CN102350409B - Multifrequency simultaneously-driving ultrasonic generator and realization method thereof - Google Patents
Multifrequency simultaneously-driving ultrasonic generator and realization method thereof Download PDFInfo
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- CN102350409B CN102350409B CN 201110194283 CN201110194283A CN102350409B CN 102350409 B CN102350409 B CN 102350409B CN 201110194283 CN201110194283 CN 201110194283 CN 201110194283 A CN201110194283 A CN 201110194283A CN 102350409 B CN102350409 B CN 102350409B
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Abstract
The invention provides a multifrequency simultaneously-driving ultrasonic generator and a realization method thereof. The multifrequency simultaneously-driving ultrasonic generator comprises a controller, a driving circuit, a double-frequency energy transducer and at least two sets of ultrasonic generating circuits with the same structures; the driving circuit comprises a digital signal synthesizer, a D/A (Digital-to-Analog) converter and a power amplifier which are connected sequentially; the output of the power amplifier is used as the output of the driving circuit; the output end of the power amplifier is connected with the double-frequency energy transducer; and each ultrasonic generating circuit comprises a band-pass filter, a phase discriminator, a frequency controller, an amplitudecontroller, a digital signal generator and an A/D (Analog-to-Digital) converter. Various frequencies, powers and power curves of the multifrequency ultrasonic generator can be individually controlledand adjusted so as to meet different application requirements.
Description
Technical field
The present invention relates to a kind of multifrequency simultaneously ultrasonic generator and its implementation of drive-type.
Background technology
Ultrasonic generator is one of critical component of ultrasonic device, and its effect is to drive the ultrasonic transducer generating ultrasonic vibration, to realize the functions such as ultrasonic bond, processing.At present, double-frequency ultrasound transducer (double frequency transducer) is the development trend of ultrasonic device.Such as in ultrasonic bond equipment, begin to adopt double frequency transducer (transducer has f1 and two kinds of frequencies of f2), in use, for the general-purpose device of routine, adopt the f1 frequency to carry out bonding; For special device, if be difficult to realize reliable bond with f1, then adopt the f2 frequency to carry out bonding.Can in an equipment, have like this binding ability of two kinds of frequencies, have the better scope of application.Adopt the patent of such technology to comprise the U.S.'s 5816476 patents and 4824005 patents.Multifrequency transducer (three kinds and three kinds of transducers with upper frequency) will be the trend of following transducer development.
But, in present double-frequency ultrasound equipment, (comprise the double-frequency ultrasound bonding apparatus), ultrasonic generator generally only has one road Frequency generated, feedback and tracking circuit, can only realize a kind of tracking of frequency at synchronization, therefore, double frequency drives when can not realize the double frequency transducer, can only optionally drive wherein a kind of frequency, the ultrasonic vibration that can only produce a kind of frequency at synchronization at any time.Do not have at present and can realize the ultrasonic generator that double frequency drives simultaneously at synchronization.In fact, excite simultaneously the ultrasonic vibration of two kinds of frequencies at synchronization, higher ultrasonic energy density (for ultrasonic bond, can effectively reduce bonding force and bonding temperature) can be provided, thereby provide the method for mentioning than above-mentioned patent the larger scope of application.Therefore, be necessary to develop a kind of double frequency or the multiple frequency ultrasonic generator that can realize above-mentioned new function.
Summary of the invention
Invent technical problem to be solved and provide a kind of multifrequency simultaneously ultrasonic generator and its implementation of drive-type, ultrasonic bond, processing etc. are carried out in the ultrasonic vibration that produces simultaneously two or more frequencies to drive double frequency transducer or multifrequency transducer.Because different multifrequency transducer operating frequencies (f1, f2 ...) difference, therefore, the multi-frequency of multiple frequency ultrasonic generator can be controlled separately, adjust, to adapt to different application demands.
Technical solution of the present invention is as follows:
A kind of multifrequency is the ultrasonic generator of drive-type simultaneously, comprises controller, drive circuit, double frequency transducer and the identical ultrasonic generation circuit of at least 2 nested structures;
Drive circuit comprises digital signal synthesis device, D/A converter and the power amplifier that links to each other successively; The output of power amplifier is as the output of drive circuit; The output termination double frequency transducer of power amplifier;
Ultrasonic generation circuit comprises bandpass filter, phase discriminator, frequency controller, amplitude controller, digital signal generator and A/D converter; Bandpass filter, phase discriminator, frequency controller, amplitude controller, digital signal generator connect successively, the output of the sampled signal input termination drive circuit of bandpass filter; The input of the output termination digital signal synthesis device of digital signal generator; The bandpass filter device also joins by A/D converter and amplitude controller; The parameter input of frequency controller, the parameter input of amplitude controller are connected the parameter input and all are connected with controller with bandpass filter.
Controller is transferred to the parameter of frequency controller: comprise centre frequency f, frequency-tracking scope fs and fe, the pid control parameter of frequency tracking algorithm.Pid parameter need to be set up in real time according to different transducers, different processing object and working environments, belongs to mature technology.
Controller is transferred to the parameter of amplitude controller: one group of array parameter (being stored in the parameter list) that comprises time, amplitude, for the ultrasonic wave amplitude of determining each period after ultrasonic startup;
Be transferred to the parameter of bandpass filter: the beginning frequency f ss of bandpass filtering and termination frequency f ee;
Controller is given a plurality of centre frequency f={f1 of many cover ultrasonic generation circuits, f2, and f3 ..., be frequency multiplication relation, frequency division relation or nonlinear frequency relation between the centre frequency fi.
Described controller comprises control module, is used for the COM1 of communicating by letter with host computer and is used for output parameter to the output port of ultrasonic generation circuit.
A kind of multifrequency is the implementation method of the ultrasonic generator of drive-type simultaneously, adopts the simultaneously ultrasonic generator of drive-type of multifrequency claimed in claim 1;
The controller output control parameters of overlapping are overlapped ultrasonic generation circuit generation data signal more and are transferred to the digital signal synthesis device and carry out digital signal synthesis respectively to many cover ultrasonic generation circuits more, and described control parameter comprises:
(1) parameter of frequency controller: centre frequency f, the pid control parameter of frequency-tracking scope fs and fe and frequency tracking algorithm; According to given centre frequency, frequency-tracking scope and frequency tracking algorithm, ultrasonic generator carries out real-time tracking, locking to the transducer intrinsic frequency of continuous variation, so that the ultrasonic generator output driving signal consistent with the transducer resonant frequency realized resonant drive; [electric current that obtains by sampled signal and the phase difference of voltage, just can know between the intrinsic frequency of the current frequency of ultrasonic generator output and transducer and whether have difference, and then adopt the PID controller that the current output frequency of transducer is adjusted, until the current frequency that ultrasonic generator sends is identical with the intrinsic frequency of transducer, thereby realize frequency-tracking and the intrinsic frequency that locks transducer]
(2) give the parameter of amplitude controller: one group of array parameter that comprises time, amplitude is used for determining the ultrasonic wave amplitude of each period after ultrasonic startup;
(3) give the parameter of bandpass filter: the beginning frequency f ss of bandpass filtering with stop frequency f ee;
Output signal to drive circuit is sampled, and the sampled signal of gained all is input in the bandpass filter that overlaps ultrasonic generation circuits as feedback signal more; Bandpass filter realizes that the particular frequency range of signal extracts, to realize in this frequency range more accurately phase extraction and frequency-tracking.
Adopt a controller, control simultaneously a plurality of ultrasonic generation circuits, realize that respectively multi-frequency drives tracking and the locking of signal;
By controller, receive the control parameter from host computer, realize online adjustment and the setting of tracking frequency number, tracking frequency scope, centre frequency;
Ultrasonic generation circuit is prior art, but has increased bandpass filter, with the separation of realization multi-frequency scope, and accurate phase extraction and frequency-tracking in this frequency range.And bandpass filter also is ripe technology.Drive circuit is identical with existing ultrasonic generator, but has increased the digital signal synthesis device, when realizing multi-frequency or separately output.
Beneficial effect:
The controller that the present invention adopts: have double frequency and even multifrequency and drive simultaneously required host computer command analysis, double frequency and even the generation of multifrequency parameter and control function.The bandpass filter that in ultrasonic generation circuit, increases in order to realize double frequency and even multifrequency to follow the tracks of simultaneously; The digital signal synthesis device that in drive circuit, increases in order to realize double frequency and even multifrequency to drive simultaneously.
Adopt beneficial effect of the present invention to have:
1) can produce simultaneously the ultrasound drive signals of two kinds of frequencies, to excite simultaneously two kinds of frequencies of double frequency transducer, ultrasonic bond, processing etc. are carried out in the ultrasonic vibration that drives two kinds of frequencies of double frequency transducer output.Owing to exciting when can realize two kinds of frequencies of double frequency transducer, export simultaneously the ultrasonic vibration of two kinds of frequencies, therefore so that the efficient of bonding, reliability, accommodation are broader.
2) can control respectively, adjust the amplitude of different frequency ultrasound drive signals, to adapt to different application demands.
3) two of the double frequency transducer kinds of frequencies can excite respectively selectively, also can excite simultaneously.For different double frequency transducers, (f1 and f2) is different for its resonant operational frequency 1,2, and at this moment, the locking frequency of adjusting respectively ultrasonic generation circuit is resonant operational frequency 1,2, can drive different double frequency transducers.Namely simultaneously the different frequency scope of double frequency driving signal is processed respectively, realize frequency-tracking and control under the different frequency, thereby the double frequency of realizing the double frequency transducer is driven simultaneously.
4) quantity of increase ultrasonic generation circuit, increase the control information output of controller, can expand the driving that realizes three kinds and above multifrequency transducer, can optionally excite at any time any one or several resonant frequency, realize the ultrasonic vibration output of multi-frequency.
5) can be used for ultrasonic lead key connection or back bonding, also can be used for the occasion that other need to use double frequency or multiple frequency ultrasonic driving, such as ultra-sonic welded, ultrasonic casting, ultrasonic casting, Ultrasonic machining, ultrasonic atomizatio etc.
Description of drawings
Fig. 1 is the simultaneously structural representation (this figure only shows the production process of double-frequency ultrasound signal, and the situation of ultrasonic signal can be expanded successively more than 2 tunnel) of the ultrasonic generator of drive-type of multifrequency of the present invention;
The frequency output of the double frequency transducer under the different ultrasonic generators of Fig. 2 drive is compared, and curve is shown in the double frequency transducer output under (a) double-frequency ultrasound generator of the present invention drives; Double frequency transducer curve of output under existing ultrasonic generator drives.
The specific embodiment
Below with reference to the drawings and specific embodiments the present invention is described in further details:
A kind of double-frequency ultrasound generator that can produce simultaneously, detect, control the two-way ultrasonic signal, comprise for generation of, detect and the first ultrasonic generation circuit of control first frequency; For generation of, detect and the second ultrasonic generation circuit of control second frequency; Be used for that signal is synthetic, the drive circuit of D/A conversion and power amplification; Be used for communicating by letter with host computer and control the controller of ultrasonic generation circuit, drive circuit.As shown in Figure 1.
Described controller comprises COM1 (can be the interfaces such as serial ports, PCI, 485, Can bus), control module (can be that single-chip microcomputer, ARM etc. have storage, calculation function and have the general-purpose computations unit of input/output port), output port.Its function is that control module is accepted the configuration informations such as double frequency transducer frequency scope, working method, state, FREQUENCY CONTROL strategy by COM1 from host computer, then be stored in the control module, simultaneously according to configuration information, by output port control ultrasonic generation circuit, carry out phase place, frequency, amplitude, filtering control, realize producing simultaneously, detecting and control two kinds of supersonic frequency signals, and drive the function of double frequency transducer.
Ultrasonic generation circuit comprises phase discriminator, frequency controller, amplitude controller, digital signal generator, bandpass filter.Its function is the setting according to controller, pass through bandpass filter, drive current and voltage signal to the double frequency transducer carry out respectively filtering, and the acquisition frequency range is electric current and voltage signal u1 and the i1 of fs1-fe1 (fs1＜f1＜fe1, f1 are the operating frequencies 1 of double frequency transducer); (feedback current and voltage signal u1 and i1 be from same local the acquisition, and the signal that collects just can obtain different phase difference θ 1 and phase difference θ 2 under the different operating frequency by different wave filters to obtain the phase difference θ 1 of feedback current and voltage signal u1 and i1 by phase discriminator; Differing under the different operating frequency is different, therefore needs the two-way ultrasonic generation circuit, processes respectively, follows the tracks of respectively.) with phase difference incoming frequency controller, in conjunction with the control strategy parameter that controller provides, export in real time driving frequency signal f1; Current signal by bandpass filter 1 is through A/D converter input amplitude controller simultaneously, and the amplitude signal of to-controller input compares then output amplitude A1, to revise the error that drives amplitude; Last digital signal generator is according to above-mentioned frequency signal f1 and revised driving amplitude A1, and output waveform is the driving signal of A1*cos (f1+ θ 1).
Identical on the second ultrasonic generation circuit and the first ultrasonic generation circuit structure, just output waveform is A2*cos (f2+ θ 2).
Described drive circuit comprises digital signal synthesis device, D/A converter, power amplifier.Its function is with above-mentioned ultrasonic generation circuit 1, the signal of 2 outputs synthesizes, synthesize the signal of A1*cos (f1+ θ 1)+A2*cos (f2+ θ 2), then be converted to analog signal through D/A converter, after power amplifier amplifies, obtain required power signal and drive the double frequency transducer, excite simultaneously the ultrasonic vibration of two kinds of frequencies at synchronization, so that higher ultrasonic energy density to be provided, effectively reduce bonding force and bonding temperature, thereby the larger bonding scope of application is provided.
Its course of work is:
Behind double-frequency ultrasound generator electrifying startup, controller obtains control information from host computer, determines two frequency f 1 and the f2 of double frequency transducer; and be stored in the internal memory of loss protecting; calculate simultaneously FREQUENCY CONTROL parameter, power contorl parameters, send to respectively ultrasonic generation circuit 1,2.After ultrasonic generation circuit obtains parameter, according to predefined frequency tracking algorithm, to the transducer frequency of setting follow the tracks of, frequency locking, realize the driving under the resonant frequency, to obtain maximum amplitude output.Because two ultrasonic generation circuits are worked simultaneously, therefore can excite simultaneously two kinds of frequencies of double frequency transducer, realize the ultrasonic vibration output of two kinds of frequencies.
For three kinds or the more multifrequency transducer of frequency, as long as increase the quantity (each frequency increases a ultrasonic generation circuit) of ultrasonic generation circuit, and the control information that increases controller is exported, just can realize the driving of multi-frequency ultrasonic transducer, realize the synchronous output of multi-frequency.
Embodiment 1:
The double-frequency ultrasound generator drives the basic embodiment of double frequency transducer
The double-frequency ultrasound generator drives basic embodiment that the double frequency transducer carries out ultrasonic bond as shown in Figure 1.For having two operating frequency parameter f 1 (138Khz) and f2 (the double frequency transducer of 97Khz, adopt the controller of chip microcontroller to communicate by serial ports and host computer, obtain two operating frequency parameter f 1 (138Khz) and the f2 (97Khz) of double frequency transducer, following range fs1 (135KHz), fs2 (94KHz), fe1 (142KHz), the parameters such as fe2 (100KHz), and be stored in the internal memory of loss protecting, calculate simultaneously: 1) FREQUENCY CONTROL parameter (centre frequency f, frequency-tracking scope fs and fe, the pid control parameter of frequency tracking algorithm); 2) amplitude control parameter (one group of array that comprises time, amplitude is for the ultrasonic wave amplitude of determining each period after ultrasonic startup); 3) bandpass filter parameter (beginning frequency f s and termination frequency f e).Then, send to respectively ultrasonic generation circuit 1,2.After ultrasonic generation circuit obtains parameter, according to preseting filtering method, feedback signal is carried out filtering, then to filtered signal, according to predetermined frequency tracking algorithm, transducer frequency to setting is followed the tracks of, frequency locking, realizes the driving under the resonant frequency, to obtain maximum amplitude output.Because two ultrasonic generation circuits are worked simultaneously, therefore can excite simultaneously two kinds of frequencies of double frequency transducer, realize the ultrasonic vibration output of two kinds of frequencies.
Under double-frequency ultrasound generator of the present invention drives, the output of double frequency transducer such as Fig. 2 (a), the double frequency transducer can start constantly at T1 the vibration output of first frequency (such as 138Khz), then constantly restart the vibration output of second frequency (such as 97Khz) at T2, then constantly close the vibration output of first frequency at T3, only keep the vibration output of second frequency.Namely can start at any time or stop the output of any operating frequency.
And the double frequency transducer output under the existing ultrasonic generator driving is such as Fig. 2 (b), owing to not possessing the ultrasound drive signals that produces simultaneously two kinds of frequencies of the present invention, carry out the function of ultrasonic bond to drive the double frequency transducer, therefore, a kind of ultrasonic output of frequency can only be arranged at any time.
Phase discriminator, frequency controller, digital signal synthesis device etc. all are ready-made technology in electronic circuit field, the former two has been used for existing ultrasonic generation circuit (seeing ultrasonic drivers patent CN 101372066B), the latter do not use at present with ultrasonic generator in.
The situation that multi-frequency (more than or equal to 3 kinds) drives only needs to get final product in the basis expansion that double frequency drives.
Claims (4)
1. the ultrasonic generator of a multifrequency while drive-type is characterized in that: comprise controller, drive circuit, double frequency transducer and the identical ultrasonic generation circuit of 2 nested structures at least;
Drive circuit comprises digital signal synthesis device, D/A converter and the power amplifier that links to each other successively; The output of power amplifier is as the output of drive circuit; The output termination double frequency transducer of power amplifier;
Ultrasonic generation circuit comprises bandpass filter, phase discriminator, frequency controller, amplitude controller, digital signal generator and A/D converter; Bandpass filter, phase discriminator, frequency controller, amplitude controller, digital signal generator connect successively, the output of the sampled signal input termination drive circuit of bandpass filter; The input of the output termination digital signal synthesis device of digital signal generator; Bandpass filter also joins by A/D converter and amplitude controller; The parameter input of frequency controller, the parameter input of amplitude controller are connected the parameter input and all are connected with controller with bandpass filter.
2. the ultrasonic generator of multifrequency while drive-type according to claim 1 is characterized in that, controller is transferred to the parameter of frequency controller: comprise centre frequency f, frequency-tracking scope fs and fe, the pid control parameter of frequency tracking algorithm;
Controller is transferred to the parameter of amplitude controller: one group of array parameter that comprises time, amplitude, for the ultrasonic wave amplitude of determining each period after ultrasonic startup;
Be transferred to the parameter of bandpass filter: the beginning frequency f ss of bandpass filtering and termination frequency f ee;
Controller is given a plurality of centre frequency f={f1 of many cover ultrasonic generation circuits, f2, and f3 ..., be frequency multiplication relation, frequency division relation or nonlinear frequency relation between the centre frequency fi.
3. the ultrasonic generator of multifrequency while drive-type according to claim 1 and 2 is characterized in that, described controller comprises control module, is used for the COM1 of communicating by letter with host computer and is used for output parameter to the output port of ultrasonic generation circuit.
4. the implementation method of the ultrasonic generator of a multifrequency while drive-type is characterized in that, adopts the simultaneously ultrasonic generator of drive-type of multifrequency claimed in claim 1;
The controller output control parameters of overlapping are overlapped ultrasonic generation circuit generation data signal more and are transferred to the digital signal synthesis device and carry out digital signal synthesis respectively to many cover ultrasonic generation circuits more, and described control parameter comprises:
(1) parameter of frequency controller: centre frequency f, the pid control parameter of frequency-tracking scope fs and fe and frequency tracking algorithm; According to given centre frequency, frequency-tracking scope and frequency tracking algorithm, ultrasonic generator carries out real-time tracking, locking to the transducer intrinsic frequency of continuous variation, so that the ultrasonic generator output driving signal consistent with the transducer resonant frequency realized resonant drive;
(2) give the parameter of amplitude controller: one group of array parameter that comprises time, amplitude is used for determining the ultrasonic wave amplitude of each period after ultrasonic startup;
(3) give the parameter of bandpass filter: the beginning frequency f ss of bandpass filtering with stop frequency f ee;
Output signal to drive circuit is sampled, and the sampled signal of gained all is input in the bandpass filter that overlaps ultrasonic generation circuits as feedback signal more; Bandpass filter realizes that the particular frequency range of signal extracts, to realize in this frequency range more accurately phase extraction and frequency-tracking.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104516290A (en) * | 2013-09-30 | 2015-04-15 | 北京中电科电子装备有限公司 | Ultrasonic transducer driving power supply |
| CN104753531B (en) * | 2015-03-26 | 2017-12-22 | 大连交通大学 | A kind of multiple-frequency supersonic ripple power supply |
| CN105413999B (en) * | 2015-12-28 | 2018-10-23 | 杭州电子科技大学 | A kind of array transducer ultrasonic power device |
| CN105954585A (en) * | 2016-04-22 | 2016-09-21 | 广东顺威精密塑料股份有限公司 | Ultrasonic power supply automatic frequency tracking system based on single-chip microcomputer (SCM) control |
| CN106403720A (en) * | 2016-08-31 | 2017-02-15 | 北京金澜智海科技有限公司 | Sound wave generation interference method and device |
| CN106225583B (en) * | 2016-08-31 | 2019-03-01 | 北京金澜智海科技有限公司 | Interfere sonic generator |
| CN106655881A (en) * | 2016-12-28 | 2017-05-10 | 河南师范大学 | Multi-frequency driving method for piezoelectric motor |
| CN106735842A (en) * | 2017-03-24 | 2017-05-31 | 上海骄成机电设备有限公司 | A kind of supersonic welder of real-time detection welding quality |
| CN108746055A (en) * | 2018-03-29 | 2018-11-06 | 江苏求恒医疗器械有限公司 | A kind of medical instrument ultrasonic cleaning equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4824005A (en) * | 1986-08-13 | 1989-04-25 | Orthodyne Electronics Corporation | Dual mode ultrasonic generator in a wire bonding apparatus |
| US5816476A (en) * | 1994-08-24 | 1998-10-06 | Verity Instruments Inc. | Dual frequency power supply and transducer |
| CN101372066A (en) * | 2008-10-15 | 2009-02-25 | 中南大学 | Piezoelectric type ultrasonic transducer driving power |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW521358B (en) * | 2000-09-22 | 2003-02-21 | Asm Tech Singapore Pte Ltd | A method of bonding wires |
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2011
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4824005A (en) * | 1986-08-13 | 1989-04-25 | Orthodyne Electronics Corporation | Dual mode ultrasonic generator in a wire bonding apparatus |
| US5816476A (en) * | 1994-08-24 | 1998-10-06 | Verity Instruments Inc. | Dual frequency power supply and transducer |
| CN101372066A (en) * | 2008-10-15 | 2009-02-25 | 中南大学 | Piezoelectric type ultrasonic transducer driving power |
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