CN103268915A - Flexible multiferroic device - Google Patents
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- CN103268915A CN103268915A CN2013101824343A CN201310182434A CN103268915A CN 103268915 A CN103268915 A CN 103268915A CN 2013101824343 A CN2013101824343 A CN 2013101824343A CN 201310182434 A CN201310182434 A CN 201310182434A CN 103268915 A CN103268915 A CN 103268915A
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Abstract
The invention provides a flexible multiferroic device of a novel structure. The flexible multiferroic device comprises a flexible multiferroic material and a supporting body, wherein a contact surface between the supporting body and the flexible multiferroic material is arranged on the bottom edge of the flexible multiferroic material, and the flexible multiferroic material is of a suspended shape with the contact surface as a support. Experiments prove that on one hand, the structure ensures 'self-supporting performance' of the flexible multiferroic device, and therefore the situation that the magnetoelectric coupling effect is weakened greatly due to the fact that the flexible multiferroic material is under the pinning constraint action because the bottom face of the flexible multiferroic material is directly placed on surfaces of other rigid supporting bodies can be avoided; on the other hand, the 'flexibility' of the flexible multiferroic device is ensured. Due to the fact that most of the flexible multiferroic material is of the suspended shape, vibration generated in a magnetoelectric coupling process is magnified as far as possible, and a strong magnetoelectric coupling effect can be achieved. Therefore, the flexible multiferroic device has a wide application prospect in the magnetic sensor field, the energy collection field and other fields.
Description
Technical field
The present invention relates to the multi-ferroic material technical field, magnetic sensor and collection of energy field relate in particular to a kind of many iron of flexibility property device, can use in magnetic sensing and the energy gathering devices.
Background technology
Multi-ferroic material is a kind of Multifunction material that integrates ferroelectricity, ferromagnetism and ferroelasticity.Because exist coupling to interact between various " iron ", multi-ferroic material has some unique physical effects, such as, by the coupling between ferroelectricity and the ferromagnetism, can utilize magnetic field control ferroelectricity, also can utilize electric field controls magnetic, comprise magnetic moment orientation etc.
Multi-ferroic material has important application prospects in the Weak magentic-field field of detecting, studies show that, multi-iron material Magnetic Sensor expection sensitivity is up to 10
-12More than the T, even can be used for surveying the Weak magentic-field that organism produces.In addition, multi-ferroic material writes magnetic field at electric field and reads aspects such as formula high density information storage and also have important application prospects.Therefore, the research of the exploration of novel multi-ferroic material, structure Design, mechanism has great importance for the supersensitive Magnetic Sensor of development and collection of energy.
At present, multi-ferroic material comprises rigidity multi-iron material and flexible multi-iron material.The rigidity multi-iron material often prepares on the stiff base surface, and perhaps material self has the rigid support effect, therefore has and be difficult to stress application, is difficult to shortcomings such as mass preparation.Comparatively speaking, flexible multi-iron material does not have substrate or substrate is flexibility, therefore not only has pliability, is easy to carry, and also greatly reduces the binding force of substrate, has strengthened magneto-electric coupled effect.
But, flexible material often has unformed property, when making flexible many iron property device and use by flexible multi-iron material, generally flexible multi-iron material need be placed on the rigid support, or flexible multi-iron material is limited in the packaging body with rigidity effect, therefore magneto-electric coupled effect that in actual use should many iron of flexibility property device is often owing to the pinning constraint effect of rigid support or packaging body weakens.
Summary of the invention
Technical purpose of the present invention is at above-mentioned existing problem when preparing flexible many iron property device by flexible multi-iron material, a kind of many iron of flexibility property device is provided, this device can reduce rigid support or packaging body to the influence of the magneto-electric coupled effect of flexible multi-iron material, realizes in the multi-iron material coupling bigger between the ferroelectric-ferromagnetic and uses more widely aspect transducer and collection of energy.
The present invention realizes that the technical scheme that above-mentioned technical purpose is taked is: a kind of many iron of flexibility property device, mainly comprise flexible multi-iron material, and touch the supporter be connected, be used for this flexibility multi-iron material of support with flexible multi-iron material bottom connection, the contact-making surface of described supporter and flexible multi-iron material is distributed in the bottom margin of this flexibility multi-iron material, and this flexibility multi-iron material serves as to support to be hanging shape with this contact-making surface.
Described flexible multi-iron material comprises single phase multi-iron material, perhaps ferroelectric/ferromagnetic the composite construction that is constituted by the ferromagnetic material with high-curie temperature, high magnetic intensity and the ferroelectric material with high ferroelectrie Curie temperature, high electrode intensity, as ferroelectric/ferromagnetic heterojunction or superlattice system, i.e. compound multi-iron material.
When flexible multi-iron material be ferroelectric/during ferromagnetic composite construction, as a kind of implementation, be followed successively by from bottom to top: bottom electrode layer, flexible ferroelectric basalis, top electrode layer, magnetic material layer.As another kind of implementation, be followed successively by from bottom to top: top magnetic material layer, bottom electrode layer, flexible ferroelectric basalis, top electrode layer, bottom magnetic material layer.
The contact-making surface of described supporter and flexible multi-iron material can be closed circulus, comprises the circulus of rule, and for example, the N limit shape structure N (N 〉=3) of circular ring structure, elliptical ring structure, hollow etc. also comprise irregular circulus; Also can be by individual independent of one another, the integral body that no overlapping sub-contact-making surface is formed of n (n 〉=2), this sub-contact-making surface shape comprises regular shape, for example N (N 〉=3) limit shape structure also comprises irregularly shaped.
The ferroelectric basalis of described flexibility need have piezoelectric effect, and this substrate includes but not limited to single crystalline substrate, ceramic substrate, metal substrate, organic substance substrate, plastic, ferroelectric substrate etc.
Described top electrode layer and bottom electrode layer adopt nonmagnetic substance to constitute, and comprise platinum, gold, titanium, tungsten, tantalum, aluminium, copper, silver and alloy thereof etc.
Described supporter adopts nonmagnetic substance to constitute, and includes but not limited to materials such as glass, plastics, rubber.
Described ferromagnetic material layers need have magnetostrictive effect, and its formation includes but not limited to magnetic metal, magnetic metal alloy, magnetic oxide, organo-metallic material etc.
Wherein, described magnetic metal, magnetic metal alloy, magnetic oxide, selecting for use of organo-metallic material are not limit, and comprise γ phase ferricoxide (Co-γ-Fe that iron (Fe), cobalt (Co), nickel (Ni), Graphene, ferrocobalt (Fe-Co), iron-nickel alloy (Fe-Ni), cochrome (Co-Cr), cobalt palladium multilayer film (Co/Pd), cobalt platinum multilayer film (Co/Pt), samarium-cobalt alloy (Sm-Co), SmCo evanohm (Sm-Co-Cr), terbium dysprosium ferrum magnetostriction alloy (Terfenol-D), iron gallium alloy (Fe-Ga), cobalt mix
2O
3), the tri-iron tetroxide (Co-Fe that mixes of cobalt
3O
4), γ phase ferricoxide (γ-Fe
2O
3), tri-iron tetroxide (Fe
3O
4), barium ferrite (BaFe
2O
4), strontium ferrite (SrFe
2O
4), Ni ferrite (Ni Fe
2O
4), Conjugate ferrite (CoFe
2O
4), strontium lanthanum manganese oxide (La, Sr) MnO
3, calcium manganate lanthanum (La, Ca) MnO
3, barium manganate lanthanum (La, Ba) MnO
3, mangaic acid plumbous lanthanum (La, Pb) MnO
3, silver manganate lanthanum (La, Ag) MnO
3, the organic polymer that mixes of magnetic-particle.
Selecting for use of described ferroelectric (piezoelectricity) material layer do not limit, and comprises barium titanate (BaTiO
3), the dopant material of barium titanate, lead base ferroelectric material or single phase multi-iron material constitute; The lead base ferroelectric material can be lead titanates (PbTiO
3), lead zirconate titanate (Pb (Zr, Ti) O
3), load lanthanium titanate ((La, Pb) TiO
3), lead lanthanum zirconate titanate ((La, Pb) (Zr, Ti) O
3), lead magnesio-niobate (Pb (Mg, Nb) O
3), lead zinc niobate (Pb (Zn, Nb) O
3), lead scandate columbate (Pb (Sc, Nb) O
3), PMN-PT (Pb (Mg, Nb) O
3-PbTiO
3), lead zinc niobate-lead titanates (Pb (Zn, Nb) O
3-PbTiO
3) or lead scandate columbate-lead titanates (Pb (Sc, Nb) O
3-PbTiO
3), barium titanate (BaTiO
3), barium strontium titanate ((Ba, Sr) TiO
3), ferrous acid bismuth (BiFeO
3) etc.; Single phase multi-iron material can be ferrous acid bismuth (BiFeO
3), organic ferroelectric material.
The flexible many iron property preparation of devices of the present invention method is simple, and the bottom margin that supporter is fixed on flexible multi-iron material gets final product.Wherein the technology of preparing of flexible multi-iron material includes but not limited to magnetron sputtering method, thermal evaporation, electron-beam vapor deposition method, sol-gal process or pulsed laser deposition etc.
When flexible multi-iron material be ferroelectric/during ferromagnetic composite construction, flexible ferroelectric basalis can obtain by buying the ferroelectric substrate of business-like flexibility; Also can utilize the method for sacrifice layer to prepare flexible ferroelectric basalis.
Many iron of flexibility property device of the present invention serves many purposes.For example, place it in the external magnetic field, namely can constitute magnetic field detectors.In the time of in working order, the bias-field that the external world applies can make the magneto-electric coupled size of device change, and causes under certain input voltage, and output voltage changes, thereby realizes the sensitivity in magnetic field is surveyed.
In addition, the vibration as if many iron of flexibility property device of the present invention being added certain frequency namely can constitute the collection of energy device.In the time of in working order, add the vibration frequency that vibration can influence this many iron of flexibility property device, cause the output of ferroelectric material to change, thereby realize the collection of energy.
In sum, many iron of flexibility property device provided by the invention comprises flexible multi-iron material and supporter, the bottom contact area of this supporter and flexible multi-iron material is less than the bottom area of this flexibility multi-iron material, and should the flexibility multi-iron material be to support to be hanging shape with the contact-making surface.This structure guarantees " self-supporting " of this many iron of flexibility property device on the one hand, namely providing in many iron of flexibility property device contacts with multi-ferroic material is connected and supporter that contact-making surface is as far as possible little, to support this multi-ferroic material, thereby avoid flexible multi-iron material bottom surface directly to place surfaces such as other rigid supports, cause the whole bottom surface of flexible multi-iron material to be subjected to pinning constraint effect and magneto-electric coupled effect weakens greatly; Guarantee " flexibility " of this many iron of flexibility property device on the other hand, be support with this contact-making surface namely, flexible multi-iron material is hanging shape, has avoided the bottom constraint of flexible multi-iron material, the vibrations that produce in the magneto-electric coupled process are amplified as far as possible, thereby realize bigger magneto-electric coupled effect.Therefore, compared with prior art, the present invention has following beneficial effect:
(1) structural design is simply ingenious, by flexible multi-iron material is applied supporter, the effect of intercoupling between magnetic and the electricity was strengthened, can make originally unbodied flexible multi-iron material make moulding again, and make the device of various structures, in real life, have a wide range of applications;
(2) by to the adjustment of supporter position and structure, effectively improved should many iron of flexibility property device magneto-electric coupled effect, have the favorable industrial actual application prospect;
(3) extensibility is strong, and applicability is strong, can be applied in the multiple entities such as inductance, many iron property Magnetic Sensor, magnetic recording equipment.
Description of drawings
Fig. 1 is the vertical section cutaway view in the embodiment of the invention 1 flexible many iron property device;
Fig. 2 is the cross sectional representation of supporter among Fig. 1;
Fig. 3 is the structural representation that the embodiment of the invention 1 flexible many iron property device is used for magnetic field detectors;
Fig. 4 is the structural representation that the embodiment of the invention 1 flexible many iron property device is used for energy harvester;
Fig. 5 is that the embodiment of the invention 1 flexible many iron property device is biased magneto-electric coupled effect figure after the match outside;
Fig. 6 is the vertical section cutaway view in the embodiment of the invention 2 flexible many iron property devices;
Fig. 7 is the cross sectional representation of supporter among Fig. 6.
Embodiment
Be described in further detail below in conjunction with the present invention of accompanying drawing embodiment, it is pointed out that the following stated embodiment is intended to be convenient to the understanding of the present invention, and it is not played any restriction effect.
Reference numeral among Fig. 1-7 is: hearth electrode 1, flexible ferroelectric substrate 2, top electrode 3, top ferromagnetic material layers 4, bottom ferromagnetic material layers 5, supporter 6, contact conductor and phase-locked output 7, Helmholtz coil 8, flexible multi-iron material 9.
Embodiment 1:
In the present embodiment, as shown in Figure 1, flexible many iron property device mainly comprises flexible multi-iron material 9, and touches the supporter 6 that is connected, is used for supporting this flexibility multi-iron material 9 with flexible multi-iron material 9 bottom connections.
As shown in Figure 1, flexible multi-iron material 9 is followed successively by from bottom to top: hearth electrode 1, flexible ferroelectric substrate 2, top electrode 3, top ferromagnetic material layers 4.Wherein, flexible ferroelectric substrate 2 constitutes for PVDF; Top ferromagnetic material layers 4 is made of amorphous wire metglas, and its magnetostriction coefficient is 60ppm; Hearth electrode 1 and top electrode 3 are the Al material.
Above-mentioned many iron of flexibility property preparation of devices method is as follows:
Step 1: plate top electrode 3 and hearth electrode 1 respectively in the upper and lower surface of the ferroelectric substrate 2 of flexibility, be coated with epoxide-resin glue on top electrode 3 surfaces then, magnetic material layer is pasted on top electrode 3 surfaces, the sample two sides that bonding is good is separately fixed in the middle of two slides, utilize clip that slide is fixed, put to shady and cool ventilation, treat that firmly sample is taken out in the back, namely obtain flexible multi-iron material 9;
Step 2: the hollow cylindrical glass support 6 of choosing proper height and size is made supporting construction, keep this cylindric supporter 6 surface cleanings, do not have magnetic impurity, simultaneously, the surface that guarantees this cylindric supporter 6 is smooth fully, in order to support above-mentioned flexible multi-iron material 9;
Step 3: flexible multi-iron material 9 bottom margins that will prepare are bonded on the ready supporter 6 and (utilize epoxide-resin glue or 502 glue), namely the contact-making surface of this supporter 6 and flexible multi-iron material 9 is distributed in the bottom margin of this flexibility multi-iron material 9, making this flexibility multi-iron material 9 serves as to support " drum " formula of formation or hanging type structure with this contact-making surface, and in top electrode 3 and hearth electrode 1 two ends extraction electrode and phase-locked output 7, namely obtain flexible many iron property device as shown in Figure 1.
When the above-mentioned flexible many iron property device that makes is applied an AC magnetic field, because the magnetostrictive effect of top ferromagnetic material layers 4, can cause the vibrations of the metglas amorphous wire of top ferromagnetic material layers 4, thereby drive the vibrations of flexible ferroelectric substrate 2, and then because piezoelectric effect produces an output voltage.Because the contact-making surface of supporter 6 and flexible multi-iron material 9 is positioned at the bottom margin of flexible multi-iron material 9 in flexible many iron property device of this structure, and this contact-making surface is much smaller than the bottom area of flexible multi-iron material 9, be support with this contact-making surface simultaneously, flexible multi-iron material 9 is hanging shape, therefore effectively avoided the bottom constraint of flexible multi-iron material 9, the vibrations that produce in the magneto-electric coupled process are amplified as far as possible, thereby can realize bigger magneto-electric coupled effect.
As shown in Figure 3, the above-mentioned flexible many iron property device that makes is put into a Helmholtz coil 8, survey its voltage output, namely can be used to do Magnetic Sensor.In the time of in working order, the bias-field that the external world applies can make magneto-electric coupled size change, and causes under certain input voltage, and output voltage changes, thereby realizes the sensitivity in magnetic field is surveyed.
Vibration when the above-mentioned flexible many iron property device that makes being added certain frequency as shown in Figure 4, namely can constitute the collection of energy device.In the time of in working order, add the vibration frequency that vibration can influence this many iron of flexibility property device, cause the output of ferroelectric material to change, thereby realize the collection of energy.
By the above-mentioned flexible many iron property device for preparing of magneto-electric coupled test system and test, the result as shown in Figure 5, as can be seen, this many iron of flexibility property device has bigger magneto-electric coupled effect, under the situation that adds the 10Oe bias-field, it is magneto-electric coupled to increase to original ten times, illustrates that this device is very responsive to the outfield, can be used in Weak magentic-field and surveys.
Embodiment 2:
In the present embodiment, as shown in Figure 6, flexible many iron property device mainly comprises flexible multi-iron material 9, and touches the supporter 6 that is connected, is used for supporting this flexibility multi-iron material 9 with flexible multi-iron material 9 bottom connections.
As shown in Figure 6, flexible multi-iron material 9 is followed successively by from bottom to top: bottom ferromagnetic material layers 5, hearth electrode 1, flexible ferroelectric substrate 2, top electrode 3, top ferromagnetic material layers 4.Wherein, flexible ferroelectric substrate 2 constitutes for PVDF; Bottom ferromagnetic material layers 5 is made of amorphous wire metglas with top ferromagnetic material layers 4, and its magnetostriction coefficient is 60ppm; Hearth electrode 1 and top electrode 3 are the Al material.
Above-mentioned many iron of flexibility property preparation of devices method is as follows:
Step 1: plate top electrode 3 and hearth electrode 1 respectively in the upper and lower surface of the ferroelectric substrate 2 of flexibility, be coated with epoxide-resin glue on top electrode 3 surfaces then, top ferromagnetic material layers 4 is pasted on top electrode 3 surfaces, bottom ferromagnetic material layers 5 is pasted on hearth electrode 1 surface, the sample two sides that bonding is good is separately fixed in the middle of two slides, utilizes clip that slide is fixed, and puts to shady and cool ventilation, treat that firmly sample is taken out in the back, namely obtain flexible multi-iron material 9;
Step 2: the column that to choose two identical cross sections be rectangle keeps this supporter 6 surface cleanings as supporter 6, does not have magnetic impurity, simultaneously, guarantees that the surface of this supporter 6 is smooth fully, in order to support above-mentioned flexible multi-iron material 9;
Step 3: the bottom edges at two ends of the flexible multi-iron material 9 that will prepare is bonded on the ready supporter 6 and (utilizes epoxide-resin glue or 502 glue), namely the contact-making surface of this supporter 6 and flexible multi-iron material 9 is distributed in the bottom edges at two ends of this flexibility multi-iron material 9, making this flexibility multi-iron material 9 serves as to support to form the hanging type structure with this contact-making surface, and at top electrode 3 and hearth electrode 1 two ends extraction electrode, namely obtain flexible many iron property device as shown in Figure 6.
When the above-mentioned flexible many iron property device that makes is applied an AC magnetic field, because the magnetostrictive effect of ferromagnetic material layers, the metglas amorphous wire produces vibrations, thereby drives the vibrations of flexible ferroelectric substrate 2, and then because piezoelectric effect produces an output voltage.Because the contact-making surface of supporter 6 and flexible multi-iron material 9 is positioned at the bottom margin of flexible multi-iron material 9 in flexible many iron property device of this structure, and this contact-making surface is much smaller than the bottom area of flexible multi-iron material 9, be support with this contact-making surface simultaneously, flexible multi-iron material 9 is hanging shape, therefore effectively avoided the bottom constraint of flexible multi-iron material 9, the vibrations that produce in the magneto-electric coupled process are amplified as far as possible, thereby can realize bigger magneto-electric coupled effect.
Similar shown in Figure 3, the above-mentioned flexible many iron property device that makes is put into a Helmholtz coil 8, survey its voltage output, namely can be used to do Magnetic Sensor.In the time of in working order, the bias-field that the external world applies can make magneto-electric coupled size change, and causes under certain input voltage, and output voltage changes, thereby realizes the sensitivity in magnetic field is surveyed.
Similar shown in Figure 4, the vibration when the above-mentioned flexible many iron property device that makes being added certain frequency namely can constitute the collection of energy device.In the time of in working order, add the vibration frequency that vibration can influence this many iron of flexibility property device, cause the output of ferroelectric material to change, thereby realize the collection of energy.
By the above-mentioned flexible many iron property device for preparing of magneto-electric coupled test system and test, the result is similar shown in Figure 5, as can be seen, this many iron of flexibility property device has bigger magneto-electric coupled effect, and it is very responsive that this magneto-electric coupled effect externally is biased external conditions such as field and frequency, can be used in Weak magentic-field and survey.
Above-described embodiment has been described in detail technical scheme of the present invention; be understood that the above only is specific embodiments of the invention; be not limited to the present invention; all any modifications of in principle scope of the present invention, making, replenish or similar fashion substitutes etc., all should be included within protection scope of the present invention.
Claims (8)
1. many iron of flexibility property device is characterized in that: comprise flexible multi-iron material, and touch the supporter that is connected, is used for supporting this flexibility multi-iron material with flexible multi-iron material bottom connection; The contact-making surface of described supporter and flexible multi-iron material is distributed in the bottom margin of this flexibility multi-iron material, and described flexible multi-iron material serves as to support to be hanging shape with this contact-making surface.
2. many iron of flexibility property device according to claim 1, it is characterized in that: described flexible multi-iron material comprises single phase multi-iron material and compound multi-iron material.
3. many iron of flexibility property device according to claim 1 is characterized in that: when described flexible multi-iron material was compound multi-iron material, its structure was followed successively by from bottom to top: bottom electrode layer, flexible ferroelectric basalis, top electrode layer, magnetic material layer.
4. many iron of flexibility property device according to claim 1, it is characterized in that: when described flexible multi-iron material was compound multi-iron material, its structure was followed successively by from bottom to top: top magnetic material layer, bottom electrode layer, flexible ferroelectric basalis, top electrode layer, bottom magnetic material layer.
5. according to described many iron of the flexibility property of arbitrary claim in the claim 1 to 4 device, it is characterized in that: the contact-making surface of described supporter and flexible multi-iron material is closed circulus, or the integral body individual independently of one another by n (n 〉=2), that no overlapping sub-contact-making surface is formed.
6. many iron of flexibility property device according to claim 5, it is characterized in that: described circulus comprises the N limit shape structure N (N 〉=3) of circular ring structure, elliptical ring structure, hollow.
7. many iron of flexibility property device according to claim 5, it is characterized in that: described sub-contact-making surface shape comprises N (N 〉=3) limit shape structure.
8. according to described many iron of the flexibility property of arbitrary claim in the claim 1 to 4 device, it is characterized in that: described supporter adopts nonmagnetic substance to constitute, and comprises one or both the mixture in glass, plastics, the rubber.
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| CN103268915B (en) | 2015-09-30 |
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