CN103567642A - 蓝宝石切割装置 - Google Patents
蓝宝石切割装置 Download PDFInfo
- Publication number
- CN103567642A CN103567642A CN201210280285.XA CN201210280285A CN103567642A CN 103567642 A CN103567642 A CN 103567642A CN 201210280285 A CN201210280285 A CN 201210280285A CN 103567642 A CN103567642 A CN 103567642A
- Authority
- CN
- China
- Prior art keywords
- sapphire
- laser source
- ultra
- cutter sweep
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
Abstract
Description
蓝宝石切割装置 | 10 |
紫外激光源 | 100 |
激光束 | 110 |
平行激光束 | 120 |
准直透镜 | 200 |
外壳 | 300 |
收容空间 | 310 |
开口 | 312 |
工作台 | 400 |
承载台 | 410 |
缝隙 | 412 |
三维移动臂 | 420 |
控制系统 | 430 |
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210280285.XA CN103567642B (zh) | 2012-08-08 | 2012-08-08 | 蓝宝石切割装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210280285.XA CN103567642B (zh) | 2012-08-08 | 2012-08-08 | 蓝宝石切割装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103567642A true CN103567642A (zh) | 2014-02-12 |
CN103567642B CN103567642B (zh) | 2017-07-11 |
Family
ID=50040819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210280285.XA Expired - Fee Related CN103567642B (zh) | 2012-08-08 | 2012-08-08 | 蓝宝石切割装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103567642B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI794192B (zh) * | 2016-11-15 | 2023-03-01 | 日商維亞機械股份有限公司 | 基板的加工方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09270565A (ja) * | 1996-04-01 | 1997-10-14 | Kyocera Corp | 半導体レーザダイオード |
US6437363B1 (en) * | 1998-09-25 | 2002-08-20 | Murata Manufacturing Co. Ltd. | Semiconductor photonic device |
CN1527754A (zh) * | 2001-01-31 | 2004-09-08 | 电子科学工业公司 | 半导体中微结构的紫外线激光烧蚀的图案化 |
CN1607998A (zh) * | 2001-12-28 | 2005-04-20 | 杰特西斯国际有限公司 | 从板材切割产品的方法及相关设备 |
CN1761549A (zh) * | 2003-02-19 | 2006-04-19 | J.P.瑟塞尔联合公司 | 利用可变像散聚焦光斑切割的系统和方法 |
JP2007320124A (ja) * | 2006-05-31 | 2007-12-13 | Sharp Corp | 被加工脆性板の切断装置および切断方法 |
CN101983825A (zh) * | 2010-10-09 | 2011-03-09 | 苏州德龙激光有限公司 | Led晶圆皮秒激光划片装置 |
CN201913386U (zh) * | 2010-12-30 | 2011-08-03 | 沈阳新松机器人自动化股份有限公司 | 光纤传输激光器焊接头 |
CN102306624A (zh) * | 2011-06-15 | 2012-01-04 | 江苏晶瑞半导体有限公司 | 光子晶体和半导体的制造方法及含有所述半导体的器件 |
-
2012
- 2012-08-08 CN CN201210280285.XA patent/CN103567642B/zh not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09270565A (ja) * | 1996-04-01 | 1997-10-14 | Kyocera Corp | 半導体レーザダイオード |
US6437363B1 (en) * | 1998-09-25 | 2002-08-20 | Murata Manufacturing Co. Ltd. | Semiconductor photonic device |
CN1527754A (zh) * | 2001-01-31 | 2004-09-08 | 电子科学工业公司 | 半导体中微结构的紫外线激光烧蚀的图案化 |
CN1607998A (zh) * | 2001-12-28 | 2005-04-20 | 杰特西斯国际有限公司 | 从板材切割产品的方法及相关设备 |
CN1761549A (zh) * | 2003-02-19 | 2006-04-19 | J.P.瑟塞尔联合公司 | 利用可变像散聚焦光斑切割的系统和方法 |
JP2007320124A (ja) * | 2006-05-31 | 2007-12-13 | Sharp Corp | 被加工脆性板の切断装置および切断方法 |
CN101983825A (zh) * | 2010-10-09 | 2011-03-09 | 苏州德龙激光有限公司 | Led晶圆皮秒激光划片装置 |
CN201913386U (zh) * | 2010-12-30 | 2011-08-03 | 沈阳新松机器人自动化股份有限公司 | 光纤传输激光器焊接头 |
CN102306624A (zh) * | 2011-06-15 | 2012-01-04 | 江苏晶瑞半导体有限公司 | 光子晶体和半导体的制造方法及含有所述半导体的器件 |
Non-Patent Citations (1)
Title |
---|
杨伟: "高精密激光切割的理论及应用技术研究", 《中国优秀硕士学位论文全文数据库 信息科技》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI794192B (zh) * | 2016-11-15 | 2023-03-01 | 日商維亞機械股份有限公司 | 基板的加工方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103567642B (zh) | 2017-07-11 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
EXSB | Decision made by sipo to initiate substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170608 Address after: Guangdong province Shenzhen city Longhua District Dragon Road No. 83 wing group building 11 floor Applicant after: SCIENBIZIP CONSULTING (SHEN ZHEN) CO., LTD. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Applicant before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Applicant before: Hon Hai Precision Industry Co., Ltd. |
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TA01 | Transfer of patent application right | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170711 Termination date: 20180808 |
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CF01 | Termination of patent right due to non-payment of annual fee |