CN102414969B - For producing the device of electric power in response to mechanical oscillation - Google Patents
For producing the device of electric power in response to mechanical oscillation Download PDFInfo
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- CN102414969B CN102414969B CN200980159132.6A CN200980159132A CN102414969B CN 102414969 B CN102414969 B CN 102414969B CN 200980159132 A CN200980159132 A CN 200980159132A CN 102414969 B CN102414969 B CN 102414969B
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
- H02K35/02—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems
Abstract
The present invention relates to a kind of energy gathering apparatus, it comprises: substrate, and it has the submissive region of multiple entirety; At least two ferromagnetics, eachly be coupled to one or more overall submissive region corresponding, so that ferromagnetics described at least one moves relative to described substrate in response to substrate acceleration, each ferromagnetics has interior permanent magnet, described interior permanent magnet is configured such that described interior permanent magnet is separated by flux gap, and the magnetic polarity of the described interior permanent magnet wherein on the opposite side of described flux gap is similar; Wherein said interior permanent magnet forms precipitous flux gradient region in described flux gap; And coil, it is coupled to described substrate and is arranged in described precipitous flux gradient region, the change magnetic flux that said coil exposed produces in the motion by the relatively described substrate of ferromagnetics described at least one.
Description
Governmental interests is stated
The present invention described here can be manufactured in order to government's object by U.S. government and to use or for U.S. government, and not for the present invention pays any patent royalty.
The research and development that federal government subsidizes
The application is transferred to U.S. government, and can authorize for commercial object.When authorizing for not needing during government's object.Mandate and technological audit should be responsible for by Santiago air battle and sea warfare system centre (Space and Naval Warfare Systems Center) patent advisory office (Office ofPatent Counsel), San Diego, CA, USA city, code 20012, postcode 92152; Phone (619) 553-3001, fax (619) 553-3821.With reference to naval case #99735.
Background technology
People are more and more interested for the field of the microsensor in practical application such as medical implant (medical implant) and the embedded type sensor in building.One of scheduled target of MEMS (micro electro mechanical system) (MEMS) technology is exploitation for the low cost of medical treatment, automobile, manufacture, robot and domestic. applications and high performance distributed sensor system.The field receiving less concern how required electric power is supplied to this sensor element effectively.Many application need transducer to be wholly embedded within not to be had in the structure of physical connection with the external world.Ideally, the element of these distributed systems has himself integrated power supply, thus reduce relate to be interconnected, the problem of electronic noise and control system complexity.Carrying out the exploitation of the power supply integrated based on chemistry with MEMS.Chemical power source (battery) technology is good for this application development, but due to the pot-life or to change accessibility (replacementaccessibility) be a kind of limiting factor, chemical power source may be not suitable for this application.Another approach to this system power supply comprises renewable power supply in sensor element inside, therefore becomes self-powered micro-system.
The Conversion of Energy collected from the existing energy source in environment is electric energy by renewable power supply.Preferred energy source depends on application.Some available energy sources comprise from the luminous energy of surround lighting such as daylight, the heat energy collected across temperature gradient, the volume flow collected across liquid or gas pressure gradient can (volume flow energy) and the mechanical energy of collecting from motion and vibration.In these sources, luminous energy and heat energy have been developed for micro battery.Such as, but the luminous energy of Shortcomings amount or heat energy in numerous applications, in medical implant.Therefore, one of skill in the art proposes the many different power supply being produced electric power by the mechanical energy of surrounding.Surrounding mechanical vibration (buzz moving to computer from our health) intrinsic in environment can provide the firm power density of 10 to 50 μ W/cc.
Such as, University of Sheffield (University of Sheffield) [C.B.Williams, R.B.Yates, " Analysis of a micro-electric generator for micro-systems, " 8th Intl.Conf.on Solid-State Sens. & Actuators, Stockholm, Sweden, 25-29Jun1995, 87-B4, pp.369-72] and the Massachusetts Institute of Technology (Massachusetts Institute ofTechnology) [Scott Meninger, Jose Oscar Mur-Miranda, RajeevanAmirtharajah, Anantha P.Chandrakasan, and Jeffrey H.Lang, " Vibration-to-Electric Energy Conversion, " IEEE Trans.on VLSI Systems Vol.9, No.1, pp.64-76, Feb 2001] several professionals propose based on fundamental vibration generator.The people such as Meninger describe and change by the vibration induction in variable capacitor the micro generator that the voltage generated collects vibrational energy by accumulation.
Other people have improved early stage achievement recently.Such as, the people such as Ching [Neil N.H.Ching, H.Y Wong, Wen J.Li, Philip H.W.Leong, and Zhiyu Wen, " Alaser-micro-machined multi-modal resonating power transducer for wirelesssensing systems, " Sensors and Actuators A:Physical, Vol.97-98, pp.685-690,2002.] describe and there is enough electric power to drive the generator of the micromachined of existing circuit.For this work, the preferred micro-machining of the people such as Ching builds its vibration induction generator, because the method provides the accurate control of the necessary mechanical resonance of generator efficiency, and low cost produces the batch micro operations ability of the generator with commercial interest in a large number.Similarly, the people such as Williams described afterwards [C.B.Williams, C.Shearwood, M.A.Harradine, P.H.Mellor, T.S.Birch and R.B.Yates, " Development of an electromagneticmicro-generator, " IEE Proc.-Circuits Devices Syst., Vol.148, No.6, pp.337-342, Dec 2001] according to their early stage theory analysis built also be rely on micromachined manufacture simple inertia generator.Other examples comprise electromagnetic generator [the Wen J.Li of the laser micromachined that the people such as Li describe, Terry C.H.Ho, Gordon M.H.Chan, PhilipH.W.Leong and Hui Yung Wong, " Infrared Signal Transmission by aLaser-Micro-machined Vibration-Induced Power Generator, " Proc.43
rdiEEEMidwest Symp.on Circuits and Systems, Lansing MI, 08-11Aug2000, pp236-9], when it stands 250 microns of vibrations within the scope of 64-120Hz, provide the 2VDC electric power sending 140ms spike train enough per minute.
At United States Patent (USP) 6,127, in 812, the people such as Ghezzo describe the energy extractor comprising capacitor, this capacitor in response to capacitor plate or dielectric material motion and experience electric capacity and change in voltage.In one embodiment, tri-electrode is placed between the first and second pole plates to create two capacitors with change electric capacity.In another embodiment, a capacitor plate is attached to soft arm, and this arm allows the motion across another capacitor plate.Above-mentioned capacitor can be used alone or use together with one or more other capacitors and by rectification one by one or with the rectification of cascade arrangement mode to supply power to the rechargeable energy.Above-mentioned capacitor can be manufactured on substrate together with the support electronics of such as diode (supporting electronic).The people such as Ghezzo adopt the electric capacity of change, and have not both considered also not advise that any solution solves the problem manufacturing electromagnetism micro generator.
In United States Patent (USP) 6,722,206B2, Takeda describes a kind of force sensing device, and this device has the magnetic material element be arranged on substrate, makes another magnetoelectric material element stand the electric field produced by this magnetic component.One movable part is installed to swing in response to vibration, and this magnetic field swinging change magnetoelectric material and stand, it changes the electrical properties of magnetoelectric material conversely.Takeda had not both considered not advise that any solution solves the problem manufacturing electromagnetism micro generator yet.
Although the achievement of some professionals in capable territory, but the needs still existed in this area following electromagnetism micro generator, namely this electromagnetism micro generator is suitable for manufacturing at an easy rate in MEMS scale volume, and it can produce the electric power of enough microchips that operation is current.The single magnetic substance (magnetic mass) of the magnetic flux of stationary coil near electromagnetic device as known in the art usually all adopts and to swing to change on spring element.Therefore these devices are subject to the confined space and the restriction of available limited flux slope (flux slope) at coil place owing to exposing single magnetic pole wherein of multiple coil in the flux field of the limited quality of single magnet, single magnet in power output capacity.Clearly feel these still unsolved problem and shortage in the art, and the present invention solves these problems in the manner described below and not enough.
Summary of the invention
At this, a kind of energy gathering apparatus is disclosed, its comprise have multiple entirety submissive/adapt to the substrate in (compliant) region, at least two ferromagnetics and coil.Each ferromagnetics is coupled to one or more overall submissive region corresponding, so that at least one ferromagnetics moves in response to substrate acceleration counter substrate.Each ferromagnetics has interior permanent magnet, and this interior permanent magnet is configured such that interior permanent magnet is separated from each other by flux gap (flux gap).The magnetic polarity of each interior permanent magnet is similar to the magnetic polarity of the interior permanent magnet on the opposite side of flux gap.Interior permanent magnet forms precipitous flux gradient region in flux gap.This coil is coupled to substrate and is arranged in precipitous flux gradient region, at the change magnetic flux that this coil exposed produces in the motion by least one ferromagnetics counter substrate.
In the alternative embodiment of above-mentioned energy collecting device, two ferromagnetics can be coupled to each other rigidly and be set to synchronizing moving.
In another alternative embodiment of above-mentioned energy collecting device, the ferromagnetics of coupling can be configured in response to substrate acceleration counter substrate Linear-moving.
In another embodiment of replacing of above-mentioned energy collecting device, conductor can be coupled to coil, for conducting the electric current flowed in response to change magnetic flux.
In another alternative embodiment of above-mentioned energy collecting device, this coil can comprise multiple absolute coil, and these absolute coils are coupled to substrate and are arranged in flux gap, is exposed to the magnetic flux of change at this multiple absolute coil.
In another alternative embodiment of above-mentioned energy collecting device, this coil can be arranged in flux gap and outside the volume limited at the circumference by the ferromagnetics be coupled.
In another alternative embodiment of above-mentioned energy collecting device, this coil can be arranged in flux gap and within the volume limited at the circumference by the ferromagnetics be coupled.
This energy gathering apparatus can be configured to MEMS (micro electro mechanical system) (MEMS) generator, and it comprises the substrate with the submissive region of multiple entirety; At least one monolithic micro generator, coil and conductor.In this embodiment, each monolithic micro generator comprises at least two ferromagnetics.Each ferromagnetics can be coupled to one or more overall submissive region corresponding, so that at least one ferromagnetics moves in response to substrate acceleration counter substrate.Each ferromagnetics has interior permanent magnet, and this interior permanent magnet is configured such that the interior permanent magnet of ferromagnetics has identical magnetic polarity and is separated from each other by flux gap.Interior permanent magnet forms precipitous flux gradient region in flux gap.This coil is coupled to substrate and is arranged in flux gap, at the change magnetic flux that this coil exposed produces in the motion by least one ferromagnetics counter substrate.This conductor is coupled to each micro generator coil, for conducting the electric current flowed in response to magnetic flux change.
Accompanying drawing explanation
In order to more completely understand the present invention, with reference now to the detailed description of the following example shown in accompanying drawing, the similar reference symbol wherein throughout these views represents similar features.
Fig. 1 is the schematic diagram that the damping mass spring model representing micro generator system of the present invention is shown.
Fig. 2 illustrates the coil voltage, the theory relation between flux density and relative displacement that obtain according to the classical electromagnetic theory of Fig. 1 model.
Fig. 3 is the end view of several different coil/flux structure that micro generator system used in the present invention is shown.
Fig. 4 is the side perspective view of the exemplary embodiment that micro generator of the present invention is shown.
Fig. 5 is the side perspective view of the exemplary embodiment that MEMS (micro electro mechanical system) of the present invention (MEMS) generator system is shown.
Fig. 6 (comprising Fig. 6 (a)-(d)) is the end view that exemplary magnet layer manufacture process of the present invention is shown.
Fig. 7 (comprising Fig. 7 (a)-(e)) is the end view that exemplary magnet layer manufacture process of the present invention is shown.
Fig. 8 is the plan view of the exemplary magnet layer embodiment that Fig. 6 and Fig. 7 is shown.
Fig. 9 (comprising Fig. 9 (a)-(d)) is the end view that example coil layer manufacture process of the present invention is shown.
Figure 10 illustrates the plan view of the example coil layer embodiment of Fig. 9.
Figure 11 (comprising Figure 11 (a)-(c)) is the end view of the first exemplary micro generator manufacture process of the present invention that the magnet layer embodiment using Fig. 6 is shown.
Figure 12 (comprising Figure 12 (a)-(b)) is the end view of the second exemplary micro generator manufacture process of the present invention that the magnet layer embodiment using Fig. 7 is shown.
Embodiment
Fig. 1 is the schematic diagram that the damping mass spring model representing micro generator system of the present invention is shown.Resistance Buddhist nun and mechanical damping all must be considered in the design analyzed and optimize specific ambient vibration spectrum (ambientvibration spectra).With reference to figure 1, for time t, quality m, spring constant k, electric damping coefficient b
e, mechanical damping factor b
mwith displacement function z (t), the available power P from coil current can be expressed as in equationi:
The conservation of energy draws equation 2:
Can illustrate that Laplace transform and substitution of variable are to provide following equalities 3-10:
Order:
b
e＝2mξ
eω
n
B
m=2m ξ
mω
n[equation 4]
Wherein
Therefore,
[equation 5]
And
[equation 6]
Or
[equation 7]
Wherein A=ω
2y.
This is nonlinear problem, and because from the non-linear nature of the reaction force of coil current, and system resonance can be optimized with reference to the equation 7 for given application and without the need to too much experiment.Usually, inventor has been found that higher resistance Buddhist nun b
eimprove at the mechanical resonance frequency f lower than system
r=2 π ω
nfrequency under power stage performance.
Fig. 2 illustrates for various electricity and the expection coil voltage of machinery hypothesis, the curve chart of flux density and relative displacement.Suppose that this acceleration is constant 1.0m/sec over the entire frequency range
2, B
max=1Tesla (tesla), k=1N/m, speed=50mm/sec, quality=1mg and x=1mm.The present inventor has carried out experiment test and theoretical test, and has been found that disclosed in Fig. 2, prediction conforms to well with the experiment measuring carried out on larger physical size.
The large scale version of collection of energy device is manufactured to check the expection voltage of each coil to export.Experiment mechanism by the diameter measured an inch and tesla's magnet of thickness 3/16 inch form.This mechanism is attached to the spring of elastic force abundance, thus at the frequency of 20Hz and 1.0m/s
2acceleration under cause the displacement of 2.5mm.The number of turns of this coil from 5 to 40 with increment 5 consecutive variations, and for each structure carry out voltage export measure.Can find out that the voltage often enclosing generation of coil is in close proximity to the desired value using the 1mV/ of above-mentioned simple one dimension (1-D) model to enclose.
Sue for peace by the magnetic density in simulating two-dimensional and to the total flux density perpendicular to coil surface and perform labor.This input is assumed to be again at 1.0m/s
2under 20Hz sinusoidal signal input.In each time step, computation rate, the displacement from coil to magnet and the total magnetic flux density perpendicular to surface.The result of this labor confirms the large scale experimental observation value that simple 1-D calculates and 1mV/ encloses.
Fig. 3 is the end view that several different coil/flux structure is shown.In figure 3, coil 20 is arranged on the flux gap 22 formed by two magnetic substances 24 and 26.In Fig. 3 (a) and 3 (b), by flux gap 22 every on similar magnetic pole in flux gap 22, form " precipitous " flux gradient region.In Fig. 3 (c) and 3 (d), rely on by flux gap 22 every on different magnetic poles in flux gap 22, form " shallow (shallow's) " flux gradient region.In Fig. 3 (a), coil 20 is arranged in flux gap 22, so that any vertical motion Z (t) of the relative magnetic substance 24 of magnetic substance 26 and coil 20 produces fast-changing magnetic flux at coil 20 place.Similarly, in Fig. 3 (b), coil 20 is arranged in flux gap 22, so that any synchronous vertical motion Z (t) of both magnetic substance 24-26 opposed coil 20 together produces fast-changing magnetic flux at coil 20 place.On the contrary, in Fig. 3 (c), coil 20 is arranged in flux gap 22, so that any vertical motion Z (t) of the relative magnetic substance 24 of magnetic substance 26 and coil 20 produces the magnetic flux of limited change at coil 20 place.Similarly, in Fig. 3 (d), coil 20 is arranged in flux gap 22, so that any level of synchronization motion Y (t) of both magnetic substance 24-26 opposed coil 20 together produces the magnetic flux of limited change at coil 20 place.Obviously, Fig. 3 (a) and the coil shown in Fig. 3 (b)/flux structure are preferred, and the structure in Fig. 3 (b) is particularly preferred for implementing micro generator of the present invention.In addition, also can increase additional magnetic substance, and existing magnetic substance of recombinating is to form the alternative embodiment that other useful geometrical constructions are also suitable for implementing micro generator of the present invention well.
Fig. 4 is the side perspective view of the exemplary embodiment 28 that micro generator of the present invention is shown.Micro generator 28 comprises the coil 30 be made up of the multi-turn electric conducting material being coupled to winding wiring 32 and 34.Coil 30 is arranged in the flux gap 36 defined by the respective inner surface 38 and 40 of magnetic substance 42 and 44.Inner surface 38 and 40 is shown as the N pole of magnetic substance 42 and 44, but as long as both inner surfaces 38 and 40 have same magnetic polarity, it can be any one polarity.Magnetic substance 42 is supported by the multiple compliant components (spring) being illustrated as compliant component 46.Similarly, magnetic substance 44 is supported by the multiple compliant components being illustrated as compliant component 48.Fix the free end of compliant component 46 and 48 with any useful mode (not shown) opposed coil 30, allow magnetic substance 42 and 44 to move up in Z (t) side in response to exterior mechanical vibration opposed coil 30 thus.
Fig. 5 is the side perspective view of the exemplary embodiment 50 that MEMS (micro electro mechanical system) of the present invention (MEMS) generator system is shown.MEMS generator 50 comprises multiple micro generator of the present invention (being illustrated by micro generator 28), and wherein each winding wiring is interconnected so that the electric power produced by each micro generator is assembled at MEMS alternator terminal 52 and 54.Preferably, the multiple micro generators forming MEMS generator 50 are coupling in together to be fixedly exposed to identical ambient vibration.
Fig. 6 (comprising Fig. 6 (a)-(d)) is the end view that exemplary magnet layer manufacture process of the present invention is shown.As shown in Fig. 6 (a), this technical process starts from semiconductor wafer 56.This material can be crystalline silicon or any other useful semi-conducting material.Although below discuss the preparation being restricted to single magnet layer, but those skilled in the art it is easily understood that this type of magnet layer elements many can manufacture on a single semiconductor wafer in single technical process simultaneously, and can be separated from wafer in wafer dicing process process well-known in the art.Fig. 6 (a) illustrates the result of the first step of this technical process, and this result is the preparation of upper surface 58 and lower surface 60, for being processed in a familiar manner by clean and polishing as required.Fig. 6 (b) illustrates next step result of this technical process, and this result is sheltering and deep reaction ion etching (DRIE) of lower surface 60, thus limits magnet well (magnet well) 62.Fig. 6 (c) illustrates next step result of this technical process, and this result is sheltering of upper surface 58 and DRIE, thus limits coil layer recess 64.Fig. 6 (d) illustrates the result of lower two steps of this technical process, this result is sheltering of upper surface 58 and DRIE, thus limit overall submissive region 66 and bond post (bonding posts) 68, complete cardinal principle magnet straton element 69 as shown in the figure thus.Bond post 68 also shown in the wafer plane view of Fig. 8 (magnet well 62 should be demarcated with dotted line with the illustrative processes process that Fig. 6 is shown, and demarcates with solid line with the illustrative processes process that Fig. 7 is shown).The final thickness in overall submissive region 66 is established the spring constant needed for expectation resonance frequency providing final micro generator (Figure 11 below).Open area 71 in Fig. 8 is etched completely away, thus leaves the magnet well 62 be only coupled by submissive region 66.The final step of this magnet layer manufacture process is in the magnet well 62 ferromagnetics 70 being arranged on magnet straton element 69 (shown in Figure 11 (c)), this realizes and then can complete magnet straton element 69 as shown in Fig. 6 (d) after, or after the assembling (Figure 11) of micro generator magnet layer and coil layer element as shown here, can be postponed till.
Fig. 7 (comprising Fig. 7 (a)-(e)) is the end view that replacement magnet layer manufacture process of the present invention is shown.As shown in Fig. 7 (a), this technical process also starts from semiconductor wafer 56.Fig. 7 (a) illustrates the result of the first step of this technical process, and this result is the preparation of upper surface 58 and lower surface 60, for being processed in a familiar manner by clean and polishing as required.Fig. 7 (b) illustrates next step result of this technical process, and this result is sheltering of upper surface 58 and DRIE, thus limits coil layer recess 64.Fig. 7 (c) illustrates next step result of this technical process, and this result is sheltering of upper surface 58 and DRIE, thus limits magnet well 62.Fig. 7 (d) illustrates the result of lower two steps of this technical process, this result is sheltering of upper surface 58 and DRIE, thus limit overall submissive region 66 and bond post 68, it also shown in the wafer plane view of Fig. 8 (magnet well 62 should be demarcated with dotted line with the illustrative processes process that Fig. 6 is shown, and demarcates with solid line with the illustrative processes process that Fig. 7 is shown).The final thickness in overall submissive region 66 is established the spring constant needed for expectation resonance frequency providing final micro generator (Figure 12 below).
Fig. 8 illustrates open area 71, and it can be etched completely away to stay the magnet well 62 be only coupled by submissive region 66.Fig. 7 (e) illustrates the result of the final step of this technical process, and this result is arranged in magnet well 62 ferromagnetics 70.Ferromagnetics 70 should comprise suitably " hard " ferromagnetic material, such as there is the sputtering CoPtCr of 40KOe field, and ferromagnetics 70 must be configured to a magnetic pole and join the bottom of magnet well 62 to and another magnetic pole is exposed to the top of ferromagnetics 70, complete magnet layer elements 72 as shown in the figure substantially thus.
Fig. 9 (comprising Fig. 9 (a)-(d)) is the end view that example coil layer manufacture process of the present invention is shown.As shown in Fig. 9 (a), this technical process starts from semiconductor wafer 74.This material can be crystalline silicon or any other useful semi-conducting material.Although below discuss the preparation being restricted to single coil layer, but those skilled in the art it is easily understood that this type of coil parts many can manufacture on a single semiconductor wafer in single technical process simultaneously, and can be separated from wafer in wafer dicing process process well-known in the art.Fig. 9 (a) illustrates the result of the first step of this technical process, and this result is the preparation of upper surface 76 and lower surface 78, for being processed in a familiar manner by clean and polishing as required.Fig. 9 (b) illustrates next step result of this technical process, and this result is sheltering of upper surface 76 and DRIE, thus limits coil well 80.Fig. 9 (c) illustrates next step result of this technical process, and this result is placed in coil well 80 by conductive coil 82.The placement of coil 82 can use any one in several useful technology well-known in the art to realize, such as copper or the aluminium conductor ion deposition in mask pattern, or such as by conductive layer (not shown) being bonded to the bottom of coil well 80 and sheltering and etch this conductive layer to generate the loop geometries expected.Such as, this coil can comprise 2500 circles at the radius of 1mm.Fig. 9 (d) illustrates the result of the final step of this technical process, and this result is shielding and the DRIE of upper surface 76 or lower surface 78, thus limits bond post through hole 84, completes cardinal principle coil layer element 86 as shown in the figure thus.
Figure 10 illustrates the bond post through hole 84 in wafer plane view.Figure 10 also illustrates two conductive terminals 88 and 90 being configured to allow to be electrically connected to coil 82.
Figure 11 (comprising Figure 11 (a)-(c)) is the end view of the manufacture process of the first exemplary embodiment 92 that micro generator of the present invention is shown, this first exemplary embodiment 92 is shown in Figure 11 (c).Figure 11 (a) illustrates the result of the first step of this technical process, and this result is that coil layer element 86 joins the first magnet straton element 69A at composition surface 94A place.Figure 11 (b) illustrates the result of the second step of this technical process, and this result is that the second magnet straton element 69B joins coil layer element 86 at composition surface 94B place and joins the first magnet straton element 69A at 96 places, bond post surface.Notice and provide sufficient tolerance limit to allow except the mechanical couplings provided by submissive region 66, coil 82 keeps being separated with bond post surface 96 machineries.The final step of this micro generator manufacture process is separately positioned on by ferromagnetics 70A and 70B in the magnet well 62 of magnet straton element 69A and 69B, and this can to change into after and then completing magnet straton element 69 and to realize before the assembling starting micro generator 92.
Figure 12 (comprising Figure 12 (a)-(b)) is the end view of the manufacture process of the second exemplary embodiment 98 that micro generator of the present invention is shown, this second exemplary embodiment 98 is shown in Figure 12 (b).Figure 12 (a) illustrates the result of the first step of this technical process, and this result is that coil layer element 86 joins the first magnet straton element 72A at composition surface 100A place.Figure 12 (b) illustrates the result of the second step of this technical process, and this result is that the second magnet straton element 72B joins coil layer element 86 at composition surface 100B place, and joins the first magnet straton element 72A at 102 places, bond post surface.Notice and provide sufficient tolerance limit to allow except the mechanical couplings provided by submissive region 66, coil 82 keeps being separated with bond post surface 102 machineries.
According to measurements and calculations, the present inventor advises that MEMS generator of the present invention can provide the power output from 10 to 500mW/cc under the output voltage from 100mV to 5000mV.
Obviously, in view of these instructions, those skilled in the art easily expect other embodiments of the present invention and distortion.Therefore, the present invention should only be limited by claim of enclosing, and when considering together with accompanying drawing in conjunction with above-mentioned specification, these claims comprise all these embodiments and distortion.
Should be appreciated that those skilled in the art can as claim of enclosing in the principle of the present invention stated and scope to describing at this and illustrating to explain that the details of essence of the present invention, material, step and arrangements of components make many extra changes.
According to the above description of the system and method for detecting the target in search volume, it is evident that various technology may be used for the conception of implementation system 10 and do not depart from its scope.Described embodiment should be considered to illustrative and not restrictive in all respects.Should also be appreciated that system 10 is not limited to specific embodiments described here, but many embodiments can be had when not departing from right.
Claims (32)
1. an energy gathering apparatus, it comprises:
Substrate, it has the submissive region of multiple entirety;
Two ferromagnetics, eachly be coupled to corresponding overall submissive region described in one or more, so that ferromagnetics described at least one moves relative to described substrate in response to substrate acceleration, each ferromagnetics has interior permanent magnet, described interior permanent magnet is configured such that described interior permanent magnet is separated from each other by flux gap, and wherein the magnetic polarity of each interior permanent magnet is identical with the magnetic polarity of the interior permanent magnet on the opposite side of described flux gap;
Wherein said ferromagnetics is provided so that and forms precipitous flux gradient region in described flux gap; And
Coil, it is coupled to described substrate and is arranged in described precipitous flux gradient region, and said coil is exposed to the change magnetic flux produced by the motion of the relatively described substrate of ferromagnetics described at least one.
2. energy collecting device according to claim 1, wherein said two ferromagnetics are coupled to each other rigidly and be set to synchronizing moving.
3. energy collecting device according to claim 2, the ferromagnetics be wherein coupled moves relative to described substrate linear in response to substrate acceleration.
4. energy collecting device according to claim 1, it comprises the conductor being coupled to described coil further, for conducting the electric current flowed in response to described change magnetic flux.
5. device according to claim 4, wherein said coil comprises further:
Multiple absolute coil, it is coupled to described substrate and is arranged in described flux gap, and said multiple absolute coil is exposed to described change magnetic flux.
6. device according to claim 1, wherein said coil to be arranged in described flux gap and outside the volume limited at the circumference by the ferromagnetics be coupled.
7. device according to claim 1, wherein said coil to be arranged in described flux gap and within the volume limited at the circumference by the ferromagnetics be coupled.
8. a micro-electromechanical system (MEMS) generator, it comprises:
Substrate, it has the submissive region of multiple entirety;
At least one monolithic micro generator, each monolithic micro generator comprises:
At least two ferromagnetics, eachly be coupled to corresponding overall submissive region described in two or more, so that ferromagnetics described at least one moves relative to described substrate in response to substrate acceleration, each ferromagnetics has interior permanent magnet, and described interior permanent magnet is configured such that the described interior permanent magnet of described ferromagnetics has identical magnetic polarity and is separated from each other by flux gap;
Wherein said interior permanent magnet forms precipitous flux gradient region in described flux gap; And
Coil, it is coupled to described substrate and is arranged in described precipitous flux gradient region, the change magnetic flux that said coil exposed produces in the motion by the relatively described substrate of ferromagnetics described at least one; And
Conductor, it is coupled to each micro generator coil, for conducting the electric current flowed in response to magnetic flux change.
9. MEMS generator according to claim 8, wherein in monolithic micro generator described in one or more, described two ferromagnetics are coupled to each other rigidly and be set to synchronizing moving.
10. MEMS generator according to claim 8, wherein in monolithic micro generator described in one or more, each ferromagnetics and accordingly one or more overall submissive region form the resonance mass spring system of resonance frequency between 10Hz and 50Hz.
11. MEMS generators according to claim 8, wherein in monolithic micro generator described in one or more, described coil comprises multiple absolute coil, described multiple absolute coil is coupled to described substrate and is arranged in described flux gap, and said coil is exposed to described change magnetic flux.
12. MEMS generators according to claim 8, wherein said substrate is made up of crystalline silicon substantially.
13. MEMS generators according to claim 8, wherein said coil to be arranged in described flux gap and outside the volume limited at the circumference by the ferromagnetics be coupled.
14. MEMS generators according to claim 8, wherein said coil to be arranged in described flux gap and within the volume limited at the circumference by the ferromagnetics be coupled.
15. MEMS generators according to claim 9, the ferromagnetics be wherein coupled moves relative to described substrate linear in response to substrate acceleration.
16. 1 kinds of energy collecting devices, it comprises:
Substrate, it has the submissive region of multiple entirety;
At least two ferromagnetics, eachly be coupled to corresponding overall submissive region described in one or more, so that ferromagnetics described at least one moves relative to described substrate in response to substrate acceleration, each ferromagnetics has interior permanent magnet, described interior permanent magnet is configured such that described interior permanent magnet is separated from each other by flux gap, and wherein the magnetic polarity of each interior permanent magnet is identical with the magnetic polarity of the interior permanent magnet on the opposite side of described flux gap;
Coil, it is coupled to described substrate and is arranged in described flux gap, and said coil is exposed to the change magnetic flux produced by the motion of the relatively described substrate of ferromagnetics described at least one; And
Conductor, it is coupled to described coil, for conducting the electric current flowed in response to described change magnetic flux.
17. devices according to claim 16, wherein:
Described two ferromagnetics are coupled to each other rigidly and be set to synchronizing moving.
18. devices according to claim 16, wherein:
Each ferromagnetics and one or more overall submissive region corresponding form the resonance mass spring system of resonance frequency between 10Hz and 50Hz.
19. devices according to claim 16, it comprises further:
Multiple absolute coil, it is coupled to described substrate and is arranged in described flux gap, and said coil exposed is in described change magnetic flux.
20. devices according to claim 16, wherein:
Described substrate is made up of crystalline silicon substantially.
21. devices according to claim 16, wherein:
Described interior permanent magnet forms precipitous flux gradient region in described flux gap.
22. 1 kinds of micro-electromechanical system (MEMS) generators, it comprises:
Substrate, it has the submissive region of multiple entirety;
At least one monolithic micro generator, each monolithic micro generator comprises:
At least two ferromagnetics, eachly be coupled to the corresponding one or more submissive region of described entirety, so that ferromagnetics described at least one moves relative to described substrate in response to substrate acceleration, each ferromagnetics has interior permanent magnet, described interior permanent magnet is configured such that the described interior permanent magnet of described ferromagnetics has identical magnetic polarity and is separated from each other by flux gap, and
Coil, it is coupled to described substrate and is arranged in described flux gap, the change magnetic flux that said coil exposed produces in the motion by the relatively described substrate of ferromagnetics described at least one; And
Conductor, it is coupled to each micro generator coil, for conducting the electric current flowed in response to magnetic flux change.
23. MEMS generators according to claim 22, wherein:
In monolithic micro generator described in one or more, described two ferromagnetics are coupled to each other rigidly and be set to synchronizing moving.
24. MEMS generators according to claim 22, wherein:
In monolithic micro generator described in one or more, each ferromagnetics and accordingly overall submissive region described in one or more form the resonance mass spring system of resonance frequency between 10Hz and 50Hz.
25. MEMS generators according to claim 22, wherein:
In monolithic micro generator described in one or more, multiple absolute coil is coupled to described substrate and is arranged in described flux gap, and said coil exposed is in described change magnetic flux.
26. MEMS generators according to claim 22, wherein:
Described substrate is made up of crystalline silicon substantially.
27. 1 kinds of energy harvesters, it comprises:
Substrate, it has the submissive region of multiple entirety;
Two ferromagnetics, eachly be coupled to overall submissive region described in one or more, so that ferromagnetics described at least one moves relative to described substrate linear in response to substrate acceleration, each ferromagnetics has interior permanent magnet, described interior permanent magnet is configured such that the described interior permanent magnet of described ferromagnetics is separated from each other by flux gap, wherein the magnetic polarity of each interior permanent magnet is identical with the magnetic polarity of the interior permanent magnet on the opposite side of described flux gap, and described interior permanent magnet forms precipitous flux gradient region in described flux gap;
Coil, it is coupled to described substrate and is arranged in described flux gap, the change magnetic flux that said coil exposed produces in the motion by the relatively described substrate of described ferromagnetics; And
Conductor, it is coupled to described coil, for conducting the electric current flowed in response to described change magnetic flux.
28. energy harvesters according to claim 27, wherein said two ferromagnetics are coupled to each other rigidly and be set to synchronizing moving.
29. energy harvesters according to claim 27, wherein each ferromagnetics and one or more overall submissive region form the resonance mass spring system of resonance frequency between 10Hz and 50Hz.
30. energy harvesters according to claim 27, wherein said substrate is made up of crystalline silicon substantially.
31. energy harvesters according to claim 28, the ferromagnetics be wherein coupled moves relative to described substrate linear in response to substrate acceleration.
32. MEMS generators according to claim 23, the ferromagnetics be wherein coupled moves relative to described substrate linear in response to substrate acceleration.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2009/036394 WO2010101577A1 (en) | 2009-03-06 | 2009-03-06 | An apparatus for generating power responsive to mechanical vibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102414969A CN102414969A (en) | 2012-04-11 |
| CN102414969B true CN102414969B (en) | 2015-08-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980159132.6A Expired - Fee Related CN102414969B (en) | 2009-03-06 | 2009-03-06 | For producing the device of electric power in response to mechanical oscillation |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2404371A4 (en) |
| JP (1) | JP5846688B2 (en) |
| KR (1) | KR101458265B1 (en) |
| CN (1) | CN102414969B (en) |
| CA (1) | CA2754553C (en) |
| WO (1) | WO2010101577A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8443673B2 (en) | 2009-08-03 | 2013-05-21 | Lumedyne Technologies Incorporated | High sensitivity geophone |
| US9716423B1 (en) | 2016-06-24 | 2017-07-25 | Nanoport Technology Inc. | Tactile feedback actuator, electronic device using same, and method of operating same |
| US11210912B2 (en) | 2016-06-24 | 2021-12-28 | Nanoport Technology Inc. | Tactile feedback actuator, electronic device using same, and method of operating same |
| US10719129B2 (en) | 2017-06-21 | 2020-07-21 | Nanoport Technology Inc. | Compound haptic effects using multimodal tactile feedback actuator |
| CN108429327A (en) * | 2018-03-12 | 2018-08-21 | 联想(北京)有限公司 | The control method of a kind of electronic equipment and electronic equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6127812A (en) * | 1999-02-16 | 2000-10-03 | General Electric Company | Integrated environmental energy extractor |
| CN1305126A (en) * | 1999-12-07 | 2001-07-25 | 阿苏拉布股份有限公司 | Generator used for timer |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6768230B2 (en) * | 2002-02-19 | 2004-07-27 | Rockwell Scientific Licensing, Llc | Multiple magnet transducer |
| JP4684106B2 (en) * | 2003-08-28 | 2011-05-18 | テレダイン・ライセンシング・エルエルシー | Power generation with combined magnets |
| US6927475B2 (en) * | 2003-11-19 | 2005-08-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Power generator and method for forming same |
| GB2412501B (en) * | 2004-03-26 | 2007-10-31 | Univ Southampton | An electromagnetic device for converting mechanical vibrational energy into electrical energy |
| JP4704093B2 (en) * | 2005-04-14 | 2011-06-15 | スミダコーポレーション株式会社 | Vibration generator |
| WO2007076561A1 (en) * | 2005-12-30 | 2007-07-12 | Inventus Engineering Gmbh | Device for producing electric energy |
| EP1841049B1 (en) * | 2006-03-28 | 2012-08-15 | Infineon Technologies AG | Electromagnetic micro-generator |
| CZ299911B6 (en) * | 2007-05-09 | 2008-12-29 | Vysoké ucení technické Brno | Electromagnetic vibratory generator for low frequencies of vibrations |
-
2009
- 2009-03-06 CN CN200980159132.6A patent/CN102414969B/en not_active Expired - Fee Related
- 2009-03-06 EP EP09841253.9A patent/EP2404371A4/en not_active Withdrawn
- 2009-03-06 JP JP2011552923A patent/JP5846688B2/en not_active Expired - Fee Related
- 2009-03-06 CA CA2754553A patent/CA2754553C/en not_active Expired - Fee Related
- 2009-03-06 WO PCT/US2009/036394 patent/WO2010101577A1/en active Application Filing
- 2009-03-06 KR KR1020117023377A patent/KR101458265B1/en not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6127812A (en) * | 1999-02-16 | 2000-10-03 | General Electric Company | Integrated environmental energy extractor |
| CN1305126A (en) * | 1999-12-07 | 2001-07-25 | 阿苏拉布股份有限公司 | Generator used for timer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012520053A (en) | 2012-08-30 |
| JP5846688B2 (en) | 2016-01-20 |
| WO2010101577A1 (en) | 2010-09-10 |
| CA2754553A1 (en) | 2010-09-10 |
| CN102414969A (en) | 2012-04-11 |
| CA2754553C (en) | 2016-10-11 |
| KR101458265B1 (en) | 2014-11-04 |
| KR20120026028A (en) | 2012-03-16 |
| EP2404371A4 (en) | 2013-12-25 |
| EP2404371A1 (en) | 2012-01-11 |
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