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Número de publicaciónCN103822620 A
Tipo de publicaciónSolicitud
Número de solicitudCN 201410058548
Fecha de publicación28 May 2014
Fecha de presentación20 Feb 2014
Fecha de prioridad20 Feb 2014
Número de publicación201410058548.1, CN 103822620 A, CN 103822620A, CN 201410058548, CN-A-103822620, CN103822620 A, CN103822620A, CN201410058548, CN201410058548.1
Inventores张卫平, 刘亚东, 唐健, 汪濙海, 成宇翔, 孙殿竣, 陈文元
Solicitante上海交通大学
Exportar citaBiBTeX, EndNote, RefMan
Enlaces externos:  SIPO, Espacenet
Electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope
CN 103822620 A
Resumen
The invention provides an electrostatic drive type parameter excited micromechanic solid fluctuation disc gyroscope, comprising a disc-shaped substrate, four non-cross comb electrostatic drive electrodes, four cross comb parallel plate detection electrodes and eight U-shaped beams, wherein four drive electrodes and four detection electrodes are uniformly and alternatively arranged along an outer edge of the disc-shaped substrate; and the tail end of each drive electrode and each detection electrode is provided with a U-shaped beam playing the fixing and supporting roles. The disc-shaped substrate is driven to work in a manner of parameter excitation; the drive modality and the detection modality are matched with each other. The gyroscope is manufactured by an MEMS bulk silicon processing technology. A drive frequency is twice that of an inherent frequency of the gyroscope; generated spurious signals have no interference to detection signals; and at the same time, the parameter excitation has the characteristics of large gain, strong stability and small damping influence.
Reclamaciones(6)  traducido del chino
1.一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,包括: 一个圆盘形基体; 四个非交叉梳齿静电驱动电极; 四个交叉梳齿平行板检测电极; 八个U型梁; 其中,四个驱动电极和四个检测电极分别沿圆盘形基体外环边缘均匀交替配置,四个驱动电极和四个检测电极的末端均设有一个起固定支撑作用的U型梁; 所述微陀螺利用参数激励的方式驱动圆盘形基体振动,其驱动模态和检测模态互相匹配,通过在一对非交叉梳齿静电驱动电极上施加正弦交流电压,由边缘场效应产生圆盘形基体在驱动模态的振动;当有垂直于圆盘形基体底部的角速度输入时,在科氏力作用下,圆盘形基体的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体交叉梳齿平行板检测电极间的感应电容的变化,检测垂直于圆盘形基体底部平面的角速度大小。 An electrostatic driven parametric excitation micromechanical solid fluctuation disc gyroscope, comprising: a disc-shaped base; four non-intersecting electrostatic comb drive electrodes; four cross-comb parallel plate electrodes detected ; eight U-beam; wherein four drive electrodes and four detection electrodes are alternately arranged evenly along the edge of the disc-shaped base body ring, the end of the four drive electrodes and four detection electrode has a supporting role from the fixed The U-beam; the use of parametric excitation microgyroscope driven disc-shaped base body vibration, the drive mode and test mode match each other, by applying a sinusoidal AC voltage on a pair of non-intersecting electrostatic comb drive electrodes by Fringe Field generate modal vibration driven disc-shaped substrate; when the vertical angular velocity input to the bottom of the disk-shaped substrate, in the Coriolis force, the resonant disc-shaped substrate to be detected from the driving mode modal change; change induced cross-comb parallel plate capacitor electrodes detected by detecting the disk-shaped substrate, detection perpendicular to the plane of the disc-shaped substrate at the bottom of the angular velocity magnitude.
2.根据权利要求1所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述圆盘形基体材料为单晶硅,其上均匀配置驱动电极和检测电极的一个梳齿,其中:在驱动电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构。 2. An electrostatic drive type 1 parametric excitation micromechanical gyroscope disc-shaped solid fluctuation claim, characterized in that said disc-shaped substrate material is silicon, uniform configuration and test drive electrodes thereon a comb electrode, wherein: the driving electrode structure, the disc-shaped substrate corresponding comb electrodes on another side of the electrode constituting the non-cross-comb structure; detecting electrode structure, the upper disc-shaped substrate corresponding comb the other two sides of the electrode cross comb electrodes parallel plate structure.
3.根据权利要求2所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述驱动电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述驱动电极采用静电驱动方式,即是利用边缘场效应产生圆盘形基体在驱动模态的振动,其结构为非交叉梳齿结构。 3. An electrostatic drive type 2 parametric excitation micromechanical gyroscope disc-shaped solid fluctuation claim, characterized in that the drive electrode material is silicon, which is deposited a layer of metal or ion-doped Miscellaneous manner to form the desired electrode; the drive electrode electrostatic drive, that is, the edge of a field effect generated utilizing a disc-shaped substrate in the vibration drive mode, the structure of a non-cross-comb structure.
4.根据权利要求2所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述检测电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述检测电极利用电容感应效应进行检测,其结构为交叉梳齿平行板结构。 4. An electrostatic drive type 2 parametric excitation micromechanical gyroscope disc-shaped solid fluctuation claim, wherein said detecting electrode material is silicon, which is deposited a layer of metal or ion-doped heteroaryl manner to form the desired electrode; electrode utilizing capacitive sensing to detect the effect of the detection, the parallel plate structure for the cross-comb structure.
5.根据权利要求1-4任一项所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,所述U型梁结构位于驱动电极和检测电极的末端,其材料为单晶硅,起固定、支撑圆盘形基体的作用。 1-4 according to any one of claims An electrostatic driven parametric excitation micromechanical gyroscope disc-shaped solid fluctuation claim, characterized in that the end of the electrode and the detection electrode of the U-beam structure in the drive, the material is silicon, since fixed, disc-shaped substrate supporting role.
6.根据权利要求1-4任一项所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,其特征在于,四个所述驱动电极中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体在驱动模态的振动;当存在输入角速度时,圆盘形基体的振型向检测模态转变,利用检测电极处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 1-4 according to any one of claims An electrostatic driven parametric excitation micromechanical gyroscope disc-shaped solid fluctuation claim wherein four of said drive electrodes are two opposing driving electrodes When the AC voltage is applied from the edge of the field effect modal vibration driven disc-shaped substrate production; when there is an input angular velocity, vibration mode disc-shaped substrate detection mode transition to using sensitive detection capacitive sensing electrode resulting effect electrical signal detection; the driving mode and test mode match.
Descripción  traducido del chino

一种静电驱动式参数激励的微机械固体波动盘形陀螺仪 An electrostatic driven parametric excitation of the micromechanical gyroscope solid fluctuation disc

技术领域 Technical Field

[0001] 本发明涉及微机电技术领域的固体波动模态匹配陀螺,具体地,涉及一种静电驱动式参数激励的微机械固体波动盘形陀螺仪。 [0001] The present invention relates to a solid field of MEMS gyroscope match Modal fluctuations, in particular, it relates to an electrostatic driven parametric excitation of the micromechanical gyroscope disc-shaped solid fluctuation.

背景技术 Background

[0002] 陀螺仪是一种能够检测载体角度或角速度的惯性器件,在姿态控制和导航定位等领域有着非常重要的作用。 [0002] The gyroscope is capable of detecting an angular velocity vector angle or inertial devices, has a very important role in the attitude control and navigation, and other fields. 随着国防科技和航空、航天工业的发展,惯性导航系统对于陀螺仪的要求也向低成本、小体积、高精度、多轴检测、高可靠性、能适应各种恶劣环境的方向发展。 With the development of national defense science and technology and the aerospace industry, gyro inertial navigation system for the requirements to low-cost, small size, high precision, multi-axis detection, high reliability and can adapt to the development direction of a variety of harsh environments. 因此,MEMS微陀螺的重要性不言而喻。 Hence the importance of MEMS gyroscope is self-evident. 特别地,静电驱动陀螺仪作为MEMS微陀螺的一个重要研究方向,已经成为该领域的一个研究热点。 In particular, the electrostatic drive gyroscope as an important research direction of MEMS gyroscope has become a hot topic in the field.

[0003] 然而,在静电驱动MEMS陀螺仪中,由于寄生电容的存在,输出信号会受到驱动信号的干扰,使得无法直接从输出信号中获得准确的信息,甚至连谐振频率都会有比较大的差距。 [0003] However, in the electrostatic drive MEMS gyroscope, due to the presence of parasitic capacitance, the output signal will be disturbed drive signal makes it impossible to obtain accurate information directly from the output signal, even resonant frequency, there will be even greater disparity .

[0004] 基于此,迫切需要提出一种新的陀螺结构或新的工作原理,使其产生的寄生信号不会对检测信号产生干扰,从而保证能够得到准确的信号输出。 [0004] Based on this, an urgent need to propose a new structure or a new gyroscope works, it does not generate spurious signals interfere with the detection signal, thereby ensuring accurate signal output can be obtained.

发明内容 DISCLOSURE

[0005] 针对现有技术中的缺陷,本发明的目的是提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,该陀螺利用新的驱动原理,其驱动频率是陀螺仪固有频率的两倍,所以产生的寄生信号不会对检测信号产生干扰。 [0005] The deficiencies in the prior art, an object of the invention is to provide an electrostatic driven parametric excitation of the micromechanical gyroscope solid fluctuation disc, the gyro using the new drive principle, the drive frequency is the natural frequency of the gyro twice, it does not generate spurious signals interfere with the detection signal. 同时,参数激励本身也具有增益大,稳定性强,受阻尼影响小的特点。 Meanwhile, the parametric excitation itself has a large gain, stability, hindered Donnie impact characteristics.

[0006] 为实现以上目的,本发明提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,包括: [0006] To achieve the above objects, the present invention provides an electrostatic driven parametric excitation of the micromechanical gyroscope solid fluctuation disc, comprising:

[0007] 一个圆盘形基体; [0007] A disc-shaped substrate;

[0008] 四个非交叉梳齿静电驱动电极; [0008] The four non-intersecting electrostatic comb drive electrodes;

[0009] 四个交叉梳齿平行板检测电极; [0009] The four cross-comb parallel plate detection electrode;

[0010] 八个U型梁; [0010] eight U-beam;

[0011] 其中,四个驱动电极和四个检测电极分别沿圆盘形基体外环边缘均匀交替配置,四个驱动电极和四个检测电极的末端均设有一个起固定支撑作用的U型梁; [0011] wherein four drive electrodes and four detection electrodes are alternately arranged evenly along the edge of the disc-shaped base body ring, the end of the four drive electrodes and four detection electrode has a supporting role for fixing the U-beams ;

[0012] 所述微陀螺利用参数激励的方式驱动圆盘形基体振动,其驱动模态和检测模态互相匹配,通过在一对非交叉梳齿静电驱动电极上施加正弦交流电压,由边缘场效应产生圆盘形基体在驱动模态的振动;当有垂直于圆盘形基体底部的角速度输入时,在科氏力作用下,圆盘形基体的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体交叉梳齿平行板检测电极间的感应电容的变化,就可检测垂直于圆盘形基体底部平面的角速度大小。 [0012] The use of parametric excitation microgyroscope driven disc-shaped base body vibration, the drive mode and test mode match each other, by applying a sinusoidal AC voltage on a pair of non-intersecting electrostatic comb drive electrodes by fringing fields effect is generated in the driving mode of vibration of the disc-shaped substrate; and when there is an input to the angular velocity perpendicular to the disc-shaped substrate at the bottom, under the Coriolis force, the resonant disc-shaped substrate can detect from the driving mode to mode change; by detecting changes in the disc-shaped substrate cross comb parallel plate capacitance sensor detecting electrodes, can be detected perpendicular to the plane of the disc-shaped substrate at the bottom of the angular velocity magnitude.

[0013] 优选地,所述圆盘形基体材料为单晶硅,其上均匀配置驱动电极和检测电极的一个梳齿,其中:在驱动电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极结构中,盘形基体上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构。 [0013] Preferably, the disc-shaped base material is single crystal silicon, a uniform configuration and a detection electrode of a driving comb electrodes thereon, wherein: the driving electrode structure, the disc-shaped substrate corresponding comb electrodes Also on both sides of the electrode constituting a non-cross-comb structure; detecting electrode structure, the disk-shaped substrate on the corresponding sides of the comb electrode with another electrode constituting cross comb parallel plate structure.

[0014] 优选地,所述驱动电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述驱动电极采用静电驱动方式,具体来说,是利用边缘场效应产生圆盘形基体在驱动模态的振动,其结构为非交叉梳齿结构。 [0014] Preferably, the driving electrode material is single crystal silicon, on which is deposited a layer of metal or ion doping a desired electrode is formed; the electrostatic drive electrode driving method, specifically, a fringe field is the use of effect generating disk-shaped substrate in the vibration drive mode, the structure is non-cross-comb structure.

[0015] 优选地,所述检测电极材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极;所述检测电极利用电容感应效应进行检测,其结构为交叉梳齿平行板结构。 [0015] Preferably, the sensing electrode material is single crystal silicon, on which is deposited a layer of metal or formed by ion doping desired electrode; electrode effect the detection by the capacitance sensor detects, as a cross-comb structure parallel plate structure.

[0016] 优选地,所述U型梁结构位于驱动电极和检测电极的末端,其材料为单晶硅,起固定、支撑圆盘形基体的作用。 [0016] Preferably, the U-beam structure at the end of the drive electrode and the detection electrode, the material is silicon, from the fixed role of supporting the disc-shaped substrate.

[0017] 优选地,四个所述驱动电极中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体在驱动模态的振动;当存在输入角速度时,圆盘形基体的振型向检测模态转变,利用检测电极处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 When [0017] Preferably, four drive electrodes in the two opposing driving electrodes an alternating voltage is applied, by the edge of a field effect mode vibration actuator in a disc-shaped substrate produced; when there is an input angular velocity, the disc shaped substrate vibration mode to detection mode transition, the use of sensitive capacitive sensors detect electrical signals generated at the effect electrode signal detection; the driving mode and test mode match.

[0018] 与现有技术相比,本发明具有如下的有益效果: [0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1、受阻尼因素影响小,根据非线性振动理论,陀螺仪振动时,如果外界条件(温度等)发生变化,材料阻尼系数会随之发生变化,但是该微陀螺在主振型上的振动幅值与阻尼系数的大小无关,阻尼的大小只是与输入电压的阈值有关,阻尼越大,输入电压的最小值也越大; [0019] 1, damped factor is small, according to the theory of nonlinear vibration gyro vibrates, if external conditions (temperature, etc.) changes, damping material will follow the changes, but the micro-gyroscope on the main modes independent of the size of the vibration amplitude damping, the damping is only the size of the input voltage threshold related to the greater damping, the greater the minimum value of the input voltage;

[0020] 2、陀螺仪带宽增大,使陀螺仪的稳定性大大增强; [0020] 2, gyroscope-bandwidth increases, the stability of the gyroscope is greatly enhanced;

[0021] 3、陀螺仪的灵敏度大大提高,利用非线性振动获得的振动幅值比直接简谐振动的振幅要大得多; [0021] 3, the gyro sensitivity is greatly improved, the vibration amplitude obtained by nonlinear vibration amplitude than the direct harmonic vibration is much greater;

[0022] 4、陀螺仪的驱动信号的频率是其振动的固有频率的两倍左右,可以减小寄生电容对于检测信号的影响,从而能够减小陀螺仪的噪声,增大陀螺仪的分辨率。 [0022] 4, the driving frequency of the gyro signal is about twice the natural frequency of the vibration can be reduced capacitance parasitic to the detection signal, whereby the noise can be reduced gyroscope, increasing the resolution of the gyroscope .

附图说明 Brief Description

[0023] 通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显: [0023] The detailed description is read with reference to non-limiting embodiments given with the following drawings, other features of the invention, objects and advantages will become more apparent:

[0024] 图1为本实施例立体结构示意图; [0024] Figure 1 is a schematic view of a embodiment;

[0025] 图2为本实施例平面结构示意图; [0025] FIG. 2 a schematic diagram of the present embodiment of a planar structure;

[0026] 图3为本实施例非交叉梳齿静电驱动电极的结构示意图; [0026] FIG. 3 configuration example of a non-schematic cross electrostatic comb drive electrodes of the present embodiment;

[0027] 图4为本实施例交叉梳齿平行板检测电极的结构剖面图; [0027] FIG. 4 cross-comb parallel plate electrodes to detect cross-sectional view of the structure of the present embodiment;

[0028] 图中:1为圆盘形基体,2为驱动电极,3为检测电极,4为U型梁。 [0028] Fig: 1 is a disc-shaped substrate, 2 is a driving electrode, detection electrode 3, 4 is a U-shaped beam.

具体实施方式 DETAILED DESCRIPTION

[0029] 下面结合具体实施例对本发明进行详细说明。 [0029] In the following with reference to specific embodiments of the present invention will be described in detail. 以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。 The following examples will help to those skilled in the art to further understanding of the present invention, but without limiting the invention in any way. 应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进。 It should be noted that one of ordinary skill in the art, in the present invention without departing from the idea of the premise, you can also make a number of modifications and improvements. 这些都属于本发明的保护范围。 These all belong to the scope of the present invention.

[0030] 如图1所示,本实施例提供一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,包括: [0030] As shown in Figure 1, the present embodiment provides an electrostatic driven parametric excitation micromechanical gyroscope solid fluctuation disc, comprising:

[0031] 一个圆盘形基体I; [0031] A disc-shaped base I;

[0032] 四个非交叉梳齿静电驱动电极2 ; [0032] The four non-intersecting electrostatic comb drive electrode 2;

[0033] 四个交叉梳齿平行板检测电极3 ; [0033] detection of four cross-comb parallel plate electrodes 3;

[0034] 八个U型梁4 ; [0034] eight U-4;

[0035] 其中,四个驱动电极2和四个检测电极3分别沿圆盘形基体I外环边缘均匀交替配置,四个驱动电极2和四个检测电极3的末端均设有一个起固定支撑作用的U型梁4。 [0035] wherein four drive electrodes 2 and 3 even four detection electrodes are alternately arranged along the disk-shaped substrate I outer edge, two-terminal and four detection electrode 3 has a four drive electrode from the fixed support the role of U-beam 4.

[0036] 本实施例中,所述圆盘形基体I的材料为单晶硅,其上均匀配置驱动电极2和检测电极3的一个梳齿,其中:在驱动电极2结构中,圆盘形基体I上对应的梳齿电极与另外两侧的电极构成非交叉梳齿结构;在检测电极3结构中,圆盘形基体I上对应的梳齿电极与另外两侧的电极构成交叉梳齿平行板结构(如图1所示)。 [0036] In this embodiment, the disc-shaped base material I is single crystal silicon, a uniform configuration driving comb electrodes 2 and 3 on which the detection electrode, wherein: the structure of the driving electrode 2, a disc-shaped I comb electrodes on the corresponding substrate and additional electrodes on both sides of constituting a non-cross-comb structure; 3 detection electrode structure, cross comb parallel comb electrodes constituting the corresponding disc-shaped substrate I and the other two sides of the electrode plate structure (Figure 1).

[0037] 本实施例中,所述驱动电极2材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极。 [0037] In this embodiment, the driving electrodes 2 made of single-crystal silicon, a layer of metal deposited thereon to form the desired electrode or ion doping mode. 驱动电极2采用静电驱动方式,具体来说,是利用边缘场效应产生圆盘形基体I在驱动模态的振动,其结构为非交叉梳齿结构(如图2所示)。 Electrostatic driving electrode drive mode 2, specifically, the use of the edge field effect generated in the disc-shaped base I drive mode vibration, the structure is non-cross-comb structure (Figure 2).

[0038] 本实施例中,所述检测电极3材料为单晶硅,其上沉积有一层金属或者采用离子掺杂方式形成所需电极。 [0038] In this embodiment, the sensing electrode 3 made of single-crystal silicon, on which is deposited a layer of metal or formed by ion doping desired electrode. 检测电极3利用电容感应效应进行检测,其结构为交叉梳齿平行板结构(如图3所示)。 3 a capacitance detecting electrode for detecting induction effect, having the structure cross-comb parallel plate structure (Figure 3).

[0039] 本实施例中,所述U型梁4结构位于驱动电极2和检测电极3的末端,其材料为单晶硅,起固定、支撑圆盘形基体I的作用。 Example [0039] In the present, the structure of the U-shaped beam 4 at the end of the driving electrodes 2 and the detection electrode 3, the material is single crystal silicon, from the fixed, disc-shaped substrate I supporting role.

[0040] 本实施例中,四个所述驱动电极2中的两个相对的驱动电极被施加交流电压时,由边缘场效应产生圆盘形基体I在驱动模态的振动;当存在输入角速度时,圆盘形基体I的振型向检测模态转变,利用检测电极3处电容感应效应产生的敏感电信号进行信号检测;上述驱动模态和检测模态互相匹配。 When there is the input angular velocity; [0040] In this embodiment, two of the four the drive electrode 2 relative drive electrode is applied AC voltage generated by the edge of a field-effect modal vibration disk-shaped substrate I drive When the disc-shaped substrate I of modal shift to the detection mode, using the detection electrode 3 sensitive capacitive sensing electrical signals generated by the signal detection effect; the driving mode and test mode match.

[0041] 本发明利用参数激励的方式驱动圆盘形基体I振动,其驱动模态和检测模态互相匹配。 Invention utilizes parametric excitation mode [0041] The disk-shaped substrate I drive vibration, the drive mode and test mode match. 当四个所述驱动电极2中的两个相对的驱动电极2被施加交流电压时,由边缘场效应产生圆盘形基体I在驱动模态的振动;当有垂直于圆盘形基体I底部的角速度输入时,在科氏力作用下,圆盘形基体I的谐振方式会从驱动模态向检测模态变化;通过检测圆盘形基体I交叉梳齿平行板电极间的感应电容的变化,就可检测垂直于圆盘形基体I底部平面的角速度大小。 When two of the four drive electrodes 2 in the opposing electrode 2 is applied to the driving AC voltage, field effect produced by the edge of the vibration modes in the disc-shaped substrate I drive; when there are normal to the disc-shaped base substrate I when the angular velocity input at the Coriolis force, the disc-shaped substrate I of resonant modes will change from driving mode to detect; a disc-shaped substrate by detecting changes induced cross I comb parallel plate capacitor electrodes , it can detect angular velocity perpendicular to the disk-shaped substrate size I bottom plane.

[0042] 本实施例所述的一种静电驱动式参数激励的微机械固体波动盘形陀螺仪,使用单晶硅基体,采用硅体加工工艺,通过在对应的单晶硅梳齿上沉积一层金属或者采用离子掺杂方式形成所需要的驱动电极和检测电极;最后,为盘形谐振子焊接外围电路以及进行最终的封装得到陀螺芯片成品。 [0042] The present an electrostatic driven parametric excitation micromechanical gyroscope solid fluctuation disc, using the single-crystal silicon substrate embodiment, using bulk silicon process, by corresponding single-crystal silicon is deposited on a comb metal or doped layer formed by ion drive electrode and the detection electrode needed; and finally, for the disk-shaped resonator welding peripheral circuit and a final package to get the gyro chip products.

[0043] 以上对本发明的具体实施例进行了描述。 [0043] or more specific embodiments of the present invention will be described. 需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变形或修改,这并不影响本发明的实质内容。 To be understood that the invention is not limited to the specific embodiments, those skilled in the art can make various changes and modifications within the scope of the claims, this does not affect the substance of the present invention.

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Patente citante Fecha de presentación Fecha de publicación Solicitante Título
CN104457726A *27 Nov 201425 Mar 2015歌尔声学股份有限公司Three-axis micro-electromechanical gyroscope
CN104457726B *27 Nov 20144 Jul 2017歌尔股份有限公司一种三轴微机电陀螺仪
Clasificaciones
Clasificación internacionalG01C19/56
Clasificación cooperativaG01C19/5677
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28 May 2014C06Publication
25 Jun 2014C10Entry into substantive examination