CN103753983B - Soft seal, the preparation method of soft seal and the preparation method of droplet array - Google Patents

Soft seal, the preparation method of soft seal and the preparation method of droplet array Download PDF

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Publication number
CN103753983B
CN103753983B CN201410031532.1A CN201410031532A CN103753983B CN 103753983 B CN103753983 B CN 103753983B CN 201410031532 A CN201410031532 A CN 201410031532A CN 103753983 B CN103753983 B CN 103753983B
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microtrabeculae
substrate
layer
soft seal
hydrophilic layer
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CN201410031532.1A
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CN103753983A (en
Inventor
张靓
陆志峰
唐旭东
莫妙华
栾琳
吴天准
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Shenzhen Research Institute Tsinghua University
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Shenzhen Research Institute Tsinghua University
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Abstract

The present invention relates to the preparation method of a kind of droplet array, it comprises the following steps: forms a substrate and is arranged at the micro-pillar array of described substrate one first surface, described micro-pillar array includes that multiple microtrabeculae is arranged to multiple lines and multiple rows, and each microtrabeculae includes a second surface relative with described first surface;And, at surface attachment one drop of described hydrophilic layer, and by described droplet transfer to a target base plate.The invention still further relates to a kind of soft seal and preparation method thereof.

Description

Soft seal, the preparation method of soft seal and the preparation method of droplet array
Technical field
The present invention relates to a kind of soft seal, particularly relate to a kind of soft seal that can be used for transferring droplet array.
Background technology
Based on microelectromechanical systems (MicroElectroMechanical System, MEMS) technical research and grow up micro-total analysis system (Micro Total Analysis Systems, TAS) it is a kind of brand-new micro-biochemical analysis system that last decade develops rapidly, is called again chip lab (Lab-on-a-Chip) or micro-fluidic chip (Microfluidic Chip).Microlayer model chip system, as a type of micro-total analysis system, has been used for studying numerous reactions and process thereof under the conditions of minute yardstick, and expands out important application in fields such as chemistry and life sciences.
General, the know-why generating single dispersing microlayer model is to utilize external forces to make up to unstability with the interfacial tension existed between disturbance continuous phase and dispersion phase in micro-fluidic device.Generally, when the power applied until dispersion phase somewhere is more than its interfacial tension, at this, micro liquid forms drop in breaking through interfacial tension entrance continuous phase.The technological approaches generating drop being usually taken at present has: T-shaped passage method, flow focusing method, confocal, pneumatic process, electric driving method and light-operated method.
But, existing microfluidic methods needs processing channel at drop formation and during being steered, and needs the auxiliary of the equipment of syringe pump, valve etc. so that prior art is difficult to be miniaturized, and big by flow rate effect, and practical operation is relatively difficult.
Summary of the invention
In view of this, a kind of soft seal of necessary offer, and the preparation method of the droplet array of simplicity.
A kind of soft seal, it includes a substrate and is arranged at multiple microtrabeculaes on surface of substrate, and the material of described microtrabeculae is flexible material, wherein, farther includes the hydrophilic layer being arranged at the plurality of microtrabeculae away from the top of substrate.
The preparation method of a kind of soft seal, it comprises the following steps: forming a substrate and be arranged at multiple microtrabeculaes of described substrate one first surface, the plurality of microtrabeculae includes a second surface relative with described first surface;And, the second surface at described microtrabeculae forms a hydrophilic layer.
The preparation method of a kind of droplet array, it comprises the following steps: forming a substrate and be arranged at multiple microtrabeculaes of described substrate one first surface, each microtrabeculae includes a second surface relative with described first surface;Form a hydrophilic layer and cover the second surface of described microtrabeculae;And, at surface attachment one drop of described hydrophilic layer, and by described droplet transfer to a target base plate.
Compared with prior art, soft stamping device of the present invention has the advantage that the surface of the microtrabeculae due to described soft seal is coated with by hydrophilic layer, thus the drop of trace can adhere to hydrophilic layer, and the surface being transferred to described target base plate forms microlayer model array, the method is simple, it is not necessary at target base plate processing micro structure or chemical graphs, require low to target base plate, transfer can be repeated several times, and reduce cost.The preparation method of this droplet array can be used for the liquid drop control association area such as microfluid, MEMS.
Accompanying drawing explanation
Fig. 1 is the structural representation of soft seal described in the embodiment of the present invention.
Fig. 2 is the STRUCTURE DECOMPOSITION schematic diagram of soft seal described in the embodiment of the present invention.
Fig. 3 is the sectional view along Ι-Ι ' line of the microtrabeculae described in Fig. 1.
Fig. 4 is the preparation method of soft seal described in the embodiment of the present invention.
Fig. 5 is the preparation method of microlayer model array described in the embodiment of the present invention.
Main element symbol description
Soft seal 10
Substrate 11
Microtrabeculae 12
Hydrophilic layer 13
First surface 110
Second surface 120
3rd surface 130
Hydrophobic layer 14
Drop 15
Micro-pillar array 16
Target base plate 17
Specific examples below will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Detailed description of the invention
The preparation method of the soft seal, the preparation method of soft seal and the microlayer model array thereof that provide the embodiment of the present invention below with reference to accompanying drawing is further described.
Referring to Fig. 1 and Fig. 2, the soft seal 10 provided for first embodiment of the invention, this soft seal 10 includes a substrate 11, is arranged at multiple microtrabeculaes 12 on the surface of substrate 11, and is arranged at the plurality of microtrabeculae 12 hydrophilic layer 13 away from the top of substrate 11.
The plurality of microtrabeculae 12 contacts setting with described substrate 11.Described hydrophilic layer 13 contacts setting with the plurality of microtrabeculae 12.Concrete, described substrate 11 includes a first surface 110.The plurality of microtrabeculae 12 is arranged at the first surface 110 of described substrate 11.Defining described microtrabeculae 12 away from the surface of described substrate 11 is a second surface 120.Described second surface 120 is parallel to described first surface 110.Described hydrophilic layer 13 is arranged at the second surface 120 of described microtrabeculae 12.Defining described hydrophilic layer 13 away from the surface of described microtrabeculae 12 is one the 3rd surface 130.Described 3rd surface 130 is oppositely arranged with described second surface 120.3rd surface 130 of described hydrophilic layer 13 is a coarse surface.From microcosmic, the 3rd surface 130 out-of-flatness and Non-smooth surface, thus the surface area on the 3rd surface 130 is relatively large, thus be conducive to adsorbing drop.The plurality of microtrabeculae 12 interval is arranged.This microtrabeculae 12 be shaped as terrace with edge or cylindricality.Described cylindricality can be cylinder or prism.The plurality of microtrabeculae 12 can be in regular array, it is possible to for irregular random arrangement.Concrete, the adjacent distance between two microtrabeculaes 12 can be identical, it is also possible to different.The arrangement mode of the plurality of microtrabeculae 12 can be arranged according to specific needs, as long as ensureing that two drops adjacent when transferring drop do not contact.Concrete, the beeline defined between two points in the second surface 120 of adjacent two microtrabeculae 12 is the spacing between adjacent two microtrabeculae 12, represents with L.Concrete, the distance between the edge of two adjacent second surfaces 120 is Distances Between Neighboring Edge Points L.The ultimate range of any two points of the second surface 120 of described microtrabeculae 12 or diameter are defined as the full-size of described second surface 120.The value of described Distances Between Neighboring Edge Points L is more than the full-size of the second surface 120 of described microtrabeculae 12.
Define the height that spacing is described microtrabeculae 12 between second surface 120 and the first surface 110 of described substrate 11 of described microtrabeculae 12, represent with H.The height H of described microtrabeculae 12 can be arranged according to specific needs, as long as existing technique can realize, can be 10 microns, 20 microns, 50 microns, 80 microns etc..
In the present embodiment, described microtrabeculae 12 is cylinder, a diameter of 100 microns of described cylinder, the height of described cylinder is 50 microns, described cylindrical arrangement becomes the two-dimensional array structure of multirow and multiple row, the Distances Between Neighboring Edge Points L between two cylinders adjacent on the direction of the row of described two-dimensional array is equal, and the Distances Between Neighboring Edge Points L between two cylinders adjacent on the direction of the row of described two-dimensional array is equal, and described Distances Between Neighboring Edge Points L is 300 microns.
The material of described microtrabeculae 12 is flexible material, has bent characteristic.The material of this microtrabeculae 12 is hydrophobic material, and so-called hydrophobicity refers to the character that described microtrabeculae 12 is mutually exclusive with water.Thus when described soft seal 10 is dipped drop, hydrophilic drop will not stay in the surface of described microtrabeculae 12.So-called hydrophilic drop refers to the drop that surface can be higher, such as water droplet.Concrete, the material of described microtrabeculae 12 is polydimethylsiloxane (PDMS), polydiethylsiloxane, polydiphenylsiloxane, methyl phenyl silicone, methyloctyl silicone, 3-chloropropyl-dimethyl polysiloxane, dimethyl-methyl octyl group polysiloxanes, polysiloxanes, methyl vinyl silicone rubber, methyl phenyl vinyl silicone rubber, the double phenyl room temperature vulcanized silicone rubber of methyl, polydimethylsiloxane and polyurethane comixing material or by least one in rare earth modified silicone materials.In the present embodiment, the material of described microtrabeculae 12 is PDMS.
Described hydrophilic layer 13 is a layer structure.Described hydrophilic layer 13 covers the second surface 120 of described microtrabeculae 12.Described hydrophilic layer 13 is in close contact with described microtrabeculae 12 and arranges.The material of this hydrophilic layer 13 is water wetted material, and so-called water wetted material is the molecule with polar group, and surface can be higher, has stronger affinity to water.When water loading is in this hydrophilic layer 13, and the contact angle of formation is more than 0 degree and less than 90 degree.Concrete, the material of described hydrophilic layer 13 can be at least one in the macromolecular materials such as polymethyl methacrylate (PMMA), polyvinyl alcohol, Polyethylene Glycol.The material of this hydrophilic layer 13 is water wetted material, so that described hydrophilic layer 13 can active adsorption hydrophilic drop.And, described 3rd surface 130 is rough, has bigger surface area, so that described hydrophilic layer 13 can preferably adsorb hydrophilic drop.In the present embodiment, the material of described hydrophilic layer 13 is PMMA.
Defining the 3rd surface 130 and the thickness that distance is described hydrophilic layer 13 of second surface 120 of described hydrophilic layer 13, represent with T, thickness T is in the range of 0.1 micron ~ 100 microns, it is preferred that 1 micron ~ 10 microns.Preferably, the thickness T of described hydrophilic layer 13 meets following condition: T:H≤1:10 with the height H of described microtrabeculae 12, so that described soft seal 10 is in preparation process, described hydrophilic layer 13 only covers the end face of described microtrabeculae 12, without covering the first surface 110 of described substrate 11, simultaneously so that in use, hydrophilic drop is only attached to the 3rd surface 130 of described hydrophilic layer 13 to described soft seal 10.
Refer to Fig. 3, a hydrophobic layer 14 can be further set on the surface of the plurality of microtrabeculae 12.The surface in addition to second surface 120 defining described microtrabeculae 12 is sidewall, and described hydrophobic layer 14 can only cover the sidewall of described microtrabeculae 12.It is appreciated that, described hydrophobic layer 14 also can cover described microtrabeculae 12, the most described hydrophobic layer 14 is arranged at sidewall and the second surface 120 of described microtrabeculae 12, now, described hydrophilic layer 13 is arranged at the surface away from described microtrabeculae 12 of described hydrophobic layer 14, and the most described hydrophobic layer 14 is arranged between described hydrophilic layer 13 and the second surface 120 of described microtrabeculae 12.The material of described hydrophobic layer 14 is low-surface-energy material, containing groups such as hydrocarbon, carbon fluorine in the material of this hydrophobic layer 14.Described fluorocarbon can be politef or perfluor cyclic polymer (CYTOP).Described hydrophobic layer 14 makes the sidewall of described microtrabeculae 12 not remain hydrophilic drop, and makes hydrophilic drop be only attached to described hydrophilic layer 13, thus when using described soft seal transfer drop, available microlayer model array.In the present embodiment, the material of described hydrophobic layer 14 is CYTOP, and described hydrophobic layer 14 covers described microtrabeculae 12.
Described substrate 11 is flap structure.The effect carrying multiple microtrabeculaes 12 is played in described substrate 11.Described substrate 11 is mutual separable structure with described microtrabeculae 12.Being appreciated that described substrate 11 is the most one-body molded with described microtrabeculae 12 and obtain integrative-structure, the material of the most described substrate 11 is consistent with the material of described microtrabeculae 12.In the present embodiment, described substrate 11 is flap substrate, and material is PDMS, and described substrate 11 is one-body molded with described microtrabeculae 12.
Described soft seal 10 is owing to being provided with described hydrophilic layer 13 at the second surface 120 of described microtrabeculae 12, the rough surface of this hydrophilic layer 13, and the material of this hydrophilic layer 13 is water wetted material, thus, this soft seal 10 can easily adhere to hydrophilic drop, thus the array realizing hydrophilic drop is formed.
Referring to Fig. 4, second embodiment of the invention also provides for the preparation method of a kind of soft seal 10, and it comprises the following steps:
Step S1, forms a substrate 11 and is arranged at multiple microtrabeculaes 12 of described substrate 11 1 first surface 110, and the plurality of microtrabeculae 12 includes a second surface 120 relative with described first surface 110;And
Step S2, the second surface 120 at described microtrabeculae 12 forms a hydrophilic layer 13.
In step sl, described substrate 11 can be one-body molded by casting with the plurality of microtrabeculae 12, it is possible to by the mode such as binding agent, buckle, the plurality of microtrabeculae 12 is fixed on described substrate 11.In the present embodiment, described substrate 11 is one-body molded with microtrabeculae 12.This prepares described substrate 11 and multiple microtrabeculae 12 specifically includes following steps:
S11 a, it is provided that substrate, at surface configuration one photoresist layer of described substrate;
S12, utilizes a mask to pattern this photoresist layer;
S13, pours into a mould macromolecular material, the multiple microtrabeculae of shape all-in-one-piece 12 and substrate 11.
In step s 11, the method forming described photoresist layer is spin-coating method, and spin coating parameters determines according to photoresist and spin coating thickness.The material of described photoresist layer can be positive photoresist or negative photoresist.The thickness of the photoresist layer formed does not limits, as long as described photoresist layer even uniform, its thickness is satisfied to be patterned.The material of described substrate does not limits, and can be silicon, glass etc..In the present embodiment, described substrate is silicon chip, the material of described photoresist layer is SU-8 photoresist, described SU-8 photoresist is coated by the way of spin coating the surface of described substrate, first spin coating rotating speed is 800 revs/min, spin-coating time is 15 seconds, and being then spin coated onto rotating speed is 3000 revs/min, and spin-coating time is 30 seconds.
After forming described photoresist layer by spin coating, also described photoresist layer is carried out precuring.This photoresist layer of described precuring is realized by a process heating soft baking.Described soft baking of heating refers to by being warming up to a precuring temperature, the most again slow cooling slowly, to realize the purpose to described photoresist layer precuring.In the present embodiment, after spin coating completes, SU-8 photoresist is slowly heated to 95 degrees centigrade, is then slowly dropped to room temperature.
In step s 12, described mask includes multiple through hole, and the plurality of through hole forms the structure of a patterning, and the photoresist layer corresponding to the plurality of through hole comes out.Obtaining multiple recess by exposure, development, the plurality of recess is mutually complementary or identical with the pattern structure of the plurality of through hole.In the present embodiment, form the pattern complementary of multiple recess, the plurality of recess and the plurality of through hole in the position that through hole is corresponding.
In step s 13, moulding, irrigate a macromolecular material so that fill up macromolecular material at the plurality of recess, then via being heating and curing, the demoulding, shape all-in-one-piece substrate 11 and multiple microtrabeculae 12.The pattern of the plurality of microtrabeculae 12 is identical with the plurality of recess.Described macromolecular material is flexible material.In the present embodiment, described macromolecular material is PDMS, and during solidification PDMS, heating-up temperature is 80 degrees Celsius, and heat time heating time is 120 minutes.
In step s 2, the method forming described hydrophilic layer 13 does not limits, as long as only covering the second surface 120 of described microtrabeculae 12, can be the solution being initially formed one containing water wetted material, the most directly dipping this solution;Or form a hydrophilic preformed layer, then described microtrabeculae 12 is dipped described hydrophilic preformed layer.The material of described hydrophilic layer 13 is water wetted material.In the present embodiment, first form hydrophilic preformed layer on a substrate, then by the second surface 120 of this described microtrabeculae 12 near and contact described hydrophilic preformed layer, finally by described microtrabeculae 12 away from described hydrophilic preformed layer, and via solidification, to form described hydrophilic layer 13 at second surface 120.The thickness of the most hydrophilic preformed layer is much smaller than the height of described microtrabeculae 12.As a example by high 50 microns of described microtrabeculae, hydrophilic preformed layer thickness can be 1 micron ~ 10 microns, preferably 5 microns.Described hydrophilic preformed layer is water wetted material to be dissolved in the hydrophilic solution coating obtained in solvent form, and this hydrophilic solution has certain viscosity.Owing to the material of described hydrophilic preformed layer is water wetted material, itself there is certain viscosity, thus when second surface 120 is contacted described hydrophilic preformed layer, the water wetted material of part can be transferred to second surface 120, can be in a coarse and uneven surface after being now transferred to the water wetted material solidification of second surface 120.Further, this dips the method for hydrophilic preformed layer, and described hydrophilic layer 13 can be made only to cover described second surface 120, so that described soft seal 10 the most only second surface 120 adheres to the hydrophilic drop of trace, and then realizes the formation of the array of microlayer model.The method of described solidification can be heating or ultra-vioket radiation.
Further, before step S2 forms described hydrophilic layer 13, can include that described in a pair, microtrabeculae 12 carries out the step of hydrophobic treatment, the method of described hydrophobic treatment includes forming a hydrophobic layer 14 or described microtrabeculae 12 being carried out surface modification so that the sidewall surfaces of described microtrabeculae 12 is with hydrophobic group.The sidewall being made microtrabeculae 12 by the step of this formation hydrophobic layer 14 is hydrophobic, thus when described soft seal 10 immerses hydrophilic drop, the sidewall at described microtrabeculae 12 will not adhere to water droplet.Being appreciated that described hydrophobic layer 14 also can cover described microtrabeculae 12, the second surface 120 of the most described microtrabeculae 12 and sidewall are all covered by described hydrophobic layer 14.In the present embodiment, forming a hydrophobic layer 14 in the surface of described microtrabeculae 12, concrete process is as follows: first provide the solution containing hydrophobic material, and then described microtrabeculae 12 be completely immersed in the described solution containing hydrophobic material, finally heated solidifies.The hydrophobic layer 14 covering microtrabeculae 12 is formed by microtrabeculae 12 is immersed the solution containing hydrophobic material.This method being directly immersed in is relatively simple, it is easy to operation.
Referring to Fig. 5, third embodiment of the invention also provides for the forming method of a kind of droplet array, and it comprises the following steps:
Step S10, forms a substrate 11 and is arranged at the micro-pillar array 16 of described substrate 11 1 first surface 110, and described micro-pillar array 16 includes that multiple microtrabeculae 12 is arranged to multiple lines and multiple rows, and each microtrabeculae 12 includes a second surface 120 relative with described first surface 110;
Step S20, forms a hydrophilic layer 13 and covers the second surface 120 of described microtrabeculae 12, obtains a soft seal 10;And
Step S30, at surface attachment one drop 15 of described hydrophilic layer 13, and is transferred to a target base plate 17 by described drop 15, obtains described droplet array.
Described step S10 to S20 is essentially identical with the step S1 to S2 in the second embodiment, and difference is, arranges described micro-pillar array 16 in substrate 11, and the multiple microtrabeculaes 12 in described micro-pillar array 16 are arranged in the two-dimensional array of a multiple lines and multiple rows.The Distances Between Neighboring Edge Points L of adjacent two microtrabeculaes 12 of identical row or column can be arranged according to specific needs, as long as ensureing that two drops adjacent when transferring drop do not contact.In this micro-pillar array 16, the arrangement mode of microtrabeculae 12 is identical with the arrangement mode of drop in the microlayer model array of formation.In the present embodiment, the Distances Between Neighboring Edge Points L of adjacent two microtrabeculaes 12 of identical row or column is in the range of 300 microns ~ 600 microns.
Further, before step S20 forms described hydrophilic layer 13, it may include one covers the step of a hydrophobic layer 14 at described microtrabeculae 12.
In step S30, described soft seal 10 is contacted a target solution, make the described hydrophilic layer 13 of described soft seal 10 contact with target solution, with the surface attachment drop 15 at described hydrophilic layer 13.The volume of this drop 15 is relevant with the material of the density of himself, surface tension, the area of described hydrophilic layer 13, the material of described hydrophilic layer 13 and microtrabeculae 12.Owing to the material of described hydrophilic layer 13 is water wetted material, and the material of microtrabeculae 12 is hydrophobic material, thus dipping target solution when, solution can slip along smooth and hydrophobic microtrabeculae 12 and not remain, and selective attachment is on the surface of coarse hydrophilic hydrophilic layer 13, form described drop 15.In the present embodiment, the volume of described drop 15 is about 1 × 10-8Rise.
Described target base plate 17 includes an even curface.This surface has certain hydrophilic.This hydrophilic can make described drop 15 be transferred to described target base plate 17 from described soft seal 10.
Owing to the surface of the microtrabeculae 12 of described soft seal 10 is coated with by hydrophilic layer 13, thus, the drop 15 of trace can adhere to hydrophilic layer 13, and the surface being transferred in described target base plate 17 forms microlayer model array, the method can be repeated several times transfer, more easy to clean, reduces cost.Further, owing to the substrate 11 in described soft seal 10 and microtrabeculae 12 are flexible material, thus the soft seal obtained can be applicable to plane transfer drop, it is possible to is transferred on curved surface by drop 15.The method has potential using value in chemosynthesis, micro-extraction, crystallization of protein, enzymatic synthesis and the application such as activity analysis, single cell analysis thereof.
It addition, those skilled in the art also can make other change in spirit of the present invention, these changes made according to present invention spirit, all should be included in scope of the present invention certainly.

Claims (10)

1. a soft seal, it includes a substrate and is arranged at multiple microtrabeculaes on surface of substrate, described substrate with Described microtrabeculae is one-body molded, and the material of described substrate and described microtrabeculae is hydrophobic flexible material, and it is special Levy and be, farther include the hydrophilic layer being arranged at the plurality of microtrabeculae away from the top of substrate, described The surface of hydrophilic layer is for attachment one drop.
Soft seal the most as claimed in claim 1, it is characterised in that the material of described hydrophilic layer is water wetted material, Described hydrophilic layer directly covers the top of described microtrabeculae.
Soft seal the most as claimed in claim 1, it is characterised in that define the short distance of adjacent two microtrabeculae It is more than described microtrabeculae from for the Distances Between Neighboring Edge Points L between two adjacent microtrabeculaes, described Distances Between Neighboring Edge Points L The full-size of top surface.
Soft seal the most as claimed in claim 1, it is characterised in that the thickness T of described hydrophilic layer is micro-with described The height H of post meets following condition: T:H≤1:10.
Soft seal the most as claimed in claim 1, it is characterised in that farther include a described microtrabeculae of covering Hydrophobic layer, described hydrophobic layer is arranged between the top of described hydrophilic layer and described microtrabeculae.
Soft seal the most as claimed in claim 5, it is characterised in that the material of described hydrophobic layer is polytetrafluoroethyl-ne Alkene or perfluor cyclic polymer.
7. a preparation method for soft seal, it comprises the following steps:
Form a substrate and be arranged at multiple microtrabeculaes of described substrate one first surface, the plurality of micro- Post includes that a second surface relative with described first surface, described substrate become with described microtrabeculae one Type, the material of described substrate and described microtrabeculae is hydrophobic material;And
Second surface at described microtrabeculae forms a hydrophilic layer, and the surface of described hydrophilic layer is used for attachment one Drop.
The preparation method of soft seal the most as claimed in claim 7, it is characterised in that described formation hydrophilic layer Method includes: form a hydrophilic preformed layer on a substrate;By close for the second surface of this described microtrabeculae And contact described hydrophilic preformed layer;By described microtrabeculae away from described hydrophilic preformed layer, and solidify so that Described hydrophilic layer is formed at second surface.
The preparation method of soft seal the most as claimed in claim 7, it is characterised in that forming described hydrophilic layer Farther include to form a hydrophobic layer before and cover the step of described microtrabeculae.
10. a preparation method for droplet array, it comprises the following steps:
Form a substrate and be arranged at the micro-pillar array of described substrate one first surface, described microtrabeculae battle array Row include that multiple microtrabeculae is arranged to multiple lines and multiple rows, and each microtrabeculae includes that one is relative with described first surface Second surface, described substrate is one-body molded with described microtrabeculae, described substrate and the material of described microtrabeculae Material is hydrophobic material;
Form a hydrophilic layer and cover the second surface of described microtrabeculae;And
At surface attachment one drop of described hydrophilic layer, and by described droplet transfer to a target base plate, To form microlayer model array in described target base plate.
CN201410031532.1A 2014-01-23 Soft seal, the preparation method of soft seal and the preparation method of droplet array Expired - Fee Related CN103753983B (en)

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CN103753983B true CN103753983B (en) 2016-11-30

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Citations (5)

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Publication number Priority date Publication date Assignee Title
CN2103438U (en) * 1991-09-12 1992-05-06 浙江省邮电器材四厂 Ink-stored date stamp
US5669303A (en) * 1996-03-04 1997-09-23 Motorola Apparatus and method for stamping a surface
CN1397432A (en) * 2002-08-28 2003-02-19 中国科学院长春应用化学研究所 Thermal moulding method for making pattern on high-molecular film
CN1665684A (en) * 2002-05-27 2005-09-07 皇家飞利浦电子股份有限公司 Method and device for transferring a pattern from a stamp to a substrate
CN101509851A (en) * 2007-09-13 2009-08-19 伊诺普塞斯公司 Method of simultaneously depositing a series of patterns on a substrate by a macro stamp

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2103438U (en) * 1991-09-12 1992-05-06 浙江省邮电器材四厂 Ink-stored date stamp
US5669303A (en) * 1996-03-04 1997-09-23 Motorola Apparatus and method for stamping a surface
CN1665684A (en) * 2002-05-27 2005-09-07 皇家飞利浦电子股份有限公司 Method and device for transferring a pattern from a stamp to a substrate
CN1397432A (en) * 2002-08-28 2003-02-19 中国科学院长春应用化学研究所 Thermal moulding method for making pattern on high-molecular film
CN101509851A (en) * 2007-09-13 2009-08-19 伊诺普塞斯公司 Method of simultaneously depositing a series of patterns on a substrate by a macro stamp

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