CN102441735B - Orthogonal acousto-optic deflection device obtains the method for any laser beam profiles Energy distribution - Google Patents
Orthogonal acousto-optic deflection device obtains the method for any laser beam profiles Energy distribution Download PDFInfo
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- CN102441735B CN102441735B CN201110283629.8A CN201110283629A CN102441735B CN 102441735 B CN102441735 B CN 102441735B CN 201110283629 A CN201110283629 A CN 201110283629A CN 102441735 B CN102441735 B CN 102441735B
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- optic deflection
- hot spot
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Abstract
The invention discloses a kind of method obtaining the equivalent laser hot spot of arbitrary shape and energy profile based on orthogonal acousto-optic deflection device, the method utilizes two acousto-optic deflection devices of orthogonal placement each other, laser beam is scanned in that orthogonal direction, after focusing on, obtains the equivalent laser hot spot of fine focusing; And the shape of equivalent hot spot and laser scanning density are control effectively, realize the Arbitrary distribution of equivalent laser light spot shape and energy profile, not only can be used for the making of three-dimensional microstructures, also can be used for the high accuracy processing of surface of the work.
Description
Technical field
The present invention relates to a kind of method obtaining any laser beam power section, particularly relate to a kind of method utilizing orthogonal acousto-optic deflection device to obtain arbitrary shape and power profiles distribution, have broad application prospects at surface of the work two dimension, three-dimensional microstructures laser ablation manufacture field.
Background technology
The effect of Laser Processing is strongly depend on the shape of processing laser beam and the situation of bundle spot section Energy distribution, particularly important to lithography.And the development utilizing particular beam to distribute likely etches different cross-section structures in principle, this is an importance for Laser Processing application in future.
General laser beam, as basic mode exports as Gaussian beam, high-order mode is the light beam of multi-peak light distribution.The Beam Technique optical beam transformation of these basic models being become required arbitrary section industrially has strong demand.At present for the method that beam shaping adopts, as achieved the homogenising of beam profile with devices such as integral mirror, optical prism, diffraction optical element, microlens arrays, and beam homogenizer does not all form anyization of beam energy section, and optical element can only form the bundle spot of a solid shape.Therefore, consider from the angle of practical application, laser beam reshaping needs shape, an Energy distribution to change arbitrarily, and has the method for high degree of flexibility.The realization of this technology, to Laser Processing, makes laser ablation working ability be promoted significantly especially.
Summary of the invention
The object of the invention is to for prior art Problems existing, a kind of fine focusing light beam utilizing acousto-optic low-angle high frequency sweep is provided, control and form the Laser Processing hot spot of shape and energy profile Arbitrary distribution.And process for special Etching profile laser ablation.
Object of the present invention realizes by following technical measures:
Utilize two acousto-optic deflection devices of orthogonal placement, according to the light spot shape of design and the requirement of energy density distribution, by controlling two deflectors, light beam is scanned in that orthogonal direction, and by focusing on the equivalent laser processing hot spot obtaining fine focusing later, for the Laser Processing in the fields such as three-dimensional microstructures manufacture.Thus obtain arbitrary shape and the controlled equivalent laser hot spot of power profiles, and specific Etching profile requirement can be realized control beam shape and power profiles density.
When practical application, select the hot spot of required form and power distribution according to processing tasks, the excitation waveform of setting acousto-optic deflection device and intensity, thus the certain power needed for obtaining distributes and the hot spot of shape, to meet different processing requests.
Utilize specific light beam can meet the requirement of specific Etching profile, and by focusing on the equivalent laser processing hot spot obtaining fine focusing later, for the Laser Processing in the fields such as three-dimensional microstructures manufacture, laser ablation crudy and ability are promoted significantly.
The present invention has following useful meaning effect relative to prior art:
(1) the present invention utilizes acousto-optic deflection device to make laser instrument carry out optical scanner within the scope of certain angle, set according to the shape of required processing section and pass through to control excitation waveform and the intensity of orthogonal direction XY acousto-optic deflection device, laser scanning density in equivalent hot spot is control effectively, thus realize shape and the controlled arbitrarily processing hot spot of power profiles, to meet the requirement of specific Etching profile.
(2) invention increases the quality of laser ablation machining beams, not only can be used for the making of three-dimensional microstructures, also can be used for the high accuracy processing of surface of the work.
(3) the present invention can adopt and program controlly automatically to control, and has high degree of flexibility.
Accompanying drawing explanation
Fig. 1 is the method schematic diagram that the orthogonal acousto-optic deflection device of the present invention obtains any laser beam profiles Energy distribution.
Detailed description of the invention
Below by specific embodiment, the method that the present invention obtains any laser beam profiles and energy is described further.
The acquisition of the laser facula of triangle, energy even distribution:
With reference to Fig. 1, first by orthogonal for orthogonal acousto-optic scanning deflector 2 delivery outlet being placed in laser instrument 1.Setting target laser facula area is 0.2mm
2triangle hot spot.The excitation waveform (waveform needed for outer wave generator produces) of adjustment X, Y-direction acousto-optic deflection device and the power of laser beam are 15W, and make laser beam carry out low-angle high frequency sweep, just can obtain the area of section is 0.2mm
2, power is 15W and power equally distributed triangle equivalent laser hot spot.Utilize the equivalent laser hot spot obtained can carry out the processing of Etching profile for V-shaped groove structure.
Claims (1)
1. utilize orthogonal acousto-optic deflection device to obtain the method for triangle equivalent laser hot spot section and energy, it is characterized in that: two acousto-optic deflection devices utilizing orthogonal placement, and first by orthogonal for the orthogonal acousto-optic deflection device delivery outlet being placed in laser instrument; Setting target laser facula area is 0.2mm
2triangle hot spot, adjustment X, the excitation waveform of Y-direction acousto-optic deflection device and the power of laser beam be 15W, make laser beam carry out low-angle high frequency sweep, just can obtain the area of section is 0.2mm
2, power is 15W and power equally distributed triangle equivalent laser hot spot.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110283629.8A CN102441735B (en) | 2011-09-22 | 2011-09-22 | Orthogonal acousto-optic deflection device obtains the method for any laser beam profiles Energy distribution |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110283629.8A CN102441735B (en) | 2011-09-22 | 2011-09-22 | Orthogonal acousto-optic deflection device obtains the method for any laser beam profiles Energy distribution |
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| Publication Number | Publication Date |
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| CN102441735A CN102441735A (en) | 2012-05-09 |
| CN102441735B true CN102441735B (en) | 2015-10-07 |
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| CN201110283629.8A Active CN102441735B (en) | 2011-09-22 | 2011-09-22 | Orthogonal acousto-optic deflection device obtains the method for any laser beam profiles Energy distribution |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103956642A (en) * | 2014-04-15 | 2014-07-30 | 武汉嘉铭激光有限公司 | Automatic audio-optical deflection laser beam angle control device |
| CN108716894B (en) * | 2018-04-04 | 2020-04-28 | 杭州电子科技大学 | Non-mechanical laser three-dimensional scanning system based on acousto-optic deflector |
| CN109270763B (en) * | 2018-10-23 | 2020-05-19 | 华中科技大学 | Light beam homogenizer based on acousto-optic deflection |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6285002B1 (en) * | 1999-05-10 | 2001-09-04 | Bryan Kok Ann Ngoi | Three dimensional micro machining with a modulated ultra-short laser pulse |
| CN101121221A (en) * | 2006-08-09 | 2008-02-13 | 株式会社迪思科 | Laser beam irradiation apparatus and laser working machine |
| CN101879664A (en) * | 2010-06-21 | 2010-11-10 | 苏州市博海激光科技有限公司 | Focusing light spot small-range two-dimensional oscillating type laser roller surface texture processing method and device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7483196B2 (en) * | 2003-09-23 | 2009-01-27 | Applied Materials, Inc. | Apparatus for multiple beam deflection and intensity stabilization |
| JP2008049383A (en) * | 2006-08-28 | 2008-03-06 | Sumitomo Heavy Ind Ltd | Beam irradiation method and beam irradiation apparatus |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6285002B1 (en) * | 1999-05-10 | 2001-09-04 | Bryan Kok Ann Ngoi | Three dimensional micro machining with a modulated ultra-short laser pulse |
| CN101121221A (en) * | 2006-08-09 | 2008-02-13 | 株式会社迪思科 | Laser beam irradiation apparatus and laser working machine |
| CN101879664A (en) * | 2010-06-21 | 2010-11-10 | 苏州市博海激光科技有限公司 | Focusing light spot small-range two-dimensional oscillating type laser roller surface texture processing method and device |
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| CN102441735A (en) | 2012-05-09 |
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