CN103363951A - Trigonometry distance measurement system and method - Google Patents

Trigonometry distance measurement system and method Download PDF

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Publication number
CN103363951A
CN103363951A CN201210103611XA CN201210103611A CN103363951A CN 103363951 A CN103363951 A CN 103363951A CN 201210103611X A CN201210103611X A CN 201210103611XA CN 201210103611 A CN201210103611 A CN 201210103611A CN 103363951 A CN103363951 A CN 103363951A
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point
reflection ray
measurement
optical unit
receiving trap
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CN103363951B (en
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穆罕默德.M.达乃斯帕纳哈
凯文.G.哈丁
谢广平
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General Electric Co
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General Electric Co
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Abstract

The invention relates to a triangulation distance measurement system and method. The measurement system comprises a light source, an optical unit and a receiving device, wherein the light source can be used for projecting light rays to points on an object; the optical unit rotationally captures reflection rays which correspond to the points at multiple positions around the projected rays; and the receiving device can perform induction processing on the reflection rays from the optical unit to perform repeated point measurement so as to obtain the distance between the points.

Description

Trigonometry Range Measurement System and method
Technical field
The present invention relates to a kind of measuring system and method, relate in particular to a kind of trigonometry range observation (Triangulation Distance Measurement) system and method that can be used to improve accuracy of measurement (Accuracy) and repeatability (Repeatability).
Background technology
To the size of object, thereby such as being measured, its thickness can guarantee that this object has suitable framework or shape realizes suitable performance.Because have non-contacting characteristic, faster measuring speed and better simply framework, the measurement of carrying out based on trigonometry has been widely used, such as being applied in astronomy and geographical the measurement.
In the process of trigonometry range observation, typical, light can project on the point on the object, simultaneously to carrying out the distance that sensing determines to arrive this point from the reflected light of this point or the part of back-scattering light (Back-Scattered Light).For accuracy and the repeatability thereof that improves measurement, common way is that expectation is only uniform from the backscattering of measurement point, because its homogeneity, thereby just can obtain measurement result accurately and improve the repeatability of measuring by the part of uniform back-scattering light is measured, this and body surface susceptibility (Surface Sensitivity) or surface structure (Surface Texture) have relation.
Yet the body surface of processing includes a large amount of small facet that is similar to minute surface or microstructures (Facets) usually.Each facet or microstructure have its unique orientation (Orientation).Because the variation in the orientation of these facets or microstructure and the flaw on other the plane want that it is relatively more difficult making the even distribution of back-scattering light one-tenth from a specified point, this has just caused this point measurement is inaccurate.In addition, under identical measuring condition, because the variation in the orientation of these microstructures, also can there are differences between the measurement result to the distance of difference, this has just caused the reduction of measuring repeatability, and this can cause owing to the interference of light the amount of the light that can respond to and receive that the conversion of the angle of light causes.
At present, there has been multiple trial to alleviate the impact of body surface susceptibility in the measuring process or surface structure to improve accuracy and the repeatability of measuring.Such as, the different point of body surface is measured to obtain a plurality of measurement results, then measurement result is averaged to obtain an average result.Yet this kind measuring method can not significantly improve accuracy and the repeatability of measurement, and it can not satisfy the growing requirement to measurement accuracy and repeatability.
So, need to provide a kind of new trigonometry Range Measurement System and method to improve accuracy, measuring speed and the measuring repeatability of measuring.
Summary of the invention
One embodiment of the present of invention provide a kind of trigonometry Range Measurement System.This measuring system comprises light source, optical unit and receiving trap.Light source can be used on the point of throw light to the object.The rotating corresponding reflection ray catching around a plurality of positions of described throw light from described point of optical unit.Receiving trap can be processed the distance that obtains this point with the measurement of carrying out plural number time described point to responding to from the described reflection ray of described optical unit.
Another embodiment of the present invention provides a kind of trigonometry distance measurement method.The method comprises with light source coming on the point of throw light to the object; Use that optical unit is rotating is catching from the corresponding reflection ray of described point and using receiving trap with to having obtained the distance of described point since responding to processing from the described reflection ray of described optical unit around a plurality of positions of described throw light.
Description of drawings
Be described for embodiments of the invention in conjunction with the drawings, the present invention may be better understood, in the accompanying drawings:
Fig. 1 is the schematic diagram of an embodiment of trigonometry Range Measurement System of the present invention;
Fig. 2 is the schematic diagram of an embodiment of the measure setup of trigonometry Range Measurement System of the present invention;
Fig. 3 is the floor map of the measure setup shown in Fig. 2 of the present invention;
Fig. 4 be trigonometry Range Measurement System of the present invention the schematic diagram of another embodiment of measure setup; And
Fig. 5 for for trigonometry Range Measurement System of the present invention the schematic diagram of another embodiment of measure setup.
Embodiment
Figure 1 shows that the schematic diagram of an embodiment of trigonometry Range Measurement System 10 of the present invention.In embodiments of the present invention, trigonometry Range Measurement System 10 can be used to the positional information to the point on the body surface, and it includes but not limited to that range information measures.In certain embodiment, 10 definition of trigonometry Range Measurement System have offshore distance (Standoff Distance) or reference distance d1 and measurement range (Measurement Range) d2, thereby when object moves, can carry out range observation to the point on the object that is in diverse location in measurement range d2.
So-called " offshore is apart from d1 " can refer to that wherein, light can project outside the system 10 by this window from the starting position of measurement range d2 to the distance of the window of measuring system 10 herein.So-called " measurement range d2 " can refer to work as object along its path movement and the distance range of having measured since can responding to back-scattering light.In certain example, offshore is transformable and can determines according to the design of trigonometry Range Measurement System 10 apart from d1 and measurement range d2.
As shown in Figure 1, in one embodiment, triangulation system 10 comprises light source 11, optical unit 12 and receiving trap 13.Light source 11 can be used to produce and transmission ray 14 projects on the point 102 on the object 100 that is in 101 places, position it.In some applications, light source 11 can comprise laser.In other are used, light source 11 also can comprise mercury-arc lamp (MercuryArc Lamp), metal halide arc lamps (Metal Halide Arc Lamp), Halogen lamp LED (Halogen Lamp), phosphorescence laser system (Laser/phosphor System), fiber coupled laser (Fiber Coupled Laser), light emitting diode (Light-emitting Diode, LED) light source and white light source (White Light Source).
Based on the difference of the light source that uses, trigonometry Range Measurement System 10 can comprise that laser triangulation Range Measurement System or other suitable optical triangulation length of normals carry out range observation from measuring system.In a non-limiting example, trigonometry Range Measurement System 10 can comprise the laser triangle displacement sensor of a routine or customization, as comprising that the model of being produced by rice iridium (Micro-Epsilon) company that is positioned at Bavaria, Germany (Ortenburg) is the laser triangulation Range Measurement System of OptoNCDT 2300, its offshore distance can be 130 millimeters, and measurement range can be 200 millimeters.
Optical unit 12 can be used to catch from the reflection ray 15 of the point 102 on the object 100 and this light 15 and is transferred to receiving trap 13.In some instances, optical unit 12 can comprise one or more optical elements.In non-limiting example, optical unit 12 can comprise object lens (Object Lens) 110.Receiving trap 13 can be used to respond to the reflected light from the scattering of object 100.In one example, receiving trap 13 can include processing element (not shown) to analyze to calculate the distance of the point 102 on the object 100 that is in 101 places, position from the reflection ray 15 of optical unit 12.
In another example, receiving trap 13 also can be by communicating to finish analytical calculation with the processing element that can carry out the light processing.In non-limiting example, so-called " point " can refer to the point on the object, and this point can be the surface that comprises the object of a plurality of small minute surfaces, and its size can change along with concrete application.
In certain embodiments, processing element is not limited to any treating apparatus that specifically can be used to carry out Processing tasks of the present invention.In embodiments of the present invention, processing element can represent anyly can carry out computing or calculating, is necessary device for carrying out task of the present invention.As skilled in the art to understand, processing element also can represent anyly can receive input and according to the rules rule treatments this input, thus the device that generation is exported.In some instances, receiving trap 13 can be included in charge coupled cell or Position-Sensitive Detector (Position Sensitive Detector, PSD), it can be included in one dimension or two dimension has a monolithic PIN photodiode (Monolithic PIN Photodiode) of homogeneous impedance.
Like this, in operation, light source, as laser 11 produce and the point 102 of transmission ray 14 to the object 100 that is positioned at 101 places, position on.Subsequently, optical unit 12 is caught and is transmitted from point 102 reflection ray to receiving trap 13, such as the distance of processing to get access to the point 102 on the object 100 that is positioned at 101 places, position on the Position-Sensitive Detector.
In the present embodiment, optical unit 12 is provided with optical axis (not shown), its with come the axis 16 of the throw light 14 of self-excitation light source 11 to have certain angle, this can be described as the triangle range observation.In addition, as shown in Figure 1, when object 100 (shown in dotted line) moves into place different position in measurement range, behind position 103 and 105 places, the distance of corresponding point 104 and 106 just can be measured on it.In certain application, point 102,104 and 106 can be point identical or different on the object 100.
In some instances, the point on the object has less size.In a non-limiting example, the luminous point (Light Spot) that projects the point on the object is of a size of 200 microns and multiply by 70 microns.Certainly, the size of luminous point can change along with different application.Trigonometry Range Measurement System 10 shown in the embodiment of the invention only is schematically, in certain embodiments, one or more optical elements also can be set in the light path of light 14 come light 14 is calibrated to project on the point on the object.
Usually, in the process of utilizing trigonometry that the distance of the point on the body surface is measured, when upper to point from the ray cast of light source, from the reflected light of the scattering of this point can round from the axis of the light of light source and form the spot area (Cone-Shaped Speckle Field) with conical by its shape.Therebetween, a part of reflected light is hunted down and analyzes to carry out range observation.
Yet, as previously mentioned and since body surface may be processed or make include a large amount of small facet that is similar to minute surface or microstructures (Facets).Owing to the variation in the orientation of these facets or microstructure causes can't evenly distributing around the axis of throw light from the back-scattering light of putting on the object, this also can think the surface-sensitive of object.Like this, the reflected light of catching only is the reflection from certain single direction in the reflected light of putting on the object, this also just caused measuring inaccuracy.The variation in so-called facet or microstructure orientation and body surface roughness (Surface Roughness) or surface structure (Surface Texture) have relation herein.
In certain application, under identical measuring condition, when the distance that is positioned at the difference on the similar face is measured, at this moment, measuring repeatability (Measurement Repeatability) or precision for the difference measurement, also can be referred to as point-to-point measuring repeatability (Point to Point Measurement Repeatability) or precision, also can be subject to the impact of body surface roughness or surface structure.In some instances, also can be to the measuring repeatability of identical point, or be referred to as static measurement repeatability (Static Measurement Repeatability) and also improve.In embodiments of the present invention, so-called " accuracy " can refer under the same conditions a measurement result and the real degree that is close of result independently.So-called " repeatability or precision " can refer to use the consistance of the measurement result that identical equipment carries out same measured target under identical condition.
Figure 2 shows that the schematic diagram among the embodiment of measure setup of trigonometry Range Measurement System 10 that can be in different measurement ranges improves measurement accuracy and measuring repeatability to reduce surface-sensitive.Figure 3 shows that the floor map of the measure setup shown in Fig. 2.In this embodiment, include the assembly 18 (as shown in Figure 1) of optical unit 12 and receiving trap 13 thus can repeat corresponding a measurement in different positions with respect to light source 11 motion.
In a non-limiting example, such as Fig. 1 to shown in Figure 3, in measuring process, on the point 102 of the continuous throw light 14 of the frequency that light source 11 can be certain to the object 100.Assembly 18 round the optical axis 16 of light 14 rotate from, optical unit 12 is caught a corresponding part from the back-scattering light (reflected light of scattering) 15 of point 102 therebetween.In other examples, along with the rotation of assembly 18, light 14 also can be projected onto on the object 100 at a certain time interval, such as, when assembly 18 moved between two adjacent positions, light source 11 is throw light 14 not.
In one example, thus assembly 18 can be turned to a plurality of positions can be measured accordingly from different observed rays.These a plurality of positions can arrange around central point 17.Different rotating mechanisms can make runner assembly 18 such as solenoid or other suitable mechanisms.For the ease of diagram, along with the rotation of assembly 18, can for illustrating it, example rotate around central point 17 with optical unit 12.In addition, also can for illustrating its rotation that can form at least a portion circumference, example measure accordingly by receiving trap 13.
In some applications, as shown in Figure 2, the first range observation can carry out obtaining a little the first measurement result of 102 at primary importance 107 places.After finishing the first range observation, assembly 18 is moveable to the second place 108 places to carry out second and measures to obtain a little the second measurement result of 102.After finishing the second distance measurement, assembly 18 is moveable to 109 places, the 3rd position and carries out the 3rd range observation to obtain a little 102 the 3rd measurement result.
Similar, along with assembly 18 moves to different positions, just can carry out a plurality of measurements corresponding with its position to obtain a little a plurality of measurement results of 102.In addition, in the process of measuring in corresponding position, assembly 18 also can continuous rotation between primary importance 107 and the 3rd position 19 or rearmost position.
In the present embodiment, but the rotation forming curves 19 of assembly 18, and position 107 to 109 is positioned on this curve 19.In certain example, the rotation of assembly 18 can form the curve 19 with different shape, such as circular or oval.In this example, curve 19 is circular, and central point 17 can be used as circular 19 the center of circle and is positioned on the optical axis 16.In a non-limiting example, in the plural number of point 102 was measured, the angular span θ of assembly 18 can be 90 degree, such as the scope from negative 45 degree to positive 45 degree.This angular span θ can be the center of circle 17 respectively with corresponding first and the rearmost position, such as the angle between the line of position 107 and 109.Each of assembly 18 take measurement of an angle α can be in from 5 the degree to 15 the degree scopes in, as 10 the degree.This take measurement of an angle can be the center of circle 17 respectively with adjacent two positions, as position 107 and 108 or the line of position 108 and 109 between angle.In other examples, the α that takes measurement of an angle of assembly 18 can change.The α that takes measurement of an angle in different measurements is also different for assembly 18.
In the embodiment shown in Fig. 1-3, when in different positions to putting in 102 the distance measurement process, measuring system 10 is used single components 18.Optical unit 12 is fixed to one another with the position of receiving trap 13.In addition, light source 11 is also fixed to one another with the position of measured point.In one example, putting 102 positions fixes.
Like this, owing to put 102 plural number time measurement at the diverse location place that distributes around central point 17, just can obtain a plurality of measurement results and it is processed, such as averaging to obtain to put more accurately 102 measurement result.Such as, on being distributed in around five diverse locations in the scope between the position 107 to 109 of central point 17, to same point, as put 102 measurements of carrying out, can obtain corresponding five measurement results.Subsequently, these five measurement results are averaged and obtain average measurement result, this result just can be considered to a little 102 final measurement.
Similar, in another example, also can be to same point on being distributed in around 50 diverse locations in the scope between the position 107 to 109 of central point 17, as put 102 measurements of carrying out, can obtain corresponding five measurement results.Subsequently, these 50 measurement results are averaged and obtain average measurement result, this result just can be considered to a little 102 final measurement.
In certain application, to putting in 102 the distance measurement process, measurement result can be subject to surperficial noise (Surface Noise) impact and cause measurement result inaccurate.In a non-limiting example, in order to alleviate or avoid the impact of surperficial noise, to putting in a plurality of measurement result processing procedures of 102, can ignore minimum and maximum measurement result or get rid of first.Then remaining measurement result is averaged to obtain final measurement result.
In other examples, can and calculate its three times of standard deviation values based on all measurement results.Then, each measurement result and calculating three times mark deviates are compared, thus greater than or the measurement results that exceed three times of mark deviates ignore or get rid of.At last, remaining measurement result on average with the measurement result after the processing that obtains point 102.
In other are used, when to put 102 carry out range observation after and the position of object when not changing, can utilize similar measuring process that points different on the object is measured to obtain corresponding measurement result.In addition, as shown in Figure 1, object 100 is other interior positions of measurement range d2 movably, such as position 103 and 105.In each position, can sharp similar measuring process to the point on the object 100, as put 104 or 106 and carry out plural number time measurement.
In a non-limiting example, Range Measurement System 10 can to different band points under identical measuring condition, be measured such as five points accordingly.In the measurement of each point, the angular span of assembly 18 can be in from negative 45 degree in the scopes of positive 45 degree, and each takes measurement of an angle and can be 10 degree.Certainly, take measurement of an angle and to change.
Thereby, along with the rotation of assembly 18 round optical axis 16, can obtain ten measurement results and it is processed with respect to each point.Like this, just can obtain five measurement results after corresponding the processing with respect to five points.In one embodiment, based on the comparison of the measurement result after five processing, measuring accuracy can be better than 8 microns, and this shows that Range Measurement System 10 of the present invention has higher measurement performance, has improved the measuring accuracy of measuring system.In certain application, under identical measuring condition, by the comparison to the measurement result of the difference on the same level on the object, but also the shape of effects on surface is determined.
In example shown in Figure 2, the assembly 18 that includes receiving trap 13 can rotate around the optical axis 16 of light 14 to be measured.In other were used, receiving trap 13 was also actionless, and its position is fixed.Figure 4 shows that the schematic diagram of another embodiment of the measure setup of trigonometry Range Measurement System 10 of the present invention.
Fig. 2 is similar with the embodiment shown in Fig. 4.The two difference is in the embodiment shown in fig. 4, and the position of receiving trap 13 is fixed.Light source cell 12 comprises object lens 100 and capturing unit 20.Capturing unit 20 can be used to catch in a plurality of positions that distribute round light 14 from a part of scattered reflection light 15 of the point 102 of object 100 and it and is transferred to receiving trap 13.In the present embodiment, rotating during capturing unit 20, it is provided with the assembly (not mark) that includes the first reflective optical devices 21 and the second reflective optical devices 22.In non-limiting example, the first reflective optical devices 21 and the second reflective optical devices 22 can comprise reflective mirror (Reflective Mirrors).
Like this, when operation, similar to the rotation of the assembly 18 shown in Fig. 3 to Fig. 2, the first reflective mirror 21 can rotate to catch in a plurality of positions around the optical axis 16 of light 14 and reflect on scattered reflection light 15 to second reflective mirrors 22 of a corresponding part from point 102.Subsequently, the second reflective mirror 22 receives and the corresponding reflection ray from the first reflective mirror 21 is reflexed on the lens 110 so that receiving trap 13 carries out sensing.In some applications, when operation, the first reflective mirror 21 can rotate continuously, and receiving trap 13 can carry out sensing to corresponding light when the first reflective mirror 21 turns to the position of expectation.Certainly, in other examples, the first reflective mirror 21 also can discontinuously rotate.
In the present embodiment, in operation, the position of receiving trap 13 is fixed.In some instances, the position of lens 110 also fixing and receiving trap 13 also fix with respect to lens 110.In addition, thereby in order to ensure the second reflective mirror 22 can from the light reflection of the first reflective mirror 21 to lens 110 received 13 sensings of device, thereby the second reflective mirror 22 also can rotate and can be according to the position of the position adjustment self of the first reflective mirror 21 so that it is processed in receiving trap 13 to lens 110 from the light reflection of the first reflective mirror 21.
In certain application, capturing unit 20 can comprise that also other suitable optical elements finish measurement to cooperate with fixing receiving trap 13.As shown in Figure 5, embodiment is similar to embodiment shown in Figure 4.The two difference is in Fig. 5, and capturing unit 20 comprises prism 23, and it is arranged on the light path from the reflection ray of the scattering of point 102.In some instances, one or more prisms 23 can be set.
Like this, to similar among the embodiment shown in Figure 4, in operation, along with the rotation of prism 23 around the optical axis 16 of light 14, on a plurality of different positions, thereby prism 23 is caught and is transmitted a corresponding part it can be processed in receiving trap 13 to lens 110 from point 102 scattered reflection light 15.
In certain embodiment, Range Measurement System 10 includes optical unit 12, and the reflection ray of putting from body surface is accordingly caught in its a plurality of different position that can distribute at the optical axis around light, thereby reduces surface-sensitive.Measure based on the plural number to point, the accuracy of measurement and repeatability just can be improved.Further, Range Measurement System 10 also can carry out the measurement of better quality in different measurement ranges.
Under identical measuring condition, because the use of Range Measurement System 10, also can be improved to measuring accuracy or the consistance of difference on the body surface.Such as, in one example, the measuring accuracy of the point-to-point of the Range Measurement System 10 in the embodiment of the invention is approximately 8 microns, and the measuring accuracy of point-to-point is approximately 59 microns in traditional Range Measurement System, and it is approximately 7 times of measuring accuracy of the point-to-point of the Range Measurement System 10 in the embodiment of the invention.
In addition, in some instances, Range Measurement System 10 is provided with single assembly 18 with measuring of rotating.In other examples, receiving trap 13 can be fixed, and prism 23 or reflective mirror 21-22 can be provided to measure.Like this, system architecture of the present invention is just fairly simple, has saved system cost, has increased the adaptability of system, also can traditional Range Measurement System be renovated.
Although describe the present invention in conjunction with the specific embodiments, those skilled in the art will appreciate that and to make many modifications and modification to the present invention.Therefore, recognize, the intention of claims is to cover all such modifications and the modification in true spirit of the present invention and the scope.

Claims (16)

1. trigonometry Range Measurement System comprises:
Light source, it can be used on the point of throw light to the object;
Optical unit, its rotating corresponding reflection ray catching around a plurality of positions of described throw light from described point; And
Receiving trap, it can process the distance that obtains this point with the measurement of carrying out plural number time described point to responding to from the described reflection ray of described optical unit.
2. measuring system as claimed in claim 1, wherein said point can refer to the surface that includes a plurality of microstructures on the object.
3. measuring system as claimed in claim 1, wherein said a plurality of positions are arranged on the circumference that forms round the optical axis of described throw light.
4. measuring system as claimed in claim 1, wherein said optical unit can rotate to catch described reflection ray around the optical axis of described throw light.
5. measuring system as claimed in claim 4, wherein said receiving trap can rotate along with described optical unit.
6. measuring system as claimed in claim 4, the position of wherein said receiving trap is fixed, and described optical unit comprises and can be used to catch from the capturing unit of the described reflection ray of described point and can be transferred to described reflection ray the lens of described receiving trap.
7. measuring system as claimed in claim 6, wherein said capturing unit can rotate to catch described reflection ray around the optical axis of described throw light.
8. measuring system as claimed in claim 7, wherein said capturing unit comprises prism or comprises the assembly that is provided with first and second reflective mirror; Described the first reflective mirror can be used to rotate to catch described reflection ray around the optical axis of described throw light; Described the second reflective mirror can be used to the described reflection ray from described the first reflective mirror is transferred to described lens.
9. trigonometry distance measurement method comprises:
Come on the point of throw light to the object with light source;
Use the rotating corresponding reflection ray catching around a plurality of positions of described throw light from described point of optical unit; And
Use receiving trap with to respond to the distance that has obtained described point since the processing from the described reflection ray of described optical unit.
10. measuring method as claimed in claim 9 is wherein caught step and is comprised that optical axis around described throw light rotates described optical unit and catches described reflection ray.
11. comprising, measuring method as claimed in claim 10, wherein said induction treatment step can rotate along with the rotation of described optical unit described receiving trap so that the described reflection ray from described optical unit is responded to processing.
12. measuring method as claimed in claim 10, the position of wherein said receiving trap is fixed, and described optical unit comprises and can be used to catch from the capturing unit of the described reflection ray of described point and can be transferred to described reflection ray the lens of described receiving trap.
13. measuring method as claimed in claim 12, wherein said capturing unit can rotate to catch described reflection ray around the optical axis of described throw light, and described capturing unit comprises prism or comprises the assembly that is provided with first and second reflective mirror; Described the first reflective mirror can be used to rotate to catch described reflection ray around the optical axis of described throw light; Described the second reflective mirror can be used to the described reflection ray from described the first reflective mirror is transferred to described lens.
14. measuring method as claimed in claim 9, wherein said induction treatment step comprises a plurality of measurement results that obtain described point; The minimum and maximum measurement result of getting rid of in described a plurality of measurement result reaches the distance that remaining measurement result is averaged to obtain described point.
15. measuring method as claimed in claim 9, wherein said induction treatment step comprises a plurality of measurement results that obtain described point; Determine three times of standard deviation values of described a plurality of measurement results; Get rid of in described a plurality of measurement result greater than the result of described three times of standard deviation values and remaining measurement result is averaged to obtain the distance of described point.
16. measuring method as claimed in claim 9, wherein this measuring method can be used to improve the measuring repeatability of point-to-point.
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