electrode piece to tilting mirror of the top electrode of tilting mirror, realize the free conversion of mirror deflection axle, and make the minute surface can be around the yawing axis deflection freely of required angle, high-efficiency reliable realizes desired light path conversion, improves the light path conversion efficiency and the quality of tilting mirror.
Description of drawings
Fig. 1 is the structural representation of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion.
Fig. 2 is the diagrammatic cross-section of the two-dimentional MEMS tilting mirror that yawing axis can free conversion.
Fig. 3 is the vertical view of the two-dimentional MEMS tilting mirror that yawing axis can free conversion.
Fig. 4 is a two-dimentional MEMS tilting mirror top electrode 5 that yawing axis can free conversion and the layout viewing of bottom electrode piece 6.
Fig. 5 is the minute surface 1 of the two-dimentional MEMS tilting mirror that yawing axis can free conversion and the layout viewing of top electrode 5.
Fig. 6 is the synoptic diagram of arranging of the two-dimentional MEMS tilting mirror bottom electrode piece 6 that yawing axis can free conversion.
Fig. 7 is when powering up on yawing axis can the two-dimentional MEMS tilting mirror bottom electrode piece 6-4 of free conversion, the deflection mirror surface synoptic diagram of tilting mirror.
Fig. 8 is when powering up on yawing axis can the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 of free conversion, the deflection mirror surface synoptic diagram of tilting mirror.
Fig. 9 be yawing axis can free conversion two-dimentional MEMS tilting mirror bottom electrode piece 6-1,6-2,6-3,6-4 on when adding identical magnitude of voltage, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 10 be yawing axis can free conversion two-dimentional MEMS tilting mirror bottom electrode piece 6-5,6-6,6-7,6-8 on when adding identical magnitude of voltage, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 11 is when adding identical magnitude of voltage on yawing axis can two-dimentional MEMS tilting mirror bottom electrode piece 6-4, the 6-5 of free conversion, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 12 is when the magnitude of voltage on rotating shaft can the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 of free conversion is 10 times of bottom electrode piece 6-4, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 13 is when the magnitude of voltage on rotating shaft can the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 of free conversion is 10 times of bottom electrode piece 6-1, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 14 is when adding identical magnitude of voltage on two-dimentional MEMS tilting mirror bottom electrode piece 6-2 that can free conversion at yawing axis and 6-5, the deflection mirror surface synoptic diagram of tilting mirror.
Element numbers explanation in the accompanying drawing:
1 tilting mirror minute surface;
The substrate of 2-1 film deposition; The 2-2 silicon base;
3 fixed beams;
4 insulation courses;
5 electric pole plates;
6 bottom electrode pieces;
7 minute surface pillars;
The spacing of 8 top electrodes and bottom electrode;
The spacing of electroplax and minute surface on 9;
The polysilicon layer of 10 minute surfaces;
11 minute surfaces gold layer;
The width dimensions of 12 fixed beams;
The length dimension of 13 bottom electrode pieces;
The width dimensions of 14 bottom electrode pieces;
The longitudinal pitch size of 15 bottom electrode pieces;
16 bottom electrode pieces exceed the longitudinal size of top electrode;
The longitudinal pitch of 17 bottom electrode pieces;
The longitudinal size of 18 top electrodes;
The horizontal indentation size of 19 bottom electrode pieces;
The lateral dimension of 20 top electrodes;
The length dimension of 21 fixed beams;
22 top electrodes exceed the lateral dimension of minute surface distance;
The lateral dimension of 23 minute surfaces;
The longitudinal size of 24 minute surfaces;
25 top electrodes exceed the longitudinal size of minute surface distance;
First bottom electrode piece of the following left end of 6-1 tilting mirror; Second bottom electrode piece of the following left end of 6-2 tilting mirror; The 3rd bottom electrode piece of the following left end of 6-3 tilting mirror; The 4th bottom electrode piece of the following left end of 6-4 tilting mirror; First bottom electrode piece of 6-5 tilting mirror top right-hand member; Second bottom electrode piece of 6-6 tilting mirror top right-hand member; The 3rd bottom electrode piece of 6-7 tilting mirror top right-hand member; The 4th bottom electrode piece of 6-8 tilting mirror top right-hand member;
The angle of 26 tilting mirror yawing axis Y ' and Y-axis.
Embodiment
Be to solve the deficiency that the fixing two-dimentional MEMS tilting mirror of yawing axis exists in the background technology when light path is changed, improve the light path conversion efficiency and the quality of two-dimentional MEMS tilting mirror, the invention provides the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion.
See also Fig. 1,2,3,4,5 and Fig. 6, it is respectively the structural representation of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion, yawing axis can free conversion the diagrammatic cross-section of two-dimentional MEMS tilting mirror, yawing axis can free conversion the vertical view of two-dimentional MEMS tilting mirror, yawing axis can free conversion the layout viewing of two-dimentional MEMS tilting mirror top electrode 5 and bottom electrode piece 6, yawing axis can free conversion the layout viewing of minute surface 1 and top electrode 5 of two-dimentional MEMS tilting mirror, and the synoptic diagram of arranging of the two-dimentional MEMS tilting mirror bottom electrode piece 6 that yawing axis can free conversion.
Yawing axis of the present invention can free conversion two-dimentional MEMS tilting mirror form by minute surface 1, film deposition substrate 2-1, silicon base 2-2, fixed beam 3, insulation course 4, top electrode 5, bottom electrode piece 6 and support column 7, wherein bottom electrode piece 6 is combined into the bottom electrode of tilting mirror.Film deposition substrate 2-1 and silicon base 2-2 form the substrate 2 of the two-dimentional MEMS tilting mirror that yawing axis can free conversion jointly, by with top electrode 5 monolateral being fixed in the substrate 2, and power up the free conversion that can realize the tilting mirror yawing axis in that bottom electrode is asymmetric, realize the deflection distortion of minute surface around required yawing axis.
The material of silicon base 2-2 is a monocrystalline silicon, deposits the thick silicon nitride dielectric layer 4 of 2nm-0.5 μ m thereon, is used to intercept the short circuit current between bottom electrode piece 6 and silicon base 2-2.The doped polysilicon layer of deposit thickness 0.5-3 μ m is as constituting bottom electrode piece 6 on silicon nitride dielectric layer.
The bottom electrode of tilting mirror is not a single electrode, but is arranged in a combination by a plurality of bottom electrode pieces 6, and the shape of bottom electrode piece 6 can be that circle, triangle, quadrilateral or other are polygon-shaped, and the present invention sets forth with rectangular bottom electrode piece 6.Bottom electrode piece 6 be distributed in top electrode 5 below, wherein the length dimension 13 of bottom electrode piece 6 is between 1-1000 μ m, width dimensions 14 is between 1-1000 μ m, horizontal spacing 15 between the bottom electrode piece 6 is controlled between the 1-1000 μ m, and the fore-and-aft distance 17 of bottom electrode piece 6 is controlled between the 1-1000 μ m.The fore-and-aft distance 16 that bottom electrode piece 6 exceeds top electrode 5 borders is controlled between-500 μ m to the 500 μ m, and negative sign represents that bottom electrode piece 6 is in top electrode 5 inside.The lateral dimension distance 19 that exceeds top electrode 5 borders is controlled between-500 μ m to the 500 μ m, and negative sign represents that bottom electrode piece 6 is in top electrode 5 inside.
Instantly after the size of electrode block is determined, exceed the certain distance in border of top electrode 5, can when guaranteeing to obtain big rotating torque, reduce the relative area between upper/lower electrode, avoid the electrostatic suction effect to produce by making bottom electrode piece 6.The number of bottom electrode piece 6 requires greater than 2.
The material of top electrode 5 is the polysilicons that mix, thickness 0.5-50 μ m, and by fixed beam 3 monolateral asymmetrical being fixed in the substrate 2, the shape and size of fixed beam 3 can design according to actual demand, and this sentences rectangular fixed beam is that example is set forth.The upper surface of top electrode 5 supports minute surface 1 by support column 7, and the lower surface of top electrode 5 is 0.5-100 μ m apart from the spacing 8 of bottom electrode piece 6.
Principle of work of the present invention is:
By making alive value between the top electrode 5 of tilting mirror and bottom electrode piece 6, under the effect of electrostatic attraction, produce electrostatic force between the upper and lower electrode, the moment of utilizing electrostatic force to produce drives tilting mirrors 1 and produces deflection around yawing axis.By on the bottom electrode piece 6 of different arrangement modes, adding identical magnitude of voltage, or on the bottom electrode piece 6 of same row mode for cloth, add different magnitudes of voltage, or comprehensively use above two kinds of schemes to realize the free conversion of tilting mirror yawing axis.
1) on the bottom electrode piece 6 of different arrangement modes, adds identical magnitude of voltage, realize the free conversion of two-dimentional MEMS tilting mirror yawing axis.
In structural drawing shown in Figure 6,6-4 powers up at its bottom electrode piece, and under the effect of electrostatic force, the top electrode 5 of inclination mirror produces deflection, takes the deflection that minute surface 1 produces same angle to, and its deflection mirror surface axle Y ' is 83 degree with the angle of Y-axis.As add identical magnitude of voltage on tilting mirror electrode block 6-5, then tilting mirror yawing axis Y ' is 65 degree with the angle of Y-axis.
2) on the bottom electrode piece 6 of same row mode for cloth, add the free conversion that different magnitudes of voltage is realized the yawing axis of two-dimentional MEMS tilting mirror.
Utilization adds the transform effect that different magnitudes of voltage can produce the tilting mirror yawing axis equally on the bottom electrode piece 6 of tilting mirror same row mode for cloth, when for example on tilting mirror bottom electrode piece 6-4,6-5, adding identical magnitude of voltage, the yawing axis Y ' of tilting mirror is 90 degree with the angle of mirror Y-axis, but when the magnitude of voltage on the electrode block 6-5 was 10 times of bottom electrode piece 6-4 instantly, the yawing axis Y ' of tilting mirror was 88 degree with the angle of Y-axis.
3) on the bottom electrode piece 6 of different arrangement modes, add the free conversion that different magnitudes of voltage is realized the yawing axis of two-dimentional MEMS tilting mirror.
By on the bottom electrode piece 6 of different arrangement modes, adding the free conversion that different magnitudes of voltage also can be realized two-dimentional MEMS tilting mirror yawing axis, for example the magnitude of voltage that adds at tilting mirror bottom electrode piece 6-5 is on bottom electrode piece 6-5 during 10 times of institute's making alive value, the yawing axis Y ' of tilting mirror is 96 degree with the angle of mirror Y-axis, but when the magnitude of voltage of the institute's making alive value on the electrode block 6-5 and bottom electrode piece 6-2 was identical instantly, the yawing axis Y ' of tilting mirror was 87 degree with the angle of Y-axis.
Yawing axis of the present invention can free conversion two-dimentional MEMS tilting mirror by on the bottom electrode piece 6 of the different arrangement modes of tilting mirror, adding identical magnitude of voltage or adding different magnitudes of voltage at the bottom electrode piece 6 of same arrangement mode, or fully utilize above two kinds of measures, can realize the free conversion of tilting mirror yawing axis, its significance is:
1) improved the dirigibility of two-dimentional MEMS tilting mirror.Rotating shaft can free conversion the angle of two-dimentional MEMS tilting mirror by the modulation yawing axis, can realize the free deflection of minute surface along this, improved the light path conversion efficiency of tilting mirror;
2) freely changing of rotating shaft angle can be adjusted the light path conversion effect of mirror easily, and the two-dimentional MEMS tilting mirror of eliminating stationary shaft improves the light path conversion quality of tilting mirror because of the optical path-deflecting error that the existence of mismachining tolerance causes;
3) the two-dimentional MEMS tilting mirror that yawing axis can free conversion is simple in structure, and easily processing can realize the light path conversion of a plurality of directions on a slice mirror, and usable range is wide, the utilization ratio height, use and cost of manufacture low.
Carry out the explanation of the specific embodiment of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion with the arrangement mode of bottom electrode piece shown in Figure 6.The length dimension 20 of the top electrode 5 of two-dimentional MEMS tilting mirror shown in Figure 6 is 230 μ m, width dimensions 18 is 100 μ m, the length dimension 21 of fixed beam 3 is 38 μ m, width dimensions 12 is 22 μ m, the length dimension 13 of bottom electrode piece 6 is 40 μ m, width dimensions 14 is 30 μ m, the horizontal spacing 15 of bottom electrode piece 6 is 30 μ m, longitudinal pitch 17 is 40 μ m, the size 16 that bottom electrode piece 6 vertically exceeds top electrode 5 is 10 μ m, the size 19 of bottom electrode piece 6 horizontal indentation top electrodes 5 is 35 μ m, top electrode 5 thickness 3 μ m, and the thickness of bottom electrode piece 6 is 0.5 μ m.
1) on the bottom electrode piece 6 on the different arrangement modes, adds the free conversion that identical magnitude of voltage is realized two-dimentional MEMS tilting mirror yawing axis.
When powering up on bottom electrode piece 6-4, the yawing axis Y ' of tilting mirror is 83 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 7.
When powering up on electrode block 6-5, the yawing axis Y ' of tilting mirror is 65 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 8.
When adding identical magnitude of voltage on bottom electrode piece 6-1,6-2,6-3,6-4, the yawing axis Y ' of tilting mirror is 98 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 9.
When adding identical magnitude of voltage on bottom electrode piece 6-5,6-6,6-7,6-8, the yawing axis Y ' of tilting mirror is 78 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 10.
2) on the bottom electrode piece 6 of same row mode for cloth, add the free conversion that different magnitudes of voltage is realized two-dimentional MEMS tilting mirror yawing axis.
When at bottom electrode piece 6-4, when 6-5 adds identical magnitude of voltage simultaneously, the yawing axis Y ' of tilting mirror is 90 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 11.
When the magnitude of voltage on bottom electrode piece 6-5 was 10 times of bottom electrode piece 6-4, the yawing axis Y ' of tilting mirror was 94 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 12.
3) on the bottom electrode piece 6 of different arrangement modes, add different magnitudes of voltage and realize two-dimentional MEMS tilting mirror deflection transformation of axis.
When the magnitude of voltage on being added in tilting mirror bottom electrode piece 6-5 was 10 times of bottom electrode piece 6-1, the yawing axis Y ' of tilting mirror was 96 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 13.
When tilting mirror bottom electrode piece 6-2 adds identical magnitude of voltage with 6-5, the yawing axis Y ' of tilting mirror is 87 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 14.
Claims (5)
1. the two-dimentional MEMS tilting mirror that a yawing axis can free conversion, monolateral asymmetrical being fixed in the substrate of its top electrode, by on the bottom electrode piece of the different arrangement modes of tilting mirror, adding identical magnitude of voltage or on identical bottom electrode piece of arranging, add different magnitudes of voltage, or, finish the free conversion of the yawing axis of two-dimentional MEMS tilting mirror with above two kinds of schemes synthesis use.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, its bottom electrode is arranged in a combination by a plurality of bottom electrode pieces 6, the number of bottom electrode piece 6 is greater than 2, and leaves spacing between each bottom electrode piece.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the fore-and-aft distance that the bottom electrode piece exceeds the top electrode border is controlled between-500 μ m to the 500 μ m, the lateral dimension distance that exceeds the top electrode border is controlled between-500 μ m to the 500 μ m, and negative sign represents that the bottom electrode piece is in top electrode inside.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the distance of top electrode and bottom electrode piece is 0.5-100 μ m.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the minute surface of the tilting mirror vertically distance of the indentation in top electrode is controlled between-500 μ m to the 500 μ m, the minute surface of tilting mirror laterally the indentation size Control in top electrode between-500 μ m to 500 μ m, the distance of the minute surface of tilting mirror and top electrode upper surface is between the 0.5-100 μ m, and negative sign is represented the outside of the minute surface of tilting mirror at top electrode.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113965691A (en) * | 2020-07-21 | 2022-01-21 | 中芯集成电路（宁波）有限公司上海分公司 | Moving mechanism, forming method thereof, driving method thereof, electronic device and imaging device |
| US11803043B2 (en) | 2019-12-17 | 2023-10-31 | University Of Washington | System and apparatus for dynamically shaped focal surface with a scanning microscope |
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| US11803043B2 (en) | 2019-12-17 | 2023-10-31 | University Of Washington | System and apparatus for dynamically shaped focal surface with a scanning microscope |
| CN113965691A (en) * | 2020-07-21 | 2022-01-21 | 中芯集成电路（宁波）有限公司上海分公司 | Moving mechanism, forming method thereof, driving method thereof, electronic device and imaging device |
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