CN102435185A

CN102435185A - Internal and external truss type three-frame micro-mechanical gyro structure

Info

Publication number: CN102435185A
Application number: CN2011102668377A
Authority: CN
Inventors: 余才佳; 王刚; 熊恒
Original assignee: No 618 Research Institute of China Aviation Industry
Current assignee: No 618 Research Institute of China Aviation Industry
Priority date: 2011-09-01
Filing date: 2011-09-01
Publication date: 2012-05-02
Anticipated expiration: 2031-09-01
Also published as: CN102435185B

Abstract

The invention belongs to a micro-mechanical gyro structure technology field, and relates to an internal and external truss type three-frame micro-mechanical gyro structure. The structure comprises an external frame, an internal frame and a medium frame, wherein the external frame comprises two separation blocks and two groups of trussed girders. Each group of trussed girder comprises two folding beams and a truss, and the external side of each separation block has a comb electrode. Two ends of each trussed girder are connected with one folding beam respectively, the two groups of trussed girders are connected by the separation blocks, and then the external frame is formed. The external frame is fixed on the anchor points at the outer end of the structure by four folding beams, and the left and the right parts of the external frame are connected to form a complete frame by the truss. The two ends of the medium frame are separate type double-folding beams, and the external frame and the medium frame are connected by the separate type double-folding beams. The medium frame and the internal frame are connected by the truss type double-folding beams, a comb electrode is arranged in the internal frame, and the internal frame is connected to the internal anchor points of the gyro structure by four separate type double-folding beams. The structure of the invention reduces the quantity of useless mass blocks, and raises gyro susceptibility. The special hexagon pore structure minimizes the structural strength loss, and the shape of the step type comb electrode enhances the gyro stability.

Description

A kind of inside and outside truss-like three framework micromechanical gyro structures

Technical field

The invention belongs to the micromechanical gyro technical field of structures, relate to a kind of inside and outside truss-like three framework micromechanical gyro structures.

Technical background

In High Accuracy Microcomputer tool gyro in the world, inertial navigation and the guidance field widespread use.Wherein, guidance requires to have characteristics such as wide range, high impact properties with micromechanical gyro.This type micromechanical gyro comprises broach line oscillatory type, broach vibration ring type etc., and wherein, broach line capacitance-type vibration formula is becoming a kind of main flow structure.

Broach line capacitance-type vibration formula gyro structural core is the mass of a plane internal vibration; Central principle all is through static driven power; Make planar directions X vibration of mass, when experiencing the angular velocity of Z-direction input, under the effect of Coriolis effect; Mass receives Y direction coriolis force, vibrates in the Y direction thereby promote mass.Come the corresponding input angular velocity that calculates through the vibration amplitude that detects the Y direction.

To the direct or indirect mode that applies power, can be divided into multiple structure according to driving, detection side.Driving direction has the direct design of driving comb direct drive mode on mass; Through driving peripheral two discrete masses, this periphery mass drives the indirect type of drive of Ge Shi mass again; And peripheral two masses are integrated into the integral frame type of drive of a framework.The detection side is to being divided into similar three kinds of forms too.The shortcoming of the mode that directly drives comprises that mass vibrates at both direction, driving direction be coupled to easily the detection side to; Because the vibration of mass both direction makes elastic beam receive the power between non-parallel displacement field, increases the elastic beam internal stress, thereby causes elastic instability etc.

In three restrained gyroscope structures, because housing drive frame and inside casing drive frame are useless mass, promptly the quality of inside casing and housing is big more, and the performance of gyro is just low more.Therefore, need the ratio of the interior housing quality of balance with the middle boxes quality.

Even used the full decoupling structure of three frameworks, because the asymmetry of processing technology still possibly cause quadrature coupling error mask coriolis force to detect the situation of input signal.Therefore, also need design the structure that reduces the quadrature coupling error, such as step electrode, symmetric difference moving electrode structure or the like.

Summary of the invention

The purpose of this invention is to provide a kind of inside and outside truss-like three framework micromechanical gyro structures that a kind of coupling error is little, highly sensitive, stability is high.

Technical solution of the present invention is: structure comprises housing, inside casing and middle boxes, and housing comprises two explants and two groups of girder trusses, and wherein every group of girder truss comprises two folded beams and a truss; The outside of each explant is provided with comb electrodes; The two ends of every girder truss connect a folded beam respectively, and two groups of girder trusses connect through explant, form housing; Housing is fixed on the anchor point of structure outer end through four folded beams, and housing left and right sides two parts connect into complete frame through truss; The two ends of middle boxes are separate type two-fold stoplog, are connected with separate type two-fold stoplog between housing and the middle boxes; Middle boxes is with connecting through truss-like two-fold stoplog between the inside casing, and the inside of inside casing is provided with comb electrodes, and inside casing is connected on the anchor point of gyro inside configuration through four separate type two-fold stoplogs.

Evenly have fabrication hole on described housing, inside casing and the girder truss.

Evenly have fabrication hole on described housing, inside casing and the girder truss, fabrication hole adopts hexagon, and is honeycomb arrangement.

The inside of described inside casing is provided with comb electrodes, and it becomes the gap broach and adopts trapezium structure, and the broach root adopts the ledge structure form.

Advantage of the present invention is: adopt the structure of three frameworks, form the full decoupling pattern, can minimize and drive the coupling error of mode to detection signal; Adopt truss-frame structure that two the disintegrate-quality pieces in outside are connected to a general frame, can minimize the housing quality, improve the gyro susceptibility; Adopt the hexagon fabrication hole to be honeycomb arrangement, reduce the quality of housing, inside casing and truss, and make its structural strength minimization of loss; The sensitive electrode shape adopts trapezoidal, and the design ledge structure is to reduce coupling error.But the present invention's vacuum bonding, and be convenient to dry plasma and lose little gyro structure that (ICP) technology etc. realizes deeply.

Description of drawings

Fig. 1 is an one-piece construction synoptic diagram of the present invention;

Fig. 2 is a movable structure synoptic diagram of the present invention;

Fig. 3 is the hexagon fabrication hole of the present invention and the synoptic diagram of arranging, and wherein, a is a single fabrication hole on the interior truss, and b is a double fabrication hole on the outer truss, and c is the many rows fabrication hole on the driver element of housing both sides;

Fig. 4 is a detecting electrode ledge structure synoptic diagram of the present invention.

Embodiment:

Like Fig. 1, shown in 2, the present invention includes: housing is the drive part of this gyro structure, and housing is stood in the structure both sides by branch driver element 1 is connected to a complete whole through housing girder truss 9.Driving force is to be applied by the variable area comb electrodes that 5a and 5b electrode and corresponding broach on driver element 1 thereof form on the housing.Electrode 5a, 5b and corresponding broach are drive electrode.Electrode 6a, 6b, 6c, 6d are the drive feedback electrode, wherein 6a, 6b parallel connection, and 6c, 6d parallel connection have increased the feedback capacity value, and left and right sides two teams electrode forms differential capacitor.Housing is connected on the fixed anchor point through

elastic beam

8a, 8b, 8c, 8d, and fixed anchor point is 7a, 7b, 7c and 7d.

Middle boxes 2 is a Ge Shi quality frame, and middle boxes 2 connects with housing through

elastic beam

10a, 10b, 10c, 10d, thereby housing can drive middle boxes is done same amplitude at directions X vibration in the driving force of directions X.Middle boxes 2 links together with inside casing 3 through

elastic beam

11a, 11b, 11c, 11d.Wherein 10a, 10b, 10c, 10d level (directions X) design, vertically (Y direction) direction design of 11a, 11b, 11c, 11d.

Inside casing 3 is responsive quality frame, and inside casing links to each other with middle boxes 2 through

elastic beam

11a, 11b, 11c, 11d, and uses truss to connect between the 11a, 11d, uses truss to connect between 11b, the 11c.It is last that inside casing 3 is fixed on

anchor point

13a, 13b, 13c, 13d through

elastic beam

14a, 14b, 14c, 14d.Wherein

elastic beam

14a, 14b, 14c, 14d become level (directions X) setting.

Detecting electrode is shown in 16a, the 16b, is arranged on the both sides up and down of structure intermediate transverse girder.15a, 15b be the detection side to feedback electrode, apply force feedback through 15a, 15b to structure, with reach the detection side to closed loop.

The fabrication hole structure is as shown in Figure 3, and 20 is the architecture quality piece, and structure is to adopt structure on the inside casing truss 19 shown in the figure a, and figure b is depicted as on the housing truss 9 and adopts structure, and figure c is depicted as on inside casing explant 1a, 1b and the inside casing 3 and adopts structure.

The step comb electrodes is as shown in Figure 4, and wherein, 21,22 is quiet tooth, and 23,24 are moving tooth.21 is the support beam structure on the fixed electorde 15,16, and 22 is the fixed fingers battery lead plate, and 23 is movable structure, the structural brace summer that promptly links to each other with inside

casing

3, and 24 is the movable comb electrodes plate.Wherein, movable comb electrodes plate 24 has adopted the step design.

Principle of work of the present invention: apply the sinusoidal signal that amplitude is identical, phase phasic difference 180 is spent on 5a, two electrodes of 5b through giving; Form differential capacitor with the dc offset voltage that is applied on the middle movable structure, the electrostatic force that produces directions X thus drives housing 1 and vibrates at directions X.The frequency that AC signal is set equates with the directions X vibration resonance frequency of total, makes the resonant condition of arrangement works, to produce maximum amplitude.Housing 1 through elastic beam 8 drive middle boxes 2 at directions X with equal amplitude and phase oscillation.When structure received the angular velocity of Z direction input, middle boxes 2 was because the coriolis force principle produces the vibration of Y direction.Middle boxes 2 is vibrated in the Y direction at the vibratory drive inside casing 3 of Y direction, because inside casing 3 receives the effect of elastic beam 14, has limited the directions X motion simultaneously, therefore only produces the forced vibration of Y direction, thereby plays the effect of full decoupling.Inside casing 3 is influenced by input angular velocity and the Y direction that produces is vibrated, and makes

electrode

16a, 16b change with the gap between the corresponding broach on the inside casing, thereby make capacitance variation.Through detecting 16a, the last capacitance variation of 16b, import but go out the suffered Z-direction angular velocity of structure with regard to Equivalent Calculation.

Claims

1. truss-like three framework micromechanical gyro structures inside and outside a kind; It is characterized in that structure comprises housing (1), inside casing (3) and middle boxes (2), housing (1) comprises two explants (1a, 1b) and two groups of girder trusses (9); Wherein every group of girder truss comprises two folded beams (8) and a truss (9); The outside of each explant (1a, 1b) is provided with comb electrodes, and the two ends of every girder truss connect a folded beam (8) respectively, and two groups of girder trusses (9) connect through explant (1a, 1b); Form housing (1), housing (1) is fixed on the structure outer end anchor point (7) through four folded beams; The two ends of middle boxes (2) are folded beam (10), are connected with folded beam (10) between housing (1) and the middle boxes (2); Connect through truss-beam folding beam (12) between the same inside casing of middle boxes (2) (3), the inside of inside casing (3) is provided with comb electrodes, and inside casing (3) is connected on the anchor point (13) of gyro inside configuration through four folded beams (14).

2. a kind of inside and outside truss-like three framework micromechanical gyro structures according to claim 1 is characterized in that, evenly have fabrication hole on described housing, inside casing and the girder truss.

3. a kind of inside and outside truss-like three framework micromechanical gyro structures according to claim 2 is characterized in that evenly have fabrication hole on described housing, inside casing and the girder truss, fabrication hole adopts hexagon, and is honeycomb arrangement.

4. a kind of inside and outside truss-like three framework micromechanical gyro structures according to claim 1 is characterized in that the inside of described inside casing (3) is provided with comb electrodes, and it becomes the gap broach and adopts trapezium structure, and the broach root adopts the ledge structure form.